MEMS L G ?

L tn gi tt ca cm t: Micro Electro Mechanical Systems (H vi in c) l s tch hp ca cc linh kin vi c v linh kin vi in t c ch to trn cng mt phin vt liu thng l Silic bng cng ngh vi ch.Din tch tng cng ln th vo c hang chc centimet vung cn nh thi vo c hang chc micromet vung.

MEMS ha hn cch mng ha cc loi sn phm bng cch mang cc yu t vi in li vi nhau trn mt nn Si c bn theo cng ngh vi c, bng cch to ra cc h thng trn chip hon chnh (systems on a chip). Cng ngh vi c (micromachining) v cc h thng c in (microelectromechical system - MEMS) c dng to ra cu trc, linh kin v h thng phc tp theo n v o micro. MEMS l mt cng ngh c kh nng cho php s pht trin cc sn phm thmg minh, tng kh nng tnh ton ca cc yu t vi in t vi cc vi cm bin v cc b vi kch hot c kh nng nhn bit v iu khin.

 MEMS lm mt cuc cch mng trong vic ch to ra sn phm tinh vi l thng nh kt hp c nhng cch gii quyt cc k hin i v in ca cng ngh :

Trong mt h thng, s tch hp cc yu t vi in xem l b no, cc cng ngh khc tng cng thm kh nng nh l mt v tay cho h thng vi in t, iu ny cho php vi h thng nhn bit v iu khin theo mi trng. Cc cm bin tp hp cc thng tin t mi trng thng qua vic o c cc yu t nhit, c, quang, ha, sinh, cc hin tng t. Sau , cc yu t in x l thng tin t cm bin v thng qua cc nhn bit tc ng trc tip n b kch hot v p ng li bng cch di chuyn, thay i v tr, d tm, lc, theo iu khin mi trng theo mun. MT S NG DNG CA MEMS M BO AN TON XE T Th d xe t, m bo an ton phng khi bt trc, mi gh ngi u c ci t MEMS v cc b phn lin qua,ni chung du gn kh trng thy.Nhng khi khng may xe b va chm hoc phanh qu t ngt,MEMS nhy cm c gia tc (gim),lp tc iu khin cc ti kh cng phng d cho ngi khi b va chm vo vt cng ca xe.

DMD(DIGITAL MICROMIRROR DEVICE) Trong k thut chiu hnh hin nay c mt loi MEMS ph bin tn l DMD(Digital micromirror device). l mt h gm c mt triu gng con,mi gng con kch thc 4x4 micromet,c th quay trong phm vi +10 iu khin bng vi mch in t. Tt c u c ch to trn cng mt phin Silic.Cc gng c xp kht nhau thnh hang thnh dy,trt t ca mi gng con nh mt im nh.Khi c mt nh sng chiu vo chng trnh ci t b nh thng qua vi mch iu khin tng gng quay sao cho cc tia sng mu phn x chiu ln mn nh to nn hnh nh sng ng,thy r khng cn dng phng ti.

LOC(Lab-on-a-chip) Lab-on-a-chip (phng th nghim trn mt con chip) l mt cng ngh lin ngnh mi v y ha hn cung cp kh nng thc hin ng thi hng trm th nghim vi nhiu loi thuc th trn mt con chip vi x l n s dng khi lng cht lng rt t nanoliter v picoliter. Vic thu nh cc thit b lab -on-achip thu ht c s ch rt ln trong hai thp k qua do kh nng ca chng trong vic thc hin phn tch trong thi gian ngn s dng khi lng cc nh ca mu v t c mc nh gn cha tng c cng quy trnh tng hp. S pht trin nhanh chng ca cng ngh lab-on-a-chip c thc y bi nhng tin b nhanh chng trong cng ngh vi ch silicon, chng hn nh qu trnh in nh lit v khc. Do nhu cu cao i vi cc tinh cht quang hc c bit, kh nng tng thch sinh hc hoc ha hc, chi ph sn xut thp hn v vic to mu nhanh hn, quy trnh mi c pht trin nh khc

thy tinh v polymer, tin trnh polydimetylsiloxan (PDMS), v d nh in litho bn mm, hay stereolithography, cng nh cc phng php nhn rng nhanh nh m in, p v dp ni. Cng ngh lab-on-a-chip cung cp nn tng mnh m cho sn xut chnh xc ca cc vt liu chc nng mi (git nh tng, vin nang siu nh, cc ht nano) cng nh kim tra thng lng cao ca cc mu sinh hc v phn t sinh hc.

Xt v kch thc Mems cng ch c micromet H in t kch thc c nano th gi l NEMS (Nano Electro Mechanical System) MOEMS ( Micro Optoelectro Mechanical Sytems)

CU HI Cu 1:

Pht biu no sau y l ng? a) Mems l mt loi IC.Trn tch hp cc mch in t cha cc linh kin bn dn v cc linh kin in t th ng c kt ni vi nhau ,kch c micromet,ch to theo cng ngh silic. b) Mems l s tch hp ca cc linh kin vi in t,vi c c ch to trn cng mt phin vt liu,thng l silic kch thc vo c nano. c) Mems l s tch hp ca cc linh kin vi in t,vi c c ch to trn cng mt phin vt liu,thng l silic kch thc vo c micromet. d) Mems l s tch hp ca cc linh kin vi in t,vi c ,linh kin quang c ch to trn cng mt phin vt liu,thng l silic kch thc vo c micromet.

P N c.

Cu 2:

2)Trong k thut chiu hnh hin nay c mt loi MEMS ph bin tn l DMD. l mt h gm c mt triu gng con,mi gng kch thc v phm quy quay l bao nhiu? a) 4x4 micromet,+-20 . b) 5x5 micromet,+-10 . c) 4x4 micromet,+-10 . d) Tt c u sai.

c.