CM BIN P IN

(Piezoelectric Sensors)
NI DUNG
1 nh ngha 1. nh ngha.
2 u im v nhc im 2. u im v nhc im
3 Vt liu p in 3. Vt liu p in.
4. Cu to cm bin.
5. S o.
1. NH NGHA
Do Pierre Curie & Jacques Curie khm ph vo nm1880
Piezo xut pht t Hy lp Greek Piezen : c ngha l p press
C t l i t li th t i khi b bi d d b bi d C mt s loi vt liu c th to ra in p khi n b bin dng do b bin dng
khi n chu tc ng c hc hoc ng sut, l cc vt liu nh tinh th thch anh
(SIO2) hoc Barium titanate. Hoc thay i kch thc vt l khi t vo phn t p
in mt in th in mt in th
Cu to cht p in c ph ln hai mt ca phin mng. Khi tc dng lc c
hc th xut hin cc in tch tri du ti hai mt ca phin, cc in tch xut hin
t l vi cc tc ng c hc. t l vi cc tc ng c hc.
Vic s dng trong cng nghip vo nm 1950s. Hin nay tr thnh k thut
ph bin
Gii th h hi t
1. NH NGHA
Gii thch hin tng
Hiu ng p in m t mi quan h
gia ng sut c hc v in th
trong vt th rn.
Cc vt liu p in to ra in tch
Q t l vi lc tc dng
1. NH NGHA
Khi i h h i h d l b i
a/Hin tng p in thun:
Khi tinh th p in chu tc dng ca lc bn ngoi,
th cc ht mang in xut hin trn b mt ca lp
tinh th lm xut hin dng in. Ty theo chiu tc tinh th lm xut hin dng in. Ty theo chiu tc
dng ca lc m chiu dng in khc nhau.
Khi lc l ko th chiu dng din cng chiu vi
chiu tinh th, nu lc l nn th chiu dng in
ngc chiu vi chiu tinh th.
1. NH NGHA
b/Hin tng p in nghch:
Khi t mt in p vo hai u tinh th p in, hay tinh th
p in c cung cp ht mang bi ngun bn ngoi th trong
tinh th s xut hin ng sut lm cho lm cho tinh th co dn. tinh th s xut hin ng sut lm cho lm cho tinh th co dn.
Tu theo chiu dng in t vo m tinh th nn hay dn.
Nh hnh di, khi ca ngun ngc vi cc ca tinh th th
lm cho tinh th dn ra Khi ngun lp cng vi cc ca tinh lm cho tinh th dn ra. Khi ngun lp cng vi cc ca tinh
th th tinh th b nn li.
CC M HNH CA CM BIN
Piezoelectric
Thickness expansion mode
Volume expansion mode
7
Thickness shear mode
1. NH NGHA
Khi tc dng lc theo trc x ( hiu ng dc)
q= d
1
. F
x
Khi tc dng lc theo trc y ( hiu ng ngang)
q= -d
1
.F
y.
. a/b
HIU NG NGANG
B mt dn
V li i

in th
Vt liu p in
in th
in th
Nu t s a / b lm hn 1, th hiu ng p in ngang s ln hn hiu ng ng p in dc.
HIU NG DC
in th xut hin khi lc in th xut hin khi lc
tip xc vi b mt
ln ca cc in tch ch ln ca cc in tch ch
ph thuc vo lc tc dng
Q
x
= d
11
F
x
n Q
x
d
11
F
x
n
Thch hp o lc, gia
tc, bin dng, p sut g p
HIU NG NGANG
in tch xut hin gc
hi ( i h l ) khi phi (right angles) khi
lc tip xc vi b mt.
Q d F b/ Q
y
= -d
11
F
y
b/a
Dng u tin trong
bi t cm bin p sut v cc
cm bin lc c nht
cao sensors cao sensors.
HIU NG CT
N ph thuc vo kch
th h h d h thc hnh dng ca phn
t p in cng nh vo
s phn b in tch ca p
n.
Q
x
= 2 d
11
F
x
n
S dng ch yu trong cc S dng ch yu trong cc
cm bin gia tc, cm bin
m men v cm bin lc
ba thnh phn.
1. NH NGHA
Nu chiu dy ca tinh th l t v
t Il s thay i chiu dy do tc dng ca lc
V E l m un n hi v c th biu din bng t s gia ng sut v bin dng
A = Din tch ca tinh th , m
2
t chiu dy ca tinh th , m
T cc phng trnh trn
in tch ti cc bn cc s to ra in th in tch ti cc bn cc s to ra in th
1. NH NGHA
in dung ca vt liu p in gia hai tm bn cc l
Trong
NHY
A nhy in tch
q
= in tch c to ra
F
= Lc tc dng
i vi tinh th c din tch l A
p = ng sut hoc lc tc dng ln b mt tinh th
NHY
B nhy in th
S th i di th bi th i i th d S thay i din th c a ra bi s thay i in th do s
gia tng p sut trn mt n v chiu dy ca tinh th
Chi d i h h
1
V
V
S
d p

d = Chiu dy ca tinh th
Do vy
Q
V
C
=
C
q C V =
Vi
A
C
d

=
NHY
Quan h gia nhy in tch v nhy in th
1
q
q
S
A p

1
V
V
S
d p

q
S
d q d
C
S A p A

= =

d
C
A
=
V
S A p A
A
q V
S S =
1. NH NGHA
S to ra in th l do
Trong tinh th n c ba nguyn t ca silicon v su nguyn t oxy Trong tinh th n c ba nguyn t ca silicon v su nguyn t oxy
Mi nguyn t silicon c bn in tch dng v nguyn t oxy c hai in
tch m
Mi t b i t h khi kh l t d tih Mi cp nguyn t oxy c bn in tch m, khi khng c lc tc dng vo tih
th p in th tinh th n quartz cell is electrically neutral.
Khi c lc nn tc dng theo trc X tinh th p in b bin dng.Lc lm cc
nguyn t trong tinh th thay i v v tr : cc in tch dng b chng cht nguyn t trong tinh th thay i v v tr : cc in tch dng b chng cht
nguyn t silicon cn in tch m cp oxy
3. VT LIU P IN
Thch anh ( SiO
2
. N c th l vt liu t nhn hoc tng hp, n c cc
thng s sau:
Hng s p in d 2 1 10
12
C/N - Hng s p in: d
1
=2,1.10
-12
C/N.
- Hng s in mi: = 39,8. 10
-2
F/m
- ng sut cho php: =( 70 -100)N/mm
2
- in tr sut nhng ph thuc nhiu vonhit . nhit

cm =
14
10 g p
200
0
C d
1
khng ph thuc vo nhit . T (200-500)
)
C d
1
thay i khng ng
k, 573
0
C tnh cht p in b ph hy
Titanat Bari( BaTiO
3
) l vt liu tng hp, khng ph thuc vo m, nhng
ph thuc nhiu vo dng tp cht, bn c hc cao, r tin, d ch to
h h d h kh h

cc hnh dnh khc nhau.

- Hng s p in: d=107.10
-12
C/N.
- Hng s in mi: = 1240. 10
-11
F/m
- M un n hi E=115.10
3
N/mm
2

- Cc tnh cht khng ph thuc vo m m ph thuc vo tp cht, cng

ngh ch to v i p phn cc. M un p in khng phi l hng s, n c
th gim 20% sau hai nm. Do c hin tng tr nn quan h q=f(F) l khng
tuyn tnh. Song n c bn c hc cao, r tin, c th to c bt k hnh
d dng no
3. VT LIU P IN
Gm PZT l hn hp oxt ch zirconi v titan ( PbTi Gm PZT l hn hp oxt ch, zirconi v titan ( PbTi
1-
x
Zr
x
O
3
) thng x=0,5 n quyt nh tnh cht vt l v tnh
cht nhit ca vt liu.u im chnh ca lai ny:
h - nhy cao.
- Hng s in mi ln nn nh hng ca in dung k
sinh nh.
D gia cng.
- bn c hc cao.
Ch hit - Chu c nhit cao
- Nhc im: hng s in mi v hng s p in ph
thuc vo nhit . C tnh tr do nhit do vy d b lo
ha
3. VT LIU P IN
Hiu ng p in to ra l do s bin dng ca crystal
lattice do tc dng ca ngoi lc tc dng vo lattice m lattice do tc dng ca ngoi lc tc dng vo lattice m
v dng nhng cnh i din v do to ra m
men lng cc.
3. VT LIU P IN 3. VT LIU P IN
Cc vt liu p in nh: : tourmaline, quartz, p , q ,
ngc , cane sugar, and Rochelle salt
Thng tinh th thch anh c s dng v :
ng sut ca vt liu gii hn l ~138 MPa
Nhit lm vic c th ln ti 500C
cng cao tuyn tnh cao v c th b qua tnh cng cao, tuyn tnh cao,v c th b qua tnh
tr
Hu ht cc hng s nhy vi mi khong phn b
nhit nhit
Cho php o vi tn s thp (<1 Hz)
3. VT LIU P IN
t tnh mt s vt liu p in
Vt liu thm
thu
in tr sut
(m)
Modun dn
hi 10
9
N.m
-
2
ng sut
ca i
10
7
N m
-2
Nhit s
dng (oC)
2
10
7
N.m
2
Thch anh
11
= 4.5 10
12
Y
11
= 80 10 550
Mui
Seignette

11
= 350 >10
10
Y
11
= 19.3
Y
22
= 30
Y
33
= 30
1.4 45
LH
11
= 350

11
= 350

11
= 350
>10
10
46 1.5 75
PZT 5A
11
= 1700 10
11
Y
33
= 53 7 8 365
4. CU TO
Khi cm bin chu tc dng ca Khi cm bin chu tc dng ca
lc, lm co dn ming p in, tn
hiu in c ly ra v khuch
i.
Tu thuc ng knh vng p
in m c th chu ti khc nhau.
s dng mt lc p t troc bng s dng mt lc p t troc bng
cch xic cht cc vng m th
c th m rng phm vi s dng
v c th o lc ko hay nn:

( ) Th di l t t l
Lc ko: tng ng sut ban
u.
Lc nn: gim ng sut ban

(a) The radial connector style

(b) The axial connector style
g g
u.
4. CU TO
Cm bin p in nh mt t in p
bng cch ph hai bn cc ln hai
mt ca ming p in.
Khi tc dng lc ln hai bn cc Khi tc dng lc ln hai bn cc
th trn bn cc xut hin cc
in tch tri du nhau. Hiu in
th gia hai bn cc t l vi lc th gia hai bn cc t l vi lc
tc dng:
Q = k.F
i k 2 3 10
12
A /N vi k = 2,3.10
-12
As/N
4. CU TO
Khi dng o lc rt nh: th ta g
dng cu trc dm, x gm hai
tm ghp li vi nhau. Khi c lc
tc dng mt tm dn mt tm b tc dng mt tm dn mt tm b
co li.
o lc ct theo b mt phi dng
tm mng
4. CU TO
tng in tch Q ngi ta t cc phim thch anh chng ln nhau: ni
tip vi lc hay song song vi in.
q
C
Q
nC
nQ
V = =
F
x
F
y
q q
C nC
+ + + + + + + +
- - - - - - -
x
F
x
y
+
+
-
- - - - - - -
- - - - - - -
+ + + + + + + +
+ + + + + + + +
+
+
+
+
-
-
-
-
- - - - - - -
+ + + + + + + +
F
+
+ - F
x
F
y
+
-
Hiu ng p in dc Hiu ng p in ngang
5. S O
S o tng ng ca cm bin
p in: Gm mt ngun dng
i
p g g
i=dQ/dt mc song song vi in tr
R
g
v C
g.
C i d t li
R
g
C
g
i
C
g
: in dung ca vt liu p
in.
R
g
: in tr trong ca vt liu p
g
g p
in.
Nu tnh n in tr v t k sinh
t d d kt i th trn dy dn kt ni th
R R R
1 1 1
+ =
i
C C C
g q
+ =
R R R
g q
5. S O
Mch in tng ng c th chuyn thnh:
6. CC NG DNG
o p sut trong lng khun i vi cng
ngh phun p.
Gim st p sut trong xi lanh ca cc ng p g g
c diesel v gas.
Gim st v iu khin lc p Gim st v iu khin lc p.
Gim st lc lin kt (joining) trong cc my
lp rp t ng lp rp t ng .
Gim st s rung ng ca cc my .
Gim st sut qu trnh gia cng
6. CC NG DNG
Gia tc k
Khi lng dao ng c gn vi phn
t thch anh t thch anh.
Khi gia tc k chuyn ng th khi dao
ng s chu ti theo nh lut Newtons 2 ng s chu ti theo nh lut Newton s 2
F=ma.
6. CC NG DNG
Gia tc p in Gia tc p in
Phn t p in dng hnh tr v c dn tm ca cht. Khi lng
ca hnh tr c dn vi phn bn ngoi ca phn t p in ca hnh tr c dn vi phn bn ngoi ca phn t p in.
Gia tc theo hng ca trc hnh tr v l nguyn nhn sinh ra lc ct
trn phn t v to ra lc n hi cho chnh n
Q = d F
Khi v ca gia tc k l i tng c dao ng th lc tc dng trn
phn t p in l do khi lng b thay i .
in tch c to ra trn tinh th p in c a vo b khuye61ch i
in tch. Lc F tc dng vo tinh th c chuyn thnh in tch .
6. CC NG DNG
Gia tc k
6. CC NG DNG
u im l kch thc nh
Gia tc k
+c ng knh ra l 6 mm,
v ln nht l 11 mm.
+ nhy nh nht ca cm
bi l 16 C/b bin l 16 pC/bar,
+ nhy ln nht l 80
pC/bar vi phm vi o 250
bar n1,000 bar. ,
11/30/2011 34
6. CC NG DNG
+V bi b th kh b bi t h d t
Gia tc k
+V ca cm bin: bng thp khng r bo v cm bin trnh d, m, trng
in, lp rp v lm kn.
+ Mng: bin i p sut thnh lc tc dng ln tnh th p in
+ Tinh th p in: Bin i lc thnh in tch + Tinh th p in: Bin i lc thnh in tch.
11/30/2011 35
6. CC NG DNG
Cm bin o p sut trong lng khun:
Gia tc k
p g g
Nhm nng cao cht lng v gim chu k sn xut.
Kh d M ht d t h h th h
11/30/2011 36
Khng dng mng : Mng cht do t hnh thnh
6. CC NG DNG
CM BiN TRONG NG C :
Gia tc k

HU HT CC CM BiN P SuT DNG TRONG NG C T yu

cu nh chnh xc cao.
+ Mng :s t chy ca ga c th ln ti 2 500C
11/30/2011 37
+ Mng :s t chy ca ga c th ln ti 2,500 C.
6. CC NG DNG
Cm bin p sut
Cm bin p sut l Cm bin p sut l
01 mng mng vi
kch thc bit
p sut ch tc dng p g
theo mt hng