NI DUNG

CM BIN P IN (Piezoelectric Sensors)

1. 1 nh ngha. ngha 2. 2 u im v nhc im 3. 3 Vt liu p in. in 4. Cu to cm bin. 5. S o.

1. NH NGHA
Do Pierre Curie & Jacques Curie khm ph vo nm1880 Piezo xut pht t Hy lp Greek Piezen : c ngha l p press C mt s l i vt li c th t ra i khi n b bi d t loi t liu to in p bin dng d b bi d do bin dng khi n chu tc ng c hc hoc ng sut, l cc vt liu nh tinh th thch anh (SIO2) hoc Barium titanate. Hoc thay i kch thc vt l khi t vo phn t p in mt in th Cu to cht p in c ph ln hai mt ca phin mng. Khi tc dng lc c hc th xut hin cc in tch tri du ti hai mt ca phin, cc in tch xut hin t l vi cc tc ng c hc. Vic s dng trong cng nghip vo nm 1950s. Hin nay tr thnh k thut ph bin

1. NH NGHA
Gii th h hi tng thch hin t

Hiu ng p in m t mi quan h gia ng sut c hc v in th trong vt th rn. Cc vt liu p in to ra in tch Q t l vi lc tc dng

1. NH NGHA
a/Hin tng p in thun:
Khi tinh th i chu tc d i h h p in h dng ca l b ngoi, lc bn i th cc ht mang in xut hin trn b mt ca lp tinh th lm xut hin dng in. Ty theo chiu tc dng ca lc m chiu dng in khc nhau. Khi lc l ko th chiu dng din cng chiu vi chiu tinh th, nu lc l nn th chiu dng in ngc chiu vi chiu tinh th.

1. NH NGHA
b/Hin tng p in nghch:
Khi t mt in p vo hai u tinh th p in, hay tinh th p in c cung cp ht mang bi ngun bn ngoi th trong tinh th s xut hin ng sut lm cho lm cho tinh th co dn. Tu theo chiu dng in t vo m tinh th nn hay dn. Nh hnh di, khi ca ngun ngc vi cc ca tinh th th lm cho tinh th dn ra Khi ngun lp cng vi cc ca tinh ra. th th tinh th b nn li.

CC M HNH CA CM BIN Piezoelectric

1. NH NGHA
Khi tc dng lc theo trc x ( hiu ng dc) q= d1. Fx Khi tc dng lc theo trc y ( hiu ng ngang) q= -d1.Fy.. a/b
HIU NG NGANG

Thickness expansion mode Volume expansion mode

B mt dn Vt li i V liu p in in th

Thickness shear mode

7

in th

Nu t s a / b lm hn 1, th hiu ng p in ngang s ln hn hiu ng ng p in dc.

HIU NG DC
in th xut hin khi lc tip xc vi b mt ln ca cc in tch ch ph thuc vo lc tc dng Qx = d11 Fx n

HIU NG NGANG
in tch xut hin gc phi ( i h angles) khi hi (right l ) lc tip xc vi b mt. Qy = -d11 Fy b/ d b/a

Thch hp o lc, gia tc, bin dng, p sut g p

Dng u tin trong cm bi sut v cc bin p t cm bin lc c nht cao sensors sensors.

HIU NG CT
N ph thuc vo kch thc hnh dng ca phn th h h d h t p in cng nh vo s phn b in tch ca p n. Qx = 2 d11 Fx n

1. NH NGHA
Nu chiu dy ca tinh th l t v

t Il s thay i chiu dy do tc dng ca lc V E l m un n hi v c th biu din bng t s gia ng sut v bin dng

A = Din tch ca tinh th , m2 t chiu dy ca tinh th , m

S dng ch yu trong cc cm bin gia tc, cm bin m men v cm bin lc ba thnh phn.

T cc phng trnh trn in tch ti cc bn cc s to ra in th

1. NH NGHA
in dung ca vt liu p in gia hai tm bn cc l

NHY
A nhy in tch

in tch c to ra F = Lc tc dng
=

i vi tinh th c din tch l A Trong p = ng sut hoc lc tc dng ln b mt tinh th

NHY
B nhy in th S thay S th i di th din c ra bi s th i i th d s a thay in do gia tng p sut trn mt n v chiu dy ca tinh th

NHY
Quan h gia nhy in tch v nhy in th Sq = 1 q A p

SV =

1 V d p

SV =

1 V d p

Chiu dy i h h d = Chi d ca tinh th

Sq SV

Do vy

d q d = C A p A

=C

d A

V=

Q C
Vi
C=

S q = SV
A d

q = C V

1. NH NGHA
S to ra in th l do Trong tinh th n c ba nguyn t ca silicon v su nguyn t oxy Mi nguyn t silicon c bn in tch dng v nguyn t oxy c hai in tch m Mi cp nguyn t oxy c b i t h khi kh c l t d bn in tch m, khng lc tc dng vo tih th p in th tinh th n quartz cell is electrically neutral. Khi c lc nn tc dng theo trc X tinh th p in b bin dng.Lc lm cc nguyn t trong tinh th thay i v v tr : cc in tch dng b chng cht nguyn t silicon cn in tch m cp oxy -

3. VT LIU P IN
Thch anh ( SiO2 . N c th l vt liu t nhn hoc tng hp, n c cc thng s sau: Hng s p in d1 =2,1.10-12C/N in: 2 1 10 12C/N. Hng s in mi: = 39,8. 10-2F/m ng sut cho php: =( 70 -100)N/mm2 in tr sut = 1014 cm nhng ph thuc nhiu vonhit . nhit gp 2000C d1khng ph thuc vo nhit . T (200-500))C d1 thay i khng ng 0C tnh cht p in b ph hy k, 573 Titanat Bari( BaTiO3) l vt liu tng hp, khng ph thuc vo m, nhng ph thuc nhiu vo dng tp cht, bn c hc cao, r tin, d ch to cc h h d h kh nhau. hnh dnh khc h Hng s p in: d=107.10-12C/N. Hng s in mi: = 1240. 10-11F/m M un n hi E=115.103 N/mm2 Cc tnh cht khng ph thuc vo m m ph thuc vo tp cht, cng ngh ch to v i p phn cc. M un p in khng phi l hng s, n c th gim 20% sau hai nm. Do c hin tng tr nn quan h q=f(F) l khng tuyn tnh. Song n c bn c hc cao, r tin, c th to c bt k hnh dng d no

3. VT LIU P IN
Gm PZT l hn hp oxt ch zirconi v titan ( PbTi1ch, ZrxO3) thng x=0,5 n quyt nh tnh cht vt l v tnh x cht nhit ca vt liu.u im chnh ca lai ny: - nhy cao. h - Hng s in mi ln nn nh hng ca in dung k sinh nh. D gia cng. - bn c hc cao. - Ch Chu c nhit cao hit - Nhc im: hng s in mi v hng s p in ph thuc vo nhit . C tnh tr do nhit do vy d b lo ha

3. VT LIU P IN
Hiu ng p in to ra l do s bin dng ca crystal lattice do tc dng ca ngoi lc tc dng vo lattice m v dng nhng cnh i din v do to ra m men lng cc.

3. VT LIU P IN

3. VT LIU P IN
Cc vt liu p in nh: : tourmaline, quartz, p , q , ngc , cane sugar, and Rochelle salt Thng tinh th thch anh c s dng v :
sut ca vt liu gii hn l ~138 MPa ng Nhit lm vic c th ln ti 500C cng cao tuyn tnh cao v c th b qua tnh cao, cao,v tr Hu ht cc hng s nhy vi mi khong phn b nhit Cho php o vi tn s thp (<1 Hz)

3. VT LIU P IN
t tnh mt s vt liu p in
Vt liu thm thu 11 = 4.5 11 = 350 in tr sut (m) 1012 >1010 Modun dn ng sut hi 109N.m- ca i 2 107N m-2 N.m 2 Y11 = 80 Y11 = 19.3 Y22 = 30 Y33 = 30 46 10 1.4 Nhit s dng (oC) 550 45

4. CU TO
Khi cm bin chu tc dng ca lc, lm co dn ming p in, tn hiu in c ly ra v khuch i. Tu thuc ng knh vng p in m c th chu ti khc nhau. s dng mt lc p t troc bng cch xic cht cc vng m th c th m rng phm vi s dng v c th o lc ko hay nn: Lc ko: tng ng sut ban u. Lc nn: gim ng sut ban g g u.

Thch anh Mui Seignette LH

11 = 350 11 = 350 11 = 350 11 = 1700

>1010

1.5

75

PZT 5A

1011

Y33 = 53

78

365

(a) The di l ( ) Th radial connector style t t l (b) The axial connector style

4. CU TO
Cm bin p in nh mt t in p bng cch ph hai bn cc ln hai mt ca ming p in. Khi tc dng lc ln hai bn cc th trn bn cc xut hin cc in tch tri du nhau. Hiu in th gia hai bn cc t l vi lc tc dng: Q = k.F vi k = 2 3 10-12 A /N i 2,3.10 12 As/N

4. CU TO
Khi dng o lc rt nh: th ta g dng cu trc dm, x gm hai tm ghp li vi nhau. Khi c lc tc dng mt tm dn mt tm b co li. o lc ct theo b mt phi dng tm mng

4. CU TO
tng in tch Q ngi ta t cc phim thch anh chng ln nhau: ni tip vi lc hay song song vi in. Fx
+ + + + + + + +

5. S O
S o tng ng ca cm bin p in: Gm mt ngun dng p g g i=dQ/dt mc song song vi in tr Rg v Cg. Cg: i d in dung ca vt li t liu p in. Rg: in tr trong ca vt liu p g p in. Nu tnh n in tr v t k sinh trn dy dn t d d kt ni th i
1 1 1 = + Rq Rg R
Cq = C g + C
i Rg Cg

Vq =

nQ Q = nCq Cq
Fx + + + + +

Fy -

- - + +

+ + +

+ + +

- -

+ +

+ + +

+ + +

- + +

+ + +

+ + +

Fx

Fy

Hiu ng p in dc

Hiu ng p in ngang

5. S O
Mch in tng ng c th chuyn thnh:

6. CC NG DNG
o p sut trong lng khun i vi cng ngh phun p. Gim st p sut trong xi lanh ca cc ng p g g c diesel v gas. Gim st v iu khin lc p p. Gim st lc lin kt (joining) trong cc my lp rp t ng . Gim st s rung ng ca cc my . Gim st sut qu trnh gia cng

6. CC NG DNG
Gia tc k
Khi lng dao ng c gn vi phn t thch anh anh. Khi gia tc k chuyn ng th khi dao ng s chu ti theo nh lut Newtons 2 Newton s F=ma.

6. CC NG DNG
Gia tc p in
Phn t p in dng hnh tr v c dn tm ca cht. Khi lng ca hnh tr c dn vi phn bn ngoi ca phn t p in in. Gia tc theo hng ca trc hnh tr v l nguyn nhn sinh ra lc ct trn phn t v to ra lc n hi cho chnh n

Khi v ca gia tc k l i tng c dao ng th lc tc dng trn phn t p in l do khi lng b thay i . in tch c to ra trn tinh th p in c a vo b khuye61ch i in tch. Lc F tc dng vo tinh th c chuyn thnh in tch .

Q = dF

Gia tc k

6. CC NG DNG
Gia tc k

6. CC NG DNG
u im l kch thc nh +c ng knh ra l 6 mm, v ln nht l 11 mm. + nhy nh nht ca cm bin bi l 16 pC/bar, C/b + nhy ln nht l 80 pC/bar vi phm vi o 250 , bar n1,000 bar.

11/30/2011

34

6. CC NG DNG
Gia tc k
+V ca cm bi b th kh r b v cm bi t h d t bin: bng thp khng bo bin trnh d, m, trng
in, lp rp v lm kn. + Mng: bin i p sut thnh lc tc dng ln tnh th p in + Tinh th p in: Bin i lc thnh in tch tch.

6. CC NG DNG
Gia tc k
Cm bin o p sut trong lng khun: p g g

Nhm nng cao cht lng v gim chu k sn xut. Khng d Kh dng mng : Mng cht d t h h th h M ht do t hnh thnh
11/30/2011 35 11/30/2011 36

6. CC NG DNG
Gia tc k
CM BiN TRONG NG C :

6. CC NG DNG
Cm bin p sut

Cm bin p sut l 01 mng mng vi kch thc bit p sut ch tc dng p g theo mt hng

HU HT CC CM BiN P SuT DNG TRONG NG C T yu cu nh chnh xc cao. + Mng :s t chy ca ga c th ln ti 2,500 C. 2 500C 11/30/2011 37