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Bi ging K Thut Cm Bin (sensors)

Hoang Si Hong

----2011---Faculty of Electrical Eng., Hanoi Univ. of Science and Technology (HUST), Hanoi, VietNam

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Ngun tham kho

Note: Bi ging mn hc ny c tham kho, trch dn v lc dch t cc ngun sau: Sch K thut o lng cc i lng in tp 1, 2- Phm Thng Hn, Nguyn Trng Qu. Cc b cm bin trong o lng-L Vn Doanh Cc b cm bin-Nguyn Tng Ph o lng in v cc b cm bin: Ng.V.Ho v Hong S Hng Sensor technology handbook (edited by JON WILSON) Elements of Electronic Instrumentation and Measurement (Prentice-Hall Company) Sch gii thch n v o lng hp php ca Vit Nam Bi ging v website: Bi ging k thut cm bin-Hong S Hng-BKHN(2005) Bi ging Cm bin v k thut o:P.T.N.Yn, Ng.T.L.Hng BKHN (2010) Bi ging MEMs ITIMS BKHN Mt s bi ging v cm bin v o lng t cc trng i hc KT khc Vit Nam Website: sciendirect/sensors and actuators A and B

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Ni dung mn hc v mc ch
Ni dung
Chapter 1: Khi nim chung v Cm bin (2b) Chapter 2: Cm bin in tr (2b) Chng 3: Cm bin o nhit (2b) Chng 4: Cm bin quang (2b) Chng 5: Cm bin tnh in (2b) Chng 6: Cm bin Hall v ho in Chng 6: Cm bin v PLC(1b) Mc ch: nm c cu to, nguyn l hot ng v ng dng ca cc loi cm bin thng dng trong cng nghip v i sng. Nm c xu th pht trin chung ca cng ngh cm bin trn th gii.

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Chng 3: Cm bin in tr
Ni dung
Cm bin in tr lc cng Bin tr

Bao nhiu kg ?

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in tr lc cng (strain gage)-Cu to

Cu to (dy in tr, mng mng kim loi) Dy mnh, l mng v mng mng Trn giy mng cch in, dn dy in tr (constantan, nicrom..) hnh rng lc ng knh 0.02 0.03 mm. Chiu di lo thng t 8-15 mm, chiu rng a0 3-10 mm. in tr ban u 800 1000 , lng thay i in tr khong 10-15 a0

l0

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Nguyn l
Khi dy dn chu bin dng c kh th in tr ca n thay i, hin tng gi l hiu ng tenzo (piezoresitive). Chuyn i lm vic da trn hiu ng gi l chuyn i in tr lc cng

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Mt s tnh cht ca cm bin

-Tu theo ng knh dy s c dng cho php i qua tng ng. -V d: ng knh = 12 mm th dng cho php l 15 mA - ng knh = 15 mm th dng cho php l 35 mA - Thng thng nhy theo l thuyt s khc so vi c tnh thc t. Do vy khi sn xut ngi ta s ch to hng lot. Sau cc cm bin s c hiu chun n chic tu tho ng dng thc t - H s nhit ca vt liu cn phi b hoc cn c b nhit trong mch o - Vt liu ch to dy in tr cn c in tr sut ln gim kch thc chuyn i - Tng di tc dng lo tng nhy

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Cch dn tenzo
K thut dn (hnh v): trc khi dn phi lm sch b mt vt liu bng ho cht-> ph lp keo dn Chn v tr dn: c bin dng ln nht tng nhy

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Mch o

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Mch o

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Cu 4 nhnh

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Mch phn p

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Sai s v ng dng

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Loadcell (ch to cn in t)

Cn t Cn bng nh lng Cn phi liu

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Loadcell

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ng dng hiu ng tenzo cho vic ch to cm bin o p sut (MEMS)

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ng dng hiu ng tenzo cho vic ch to cm bin o p sut (MEMS)

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Cu hi v Lu

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