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Bi ging K Thut Cm Bin (sensors)

Hoang Si Hong

----2011---Faculty of Electrical Eng., Hanoi Univ. of Science and Technology (HUST), Hanoi, VietNam

Hoang Si Hong-HUST

Ngun tham kho

Note: Bi ging mn hc ny c tham kho, trch dn v lc dch t cc ngun sau: Sch K thut o lng cc i lng in tp 1, 2- Phm Thng Hn, Nguyn Trng Qu. Cc b cm bin trong o lng-L Vn Doanh Cc b cm bin-Nguyn Tng Ph o lng in v cc b cm bin: Ng.V.Ho v Hong S Hng Sensor technology handbook (edited by JON WILSON) Elements of Electronic Instrumentation and Measurement (Prentice-Hall Company) Sch gii thch n v o lng hp php ca Vit Nam Bi ging v website: Bi ging k thut cm bin-Hong S Hng.(2005) Bi ging Cm bin v k thut o:P.T.N.Yn, Ng.T.L.Hng (2010) Bi ging MEMs ITIMS BKHN Mt s bi ging v cm bin v o lng t cc trng i hc KT khc Vit Nam Website: sciendirect/sensors and actuators A and B

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Ni dung mn hc v mc ch
Ni dung
Chapter 1: Khi nim chung v Cm bin (2b) Chapter 2: Cm bin in tr (2b) Chng 3: Cm bin nhit in (2b) Chng 4: Cm bin quang (2b) Chng 5: Cm bin tnh in (2b) Chng 6: Cm bin Hall v ho in Chng 6: Cm bin v PLC(1b) Mc ch: nm c cu to, nguyn l hot ng v ng dng ca cc loi cm bin thng dng trong cng nghip v i sng. Nm c xu th pht trin chung ca cng ngh cm bin trn th gii.

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Chng 1:Khi nim chung v cm bin

Gio trnh v ti liu tham kho Khi nim chung Lch s pht trin c im v phn loi ng dng Vt liu v cc hiu ng c bn Cng ngh sn xut
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1.1. Cc khi nim v nh ngha

X
CB

BCH

Ych

TB

Cm bin (CB): l chuyn i thc hin chc nng bin i i lng khng in thnh i lng in. V d nh bin p sut, nhit , lu lng, vn tcthnh tn hiu in (mv. V, mA) Chuyn i o lng: l cc chuyn i i lng in ny thnh i lng khc
i l-ng khng in X -c -a qua mt cm bin Y. Thng th-ng Y l mt i l-ng in i l-ng in c th l U, I, f (cm bin pht in), hoc thng s R, L, C (cm bin thng s). Y -c -a vo b chun ho bin thnh Ych t-ng thch vi thit b o TB.
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1.1. Cc khi nim v nh ngha

Cc b cm bin thng c nh ngha theo ngha rng l thit b cm nhn v p ng vi cc tn hiu v kch thch. Ni cch khc cm bin chnh l cc chuyn i o lng s cp c t trong mt v hp c kch thc hnh dng rt khc nhau v c chun ho ph hp vi s dng trong thc t (lp t, c tnh, cu to..) Vi tr ca cm bin: Cm bin ng vai tr quan trng trong h thng o lng v K hin i. N quyt nh vic c th K t ng hay TH cc qu trnh hay khng Quyt nh chnh xc v cht lng ca h thng.
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1.2.Phn loi

Phn loi theo kch thc: cm bin truyn thng v vi cm bin (MEMS v NEMS) Phn loi theo mi trng: cm bin o tip xc v khng tip xc Phn loi theo tnh nng
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Phn loi cm bin th ng

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Phn loi cm bin tch cc

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Phn loi cm bin theo kch thc

V d v cm bin truyn thng

Cm bin l thit b chuyn i mt tn hiu u vo khng in (vt l v ho hc) thnh mt tn hiu ra c tnh cht in
V d v vi cm bin
Cm

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Khi nim vi cm bin

B bin truyn (Tranducer)

Vi cm bin (microsensor) l cm bin c sn xut trn c s cng ngh vi c in t vi k thut x l silicon truyn thng c kch thc vt l rt nh (mm, micro, nano..). Cm bin thng minh:

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Phn loi theo phng php tip xc

1 2 CHTH 3 MUX 4 CHTH ADC Vi X l Hin th

i tng o

5
6

Ngun ngoi

CB1: o tip xc vi i tng v khng cn CHTH (ch ng). CB2 o tip xc ch ng v cn chun ho tn hiu. CB3 o ko tip xc, ko cn CHTH v ch ng. CB4 o ko tip xc, ch ng v cn CHTH. CB5 o tip xc, th ng (cn ngun ngoi). CB6 o mi trng.
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Phn loi theo tnh nng

Cm bin tng t Cm bin thng minh

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1.3.ng dng- ng dng theo tnh nng

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ng dng truyn thng

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ng dng ca cm bin hin i

t My bay

Tu thu Nh thng minh

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Thit b thng minh

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Cm bin trong h thng o lng v iu khin

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Nhc li mt s khi nim c bn v in cn thit cho cm bin

Hiu ng quang-in

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S chuyn i v ng dng

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1.4. c tnh chung ca mt cm bin

p ng (response) nhy (sensitivity) la chn (selectivity) Gii hn pht hin (detection limit) phn gii (Resolution) Ngng nhy Tc p ng (speed of response) tr (hysteresic) lp li (repeatability) phi tuyn (Nonlinearity) n nh (stability) Kh nng chu qu ti

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 nhy (Sen) v tr (H) ca cm bin

Nguyn nhn: do s thay i trong cu trc vt liu hoc ma st

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 bo ho (Sa) v kh nng lp li (A)

n mt gi tr ngng no y, s tng thm kch thch u vo khng to ra gi tr ra nh mong mun.

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 la chn (Sel)

Mt vt liu nhy c th p ng ng thi vi nhiu kh trong mt hn hp kh. V d vi c tnh trn, th cm bin c chn la cao vi kh C2H5OH.

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H s phi tuyn

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Khong o, ngng nhy v kh nng phn ly

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c tnh ng ca cm bin

Cn tip!

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