Vat Lieu Nano - Ch0-2012

TRNG I HC BCH KHOA H NI
HANOI UNIVERSITY OF TECHNOLOGY (HUT)
INTERNATIONAL TRAINING INSTITUTE FOR MATERIALS SCIENCE VIN
VT LIU CU TRC NANO

NANOSTRUCTURED MATERIALS
Nguyn Anh Tun
HANOI - 2012
PHN M U
1- GII THIU CHUNG 2- TNG QUAN V NANO
NguyenAnhTuan-ITIMS - 2012
PHN M U
1- GII THIU CHUNG
PHM VI, CU TRC MN HC & PHN CNG GING DY

PHM VI - Vt l cc h thp chiu _ Vt l nano - Vt l cc cht ngng t c cu trc nano - Vt liu nano _ Vt liu in t cu trc nano - Cng ngh & linh kin nano CU TRC NI DUNG - Gii thiu chung & tng quan - Gii thiu v nanoelectronics - Vt liu nano bn dn - Vt liu nano t & Spintronics (PGS. TS. Nguyn Anh Tun) (PGS. TS. Nguyn Anh Tun) (TS. Nguyn Vn Quy) (PGS. TS. Nguyn Anh Tun) Khoa hc & Cng ngh nano
- Vt liu quang t v quang-in t nano () - Cc vt liu nano khc v mt s vn lin quan (PGS. TS. Nguyn Anh Tun)
MC CH MN HC Hc vin nm c (mt cch i cng): - Cc loi/dng vt liu nano (ch yu l cc vt liu in t) s dng cc tnh cht vt l no ph thuc vo kch thc/cu trc nano: in t, quang, quang-in t, t, nhit, c tnh sinh-ha, t hp a chc nng, a tnh cht, v .... hn th na. - Nhng cng ngh/k thut/phng php/cch thc tiu biu ch to, x l, gia cng, thao tc, lp rp cc cu trc, cc t chc nano, hay quan st, o lng v phn tch cc c trng nano. - Phn no thy c bn cht vt l ca cc tnh cht, tnh nng ni tri do cu trc hay kch thc nano to ra. - Thy c nhng ng dng chnh ca cc vt liu in t nano tng ng trong mt s lnh vc. - Thy c ngha ca KH & CN nano trong khoa hc v i sng.
NI DUNG MN HC
GII THIU CHUNG Mc ch mn hc, Cu trc & phm vi mn hc, Sch GK v ti liu tham kho TNG QUAN (Nguyn Anh Tun)
1. Tm lc lch s v KH&CN nano 2. Phn loi, gii thiu chung v cch thc tip cn nghin cu cc vt liu nano 3. Nhng c trng, tnh cht chung ph thuc kch thc 4. Mt s vn chung v cng ngh ch to vt liu nano 5. Cc cng c cho khoa hc nano (ch to, thao tc, lp rp v phn tch cc cu trc nano) 6. ng dng ca cng ngh nano - Cc sn phm t cng ngh nano 7. Nhng thch thc v c hi i vi KH & CN nano.
CHNG 1: GII THIU V IN T NANO DNG IN THANG NANO (Nguyn Anh Tun)
1.1. Nhc li v dng in v m 1.2. Dng in lng t 1.3. S vn chuyn mesoscopic 1.4. Dng xuyn ngm lng t 1.5. Di tr in t (electromigration) 1.6. Dng n in t v in t hc phn t (molecular electronics)
NI DUNG MN HC
CHNG 2: VT LIU BN DN CU TRC NANO (Nguyn Vn Quy)
2.1. Gii thiu v linh kin bn dn c cu trc nano 2.2. Ht nan bn dn: Tnh cht, tng hp v ng dng 2.3. Dy nan bn dn: Tnh cht, tng hp v ng dng 2.4. Cu trc nan 3D dng mng mng 2.5. Cc phng php vt l ch to cu trc nan 2.6. Cc chm lng t bn dn 2.7. Nano silic 2.8. Cc cu trc nano ZnS v ZnO
CHNG 3: QUANG T & QUANG IN T NANO (Nguyn Anh Tun)

3.1. 3.2. 3.3. 3.4. 3.5. 3.6.
NI DUNG MN HC
CHNG 4: VT LIU T CU TRC NANO & SPINTRONICS (Nguyn Anh Tun) 4.1. Tnh cht t thang nano 4.2. Vt liu t khi c cu trc nano 4.3. Ht t nano, dot t v cc chm nano t 4.4. Dy t v ng t nano 4.5. Mng mng t cu trc nano 4.6. Phn t v nguyn t t c lp 4.7. Cc k thut hin i quan st v phn tch cc c trng cu trc t nano 4.8. Spintronics CHNG 5: CC VT LIU NANO KHC V NHNG VN LIN QUAN 5.1. Cc vt liu nano carbon () 5.2. Cc vt liu nano chc nng c bit khc () 5.3. Ho hc nano () 5.4. Kha cnh an ton v nhng thch thc ca vt liu nano () 5.5. Cc cu trc nano trong t nhin (Nguyn Anh Tun) 5.6. in t hc phn t, nguyn t v thng tin lng t (Nguyn Anh Tun) 5.7. Tnh trng pht trin v tng lai ca cng ngh nano (Nguyn Anh Tun) 5.8. Vn c hi v an ton trong cng ngh nano (Nguyn Anh Tun)
NI DUNG MN HC Ti liu tham kho

1) Nanostructured Materials and Nanotechnology, Hari Singh Nalwa, Academic Press, US, 2002. 2) Nanostructured Materials: Selected synthesis methods, Properties and applications, Harry L. Tuller, Kluwer Academice, US, 2004. 3) Nanostructured Fabrication and Analysis, H. Nejo, Spinger, 2006. 4) ADVANCED MAGNETIC NANOSTRUCTURES, Eds. by David Sellmyer and Ralph Skomski; Springer Science + Business Media, Inc. 2006.
5) Nanoscience - Nanotechnologies and Nanophysics; Eds. by C. Dupas, P. Houdy, and M. Lahmani; Springer-Verlag Berlin Heidelberg 2007. 6) Nanoscience and Technologies; Ed. By Peter Rodgers, Nature Publishing Group (Macmillan Publishers Ltd.), World Scientific Publishing Co., 2010.
TI LIU C THM
1) Cng ngh nano - iu khin n tng phn t, nguyn t, V nh C, Nguyn Xun Chnh, NXB KHKT H ni 2004. 2) Vt l ng dng trong i sng hin i, Nguyn Xun Chnh, NXB TR TP.HCM 2009 3) Magnetism in Ultrathin Transition Metal Films, Ulrich Gradmann, Chapter 1 in Handbook of Magnetic Materials, Vol. 7 Ed. by K.H.J. Buschow, North-Holland, Elsevier Science Publishers B.V., 1993. 4) Ultrathin Magnetic Structures I, II, III, Eds. by J.A.C. Bland and B. Heinrich, Spinger-Verlag Berlin Heidenberg 1994. 5) Nanotechnology, Gregory Timp, Springer-Verlag New York, Inc. 1999. 6) Nanomaterials: Synthesis, properties and applications, Eds. by A.S. Edelstein and R.C. Cammarata, Institute of Physics Publishing, Bristol and Philadelphia 1996. 7) Nanoscale characterization of surfaces and interfaces, N.J. DiNardo, in Vol. 2B Characteri -zation of Materials, Part II (vol. ed. by E. Lifshin) of Materials Science and Technology A Comprehensive Treatment ed. by R.W. Cahn, P. Haasen and E.J. Kramer. Weinheim New York Basel Cambridge Tokyo 1993. 8) Magnetic Nanostructures; Eds. by B. Aktas, L. Tagirov and F. Mikailov; Springer-Verlag Berlin Heidelberg 2007. 9) Magnetic Properties of Fine Particles, Ed. by J.L. Dormann and D. Fiorani, North-Holland, Amsterdam - London - New York Tokyo 1992.
PHN M U
2- TNG QUAN V NANO
CC VN CHNH
1.
nh ngha v Tm lc lch s v KH & CN nano
2. Phn loi v gii thiu chung v cch thc tip cn nghin cu cc cu trc nano 3. Nhng c trng, tnh cht chung ph thuc kch thc 4. Mt s vn chung v cng ngh ch to cc vt liu cu trc nano 5. Cc cng c cho khoa hc & cng ngh nano (ch to, thao tc, lp rp v phn tch cc cu trc nano) 6. ng dng ca cng ngh nano - Cc sn phm t cng ngh nano 7. Nhng c hi v thch thc i vi KH & CN nano
1- N & Tm lc lch s v KH&CN nano

NH NGHA V KHOA HC V Cng ngh nano
T nano c ngun gc t ch Hy lp: nannos, ngha l b nh, nano thp ln.

Theo quy nh quc t, tin t nano tng ng vi 10-9, vit tt l n. Th d: nanogam vit tt l ng = 10-9 g, nanomet vit tt l nm = 10-9 m. Mt nanomt c kch thc c 10 nguyn t H, hoc 5 nguyn t Si.
V d: Tinh th Au - Mng LPTM
~ 0.45 nm (4.5 )
~ 0.318 nm (3.18 )
1 nm c kch thc khong 3 nguyn t Au

NH NGHA V KHOA HC V Cng ngh nano
N: KHnano & CNnano nghin cu v ng dng cc hin tng, cc h thng, v cc cu trc m : 1- t nht c mt chiu lc (kch thc ti hn) c kch thc vi nm. 2- C nhng tnh cht hon ton khc, ni tri khi l < lc iu kin th 2 lm cho "nano" khc vi "micro", "(macro)-molecular chemistry" or "biology" (sinh hc lin quan n cc cu trc phn t).
Ch : Sub-micron khng phi l 'nano' !

Vi cng ngh nano, kch thc chnh xc ca nguyn t khng quan trng bng vic gn n vi nhng phn nh nht ca vt cht m con ngi c th thao tc, iu khin c.

TM LC LCH S V KH V Cn nano
Vo TK 4th sau CN: ngi ta ch to c mt

chic cc (Lycurgus Cup) cha cc ht vng dng nano (gold colloids) c tnh cht cho nh sng truyn qua v phn x nh sng xanh. 1618: quyn sch u tin v nh tng vng (Colloidal Gold) c nh trit hc, ng thi l bc s, Francisci Antonii xut bn. Vo TK 17th -18th: mt s sch v nh tng vng tip tc c xut bn v bn thn nh tng vng c s dng trong y hc, nhum mu cho gm v t la.
1857: Michael Faraday a ra phng php to ra dung dch thm

t nh tng vng bng cch s dng CS2 lm gim kich thc ht AuCl4. 1908: L thuyt Mie v di plasmon b mt ca AuNP c pht trin. 1970s: AuNP c s dng dn nhn min dch hc v nh du sinh hc. NguyenAnhTuan-ITIMS - 2012

TM LC LCH S V KH V Cn nano 1959, Richard Feynman (1918-1988) nh vt l ngi M gc Do Thi, gii thng Nobel Vt l nm
1965 v in ng lc hc lng t (QED - quantum electrodynamics) v Sc ng lc hc lng t (QCD quantum chromodynamics).
Trong bi ging Hi Vt l M (American Physical Society - APS) nm 1959: Theres Plenty of Room at the Bottom, R. Feynman tin on v tin tng v vic con ngi c th to ra c cc linh kin ngy cng nh hn vi cng nng ngy cng ln hn:
... computers with wires no wider than 100 atoms, a microscope that could view individual atoms, machines that could manipulate atoms 1 by 1, and circuits involving quantized energy levels or the interactions of quantized spins. - My tnh c cc mch dn in vi rng khng qu 100 nguyn t. - Knh hin vi c th nhn thy cc nguyn t ring r. - Nhng c my c th thao tc vi tng nguyn t mt. - Cc mch in t s dng cc linh kin hot ng trn c s cc mc nng lng c lng t ho, hoc cc tng tc ca cc spin c lng t ho.
NHNG TIN ON CA R. FEYNMAN C THC HIN

- Knh hin vi nhn thy cc nguyn t ring r - V d: Hin vi STM, AFM
nh AFM mode khong tip xc ca mng nguyn t Si(111) 7x7 trn Ag(3x 3) nh STM ca cc nguyn t b mt graphite nh STM ca mng nguyn t HOPG (Highly Oriented Pyrolitic Graphite)
- C th thao tc vi tng nguyn t mt (nh hin vi ion)
6 nguyn t
5 nguyn t
4 nguyn t
3 nguyn t

- Cc tng tc spin c lng t ha Hiu ng CMR (Collosal MagnetorResistance)
O Mn La
Hiu ng GMR (Giant Magnetoesistance)

Magnetization Ferromagnetic layer (Fe ~3-6 nm) Non-magnetic layer, (Cr ~1-6 nm)
Mn3+
O2 -
Mn4+
(001) Substrate
Cu trc lp ca siu mng Fe/Cr H
FM NM FM

- Cc mch in vi cc mc nng lng lng t Hybrid system-on-chip / Lab-on-a-chip
Resistance Temperature Detectors

- Cc transistor mt in t ring r (SET) SET - Single electron transistors
Al2O3
e-
Q
e-
U
"o nano" gia mt khe nano
in t n
Tip xc xuyn ngm

- Cc linh kin vn chuyn mt spin ring r (SSET) Cc spin c lng t ha SSET - Single spin electron transistors
FM
Al2O3
FM FM
Al2O3
FM e-
e-
e-
3540 3520
Tann= 250oC(1h)
in cc FM
G (-1)
3500 3480 3460 3440 3420 3400 3380 3360 -60 -40 -20 0 20 40 60
o nano Co in cc FM
Lp ro Al2O3 hay TiO2
V (mV)
Nhng khi nim/quan nim v cng ngh nano

Taniguchi (1974) a ra thut ng v cng ngh nan u tin (nanotechnology): L cng ngh nhm gia cng vt liu chnh xc t 100 n 0,1 nm.
K. Eric Drexler (1986) (Nhng c my sng to - Engines of Creation): im c bit ca cng ngh nan l theo hng t nh n to. l hng iu khin lp ghp (hoc iu khin t lp ghp) cc nguyn t, phn t to ra nhng c my t hon c chc nng nh t bo ca c th sng, c th sao chp. Mihail C. Roco (1999): Cng ngh nan l cng ngh lin quan n vt liu v h c cc tnh cht ch yu nh: t nht c mt chiu kch c t mt n mt trm nanomet, c thit k ch to da trn c s iu khin theo nhng qu trnh l ha t cu trc c phn t v c th t hp li to ra cu trc ln hn. Mt cch tng qut, KH v CN Nano l khoa hc v cng ngh nhm tip cn, to ra cc vt liu, linh kin v h thng c cc tnh cht mi, ni tri nh vo kch thc nanomt, ng thi hiu c v iu khin c cc tnh cht v chc nng ca chng khi kch thc
Nano: Khoa hc Phc hng

Renaissance Science
Thay i th gii quan - Thay i phong cch sng
size solid state physics & engineering nm chemistry now! biology
time
(Theo Peter Grutter, Physics Dept., McGill University)

Cc ng lc cch mng
Nhng tin b c bn trong KH v CN v s lm xoay chuyn 2 ln trong mt th k v dn n vic to ra nhiu ca ci vt cht.

~ 20 ys Hin ti
~ 100 ys
~ 53 ys
~ 60 ys
~ 56 ys
~ 56 ys
~ 56 ys
~ 29 ys
~ 28 ys
~ 27 ys
~ 30 ys
Bt u a cng ngh vo Chp nhn v ph bin Kt thc thi k pht trin nhanh
~ 28 ys
Hin ti
Cch mng cng nghip
Cch mng thng tin
Nhng lnh vc chu /h nhiu nht ca KHnano & CNnano

in t in t nano (Nanoelectronics) Vt liu Vt liu nano (Nanomaterials) Y-sinh hc Y-sinh hc nano (Nanobio/nanomed) Cc cng c mi (gm c phn cng v phn mm) c nn tng & t hp t
Nhng h qu/kt qu t s nh hng

in t hc v quang t hc (Electronics and photonics) in t hc spin (spintronics), in t hc phn t (molecular electronics), my tnh lng t Vt liu quang t bn dn, cc ngun n photon Cm bin v u d/pht hin Khoa hc vt liu (Materials Science) Bt siu mn, cc loi composites Cc vt liu mi c cng cao, siu chng mi mn, khng thm nc, khng khun, chng bi, t lm sch,... Sn xut thn thin mi trng, gi thnh ph hp Y-Sinh hc (Bio-medical) Nhng ng dng mi xut hin (v vt liu y-sinh, chn on, iu tr,...) Cc cng c nghin cu sinh hc (nh du, dng c nano cho y-sinh) Cng ngh sinh hc ng dng cho KH&CN nano NguyenAnhTuan-ITIMS - 2012
2- Phn loi & cch thc tip cn nghin cu cc cu trc nano

2.1. Phn loi tng qut cc cu trc nano Cc dng cu trc
E
Dng 3D c cu trc thnh nano
'There is plenty of room at the bottom' (Richard P. Feynman, 1959)

2- Phn loi & cch thc tip cn nghin cu cc cu trc nano So snh cc cu trc/t chc nano v micro
Ph nang phi Nron thn kinh
Phn hoa
Si tc
Vi trng Hng cu Vi khun ng knh chui xon DNA Mui khi Fullerine, C60
Nguyn t

2.2. Cc hnh thi nano c bn & kiu vt liu nano thng dng Cc hnh thi cu trc nano c bn - Ht, chm (nguyn t) - Si (dy), thanh, ng, ct - Mng siu mng, b mt - Khi, mng dy, tm, phin Cc kiu vt liu nano thng dng - Quantum Dot (chm lng t) - Nanocomposite (hn hp nano) - Nanopolymer (cht do nano) - Nanoceramic (gm nano) - Nanodroplet (git nano)
0D
1D
2D
- Nanofluidics (cht lng nano) 3D

- Nanobiomaterial (sinh hc nano)

2.2. Cc hnh thi nano c bn & kiu vt liu nano thng dng
- Mt s hnh thi cu trc nano tiu biu v thng gp:
Chui ht nano Dot nano Dy nano dng di Dy nano dng tr
Dot ngc (Antidot) Tip xc nano ng nano
Bc nano b mt k cn
Xuyn (vng) nano
Mng mng c to cu trc nano theo khun mu (pattern).

Nguyen Anh Tuan - ITIMS-

Hnh cu
Cc hnh thi phc tp khc
Dng thanh
Dng a gic 2D
Dng a din 3D
Dng phn nhnh
Dng phc hp
Dng hc lm/rng
Shawn J. Tan, et al.; Nature Nanotechnology, 6, 268276 (2011)

Vt liu nano kiu 0D: 0D Cc ht, dot, chm, m kt t,... c kch thc nano theo c 3 chiu KG
30 nm
Cc ht Co (d ~ 30 nm) phn tn trong nn Ag
Ht Fe nano: cc nguyn t Fe kt t thnh ht c d ~ 25 nm, c bao bc bng mt lp C dy ~ 2 nm.
Ht coban nano: cc nguyn t Co kt t li thnh cc ht c ng knh d ~ 30 nm trong nn Ag.

Chm ht nano: Mt chm (cluster) gm cc m ht kch thc ~ 5 nm ca cc phn t NiS kt t li vi kch thc ~ 15-20 nm.

19
18
16
14
7 atoms

2.2. Cc hnh thi nano c bn & kiu vt liu nano thng dng - Quantum dot
Vt liu nano kiu 0D: 0D
QDs l m kt t cc ng.t/ph.t c kch thc nh ~ 1- 10 nm. QD cn c gi l nano tinh th (nanocrystals, NCs), thng c cu trc kiu li-v. Trong trng hp c c thnh phn lin kt bn ngoi (nh cc phn t ha hc hay sinh hc), c th ln ti 15-20 nm. Tnh cht ni bt ca QD l gia tnh cht khi v tnh cht ca phn t ring r.
QD CdSe/ZnS vi cu trc li-v c dng hnh cu: li l tinh th bn dn CdSe c bao bi lp v l bn dn ZnS. ng fknh li t 2 ti 10 nm, v v dy t 0.5 to 4 nm. (Evident Technologies Inc.).

- Quantum
dot
nh AFM ca Quantum Dot GaAs trn b mt ca InGaAs
Cu trc ca mt QD gm cu trc li-v (VD: InGaP-ZnS) v lp bao ph do lin kt t nhi hay c tng hp.
Quantum dot ca GaAs, gm c 465 nguyn t. Mu xanh lc th hin mt NguyenAnhTuan-ITIMS - 2012 in t ca 465 nguyn t GaAs.

Vt liu nano kiu 1D: 1D Cc si, dy, chui c kch thc nano theo 1 chiu KG
Si nano Carc bon di ti 10 m
Si nano Fe 25 nm
Si (ng) carbon nano: cc nguyn t C xp xp nh hng dc theo 1 chiu c rng d ~ 1 - 2 nm.
Si st nano: cc nguyn t Fe mc thnh si c ng knh d ~ 25 nm.

3. Nhng c trng, tnh cht chung ph thuc kch thc


- Nanopolymer dng si
(a) nh SEM ca cc si nanopolymer (-C60TMB-)n (TMB = trimethylbenzene. (b) Gin nhiu x in t din tch chn lc (SAED) ca mt si nanopolymer, cho thy bn cht vi tinh th ca polymer ny.

Vt liu nano kiu 2D: 2D Cc mng siu mng, lp, mt, tm c kch thc nano theo 2 chiu KG
Graphene: cc nguyn t carbon xp xp theo n lp (ch 1 lp nguyn t) to thnh vt liu c cu trc 2D.
T graphene 2D c th to ra cc dng ng vi s chiu khc nhau: cun li thnh bng 0D (buckyballs), qun thnh ng 1D, hay xp chng ln thnh dng tm 3D.

V vt liu carbon:
1 2
Cu trc k l ca carbon cc dng th hnh: 1- Graphene 2- Graphite 3- ng nano carbon (CNT) 4- Fullerene


Cc khi c kch thc ln theo c 3 chiu KG nhng cha cc phn t cu thnh c kch thc nano: vt liu nano pha, vt liu nano tinh th, vt liu cha cc ht/chm ht nano, si nano, tm nano, v.v...
Hnh nh TEM ca mt vt liu khi c cu trc nano pha, l cc nano tinh th (nanocrystallites) vi kch thc pha nano tinh th ~ 10 nm. NguyenAnhTuan-ITIMS - 2012

2.2. Cc hnh thi nano c bn & kiu vt liu nano thng dng - Nanocomposite
Mt hn hp nano (nanocomposite) l mt loi vt liu a pha (multiphase) trong mt hay nhiu pha c t nht mt chiu thang nanomt ( 100 nm). Cng c th hiu nanocomposite chnh l composite mang cc u im ca cc tnh cht vt liu khc thng khi thang nanomt.
Polymer/Metal Nanocomposite Platinum Silicon Cu trc ca mt vt liu nanocomposite kiu polymer/KL. Nn polymer c lp y bi bt nano kim loi.


- Nanocomposite
Vt liu nanocomposite c m rng ra cho tt c cc h vt liu dng 1D, 2D, 3D v v nh hnh, m c to ra t cc thnh phn c tnh cht hon ton khc bit nhau, c trn ln vi nhau thang nanomt.
Mng gelatin c trn ht nano alumina (xt nhm) (nanoparticles). nanoparticles
Nanocomposite PP-clay (Nanoclay)): Nn polymer c trn Nanoclay y si nano polypropylene (PP) [Gilman, et al, Chemistry of Materials; 2000; 12; 1866-1873.]


- Nanoceramic

2.2. Cc hnh thi nano c s & kiu vt liu nano c bn

- Nanomultiferoics
Kiu a lp, (hay cu trc ngang) Lp spinel Lp perovskite perovskite Kiu thng ng Khi spinel Nn perovskite perovskite
nh TEM ca mng mng composite d th hai pha st tst in CoFe2O4-BaTiO3 (kiu thng ng).
Ferri t spinel (CoFe2O4)- st in perovskite (BaTiO3/PbTiO3)



- Nanopolymer
Nanopolymer khi dng ht Cu trc polymer dng nhnh cy (dendrimers) phn ly n (monodisperse) c hnh thnh t mt li c cu trc kiu a lp nanopolymer hnh cu c ng knh d ~ 35-70 nm.
Cc ht nanopolymer hnh cu c ng knh d ~ 50-70 nm.

Cu trc nano kiu 3D: 3D

- Nanophotonics
Light in tiny holes

Nng sut truyn qua B = 64(kr)4/272 (k = 2/)
- nh sng tn x qua mt l l tng (khng c dy) vi r << (subwavelength) nhiu x ra l & truyn qua T() gim lin tc theo quy lut bc bn ca t s r/.
r ~ 270 nm, h ~ 200 nm
c ~ 700 nm L trn trn l kim loi [After: C. Genet & T. W. Ebbesen, Nature 2007, 445, 39-46.]
- nh sng tn x qua mt l c dy h (c chiu su v mang tnh dn sng), vi r << (subwavelength) sng in t lan truyn rt khc vi s lan truyn trong khng gian t do: LAN TRUYN TRONG KHNG GIAN B HN CH (confined space) iu bin s tn sc ca trng in t. - Bc sng gii hn/ngng (cutoff) c c xc nh bi kch thc ngang ca ng dn sng, sng khng cn lan truyn c na. - c kh xc nh c r rng/chnh xc v c ch chuyn lin tc t ch lan truyn n m dn khi bc sng tng ln. NguyenAnhTuan-ITIMS - 2012


- Nanophotonics
Light in tiny holes/apertures + c ph thuc vo bn cht vt liu c s dng lm dn sng: thm b mt (hiu ng lp da) ca trng in t i vi vt liu c th - skin-depth. (phn nh mc thm b mt ca ng dn sng) + c ph thuc vo hnh dng v kch thc hnh hc (thit din) ca ng dn sng iu khin/khng ch c bng cch s dng dn sng c hnh dng v kch thc phc tp. - Cc l n gin lun tn ti c xc nh - Cc l dng vng xuyn khng c c, sng in t lun truyn qua (v d nh cp quang ng trc). + tuyn qua T() i vi cc ng dn sng khng phi hnh trn ph thuc (rt nhy) vo gc phn cc () ca trng in t.
210 nm 310 nm (l kim loi dy 700 nm (0.7 m)
a b (: gc phn cc) L ch nht trn l kim loi
- Tnh cht truyn qua ca nh sng vi mt khe ch nht nm ngang c kch thc a b = (210 310) nm2, vi a, b << (subwavelength) v dy l kim loi h ~ 700 nm, ph thuc vo gc phn cc so vi hnh hc ca l: s truyn qua i vi gc phn cc = 0 khi < b, thm ch ngay c khi a << . Vi gc phn cc = 90o, lun truyn qua, hu nh khng ph thuc [C. Genet & T. W. Ebbesen, Nature 2007, 445, 39-46.] vo hp ca ng dn sng (kch thc a). NguyenAnhTuan-ITIMS - 2012


- Nanophotonics
iu bin tnh cht quang i vi cc khe n + Tnh cht quang ca mt khe n c th c iu chnh bng nhng bin thi hnh hc xung quanh khe n - S dng cng ngh ch to nano (nanofabrication): - khc (rnh) xung quang khe n - cc kch thc ( rng, su, cao, dy) ~ . - p/to ra cc g, b thnh xung quanh khe n lm tng mnh truyn qua mt bc sng xc nh, thm ch B > 1. - c tc dng: cc hiu ng thu knh mi (gm hi t, phn k, ri sng) c cm ng bng cch b tr (sp xp/sp t) thch hp pha mt ra ca khe n.
Ph truyn qua khe n
r
Mt cu trc rng nano tun hon bao xung quanh mt khe n. [C. Genet & T. W. Ebbesen, Nature 2007, 445, 39-46.] Tc dng nh mt thu knh ca khe n.
- Tnh cht quang ca khe n c khc cc rnh nano bao xung quanh: lm tng T(r). - Mt ra ca khe n c khc rnh c tc dng nn tia sng tc dng nh thu knh (lm lch tia) hay antenna thu-pht sng in t c bc sng xc nh. - Bc sng cng hng r ch yu c xc nh bng chu k ca rnh.


- Nanophotonics
iu bin tnh cht quang i vi cc khe n + Mt tnh cht quang quan trng khc ca mt khe n khi b mt ra cng to rnh nano tun hon: chm tia ra cc hp, nh hn nhiu so vi khe n, vi phn k nh, di vi to ra c chm tia nano c mc song song rt cao, cng ln.
C ch: Do nh sng l ra khi khe n tng tc/ lin kt vi cu trc tun hon ca b mt pha sau (mt l ra ca tia sng) v vi cc mode tn ti trong cc rnh: - mi rnh ln lt tn x cc sng b mt thnh nh sng lan truyn t do. - nh sng truyn thng qua khe s giao thoa vi cc sng b mt b tn x bi cc rnh to nn chm tia hi t.
, + Nhng ng dng tiu biu khc: ty un ng n Photodetector siu - Cng ngh lu tr s liu quang mt siu cao: he nth kh g photo k nh s n ot nhanh cc nh i h l s dng cc vt sng (spot) c kch thc nh Vnu qucp s eector khe n d t g g cun photo dn no. hn bc sng. cho g s nh na n kha r - Cc hin tng quang phi tuyn. c - Cng ngh vin thng quang hc hin i: s dng cc photodetector - bin tn hiu quang thnh tn hiu in - truyn ti thng tin qua mng vin thng v hin th trn mn hnh. yu cu siu nhanh v cc nh. [C. Genet & T. W. Ebbesen, Nature 2007, 445, 39-46.]


- Nanophotonics
iu bin tnh cht quang bng cc dy khe (hole arrays) tun hon C ch: + Dy cc khe tun hon (trn mt mng mng kim loi) - Tng t nh h khe n c bao xung quanh c th c tc dng nh mt mng lc sc cho php truyn bi cc rnh tun hon, gm 3 bc: (1) tng tc qua cc nh sng c mu xc nh bng cch iu chnh ca nh sng vi plasmon b mt pha sng ti; chu k tun hon. (2) truyn qua cc khe ti mt sau; (3) ti pht x
- Mng mng Au, dy h = 225 nm, thy tinh. - ng knh l: d = 170 nm. - Chu k: P = 520nm - Ch : I/Io l truyn qua tuyt i, l truyn qua chun theo din tch cc l . b mt sau. - Cng plasmon b mt trn mi khe b cho s truyn qua khng hiu qu thng qua mi khe ring r. - V tr cc peak max:
vi P l chu k ca dy khe, m v m tng ng l hng s in mi ca vt liu KL v M, i, j l bc tn x ca dy. Vi cu trc cc khe tun hon b tr kiu so le (tam gic) nh c cho (nh), hin tng truyn qua d thng xut hin vi ph truyn qua gm cc peak c > 1, thm ch ngay c khi cc khe ring r nh n mc khng th cho php truyn qua.
[C. Genet & T. W. Ebbesen, Nature 2007, 445, 39-46.]


- Nanophotonics
iu bin tnh cht quang bng cc dy khe (hole arrays) tun hon + Mi khe trong dy tun hon, pha u ra, hot ng tng t nh mt ngun sng (im) mi. + c bit, hnh dng v kch thc ca cc khe trong mt dy nh hng n ph truyn qua, trong mode plasmon b mt vn ni bt nht, do tnh tun hon ca dy. - Mt dy cc vt lm c ch to bng cch mi bng chm ion hi t trn b mt mt mng Ag. Mt s vt lm c mu cho thng xuyn qua mng Ag n sng c th truyn qua c. - Chiu chm nh sng trng ln dy cu trc nh sng c bc sng no ng vi mu c th truyn c qua s c xc nh bng chu k P ca dy. - Cc dy l c nhiu ng dng: linh kin quang, vi d nh lc sc (nh sng mu); cc cm bin trong sinh hc v ha hc.
Chu k P = 550 nm nh sng truyn qua c. Chu k P = 450 nm nh sng lc truyn qua.
[C. Genet & T. W. Ebbesen, Nature 2007, 445, 39-46.]

Cc kiu vt liu nano khc:

- Nanodroplets - Nanofluidics - Nanobiomaterials - Nanomedicine

2.3. Cch tip cn cc cu trc nano
Tip cn t di ln Bottom-Up
Vt liu c to thnh c cu trc nano
Tip cn t trn xung Top-Down
Sp xp/lp rp t cc khi c kch thc nano:

- C c t bt/sol kh - Tng hp bng phng php ho hc (sol-gel, hon nguyn) - Lng ng bng phng php vt l (bc bay, phn x,...)
o gt t khi ln xung n cu trc nano:

- Bng c hc (nghin, cn, n, p, mi,) - Bng vt l (bng cc thut khc nh sng, chm tia X, chm tia in t, chm ion,...), - Bng ho hc (n mn, tm thc,)
3. Nhng c trng, tnh cht chung ph thuc kch thc Ch ti 3 c trng/tnh cht sau:
3.1. c trng chung v tnh cht VT L 3.2. c trng chung v tnh cht VN CHUYN 3.3. Hnh vi KHI ca cu trc nano

3.1. c trng chung v VT L + Tnh cht vn chuyn (transport) thay i
Kch thc suy gim
+ Xut hin cc hiu ng lng t ha

A - IN T TRONG CC H THP CHIU
+ Tnh cht vn chuyn
Cc yu t chiu di c trng quan trng nht:
- Qung ng t do trung bnh (mean free path): khong cch trung bnh gia path cc va chm ca cc ht dn N: = (n)-1 ; = ne2/m ( = th/gian t do tb). - Chiu di ph v pha (phase-breaking length): l gii hn khong cch m khi length vt qua n s kt hp ca hm sng b mt i Chnh l khong cch (trung bnh) m cc in t khuch tn gia cc tn x khng n hi trong mt khong d no . N: inel = (2dDinel) (d = phm vi xy ra s khuch tn gia cc va chm khng n hi, D = h s khuch tn, inel = thi gian (trung bnh) gia cc ln va chn khng n hi. - Bc sng Fermi (Fermi wavelength) N: F = 2/kF (kF = vect sng ca wavelength in t mt Fermi).

3.1. c trung chung v VT L + Cc hiu ng lng t - S chuyn ng ca cc ht vi m trong
mt khong khng gian c kch thc theo phng chuyn ng so snh c vi cc chiu di c trng (, inel , F) s b lng t ha.
Mt trng thi ca in t (DOS) ph thuc vo kch thc ca h.
Dn n s thay i trong
ph nng lng v trong cc tnh cht ng lc ca h. - Cc hiu ng vt l b lng t ha: + Trng thi ca in t + Hin tng chn Coulomb + Cc trng thi lin kt + S vn chuyn trong cu trc lp d th + S giam hm/nht in t + Dng in thanh nano v.v...

3.1. c trung chung v VT L
1- CC TRNG THI IN T TRONG CC H THP CHIU 2- HIN TNG MN CHN (SCREENING) 3- CC TRNG THI LIN KT 4- S VN CHUYN TRONG CC CU TRC LP D TH 5- S NHT (GIAM HM) IN T 6- DNG IN THANG NANO NANOELECTRONICS

3.3. Hnh vi KHI ca cu trc nano
- N: Cc vt liu cu trc nano khi l nhng khi cht rn c cc cu trc vi m thang nano hay mt phn cu trc vi m thang nano. - Lch s: * Hin tng ha cng ca cc hp kim nhm (Alfred Wilm, 1906) Al-4%Cu l do hnh thnh cc chm (cluster) ng.t Cu c kch thc ~ 10 nm chiu dy v ~ 100 nm ng knh trong nn Al. * Hay mt dng ti hn ca vt liu siu dn thng mi Nb3Sn t gi tr cao khi kch thc ht ~ 50 - 80 nm (Scanlan et al. 1975). * Cc vt liu vi tinh th, cho n nano tinh th di dng khi hay bng v nh hnh (Fine-Met), 1980s, c nhiu tnh cht ho, l c ci thin rt gy n tng, thm ch xut hin nhng tnh cht han ton mi khi kch thc ht tinh th kim loi gim xung ~ < 1 m (i vi vi tinh th), v ~ < 100 nm (i vi ht nano tinh th). Cc tnh cht khi ca vt liu s thay i han ton hoc rt nhiu khi vi cu trc ca chng nm trong thang nanomt. - Mt s loi hnh vi khi ca vt liu nano thng c cp n: * Cc tnh cht c hc: tnh n hi, tnh cng/do, v.v... * Cc tnh cht t: t mm, t cng, tnh cht lm lnh t (t nhit), cc hin tng t in tr, v.v... * Kh nng tch tr hydro,... NguyenAnhTuan-ITIMS - 2012

V d v vt liu khi c cu trc nano Particle
Grain

Hnh vi khi (hay nhng tin on) v t/c c hc ca vt liu nano: - Tnh cht n hi (elastic):
C mdul n hi Young, E, thp hn ng k so vi cc vt liu c kch thc ht thng thng: ch bng khong 30-50%.
- Tnh cng (hardness) v tnh bn (strength):

+ i vi nano tinh th ca KL sch: C cng v bn rt cao: t 2 n 7 ln ln hn ca nano tinh th ca cc KL sch vi kch thc ht ~ 10 nm so vi cc KL c kch thc ht > 1 m. + i vi cc vt liu ch c kch thc ht thang nano: cng gim khi gim kch thc ht c dc Hall-Petch m.
- Tnh d ko si (ductility) v tnh do (toughness)

nhit tng i thp, i vi cc vt liu gm gin, d gy v; hoc cc hp kim lin KL c kch thc ht thang nano, khi c cu trc nano, c ch bin dng tun theo kiu khuch tn (diffusional deformation mechanisms). Cc vt liu gin thng thng tr nn c tnh do, thm ch siu do.

3.3. Hnh vi KHI ca cu trc nano - Tnh d ko si (ductility) v tnh do (toughness)
+ Kch thc ht c nh hng mnh ln tnh cht mm v do ca vt liu c kch thc ht thng thng (> 1m). Khi kch thc ht tr nn tinh hn, cc vt nt vi m kh lan rng hn, do lm tng do nt biu kin. + Trong cc VL nanocomposite, ng sut nt c th thp hn ng sut n hi, do lm gim do. V bn, cc KL nano tinh th sch c kch thc ht < 30 nm th hin hnh vi d ko di ng k.
- Hnh vi siu do (superplastic) L kh nng bin dng ko cng rt ln m khng

cn xit hay b ( dn di c th ln n t 100 % n > 1000 %). Khi kch thc ht gim xung, nhit gim ti im xut hin trng thi siu do; trong khi t sut sc cng li tng ln.
- Nhng tnh cht c hc khc thng khc ca cc vt liu nanocomposite

Vi kch thc ht nh xung n ~ 2 nm xut hin bin dng trt: VD nh hp kim Fe-10%Cu vi kch thc ht trong khong 45 1.680 nm; hay trong cc vt liu hp kim KL v nh hnh, hoc polymer v nh hnh.
4. Mt s vn chung v cng ngh ch to vt liu nano

4.1. Nguyn tc chung
CNG NGH "T TRN XUNG" TOP DOWN TECHNOLOGY CNG NGH "T DI LN" BOTTOM UP TECHNOLOGY
Cu trc nano
o gt t khi ln xung n cu trc nano: - Phng php c hc (nghin bi, cn, n, p, ) - K thut khc (bng nh sng, chm tia X, chm tia in t, ...) - n mn ho hc (tm thc,) Sp xp/lp rp t cc khi c kch thc nano: - C c t bt/sol kh - Tng hp bng phng php ho hc (sol-gel, hon nguyn,...) - Lng ng bng phng php vt l (bc bay, phn x, phun, quay ph, ...)

4.2. Mt s phng php ch to cc cu trc nano in hnh CNG NGH "T DI LN" CNG NGH "T TRN XUNG"
Sp xp/lp rp t cc khi c kch thc nano: - C c t bt/sol kh - Tng hp bng phng php ho hc (sol-gel, hon nguyn,...) - Lng ng bng cc k thut vt l (bc bay, phn x catt, phun, quay ph, ...) - M in ha,...
o gt t khi ln xung n cu trc nano: - Phng php c hc (nghin bi, cn, n, p, ) - K thut khc (bng nh sng, chm tia X, chm tia in t, ion ...) - n mn ho hc (tm thc,) - n mn vt l (in PRF)
Di y s trnh by cc phng php ch to mng mng c bn: - bc bay - phn x catt - epitaxi bng chm phn t (MBE)
Mt s phng php ch to mng mng cNG NGH "T DI LN (BOTTOM UP)

Cc phng php s dng k thut ph vt l (PVD)
K thut bay hi trong chn khng (Evaporation) K thut phng in ho quang (Glow Discharge)
Cc phng php s dng k thut ph ho hc (CVD) Ph/php ho hc t pha kh Ph/php ho hc t pha lng
Bay hi nhit Joule Bay hi bng chm in t (EBE) Bay hi phn ng

(Reactive evaporation)
Phn x catt (DC /AC) Bias sputtering (Ion plating) Reactive sputtering Cluster beam deposition Phn x magnetron Ion beam deposition Ion beam sputter deposition Reactive ion platin Cluster beam deposition Plasma-enhanced CVD Plasma oxidation
Bay hi trong chn khng
Bay hi bng chm tia lade (Laser ablation deposition, LAD)
Epitaxy
Epitaxy bng chm phn t (Molecular Beam Epitaxy, MBE)
Plasma anodization Plasma Plasma polymerization Plasma nitridation Plasma reduction Microwave ECR plasma CVD Cathodic arc deposition

4.3. iu khin s hnh thnh cc cu trc nano nguyn t/phn t n lp trn b mt (SAM: self-assembly monolayers) SAM monolayers Cc k thut ch to t lp rp (self-assembly) & kin trc theo khun mu (pattern) cc cu trc nano dng n lp nguyn t/phn t
Phng php Thang di c trng
- In vi tip xc (CP) .............. 100 nm cms - Vi gia cng c kh ...............

- Quang khc/lift-off ............... - Kin trc khun mu kiu
100 nm ms > 1 m > 1 m > 1 m ~ ms 25 100 nm 15 50 nm ~ 10 100 m

nh TEM ca cc ht FePt t sp xp vi khong cch ~ 6.5 nm
quang ha .............................
- Quang xy ha .................... - Vit bng chm ion hi t .... - Vit bng chm e- ................ - Vit bng STM .................... - Vit bt siu nh .................
5. Cc cng c cho khoa hc nano
(ch to, thao tc, lp rp v phn tch cc cu trc nano)
5.1. Cc cng c quan st/phn tch cu trc nano 5.2. Cc cng c ch to cu trc nano 5.3. Cc cng c thao tc/lp rp trn cc i tng nguyn t/phn t
5.1. Cc cng c quan st/phn tch cu trc nano
Thang nano
Thang nano
phn gii t thang nano tr xung ca mt s k thut nhiu x v hin vi SPM

5.1. Cc cng c quan st/phn tch cu trc nano
Phn b phn gii thang nanomt trong khng gian ca mt s k thut hin vi
5.1. Cc cng c quan st/phn tch cu trc nano 1) Cc hin vi u d qut (SPM) - Scanning Probe Microscope
Hin vi lc nguyn t (AFM) - Atomic Force Microscopy Vt chm tia laser phn x thay i v tr
Nguyn l hot ng ca AFM
Hin vi lc nguyn t (AFM) - Atomic Force Microscopy
Cu to ca AFM
Hin vi lc nguyn t (AFM) - Atomic Force Microscopy
Mt h knh hin vi AFM
nh AFM (topography) cho thy mng nguyn t HOPG (Highly Oriented Pyrolitic Graphite). Kch thc nh: 2 nm x 2 nm.
Hin vi xuyn ngm qut (STM) - Scanning Tunneling Microscope
I
S0
0 2 S
0 2 T
exp( 2 Kd )
T0
J (V ) ~
D ( E V ) D ( E )[ f ( E V ) f ( E )]dE
S T
Cu to v nguyn l hot ng ca STM
Hin vi xuyn ngm qut (STM) - Scanning Tunneling Microscope Mode dng khng i Mode chiu cao khng i
z I = const.
z = const.
nh STM phn gii n kch thc nguyn t ca b mt HOPG (Highly Oriented Pyrolytic Graphite)
Hin vi quang hc (qut) trng gn (Near-Field Optical Microscopy)
Cc tn gi khc nhau: - SNOM (Scanning Near-Field Optical Microscopy) - NSOM (Near-Field Scanning Optical Microscopy)
Tm kim loi c l nh hn bc sng
- nh sng trng c trung bnh ~ 0.55 m (550 nm) c phn gii rmin ~ 0.275 m (275 nm). - S dng quang hc trng gn (quang hc nano) ph v gii hn nhiu x c th phn gii n < 50 nm (b hn ch bi kch thc l aperture)
Trng gn
Trng xa
Cc cu hnh ca SNOM Cu hnh s dng aperture phng
CCD Cu hnh s dng aperture kiu ng rng hnh cn (si quang vi u tip hnh cn c l rng)
- V d v nh SNOM:
nh topography
nh NSOM
5.1. Cc cng c quan st/phn tch cu trc nano 2) Cc hin vi in t phn gii cao (HREM) - FE-SEM
Nguyn l cu to v to nh SEM
5.1. Cc cng c quan st/phn tch cu trc nano 2) Cc hin vi in t phn gii cao (HREM) - FE-SEM
n tinh th W c n mn to thnh mi nhn dng lm ngun pht x trng.
S pht x ca in t l do b bt ra khi nguyn t di tc dng ca in trng cao.
5.1. Cc cng c quan st/phn tch cu trc nano 2) Cc hin vi in t phn gii cao (HREM) - HRTEM TEM
Nguyn l quang hc to nh ca TEM thng
S cch in Sng in t Knh t Vt knh V tr t mu Knh phng Quan st
= h/(mv)
Khi in p gia tc cng cao ca in t, , cng ngn: bc sng
50,000 volt (50 kV) ~ 0.0055 nm (0.055 )

ng nhm phng i Mn hunh quang Bung chp nh
1MeV
~ 0.00123 nm (0.0123 )
Tiu chun Rayleigh (Rayleighs Criterion) c in xc nh kh nng phn gii ln nht:
rmin ~ /2
5.1. Cc cng c quan st/phn tch cu trc nano 2) Cc hin vi in t phn gii cao (HREM) - HRTEM
TEM 1 triu vn (MeV) vi ngun in t pht x trng (FE), c th phn gii n ~ 0.5 .
5.1. Cc cng c quan st/phn tch cu trc nano 2) Cc hin vi in t phn gii cao (HREM) - HRTEM
TEM 3 triu vn (MeV) vi ngun in t pht x trng (FE), c th phn gii n ~ 0.1 .
5.1. Cc cng c quan st/phn tch cu trc nano 2) Cc hin vi in t phn gii cao (HREM)
So snh nguyn l cu to v to nh trong cc hin vi OM, TEM & SEM
5.1. Cc cng c quan st/phn tch cu trc nano 3) Cc phng php nhiu x
Nhiu x tia X (XRD)
Nguyn l nhiu x trn mng tinh th
Gin nhiu x ca n tinh th
Gin nhiu x ca a tinh th
Nguyn l xc nh kch thc ht tinh th bng pp Scherrer.

Nhiu x in t (ED)
Nhiu x neutron (ND)

XRD ND
S dng nhiu x Neutron (ND) cho php xc nh c nhiu mt tinh th hn so vi pp XRD - phn tch/xc nh cu trc tt hn. Da trn o cng tn x, xc nh c phn b mt in tch v ht nhn cc nguyn t trong mu
K thut tn x Neutron gc nh (SANS) trn tinh th La1.83Sr0.17CuO4+
5.2. Cc cng c ch to cu trc nano 1) K thut chn khng
- Mi trng chn khng l g? - Vt l phn t v dng chy ca cht kh - Cc bm chn khng - H chn khng - o chn khng - Qu trnh hnh thnh mng mng

lng ng mng mng
Dng hi vt liu/ Chm ng. t/ Chm ph. t
Mi trng chn khng Quan h gia mc chn khng (p sut P) v qung ng t do trung bnh ca nguyn t/phn t ()
Hng gradien ca trng: gim nhit /mt vt cht/in trng,...
P (Torr) 10-1 10-2 10-3 10-4 10-5 10-6 10-7 10-8 10-9
0.5 mm 5 5 5 mm cm m
Mi trng chn khng

Dng hi vt liu/ Chm ng. t/ Chm ph. t
50 cm 50 m 500 m 5 km 50 km
Vt liu rn ha hi, tch thnh cc ng.t/ph.t

1) K thut chn khng
5.2. Cc cng c ch to cu trc nano

phn loi Cc khong chn khng Chn khng thp: p sut kh quyn 10 torr, Cc ng dng khng cng nghip Chn khng trung bnh: 10 torr 1 x 10-3 torr CVD, cc h bc bay trong chn khng Chn khng cao: 1 x 10-3 1 x 10-6 torr Bc bay trong chn khng, cy ion, phn x catt Chn khng rt cao: 1 x 10-6 1 x 10-9 torr Cy ion, phn x catt Chn khng siu cao: Thp hn 1 x 10-9 torr MBE (molecular beam epitaxy) Cc thit b nghin cu
Chn khng siu cao
Chn khng trung bnh
Chn khng rt cao
10-18 10-15 10-12 10-9 10-18 10-15 10-12 10-9 10-6
10-6 10-3
10-3 1
1 103
103 (Torr) 106 (Pa)
Chn khng thp
Chn khng cao
1 Atmosphere

1) K thut chn khng

Cc khong chn khng HAY P SUT KHC
Chn khng ngoi khng gian (Outer Space)

T 110-6 ti < 310-17 Torr (100 Pa to < 3 fPa)
Chn khng t c trong PTN: 10-13
Chn khng hon ho (Perfect vacuum)

0 Torr (0 Pa)
10-18 10-15 10-12 10-9 10-18 10-15 10-12 10-9 10-6
10-6 10-3
10-3 1
1 103
103 (Torr) 106 (Pa)
Chn khng thp
Chn khng cao
< 110-12 Torr (< 100 pPa)
Chn khng trung bnh
Chn khng cc cao (Extremely high vacuum)
Chn khng ngoi v tr
Chn khng rt cao
1 Atmosphere

1) K thut chn khng

Cc khong chn khng HAY P SUT KHC
p sut tnh theo Pa My ht bi chn khng Bm chn khng vng cht lng My sy kh ng lnh Bm cnh qut n in nng sng Phch ng nc si Khong khng gian gn Tri t n in t chn khng Bung MBE c bm lnh p sut trn Mt trng Khng gian gia cc v sao gn 80 kPa gn 3.2 kPa 100 -- 10 Pa 100 Pa -- 100 mPa 10 -- 1 Pa 1 -- 0.1 Pa gn 100 Pa 10 Pa -- 10 nPa 100 nPa -- 1 nPa gn 1 nPa gn 1 fPa p sut tnh theo Torr 600 Torr 24 Torr 1 -- 0.1 Torr 1 -- 10 10 10 10 10 10 10
2 6 3
mean free path 70 nm
s phn 3 t/cm 10
19
Torr
3
0.1 -- 0.01 Torr -- 10 Torr -- 10 -- 10

10 11
Torr
7 9
Torr Torr 1..10 km

5
10 ..10
11 17
Torr Torr 1
n v o p sut & H s chuyn i

Ghi ch: lb = pound; bar = barometer (kh p k); kgf = kilogam lc; psi = pounds per squaere inch
Pa (N/m2) 1 Pa 1 Bar 1 Torr 1 Kgf/cm2 1 mmH2O 1 inHg 1 psi 1 atm Bar Torr (mmHg)
7.501103
kgf/cm2
mmH2O
0.1021
inHg
2.953104
psi (lb/in2)
1.4510-4
atm
9.869106
110-5
1.0210-5
1105
1 1.333103
750.1
1.02 1.359103
1.02104
29.53
14.5
0.9869 1.316103
133.3
13.61
0.03937
0.01934
9.807104
0.9807 9.807105
735.5
1.001104
28.96
14.22
0.9678
9.807
0.07348
9.9610-5
2.8910-3
1.4210-3
9.6810-4
3.386103
0.03386
25.4
0.03453
345.6
0.4912
0.03342
6.895103
0.06895
51.71
0.07031
703.7
2.035
0.06805
1.013105
1.013
760
1.033
1.034104
29.92
14.7

CC CH dng chy ca cht kh (ph thuc vo MFP)
Dng chy nht (Viscous Flow): MFP tng i ngn. y l kiu dng chy ca cht kh xut hin khi cc phn t kh kh gn nhau n mc lun va chm vi nhau ging nh cht lng c nn t p sut cao xung p sut thp hn. ng vi ch chn khng thp. Dng chy phn t (Molecular Flow): MFP kh di. y l kiu dng chy ca cht kh xut hin khi hng di chuyn ca cc phn t kh hon ton ngu nhin, nhng vn c i cht va chm gia cc phn t kh. ng vi ch chn khng cao v siu cao. Dng chy (Knudsen Flow) (MFP nm trong khong chuyn tip gia hai khong trn) y l kiu dng chy an xen gia kiu chy nht v chy phn t ca cht kh (c tnh cht ca c hai kiu chy). ng vi ch chn khng trung bnh.

Cc thnh phn c bn ca mt h chn khng - Bung chn khng - Bm chn khng - ng dn, ng ni - Van chn khng - Dng c o chn khng (o p sut thp)
Bung chn khng u o chn khng cao (Penning) Van x, V4 Van chn khng cao, V2 Bm kh. tn Van bm s b, V3 G2 G1 u o chn khng thp (Pirani) Bm c hc
VAr
H chn khng Bung chn khng
V4
V2
G3
Bm khuch tn V1
V3
Van bm s b, V1
Bm c hc
S mt h chn khng c bn
5.2. Cc cng c ch to cu trc nano 1) K thut chn khng H chn khng
5.2. Cc cng c ch to cu trc nano 1) K thut chn khng H chn khng
Khong p sut lm vic ca cc loi bm chn khng

Ultra-high Vacuum <10-7 mbar (<10-5 Pa) High Vacuum 10-7..10-3 mbar (10-5 ..10-1 Pa ) Med Vacuum 10-3..1 mbar (10-1 ..101 Pa) Rough Vacuum 1.....103 mbar 102.....105 Pa
Piston Pump Diaphragm Pump Liquid-Ring Pump Sliding Vane Rotary Pump Multiple-Vane Rotary Pump Rotary Piston Pump Rotary Plunger Pump Roots Pump Turbine Pump Gaseous-Ring Pump Bm tubo phn t (Turbomolecular Pump) Bm phn lc ch lng (Liquid Jet Pump) Bm phn lc hI (Vapor Jet Pump) Bm khuch tn (Diffusion Pump) Bm pht khuch tn (Diffusion Ejector Pump)
Bm thng hoa (Sublimation Pump) Bm phn x ion (Sputter-Ion Pump) Bm nhit lnh (Cryo Pump)
Bm hp th (Absorption Pump)
10-14
10-13
10-12
10-11
10-10
10-9
10-8
10-7
10-6 P (mbar)
10-5
10-4
10-3
10-2
10-1
100
101
5.2. Cc cng c ch to cu trc nano 1) K thut chn khng Cc bm c hc thng dng

Bm rotor (Bm quay du): Khong lm vic: t p sut kh quyn - 10-3 Torr
Bm Roots: Khong lm vic ca chnh n: t p sut kh quyn - 100 Torr; khi c bm c hc khc tr gip: t p sut kh quyn - 10-4 Torr.
Bm khuch tn thng dng
Oil Diffusion Pump: Khong lm vic: t 10-3 ti 10-8 Torr.


Bm turbo thng dng u vo ni vi bung chn khng Bm turbo phn t: - Tc quay: 20.000 30.000 vg/ph - Tc bm: 103 lt/giy - Khong chn khng t c: 10-9 -- 10-11 Torr.
Rotor: l cc a gm cc cnh qut c xp nghing vi gc khc nhau
ng c in u ra ni vi bm c hc
u u in cho ng c in Turbo-molecular Pump
o chn khng
Hai cch o chn khng, ty thuc vo khong p sut cht kh: Phng php trc tip (thng p sut cao - chn khng thp) ng Bourdon p k t in Phng php gin tip (thng p sut thp - chn khng cao) Cp nhit in u o Pirani u o ion catt nng/lnh (Hot-Cathode/Cold-Cathode Ion Gauge) u o rto xoy (Spinning Rotor Gauge)
Khong p sut lm vic ca cc u o chn khng

Ultra-high Vacuum <10-7 mbar ( <10-5 Pa) High Vacuum 10-7..10-3 mbar (10-5 ..10-1 Pa) Med Vacuum 10-3..1 mbar ( 10-1 ..101 Pa) Rough Vacuum 1.....103 mbar (102.....105 Pa)
p k mc cht lng (Liquid Level Manometer) u o phn t n hi (Elastic Element Gauge) u o nn (Compression Gauge) Cn bng p sut (Pressure Balance) u o nht (Viscosity Gauge) u o dn nhit (Thermal Conductivity Gauge) u o cp nhit (Thermomolecular Gauge) u o Penning (Penning Gauge) u o ion ho do phng x (Radioactive Ionization Gauge)
u o ion catt lnh Cold-cathode Magnetron Gauge u o ion nghch chuyn catt lnh (Cold-cathode Inverted Magnetron Gauge) o chn khng tn s cao (High-frequency Vacuum Test) u o ion ho catt nng (Hot-cathode Ionization Gauge) u o ion ho p sut cao (High-pressure Ionization Gaugue) u o Bayar-Alpert (Bayard-Alpert Gauge) u o iu bin (Modulator Gauge) u o nn (Suppressor Gauge) u o tch chit (Extractor Gauge) u o chm tia Bent (Bent Beam Gauge) u o ion catt nng (Hot-cathode Magnetron Gauge)
10-14
10-13 10-12 10-11 10-10 10-9
10-8
10-7 10-6 10-5 P (mbar)
10-4
10-3
10-2
10-1
100
101
102
103

u o cp nhit: (TC Gauge) Khong lm vic: t p sut kh qun ti 1 Torr.
u o Pirani Khong lm vic: t p sut kh qun ti 10-4 Torr.


u o ion catt nng
Khong lm vic: t 10-2 ti 10-10 Torr.
u o ion catt lnh
Khong lm vic: t 10-2 ti 10-9 Torr.

dn v tc ht trong cc h chn khng
dn: l kh nng cho php dng phn t chy qua mt thnh phn ca h chn khng (ng dn, van, bung,...). n v : th tch/thi gian (lit/s, foot3/min (CFM), hoc cm3/min,...) dn trong cc h c ht ni tip 1/Ctotal = 1/C1 + 1/C2 + 1/C3 + . . . dn trong cc h c ht song song Ctotal = C1 + C2 + C3 + . . .

Tc bm (S = V/t): l tc rt kh khi mt h thng ca bm chn khng ( u vo ca bm). n v: th tch/thi gian (lit/s, foot3/min (CFM), cm3/min,...) Lng kh ti (Q, quantity of gas): l lng kh c vn chuyn ra khi h chn khng. n v: torrliter Tc kh rt (Thoughput): l khi lng kh c bm p sut cho (Q=PS) trong mt n v thi gian: PV/t. n v: torrlit/s, atmcm3/h
S ph thuc p sut ca tc bm ca mt bm khuch tn ng knh 15.24 cm vi bm c hc tr gip c tc bm l 20 CFM v ng cong ca tc rt kh.
Tc rt kh (Torr-lit/s)
Tc khng kh (lit/s)
Tc u vo ca bm Tc bm
Tc rt kh
p sut kh u vo (Torr)

S hnh thnh mng mng t lng ng nguyn t/phn t Cc qu trnh lng ng mng mng (bng PVD): - To ra trng thi hi, chm nguyn t hay phn t phn ly, hoc chm ht ca vt liu. - nh hng/pht tn dng hi vt liu, nguyn t, phn t hay chm ht ti b mt ngng t (thng s dng s chnh lch v nhit , grad.T). - Hp th v lng ng (ngng t) thnh mng mng. Cc phng php c bn to ra cc trng thi hi vt liu, nguyn t, phn t hay chm ht (bng PVD): - Nhit (Joule, in t, chiu x, cm ng,) - Bn ph (bng cc chm ht nng: ion, ng.t, ph.t, chm ht, ) - Pht x (nhit lnh s dng in trng, cm ng hoc chiu x, ) Cc bc c bn trong qu trnh hnh thnh mng: - Ngng t - Khuch tn - Mt mt (truyn) nng lng v nh v (n nh trong h th nng).
- v.v
Cc bc c bn trong qu trnh ln ln ca mng mng:

1- Hp th vt l (physisorption) ca nguyn t/phn t, 2- Khuch tn b mt, 3- Hnh thnh cc lin kt phn t - phn t v - phn t (hp th ha hc: chemisorption), 4- To mm: kt t (kt tp) ca cc ng.t/ph.t n, 5- Hnh thnh cu trc v vi cu trc (v nh hnh, a tinh th hoc n tinh th; cc sai hng; mc nhm b mt, v.v...), 6- Cc thay i trong lng ca mng, nh s khuch tn, s pht trin dng ht, v.v...
Hi phn t Phn x Ti hp th Gii hp th
Dng ion i n H s hp th vt l H s hp th ha hc
B mt
H s bm dnh
Nhit
di bc nhy

S hnh thnh mng mng t lng ng nguyn t/phn t
3 c ch c bn hnh thnh mng mng

Quan st b mt mc
Quan st qu trnh hnh thnh mng mng a) hnh thnh mm b) hnh thnh ht c) hnh thnh o d) lin kt/kt dnh cc o => hnh thnh cc knh lin thng nhau e) ni lin cc knh Quan st s kt dnh cc o: a) thi im bt du quan st b) sau 0.06 giy; c) sau 0.18giy; d) sau 0.50 giy; e) sau 1.06 giy; f) sau 6.18 giy NguyenAnhTuan-ITIMS - 2012
Quan st hng ct mc
M phng bng my tnh vi cu trc ca mng Ni c lng ng cc thi im khc nhau v cc nhit khc nhau, v hnh nh quan st c thc t (SEM).
5.2. Cc cng c ch to cu trc nano 2) K thut bc bay trong chn khng
Bung chn khng
mu
Mng mng rn lng ng Vt liu bc bay

Thuyn t
in cc
Ngun DC Ti bm chn khng

5.2. Cc cng c ch to cu trc nano 2) K thut bc bay trong chn khng

Mt s ngun t bc bay thng dng
Dng ni gm bng carbite/borite
Dng dy W qun thnh gi
Dng dy W qun l xo (coil) Dng l W/Mo dp thnh thuyn Dng dy W qun ph alumina
C ch bn ph b mt cht (ch to, thao tc, lp rp v phn tch cc cu trc nano) rn to ra s phn x
5.2. Cc cng c ch to cu trc nano 3) K thut phn x catt

Nguyn l ca k thut to mng mng bng phn x catt
Phi hp tr khng in cc Catt Bia
Bc x
C ch bn ph bia (target) & to ra hin tng phn x
Vng ti catt Vng phng in ho quang
Cc ng.t bia Vng ti ant lng ng mng mng
in cc Ant
Ngun pht tn s cao RF
Cc ion kh tr (Ar+)

3) K thut phn x catt

Mt s dng bia (target) thng dng. - Dng a kim loi & hp kim - Dng a gm hay bt p p lc cao
5.2. Cc cng c ch to cu trc nano 3) K thut phn x catt

Cc bia (target) c lp vo cathode to thnh ngun phn x (sng - gun) Hin tng phng in plasma
H thng bia lp trn cathode
5.2. Cc cng c ch to cu trc nano 4) K thut MBE to ra cc cu trc nano

- MBE: Molecular Beam Epitaxy - sp xp trt t, ln lt, tng lp mt (epitaxy) cc ph.t/ng.t (c th nhiu loi, n t mt hay nhiu ngun, v to thnh dng/chm), ln b mt phin tinh th (n) sch, trong mi trng chn khng cao v siu cao (~10-8 - 10-12 Torr), to ra cc mng mng n tinh th. [c pht
minh Bell Tel. Lab bi J. R. Arthur v Alfred Y. Cho nhng nm cui ca thp k 1960].
- u im phng php MBE: MBE + Cht lng mng rt cao, thm ch hon ho mc nguyn t (tc lng ng rt chm: ~ 1000 nm/h), v siu sch; + Chiu dy rt xc nh, chnh xc (n c 1 lp nguyn t n); + B mt mng rt bng phng (mt nguyn t); + To c cc g, bc dc thng ng hon ho trn b mt mng; + iu khin c thnh phn gn nh tu theo profile Do to c th V(z) c dng tu l hm ca v tr z dc theo phng xp chng ca cc nguyn t/phn t (vung gc vi b mt mng).

Thi gian hnh thnh n lp nguyn t ph thuc vo p sut
Chn khng trung bnh
Chn khng siu cao
Chn khng rt cao
Chn khng thp
Chn khng cao
- Mt h MBE

- ng dng chnh ca phng php MBE: + To ra cc h lng t (QW: quantum well); + To ra cc ro th xuyn ngm hon ho; + To ra cc siu mng (superlattice) hay hp kim s (digital alloy); + To ra cc b mt tip xc d cu trc hon ho n mc nguyn t; + To ra cc bc thng v phng hon ho ca mt tip xc; + To ra cc vi cu trc lng t khc. - K thut nhiu x in t nng lng cao phn x (RHEED - Reflection High Energy Electron Diffraction) lun song hnh vi k thut MBE quan st v iu chnh qu trnh lng ng to cc lp n tinh th.
- Qu trnh hnh thnh cc lp nguyn t bng k thut MBE

5.2. Cc cng c ch to cu trc nano 5) K thut SPM to ra cc cu trc nano
NanoQuebec
McGill University
- To ra cc cu trc xon lng t (quantum corral)
Thao tc theo kiu x y (Pushing mode) lm dch chuyn nguyn t mt cch c hc bng hin vi ng lc hc bin nh (Small Amplitude Dynamic Force Microscopy). Nguyn t ch b chuyn n ch khuyt vi khong dch chuyn ~ 270 pm (10-3 nm).
Cc nguyn t b mt Si(111)
(S. Kawai and H. Kawakatsu, "Mechanical atom manipulation with small amplitude dynamic force microscopy", Applied Physics Letters 89 (2006) 023113).
5.2. Cc cng c ch to cu trc nano 5) K thut SPM to ra cc cu trc nano Xp giy ngh thut l graphene bng git cht lng nano (nanodroplet)
Materialstoday | MARCH 2010 | VOLUME 13 | NUMBER 3 | p.8/ Katerina Busuttil
5.2. Cc cng c ch to cu trc nano 6) Cc k thut khc - n mn nano
CNG NGH "T DI LN"

- Khc bng chm nh sng (Quang khc) - T ngoi xa (ExUVL) - Khc bng chm tia X (XPL) - Khc bng chm tia in t (EBL) - Khc bng chm tia ion phn k (IPL) - Khc bng chm tia ion hi t (FIBL) - K thut photoresist (FPR) - K thut n mn kh v t - K thut n mn ion phn ng - K thut lift-off
6. ng dng ca cng ngh nano - Cc sn phm t cng ngh nano

Mt s sn phm c trn th trng: - Kem chng nng (Sunscreen) - cha cc ht nano l xt km (ZnO) hoc oxt titan (TiO) c kh nng chng tia cc tm (UV) gy ung th da. - Knh t sch (Self-cleaning glass) Hay cn gi l knh tch cc (Activ Glass), c s dng nhiu trong cc cng trnh xy dng cao tng. Cc ht nano cha bn trong thy tinh thc hin phn ng quang xc tc v thm nc: Hiu ng quang xc tc xy ra khi bc x cc tm (UV) t nh sng mt tri chiu ln knh, cp nng lng cho cc ht nano thc hin s b gy lin kt b mt v lm mt i cc phn t hu c nm trn b mt knh (l cc ht bi). S thm nc c ngha l khi nc tip xc vi knh s nhanh chng loang ra, lm cho knh c ty ra sch bi v chng kh.
LOral

- Vt liu chng xc (Scratch-resistant coatings) Cho cc ht nano AlSiO2 (aluminum silicate) vo trong polymer ngi ta to ra c mt loi vt liu c tnh chng xc (scratch-resistant polymer) dng ph bo v chng bong trc v try xc cho t, xe my, knh mt, v.v...
- Vi nano - Ph ln b mt si dt mt lp mng cha cc ht nano ZnO.
Vi c to ra t loi si ny c th chng bc x tia cc tm (UV) v c tnh y nc (v vy vi khng thm nc, chng kh) v y bi bn bm vo mt vi (c tnh chng bi bn (stain-resistant), v vy qun o rt sch), v c bit vi nano c tnh chng nhn/nhu (wrinkle-resistant fabrics). - Bng/gc y t chng nhim trng (Antimicrobial bandages) Cc ht nano Ag c a vo bng, bng y t (k c qun o) s lm tng mnh tnh khng khun do cc ion bc c tc dng kha cc t bo h hp ca vi khun lm cht ngt chng.

- Cht lm sch v ty u b bi (Swimming pool cleaners and disinfectants) Mt hn hp, ca mt loi du di dng git c kch thc nano trn vi mt cht xt trng to ra mt loi nh tng nano (nanoemulsion) c tnh cht st khun, ty trng, ty u. Cc ht du bm dnh vo vi khun lm cho vic ty ra, st trng hiu qu hn. - Mt s sn phm khc: M phm thm su (deep-penetrating cosmetics). Vt tennis lm bng si nano carbon (CNT) va nh va bn hn thp nhiu ln. Bng tennis 2 li trong li bn trong c ph cc ht nano t st (clay nanoparticles, c tc dng nh l cht bt kn, lm cho khng kh kh b r r ra ngoi). Mn hin th tinh th lng (LCD: liquid crystal displays); cc linh kin vi in t v nano in t.

Mt s kh nng ng dng khc: - Ch to thuc v phng thc vn chuyn thuc hon ton mi
Cc ht vng (c th c gn vi nhau) c lm nng bng hng ngoi t bn ngoi c th iu khin vic nh thuc. Cc ht t nano c th c dng dn thuc bng t trng ti khu vc b tn thng. Kim tim thuc nano. ...
Kim tim nano

Mt s kh nng ng dng khc: - Chuyn i v tch tr nng lng Chuyn i nng lng c thnh nng lng in & ngc li Chuyn i nng lng t thnh nng lng in & ngc li Chuyn i nng lng t thnh nng lng nhit (t nhit) Nh hnh dng Chuyn i nng lng in ha Tch tr hyro

Mt s kh nng ng dng khc: V d v chuyn i v tch tr nng lng - Chuyn i nng lng c thnh nng lng in:
Cc hng di chuyn ca tm in cc
Tension
Compression
Tension
Compression
Nanowire
Nanowire
- Dy nano Zinc Oxide c cc tnh cht bn dn v nhit in (piezoelectric).
- Lc hp dn khng c bt k ng gp g v chuyn ng thang nanomt. - Trong khi dy nano b un i khi c mt vt y u dy t pha ny sang pha kia.
- S dng mt dy cc dy nano c cc tnh cht bn dn v nhit in (nh "c nano" Zinc Oxide). - Tm in cc t trn u cc dy nano c th di chuyn sang hai bn do chuyn ng c hc Lm bin dng c hc cc dy nano Xut hin hiu ng p in To ra in p mch ngoi.
7. Nhng c hi v thch thc i vi KH & CN nano

Nhng c hi t KH & CN NANO:
Lm thay i sn phm cng nghip Lm thay i nn kinh t. Lm thay i con ngi: i sng x hi v i sng sinh hc. Ph v nhng ro cn truyn thng gia cc ngnh nh ha hc, vt l v sinh hc. Hnh thnh cc lin ngnh/a lnh vc & Nhn thc/hiu bit mi. Nhng c hi to ln trong vic ci thin vic nh gi v bo v mi trng: nng lc i din vi cc th hn n phc tp n cha trong mi trng xung quanh mt cch thng minh v chnh xc; To ra c nhng thit b cm bin "thng minh" c kh nng thc hin c cc thao tc m khng cn tip xc vi cht gy nhim; C kh nng thit k v ch to cc hp cht v vt liu mong mun m khng to ra cht thi; C kh nng ha gii c cc cht gy nhim m cc k thut khc phc truyn thng rt kh hay khng th thc hin c. C kh nng thit k cc vt liu nano c th t suy thoi, hay phn hy thnh cc vt liu hu ch th cp.

Nhng c hi: Pht trin kinh t
Th trng cc sn phm da trn cng ngh nano ang gia tng nhanh chng: Cc sn phm y t: nh van tim, h thng phn phi thuc, k thut chn on hnh nh, Cc linh kin v thit b in t Sn chc nng bo v: chng xc, chng mi mn, chng bi, chng bc x t ngoi, Cc dng c, thit b th thao: vt, khung, v xe ua, v bng, Cc loi si vi chng nhn, chng bin mu, chng nhim bi, bn, M phm: kem chng nng, v cc m phm khc. Th trng cc sn phm nano ca ring chu u vo nm 2008 c tnh ~ 2,5 t , c nh gi c th s tng ln n hng trm t vo nm 2015, v ~ 1 nghn t vo nhng nm tip sau . T nm 1999, c khong $ 900 triu USD vn u t mo him cho cc cng ty cng ngh nano, ring vo nm 2003 c u t ti 386 triu USD. Trong nm 2004, trn ton cu cc tng cng ty (corporations) phi chi ti 3,8 t USD cho nghin cu v pht trin cng ngh nano. Ring M, trong nhng nm cui thp nin 2010, mi nm u t > 1 t USD cho nghin cu KH&CN nano.
Ngun: Towards a sustainable nanotechnology. EC Communication 338, (2004)

Nhng c hi: Pht trin kinh t
- Lux Research d on n 2014 cng ngh nano s c lin quan ti 15% tt c cc sn xut hng ho, c tr gi khong 2,6 nghn t USD. - Cc sn phm kt hp cc cng ngh nano mi ni s to ra ~ $ 920 t USD v gi tr, chim 2% GDP ton cu. - Ch to, sn xut kt hp Cng ngh nano s chu trch nhim cho 10 triu vic lm trn ton th gii, bao gm 11% tng s ngh nghip ch to, sn xut. L do k vng vo nn sn sut, ch to theo cng ngh nano: S cho php to ra mt mi trng sch hn, v: D kin quy trnh ch to s c dch chuyn t cch thc t trn xung thnh t di ln. Cc cng ngh v vt liu hin c s c ci thin, v vy hiu qu s gia tng v cc tnh cht c th c kim sot/iu khin. Mt s ht nano c th c hiu qu trong vic x l mt s cht thi c hi.
Ngun: Lux Research, The Nanotech Report 2004, (2004)

Tuy nhin: - Nhng tin b trong KH&CN nano gp kh khn, do b chm li trong vic a cc vt liu nano t phng th nghim n vi sn xut cng nghip. - C hai thch thc c bn lm chm s pht trin ny: s thiu hiu bit v cc mi nguy him mi do cng ngh nano mang li, thiu cc chnh sch thch hp qun l nhng ri ro. Lu - thc hin c nhng c hi ny, trong khi nhng c hi khc cha hnh thnh, v trnh nhng cm by/ri ro - ch yu tc ng c hi n mi trng v sc khe - cn phi xy dng c mt m hnh tng th, trong quan trng nht l phi n lc phi hp c vi tt c cc bn c lin quan, cn kt hp cn nhc gia vic ci thin cht lng i sng trn cc lnh vc x hi v vn ha, vi cc vn cng bng v bnh ng, vi nhu cu kinh t v s hn ch v ngun lc, v nhu cu v nng lng v hn ch v ngun nng lng.

Tuy nhin: - Bn cnh nhng ch li v nhng thch thc l nhng bt n, ri ro v mo him. (V d: mc nguy hi tim n ca cc ht nano ti mc vo 1/2008 Hip hi t trng ca Anh (UK Soil Association) phi thng qua chnh sch t chi nano (nano-free) cho nhng sn phm hu c). - i hi s t duy khc v: qun l, cng (hp) tc, nhng vn chui gi tr (chui cc hot ng nhm to ra cc gi tr gia tng cho sn phm), gio dc, v v ku gi cc ti tr nghin cu (t ra cc mc tiu, nhim v thch hp). - Ngi tiu dng lc hu so vi s pht trin ca KH&CN nano Khng cm nhn chc chn, r rng v sn phm nano. - Cc phng tin thng tin v truyn thng, cc nh SX qung co v sn phm cng ngh nano gy tnh trng ln xn, nhiu, hn lon, kh nm bt thc cht v tnh nng, tnh cht v nguy c ca sn phm cng ngh nano.

Nhng bt n v ri ro:
- Trong thi gian qua, cc chuyn gia cng ngh ch ra nhng nh hng tim n ca vt liu nano i vi x hi, v nhu cu cn gii quyt cc bt n hin nay. - c thi hoi nghi ca gii khoa hc v ngha ca nhng pht hin v a vo s dng cc tnh nng nano cho cc vt liu nano 'thc t' (ngha l thit k/lp t ra vt liu). cn phi c thi nghim tc v vn ny - Cc sn phm nano khi trn th trng, nh dioxide titanium (TiO2), dioxide silic v nh hnh (SiO2), v oxit st, v ang c mt trong nhiu sn phm tiu dng, bao gm c ph gia thc phm, bt mu, sn, v m phm,... Vn t ra l cn ch ti cc tc hi ca cc ht nano th h mi, lm sao c th phn bit v ngn chn c gia tnh tt, xu, v t hi, iu chnh thit k v kim tra /v cc vt liu ny. Cn phi c cc phng php ngn chn cc lai ht nano c tc ng xu v t hi. y l mt trong nhng nhu cu cp bch nht ca ngnh cng nghip s dng cng ngh nano. Cn lu cc quy nh ph hp vi mt loi vt liu nano c th c th khng ph hp v tnh cht c hi cho tt c cc vt liu nano khc.

Nhng bt n v ri ro: Mt s mi quan tm, lo ngi hin nay v cc ht nano
- Nhng pht hin u tin v nguy c tim n ca nano l i vi cc ht siu mn (cc ht s cp v m tch t < 100 nm), gy nhim trong khng kh, ch yu c sinh ra t qu trnh t chy, nh cc kh thi ng c diesel, c chng minh l c tc ng n tim mch, huyt p, qu trnh ng mu, v gy x va ng mch. - Cc ng nano carbon (CNTs) cng c cho l c tc ng tng t ln qu trnh ng mu nh cc ht siu mn trong khng kh, v c th gy tc hi nh hnh thnh cc u ht v cc vim lot trong phi khi ht phi. - Cc ht nano c thit k (ENPs) c th xuyn qua mng thnh mch mu no, n c khu vc khu gic trong no, v c th vt qua mng nhau thai,... gy ra lo ngi v nhng tc ng n cc c quan ny. - S lo ngi v nhng tc ng tim n ca cc ht nano ENPs ln cc bnh thoi ha thn kinh, nh Alzheimer v Parkinson.

Nhng bt n v ri ro:
- V mt s loi ht nano ENPs (nh TiO2, fullerenes) th hin hiu ng quang xc v to ra cc dng phn ng xy ha kh. Do ht nano TiO2 c dng kho st mc xung cp trong nhim bi cc cht hu c, kh trng nc, thanh lc khng kh, v lm lp ph quang xc tc. Tuy nhin, cc c tnh ny rt ging nhau, thch hp trong mt sn phm hoc mt ng dng no , nhng cc ht nano c th tr nn nguy him nu chng hot ng khng ng ch. V d, trong mi trng nc, ENPs s thc hin cc phn ng vi cc cation, anion v cc cht hu c t nhin. Nhng cc phn ng ny li c th dn n lm bin i hnh thi b mt, gy tch t cc ht ENPs, hoc kt t vi cc ht, cc cht kt ta, cc vi sinh vt. Tm li: Nhng bt n, ri ro ch yu tc ng trc tip ln c th sng, n sc khe ca con ngi, v tc ng ln mi trng sng (mi trng t nhin).

Nhng v d tiu biu v tnh bt n v ri ro: - Nanosilver
Lp ph nano bc c bit n c tc dng khng khun nn ang ngy cng c s dng trong mt lot cc sn phm, nh bng gc vt thng, ng thng ng tiu, qun o t lm sch, kem nh rng, v cc my ra bt, hay lm cc lp ph bo v khc nhau, t ti ng gi thc phm n cc giy ph tng hay trn nh. Mc d nguyn l c da trn s hnh thnh v gii phng chm ca cc ion Ag, nhng cha c thng tin v nh hng ca cc ht nano hoc ion Ag ln qun o v pht tn t lp ph vo mi trng xung quanh. Mc d c tnh ca ion Ag c m t r, ch yu khi tnh trng vt qu ngng cho php v nng cao, v mt mi trng v sc khe, nano Ag c th nguy him v khi tip xc vi Ag c th gy hi cho mi trng nc, l mi trng rt nhy cm. Mi lo ngi ny khin mt s t chc x l cht thi phn i vic s dng nano Ag trong my git.

C rt t d liu v tc hi khi tip xc lu di vi lng ion Ag thp, v khng c thng tin g v vic cc ht nano Ag hot ng nh l mt h mang mm bnh n giu. Lp lun ch o trong vic dng nano Ag dit khun l, cc vi khun khng th khng li Ag bi v chng c xu hng chng li s khng ny. Truy nhin khng phi nh vy, ngi ta li cho rng khng Ag c th t c tng i nhanh so vi cc hiu ng nhy cm vi khng sinh. Do s khng Ag c th pht trin d dng cc vi khun c c ch khng i vi khng sinh, nh l khun t cu vng (MRSA) v nhng loi khun khc khng vi methicillin. S khng Ag c lin quan ti s khng li khng sinh c quan st thy cc vi khun c c lp t cc con chim v trong cc khun salmonella (mt loi khun gy ng c thc n).

C vi khun khng Ag trong ming ca chng ta, c th lin quan n Ag trong hn hp cc cht hn rng. Vi khun khng Ag cng c tm thy trong t nhin, trong thc phm, trong ng rut t cc vng a l khc nhau, v trong cc bnh vin. Th nghim lm sng mt cch h thng trn cc ng thng niu c ph Ag cho thy rng: mt s nghin cu lm nhim trng mu th cp, gy t vong, gy tn km, hoc gy khng vi khun; mt s nghin cu khc li cho thy khng c tc nhn khng Ag trong hai nm dng th.

Nhng v d tiu biu v tnh bt n v ri ro: - Cerium oxide (CeO2) nanoparticles
Ht nano CeO2 c b sung vo du diesel nhm lm xc tc gim kh thi c hi v s pht tn ht thi t cc xe vn ti chy bng diesel. Envirox , mt loi cht xc tc CeO2 dng cho nhin liu, va lm gim lng kh thi dng ht, va lm gim mc tiu th nhin liu ln n 10%, c th nghim thnh cng vi xe but Hng Kng. Hin cha r mc pht thi ca CeO2 s nh hng th no khi thi vo mi trng xung quanh cc ht nano, v cc mi nguy him tim n ca n. D liu t mt s nghin cu (ca hng sx Envirox (Oxonica, USA)) bng cch kch thch phn ng da, gy c t bo, gy bin d vi khun, vi hai loi CeO2 c kch thc khc nhau: 9 nm v 320 nm, cho thy khng c s gy nhim c cho t bo, gy t bin, cng nh khng c c ch v h hp.

Nhng v d tiu biu v tnh bt n v ri ro: - Cerium oxide (CeO2) nanoparticles
Mc d nhng cuc kim tra khng xc nhn mt cch c th cho cc ht nano ny, nhng chng vn cho thy rng khng phi bnh thng m vic s dng nano CeO2 cng khng c hiu lc i vi nhin liu diesel. Cc th nghim cho tip xc m phi vi kh thun CeO2 v cc ht diesel c v khng c CeO2 cho thy khng c tc dng c hi no. nh gi tc ng n mi trng v chu k i sng c xt n tnh hiu qu s dng v tit kim nhin liu cng cho thy l tch cc. Cc ng dng trong y t ca CeO2 cng c th c thc hin da trn cc tnh cht lm sch trit ca n V vy ngi ta xut s dng ht nano CeO2 t xc tc c tc dng bo v trong cc loi t bo khc nhau. D sao, nu c ng dng CeO2, tt nht vn hn ch sao cho ch ht phi ht ny vi liu lng thp nht c th.

Nhng v d tiu biu v tnh bt n v ri ro:
- TiO2 and ZnO nanoparticles Cc ht nano TiO2 v ZnO ang c s dng trong nhiu loi sn phm khc nhau, c bit l kem chng nng. Nu c s hp th qua da ca cc ht nano ny t cc sn phm m phm, c th s gy phin toi ng k cho c th. Do vn rt quan trng l cn phi kim tra xem liu cc ht nano c cn trn da, hoc c th thm nhp c vo h tun hon hay khng. C rt t bng chng cho thy cc ht nano trong kem chng nng i qua c lp sng vo lp h b, v t di chuyn ra nhng ni khc. Vn cn quan tm tip theo l liu c s thm nhp qua lp da b h hi hay khng. Tuy nhin c mt s bng chng cho thy c ng sut do s oxy ha v gy h hi cho DNA trong ng nghim do cc thnh phn ca kem chng nng v c. Ngoi ra, cc nghin cu cng cho thy rng, khi trong mch mu, nhng ht ny c th n c gan, nhau thai, v no.

- TiO2 and ZnO nanoparticles Cc ht nano TiO2 c s dng trong nhiu ng dng khc na. V d, trong cc lp sn ph bo v cho tu nc mn kim sot tnh chng g v gim n mn. nh hng ca cc ht nano TiO2 ln cc sinh vt vn cha c bit. TiO2 cng l mt thnh phn trong mt s cng ngh x l nc, v c tc dng lm gim cc hp cht hu c d bay hi v dit vi khun (nh E-coli) khi kt hp vi nh sng. Hin nay TiO2 dng ht nh Adsorbia GTO - c th loi b c As ra khi nc. C khong 1/3 lng kem chng nng c cha cc ht nano ZnO, bi v ZnO c chc nng bo v da khi tia cc tm (UV). Nhng loi ht nano ny li c xu hng li trn da lu hn. Mt s c quan bo v ngi tiu dng ch trch v cc ch tiu k thut l ha ca ZnO trong nhiu nghin cu khng c y .

- TiO2 and ZnO nanoparticles Cc ht ZnO c kch thc 200 nm, c ph bng cc hp cht khc v c s dng nh l mt thnh phn trong kem chng nng, c chng t l mt tc nhn ph hy DNA bng nh sng, gy tn hi cho cc t bo ca ng vt c v. Do cn phi lm r mi lin quan ca nhng pht hin trn y vi c th ngi v cc sinh vt khc. Tm li: Cn thiu cc d liu ng tin cy v s hp th qua da ca cc ht ZnO mn, trn c s c cho php s dng cc ht mn ZnO lc UV trong m phm hay khng. KT LUN: Mc d cc ht nano c nhng tnh cht, tnh nng vt tri so vi cc vt liu khi, mang li nhiu li ch cho con ngi, nhng vn cn rt nhiu nhng ri ro, bt n, nhng nguy c tim n e da n sc khe v s an ton cho cuc sng v cho mi trng sng ca con ngi. V vy cn ht sc lu tm khi tip xc vi chng trong qu trnh nghin cu v s dng.
KT LUN CHUNG: - C nhiu c hi rt ln pht trin khoa hc, kinh t, x hi, v con ngi. - Nhng cn thc c gia s pht trin, c bit l s dng cc vt liu nano vi cc li ch ca chng, vi vic m bo c s an ton cho sc khe con ngi v cho mi trng t nhin. - Do , thch thc trng tm l: ng thi va pht trin cc sn phm hu ch cho th trng, cho x hi, va thc y c khoa hc c bn. - V vy rt cn trin khai c m hnh green nanoscience &
nanotechnology.
HT PHN GII THIU TNG QUAN

Vat Lieu Nano - Ch0-2012

Uploaded by

Document Information

Original Title

Copyright

Available Formats

Share this document

Share or Embed Document

Sharing Options

Did you find this document useful?

Is this content inappropriate?

Copyright:

Available Formats

Vat Lieu Nano - Ch0-2012

Uploaded by

Copyright:

Available Formats

TRNG I HC BCH KHOA H NI

HANOI UNIVERSITY OF TECHNOLOGY (HUT)

INTERNATIONAL TRAINING INSTITUTE FOR MATERIALS SCIENCE VIN

VT LIU CU TRC NANO

PHM VI, CU TRC MN HC & PHN CNG GING DY

CHNG 3: QUANG T & QUANG IN T NANO (Nguyn Anh Tun)

NI DUNG MN HC Ti liu tham kho

nh ngha v Tm lc lch s v KH & CN nano

1- N & Tm lc lch s v KH&CN nano

T nano c ngun gc t ch Hy lp: nannos, ngha l b nh, nano thp ln.

1 nm c kch thc khong 3 nguyn t Au

1- N & Tm lc lch s v KH&CN nano

Ch : Sub-micron khng phi l 'nano' !

1- N & Tm lc lch s v KH&CN nano

Vo TK 4th sau CN: ngi ta ch to c mt

1857: Michael Faraday a ra phng php to ra dung dch thm

1- N & Tm lc lch s v KH&CN nano

NHNG TIN ON CA R. FEYNMAN C THC HIN

- C th thao tc vi tng nguyn t mt (nh hin vi ion)

NHNG TIN ON CA R. FEYNMAN C THC HIN

Hiu ng GMR (Giant Magnetoesistance)

Cu trc lp ca siu mng Fe/Cr H

NHNG TIN ON CA R. FEYNMAN C THC HIN

Resistance Temperature Detectors

NHNG TIN ON CA R. FEYNMAN C THC HIN

Tip xc xuyn ngm

NHNG TIN ON CA R. FEYNMAN C THC HIN

Nhng khi nim/quan nim v cng ngh nano

Nano: Khoa hc Phc hng

size solid state physics & engineering nm chemistry now! biology

(Theo Peter Grutter, Physics Dept., McGill University)

Nhng tin b c bn trong KH v CN v s lm xoay chuyn 2 ln trong mt th k v dn n vic to ra nhiu ca ci vt cht.

Cch mng cng nghip

Cch mng thng tin

Nhng lnh vc chu /h nhiu nht ca KHnano & CNnano

Nhng h qu/kt qu t s nh hng

2- Phn loi & cch thc tip cn nghin cu cc cu trc nano

Dng 3D c cu trc thnh nano

'There is plenty of room at the bottom' (Richard P. Feynman, 1959)

2- Phn loi & cch thc tip cn nghin cu cc cu trc nano

- Nanofluidics (cht lng nano) 3D

- Nanobiomaterial (sinh hc nano)

2- Phn loi & cch thc tip cn nghin cu cc cu trc nano

Dot ngc (Antidot) Tip xc nano ng nano

Xuyn (vng) nano

Mng mng c to cu trc nano theo khun mu (pattern).

2- Phn loi & cch thc tip cn nghin cu cc cu trc nano

Cc hnh thi phc tp khc

Dng phn nhnh

2- Phn loi & cch thc tip cn nghin cu cc cu trc nano

Cc ht Co (d ~ 30 nm) phn tn trong nn Ag

Ht Fe nano: cc nguyn t Fe kt t thnh ht c d ~ 25 nm, c bao bc bng mt lp C dy ~ 2 nm.

Ht coban nano: cc nguyn t Co kt t li thnh cc ht c ng knh d ~ 30 nm trong nn Ag.

2- Phn loi & cch thc tip cn nghin cu cc cu trc nano

2- Phn loi & cch thc tip cn nghin cu cc cu trc nano

2- Phn loi & cch thc tip cn nghin cu cc cu trc nano

Vt liu nano kiu 0D: 0D

2- Phn loi & cch thc tip cn nghin cu cc cu trc nano

Vt liu nano kiu 0D: 0D

nh AFM ca Quantum Dot GaAs trn b mt ca InGaAs

2- Phn loi & cch thc tip cn nghin cu cc cu trc nano

Si nano Carc bon di ti 10 m

Si (ng) carbon nano: cc nguyn t C xp xp nh hng dc theo 1 chiu c rng d ~ 1 - 2 nm.