BỐC BAY NHIỆT

Cc Phng Php Ch To Mng Mng
Chng 5.

BC BAY NHIT

(Evaporation)
1
Ni dung
1. Gii thiu
2. Cc phng php bc bay nhit
3. Vt liu ngun
4. Qu trnh ht n
5. Qu trnh lng ng ca nguyn t ln
6. u v nhc im
2
1887, Nahrwold v Kundt ph mng Pt trong mi trng chn khng,
y l 1 c gng u tin to mng mng trong chn khng, nhng cho
n 1930 chn khng him khi c s dng v to ra chn khng rt kh.

1892, H.D Toylor nhn ra rng t nng vt knh ca knh thin vn, sau
t sng n th b mt knh s chuyn sang mu tm v truyn nhiu nh
sng hn so vi nhng ci cng loi, y l khi u cho vic dng
phng php bc bay nhit trong vic ph mng mng quang ln knh.

1894, Edison np bng sng ch v ph mng h quang v nhit bc bay
t b mt cht rn.

1928, Ritschl s dng phng php nhit bc bay v dy tc ph
mng mng.

LCH S PHT TRIN
3
4
1933, OBrian & Skinner s dng electron beam khng trc tip
thay th cho nhit bc bay truyn thng. Plasma kch hot cc phn ng
trong qu trnh bc hi kh.
1937, Berghaus np bng sng ch cho bc bay ln b mt ion bn
ph
1938, Cartwright & Turner lm ra mng chng phn x 2 lp.
1940, M. Ruhle ngi u tin s dng sng chm celectron ch
to mng.
1942, Geffcken lm ra mng chng phn x 3 lp.
1955, Electron beam evaporation trong ph mng mng quang hc tr
nn trng thnh.
1968, Hanks np bng sng ch cho bc bay 270
0
electron beam.
1970s, thi i hong kim ca cng nghip ph mng mng trong
chn khng.
LCH S PHT TRIN
5
KHI NIM
K thut ph mng bng
phng php nhit chn
khng bao gm vic un
nng trong chn khng cho
n khi c s bay hi ca vt
liu ph mng.

Hi vt liu cui cng s
ngng t di dng mng
mng trn b mt lnh ca
(v trn thnh bung chn
khng).
P =10
-6
hoc 10
-5
torr
trnh phn ng gia
hi vt liu v khng kh
NGUYN L CHUNG
Bc bay chn khng
l qu trnh vt liu
ngun c ha hi
bay n m khng
xy ra va chm vi
phn t kh trong
khng gian gia
ngun v .
6
Phng php
bc bay trc tip
Thermal
Evaporation:
Bc bay nhit
Phng php
bc bay gin tip
Bc bay
nhit in
tr
Bc bay
bng chm
in t
Bay hi
phn ng
(RE)
M ion
Electron-beam
Evaporation:
Bc bay bng
chm in t
Ion Plating:
M ion
Khng
kch hot
C kch
hot (ARE)
Reacting Evaporation:
Bay hi phn ng
Activated Reactive Evaporation:
B.hi p.ng c kch hot
7
8
Bay hi trc tip
To cc mng t
n kim loi (Au,
Ag, Al, Cr...)
hoc cc hp
cht bay hi
khng b phn li
(SiO, TiO, MgF
2
,
Al
2
O
3
...)
Nguyn l bay hi trc tip
9
- Thnh phn hp thc ca lp ph ph thuc cc
thng s ca qu trnh.

- C th dng Plasma tng nng lng
thc hin cho qu trnh phn ng ca cc ht vt liu.

- Phng php ny khng p dng c cho vt liu
c nng chy cao v cc hp cht trong cc
cht thnh phn c bay hi khc nhau.

Bay hi trc tip
10
Bc bay nhit in tr
Khi dng in cao i qua in tr (bng n) dy tc s sng nng ln.
Nu dng 1 dy tc ln hn
v mc vo 1 vi si kim
loi (Au ,Al).
Si dy kim loi s chy
v phn tn dc theo si
dy tc, sau s bc hi.
50-100A, 6-20V
11
Wolfram (T
M
=3380
0
C)
tantalus Ta (T
M
=2980
0
C)

Molibdene (T
M
=2630
0
C)
Al(660
0
C)
Ag (961,93
0
C)
Au(1064,33
0
C)
SiO, Cr
Vt liu lm dy tc Vt liu bc bay
Nhit nng chy cao Nhit nng chy thp
2
. . Q RI t =
Nhit lng
ta ra
in tr ca thuyn
Cng dng in qua thuyn
Thi gian ta nhit
Bc bay nhit in tr
12
GI IN TR
Thuyn in tr
1 hay nhiu vng dy
Lm bng
Vt liu cn bc bay c qun
trong cc vng dy
Vng dy in tr
Chn in tr
Tm kim loi dng thuyn cha
vt liu
Lm bng
Chn c t nng bng cc si
in tr qun quanh ni
Lm bng Thch anh
chu nhit
ph
Al
2
O
3

d > 1m
13
Tc bay hi
(1)
:
S nguyn t bc bay
trong 1 n v thi gian
*
.
.
2 . .
e
e
e
B
dN p p
A dt
mk T
o
t

=
Din tch b mt ca
ngun bc bay.
H s bc bay
(2)

p sut hi cn bng
ca cht bay hi
p sut ca
cht bay hi trong
bung chn khng
Khi lng
nguyn t
Hng s Boltzmann
(1,38.10
-23
J/K )
Nhit tuyt i (K)
Trong , p sut hi cn bng l 1 hm theo nhit :
0
0
* .
B
L
k T
p p e
= Hng s
Nhit n bc bay ca 1
nguyn t hay phn t
(1)
Tc bay hi: S nguyn t bc bay i qua 1 n v din tch trong 1 n v thi gian.
(2)
H s bc bay (Evaporation Coefficient): H s dnh cht ca nguyn t bay hi trn b mt.
Phng trnh Hertz-Knudsen
14
S phn b hng ca cc nguyn t bc bay
nh lut phn b Cosine:
0
.cos
i i
N N o =
N
0
: s ht nm trn phng php tuyn vi mu trong 1 n v thi gian
N
i
: s ht nm trn phng hp vi phng php tuyn 1 gc
i

15
Mu c cung cp nng lng ha
hi t s va chm vi chm in t c
ng nng ln.
Ht
vt liu
Chm e
Mu
Sng e
Cu to ca sng in t
Th gia tc
(6-10kV)
Th t
Vt liu
cn ph
Chm electron
Cun t
trng
Chn ng
Cathode c t nng Pht
x nhit in t, tun theo phng
trnh Richardson:
0
2
0
B
k T
j A DT e
|
=
Mt dng
pht x
nhit in t
Hng s
kim loi
H s truyn
qua trung bnh
Nhit kim loi
Hng s Boltzmann
Cng thot
ca e ra
khi kim loi
BC BAY BNG CHM ELECTRON
16
Bay hi phn ng (RE)
Thc hin trong trng hp cc cht rn c th phn
ng trc tip vi cht kh (TiC...).
Kim loi c bay hi t ngun qua mi trng kh
kch hot, cng ngng t ti v thc hin phn ng
to mng .
Qu trnh ny ph thuc vo s cung cp y cc
cht phn ng, tn s va chm gia cc cht, vn tc
phn ng, p sut, nhit trong bung phn ng...
17
S dng tng hp cc hp cht v c kh nng chy, vn
tc ph mng ln nh carbide, nitride ca cc kim loi chuyn
tip nhm IV v V nh TiC, TiN, Al
2
O
3
, TiO...
Phn ng ha hc xy ra mnh v trit .
Nhit thp.
D khng ch dy mng, c th to mng dy c vi m.
C th iu khin c qu trnh kch thch plasma v bay hi
kim loi.
Kh t vn tc ph mng thp.
Bay hi phn ng c kch hot (ARE)
18
Nguyn l hot ng ca bay hi phn ng
Bay hi phn ng c kch hot (ARE)
19
M ion (IP)
S nguyn l hot ng
p dng to
mng oxid t
cc n kim
loi Ta, Mo,
Nb, Al, Mg vi
O
2
, hoc cc
mng carbide
(c C), nitride
(c N) ...
20
Nguyn t bc bay c ion ha trong plasma do va chm. Cc ion
c gia tc n nh th m p ln hoc th phn cc gia
ngun bc bay v . C cc u im:
bm dnh gia v mng rt tt.
Mt khi lng mng cao, b mt phng.
Lp ph trn b mt tng i ng nht.
T t nng trong qu trnh to mng, do ion c vn tc ln va
p vo (nhit c th ln ti 400-500
o
C).
C th kt hp vi phng php ARE vi th m p ln , tng
cao hiu qu ph mng
M ion (IP)
21
M ion in th thp (RLVIP)
S nguyn l hot ng
22
- Vt liu bc bay l kim loi hoc oxit dn in.
- Ngun t l chm in t. Plasma c to bi lung hi Ar
th thp, dng cao.
- c th t phn cc m -15 -20V, c tc ng gia tc cc ion
dng ca vt liu to mng, ngng t vi nng lng cao.
u im:
bm dnh gia mng v tt.
Mt khi lng cao (gn bng vt liu khi).
Lp ph ng nht, c b mt phc tp.
Vn tc lng ng cao.
Vic nung c b sung trong qu trnh lng ng.
M ion in th thp (RLVIP)
23
Theo l thuyt ng hc: s ht phn t p ln 1 n v din
tch b mt trong 1 n v thi gian l:

Vi n: s ht trn mt n v th tch
(1)
v n N . .
4
1
=
C CH CA S TO MNG TRONG CHN KHNG
Bc bay vt liu ph:
T K
P
V
N
n
.
= =
P: p sut hi ca vt liu (torr)
T

: nhit bc bay
(2)
2
1
.
. . 8
|
.
|
\
|
=
t m
T K
v
(3)
K: hng s Boltzman = 1,03.10
-22
torr/K
Vn tc trung bnh
Th (2) v (3) vo (1), ta c:

MT
P
3,5.10
m
8KT
4
n
v n.
4
1
N
torr 22
2
1
=
|
.
|
\
|
= =
t
24
Bc bay vt liu ph
25
Bc bay vt liu ph
A
M
: s Avogadro= 6,023.10
23
mol
M = mA
M
: klng phn t
; P
T
M
5,38.10 N
A
M
mN M
torr
2
1
2
M
N
|
.
|
\
|
= = =

Khoi lng tng ng vi N hat o:
26
T o ta nhan c van toc bay hi cua vat chat nh hieu cua
van toc bay hi va van toc ngng tu:
2
1
2
10 . 38 , 5 ). (
|
.
|
\
|
=

T
M
P P G
T v .) . (
2
s cm
gr
P : ap suat hi cua vat chat (torr)
P
T
: ap suat hi bao hoa cua vat chat tai nhit cho trc
Bc bay vt liu ph
27
sin
d
sin

O
x
z
r
0
d
sin
x
z
0
b)
a)
S bay hi t ngun im a) v ngun phng b)
S bay hi t ngun im O tng ng vi s phn b
ng hng:
, de= 2tsin dd
t
e
4
d
dP =
Bc bay vt liu ph
28
dP G dG
C v
=
S ngng t phn t t ngun im a) v ngun phng b)
h
ds
ds
r
0
h
r
ds
ds
0
2
1
2
10 . 38 , 5 ). (
|
.
|
\
|
=

T
M
P P G
T v
S ngng t
29
Bieu thc oi vi van toc ngng tu trong trng hp nay
2
4
cos
r
ds
G dG
Cr
t
v
=
Dong phan t dap len be mat ds cach nguon mot
khoang cach ngan nhat:
2
4 h
ds
G dG
Ch
t
v
=
2
cos
r
ds
d

= e
Vi
t
e
4
d
dP =
h r =
Vi
1 cos 0 = =
S ngng t
30
S ngng t
Khi o,ty so o day d cua mang ngng tu phu len cac phan be mat
khac nhau trong khoang thi gian giong nhau bang:
2
3
2
3
3
2
2
1
cos
(
(
|
.
|
\
|
+ = = = =
h h
r
h
r
dG
dG
d
d
cr
ch
r
h
o
= h, o day mang tai tam va tai bien cua e se khac nhau

2,8 lan. Trong qua trnh bay hi trong chan khong, can thiet
bao am tnh ong eu cua o day mang phu. e o day sai
khac 10% th khoang cach cc tieu gia nguon vi e phai
bang con 5% th
o
o 6 , 2
o 6 , 3 = h
31
S ngng t
Cac nguyen t khi va cham be mat e dnh len be mat e
tao thanh mam ngng tu, mam nay phai thoa:

+ sc cang mat ngoai(o
s
- o
f
) / o
s

+ hang so khp mang f << 1, cang nho cang tot
Bk mam r
k
u e tiep tuc phat trien mam lien ket lai tren be mat tao
thanh mang lien.

32
CU TRC CA V TNH CHT MNG PH THUC VO:

Bn cht
Nhit
Vn tc lng ng
dy mng ph
33
M hnh cu trc ca mng: gm 3 vng:
Vng 1: T< 0,3 T
nc

T : nhit b mt
T
nc
: nhit nng chy ca KL bc bay.
vng ny, linh ng ca nguyn t thp, cc mm thnh lp theo
hng vung gc vi . Mng c cu trc c o.
Vng 2: 0,3 T
nc
< T< 0,45 T
nc

linh ng ca ht ln
Mm pht trin theo chiu ngang
Mng c cu trc tinh th hnh tr
bm dnh v cng ti u

Vng 3: T> 0,45 T
nc
Mng b kt tinh li

34
|
.
|
\
|
=
h
n
n
o
exp
Vi: n
o
: s ht KL bay hi
n: s nguyn t KL khng b va chm vi kh
: qung ng t do trung bnh ca ion KL
xc sut hi va chm trn s rt b h qu ln
h qu nh
s b nh hng ca nhit ngun bc hi
Khong cch h t ngun bc bay n cn ph:
NHNG YU T NH HNG N CHT LNG MNG
35
Cn c tin hnh trong mi trng chn khng cao
P= 10
-6
hoc 10
-5
torr
p sut p:
Trnh hi vt liu phn ng vi khng kh, nh hng n tinh
khit mng
X l ha hc

X l c

Phng in kh
bm dnh: Phn nh bn ca mng:
36
Ngun im:
Vn tc bay hi
S ngng t ca phn t t ngun im
ng u ca mng ph:
t
e
4
d
dP =
2
cos
r
ds
d

e =
2
4
cos
r
ds
dP
t

=
37
2
4
cos
.
r
ds G
dP G dG
r
t

= =
Vn tc ngng t theo hng r:
Tng t ta c vn tc ngng t theo hng h:
2
4 h
Gds
dG
h
t
=
Ngun im:
38
T s dy d ca mng ngng t ph ln cc phn b mt khc nhau:
2
3
2
3
3
2
2
1
cos
(
(
|
.
|
\
|
+ = = = =
h h
r
h
r
dG
dG
d
d
r
h
r
h
o
: l khong cch t tm n 1 im c ph trn

Ngun im:
8 , 2 =
r
h
d
d
o = h
o 6 , 2 = h
dy mng sai khc 10%
o 6 , 3 = h
dy mng sai khc 5%
o
39
Vn tc bay hi dP:
Vn tc ngng t dG:
2
2
cos
.
r
ds G
dP G dG
r
t

= =
2
2
cos
cos
r
ds d
dP
t

t
e
= =
2
h
Gds
dG
h
t
=
Ngun phng:
T s dy d:
2
2
4
4
1
(
(
|
.
|
\
|
+ = =
h h
r
d
d
r
h
o
o = h
dy mng sai khc 10%
o 5 , 4 = h
dy mng sai khc 5% o 3 , 6 = h
dy mng ti tm v ti bin ca
khc nhau 4 ln
Ngun phng:
41
Vi
ds d dm . . =
u
: gc lch gia b mt vi hng ca dng hi
2
4
cos
r
m
d
t
u
=
2
4
cos
r
ds m
dm
t

=
Ngun phng:
2
cos cos
r
m
d
t
u
=
2
2
cos
r
ds m
dm
t

=
Lng vt cht p ln b mt ds trong 1 giy
Lng vt cht p ln b mt ds trong 1 giy:
Ngun im:
Khi lng cht cn bc bay to mng c dy d:
42
v
A
m
T =
A
V
: tc bay hi ca vt liu KL
m : khi lng cht cn bc bay
Thi gian bc bay:
43
Ty so o day d cua mang ngng tu phu len cac phan be mat khac
nhau trong khoang thi gian giong nhau bang:

mang c day ng nht:

Khi o:

Nh vy:

2
3
2
3
3
2
2
1
cos
(
(
|
.
|
\
|
+ = = = =
h h
r
h
r
dG
dG
d
d
cr
ch
r
h
o
1
d
d
r
h
0
h
o
o >> h
CHM CU QUAY
44
Bng cach nao mang ph c day
ng nht nhng khong cach ngn
nht t ngun n khng qua ln?

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BỐC BAY NHIỆT

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Cc Phng Php Ch To Mng Mng

= h, o day mang tai tam va tai bien cua e se khac nhau

: l khong cch t tm n 1 im c ph trn

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