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X l b mt

Bi m u

I. Vai tr ca b mt: Hu ht cc chi tit my: Trc; Bnh rng; Vng bi = > gm 2 phn chu tc dng ca mi trng rt khc nhau: - Phn b mt: Mi mn; n mn, Nt mi; ng sut ln nht. - Phn nn: ng sut cn thit. => Vai tr ca b mt: V cng quan trng-Quyt inh kh nng lm vic ca chi tit my Cng ngh x l b mt l cng ngh x l vt liu v cc chi tit my nhm to ra mt vt liu lin kt trn b mt c tnh cht tng hp uc c tnh cht ca vt liu nn v vt liu b mt. Tnh u vit: - Tng tnh cht s dng ca vt liu - Tng tin cy ca chi tit my - Tng tui th ca chi tit my - Cho php s dng cc vt liu kinh t hn (hp kim ho b mt) - Ti u ho cc tnh cht s dng ca chi tit my

Lch s pht trin: Thi c i: Con ngui bit X l b mt - Chng thm cho g bng nha thng, hc n. - trang sc: st ph km - u th k 12: Thm Cc bon-Nit cho mi tn, kim... Cui th k 20 pht trin vt bc: Cng ngh b mt Cng ngh cha kho Tit kim vt liu Tit kim nng lng V sinh mi trng ( Cng ngh b mt => Vi in t, Quang hoc) ngha kinh t: Tn tht do n mn v mi mn 3-4% GDP ; BRD 1980 => 60 t DM X l b mt => gim 1/2 tn tht Zu th pht trin: Tip tc pht trin mnh vi cng ngh tin tin hn Ni dung mn hc: 10 chng (30tit) Lm sch b mt, Ha nhit luyn, CVD, PVD, Phun ph kim loi XL bng tia nng lung cao; Phng php in ho, ho hc. Ti liu tham kho: X l b mt, HBK, Nguyn Vn T, 1999

Hin trng v hng pht trin cng ngh b mt USA


124 cng ty c kh Phng php 2001 Thm C kh Thm N kh
Thm C th lng Thm N th lng

19 cng ty t 2001 16/84,2 4/21,1


1/ 5,3 1/ 5,3

2015 20/16,1 12/9,6


-

2015 3/15,8 1/5,3


-

86/69,3 35/26,2
9/7,2 16/12,9

Thm C lp si Thm N lp si Thm C chn khg Thm N chn khg Thm C plasma Thm N plasma Ti cm ng Laser Tia in t CVD PVD

4/4,0 6/4,8 7/5.6 3/2,4 9/7,2 75/60,5 7/5,6 6/4,8 8/6,4 4/3,2

12/9,6 13/10,5 13/10,5 8/6,5 19/15,3 14/11,2 25/20,1 27/21,8 10/8,0 12/9,7 6/4,8

2/10,5 15/76,9 4/21.4 1/5,3 1/5,3 -

1/5,3 1/5,3 1/5,3 1/5,3 5/26,3 3/15,8 6/31,5 4/21,4 5/26,3 -

Chng I: Cu trc v tnh cht ca b mt I. Cu trc b mt: Phn nn: Mi lin kt vi cc nguyn t xung quanh ng u => Cc nguyn t nm v tr cn bng - nt mng => C cu trc tinh th. Phn b mt: Mi lin kt ng u xung quanh b ph v - Cc nguyn t nm lch khi v tr cn bng => mt dng sai lch mt c im b mt: - C hot tnh cao => Nng lng b mt - Khng bng phng => nhp nh, bng II. S hp ph: B mt <=> Mi trng => Mt s nguyn t l inh c: O2, Du m, Bi... => Hoat tnh gim Qu trnh hp ph l qu trnh hnh thnh v pht trin mt lp nguyn t l nh c trn b mt vt liu. Qu trnh hp ph c ngha ln: n mn kim loi, x l b mt, xc tc, xy ho... - Hp ph vt l: Khng c trao i electron, lin kt n thun l lc Vander Waals - Hp ph ho hoc: Gia on u to thnh hp cht ho hc C trao i electron

III. Tnh cht s dng ca b mt: Ti trng tc dng khc nhau => dng hng khc nhau => yu cu v tnh cht s dng ca lp b mt + Mn ma st: HRC cao, do tt (pha cng trn nn ho bn) + Mn dnh: T chc pha khc nhau; T chc khng ng nht. + Mi tip xc: bn cao, do tt, ng sut d nn b mt. + Mi th tch: bn cao, do tt, ng sut d nn b mt. + Mi nht: bn nhit cao + n mn: Cc pha ng nht, xt cht, c bn n mn cao. Trong thc t khi lm vic cc chi tit my chi ti trng t hp => Tnh cht s dng rt a dng

Ti trng t hp ln b mt ca chi tit my


Chi tit my
Mn ma st Mn dnh

Ti trng tc dng
Mi tip xc Mi th tch Mi nhit Chy

ln
Bnh rng Dng c ct Khun dp nng Thanh trt con trt

+
+ ++ + ++

+
++ ++ + ++

++
++ + + + + + + + ++ + + +

Truc khuu

++

++

Chng II: lm sch b mt (cng ngh tin x l )

Lm sch cc phn t l bm trn b mt ca vt liu hoc chi tit my nhm phc hi hot tnh ca b mt chun b cho cng ngh x l b mt tip theo. Cc cht cn lm sch: - Cc cht v c: Cc lp xt (nhm), han r (st, thp)... - Cc cht hu c: Du, m, bi... => Rt quan trng v tn km I. Lm sch bng phng php ho hc: 1. Lm sch du m a/ Lm sch bng cc cht ho tan du m: - Cc dung mi hu c, xng... - C th phun, bn chi; sch thp => 1 khu lm sch trung gian. b/ Lm sch bng cht trung tnh: - Dung mi + To bt + Cht c ch - C th phun, bn chi; sch thp => 1 khu lm sch trung gian.

c/ Lm sch bng dung dch kim (ph bin): + Cc qu trnh xy ra khi lm sch: i) Qu trnh ho hc: Phn ng x phng ho (RCOO)3C3H5 (khng tan)+ 3 NaOH => 3RCOONa (tan)+ C3H5 (OH)3 (tan) ii) Qu trnh ho l: Du m +Cht hot ng b mt (cht to bt) = Nh tng iii) Qu trnh c hc: Khy trn lm sch cc cht bn khng c ngun gc du m + Cc phng php lm sch bng dung dch kim: i) Lm sch bng dung dch kim yu: - Cc mui kim ccbonat, silicat, pht phat + cht c ch + Cht to bt - pH= 9-10 - Phng php x l: Nhng (phun) trong dung dch lng; T= 30-800C; Ra sy. - sach m bo: Ti, ho nhit luyn ii) Lm sch bng dung dch kim mnh: - Cc loi xt NaOH, KOH + To bt + Cht c ch => Cc sn phm i hi sch cao

2. Lm sch lp xyt: a/ Lm sch trong kim mnh: - NaOH (200g/l) + cht to phc + To bt + Cht c ch - Dung dich c T= 40 -900C b/ Lm sach trong axit: - NaH2PO4 + cht to phc + To bt + Cht c ch - H2SO4 + cht to phc + To bt + Cht c ch

II. Lm sch bng phng php c hc: Ch yu lm sch cc lp ph cc hp cht v c nh han r, lp xyt. 1/ Phun ct (hoc bi kim loi): Khi phun di p sut cao cc ht mi ( ct, bi kim koi) s bn vo b mt kim loi vi tc cao v lm sch b mt. C 2 phng php: - Phun ct kh: khng cn sy, nhim mi trng - Phun ct t : Trnh nhim, sy kh 2/ X l siu m: Trong mi trng lng c cc ht mi dao ng do sng siu m => lm sch b mt (siu sach). 3/ X l bng tia nc p sut cao: Sng phun: 6-7mm, p sut P= 75 at V sinh mi trng (x l tu thu) 4/ Ba, bn chi: thng gp, nng sut thp,cht lng thp

Chng III: Cng ngh x

l ha nhit

I. Mt s khi nim 1. nh ngha v mc ch: - nh ngha: Cng ngh x l ha nhit (Ha nhit luyn) l phng php nh tc ng ca nhit v thnh phn ca mi trng lm thay i thnh phn ho hc v t chc ca lp vt liu b mt, do d lm thay i tnh cht ca vt liu theo mun. - Mc ch: + Nng cao cng, tnh chng mi mn, v bn mi ca b mt thp + Nng cao bn n mn in ha ( thm Nit) v ha hc ( thm Crm...) + Nn kim loi c bn, d do dai m bo 2. Cc qu trnh xy ra khi thm Gm 3 giai on ni tip nhau: - Phn ho: Qa trnh phn tch cc nguyn t, to nguyn t hot ca nguyn t thm - Hp ph: Qa trnh cc nguyn t hot c hp ph vo b mt thp, to ra s chnh lch nng gia b mt v li. - Khuych tn: Qu trnh khuych tn cc nguyn t hot lp hp ph i su vo bn trong theo c ch khuyc tn to nn lp thm c chiu su nht nh. Qu trnh khuych tn quan trng nht => s hnh thnh lp thm

S biu din qa trnh thm theo 3 giai don: 1: Phn hu to nguyn t hot 2: Hp ph vo b mt thp 3: Khuych tn vo kim loi
a1 a1 a2 a3 a4
a

Kh B mt a3 Kim loi a4
a

a2

nng

nng

Thc t

Tnh ton

3. nh hng ca nhit , thi gian - Nhit : T tng => D tng theo hm m => Chiu su lp thm tng theo hm m D = A.e-(Q / KT) - Thi gian: t tng => Chiu su lp thm tng (chm hn) X = k ( t )1/2 4. Mi trng thm: Mi trng c kh nng to ra nguyn t hat ca nguyn t cn thm vo b mt. Gm 3 thnh phn: - Cht thm: L cht cha nguyn t cn thm Dng: Nguyn cht: S; Hp cht: NH3, Trng thi: Rn (than), Lng (mui nng chy), Kh (NH3,, CH4), Plasma(N2) Vai tr: Cht thm chnh (NH3) , ph(S, O2) - Cht ph ga: To ra mi trng thm thch hp, tit kim (H2) - Cht xc tc: Cng ho qu trnh thm: + Thc y qu trnh phn ho (BaCO3), + Tng cng kh nng hp ph (O2), + Tng tc khuyc tn (thm s b Zn) 5.. Cc phng php x l ho nhit - Thm cc nguyn t kim: Ccbon, Nit, thm Bo, Si ... - Thm cc nguyn t kim loi: Cr, Ni, Al, Zn.... - Thm n nguyn t (C) v thm a nguyn t (C-N-S; C-N-S-O)

II. Thm Cc bon


1. Mc ch yu cu: a. nh ngha: - Thm Cc bon l phng php x l ho nhit => lm giu nguyn t cc bon b mt ca thp cc bon thp. - Sau khi thm: ti + ram thp => B mt c HRC cao; Li c bn tt, do dai. b. Yu cu: - B mt: Hm lng C b mt 0,8 -1,0 %, sau khi ti t HRC = 60-64, T chc Mactenxit ram + cc bt nh mn. - Nn kim loi: T chc mactenxit nh mn, HRC = 30-40: bn tt, do tt - Chu ti trng va p v chu mi mn. 2. Cc c trng ca lp thm cc bon a. Thnh phn v t chc t vi - Thnh phn: + B mt: %C cao nht; %C =0,8 -1,0 vo su gim dn + Nn: %C = 0,1 0,25 - T chc: + T b mt vao nn thp(nh t vi):
P + XeII ; P: P + F; F + P =Thp sau C/T; Thp C/T; Thp trc C/T (%C cao, trg bnh; thp)

T chc t vi lp thm cc bon

P + XeII

P+F

F+P

b. Phn b nng , cng v chiu su lp thm: + Phn b cng b mt tng ng vi phn b nng + Chiu su lp thm cc bon l chiu dy ca lp c cng ln hn 500 HV10 ( Sau khi ti v ram thp)

0,8-1,0%C

cng b mt 60 65 HRC

%C

HRC

500 HV10 %C Nn 0,1-0,25%


cng li

B mt

Nn kim loi

B mt

Chiu su lp thm

Nn kim loi

3. Thp thm cc bon: a.Thp Cc bon: C10, C15, C20, C25; Ch to cc chi tit nh khng quan trng, chi mi mn, ti trng khng cao b. Thp hp kim Crm: 15Cr, 20Cr; Ch to cc chi tit chu ti trung bnh, chu mi mn nh cht pitong, trc cam, bnh rng nh... c. Thp Crm Niken: 20CrNi, 12CrNi3A, 12Cr2Ni4A:Ch to cc chi tit c bn cao, va p tt,quan trng nh bnh rng trc ng c my bay... d. Thp Crm-Mangan-Titan: 18CrMnTi, 20CrMnTi (thp b/c ht nh; Tthm= 930-950 0C): Ch to cc chi tit quan trng. 4. Nhit v thi gian thm: T = 880 950 0C; thi gian => tuy thuc T v chiu su lp thm T =900 0C: Th rn: 0,1mm/h: Th lng:0,15mm/h

5. Cc phng php thm cc bon: 1. Thm cc bon th rn: Than g (80-90%) + Cht xc tc BaCO3(10-20%) BaCO3 + C => BaO +2CO; 2CO => CO2 + Cngt 2. Thm Cc bon th lng: Me2CO3 (80%) + SiC (8%) + NaCl SiC => Si + Cngt ; Si + Me2CO3 => Me2SiO3 + Cngt 3. Thm cc bon th kh: a) Hn hp thm: CO, CO2, CH4, H2O, N2, C3H8 , H2 ( kh t, du ho) (10-20) %CO + (50-70)% H2 + (1-10)%CnH2n + 1% CO2 (sn phm phn hu du ho) b) Cc phn ng phn ho: 2CO <=> Cngt + CO2 (phn ng Boudouard) CO + H2O < = > CO2 + H2 (phn ng kh-hi nc) CH4 < => Cngt + 2 H2 (phn ng Metan) CO + H2 < = > C + H2O (p/ Boudouard-khi-hi nc) KB = (P2CO/PCO2).(1/ac) Kw = (PCO.P H2O)/( PCO2. PH2) KM = (P CH4/P2H2)/(1/ac) KBW = Kw / KB

Thc t : Cngt > ac Tnh ton coi : C ngt = ac = Pc => Th thm cc bon

- Pc = ac l nng cn bng ca cc bon trong Austenit nhit thm => Thng s c trng quan trng nht nh gi bung thm (o bng u d) - Kh nng thm ca bung thm ph thuc vo t l CO: CO2; H2O:CO:H2
6. Nhit luyn sau khi thm

a) Ti trc tip: - Sau khi thm h nhit xung n 850 8600C v ti trc tip - i vi thp di truyn hat nh (Ti. Mo) => khng cn lm nh ht b) Ti mt ln: - Sau khi thm lm ngui trong khng kh (thng ho - lm nh ht) - Ti nhit 820 - 8500C khi cn cng b mt cao hoc - Ti nhit 860 - 8800C khi cn bn ca nn cao c) Ti hai ln: m bo cht lng b mt v nn (t dng, t ) - Sau khi thm lm ngui trong khng kh (thng ho - lm nh ht) - Ti ln mt nhit 880 - 9000C nng cao bn ca nn v - Ti ln hai nhit 760 - 7800C nng cao cng b mt

7. Thit b thm Cc bon a dng: l ni, l bung, l ging, l lin tc

Thit b thm cc bon dng du ho (vit nam)

III. Thm Ni t
I. Mc ch yu cu: 1. nh ngha: - Thm ni t l phng php x l ho nhit => lm khuyc tn nguyn t ni t vo b mt ca cc sn phm t st, thp. 2. Mc ch: - Nng cao kh nng chng mi mn - Nng cao bn mi - bn n mn cao 3. Tnh u vit - Nhit thm thp 450-5900C - Khng cong vnh, nt n (US nhit nh, khng chuyn bin pha) - Khng cn x l nhit sau khi thm(bn cht lp thm c cng cao) - Tit kim nng lng - Hiu qu kinh t cao

II. c trng cu trc v tnh cht ca lp thm nit: 1. T chc lp thm: C s xc nh t chc lp thm l gin Fe N (hnh 1) Lp thm Ni t gm 2 lp (th thm ni t ln): (hnh 2) - Lp hp cht ho hc - Lp khuych tn a, Lp hp cht ho hc (3 -20 m): - -nitrid Fe2 N: Pha xen k (nm pha ngoi), mng lc gic xp cht - - nitrid Fe4N: Pha xen k (nm pha trong), mng lp phng din tm - Cc bt hp kim, Nitrid hp kim (ph thuc thnh phn ho hc ca thp) - Vng giu -nitrid thng c nhiu l r mc khc nhau
Lp hp cht ho hoc ( +

+ )
+

Lp khuych tn

Hnh 2

Gin trng thi Fe -N

700

600 + 500

5910C +

400 Fe 4% 8% 12%

Mt s sn phm thm ni t

b, Lp khuyc tn: - Thp cc bon: Khi lm ngui chm, t chc lp khuych tn ca thp cc bon l dung dich rn - Fe (N) v cc pha hnh kim ca - Fe4N. Khi lm ngui nhanh cc pha ny bin mt (hnh 3). - Trong thp hp kim: Khng xut hin cc pha hnh kim - Fe4N m xut hin cc ht nitrid hp kim nh mn (trong thp Cr: CrN, Cr2N )

Lp khuych tn

- Fe4N hnh kim Hnh 3

c, Phn b cng trong lp khuych tn v chiu su lp thm - Phn b cng trong lp khuych tn ph thuc vo hm lng nguyn t to nitrid hp kim (Cr, V, Ti, Al...); Hm lng nguyn t to nitrid tng => HV tng - Chiu su lp thm ni t bng chiu su ca lp c cng ln hn HVn +50 HV
cng b mt HVbm

HV:100

HV HVn + 50 HV

cng nn HVn

B mt Chiu su lp thm

Nn KL

2. Tnh cht lp thm ni t: - Chng mi mn ( cng cao: > 1000 HV) - bn mi tt (ng sut d nn: -300MPa) - Chng n mn tt (lp hp cht b mt:pha , ) => S dng rng ri trong cng nghip III. Thp thm ni t: Hu ht cc loi thp u c th thm ni t
VT LIU Thp thm Nit Thp thm C Thp ho tt Thp khun ngui
Thp khun nng

MC THP 35CrAl 20CrMnTi C45; 40CrNiMo 100Cr12M


30Cr2W8

mAI mn + + + +
+

Bn mi + + + 0
+

Bn n mn + + + +
+

Cng nng + + + +
+

Thp khng r Thp gi


Thp xy dng

08Cr18Ni9 P18
CT38

+ +
+

+ 0
+

+ (-) 0
+

0 +
-

IV. Cc phng php thm ni t


Rn, Lng, Kh, Plasma 1. Cng ngh thm Ni t th rn: t s dng 2. Cng ngh thm Ni t th Lng a. Cng ngh thm ni t c: - Hn hp thm: Me2CO3 + MeCN (25 40%) - Nhit thm: 560 5800C - Cung cp xy - Bo dng b thm; + Loi b mt phn mui s dng cha MeCN (ph thi) + B sung MeCN - Phn ng to Nit ng/t: 2MeCN + 02 = MeCNO (1) 2MeCNO + 1/202 = Me2CO3 + C + 2N (2) MeCN: - Tnh c cao - nh hng v sinh mi trng

Nguyn l lm vic ca b thm theo cng ngh c

Ly bt mui c dng

B sung MeCN

MeCN MeCN MeCNO Me2CO3


B thm mi

MeCNO

MeCN
MeCNO

MeCN
MeCNO

MeCN
MeCNO

Me2CO3
Sau khi s dng Ph thI cha MeCN

Me2CO3
Sau khi ly Ph thi

Me2CO3
sau khi b sung MeCN

b, Cng ngh thm ni t mi - Nitarid - Hn hp thm c s: CS II (Me2CO3 + 30-40% MeCNO)

- Nhit thm: 560 5800C - Cung cp xy - Cht ti sinh: TS III (mui khng c cha H,C,N) - Hn hp thm b sung: CS III (Me2CO3 + 35-40% MeCNO) - Phn ng to Ni t ng/t: 2MeCNO + 1/202 = Me2CO3 + C + 2N (2) - Phn ng hon nguyn Me2CO3 + TSIII = 2MeCNO (3) u vit: + Khng s dung mui c MeCN (CSII, CSIII)
+ Khng c mui ph thi do s dung cht tI sinh (TSIII )

Nguyn l lm vic ca Nitarid Cng ngh khng ph thi


X l ti sinh TSIII B sung cht thm CSIII

MeCNO MeCNO Me2CO3

MeCNO Me2CO3
Me2CO3

MeCNO Me2CO3

B thm mi

Sau khi s dng

Sau khi x l TSIII

Sau khi b sung CSIII

c. Ch thm Ni t theo cng ngh NITARID

nhit (0C) 5800C; 60 -180ph


B OX-1

200-3000C;10-30ph du, n-c, KK

300 -4000C; 15-60ph 140 0C; 30-60ph

thi gian (ph)

d. Nhn xt:
- Nh s dng hn hp thm chuyn dng CSII, CSIII, v cht ti sinh TSIII, Nitarid tr thnh cng ngh khng ph thi, m bo v sinh mi trng. - Thit b thm n gin, tin cy cao, gi thnh r, thch hp quy m sn xut hin nay v c kh nng nng cp t ng ho cho nhng nm ti. - Cng ngh x l b mt sau khi thm rt a dng, c kh nng ng dng rng trong cng nghip.

3. Thm nit th kh a, Cng ngh thm Ni t th kh truyn thng: - Nhit v thi gian thm: T = 490 590 0C; t = 10 100 h - Hn hp thm: (100 50%) NH3 + ( 0 50%) N2 - Qu trnh xy ra khi thm: NH3 => [N]Fe + 3/2H2 Theo Bohmer c th tnh hm lng Nit trong b mt ca Fe [N]Fe = (PNH3/PH2).8,93.104exp[ - 82240/RT] (% Khi lng) - - Fe4N c to thnh khi: PNH3/PH2 > 1,266.10-3exp(34850/RT) - -nitrid Fe2 N c tao thnh khi PNH3/PH2 > 2,33.10-4exp(58400/RT) b, Thm Nit -xy:(1- 40h) - Hn hp thm: (95 65%)NH3 + N2 + (1-5%)O2 hoc (10- 35%)hi H2O c. Thm cc bon nit nhit thp:(1 - 40h) - Hn hp thm: (80 -99%) NH3 + (1 - 20%)CO2 hoc CH4

Mi trng thm

Sn phm

S m t qu trnh thm ni t th kh

4. Thm ni t ion ho: - Nhit v thi gian thm: T = 350 590 0C; t = 0,25 48 h - Nguyn tc: + p sut thp P = 10 -2 10 -3 bar + in th cao U = 300 1200 V - Hn hp thm: NH3 + N2 hoc CH4 - u nhc im: + Hiu qu thm cao, c th dng Ni t v Hydro dm bo v sinh mi trng +Tiu th nng lng thp, cht lng n nh + Thit b t tin, Hiu ng in => Lp thm khng u

Tng l

Sn phm

S m t qu trnh thm ni t Plasma

S cung cp hn hp thm

NH3 + N2 + KK

V. Thit b thm Ni t

Chng IV: Cng ngh CVD ( Chemical Vapour Deposition ) I. C s chung: 1. nh ngha: CVD l cng ngh to lp ph trn b mt cc chi tit my nung nng t hi ca cc hp cht cha kim loi (d bay hi) do cc phn ng ho nhit. - Cc hp cht cha kim loi d bay hi c tao thnh t: + kim nhm halogen ( F, Cl, Br, I) + Kim loi chuyn tip nhm IV (Ti, Zr); nhm V(V, Nb, Ta); nhm VI (Cr,Mo, W) V d: TiCl4, WF6... - Nhit : 200 -10000C (khng dng cc tia kch hot) 2. Nguyn l lm vic:
Khuych tn hp cht cha kim loi Hp ph Phn ng Khuyc tn sn phm phn ng Kh hp ph

Sn phm S nguyn l lm vic ca CVD

3.Cc phn ng xy ra trn b mt: Gm 2 nhm phn ng: - Phn ng to nguyn t hot (W, Ti, C, N...) - Phn ng to lp ph ( WC, TiN...) Gm 3 loi phn ng: - Phn ng kh (hon nguyn): WF6 + 3H2 => W + 6HF - Phn ng phn hu: Ni(CO)4 => Ni + 4CO - Phn ng trao i: CrCl3 + Fe => Cr + FeCl3 TiCl4 + CH4 => TiC + 4HCl 4. Cc yu t nh hng n lp ph: a) Cc yu t nh hng n cc gii on c bn: - C ch tng tc ca phn ng ho hc gia cc cht vi b mt thp. - C ch khuych tn trong pha kh - C ch khuych tn trong pha rn b) Cc yu t nh hng c th: - Thnh phn, t chc, trng thi b mt sn phm - Hot tnh ca b mt sn phm (mc lm sch) - Mt sp xp cac sn phm trong thit b CVD.

- Nhit , p sut bung phn ng - Thi gian x l CVD - Thnh phn,lu lng v s phn b cc kh tham gia qu trnh x l. - Cc cht xc tc cng ha qu trnh ph. II. Phn loi CVD 1.Theo c im mi trng: - CVD mi trng tnh - CVD mi trng ng 2. Da vo yu t kch thch: - CVD khng kch thch - CVD c kch thch 3. Da vo nhit lm vic - CVD nhit cao 850 -1100oC (HT) - CVD nhit trung bnh 600 850oC (MT) - CVD nhit thp < 600oC (LT)

4. Da vo p sut: - CVD p sut cao (HP) - CVD p sut thp (LP) 5. Da vo tc nhn kch thch: - CVD kch thch bng Plasma (PACVD) - CVD kch thch bng Laser (LACVD) 6. Da vo bn cht hi hp cht cha kim loi: - S dng hi hot tnh l hp cht Halogen-kim loi (CVD thng dng) - S dng hi hot tnh l hp cht hu c - kim loi (MOCVD) III. Thnh phn v cu trc lp ph 1.Thnh phn: CVD to dc cc lp ph rt a dng a) Kim loi: Cu, Al, Ti, Ge, Pb, Mo, W, Pt, Ni, Co... b) Grafit v cc bit: C, SiC, WC, TiC, ZrC... c) Nitrid: TiN, BN, ZrN, TaN... d) Silic v hp cht: Si, Si-(Ti, Mo, Nb...) e) xyt: Al2O3, SiO2, TiO2

2. Cu trc lp ph: - Cu trc lp ph ph thuc vo nhiu yu t: Nhit , p sut, thnh phn, thi gian, vt liu... - Thnh phn lp ph lch vi cng thc: TiC => TiCx ( X=/= 1). - Chiu dy lp ph t vi nm (trong kt in t) => mm (trong c kh). - Chiu dy tng: 2-5 m/h - dnh bm ca CVD m bo ( trong 1 s trng hp c lp ph trung gian). - C th ph ng thi nhiu cht hoc nhiu lp.

IV. Mt s cng ngh CVD thng dng 1. CVD mi trng tnh: CVD mi trng tnh = X l ho nhit th rn V d=> thm Al th rn - Hn hp thm: Al 20-40% + CrF2 0,5 -5% + Al2O3 (cht n) - T= 800 -9500C - Phn ng xy ra khi x l: Al + CrF2 => Cr + 2 AlF (bay hi) 3 AlF => AlF3 + 2 Alht => B mt sn phm

Hn hp thm

Sn phm

2. CVD mi trng ng: a) CVD truyn thng: - p sut kh quyn - Cc cht hot tnh, xc tc, ph gia cp lin tc - Lp ph a dng: Si, SiC, SiO2, TiN - Thit b n gin, nng sut cao, khng ng u b. CVD p sut thp (Low Pressure CVD)( LPCVD): - p sut <1mmHg - Lp thm ng u, cht lng cao - Nng cao hiu sut mi trng ph (40%) - Ch to cc vi mch in t, lp ph chng mi mn ,n mn

S cu to thit b LPCVD ph TiC

3. Cng ngh Plasma-CVD; Plasma Assist CVD (PAVCD): Cng ngh CVD c h tr = mi trng ion ho (t mi trng trong t trng). - Trong mi trng Plasma hoat tnh ca hi hot tnh cao hn => Gim nhit x l (m bo nng sut cao). - Thc y cc phn ng kh xy ra => Da dng ho v nng cao cht lng lp ph
Kh hoat tnh Kh thi

Sn phm

in cc

4. Cng ngh Laser-CVD; Laser Assist CVD (LACVD): Cng ngh CVD c h tr kch hot bng tia Laser - Nung nng cc b ni cn ph Kh hoat tnh - Nng cao cht lng lp ph - B mt KL c th nng chy cc b

Tia Laser

Sn phm

Kh thi

5. Cng ngh ph MOCVD ( Metallo Oganic Chemical Vapour Deposition): a) Nguyn l: - MOCVD l cng ngh ph c cht hot tnh l hi ca hp cht hu c ca kim loi c cng thc Me-Rn (Me nguyn t kim loi; Rn cc gc hu c) - MO c lin kt khng vng, d to thnh nguyn t hot nhit thp b) u nhc im ca MOCVD: + u im: - Lin kt Me-Rn da dng, Phong ph v chng loi => Lp ph c thnh phn v tnh cht khc nhau: Ti(N(CH3)2)4 => TiN + kh phn hu (2500C) Ti(OCH(CH3)2)4 => TiO2 + kh phn hu (3500C) - Ph nhit thp => trnh bin dng, cng ngh n gin hn Nhc im: Tnh cht ca MO khng n nh, Gi thnh cn cao, Kh mua. c) Cc yu t nh hng: MOCVD rt nhay cm vi thay i p sut v nhit : Khi p sut , nhit thay i => cu trc v tnh cht lp phu thay i.

Chng V: Cng ngh x l PVD Physical Vapour Deposition

I. C s chung: 1.Nguyn l: Cng ngh PVD l cng ngh x l b mt nh cc tc ng vt l nh: tia in t, ion, h quang, plasma... vo cc qu trnh to lp ph nh: qu trnh ho hi cht ph, qu trnh chuyn cht ph n b mt sn phm, qu trnh ngng t v to thnh lp ph. C th: - Qu trnh ho hi cht ph: in tr, h quang, tia in t, tia laser, h quang... - Qu trnh chuyn cht ph n b mt sn phm: Plasma, t trng, in trng - Qu trnh ngng t v to thnh lp ph: B mt sn phm c x l (lm sch, nung nng... ) - p sut bung lm vic: 10-4 - 5 Pa - Cc sn phm c phn cc catt. => PVD rt da dng v ang tip tc pht trin

2. Thnh phn v cu trc lp ph: 2 a) Thnh phn: Cc lp ph PVD rt da dng: - Kim loi v hp kim: Al, Ti, Cu, Cr, Ni...c chiu dy 0,5 -30 m, c dnh bm tt - Cc bit v Nitrid: TiC, TiN, ZrC, ZrN, WC, WN... ( HRC cao, Tnc cao, chi mi mn...) - xyt: Al2O3, SiO, PbO...(HRC cao, Tnc cao, chi mi mn...) - Cc cht khc: Grafit, MoS2, WS2 ( bi trn tt ); PTFE (cht do) b) Cu trc:

Lp ph TiN

Lp ph Cac bon

II. phn loi cng ngh PVD: 3 1. Theo phng php ho hi v vn chuyn: - Ho hi v ngng t chn khng - Ho hi v ph ion - Ho bi catt v ph ion 2. Theo in th phn cc ca sn phm: - in th phn cc thp khong 20 V: Ho hi chn khng - in th phn cc khong 200 V: BARE (Bias Activated Reactiv Evaporation) - in th phn cc khong 1KV: Ph IP (ionplatting) 3. Theo phng php ho hi cht ph: - Ho hi cht ph nng chy: + Ho trong chn khng + Ho hi trong khi tr + Ho hi trong kh hot tnh khng kich thch (RIP-Reactiv Ion Platting) + Ho hi trong kh hot tnh c kch thch (BARE) - Ho bi cht ph th rn: + Ho bi h quang + Ho bi catt (Sputtering): Bn ph catt (cht ph ) bng tia Ion

III. Cc cng ngh PVD 1. Cng ngh ho hi v ngng t kim loi trong chn khng: Ra i sm, thit b n gin, cht lng lp ph khng cao a) Cng ngh ho hi v ngng t trc tip:
Sn phm ph

Hi kim loi

e Sng electron Cun dy cm ng

Kim loi nng chy

- Nguyn l: + Ho hi kim loi bng nhit: Dng in tr, dng cm ng (T nc thp) c h tr chm electron, tia Laser (Tnc cao) + Vn chuyn hi kim loi: Chuyn ng i lu ca hi kim loi p sut khong P = 10-2 Pa (khng c tc ng bn ngoi). + Ngng t: Ngng t t nhin, khp mi ni trong bung kn. - c im: + Nng lng ngng t nh, dnh bm, xt cht khng cao + Hiu sut s dng thp, tc ph chm, mng + Chi tit khng b phn cc, c th ph cc vt liu khng dn in nh: gm, polyme + Cht ph phn ln l cc kim loi d chy: Zn, Al

b) Ho hi hot tnh v ngng t trc tip - Nguyn l: (ci tin phng php ho hi v ngng t) + a vo bung ho hi kim loi cc cht kh hot tnh: Ph Nitrid : kh NH3, N2 Ph Cc bt: kh CH4, Ph xyt: Kh O2 + p sut: 0,01 1 Pa - c im: + Cc lp ph a dng, c th ph cc hp cht cc bt, xyt, nitrid... + Lp ph mng, tc chm. + S dng ch yu trong in t, Quang hc.

c) Cng ngh ho hi hot tnh c kch thch ARE (Activid Reactive Evaporation): 7 i. Nguyn l: + Ho hi cht ph: Dng chm ht mang in c nng lng cao (ion, elechtron) + Vn chuyn cht ph: Cht ph ho hi n chi tit ph trong mi trng kh hot tnh Plasma lnh. - Plasma lnh plasma to thnh do hin tng phng in pht quang trong trong pha kh (kh Argon) c P = 0,1 - 200 Pa cha ion. in t, phn t trung ho c mc ion ho thp (10-7 10-4 ; S mol kh / s ht mang in) c nhit khng cao (300-10000K) - Thay mt phn hoc ton b kh Ar bng kh hot tnh => mi trng kh hot tnh trng thi kch thch. + Ngng t: Trong mi kh hot tnh Plasma lnh cc phn ng gia hi KL, kh, b mt chi tit xy ra mnh lit hn.

ii. c im: 8 + Ph c cc cht ph c nhit nng chy cao + Hi cht ph chuyn qua mi trng Plasma c nng lng cao hn => dnh bm tt + Cc chi tit c th c phn cc vi in th thp (< 20V): tc vn chuyn cc ion cht ph tng => tng dnh bm, tng xit cht, tng chiu dy lp ph iii. Cc phng php to Plasma: - Phng in catt nung. - Phng in pht quang dng 1 chiu. - Phng in pht quang dng cm ng. - Phng in tn s siu m. - Phng in h quang.

2. Cng ngh ho hi kim loi v ph ion (ion platting) 9 a) Cng ngh ion platting (IP): i. Nguyn l: + Ho hi: Kim loi c nung chy bng in tr hoc cm ng, bn ph bng chm e tng cng bay hi. + Vn chuyn cht ph: - Bung ho hi c P = 0,5 -5 Pa(kh Ar) - Chi tit c phn cc catt vi in th 1- 3 KV to Plasma - Hi kim loi b ion ho trong mi trng Plasma v chuyn ti b mt sn phm c gia tc. + Ngng t: - Chi tit t trong t trng v bn ph ion: lm sch v nung nng. - Cc ion kim loi ngng t vi tc cao ii. c im: + Tc ph cao, dnh bm tt, xt cht cao + S dng cho cc tip im, ph cc lp Cr, V, Mo trong c kh + Gi thnh cao, kh sn xut hng lot.

b) Cng ngh RIP ( Reavtiv Ion Platting) Tng t IP trong kh tr Ar c thay th bng kh hot tnh

10

4 + 6 + + + + 1- Chi tit phn cc catt 2- Kim loai nng chy 3- Hi b ion ho 4- Kh vo khi ra 5- Sng electron 6- Bin th 2 5 4 S nguyn l thit b bay hi hot tnh ph ion RIP + + + + + + + 1 + + + 3 +

3. Cng ngh ho hi hot tnh c kch thch ph ion - BARE 11 (Bias Activated Reactiv Evaporation) a) Nguyn l: Tng t ARE trong : Chi tit c phn cc cactt ( <200V) - Phn gia catt ph v sn phm gi l bung to xung ion => cht ph chuyn n b mt c gia tc
1- Chi tit c phn cc catt 2- in cc ph 3- Ni kim loi nng chy 4- Bm kh thi 5- Sng elechtron 6- Np kh hot tnh 7- in cc ph 8- Plasma lnh do e th cp 9- Ion cht ph c/ c gia tc 1 + + + + + + + + 7 6 8

+ +

+ + 9

12

IV. Ho bi catt v ph Ion (thit b trit) 1. Nguyn l: Trong thit b c p sut thp 0,01-1 Pa, cht ph c phn cc 210 KV, sn phm c phn cc t 0,05 1 KV. thc y vic vn chuyn cht ph c thm in cc ph c phn cc 30-50 Vso vi ant to ra in trng ph. + Bc hi cht ph: Cht ph bc hi do s bn ph ca nguyn t kh Ar b ion ho trong mi trng plasma. + Vn chuyn cht ph: hi cht ph b ion ho v chuyn v sn phm do in trng ph v tng tc khi n gn sn phm. + Ngng t: Cc Ion kim loi nhng t vi tc cao.
6 1. Cht ph phn cc ca tt 2. Sn phm phn cc catt 3. A nt 4. Catt nung (ph) 5. Bm chn khng 6. Np kh (Ar, NH3..) 1

chng VI. CNG NGH PHUN PH b mt i. C s chung: 1. Nguyn l: Phun ph b mt l phng php x l b mt bng cch a cc ht vt liu cn ph vo trong dng vt cht c nhit cao v tc cao lm cho chng nng chy hoc lm bin mn v phun ln b mt sn phm nhm to ra mt lp ph c t/c nh mun. 2. c im: - Lin kt gia vt liu ph v b mt sn phm l lin kt c hc. tng dnh bm cn x l nhit tip theo. - Ngun nng lng cch ly vi sn phm, nhit b mt ph khng cao => c th phun ph ln vt liu polyme. - Phun ph c th gm 3 giai on: Nng chy, ng rn v ti. - Tc ngui ln (105107 0/s) => to thnh cc pha khng n nh, vi tinh th... - Do tc dng vt l, ho hoc => thnh phn lp ph khng ging thnh phn b/. - S dng cho cc chi tit phc tp, hoc x l cc b trn chi tit my. - Tit kim vt liu, nng lng.

3. Cc yu t nh hng: (a dng; Phun plasma: 50 yu t nh hng) - Vn tc ht: p sut, lu lng kh, t l bt, c ht, khi lng ring... - Trng thi nng chy, nhit ht: H s truyn nhit gia kh ht, thi gian lu. - Cu trc lp ph: Bn cht kim loi, tc , nhit , v tri vi phun. - Tng tc ho hc gia vi phun, mi trng... - Nhit sn phm: h s truyn nhit ca sn phm, s tn nhit ra mi trng. II. Thnh phn cu trc v tinh cht lp ph: 1. Thnh phn: a dng - Kim loi, hp kim : Fe, Ni, Cr, W, Co... - xyt: Al2O3, TiO2, Cr2O3, ZrO2... - Nitrid: TiN... - Cc bit: WC, TiC... 2. T chc: - T chc c trng l t chc dng sng c cc l xp v tp cht xyt . - Thnh phn, t chc pha ca lp ph khng u, => x l nhit

S hnh thnh lp phun ph nnng chy

T chc lp ph kim loi

T chc lp ph phi kim loii (Al2O3)

3. Tnh cht v phm vi ng dng: - Phun ph b mt c ng dng trong nhiu ngnh cng nghip: + Tng kh nng chi mi mn + Lm thay i tnh cht ho l ca b mt: Chng n mn, dn in... + To ra cc tnh cht c bit: Hp th nh sng, sng in t... + Gim khi lng: ph cc lp cng ln kim loi nh + Phc hi v sa cha cc chi tit my. III. Phn loi: Phun kch n Phun nhit cm ng Nhit nng chy Phun nhit h quang Phun ph BM Phun nhit ngn la Phun Plasma h quang Nhit Plasma Phun Plasma khi Phun Plasma t/s Radio

IV. Cc cng ngh phun ph b mt 1. Cng ngh phun nhit kh t: - Thit b chnh: Sng phun ngon la Kh (C2H2- Propan); Kh xy Vt liu ph (dy, bt) - Nguyn l lm vic: Bt hoc dy vt liu ph c nng chy trong ngn la xy Axetylen (32000C). Cht ph nng chy c kh chy p sut cao hoc kh p sut cao b sung phun ln b mt sn phm. - u im: - Ph cc vt liu c nhit nng chy <30000C - Tc ph nhanh (8-10 kg/h), h s s dng vt liu cao (>95%) - C kh nng ph cc b, khng cn tho lp chi tit. - D thc hin, thit b n gin - Nhc im: - Ch ph cc cht c nhit nng chy khng cao lm - xp lp ph ln (5-25%) cht lng lp ph khng cao - Hiu sut nhit thp, ch t 2-12%

Thit b phun kh t t ng ho

Sng phun nhit kh t bt cht ph

2. Phun nhit h quang: + Thit b chnh: - Sng phun h quang (hp s iu chnh in cc) - My bin p: - 2 Cun dy in cc (vt liu ph) - Kh nn + Nguyn l lm vic: Ngn la h quang pht (40000C) gia 2 dy in cc lm bng vt liu ph lm cho in cc nng chy. Kh p sut cao phun cht ph nng chy ln b mt sn phm. Hp iu chnh in cc duy tr ngn la h quang. + u im: - Nng sut cao: 5-70 kg/h (thp); 10-140 kg/h (km) - Nhit cao => lp ph c dnh bm tt, xt cht hn. + Nhc : - C hin tng chy hao nguyn t hp kim => cht lng gim - Kh s dng cht ph bt

Thit b phun ph nhit h quang

3. Phun ph Plasma: + Thit b chnh: - Sng phun plasma - n p tao h quang n nh - Thit b iu khin: Cng dng, in th, p sut - Thit bcp bt - Thit b cp kh - Nc lm ngui - B phn iu khin sn phm + Nguyn l lm vic: Ngi ta a bt vt liu ph vo dng plasma (3000- 30.0000C) c tao thnh gia catt v ant (c lm ngui bng nc trong sng phun) khi dn lung kh (Ar, He) c p sut cao i qua. Bt cht ph nng chy c phun vo b mt kim loi. +u im: - Nhit dng plasma cao => phun cc bt c nhit nng chy cao nh Ccbit, Nitrid, Oxyt... Cht lng lp ph cao - Tc ph cao 2-20kg/h (WC), 5-50kg/h (Al2O3) Nhc im: - Thit b phc tp, gi thnh cao

4. Phun ph kch n: + Thit b chnh: - Bung chy - B phn nh la - Cung cp kh xy v actylen - B phn cp bt cht ph - B phn lm mt + Nguyn l lm vic: Bt cht ph c a ng thi cng kh chy vo bung t vi p sut cao. Khi dnh la kh t chy vi nhit 30000C lm nng chy bt cht ph phun ra ming bung n vi vn tc 1000m/s v ph ln b mt sn phm.(kich n 250 ln/ph) +u im: - dnh bm cao do phun ln b mt vi vn tc ln => khng cn x l nhit sau khi phun. - xp thp (<1%), lp ph c xit cht cao, c tnh cao. - Ph c cc lp ph c thnh phn phc tp - Thit b n gin + Nhc im: Gy ting n ln (125 -140 dB), cn lm vic vng cch bit.

chng VII. cng ngh cy ion I. C s chung 1) Nguyn l: Cng ngh cy ion l phng php x l nh tc dng ca t trng mnh, cc ion cht ph c bn vo b mt sn phm vi gia tc rt ln to ra lp b mt cy ion (hnh 1)
Hnh 1a.S nguyn l lm vic ca thit b cy ion 1. ng tng tc 2. Bung lm vic 3.4. ng dn hng 5. Ngun ion

Hnh 1b. S phn b nng trong lp b mt

a)

b)

2) c im: - Ion cy: ion N, Cr, Mo, Ti, B... Sn phm: Thp, nhm, HK Fe, Al... - Sn phm c phn cc vi in th ln 10-100KV, P= 10-5-10-8 bar. - Kh to c lp ph c nng mong mun. - C th dng lp ph s b: + Cy ion va chm: Ion truyn ng nng cho lp ph s b + To lp ph hp cht:Ion kt hp vi lp ph s b + To lp ph khuyc tn: Chm ion lm cho lp b mt c T cao. II. Thnh phn v tnh cht lp ph: (hinh 2 ) - Tng tc gia chm ion v b mt sn phm dn n thay i: + Thay i thnh phn ho hc lp b mt + Thay i cu trc lp b mt + Sai lch mng tinh th - Tnh cht lp ph: + cng cao => tng kh nng chng mi mn. + bn n mn cao. + Thay i tnh cht vt l (cy ion cho cht bn dn).

Hnh 2. C ch tng tc gia ion v lp ph 1. Ion ng nng ln 2. Vng l trng 3. Nguyn t xen k

III. Cc phng php cy Ion: - Cy ion thng thng:


Chm ion Lp ph hp kim 10 -500nm

- Khuy ion:
Chm ion Lp ph s b <100nm

Lp khuy <200nm

- Khuy ion hn ch:


Chm ion Lp ph s b < 500nm Lp ph s b < 500nm

- To lp ph c chm ion
Chm ion Kh to lp ph Lp ph > 1 nm

Chng VIII. X l nhit mt, Lp ph v nh hnh v lp ph v nh hnh hp kim I. X l nhit b mt: 1. C s chung: a) Nguyn l: X l nhit b mt l phng php x l nh truyn nhanh vo b mt sn phm mt nhit lng ln (laser, chm in t, dng cm ng) lm cho nhit b mt (dy 10-6 1mm) tng nhanh ln > Ac1 v qu trnh chuyn bin Mactenxit xy ra khi tc ngui d ln do t lm ngui (nhit truyn vo trong) v lm ngui t bn ngoi (nc ,du). (hinh 1)
Knh phn x Ngun tia Knh hi t

Sn phm Hnh 1. Nguyn l phng phpX l nhit bng chm tia nng lng cao

Hnh 2. Thit b x l b mt bng chm tia in t

b) c im: + Ngun nhit cn c mt nng lng cao => nung nng nhanh + Ch s dng i vi cc sn phm c kh nng ti cng + Tc lm ngui b mt ln (Vng > Vth) + Lp nung nng rt nh so vi chiu dy mu (d ng << D sp) 2. Thnh phn, t chc v tnh cht ca lp b mt: (hnh 2,3,4) - Thnh phn khng thay i song t chc ph thuc vo phng php cp nhit: + Nung dng cm ng: t chc ng u + Nung bng tia laser, chm in t: T/C khng u - Tnh cht: + B mt: cng cao chng mi mn tt + Nn kim loi: do dai m bo chu va p tt Hnh 3. nh hng ca cc hnh thc lm ngui

Lm ngui bn ngoi

T> Ac1 T lm ngui

Chm tia

T chc b mt ca thp sau khi x l nhit bng dng cm ng (a) v chm tia laser

3. Cc phng php x l nhit b mt: a. Cc ngun nhit thng thng: - Nung bng ngn la = > xy Axetylen => Kt hp t lm ngui v nc, du - Nung bng cm ng => Dng/ cm ng => Kt hp t lm ngui v nc, du - Nung tip xc => in tr tip xc => Kt hp t lm ngui v nc, du - Nung ma st => Nng lng c hoc => T lm ngui b. Chm tia nng lng cao - Nung bng Plasma => Ion ho dng kh => T lm ngui - Nung bng chm Laser => Sng in t => T lm ngui - Nung bng chm in t => in t ng nng cao => T lm ngui

II. Lp ph nung chy v nh hnh v v nh hnh hp kim: 1. C s chung: a) Nguyn l: Lp ph nung chy v nh hnh l phng php nh cc chm tia nng lng cao (Laser, in r...) b mt sn phm c nung nng nhanh ti nhit ln hn nhit nng chy lm cho kim loi chuyn sang trng thi lng v sau c lm ngui rt nhanh (t lm ngui) lm cho b mt chuyn sang trng thi gi n nh c cu trc ph thuc vo phng php x l (v nh hnh,t chc c tinh th siu mn...) - C th hp kim ho nh: + Ph s b nguyn t hp kim hoc bt cht ph + Cp bt nguyn t hp kim hoc bt cht ph ng thi khi nung b) c im: - Lp nng chy rt mng so vi chiu dy mu. - Tc lm ngui cao 106 108 K/s - p dng vi c thp khng c kh nng ti, thp khng r - Lp ph c cng cao => chng n mn

2. Thnh phn v t chc lp ph


- Do b mt b nng chy cc b => bin dng nhiu => cht lng b mt gim - T chc lp b mt ph thuc nhiu vo phng php x l b mt =. to ra cc t chc khng cn bng V dnh hnh, t chc c siu mn, mactenxit, austenit... + Hnh a) t chc lp ph nng chy ca gang: Grafit ho tan vo gang nng chy => t chc c dng nhnh cy siu min + Hnh b) t chc ca lp (Ti, Mo)C trn nn thp 1%C: Lp b mt: v nh hnh + ht cc bt phn b u; nn: lp macten xt nh mn v austenit d. - Thnh phn a dng: hp kim ca Mn, Ni, Cr, Mo, Ti... cc bit, nitrid, borit...

a)

b)

II. Cc phng php x l :

T chc c Nung chy b mt V nh hnh Lp ph nung chy Ph gia nng chy Lp ph rn Lp li, mng Lp keo, bt

Nung chy hp kim

Ph gia rn

Ph gia kh

Chng VIII. Nhng trong Kim loi mng chy v hn p I.Nhng trong kim loi nng chy: 1. Nguyn l: Phng php x l b mt bng cch nhng sn phm trong cht ph nng chy, gi nhit mt thi gian nht nh nhn c lp ph khuyc tn nh mun. - Cht ph l cc kim loi c nhit nng chy thp: Al, Zn, Pb, Sn... - Sn phm st thp gang - Chi nhit (Al) hoc chng n mn (Zn, Sn) 2. T chc v s hnh thnh lp ph: Lp ph gm 2 phn: - Lp ngoi: lp bm (kim loi hoc hp kim nng chy): Lc u chiu dy tng theo thi gian, sau khi t >t th chiu dy khng i. - Lp trong: lp khuych tn: Chiu dy tng theo thi gian theo q/l khuych tn

% Fe

Lp ph nhng kim loi

Lp khuyc tn

Lp bm t

ng hc hnh thnh lp ph bng pp nhng trong kim loi nng chy

3. Mt s lp ph thng gp
Kim loi ph Zn Al Nhit nng Chiu dy chy lp ph m 420 660 70-90 50-100

u im Chng n mn Bn nhit

Lnh vc ng dng tm, ng, trang tr ng x, bung trao i nhit

Al +Zn
Sn Pb +Sn

580
232 327

25-50
4-20 2-15

Bn nhit, chng n mn
Chng n mn, khng c Chng n mn

Xy dng
Cng nhip thc phm, trang tr ng dn nc

II. hn p: 1. Nguyn l: - Hn p l phng php x l b mt nh ngun nhit lm nng chy vt liu b ph v nng chy cc b b mt sm phm - Mt s thng s dc trng ca mi hn: Aa + H s khuy = Ae /(Ae + Aa) + H s hnh dng bn trong mi hn Ae = b/t + H s hnh dng bn ngoi = b/h 2. c im: To c lp ph c dy ln ( < 5mm) Mi trng khng kh hoc kh bo v Khng hn ch kch thc sn phm v c th x l cc b Thit b n gin C th kt hp vi cc phng php x l khc Lp ph c kh nng cu mi mn v n mn

3. Mt s phng php thng gp - Hn p bng ngn l kh t - Hn p bng h quang: + Hn p bng h quang tay ( que bc thuc hn) + Hn que thuc bt (a) + Hn in cc than + Hn trong kh bo v (in cc nng chy v in cc khng nng chy)(b) + Hn di lp thuc (c)

b)

a) c)

- Hn p plasma: + Hn plasma bt cht ph (a) + Hn plasma dy cht ph (b) - Hn p x in - Hn p dng cm ng

- Hn p bng tia laser - Hn p bng tia in t - Hn dp bng dng tip xc

Hn p bng tia la in

Chng IX: Cng ngh ph in ho, ph ho hc v xy ho I. Cng ngh Ph in ho (m in): a) Nguyn l: Cng ngh ph in ho l phng php x l sn phm trong dung dch in ly c ho tan cc mui ca kim loi ph v nh phn cc catt cc ion dng ca cht ph dch chuyn n b mt sn phm nhn in t v to thnh lp ph (lp m).

S nguyn l ph in ho (m in)

2. S hnh thnh lp ph: + Cc qu trnh xy ra b mt catt (b mt sn phm cc m) Me n+ + ne => Me 2H+ + 2e => H2 + Cc qu trnh xy ra b mt ant (kim loi ph cc dng) Me ne => Me n+ + nh lut Pharaday: m = a.I.t. m khi lng cht ph trn b mt catt (g) t thi gian in phn (h) I cng dng in (A) a ng lng in ho (g/A.h) hiu sut dng in (%) + Yu cu i vi lp ph: - dnh bm m bo - T chc mn, xt cht, do, cng m bo - Chiu dy m bo.

T chc lp ph in ho (lp ph Niken)

3. Cc yu t nh hng + nh hng ca ung dch in ly: - Mui n: lp ph th, khng u cht lng thp (tr Co, Ni) - Mui phc: lp ph mn u + Thnh phn dung dch: - m bo dn in - khng ch pH ng yu cu - Nng cht ph m bo - Cc cht hu c: tng bng ( lp ph ng u) + nh hng ca ch lm vic: - Mt dng in (ln: dy, th; nh: nng sut thp) - Nhit (cao: dy th .... ) - Tc khuy: ng u + Trng thi b mt ( bng...) + Hnh dng chi tit v b tr in cc ( ng u)

4. Cc phng php ph in ho: a) Ph kim loi nguyn cht: M Crm, Niken, ng b) Ph hp kim: Hon nguyn ng thi nhiu nguyn t ( thnh phn dung dch phc tp. c) Ph phn tn: - Lp ph phn tn c to thnh nh s xm nhp ca cc ht rn (< 10 m) vo lp ph trong qu trnh hnh thnh lp ph in ho. Hm lng ht rn: 4 15%. - Lp ph phn tn c kh nng chu mi mn cao hoc ma st nh - Cc phn t rn: Al2O3, SiC, Diamant... (chng mi mn) MoS2, Graphit ...(bi trn)

1.Sn phm (catt) 2. Ht rn 3. Dng mt chiu 4. Ant 5. Dung dich

4. Mt s phng php m in ho thng gp: a) M ng: - Lp m ng thng dng lm lp lt trc khi m Niken, Crm tng dnh bm, bng, ng u. - Cc thng s c bn: + Dung dich: Cu2+: 60 g/l; KCN: 30 g/l; KOH: 25 g/l; K2CO3: 5 g/l + Nhit : 400C ; Mt dng: 1- 3 A/dm2 + Tc ph: 20 m/h ; Chiu dy: 5-100 m b) M Crm: - Lp m crm c cng cao chng mi mn tt, mu sc bng p, song thng c xp cao kh nng chng n mn km. V vy trc khi m crm, thng m ng, niken. - Lp m crm xp (cha du) chng mi mn tt: Xi lanh, xc mng - Cc thng s c bn: + Dung dch: CrO3: 250 g/l; NiCl2.6H2O : 5 g/l; H3BO3 : 40 g/l (pH = 3,9) + Nhit : 550C ; Mt dng: 20- 80 A/dm2 + Tc ph: 20 m/h (25A/dm2); Chiu dy: 5-1000 m

c) M Niken (m kn) - Lp m niken bng p, chng n mn tt, song cng khng cao nh m crm. m bo lp ph ng u, cht lng tt cn m ng trc. - Lp m niken c s dng rng ri trong cng nghip v trong i sng. - Cc thng s c bn: + Dung dch: Ni2+: 100 g/l; NiCl2.6H2O : 5 g/l; H3BO3 : 40 g/l (pH = 3,9) + Nhit : 450C ; Mt dng: 1- 8 A/dm2 + Tc ph: 25 m/h; Chiu dy: 5- 2000 m

Thit b x l in ho

II. Ph ho hc v xy ho: 1. Ph ho hc: a) Nguyn l: Ph ho hc l phng php nhng sn phm vo dung dch in ly th trn b mt hnh thnh lp ph do phn ng ho hc m khng cn c tc dng ca dng in. C 3 dng phn ng ho hc: + Phn ng tip xc:Khi nhng sn phm vo mui ca kim loi yu hn (nhng thanh st vo d/d sunphat ng): M n+ + M1 => M + M1 n+ + Ni in phn: khi nhng sn phm (M1) c in th dng hn v thanh kim loi (M) c in th m hn vao dung dich c cha mui ca kim loi M: - B mt sn phm: M n+ + ne => M - Thanh kim loi M: M ne => M n+ + T xc tc: Cht ph l cht xc tc cho phn ng xy ho kh to thnh lp ph. Cht xy ho v cht kh u mm trong dung dch. - B mt sn phm: M n+ + ne => M Phn ng t xc tc l phn ng ca m ho hc

b) c im: - Lp ph ng u, xit cht, cht lng cao hn lp ph in ho - C th ph ln cc vt liu khng dn in nh gm, s, nha... - Tc chm 2- 20 m/h - Dung dch t, nng khng ch cht ch. - S dng nhiu trng CN in t (mch in). c) Cc bc cng ngh ph ho hoc: + Cng ngh tin x l: - Lm sch b mt - Xm thc: n mn b mt khng u to dnh bm (nhng nha ABS trong H2SO4). - Hot ho b mt: Nhng sn phm d xm thc vo dung dch c bit to cc trung tm hot ng. i vi Polyme ngi ta dng trong dung dch SnCl2, PdCl2 => cc nguyn t nm ri rc trn nn l cc trung tm hot ng. + M ho hc: Nhng sn phm vo dung dch m, cc trung tm hot ng xc tc cho phn ng xy ho kh => xut hin nguyn t cht ph => To thnh lp ph => Cht ph xc tc => lp ph tip tc phat trin => hon thin lp ph.

d) Cc cng ngh ph ho hc thng gp: i. Ph ng ho hc: - Cc phn ng chnh: + Phn ng kh: Cu 2+ + 2e => Cu + Phn ng xy ho kh: 2HCHO + 4OH - - 2e => 2HCOO - + 2H2O + H2 + Phn ng tng: Cu 2+ + 2HCHO + 4OH- => Cu + 2HCOO - + 2H2O + H2 - Tnh cht cng dng : Ch to mch in, trang tr, khun dc... ii. Ph Ni ken ho hc: - Cc phn ng chnh: + Phn ng thu phn: NaH2PO2 + H2O => NaH2PO3 + 2H (hp ph vo b mt sn phm) + Phn ng kh: Ni 2+ + 2H => Cu + 2H 2+ + Phn ng thot Hydro: 2H => H2 - Tnh cht cng dng : Chng n mn, trang tr trong cng nghip v i sng

2. Cng ngh xy ho b mt kim loi a. Nguyn l: xy ha b mt kim loi l p/p x l cc sn phm kim loi trong mi trng xy ho v nh cc phn ng ho hc hoc in ho, trn b mt sn phm to ra mt lp xyt c tnh cht nh mun. b. xy ho b mt nhm: C 2 phng php: ho hc v in ho a) Phng php ho hc: C th tin hnh trong mi trng axit (hoc kim): T/P : H3PO3 45 g/l ; CrO3 6 g/l ; NaF 3 g/l (10 -15 pht) - Lp xyt dy 0,5 4 m , c dnh bm tt, song mm xp, c kh nng hp ph tt => thng lm nn cho lp sn. - Thit b n gin, nng sut cao, gi thnh thp. b) Phng php in ho: Thng tin hnh trong d/d axit Sunphuric: - T/P: H2SO4 200 g/l ; Nhit : 15 -25 0C Mt dng: 0,8 -1,5 A/m2; in p: 15 -20 V Thi gian: 20 - 40 ph - Lp xyt dy 5 -20 m; c cng cao, kh nng chng r tt, kh nng hp ph tt (xem hnh) => nhum mu trang tr p , hoc lm nn cho lp sn

Cu trc t ong p xy ho b mt nhm

c. xy ho st thp: i. Nhum en: - Nhum en l cng ngh xy ho b mt sn phm st, thp trong mi trng kim (NaOH) cha cht xy ha NaNO2 vi nhit khong 110 0C. Mng xyt st t (Fe3O4) c mu en hoc xanh en. - Chiu dy: 0,6 1,5 m c kh nng nng cao bn n mn, mi mn nhng khng cao, trang tr...( xch lp, dng c o, v kh...) ii. Pht pht ho: - L cng ngh x l sn phm st thp trong dung dch mui pht pht nhm to ra trn b mt mt lp pht pht Fe Zn Mn dy 5 -20 m. - Lp ph pht pht c bn n mn cao gp 2 -10 ln lp xy ho, - C dnh bm chc, xp kh cao c kh nng hp ph tt => lm lp nn cho sn rt tt (xe my, t...). - C kh nng cch in tt => x l cc l tn silch trong bin th.

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