Vi - TCVN8664 3 2011

TIU CHUN QUC GIA
TCVN 8664-3:2011
ISO 14644-3:2005
PHNG SCH V MI TRNG KIM SOT LIN QUAN - PHN 3: PHNG PHP TH
Cleanrooms and associated controlled environments - Part 3: Test methods
Li ni u
TCVN 8664-3:2011 hon ton tng ng vi ISO 14644-3:2005;
TCVN 8664-3:2011 do Vin Trang thit b v Cng trnh y t bin son, B Y t ngh, Tng
cc Tiu chun o lng Cht lng thm nh, B Khoa hc v Cng ngh cng b.
B TCVN 8664:2011 (ISO 14644) Phng sch v mi trng kim sot lin quan gm cc tiu
chun sau:
- Phn 1: Phn loi sch khng kh.
- Phn 2: Yu cu k thut th nghim v theo di nhm chng minh s ph hp lin tc vi
TCVN 8664-1 (ISO 14644-1).
- Phn 3: Phng php th.
- Phn 4: Thit k, xy dng v khi ng.
- Phn 5: Vn hnh.
- Phn 6: T vng.
- Phn 7: Thit b phn tch (t ht, hp ng gng tay, mi trng cch ly i vi khng kh
sch).
- Phn 8: Phn loi nhim phn t trong khng kh.
Li gii thiu
Phng sch v mi trng kim sot lin quan cung cp cho vic kim sot s nhim ht trong
khng kh n mc thch hp hon thnh cc hot ng nhy cm vi s ly nhim. Cc sn
phm v cc qu trnh c hng li t vic kim sot ly nhim trong khng kh gm cc sn
phm v quy trnh trong cng nghip nh ngnh hng khng v tr, vi in t, dc phm, trang
thit b y t, thc phm v chm sc sc khe.
Tiu chun ny trnh by cc phng php th c th s dng cho mc ch c trng phng
sch nh m t v quy nh trong cc phn khc ca b TCVN 8664 (ISO 14644).
CH THCH Tiu chun ny khng ch ra tt c cc quy trnh th cc thng s ca phng sch.
Quy trnh v thit b c trng cc thng s khc, nhng lin quan trong phng sch v vng
sch s dng cho cc sn phm qu trnh ring c m t trong ti liu khc do ISO/TC
129 chun b [v d, cc quy trnh kim sot v o vt liu c th nhn thy c (ISO 14698),
th nghim cc chc nng phng sch TCVN 8664-4 (ISO 14644-4) v th nghim ca trang
thit b ring r TCVN 8664-7 (ISO 14644-7). Ngoi ra, cc tiu chun khc cng c th xem xt
c th p dng.
PHNG SCH V MI TRNG KIM SOT LIN QUAN - PHN 3: PHNG PHP TH
Cleanrooms and associated controlled environments - Part 3: Test methods
CNH BO - S dng tiu chun ny c th bao hm cc vt liu, cc thao tc v thit b
nguy him. Tiu chun ny khng c mc ch nhm vo mi vn an ton lin quan
n vic s dng chng. Trch nhim ca ngi s dng tiu chun ny l xc lp an
ton thch hp v thc hnh sc khe xc nh kh nng p dng ca cc gii hn
iu chnh trc khi s dng.
1. Phm vi p dng
Tiu chun ny quy nh cc phng php th phn loi n nh s phn loi sch ht
trong khng kh v c trng cc tnh nng ca phng sch v vng sch. Php th tnh nng
c quy nh v hai kiu phng sch v vng sch: kiu c dng theo hng duy nht v kiu
khng c dng theo hng duy nht, trong ba kh nng xut hin cc trng thi: trng thi thit
lp, trng thi ngh v trng thi vn hnh. Cc phng php th kin ngh thit b th v quy
trnh th xc nh cc thng s tnh nng. Khi phng php th b tc ng bi kiu loi
phng sch v vng sch, quy trnh thay th c xut. i vi mt s php th, c th s
dng mt vi phng php khc nhau khng c trong tiu chun ny nu c s tha thun gia
khch hng v nh cung cp. Cc phng php thay th khng nht thit phi cung cp cc
php o tng ng.
Tiu chun ny khng p dng o lng cc sn phm hoc cc qu trnh trong phng sch
hoc thit b phn tch.
2. Ti liu vin dn
Cc ti liu vin dn sau y l cn thit p dng tiu chun ny. i vi cc ti liu vin dn
ghi nm cng b th p dng bn c nu. i vi cc ti liu vin dn khng ghi nm cng b
th p dng phin bn mi nht, bao gm c cc sa i, b sung (nu c).
TCVN 8664-1:2011 (ISO 14644-1:1999) Phng sch v mi trng kim sot lin quan - Phn 1:
Phn loi sch khng kh.
Yu cu k thut th nghim v theo di nhm chng minh s ph hp lin tc vi TCVN
8664-1 (ISO 14644-1).
Thit k, xy dng v khi ng.
ISO 7726:1998 Ergonomics of the thermal environment - Instruments for measuring physical
quantities (Khoa nghin cu v lao ng trong mi trng nhit - Dng c o cht lng vt
l)
3. Thut ng v nh ngha
Trong tiu chun ny, p dng cc nh ngha sau
3.1 Quy nh chung
3.1.1
Phng sch (cleanroom)
Phng c nng ht trong khng kh c kim sot, v c xy dng v s dng gim
thiu a vo, to ra v lu gi cc ht bn trong phng, trong cc thng s lin quan khc,
nh nhit , m v p sut c kim sot khi cn
[TCVN 8664-1:2011 (ISO 14644-1:1999), 2.1.1]
3.1.2
Vng sch (clean zone)
Khng gian dnh ring trong nng ht trong khng kh c kim sot, v c xy dng
v s dng gim thiu a vo, to ra v lu gi cc ht bn trong phng, trong cc thng
s lin quan khc, nh nhit , m v p sut c kim sot khi cn
CH THCH Vng ny c th c m hoc ng v c th khng c t trong phm vi
phng sch.
[TCVN 8664-1:2011 (ISO 14644-1:1999), 2.1.2]
3.1.3
Lp t (installation)
Phng sch hoc mt hoc nhiu vng sch, cng vi mi kt cu lin quan, cc h thng x l
khng kh, cc dch v v tin ch
[TCVN 8664-1:2011 (ISO 14644-1:1999), 2.1.3]
3.1.4
Thit b phn tch (separative device)
Trang b s dng lm phng tin cu trc v ng lc to nn cc mc m bo cho s
phn tch gia bn trong v bn ngoi ca mt th tch xc nh
CH THCH Mt s v d ngnh cng nghip c th ca thit b phn tch nh l t ht, thng
cha, b cch ly v mi trng nh.
3.2 o ht trong khng kh
3.2.1
My to sol kh (aerosol generator)
Dng c c kh nng to ra vt cht dng ht c di kch thc thch hp (tc l 0,05 m n 2
m) ti mt nng c nh c th c to ra bi cc phng tin nhit, thy lc, kh nn, m
hc hoc tnh in
3.2.2
Ht trong khng kh (airbone particle)
Vt th rn hoc th lng l lng trong khng kh c th nhn thy hoc khng nhn thy, c kch
thc (cho mc ch ca tiu chun ny) t 1 nm n 100 m.
CH THCH i vi mc ch phn loi, tham kho TCVN 8664-1:2011 (ISO 14644:1999),
2.2.1.
3.2.3
ng knh trung bnh ca ht m c (count median particle diameter)
CDM
ng knh trung bnh ca ht trn c s s lng ht
CH THCH i vi trung bnh m c, mt na s ht c phn b bi cc ht c kch
thc nh hn kch thc trung bnh m c, v mt na l cc ht ln hn kch thc trung
bnh m c.
3.2.4
Ht th (macroparticle)
Ht c ng knh tng ng ln hn 5 m
[TCVN 8664-1:2011 (ISO 14644-1:1999), 2.2.6]
3.2.5
K hiu M (M descriptor)
Nng cc ht th o c hoc quy nh trong mt khi khng kh, c biu th trong phm
vi ng knh tng ng l c trng ca phng php o s dng
CH THCH K hiu M c th c xem nh l mt gii hn trn i vi mc trung bnh ti
nhng v tr ly mu (hoc nh l mt gii hn ring trn ph thuc vo s lng v tr ly mu
s dng cc c trng cho phng sch hoc vng sch). K hiu M khng c s dng
xc nh cp sch ht trong khng kh, nhng chng c th c nu ra mt cch c lp
hoc kt hp vi cp sch ht trong khng kh.
[TCVN 8664-1:2011 (ISO 14644-1:1999), 2.3.2]
3.2.6
ng knh ht trung bnh khi lng (mass median particle diameter).

MMD
ng knh trung bnh ca ht trn c s khi lng ht
CH THCH i vi trung bnh khi lng, mt na khi lng c phn b bi cc ht c
kch thc nh hn kch thc trung bnh khi lng, v mt na l cc ht ln hn kch thc
trung bnh khi lng.
3.2.7
Nng ht (particle concentration)
S lng ht ring r c trong mt n v th tch khng kh
[TCVN 8664-1:2011 (ISO 14644-1:1999), 2.2.3]
3.2.8
Kch thc ht (particle size)
ng knh ca mt khi cu c th to ra phn ng i vi mt thit b o kch thc cho
trc, phn ng ny tng ng vi phn ng to bi ht ang c o
CH THCH i vi thit b tn x nh sng, s dng ng knh quang hc tng ng
m cc ht ri rc.
[TCVN 8664-1:2011 (ISO 14644-1:1999), 2.2.2]
3.2.9
Phn b kch thc ht (particle size distribution)
Phn b ly tch ca nng ht l hm ca kch thc ht
[TCVN 8664-1:2011 (ISO 14644-1:1999), 2.2.4]
3.2.10
Sol kh th (test aerosol)
Sol kh ca cc ht th rn v/hoc th lng c s phn b kch thc v nng bit hoc
kim sot c
3.2.11
K hiu U (U descriptor)
Nng cc ht siu mn o c hoc quy nh trong mt khi khng kh
CH THCH K hiu U c th c xem nh l mt gii hn trn i vi mc trung bnh ti
nhng v tr ly mu (hoc nh l mt gii hn ring trn ph thuc vo s lng v tr ly mu
c s dng c trng cho phng sch hoc vng sch). K hiu U khng c s dng
xc nh cp sch ht trong khng kh, nhng chng c th c nu ra mt cch c lp
hoc kt hp vi cc cp sch ht trong khng kh.
[TCVN 8664-1:2011 (ISO 14644-1:1999), 2.3.1]
3.2.12
Ht siu mn (ultrafine particle)
Ht c ng knh tng ng nh hn 0,1 m
[TCVN 8664-1:2011 (ISO 14644-1:1999), 2.2.5]
3.3 B lc khng kh v h thng
3.3.1
Kim chng bng sol kh (aerosol challenge)
S kim chng bng sol kh ca b lc hoc h thng b lc lp t bng hi lng th

3.3.2
R r n nh (designated leak)
Thm thu cho php ln nht c xc nh theo tha thun gia khch hng v nh cung cp
khng qua r r c th pht hin trong qu trnh qut lp t vi my m ht ri rc hoc quang
k sol kh
3.3.3
H thng pha long (dilution system)
H thng ni m sol kh dng kh c pha trn vi khng kh pha long cc ht t do trong mt
t l th tch bit gim bt nng
3.3.4
H thng lc (filter system)
H thng gm my lc, khung v dn hoc khung bo v khc
3.3.5
B lc cui (final filter)
B lc v tr cui cng trc khi khng kh vo phng sch
3.3.6
H thng lc lp t (installed filter system)
H thng lc ng vo trn nh, tng, b my hoc ng ng
3.3.7
Th r r h thng lc lp t (installed filter system leakage test)
Php th c thc hin khng nh rng cc b lc c lp ng bng cch thm tra
khng c r r trong lp t, v cc b lc v h thng mng li l khng c khim khuyt v r
r
3.3.8
R r (leak)
(ca h thng lc khng kh) s thm nhp ca cht nhim bn vt qu gi tr d kin ca nng
pha dng ra do thiu nguyn vn hoc c cc khim khuyt
3.3.9
Qut (scanning)
Phng php pht hin r r trong cc b lc v cc b phn ca h thng, qua u vo
cc d ca quang k sol kh hoc my m ht ri rc chuyn ng xuyn qua vng th xc
nh
3.3.10
Thm nhp r r chun (standard leak penetration)
Thm nhp r r c pht hin bng my m ht ri tc hoc quang k sol kh c lu lng
dng mu mu chun khi dng c cm bin ly mu t tnh ti trc ch r r
CH THCH S thm nhp l t s ca nng ht pha dng ra ca my lc vi nng
pha dng vo.
3.4 Dng khng kh v cc trng thi vt l khc
3.4.1
Tc trao i khng kh (air exchange rate)
Tc trao i khng kh c biu th l s ln thay i khng kh trong n v thi gian v

c tnh bng cch chia th tch khng kh cung cp trong n v thi gian cho th tch ca
khong trng s dng
3.4.2
Lu lng kh trung bnh (average airflow rate)
Th tch trung bnh ca khng kh trong n v thi gian, xc nh tc thay i khng kh
trong phng sch hoc vng sch
CH THCH Lu lng kh c biu th bng mt khi trn gi (m 3/h).
3.4.3
Mt phng o (measuring plane)
Din tch mt ct ngang th nghim v o lng cc thng s tnh nng nh lu lng dng
mu kh
3.4.4
Dng khng kh khng ng hng (non-unidirectional airflow)
Phn b khng kh khi cung cp khng kh vo vng sch trn ln vi khng kh bn trong bng
phng tin quy np
[TCVN 8664-4:2011 (ISO 14644-4:2002), 3.6]
3.4.5
Lu lng khng kh cung cp (supply airflow rate)
Th tch khng kh c cp vo trong lp t t b lc cui hoc ng dn kh trong n v thi
gian
3.4.6
Lu lng khng kh tng (total airflow rate)
Th tch khng kh chuyn qua mt tit din lp t trong n v thi gian
3.4.7
Dng khng kh ng hng (unidirectional airflow)
Dng khng kh c kim sot qua ton b tit din ngang ca vng sch c tc khng i
v lung kh gn nh song song
CH THCH Dng khng kh kiu ny to ra s vn chuyn trc tip ca cc ht khi vng
sch.
[TCVN 8664-4:2011 (ISO 14644-4:2002), 3.11]
3.4.8
ng u ca dng khng kh (uniformity of airflow)
Kiu dng khng kh ng hng trong cc s c gia cc im v tc trong phm vi t
l phn trm xc nh ca tc trung bnh dng khng kh
3.5 o tnh in
3.5.1
Thi gian phng in (discharge time)
Thi gian yu cu gim in p n mc, dng hoc m, theo bn theo di dn in
cch ly bt u c np in
3.5.2
in p b (offset voltage)
in p c tch ly ln bn dn c cch ly khng np in khi bn c t vo mi

trng khng kh in ha
3.5.3
c tnh tiu tan tnh (static-dissipative property)
Kh nng v gim tnh in trn b mt lm vic hoc b mt sn phm, do dn hoc c hc
khc n mt gi tr c bit hoc n mc np zero danh nh
3.5.4
Mc in p b mt (surface voltage level)
Mc in p m hoc dng ca np tnh in ln b mt lm vic hoc b mt sn phm c
ch th bng cch s dng thit b ph hp
3.6 Dng c o v iu kin o
3.6.1
Quang k sol kh (aerosol photometer)
Dng c o nng khi lng ht trong khng kh tn x nh sng trong c s dng khoang
quang hc tn x nh sng pha trc
3.6.2 Ly mu khng tng ng ng hc (anisokinetic sampling)
iu kin ly mu trong tc trung bnh ca khng kh hng vo u d mu l khc ng
k vi tc trung bnh ca dng khng kh ng hng ti v tr
3.6.3
B va chm theo t (cascade impactor)
Dng c ly mu gm cc ht t sol kh c s dng nguyn tc va chm mnh nh vo mt lot
b mt vnh gp
CH THCH Mi b mt vnh gp k tip t vo mt dng sol kh c tc cao hn dng t
trc, nh vy cho php thu gom c cc ht nh hn
3.6.4
My m nhn ngng t (condensation nucleus counter)
CNC
Dng c c kh nng phng to cc ht cc mn bng phng tin ngng t m lin tc c
s dng k thut m ht bng quang hc
3.6.5
Lu lng mu (counting efficiency)
T s ca nng d kin cc ht trong khong kch thc nu v nng thc ca cc ht
ny
3.6.6
My phn tch vi phn di ng (differential mobility analyzer)
Dng c o phn b kch thc ht trn c s in ng ca cc ht
3.6.7
Yu t pin phn x (diffusion battery element)
Thnh phn ring l t mt dng c nh kch thc ht nhiu giai on, vn hnh trn nguyn
tc phn x ly ra cc ht nh hn khi dng sol kh
3.6.8
My m ht ri rc (discrete-particle counter)
DPC
Thit b c phng tin hin th v ghi li tng s m v kch thc ca cc ht ri rc (c tch
lc kch thc) cho th tch khng kh c th
3.6.9
Tng s m sai (false count)
Tng s m nhiu (background noise count)
Tng s m zero (zero count)
Tng s m do my m ht ri rc a ra do tn hiu in t khng mong i bn ngoi hoc
bn trong khi khng tn ti cc ht
3.6.10
Phu ht c lu lng k (flowhood with flowmeter)
Thit b c dng c o trc tip th tch dng kh ti mi b lc cui hoc b pha long khng kh
trong lp t dng ln che ph hon ton b lc hoc b khuch tn
3.6.11
Ly mu ng trc (iso-axial sampling)
iu kin ly mu trong chiu ca dng khng kh hng vo u vo ca u d mu cng
chiu vi dng khng kh ng hng ang c ly mu
3.6.12
Ly mu ng ng hc (isokinetic sampling)
iu kin ly mu trong tc trung bnh ca khng kh i vo u vo ca u d mu o
cng tc trung bnh vi dng khng kh khng ng hng ang c ly mu
3.6.13
Dng c tch c ht (partical size cutoff device)
Dng c c kh nng rt ra cc ht nh hn cc ht quan tm b nhp v u vo ca DPC
hoc CNC
3.6.14
Kch thc ngng (threshold size)
Kch thc ht nh nht chn o nng cc ht ln hn hoc bng kch thc
3.6.15
o c ht bay (time-to-flight size measurement)
o kch thc ht kh ng lc xc nh bng thi gian yu cu di chuyn qua khong cch
ca hai mt phng c nh
CH THCH Php o ny s dng tc ht thay i khi ht b a vo dng chy c tc
khc nhau.
3.6.16
Va chm o (virtual impactor)
Thit b phn tch c ht bng lc qun tnh va chm ln b mt gi nh (qun tnh)
CH THCH Cc ht ln xuyn qua b mt vo mt th tch ng v cc ht nh c o
thi vi phn ch yu ca dng khng kh ban u.
3.6.17
Bn i chng (witness plate)
B mt c din tch xc nh lm bng vt liu nhy vi nhim bn s dng thay cho vic nh
gi trc tip mt b mt c th khng ti gn c hoc qu nhy khi c x l
3.7 Trng thi
3.7.1
Trng thi thit lp (as-built)
Trng thi trong vic lp rp c hon thnh vi tt c cc dch v c lin quan v thc hin
chc nng nhng khng lin quan n s hin din ca thit b, vt liu v nhn vin
[TCVN 8664 - 1: 2011 (ISO 14644-1 : 1999), 2.4.1]
3.7.2
Trng thi ngh (at-rest)
Trng thi trong vic lp rp c hon thnh vi thit b c lp t xong v a vo
hot ng theo phng thc tha thun gia khch hng v nh cung cp, nhng khng c
s hin din ca nhn vin
[TCVN 8664-1:2011 (ISO 14644-1:1999), 2.4.2]
3.7.3
Trng thi vn hnh (operation)
Trng thi trong vic lp t ang thc hin chc nng theo cch thc quy nh vi s
lng nhn vin quy nh hin din v lm vic theo cch tha thun trn
[TCVN 8664-1:2011 (ISO 14644-1:1999), 2.4.3]
4. Quy trnh th
4.1 Php th phng sch
4.1.1 Php th yu cu
Phi tin hnh php th m ht trong khng kh phn loi lp t theo TCVN 8664-1 (ISO
14644-1) ti nhng khong thi gian quy nh trong TCVN 8664-2 (ISO 14644-2)
Bng 1 - Php th yu cu cho lp t
Tham kho trong TCVN 3:2010 (ISO 14644-3:2005)
Php th yu cu
m ht trong khng kh
phn loi v php th ca
phng sch v dng c lm
sch khng kh
Nguyn
tc
Cch
tin hnh
Thit b
4.2.1
B.1
C.1
Tham kho trong
TCVN 8664-1 (ISO 146441) v TCVN 8664-2 (ISO

14644-2)
4.1.2 Php th ty chn

Bng 2 lit k cc php th thch hp th nghim cho vic lp t. Nhng php th ny c
th c p dng cho mt trong ba trng thi xut hin n nh. Nhng php th ny c th
khng gm tt c, hoc c th gm tt c cc php th yu cu cho mi d n chng nhn
nu ra. Php th v phng php th phi c la chn theo cch tha thun gia khch
hng v nh cung cp. Nhng php th chn cng c th c lp li trn c s nh k nh
l mt phn ca chng trnh theo di thng xuyn [xem TCVN 8664-2 (ISO 14644-2)]. Hng
dn la chn cc php th v bng lit k nhng mc cn kim tra ca cc php th c
nu trong Ph lc A. Cc phng php th c phc tho trong Ph lc B.
Cc phng php th m t trong Ph lc B ch c phc tho dng mu. Phng php c
th c trin khai p ng cc yu cu ca ng dng ring.
Bng 2 - Php th ty chn cho lp t
Tham kho trong TCVN

8664-3:2011
Php th yu cu
(ISO 14644-3:2005)
Tham kho trong
Nguyn Cch tin

Thit b
tc
hnh
Tng s m ht trong khng kh i
vi ht siu mn
4.2.1
B.2
C.2
TCVN 8664-1 (ISO 14644-1)
Tng s m ht trong khng kh i

vi ht th
4.2.1
B.3
C.3
TCVN 8664-1 (ISO 14644-1)
Php th dng khng kh a
4.2.2
B.4
C.4
TCVN 8664-1 (ISO 14644-1)

v TCVN 8664-2 (ISO 146442)
Php th chnh p khng kh a
4.2.3
B.5
C.5
TCVN 8664-1 (ISO 14644-1)

v TCVN 8664-2 (ISO 146442)
Php th r r h thng lc lp t
4.2.4
B.6
C.6
TCVN 8664-2 (ISO 14644-2)
Php th hng dng kh v s nhn

thy c
4.2.5
B.7
C.7
TCVN 8664-2 (ISO 14644-2)
Php th nhit
4.2.6
B.8
C.8
ISO 7726
Php th m
4.2.6
B.9
C.9
ISO 7726
Php th tnh in v pht ion
4.2.7
B.10
C.10
Php th lng ng ht
4.2.8
B.11
C.11
Php th thu hi
4.2.9
B.12
C.12 TCVN 8664-2 (ISO 14644-2)
Php th ngn chn r r
4.2.10
B.13
TCVN 8664-1 (ISO 14644-1)

C.13 v TCVN 8664-2 (ISO 146442)
y l php th yu cu trn c s TCVN 8664-2 (ISO 14644-2). Cc php th ty chn khng

biu th tm quan trng. Trnh t trong cc php th c thc hin c th da trn yu cu
ca mt vn bn c th hoc sau khi tha thun gia khch hng v nh cung cp.
a
4.2 Nguyn tc
4.2.1 Tng s m ht trong khng kh
Thc hin php th ny xc nh sch khng kh v c th gm ba phn nh sau
a) php th phn loi (xem B.1);
b) php th i vi ht siu mn (ty chn) (xem B.2);
c) php th i vi ht th (ty chn) (xem B.3).
Cc php th b) v c) c th s dng cho mc ch m t hoc l c s i vi mt yu cu c
th nhng khng s dng cho mc ch phn loi.
4.2.2 Php th dng khng kh
Php th ny c thc hin xc nh ngun cung cp lu lng dng mu khng kh trong
mt phng sch i hng v phn b tc khng kh trong mt phng sch khng i hng.
in hnh, th nghim lu lng dng mu khng kh hoc lu lng dng khng kh s c
thc hin trong ch mt khun kh: tc trung bnh, lu lng trung bnh ca dng khng kh
hoc tng lu lng ca dng khng kh. Tng lu lng dng khng kh, ln lt c th c
s dng xc nh tc thay i khng kh (thay i khng kh trong mt gi) cho mt lp t
i hng. Tc khng kh c xc nh trong cc phng sch khng i hng. Quy trnh

th v php th dng khng kh nu trong B.4.
4.2.3 Php th chnh p khng kh
Mc ch ca php th chnh p khng kh l kim tra kh nng ca h thng phng sch
duy tr chnh p gia h thng lp t vi vng bao quanh n. Thc hin php th chnh p
khng kh sau khi lp t p ng tiu ch chp nhn v tc hoc th tch dng khng kh,
ng u ca dng khng kh v cc php th c th p dng khc. Chi tit ca php th
chnh p khng kh nu trong B.5.
4.2.4 Php th r r h thng lc lp t
Thc hin cc php th ny khng nh rng h thng lc khng kh hiu sut cao c
lp t ng bng cch kim tra s khng c l phun r r trong lp t, v cc b lc khng c
h hng (l thng nh v cc h hng khc trong mi trng lc v vng m khung ) v
nhng r r (r r l phun trong khung v vng m b lc, r r trong khung dy b lc). Cc
php th ny khng kim tra hiu sut ca h thng. Thc hin cc php th ny bng cch tin
hnh kch thch sol kh pha dng vo b lc v pha dng ra b lc, khung hoc ly mu
mt ng ng pha dng ra. Hai k thut pht hin r r khc nhau nu trong B.6.
4.2.5 Php th hng dng v s nhn thy c
Mc ch cc php th ny khng nh rng chiu ca dng khng kh hoc m hnh dng
khng kh hoc c hai lin quan n cc c tnh thit k v tnh nng. Nu yu cu, cc c tnh
khng gian ca dng khng kh trong lp t cng c th c khng nh. Quy trnh cho php
th ny nu trong B.7.
4.2.6 Php th ng u nhit v m
Mc ch ca cc php th ny l chng minh kh nng ca h thng phng sch x l
khng kh duy tr cc mc nhit v m (biu th bng m tng i hoc im
sng) trong phm vi cc gii hn kim sot trong khong thi gian c quy nh bi khch
hng i vi vng a th. Quy trnh cho nhng php th ny c nu trong B.8 v B.9.
4.2.7 Php th tnh in v pht ion
Mc ch ca cc php th ny l nh gi mc in p tnh in ln cc i tng, cc tnh
cht tiu tn tnh ca vt liu v tnh nng ca my pht ion (my ion ha) s dng kim tra
tnh in trong lp t. Th nghim tnh in c thc hin nh gi mc in p trn b
mt lm vic v sn phm, tnh cht tiu tn tnh ca cc sn, mt trn ca bn th, v.v. Php
th my pht ion c thc hin nh gi tnh nng pht ion trong vic kh tch tnh trn cc
b mt. Cc quy trnh cho php th ny nu trong B.10.
4.2.8 Php th lng ng ht
Mc ch ca php th ny l o nh lng (s lng hoc khi lng) hoc hiu qu (phn
tn nh sng hoc din tch bao ph) ca cc ht lng ng trn b mt ti mt nh hng bt
k. Mt s quy trnh v php th ny nu trong B.11.
4.2.9 Php th thu hi
Php th thu hi c thc hin xc nh liu vic lp t c kh nng iu hng li n
mc sch quy nh trong phm vi thi gian hn ch, sau khi nhanh chng t vo mt
ngun kch thch ht trong khng kh. Php th ny khng khuyn co cho cc lp t dng
khng kh khng i hng. Quy trnh cho php th ny nu trong B.12.
Khi s dng sol kh nhn to, phi ngn nga tp cht nhim ca vic lp t.
4.2.10 Php th r r nhim
Php th ny c thc hin xc nh nu c s thm nhp ca khng kh cha c lm
sch vo trong phng sch hoc vng sch t bn ngoi ca v bc phng sch hoc vng sch
qua cc khp ni, ng ni, cc ca v trn iu p. Quy trnh v php th ny nu trong
B.13.
5. Bo co th nghim
Kt qu mi php th phi c ghi li trong mt bin bn th v bin bn th gm cc thng tin

sau:
a) tn v a ch ca t chc th nghim, ngy tin hnh php th;
b) vin dn tiu chun ny;
c) nhn bit r rng v tr ca phng sch hoc vng sch (bao gm vng lin k nu cn) v cc
ch nh c th v ta ca im ly mu;
d) tiu ch ch nh c th i vi phng sch hoc vng sch, gm s cp phn loi, trng thi
v kch thc ht xem xt.
e) chi tit v phng php th s dng, vi mi iu kin ring lin quan n php th hoc
s khi u ca phng php th, nhn dng thit b th v chng ch hiu chun hin hnh;
f) kt qu th gm s liu c bo co nh yu cu trong cc iu c lin quan ca Ph lc
B, v li cng b v s ph hp vi s n nh yu cu;
g) cc yu cu ring bt k khc xc nh c lin quan vi cc iu ca Ph lc B i vi cc
php th c th.
Ph lc A
(tham kho)
Chn cc php th gii thiu ca mt lp t v tn s thc hin cc php th ny
A.1 Quy nh chung
Cc quy trnh th m t trong ph lc ny c th s dng chng minh s ph hp vi cc tiu
ch tnh nng ca lp t do ngi s dng quy nh v thc hin th nghim nh k.
La chn php th c th da trn mt phn cc yu t nh bn thit k lp t, cc trng thi
vn hnh v mc yu cu ca chng ch.
Tn s ca cc php th phi c xc nh trc gia khch hng v nh cung cp gim
thiu tn ph trong trng hp khng ph hp.
A.2 Danh sch kim tra
Bng A.1 cung cp mt danh mc cc php th v thit b. Chi tit ca tn s th phi c
quyt nh trn c s tha thun gia khch hng v nh cung cp.
Bng A.1 - Danh sch cc php th ngh v tn s ca chng cho mt lp t sch
Chn
quy
trnh
th v
tn s a
th
Cch tin hnh
m ht trong khng
kh phn loi v
php th o lng
m ht trong khng
kh i vi cc ht th
m ht trong khng
kh i vi cc ht
Quy trnh Chn

th tham thit b
kho
th b
B.1
B.2
B.3
Thit b th
Thit b
tham
kho
My m ht ri rc (DPC)
C.1
My m nhn ngng t
(CNC)
C.2.1
My m ht ri rc (DPC)
C.2.2
Dng c tch kch thc

ht
C.2.3
C.3
Bnh
lun
kh
m ht trong khng
kh i vi ht th c
thu gom ht
m ht trong khng
kh i vi ht th
khng thu gom ht
Dng khng kh
B.3.3.1
B.3.3.3
o lu lng tng
dng khng kh pha
dng ra ca b lc
lp t
o lu lng dng
khng kh trong ng
cp khng kh
o chnh p ca
khng kh
R r b lc lp
t
C.3.1
B va chm theo t
C.3.2
My m ht ri rc (DPC)
C.3.3
Dng c thi gian bay ca

ht
C.3.4
B.4
o lu lng dng
mu khng kh trong B.4.2.2 v
lp t dng khng kh B.4.2.3
ng hng
o tc cp khng
kh trong lp t dng
khng kh ng hng
o di knh hin vi trn

giy lc thu gom
B.4.3.3
B.4.3.2
B.4.2.5
B.5
C.4
Thit b o gi nhit
C.4.1.1
Thit b o gi siu m, ba
kch thc hoc tng
ng
C.4.1.2
Thit b o gi kiu van
C.4.1.3
B dng c o tc
khng kh v p k
C.4.1.4
Thit b o gi nhit
C.4.1.1
kch thc hoc tng
ng
C.4.1.2
Thit b o gi kiu van
C.4.1.3
B dng c o tc
khng kh v p k
C.4.1.4
Hood meter th tch hp

nht
C.4.2.1
ng h o vi phun
C.4.2.2
ng h Venturi
C.4.2.3
Hood meter th tch hp

nht
C.4.2.1
ng h o vi phun
C.4.2.2
ng h Venturi
C.4.2.3
B dng c o tc
khng kh v p k
C.4.1.4
Vi p k in t
C.5.1
p k nghing
C.5.2
ng h c o p sut vi
sai
C.5.3
B.6
C.6
Quang k sol kh tuyn tnh C.6.1.1
Qut r r h thng lc
lp t
B.6.2 v
B.6.3
Quang k sol kh logarit

My m ht ri rc (DPC)
C.6.1.2
C.6.2
My to sol kh
C.6.3
Cht ngun sol kh
C.6.4
H thng pha long
C.6.5
My m nhn ngng t
C.2.1
Quang k sol kh tuyn tnh C.6.1.1

Quang k sol kh logarit
Th v b lc lp trong
ng hoc b x l
khng kh
Hng dng khng kh

v hnh dung
Nhit
Nhit chung
Nhit hn hp
B.6.4
B.7
B.8.2.2
m
B.9
Tnh in v my to
ion
Tnh in
My to ion
My m ht ri rc (DPC)
C.6.2
My to sol kh
C.6.3
Cht ngun sol kh
C.6.4
H thng pha long
C.6.5
My m nhn ngng t
C.2.1
B to vt
C.7.1
Thit b o gi nhit
C.7.2
kch thc
C.7.3
My to sol kh
C.7.4
My to sng m
C.7.4
B.8
B.8.2.1
C.8
Nhit k thy tinh
C.8.1
Nhit k
C.8.2
Dng c chu nhit
C.8.3
in tr nhit
C.8.4
Nhit k thy tinh
C.8.1
Nhit k
C.8.2
Dng c chu nhit
C.8.3
in tr nhit
C.8.4
My theo di m, in dung
C.9.1
My theo di m, tc
C.9.2
Cm bin im sng
C.9.3
My o m
C.9.4
B.10
B.10.2.1
B.10.2.2
C.6.1.2
C.10
Von k tnh in
C.10.1
m k in tr cao
C.10.2
B theo di tm tch in
C.10.3
Von k tnh in
C.10.1
m k in tr cao
C.10.2
B theo di tm tch in
C.10.3
Tm kim chng
Knh hin vi kp hai mt
Lng ng ht
Thu hi
R r nhim
Phng php DPC
Phng php quang

k
a
B.11
B.12
Quang k ht bi phng x
C.11.1
m ht b mt
C.11.2
B to ht
C.11.3
My m ht ri rc (DPC)
C.12.1
My to sol kh
C.12.2
H thng pha long
C.12.3
B.13
C.13
B.13.2.1
B.13.2.2
My m ht ri rc (DPC)
C.13.1
My to sol kh
C.13.2
H thng pha long
C.13.3
Quang k
C.13.4
My to sol kh
C.13.2
trong cc ca ct 1, ngi lp k hoch th c th ghi phng php th theo tn s th.
b trong
ct th 4, ngi lp k hoch th c th chn thit b th theo phng php th chn.

Ph lc B
(tham kho)
Phng php th
B.1 m ht trong khng kh phn loi v o th

B.1.1 Nguyn tc
Phng php th ny quy nh o nng ht trong khng kh vi s phn b ht c kch
thc ngng t 0,1 m v 5 m. Php o c th thc hin trong bt k trng thi no trong s
ba trng thi thit lp, ngh v vn hnh. Thc hin cc php o chng nhn hoc kim tra s
phn cp sch ca lp t ph hp vi TCVN 8664-1 (ISO 14644-1) hoc thc hin o
lng nh k ph hp vi TCVN 8664-2 (ISO 14644-2). Quy trnh nu trong B.1 c phng
theo IEST-G-CC 1001:1999[11].
B.1.2 Quy trnh th
B.1.2.1 Quy nh chung
S im mu, la chn v tr, xc nh phn loi vng sch v cht lng ca cc d liu yu
cu phi ph hp vi TCVN 8664-1 (ISO 14644-1). B.1 cung cp cc phng php i chng
ly mu khng kh ti mi v tr im mu. Cc phng php thch hp khc c chnh xc
tng ng v cung cp cc d liu tng ng c th s dng tha thun gia khch
hng v nh cung cp. Nu khng tha thun c phng php khc hoc trong trng hp
c bt ng, c th s dng phng php i chng trong ph lc ny.
CH THCH Khi thng tin chi tit v th nghim phng sch c yu cu s dng my m ht
ri rc hoc thng tin tip theo v tiu chun DPC, c th s dng cc phng php chun
[2].[3].[4].[11].[23].[24].
B.1.2.2 Quy trnh m ht trong khng kh
Lp t DPC ti im ly mu quy nh v to ra lu lng dng DPC ri chn cc ngng
kch thc ht ph hp vi TCVN 8664-1 (ISO 14644-1). Phi la chn cc d ly mu cho
php hn ch ly mu tng ng trong din tch c dng ng hng[1]. Tc cc d mu

khng c khc vi tc khng kh c ly mu ln hn 20%. Nu iu khng th xy
ra, t u vo cc d ly mu p mt vo trong hng u th ca dng khng kh, trong nhng
v tr khi dng khng kh c ly mu khng c kim sot hoc c th d bo (v d dng
khng kh khng ng hng), u vo ca cc d ly mu phi trc tip hng thng ng
ln. ng xuyn t u vo cc d ly mu ti dng c cm bin DPC phi cng ngn cng tt.
ly mu cc ht ln hn v bng 1 m, chiu di ng xuyn phi khng vt qu chiu di
v ng knh do nh ch to khuyn ngh.
Sai s ly mu do mt cc ht nh bi s khuch tn v mt cc ht ln do sa lng v va chm
mnh khng c ln hn 5%.
B.1.3 Thit b m ht trong khng kh
Mt my DPC nh m t trong C.1 c kh nng m v nh c ht trong khng kh c th phn
bit c ht tng xng vi cp lp t a xem xt. DPC phi c kh nng hin th v ghi li
tng s m ht trong di kch thc , v phi c chng ch hiu chun cn gi tr, nh m t
trong C.1.
B.1.4 Bo co th nghim
Theo s tha thun gia khch hng v nh cung cp, cc thng tin, d liu v bo co th sau
y trong iu 5 phi c ghi li phn loi hoc th nghim lp t:
a) n nn ca DPC;
b) loi php o: phn loi hoc th theo di;
c) phn loi sch ca lp t;
d) khong c ht v m;
e) lu lng dng mu ly mu u vo DPC v lu lng dng mu qua th tch khoang;
f) cc v tr ly mu;
g) cch thc ly mu phn loi hoc k hoch ly mu theo di;
h) trng thi chim gi;
i) d liu khc lin quan n php o.
B.2 m ht trong khng kh i vi cc ht siu mn
B.2.1 Nguyn tc
Phng php th ny quy nh o lng nng ht trong khng kh vi s phn b ht c
kch thc ngng t nh hn 0,1 m; nng ny ch yu l k hiu U. Quy trnh nu trong
B.2 c phng theo IEST-G-CC 1001:1999[11]. Php o c th c thc hin trong lp t
vng sch hoc phng sch bt k ca ba trng thi chim gi ch nh. Thc hin cc php
o xc nh nng cc ht cc mn trong lp t ph hp vi TCVN 8664-1 (ISO 14644-1),
Ph lc E, hoc thc hin cc php o nh k ph hp vi TCVN 8664-2 (ISO 14644-2:2000).
B.2.1.2 Lu lng mu
Lu lng mu ca h thng s dng o k hiu U phi ri vo phm vi vng bao mu ti ch
ra trong Hnh B.1[12]. Vng ny c th chp nhn tm tnh nng trn mt lu lng mu l 50%
ti kch thc ht cc mn xc nh, nh ch ra kch thc "U". N gm mt di dung sai l 10%
ca kch thc ht cc mn, nh ch ra kch thc "1,1U" v "0,9U" trn Hnh B.1. Lu lng
mu c th chp nhn ti thiu v ti a i vi cc ht trn v di 10% ca di dung sai kch
thc l c s thm nhp tnh ton ca mt yu t khuch tn c hiu sut thm nhp t nht
l 40% i vi ht ln hn 10% c ht cc mn xc nh v hiu sut thm nhp t nht l
60% i vi ht nh hn 10% kch thc ht cc mn xc nh.
CH DN
X l kch thc ht, m
Y l lu lng mu, %
0,5U
0,9U
1,1U
5U
V d U = 0,02
0,010
0,018
0,02
0,022
0,10
V d U = 0,03
0,015
0,027
0,03
0,033
0,15
V d U = 0,05
0,025
0,045
0,05
0,055
0,25
Hnh B.1 - Vng bc c th chp nhn i vi lu lng mu ca thit b chn

Nu DPC hoc my m nhn ngng t (CNC) c ng cong lu lng mu h thp v pha
phi ca vng bc trong Hnh B.1, DPC hoc CNC khng c s dng o hoc kim tra k
hiu U. Nu ng cong h thp v pha tri ca vng bao, lu lng mu c th b gim do s
thay i vi mt dng c tch kch thc ht nh m t trong B.2.1.3. Trong trng hp ny, lu
lng mu ca DPC hoc CNC thay i khin cho sn phm lu lng mu ca DPC hoc
CNC khng b thay i v s thm nhp tng phn ca dng c tch kch thc ht.
B.2.1.3 Dng c tch kch thc ht
t c c tnh lu lng mu mong i yu cu phi o hoc kim tra k hiu U, dng
c tch kch thc ht c th c gn vo u mu ca DPC hoc CNC, ng cong lu
lng mu ca vng bao mu ti ca Hnh B.1. ng cong lu lng mu ca DPC v CNC
kt hp, u vo mu v dng c tch kch thc ht s phi thay i ri trong phm vi vng
bao mu ti yu cu ca Hnh B.1.
Dng c tch kch thc ht di chuyn cc ht nh hn kch thc xc nh, gim s thm nhp
trong mt ngun xc nh. S khc bit rng ri v kch thc v cu hnh ca dng c tch kch
thc ht l c sn v c th chp nhn, vi iu kin l chng to ra cc c tnh thm nhp
yu cu. dng c tch kch thc ht thch hp, c th s dng pin phn x v b va chm
o. S thm nhp l hm ca tnh cht vt l ca ht, cu hnh ca dng c v tc th tch
dng. Yu cu phi cn thn vi mi dng c tch c ht m bo chng ch c s dng
ti lu lng dng mu m chng c thit k v chng c lp t sao cho ngn nga
c s tch np tnh in. C th gim thiu tch ly np bng cch m bo dng c tch c
ht c ni t ph hp.
B.2.2 Quy trnh m ht cc mn

Lp t cc d u vo mu ca DPC hoc CNC (vi dng c tch cp ht, nu yu cu). Th
tch mu khng kh yu cu ca mi im mu v thc hin o p nh yu cu trong TCVN
8664-1 (ISO 14644-1), Ph lc B hoc TCVN 8664-2 (ISO 14644-2). Ly mu cc ht cc mn
vi lu lng dng mu ly mu nh v ng ly mu di c th gy ra mt mt phn x ng k.
Sai s ly mu do mt mt cc ht cc mn v phn x khng c ln hn 5%. Tnh ton nng
k hiu U trong di kch thc ht cc mn, nh tha thun gia khch hng v nh cung
cp, v bo co d liu. Khi yu cu thng tin v s n nh v nng ht cc mn, tin hnh
ba hoc nhiu hn cc php o ti nhng v tr la chn ti khong thi gian nh tha thun
gia khch hng v nh cung cp.
B.2.3 Dng c m ht cc mn
S dng mt my DPC nh m t trong C.3 hoc CNC nh m t trong C.2. Nu s dng mt
DPC, n phi c lu lng mu 50% i vi cc ht cc mn nh xc nh trong TCVN 8664-1
(ISO 14644-1). Ph lc B v c kh nng v sai s xc nh kch thc ht n t nht l 1m.
Lu lng mu kch thc ht ngng ca DPC hoc CNC phi c xc nh theo Hnh B.1.
Nu s dng mt DPC hoc CNC c kh nng pht hin cc ht nh hn kch thc mong i,
phi s dng dng c tch c ht c kh nng thm nhp c ht bit nh m t trong B.2.1.3.
Theo s tha thun gia khch hng v nh cung cp, cc thng tin, d liu v bo co th sau
y trong iu 5 o k hiu U ca lp t vng sch:
a) nhn bit v DPC hoc CNC v dng c tch c ht, nu s dng, cng tnh trng hiu chun;
b) ngng kch thc ht cc mn xc nh i vi d liu k hiu U;
c) tc m ting ng nn ca DPC, khi s dng;
d) d liu tnh nng ca dng c tch c ht, khi yu cu;
e) loi php o: o k hiu U hoc theo di;
f) phn loi sch lp t;
g) u vo h thng o ht cc mn v tc th tch dng;
h) v tr cc im mu;
i) k hoch ly mu xc nh hoc k hoch ly mu th nghim, nu quy nh;
j) trng thi chim gi;
k) d liu khc lin quan n php o.
B.3 m ht th trong khng kh
B.3.1 Nguyn tc
Phng php th ny quy nh php o nng ht trong khng kh c kch thc ngng ln
hn ng knh 5 m (ht th). Quy trnh nu trong B.3 c phng theo IEST-GCC.1003:1999[13]. Php o c th c thc hin trong lp t vng sch hoc phng sch bt
k ca ba trng thi chim gi ch nh. Thc hin cc php o xc nh nng cc ht
th trong lp t ph hp vi TCVN 8664-1 (ISO 14644-1). Ph lc E, hoc thc hin cc php
o nh k ph hp vi TCVN 8664-2 (ISO 14644-2:2000). S cn thit nhn c mu ng
v x l gim thiu mt mt cc ht th trong cc thao tc x l c nhn mnh.
B.3.2 Xem xt x l mu
Trong cng vic v ht th yu cu cn thn thu gom v x l. Tho lun hon thin cc yu cu
v h thng c th s dng ly mu ng ng lc v khng ng ng lc ri chuyn v
im o lng cung cp trong [1][13].
B.3.3 Phng php o i vi ht th
C hai tiu ch chung ca phng php o ht th. Nu s dng cc phng php o khc nhau
c th khng tin hnh so snh cc kt qu. Tng quan gia cc phng php khc nhau c
th l nguyn nhn khng so snh. Thng tin v c ht thc hin bi cc phng php khc
nhau c tm tt sau y:
b) thu gom bng lc hoc tc ng qun tnh o bng knh hin vi s ht v c ht hoc o
khi lng cc ht thu gom:
1) thu gom bng lc ri o bng knh hin vi (B.3.3.2.1) s bo co ht th s dng c ht trn
c s ng knh ht tha thun;
2) thu gom bng va chm theo t ri o bng knh hin vi (B.3.3.2.2 a) s bo co ht th s
dng c ht trn c s la chn knh hin vi bo co ng knh ht;
3) thu gom bng va chm theo t ri o khi lng (B.3.3.2.2. b) s bo co ht th s dng c
ht trn c s ng knh kh ng lc;
c) o nng v c ht th bng mt my m thi gian bay ca ht hoc DPC ng ch ca
n:
1) o bng DPC (B.3.3.3.2) s bo co ht th s dng c ht trn c s ng knh quang hc
tng ng;
2) o c ht bng thi gian bay (B.3.3.3.3) s bo co c ht trn c s ng knh kh ng
lc.
B.3.3.2 o ht th bng thu gom ht
B.3.3.2.1 Thu gom bng lc ri o bng knh hin vi
La chn mt b lc mng v vng kp hoc b theo di sol kh lp t trc; phi s dng
mng c kch thc l l 2 m hoc nh hn. Nhn hiu vng kp b lc nhn bit v tr v
lp t vng kp b lc. Ni u ra ti ngun chn khng s rt khng kh ti lu lng dng
mu yu cu. Nu v tr mu trong nng ht th c xc nh l vng c dng ng
hng, phi thit lp lu lng dng mu cho php ly mu ng kh ng lc vo trong
vng kp b lc hoc u vo b theo di sol kh v u vo phi quay vo trong dng ng
hng.
Vng kp b lc hoc u vo b theo di sol kh phi t phng thng ng hng ln. i
vi lp t ti ISO cp 6 [xem TCVN 8664-1 (ISO 14644-1)] v my ht bi, th tch khng kh
mu phi khng nh hn 0,28 m 3. i vi lp t vn hnh c sch nh hn ISO cp 6, th
tch khng kh mu phi khng nh hn 0,028 m 3.
Di chuyn np khi vng kp b lc mng hoc b theo di sol kh ri bo qun trong mt a
im sch. Mu khng kh ti v tr im mu nh xc nh theo tha thun gia khch hng
v nh cung cp, nu s dng my bm chn khng xch tay ht khng kh qua b lc mng,
kh thi t bm phi m thng ra pha ngoi lp t sch hoc qua mt b lc ph hp. Sau khi
hon thnh thu gom bin php mng b lc c gi v tr ngang trong sut thi gian v
khng chu rung hoc xc gia thi gian gi mu v khi mu c phn tch. m ht trn b
mt b lc[4].
B.3.3.2.2 Thu gom bng va chm theo t ri o
Trong trng hp va chm theo t, dng mu chuyn qua mt lot vi c kch thc gim dn.
Nhng ht ln b lng trc tip xung di vi ln nht v nhng ht nh hn b lng ti mi
tng ca b va chm. C th s dng hai kiu b va chm theo t thu gom cc ht ln.
Trong mt kiu, nhng ht ln b lng xung b mt ca tm c th di chuyn c ly ra cn
hoc kim tra bng knh hin vi tip theo. Lu lng dng mu ly mu l 0,00047 m 3/s hoc ln
hn s dng cho b va chm theo t kiu ny. Trong mt kiu khc, cc ht ln b lng
xung b cm bin p in thch anh cn vi lng khi lng, cn cc ht thu gom ti mi
tng. Kiu b va chm theo t ny thng s dng vi lu lng dng mu nh hn ng k.
a) i vi kiu b va chm theo t th nht, lng cn b ban u ca mi tng thu gom c
ghi li hoc s b ca cc ht trn mt din tch ca mi tng c tnh trc khi thc hin mi
php o. B va chm c vn hnh trong khong 10 min hoc lu hn. Ti cui ca thi gian
, n c bt kn ri chuyn n cn hoc knh hin vi nh gi. Cc tng thu gom c ly

ra v ghi li lng cn hoc s cc ht tch ly trn mi tng c th thu gom cc ht ln. Sau
nng cc ht ln c xc nh l tng lng cn hoc s lng trn tng b va chm
thch hp chia cho tng dng khng kh chuyn qua b va chm.
b) i vi kiu b va chm theo t th hai, d liu khi lng ht c thu thp trong thi gian
ly mu. V mi tng c th c lp b cm bin ca cn vi lng hin th s thay i v
khi lng, iu thng khng cn thit cho vic xc nh lng cn b ban u trc khi bt
u thu gom mu. V vi b va chm theo t khc, cc tng c th ly ra v tin hnh o cc
ht ring r bng knh hin vi hoc s dng knh hin vi in t i vi tp hp ht. Lu lng
dng mu mu c iu chnh n 0,00039 m 3/s v mu trong khong thi gian t 10 min n
vi gi ph thuc vo cp ca vng sch. B va chm c t ln lt ti v tr mu la
chn trc. Ti cui ca chu k mu, b va chm c th chuyn n cc v tr khc v c th tin
hnh o mu b sung. Sau xc nh nng ht th l tng lng cn hoc s lng trn
cc tng b va chm thch hp chia cho tng dng khng kh chuyn qua b va chm.
B.3.3.3 o ht th khng thu gom ht
B.3.3.3.1 Quy nh chung
C th o cc ht th m khng cn thu gom ht t khng kh. Qu trnh bao gm o quang hc
ca cc ht l lng trong khng kh. Mu khng kh c chuyn ti lu lng dng mu ring
qua mt DPC s bo ng knh quang hc tng ng hoc ng knh ng lc ca cc
ht.
B.3.3.3.2 o bng my m ht ri rc (DPC)
Quy trnh o cc ht th s dng mt DPC cng nh quy trnh trong B.1 i vi my m ht
trong khng kh c mt ngoi l. Ngoi l l trong trng hp DPC khng yu cu nhy
pht hin cc ht nh hn 1 m v d liu ch yu cu i vi vic m cc ht th. Yu cu phi
cn thn m bo cc mu DPC trc tip t khng kh ti v tr mu. Khng c s dng
cc ng chuyn mu n kch thc u vo ly mu ng ng lc trong vng dng ng
hng. Trong cc vng kh tn ti dng ng hng, PDC phi t vi u vo mu trc tip
phng thng ng hng ln. ng knh u vo mu phi khng nh hn 30 mm.
Cc ci t di kch thc ca PDC c thit lp sao cho ch pht hin cc ht th. D liu t
mt kch thc di 5 m [xem TCVN 8664-1 (ISO 14644-1), Bng 1] phi c ghi li m
bo nng ht pht hin di kch thc ht th khng cao gy ra sai s ngu nhin
trong php o bng PDC. Nng ht trong di kch thc thp hn, khi cng vo nng ht
ln, phi khng vt qu 50% nng ht khuyn co ti a quy nh i vi DPC ang s
dng.
B.3.3.3.3 o kch thc ht bng thi gian bay
Cc kch thc ht th c th o c bng my o thi gian bay. Mu khng kh c ht vo
trong my v c tng tc bng cch m rng qua mt vi vo trong phn chn khng c t
vng o. Mi ht trong mu khng kh ny tng tc ph hp vi vn tc khng kh trong vng
o. Gia tc ca cc ht bin i nghch o vi khi lng ca ht. Tng quan gia tc
khng kh v tc ca ht ti im o c th c s dng xc nh ng knh kh ng
lc ca ht. Vi s hiu bit chnh p gia mi trng khng kh v p sut ti vng o, c th
tnh ton trc tip tc khng kh. Tc ht c o bng thi gian bay gia hai chm laze.
My o thi gian bay s o ng knh kh ng lc ca cc ht n 20 m, vi phn gii
kch thc km hn 10%. Cc quy trnh thu nhn mu cng ging nh quy trnh yu cu khi s
dng PDC o ht th. Ngoi ra, ging nh quy trnh s dng cho PDC vi thit b ny
thit lp di kch thc ht phi c bo co.
B.3.4 Quy trnh m ht th
Lp t cc d u vo mu ca thit b la chn. Mu th tch khng kh yu cu c thu
gom t nht l 20 ht th ti mi im ly mu v tin hnh o nh quy nh trong TCVN 8664-1
(ISO 14644-1) hoc TCVN 8664-2 (ISO 14644-2). Tnh ton nng k hiu M trong di kch
thc ht la chn, nh tha thun gia khch hng v nh cung cp, v bo co d liu.
Khi yu cu thng tin v s n nh ca nng ht th, tin hnh ba hoc nhiu hn cc php
o ti nhng v tr la chn ti khong thi gian ly mu nh tha thun gia khch hng v
nh cung cp.
Theo s tha thun gia khch hng v nh cung cp, cc thng tin v d liu sau y nh m
t trong iu 5, phn loi hoc th nghim lp t:
a) xc nh cc thng s ht m thit b p ng;
b) loi php o: phn loi hoc php th xc nh hoc theo di k hiu M;
c) n nh mi loi dng c o v dng c s dng v tnh trng hiu chun ca n;
d) phn loi sch lp t;
e) di kch thc ht th v tng s m i vi mi di kch thc bo co;
f) lu lng dng mu u vo thit b v lu lng dng mu qua th tch cm bin;
g) v tr cc im mu;
h) k hoch ly mu phn loi hoc k hoch ly mu th nghim;
i) trng thi chim gi;
j) n nh ca nng ht th, nu yu cu;
k) cc d liu khc lin quan ca php o.
B.4 Php th dng khng kh
B.4.1 Nguyn tc
Mc ch ca cc php th ny l o tc ng u ca dng khng kh, v tc cp
dng khng kh trong phng sch v vng sch. o s phn b tc l cn thit trong phng
sch v vng sch c dng khng kh ng hng, v tc cung cp dng khng kh khng
ng hng trong phng sch. Tin hnh o tc cung cp dng khng kh tm hiu chc
chn th tch khng kh cung cp cho lp t sch trong mt n v thi gian, v tr s ny
cng c th c s dng xc nh thay i khng kh trong mt n v thi gian. Tc
cung cp dng khng kh c o pha dng ra ca b lc cui hoc trong ng ng cung
cp khng kh. C hai phng php da vo php o tc khng kh chuyn qua mt din tch
bit, lu lng dng mu khng kh l tch s ca tc v din tch. Chn quy trnh phi
c tha thun gia khch hng v cung cp. Cc php th ny c th p dng trong tt c ba
trng thi chim gi n nh.
B.4.2 Quy trnh v php th lp t dng khng kh ng hng
Tc ca dng khng kh ng hng xc nh tnh nng ca phng sch. Tc c th c
o gn ng vi b mt ca u cui cc b lc cung cp hoc trong phm vi phng sch. iu
ny c th thc hin bng cch xc nh b mt o vung gc vi dng khng kh cung cp v
phn chia chng vo cc mng li c din tch nh nhau [15].
B.4.2.2 Tc cung cp dng khng kh
Lu lng dng mu khng kh c o ti b mt cch b lc khong 150 mm n 300 mm. S
cc im o phi xc nh tc cung cp dng khng kh trong phng v vng sch, v
phi l cn bc hai ca 10 ln din tch tnh bng mt vung nhng khng nh hn 4. t nht phi
o mt im cho mi u ra ca b lc hoc b qut lc. C th s dng bc mn ngn nga
cc xo trn ti dng khng kh ng hng.
Thi gian o ti mi v tr cng phi m bo c th lp li s o. Gi tr trung bnh thi
gian ca tc o phi c ghi li i vi cc v tr phc tp.
B.4.2.3 ng u ca tc trong phm vi phng
ng u ca tc phi c o ti b mt cch b lc khong 150 mm n 300 mm v

phn chia cc mng li phi c xc nh nh tha thun gia khch hng v nh cung
cp.
Khi thit b sn xut v bn gia cng c lp t, iu quan trng phi xc nhn xy ra nhng
thay i ng k ca dng khng kh. Do , vic o ng u ca tc khng c tin
hnh ti nhng v tr gn st vi nhng tr ngi ny.
D liu o c th khng ch ra c tnh ca phng sch hoc vng sch hoc vng sch lp
t. D liu c s dng xc nh ng u ca tc , tc l phn b tc phi c
tha thun gia khch hng v nh cung cp.
Thi gian o ti mi v tr phi m bo c th lp li s o.
B.4.2.4 Tc cung cp dng khng kh c o bng tc b mt b lc
Cc kt qu ca php th lu lng dng mu khng kh tin hnh ph hp vi B.4.2.2 c th
s dng tnh ton tng tc cung cp dng khng kh nh sau:
Q = (Uc x Ac)
trong
Q l tng lu lng dng mu khng kh;
Uc l lu lng dng mu khng kh ti mi tm mng;
Ac l din tch mng c xc nh bng din tch lp t chia cho s cc im o;
l tng ca tt c cc mng.
B.4.2.5 Tc cung cp dng khng kh trong cc ng dn khng kh
Tc cung cp dng khng kh trong ng ng c th c o bng lu lng k th tch, v
d: vi phun k, ng khuch tn k v thit b o gi, tham kho trong TCVN 8113 (ISO 5167) tt
c cc phn.
Trong trng hp o bng ng pit tnh (b dng c o tc khng kh) v p k hoc thit b
o gi (kiu nhit hoc kiu van) i vi ng dn hnh ch nht, mt bng o trong ng dn phi
c chia thnh cc mng c din tch bng nhau, sau o lu lng dng mu khng kh
ti tm ca tng . S cc mng phi c tha thun gia khch hng v nh cung cp, v d
l 9 hoc 16. Tc th tch dng khng kh phi c nh gi theo cng cch nh xc nh
trong B.4.2.4. i vi ng dn hnh trn, o tc th tch dng khng kh bng ng pit tnh c
th xc nh bng quy trnh nh m t in hnh trong EN 12599[10].
B.4.3 Quy trnh v php th lp t dng khng kh khng ng hng
Tc cung cp th tch khng kh v tc thay i khng kh l cc thng s quan trng nht.
Trong mt s trng hp o tc cung cp khng kh t cc u ra ring r l cn thit xc
nh th tch dng khng kh t mi u ra[15].
B.4.3.2 o tc cung cp dng khng kh ti u vo
Bi v tc ng ca nhiu lon cc b dng khng kh v tc phun pht t mt u ra, s
dng phu ht thu c ton b khng kh pht ra t mi b lc cui hoc b khuch tn gii
thiu. Tc cung cp dng khng kh c o bng np y dng c lu lng k, hoc tc
khng kh ca ca thot khng kh t np y dng nhiu nhnh bng din tch c hiu qu. L
hng np y dng phi t hon ton bn trn ca b lc hoc b khuch tn, v b mt ca
np y phi t ta vo mt b mt phng ngn nga ng vng khng kh v lm sai kt
qu. Khi np y dng c lu lng k c chp nhn, lu lng dng mu khng kh ti mi
b lc cui hoc b khuch tn phi o trc tip ti u x ca np y.
B.4.3.3 Tnh tc cung cp khng kh t tc b mt b lc
nh gi tc cung cp dng khng kh khng c np y dng c th thc hin pha dng
ra ca thit b o gi ca mi b lc cui. Tc cung cp dng khng kh c xc nh t lu
lng dng mu khng kh nhiu nhnh bng din tch ca ca ra. C th s dng mn che
loi tr nhiu ca dng khng kh ng hng.
V s cc im o v php tnh ton tc cung cp dng khng kh, tham kho B.4.2.3 v
B.4.2.4 theo th t.
Nu khng th lm c vic chia mt bng thnh cc mng c din tch bng nhau, tc
trung bnh ca khng kh c iu chnh bng b mt thay th.
B.4.3.4 Tnh tc cung cp khng kh trong ng dn khng kh
Tc cung cp khng kh trong ng dn khng kh phi xc nh theo cng cch nh xc
nh trong B.4.2.5.
B.4.4 Thit b cho cc php th dng khng kh
Nhng m t v cc yu cu k thut o ca thit b c cung cp trong C.4. o lu lng
dng mu khng kh, c th s dng thit bi o gi siu m, thit b o gi nhit, thit b o gi
kiu van, hoc thit b tng ng vi chng.
o tc cung cp dng khng kh, c th s dng vi phun k, ng khuch tn k, thit b
o gi, thit b o gi trung bnh v p k, hoc thit b tng ng vi chng.
Cc php o lu lng dng mu khng kh phi c thc hin vi thit b khng b tc ng
bi s thay i tc gia cc im trn khong cch nh, v d c th s dng thit b o gi
nhit nu la chn s phn chia mng nh v c o cc im b sung. Mt khc, c th s
dng thit b o gi kiu van nu n c nhy v ln o tc trung bnh ca khng
kh trn sut di thay i.
Cc thit b chn dng phi c chng ch hiu chun cn hiu lc.
Theo s tha thun gia khch hng v nh cung cp, cc thng tin v d liu phi c ghi li
nh m t trong iu 5:
a) loi php th v php o, cc iu kin o;
b) n nh mi loi dng c o v dng c s dng v tnh trng hiu chun ca n;
c) v tr o v khong cch danh ngha t b mt lc;
d) trng thi chim gi;
e) cc d liu khc lin quan ca php o.
B.5 Php th chnh p khng kh
B.5.1 Nguyn tc
Mc ch ca cc php th ny l kim tra kh nng lp t hon thin duy tr chnh p
quy nh gia lp t v vng bao quanh n, v gia cc vng phn chia trong phm vi lp
t[15]. Php th ny c th p dng trong mi trng thi chim gi n nh, v cng c th
c lp li trn c s nh k nh l mt phn ca chng trnh theo di thng quy m t
trong TCVN 8664-2 (ISO 14644-2).
B.5.2 Quy trnh i vi php th chnh p ca khng kh
khng nh th tch khng kh cung cp v s lp t cn bng trong phm v cc yu cu
k thut, iu ng lm trc khi khi ng l o chnh p gia cc phng hoc gia cc
phng v din tch bn ngoi.
Vi tt c cc ca phng ng, phi o v ghi li chnh p gia phng v mi trng bao
quanh.
Nu vic lp t c phn chia thnh nhiu hn mt phng, phi o chnh p gia phng
tn trong cng v phng lin k. Php o phi lin tc cho n khi chnh p gia vng bao
bc cui cng v mi trng ph thuc bao quanh v mi trng bn ngoi u c o.
p sut o c l rt nh v k thut o khng ng c th d gy ra vic c kt qu sai. Phi

xem xt cc vn sau y:
a) xut vic lp t cc im o c nh;
b) thc hin cc php o gn vi ch gia phng v cch xa mi u vo ca ngun cung cp
khng kh hoc cc trang b u ra khng kh tr li c th nh hng n p sut ti im
o.
B.5.3 Thit b i vi php th chnh p khng kh
Nhng m t thit b v yu cu k thut o lng c cung cp trong C.5. C th s dng vi
p k in t, p k mt nghing hoc ng h c o chnh p.
Cc thit b phi c chng ch hiu chun cn gi tr.
nh m t trong iu 5:
a) loi php th v php o, cc iu kin o;
c) cp sch ca cc phng ang xem xt;
d) v tr cc im o;
e) trng thi chim gi.
B.6 Php th r r ca h thng lc lp t
CNH BO Kch thch sol kh c th cung cp cc ht hoc nhim phn t khng chp
nhn trong phm vi mt vi lp t. Mt s sol kh th c th to ra mt mi nguy trong
nhng hon cnh nht nh. Tiu chun ny khng a ra cc vn v an ton lin quan
n cc php th. Trch nhim ca ngi s dng l phi tra cu v p dng cc thc
hnh an ton thch hp, nh gi ri ro v mi gii hn iu chnh trc khi s dng tiu
chun ny.
B.6.1
Thc hin php th ny khng nh h thng lc c lp t ng v khng c r r trin
khai trong qu trnh s dng. Cc phn ca phng php th nu trong B6 c m phng
theo IEST-RP-CC034.2[18]. Php th kim tra khng c r r, lin quan ti tnh nng sch ca
lp t. Php th c thc hin bng cch tin hnh kch thch sol kh pha dng vo ca b
lc ri qut ngay pha dng ra ca b lc v khung hoc ly mu pha dng ra ng dn.
Php th l th r r ca lp t bt lc hon chnh bao gm mi trng lc, khung, vng m v
h thng in. Php th r r ca h thng lc lp t khng ln ln vi php th hiu sut
ca cc b lc ring r ti ni sn xut. Php th c p dng cho phng sch trong cc trng
thi chim gi "trng thi thit lp" hoc trong "trng thi ngh", v c thc hin khi khi ng
phng sch mi, hoc khi cc phng sch hin hnh yu cu th nghim li, hoc sau khi cc b
lc cui c thay th.
Hai quy trnh v h thng lc c trn hoc tng hoc thit b b lc c m t trong B.6.2
v B.6.3. Quy trnh v ng ng b lc c m t trong B.6.4. Cc php th phc tho
di y c th thc hin vi quang k sol kh (phng php B.6.2) hoc vi mt my DPC
(phng php B.6.3). Kt qu th ca hai phng php ny khng th so snh trc tip.
B.6.1.2 S dng quang k sol kh
Phng php quang k sol kh (B.6.2) c th s dng th nghim:
a) cc phng sch trong cc im phun sol kh cc b c cung cp trong h thng phn
phi ng dn cho php t c nng kch thch sol kh cao hn quy nh;
b) cc h thng b lc kt hp c thm nhp MPPS (kch thc ht thm nhp ln nht) trn b
bng n ln hn 0,003%;
c) cc lp t khi kh thi ca sol kh th l du d bay hi lng ng trn b lc v ng dn
khng c cho l gy thit hi cho cc sn phm v/hoc qu trnh v/hoc nhn vin trong
phng sch.
CH THCH Phng php quang k sol kh c bit cho nng sol kh 100 n 1000 ln ln
b lc cng cp khi so snh vi phng php DPC.
B.6.1.3 S dng my m ht ri rc (DPC)
Phng php DPC (B.6.3) l nhy hn, v h thng b lc tr nn t nhim hn so vi khi s
dng phng php quang k sol kh. N c th c s dng th nghim:
a) phng sch vi tt c cc loi h thng x l khng kh;
b) cc h thng b lc kt hp c thm nhp MPPS (kch thc ht thm nhp ln nht) trn b
gim n 0,000 005 %;
c) cc lp t khi kh thi ca sol kh th l du d bay hi lng ng trn b lc v ng dn
khng c php hoc khi sol kh rn c khuyn co.
B.6.2 Quy trnh v th qut r r ca h thng lc lp t bng quang k sol kh
Cc bc chun b nu trong cc iu t B.6.2.2 n B.6.2.5, quy trnh th nu trong B.6.2.6,
tiu ch chp nhn v cc tc ng sa cha xem trong B.6.2.7 v B.6.6[14][15][16].
B.6.2.2 La chn kch thch sol kh pha dng vo
Mt a phn tn c pht tc nhn to hoc mi trng sol kh c to ra pha dng vo
khng kh nhn c sol kh pha dng vo t ti nng kch thch ng u yu cu.
ng knh ht c khi lng trung bnh (MMD) i vi sn phm ny ch yu l t 0,5 m n
0,7 m vi lch chun hnh hc l 1,7.
CH THCH Hng dn v cht to ngun sol kh c nu trong C.6.4.
B.6.2.3 Nng kch thch sol kh pha dng vo v xc minh
Nng ca kch thch sol kh pha dng vo ca b lc phi l t 10 mg/m 3 n 100 mg/m3.
Nng thp hn 10 mg/m3 c th gim nhy pht hin r r. Nng ln hn 80 mg/m 3
c th tng s tc nghn b lc qu mc trn thi k th m rng[18].
Phi thc hin bin php thch hp xc minh hn hp ng u ca sol kh b sung cho dng
khng kh cung cp. Thi gian u h thng c th phi xc nh hn hp sol kh l mi
v tr. i vi vic nh gi nh vy mi vic phun v cc im ly mu phi c xc nh v
ghi li.
Tin hnh cc php o nng sol kh pha dng vo ngay ti pha dng vo ca b lc khng
c thay i ln hn 15% trong thi gian ly gi tr o trung bnh. Nng thp hn gi tr
trung bnh lm gim nhy ca php th cho cc r r nh, trong khi cc nng cao hn lm
tng nhy cho cc r r nh. Cc chi tit tip theo nh tin hnh nh th no php th trn sol
kh - khng kh phi c tha thun gia khch hng v nh cung cp. ASME N510-1989[1] v
IEST-RP-CCO34.2:1999[18] cng c th l gi tr.
B.6.2.4 Xc nh kch thc cc d
Kch thc u vo cc d mu phi c tnh ton t vic xem xt lu lng dng mu ca
dng c o v lu lng dng mu khng kh thot ra t b lc sao cho tc khng kh u
vo cc d xp x vi lu lng dng mu khng kh thot ra t b lc. Cc d ly mu phi c
cu trc hnh vung hoc hnh ch nht. Phn b tc u vo phi c xem xt cn thn [18].
qva
Dp = U x W
p
trong
(B.2)
Dp l kch thc ca cc d song song vi phng qut, tnh bng centimt;

qva l lu lng dng mu thc t ca dng c o, tnh bng mt khi trn giy;
U l lu lng dng mu khng kh thot ra t b lc, tnh bng centimet trn giy;
Wp l kch thc ca cc d vung gc vi phng qut, tnh bng centimet.
CH THCH Tc khng kh s l:
(U + 20%) Us (U - 20%)
Cng c th biu th l
1,2 U Us 0,8 U
trong
U l lu lng dng mu khng kh ti b lc thot ra;
qvp
Us = D x W l tc khng kh ti u vo cc d
p
p
B.6.2.5 Xc nh tc qut
Tc cc d qut ngang S, phi xp x 15/W p cm/s[18]. V d khi s dng mt cc d vung 3
cm x 3 cm, Sr l 5 cm/s.
B.6.2.6 Quy trnh th qut r r h thng lc lp t
Php th c thc hin bng cch thc hin kch thch ring sol kh dng vo ca b lc v
tm kim v nhng r r bng cch qut pha cui ca b lc v h thng li hoc khung
bng cc d ca quang k nh sau:
a) php th lu lng dng mu khng kh (B.4) i vi nh gi ban u phi c thc hin
trc khi hon thnh php th ny;
b) cc php o sol kh pha dng vo ca b lc theo B.6.2.3 phi thc hin trc tin kim
tra nng sol kh cng nh ng u phn b ca n;
c) sau cc d phi ct ngang ti tc qut khng vt qu gi tr S, cng b trong
B.6.2.5, bng cch s dng cc si c chp nh. Cc d phi c gi cch pha dng ra
mt lc hoc cu trc khung khong 3 cm;
d) phi thc hin qut qua ton b mt pha dng ra ca tng b lc, chu vi ca tng b lc,
vng m gia khung b lc v cu trc chn song, bao gm cc khp ca n;
e) cc php o sol kh pha dng vo ca b lc phi c lp li ti cc khong thi gian hp l
gia v sau khi qut r r, chng thc n nh nng sol kh kch thch (xem B.6.2.3).
B.6.2.7 Tiu ch chp nhn
Trong khi qut, mi ch th ca r r bng hoc ln hn gii hn c trng cho r r n nh
phi l nguyn nhn gi cc d ti v tr r r. V tr r r phi c nhn bit bng v tr ca
cc d th hin s c ln nht trn quang k.
Nhng r r n nh c cho rng ni xut hin s c ln hn 10 -4 (0,01%) ca nng sol
kh kch thch pha dng vo. Tiu ch chp nhn thay th c th c tha thun gia khch
hng v nh cung cp.
V cc tc ng thc hin nh gi r r pht hin, xem B.6.6.
CH THCH thm nhp khc nhau ca cc b lc v/hoc thi gian p ng ca quang k
c th yu cu xem xt cc tiu ch chp nhn khc nhau, tham kho IEST-RP-CC034.2[18].
B.6.3 Quy trnh th qut r r ca h thng lc lp t bng mt DPC
Phng php hai giai on ca quy trnh ny trong phng php th r r b lc cung cp
chnh xc v tc :
1) Phi qut pha sch ca b lc v r r tim n. Trong qu trnh qut rng DPC, pht hin
nhiu hn s m c th chp nhn quan st c Ca trong thi gian thu nhn mu Ts ch th
s hin din tim n ca r r. Trong trng hp , phi thc hin giai on th hai. Nu khng
c ch th r r tim n, khng cn kho st tip. Xc nh Ca v Ts c m t trong B.6.3.6.
2) Phi a cc d v b mt c s m ht cc i trong tng r r tim n v thc hin o li
ti ch. Trong qu trnh o li ti ch bng mt DPC, pht hin nhiu hn s m c th chp
nhn quan st c Ca trong thi gian lu tr duy tr lin tc T s ch th s hin din tim n ca
r r. Xc nh Ca v Ts c m t trong B.6.3.6.
B.6.3.2 Cc iu kin ca sol kh
Mt a phn tn c pht tc nhn to hoc mi trng sol kh c to ra pha dng vo
khng kh t ti nng kch thch yu cu.
CH THCH Hng dn v cht to ngun sol kh c nu trong C.6.4.
Phi p ng cc iu kin sau y:
a) ng knh trung bnh ca ht m c phi l 0,1 m n 0,5 m;
b) kch thc ngng ca DPC phi bng hoc nh hn kch thc ht sol kh trung bnh;
c) nu DPC c nhiu hn mt ng dn c sn gia kch thc ngng v 0,5 m, phi chn ng
dn c s c cc ht pha dng ra cao nht;
d) phi iu chnh kch thc ht trung bnh tng ng st vi kch thc im gia ca ng
dn DPC s dng.
B.6.3.3 Nng v kim tra sol kh pha dng vo
Nng ca sol kh kch thch pha dng vo ca b lc phi cao t c tc qut
thc t c th chp nhn c theo B.6.3.5. Trong hu ht cc trng hp, phi b sung sol kh
pht tc cho pha dng vo sol kh kch thch t n nng kch thch cao yu cu.
kim tra nng cao nh vy c th yu cu mt h thng pha long ph hp trnh dung sai
nng ca DPC (sai s ngu nhin). Phi kim tra tnh nng ca h thng pha long ti thi
im bt u v kt thc ca mi chu k s dng[16].
Khi nng sol kh pha dng vo thay i theo thi gian, phi lin tc thc hin php o ny
trong qu trnh qut nhng r r nhn c d liu cho cc php tnh c s m pha dng ra
tip sau. Nng thp hn gi tr trung bnh s lm gim nhy i vi cc r r nh, trong khi
cc nng cao hn s lm tng nhy cho cc r r nh. Do , tt nht l phi theo di nng
pha dng vo. Cc chi tit tip theo nh tin hnh nh th no php th trn sol kh - khng
kh, bao gm tn s v s cc v tr thc hin ly mu pha dng vo[4] phi c tha thun
gia khch hng v nh cung cp[18].
B.6.3.4 Xc nh kch thc cc d
Tham kho B.6.2.4.
B.6.3.5 Quy trnh th qut r r h thng lc sp t
Tham kho B.6.2.6, cc khon B.6.2.3 v B.6.2.5 c thay th bng B.6.3.3 v B.6.3.6.4
tng ng.
B.6.3.6 Cc tnh ton chun b v nh gi
B.6.3.6.1 K hiu v biu lu trnh cc tnh ton chun b v nh gi
Nhng k hiu trong on ny c nu nh sau:
Cc l nng kh kch thch pha dng vo ca b lc (ht/cm 3);
Ps l thm nhp trn b cho php ln nht MPPS (kch thc ht thm nhp ln nht) ca b lc
a th;
PL l thm nhp r r chun ca b lc a th;
K l h s biu th PL ln hn Ps bao nhiu ln;
qvs l gi tr ca lu lng dng mu mu chun, qvs = 472 cm3/s (28,3 l/min);

qva l lu lng dng mu mu thc t ca my m ht ri rc (cm 3/s);
Sr l tc qut ca cc d (cm/s);
Dp l kch thc cc d song song vi hng qut (cm);
Np l s m ht mong i c trng cho r r n nh [ht];
Npa l s m ht thc t c trng cho r r n nh [ht];
Ca s m c th chp nhn quan st c [ht];
Ts l thi gian thu nhn mu (sec);
Tr l thi gian lu tr lin tc (sec).
S di y ca cc php tnh chun b v nh gi c trnh by trong Hnh B.2.
a) Pht hin r r tim tng bng cch qut

Nu c hai hoc nhiu s m tng trong thi gian ngn (nh hn T s[S]), phi thc hin php o
li ti ch bng cc d ti v tr r r khi Ca [ht] c chn l 1. Nu s m khng tng phi
xem xt din tch qut khng b r r.
b) Pht hin r r bng cch o li ti ch
Nu s m quan st c nh hn Ca[ht] i vi thi gian lu tr lin tc, T r[s], phi xem xt v

tr khng b r r.
Nu s m quan st c lin tc vt qu Ca[ht] trong khi thi gian lu tr lin tc ko
di, phi c xem xt liu c r r.
Hnh B.2 - S lu trnh cc php tnh chun b v nh gi
B.6.3.6.2 Thm nhp r r chun ca b lc a th PL
Thm nhp r r chun, PL, c xc nh l thm nhp pht hin bi DPC vi lu lng dng
mu mu chun khi cc d ly mu ng yn ni r r. Lu lng dng mu mu chun qvs
c xc nh l 472 cm 3/s (28,3 l/min).
PL c chn theo tha thun gia khch hng v nh cung cp, hoc trn c s Bng B.1 v
phng trnh B.3, l hm ca K v Ps.
PL = K x Ps
Bng B.1 - K trong hm ca Ps
Thm nhp cc i c
th cho php, Ps
5 x 10-4
5 x 10-5
5 x 10-6
5 x 10-7
5 x 10-8
H s, K
10
10
30
100
300
Phi xc nh Ps l thm nhp MPPS (kch thc ht thm nhp ln nht) trn b c th cho
php ln nht ca b lc c th nh quy nh ca nh sn xut. thm nhp ring danh
ngha ti c ht ring c th s dng khi khng c thm nhp MPPS.
CH THCH PL gm thm nhp ca mi trng lc bnh thng v r r.
Trong din tch nht nh, thm nhp cc b c th ln hn thm nhp tng th ton b.
i vi quy trnh qut bng tay, c th thay th Ca bng Np. C khuyn co rng Np ln hn hoc
bng 2, v khng yu cu xem xt B.6.3.6.3.
i vi tng quan vi tiu ch c th chp nhn ca phng php quang k (xem B.6.2), thm
nhp ln nht c th cho php c thch ng l 0,01 % i vi b lc c thm nhp trn b l
0,05 % v 0,005%. Trong trng hp ny, kch thc ht trung bnh ca sol kh xp x l 0,8 (
0,2) m.
B.6.3.6.3 S m ht mong i Np l tiu ch c th chp nhn Ca
Mt s m quan st c, Ca, nu ra trn gii hn tin cy, Np, bng php tnh thng k. Mt
s cp Ca v Np c nu trong Bng B.2. Gi tr nh hn ca Np s cho php qut nhanh hn
hoc cho php nng pha dng vo thp hn.
a) Nu s m sai l khng ng k, phi chn cp Ca = 0, Np = 3,7.
b) Nu s m sai khng phi l khng ng k, phi chn gi tr ca C a 1.
Bng B.2 - Gii hn trn ca 95% khong tin cy ca phn b Poisson [8][17]
Quan st
c, Ca
Gii hn trn,
Np
Quan st
c, Ca
Gii hn trn,
Np
3,7
13,1
5,6
14,4
7,2
15,8
8,8
17,1
10,2
10
18,4
11,7
11
19,7
B.6.3.6.4 Tc qut, Sr
Khi Np ln hn 19,7
Ca = N p -
2 NP
(B.4)
Tc qut ngang ca cc d, Sr, c xc nh theo cng thc sau:

Dp
Dp
Sr Cc x PL x qvs x N = Cc x PL x 472 x N
p
p
(B.5)[18]
Sr khng c cao hn 8 (cm/s).

Trc tin phi chn Sr v Ca cn sau nng sol kh kch thch Cc c tnh t phng trnh
(B.5).
B.6.3.6.5 Thi gian lu tr lin tc, Tr, v Npa v Ca i vi Tr
a) La chn thi gian lu tr lu di, Tr(s)
Mi s m quan st c ln hn Ca, phi l nguyn nhn o li ti ch trong thi gian lu
tr lin tc Tr. Trong trng hp s dng DPC thng mi, Tr phi c t ti mt hoc mt vi
ln khong c nh ca DPC.
b) Tnh ton s thc t ca Npa (ht) i vi Tr(s) v Ca (ht)
S thc t ca s m ht c trng r r n nh, Npa i vi Tr c th thu c t phng
trnh (B.6). Khi s Npa l ln, c th tnh Ca t phng trnh (B.7).
Npa = Cc x PL x qvs x Tr
Ca = Npa -
(B.6)
2 N Pa
(B.7)
B.6.3.6.6 Thi gian lu tr lin tc, Tr, v Npa v Ca i vi Tr

a) Trong trng hp s m nh hn Ca (ht)
S m quan st c bng hoc nh hn Ca bng hoc lu hn thi gian thu nhn mu Ts
khng nh khng c r r. Thi gian thu nhn mu, Ts, bng hoc ln hn thi gian ginh cc
d i qua r r, nh nu trong phng trnh (B.5)[18]:
Dp
Ts S
r
(B.8)
b) Trong trng hp s m ln hn Ca (ht)

Mi s m quan st c, ln hn Ca (ht) phi l nguyn nhn kho st thi gian lu tr
lin tc bng cc d ti v tr r r.
Khi qut bng th cng, pht hin mt r r tim n l iu c th bng cch nhn quan st
v/hoc cng sut m thanh ca DPC. C th phn bit gia s m c th chp nhn v
khng chp nhn, phi phng theo nng sol kh trc b lc sao cho s m ht c th chu
c l khng ln hn 10 ht.
Khong ly mu ca DPC phi lu trnh tc ng ca thi gian t li gia cc khong.
B.6.3.6.7 Pht hin r r bng cch o li ti chr
a) S quan st c nh hn Ca (ht)
S m quan st c i vi Ts, bng hoc nh hn Ca khng nh khng c r r.
b) S m quan st c ln hn Ca (ht)
Nu s m quan st c vt qu Ca, c th phi xem xt vic o li ti ch. Nu s m
quan st c vn trt qu Ca, c th phi xem xt b lc c mt r r.
B.6.3.7 Sot xt i vi lu lng dng mu khng chun
Thm nhp r r chun, PL, c xc nh bng lu lng dng mu mu chun qvs = 472 cm3/s
(28,3 l/min). S m ht t r r ph thuc vo lu lng dng mu mu thc t qva (cm3/s),
trong s tng phi vi cc ht t mi trng lc bnh thng. Khi s dng lu lng dng mu
mu khng chun, cc phng trnh c th sot xt nh sau:
Dp
Sr [Cc (PL - Ps)qvs + Cc x Ps x qva] N
p
(B.9)
Npa = [Cc (PL - Ps)qvs + Cc x Ps x qva]Tr
(B.10)
B.6.3.8 V d p dng c nh gi
V d quy trnh nh gi nu trong Hnh B.3.
a) Pht hin r r tim tng bng cch qut

Nu c hai hoc nhiu s m tng trong thi gian ngn (nh hn 0,4[s]), phi thc hin php o
li ti ch bng cc d ti v tr r r.
Nu s m khng tng phi xem xt din tch qut c coi l khng b r r.
b) Pht hin r r bng cch o li ti ch
Nu s m quan st c nh hn Ca = 67 [ht] i vi thi gian lu tr lin tc, Tr = 6[s], phi
xem xt v tr khng b r r.
Nu s m quan st c lin tc vt qu Ca trong sut thi gian lu tr lin tc ko di,
iu c coi l c r r.
Hnh B.3 - S nh gi quy trnh
B.6.4 Quy trnh th r r ton b b lc lp trong ng dn hoc u mi x l khng kh
(AHUs)
Quy trnh ny c th s dng nh gi r r ton b ca lp t c b lc lp trong ng dn.

Quy trnh ny c th s dng xc nh r r ton b ca lp t b lc nhiu tng khng th
tng ring l. Cc php th ny cng c th s dng i vi cc b lc lp u cui di nh
chng c nh v trong lp t c ch dng khng ng hng. Phng php ny l rt t
nhy pht hin cc r r hn cc phng php m t trong B.6.2 v B.6.3 [1][6][9].
Thc hin php th bng cch tin kch thch sol kh dng vo ca b lc lp t t xa
phng sch. Sau nng ht ca khng kh lc c o trong ng dn hoc u ni x l
khng kh, ri so snh vi nng pha dng vo xc nh hiu qu chung hoc thm nhp
ca lp t b lc[18].
Php th lu lng dng mu khng kh (B.4) nh gi cht lng ban u phi c thc
hin trc khi hon tt php th ny.
Php o nng sol kh pha dng vo theo B.6.2.3 (phng php quang k) hoc B.6.3.4
(phng php DPC) phi c thc hin u tin kim tra nng v ng nht ca sol
kh.
Php o nng sol kh pha dng ra phi c tin hnh t nht ti mi im cho mt b lc
sau khi trn u pha dng ra ca b lc. Nu khng xy ra trn u, c th p dng php th
thay th. Php o phi c tin hnh ti mt s v tr khong trng bng nhau trong mt mt
phng, gia 30 cm v 100 cm cui b lc, trong phm vi ng dn v ti khong cch khong 3
cm t thnh ng dn.
Php o nng ht pha dng ra ca b lc phi c lp li ti cc khong thi gian ngu
nhin khng nh n nh ca ngun sol kh kch thch (xem B.6.2.3).
T cc nng o, c th tnh c thm nhp chung i vi tng v tr pha dng ra v i
vi kch thc ht m dng c o lng iu chnh.
Khng c thm nhp no l cao hn nm ln thm nhp danh nh MPPS (kch thc ht thm
nhp ln nht) ca b lc. Tuy nhin, i vi quang k thm nhp ny khng c ln hn 10 -4
(0,01 %). Mi tiu ch c th chp nhn khc v hiu sut th i vi b lc c th c thit lp
bng s tha thun gia khch hng v nh cung cp.
Nhng sa cha v hiu chnh ca cc r r c th tin hnh theo B.6.6 bng cc quy trnh
tha thun gia khch hng v nh cung cp.
CH THCH i vi cc p dng khi b lc trong ng dn yu cu a th r r bng cch qut,
c th s dng cc phng php m t trong B.6.2 v B.6.3.
B.6.5 Thit b v vt liu cho php th r r h thng lc lp t
Thit b quy nh trong cc iu t B.6.5.1 n B.6.5.4 phi c chng ch hiu chun cn gi tr.
B.6.5.1 Quang k sol kh c hm s logarit hoc tuyn tnh (xem C.6.2).
B.6.5.2 My m ht ri rc (DPC) (xem C.6.2), c lu lng dng mu mu cao v kh
nng pht hin kch thc ht lin quan n php th r r ang thc hin. DPC v quang k sol
kh b hn ch s dng trong nhng trng hp khi cc s m c s hoc nng l nh hn
10% nhng gi tr c trng cho mt r r n nh.
B.6.5.3 My pht kh nn ph hp hoc sol kh nhit cung cp nng sol kh kch thch
thch hp trong di kch thc thch hp (xem C.6.3).
B.6.5.4 Cht ngun sol kh ph hp (xem C.6.4)
B.6.6 Sa cha v quy trnh sa cha
Sa cha r r ch c chp nhn bng s tha thun gia khch hng v nh cung cp.
Phng php sa cha phi a vo trong li gii trnh ch dn no t nh sn xut thit b,
hoc khch hng.
Trong vic la chn vt liu sa cha phi xem xt kh thi v lng phn t trn cc sn
phm v quy trnh.
R r c pht hin trong cc b lc hoc cu trc h thng in phi c sa cha.
Sau khi sa cha hon tt v mt thi gian cha tr cho php, v tr r r phi c qut li
bng cch s dng phng php xc nh.
Theo s tha thun gia khch hng v nh cung cp, cc thng tin v d liu sau y phi
c ghi chp nh m t trong iu 5:
a) phng php th: quang k hoc my m ht ri rc (DPC);
b) cc n nh loi cho mi dng c o v thit b s dng v tnh trng hiu chun ca n;
c) mi iu kin c bit hoc l trnh hoc c hai t phng php th ny v mi quy trnh ring
tha thun gia khch hng v nh cung cp;
d) nng sol kh pha dng vo o vi cc v tr im mu v thi gian o tng ng;
e) lu lng; v i vi cc php o DPC, di kch thc ht;
f) nng sol kh pha dng vo trung bnh tnh c v s phn b ca n;
g) tiu ch tnh ton chp nhn p dng i vi cc php o pha dng ra;
h) kt qu ca php o pha dng ra i vi mi b lc nhn bit r rng, mt ct din tch
hoc v tr o;
i) kt qu th cui cng i vi mi v tr xc nh;
j) Nu khng c r r sau khi th xong, ni cch khc nu c r r bo co v tr r r, tc ng sa
cha v kt qu th nghim li ca v tr.
B.7 Php th hng dng kh v s nhn thy c
B.7.1 Nguyn tc
Mc ch ca php th hng dng kh v d nhn thy c l khng nh chiu ca dng
khng kh v ng u thch nghi ca n thit k v cc yu cu k thut v tnh nng v,
nu yu cu, cc c tnh khng gian v thi gian ca dng khng kh trong lp t.
CH THCH ng hc cht lng dng my in ton (CFD) s dng nh mt cng c d
on v phn tch khng c xem xt trong tiu chun ny.
B.7.2 Cc phng php
Php th hng dng kh v s nhn thy c c th thc hin theo bn phng php:
a) phng php si dy;
b) phng php phun du vt;
c) phng php hnh dung dng khng kh bng k thut x l hnh nh;
d) phng php hnh dung dng khng kh bng php o phn b tc .
Bng cc phng php a) v b) dng khng kh trong lp t c nhn thy thc s bng cch
s dng si dy du vt cht s hoc cht ht vt. Cc dng c lu gi nh mn hnh video,
phim ha hc, a hoc bng ghi hnh. Si dy du vt cht s hoc cht ht vt khng phi l
ngun nhim, v s theo chnh xc hnh dng ca dng khng kh. Thit b khc nh my pht
ht vt v ngun sng cng cao c th c s dng cho phng php ny.
Phng php c) c s dng chng minh nh lng s phn b tc ca dng khng
kh trong lp t. K thut da trn c s k thut x l hnh nh vt bng my vi tnh.
Phi thc hin cn thn m bo rng ngi vn hnh khng lm nhiu mu dng khng kh
ang kho st.
CH THCH Dng khng kh b tc ng bi nhiu thng s khc nh chnh p ca khng
kh, tc khng kh v nhit .
B.7.3 Quy trnh th trc tip hng dng kh v s nhn thy c
B.7.3.1 Phng php si dy du vt
Php th ny c thc hin bng cch quan st chm si tc l cc si t, si nilong n,

ui c hoc bng phim mng. Chng c t trn u mt ca que hoc treo trn cc
im ct ngang ca h thng cun dy mng trong dng khng kh. Chng cung cp cc ch th
c th nhn thy chiu ca dng khng kh v nhng thay i bt thng do cc nhiu lon. nh
sng c nh hng tr gip quan st v ghi li trn dng khng kh c ch th. lch hng
ca dng khng kh c o gia hai im (v d 2 m n 0,5 m) tnh ton gc lch.
B.7.3.2 Phng php phun du vt
Php th c tin hnh bng cch quan st hoc hnh nh vn ng ca cc ht vt c ri
sng bng ngun sng cng cao, v cung cp thng tin v phng v ng u ca
dng khng kh trong lp t. Cc ht vt c th c to nn t nhng vt liu nh nc kh
ion (DI) alcol/glicol v.v c phun xt. Phi la chn ngun cn thn trnh nhim b mt.
Kch thc mong i ca cc git nh phi c xem xt khi la chn phng php to git.
Cc git nh phi ln k thut x l hnh nh hin c th pht hin c, nhng khng
qu ln tc dng trng lc v tc dng khc gy ra chuyn ng phn k khi dng khng kh
ang quan st.
B.7.3.3 Phng php hnh dung dng khng kh bng k thut x l hnh nh
D liu x l hnh nh ht bt ngun t phng php m t trong B.7.2 trn nh hoc phim
video cung cp cc c trng nh lng ca dng khng kh bng vct hai kch thc ca tc
khng kh trong din tch. K thut x l yu cu my tnh ch th s c giao din ph hp v
phn mm ph hp. i vi phn gii khng gian ln hn, c th s dng mt ngun sng
laze.
B.7.3.4 Phng php nhn thy c hng dng kh bng php o phn b tc
Phn b tc ca dng khng kh c th xc nh bng ci t thit b tc khng kh, v d
my o tc gi nhit hoc siu m, ti mt s im xc nh trong lp t ang kho st. X l
d liu o cung cp cc thng tin v phn b dng khng kh.
B.7.4 Phng php nhn thy c hng dng kh bng php o phn b tc
Thit b th chiu v hnh dung dng khng kh i vi tng phng php l khc nhau. Thit
b ph hp cho tng phng php nu trong C.7.
nh m t trong iu 5:
a) cc loi php th, phng php hnh dung v cc iu kin th;
c) v tr cc im o;
d) cc hnh nh lu gi trong quang k hoc video catset, hoc cc d liu ban u i vi mi
php o, trong trng hp ca k thut x l hnh nh hoc o s phn b tc , nu quy nh;
e) bn mt bng v tr chnh xc ca tt c cc thit b kt hp cng bo co hng dng kh
nhn thy c;
f) trng thi chim gi.
B.8 Php th nhit
B.8.1 Nguyn tc
Mc ch ca php th ny l chng minh kh nng ca h thng x l khng kh ca lp t
duy tr mc nhit trong phm vi cc gii hn kim sot v sut thi gian tha thun gia
khch hng v nh cung cp i vi din tch c th c a th. Cc phn ca phng php
th nu trong B.8 c phng theo t IEST-RP-CC006.3[15]. Hin c hai mc phng php th.
Th nht l phng php th chung, m t trong B.8.2.1, xc nh quy trnh ph hp th s
b lp t trong trng thi thit lp. Th hai l php th ton din m t trong B.8.2.2, c th p
dng trong trng thi ngh hoc trng thi vn hnh. Php th th hai ny c kh nng p dng
cho vng c yu cu tnh nng nhit chnh xc hn.
B.8.2 Quy trnh th nhit
B.8.2.1 Php th nhit chung
Php th ny c thc hin tip theo hon thnh ca php th ng u dng khng kh v
iu chnh ca cc iu khin h thng iu ha khng kh. Php th ny phi thc hin sau khi
h thng iu ha khng kh c vn hnh v cc iu kin c n nh.
Phi o nhit t nht mt v tr i vi mi vng cn kim sot nhit .
Mi dng c cm bin phi c t ti v tr c mc cao lm vic.
Sau thi gian c php dng c cm bin n nh, c nhit ti mi v tr phi c
ghi li. Phi thc hin php o thch hp cho mc ch th ca p dng v thi gian o phi t
nht l 5 min vi mt gi tr ghi t nht l tng pht.
B.8.2.2 Php th nhit ton din
Php th ny c o i vi din tch c yu cu k thut kim sot mi trng nghim ngt.
Thc hin php th ny t nht l 1h sau khi h thng iu ha nhit hot ng v cc
iu kin n nh.
Phi chia vng cng tc thnh mt h thng mng cc din tch bng nhau. Din tch th
nghim ring l phi la chn theo s tha thun gia khch hng v nh cung cp.
S v tr o phi t nht l hai.
Cc d nhit phi t ti mc chiu cao lm vic v ti mt khong cch khng nh hn 300
mm cch trn, tng hoc sn ca lp t.
Phi la chn v tr cc d vi nhng xem xt v cc ngun nhit hin c.
Phi thc hin php o thch hp cho mc ch th ca p dng v thi gian o phi t nht l 5
min vi mt gi tr ghi t nht l tng pht.
B.8.3 Thit b th nhit
Thc hin php th nhit bng cch s dng mt dng c cm bin c chnh xc nh
quy nh trong ISO 7726, v d:
a) nhit k;
b) dng c nhit in tr;
c) nhit in tr.
Yu cu ti thiu phn di ca php o i vi thit b l 1/5 ca di nhit c th cho php
i vi s khc nhau gia nhit im t v di cho php ca thay i c php t im
t .
Dng c phi c chng ch hiu chun cn gi tr.
nh m t trong iu 5:
a) cc loi php th v php o, cc iu kin o;
c) v tr cc im o;
d) trng thi chim gi.
B.9 Php th m
B.9.1 Nguyn tc
Mc ch ca php th ny l chng minh kh nng ca h thng x l khng kh ca lp t

duy tr mc m (biu th bng m tng i hoc im sng) trong phm vi cc gii hn
kim sot v sut thi gian tha thun gia khch hng v nh cung cp i vi din tch c th
c a th. Cc phn ca phng php th nu trong B.9 c phng theo t IEST-RPCC006.3[15].
B.9.2 Quy trnh th m
Php th ny c thc hin tip theo hon thnh ca php th ng u dng khng kh v
iu chnh ca cc iu khin h thng iu ha khokng6 kh.
Php th ny phi thc hin sau khi h thng iu ha khng kh c vn hnh v t c
cc iu kin n nh.
Dng c cm bin m phi c t ti t nht mt v tr cho mi vng kim sot m, v
phi c thi gian cho php dng c cm bin c n nh.
Phi thc hin php o thch hp cho mc ch th ca p dng sau khi dng c cm bin c
n nh, v thi gian o phi t nht l 5 min.
im o, tn s, cc khong v chu k ghi li cc d liu phi c tha thun gia khch
hng v nh cung cp.
Php th m phi thc hin lin kt vi php th nhit .
B.9.3 Thit b th m
Thc hin php th m bng cch s dng mt dng c cm bin c chnh xc nh
quy nh trong ISO 7726.
Dng c cm bin in hnh l:
a) dng c cm bin m c t in in mi bng phim mng;
b) dng c cm bin im sng;
c) m k.
phn di ti thiu ca dng c l 1/5 ca di m c th cho php i vi s khc nhau
gia m im t v di cho php ca thay i c php t im t . Dng c phi
c chng ch hiu chun cn gi tr.
nh m t trong iu 5:
b) n nh loi mi dng c o v dng c s dng v tnh trng hiu chun ca n;
c) nhit ;
d) cc v tr im o;
e) trng thi chim gi.
B.10 Php th tnh in v pht ion
B.10.1 Nguyn tc
Php th ny gm c hai phn. Mt l php th tnh in v mt l php th pht ion (my pht
ion). Mc ch ca php th tnh in l nh gi mc in th tch tnh in trn b mt
cng tc v b mt sn phm, v tc tiu tan din tch tnh in ca sn, mt bn gia cng
hoc cc linh kin lp t khc. Thuc tnh tiu tan tnh c nh gi bng cch o in tr b
mt o v in tr r r trn b mt. Php th pht ion c thc hin nh gi tnh nng ca
my pht ion bng cch o thi gian phng in ca b theo di np in ban u, v bng
cch xc nh in p b ca cc tm theo di cch in. Cc kt qu ca mi php o ch ra
hiu qu ca vic loi tr (hoc trung ha) np tnh in v s khng cn bng gia s lng ion
dng v m to ra.
B.10.2 Quy trnh th tnh in v pht ion

B.10.2.1 Quy trnh th tnh in
B.10.2.1.1 Php o mc in p b mt
S c mt ca tch tnh in m hoc dng trn b mt cng tc hoc sn phm c o bng
cch s dng mt von k hoc trng k.
iu chnh u ra ca von k hoc trng k n im 0 bng cch a ra cc d ti b mt
tm kim loi c ni t. Gi cc d sao cho l hng cm bin song song vi tm kim loi ti
mt khong cch theo ch dn ca nh sn xut. Tm kim loi s dng iu chnh im 0 phi
c din tch b mt kch thc l cc d yu cu v khong cch cha li thch hp t
cc d n mt phng.
o in p b mt, t v gi cc d gn vi b mt i tng np c o. Cc d phi
c gi ging nh bin php i vi vic iu chnh im 0. php o c gi tr, din tch b
mt ca i tng phi ln so vi kch thc l cc d v khong cch cha li thch hp t
cc d n mt phng.
Ghi li kt qu c c ca von k tnh in.
im o hoc i tng o la chn cho php o phi xc nh theo s tha thun gia
khch hng v nh cung cp.
B.10.2.1.2 Php o thuc tnh tiu tan tnh in
Thuc tnh tiu tan tnh in c nh gi bng cch o in tr v mt (in tr gia cc v tr
khc nhau trn b mt) v in tr r r (in tr gia b mt v t). Cc gi tr ny c o
bng cch s dng ng h in tr cao.
in tr b mt hoc in tr r r c o bng cch s dng cc in cc c trng lng v
kch thc thch hp. Cc in cc ny s t ti khong cch thch hp t b mt trong qu
trnh o in tr b mt.
Cc chi tit ring ca iu kin th phi c tha thun gia khch hng v nh cung cp.
B.10.2.2 Quy trnh th pht ion
B.10.2.2.1 Quy nh chung
Mc ch ca php th ny l nh gi tnh nng ca my pht ion lng cc. Php th bao
gm php o thi gian phng in v in p b. Php o thi gian phng in c thc hin
nh gi hiu sut kh ca my pht ion s dng np tnh in. o in p b c thc
hin nh gi s khng cn bng ca cc ion dng v m trong dng khng kh ion ha
t my pht ion. S khng cn bng ca cc ion c th dn n in p d khng mong i.
Thc hin cc php o ny bng cch s dng tm theo di dn, mt von k tnh in, mt
ng h o thi gian v ngun in. (i khi thit b gm cc b phn bit nh mt b phn
theo di tm tch in).
B.10.2.2.2 o thi gian phng in
Thc hin php o ny bng cch s dng tm theo di (cc tm cch in) c in dung
bit trc (v d 20 pF). Ban u tm theo di c tch in t ngun in n in p dng
hoc m bit.
o s thay i tch in tnh trn tm trong khi tm c t vo dng khng kh c ion
ha bng my pht ion lng cc ang nh gi. S thay i trong in p ca tm sut thi
gian c o bng cch s dng mt von k tnh in v mt ng h thi gian.
Thi gian phng in l thi gian cn thit in p tnh in trn tm b gim i 10% ca trng
thi in p ban u.
Thi gian phng in phi c o i vi c hai tm tch in m v dng.
V tr cc im v cc kt qu i vi tiu ch c th chp nhn phi c tha thun gia khch
hng v nh cung cp.
B.10.2.2.3 o in p b
in p b c o bng cch s dng mt b theo di tm tch in c treo trn mt vt
cch in.
S thay i trn tm cch in c theo di bng mt von k tnh in.
Ban u tm c ni t chuyn di mi tch in d v n phi c bo m rng in
p trn tm l zero.
in p b c o bng cch t tm vo dng khng kh c ion ha cho n khi d liu
thu hi ca von k tr nn n nh.
in p b c th chp nhn ca my pht ion ph thuc vo nhy tch tnh in ca i
tng trn din tch lm vic. in p b c th chp nhn phi c xc nh theo s tha
thun gia khch hng v nh cung cp.
B.10.3 Thit b th tnh in v pht ion
a) von k tnh in hoc trng k tnh in o mc in p tnh in b mt th tnh in;
b) m k in tr cao o thuc tnh tiu tn tnh in i vi php th tnh in;
c) von k tnh in, hoc trng k tnh in v tm theo di dn in, hoc b theo di tm
tch in i vi php th my pht ion.
Cc thit b ny c m t trong C.11. Cc thit b phi c chng ch hiu chun cn gi tr.
nh m t trong iu 5;
c) nhit , m v d liu mi trng khc nu c lin quan;
d) cc v tr im o;
e) trng thi chim gi:
f) cc d liu khc lin quan n php o.
B.11 Th sa lng ht
B.11.1 Nguyn tc
Php th ny m t quy trnh v thit b nh kch thc v m s ht v hoc c th b sa
lng khi khng kh vo b mt sn phm hoc b mt cng tc trong lp t. Cc ht sa lng
c thu gom vo tm kim chng c c tnh b mt thch hp tng t b mt ang xem xt,
ri c nh kch thc v m bng cch s dng knh hin vi quang hc, knh hin vi in t
hoc thit b qut b mt. C th s dng mt quang k ht bay thu nhn d liu tc sa
lng lt. D liu v cc ht sa lng phi c bo co di dng khi lng hoc s lng ca
cc ht trn mt n v din tch b mt trn mt n v thi gian.
B.11.2 Quy trnh th sa lng ht
B.11.2.1 Thu gom cc ht ln tm kim chng
Tm kim chng phi t trn cng b mt vi b mt ang xem xt. Tm kim chng phi c
cng in p tnh in nh b mt th. Phi theo cc quy trnh v phng php sau y khi thao
tc tm kim chng bng tay.
a) kim tra tt c h thng phng sch l ng chc nng, ph hp vi cc yu cu hot ng.
b) nhn dng tng tm kim chng c nht v sch ca n nh yu cu gim nng
ht b mt n di mc c th. Xc nh nng c s ca cc ht trn mi tm kim chng.
c) duy tr 10% tm kim chng kim tra. iu ny phi c x l hon ton ging nh cch
tm kim chng khng t th.
d) Vn chuyn tt c cc tm kim chng n v tr th bng cch sao cho ngn nga cc ht
trong khng kh khng lm nhim b mt ca chng.
e) t cc tm kim chng trong cc khong thi gian n 48 h ph thuc vo loi phng sch,
phng thc vn hnh v my m ht s c s dng. Thi gian t phi iu chnh, nu cn
t c s sa lng trn b mt tm kim chng cung cp cc d liu thng k c gi
tr tha mn yu cu ca ngi s dng.
f) Bao ph v thu gom cc tm kim chng t ri bo qun chng trong hp kn sao cho
chng c bo v khi b nhim tip theo.
B.11.2.2 m v nh c cc ht thu gom
m v nh c cc ht thu gom trn tm kim chng c tin hnh thu nhn d liu c
th ti lp, cc d liu ny c th s dng phn loi sch ca din tch a th.
Khi s dng knh hin vi quang hc, c th s dng ng ch thp thng hoc trn hiu
chun cho cc yu cu nh c ht. Vi mt knh hin vi in t, c th s dng li nhiu x
hiu chun bng cc tuyn dn tri bit lin kt cc kch thc hnh nh vo kch thc
thc t. Khi s dng my qut b mt, c th s dng thng tin hiu chun kch thc do nh
sn xut cung cp. D liu t tng s m trn mt phn din tch ca tm kim chng c th
ngoi suy ton th din tch b mt tm (s tm thng k). C th thc hin ngoi suy nh m t
trong ti liu tham kho [4]:
a) m v nh c cc ht trn tt c cc tm kim chng, bao gm c tm kim tra. m cc
ht trn tng din tch ca tt c cc tm kim chng ri phn loi chng trong di kch thc ht
ph hp, trn c s ng knh ht.
b) xc nh nng b mt ca cc ht sa lng trn mi tm kim chng:
D=
Nt - Nb
Aw
(B.11)
trong
D l nng ht sa lng trn b mt;
Nt l nng ht tng b mt;
Nb l s ht ln hn hoc bng kch thc nh nht xc nh trn b mt tm kim chng sau
khi lm sch, nhng trc khi a vo mi trng phng sch.
Aw l din tch tm kim chng, tnh bng centimt vung.
c) gi tr trung bnh ca D i vi tm kim chng kim tra.
d) Xc nh tng thc v nng b mt ca mi tm kim chng bng cch tr nng
trung bnh ca tm kim chng kim tra vi gi tr trung bnh ca tm kim chng a th. Chia
nng thc cho thi gian t tm kim chng th. Cc kt qu tnh ton ny biu th tc sa
lng ht (PDR) tnh bng s ht sa lng trn mt centimet vung trong mt n v thi gian.
e) Bo co gi tr trung bnh PDR v lch chun ca n.
B.11.3 Thit b th sa lng ht
B.11.3.1 Vt liu tm kim chng
Ph thuc vo kch thc ht c pht hin v phng tin o lng c th s dng sau y:
a) b lc mng vi xp;
b) bng dnh hai mt;
c) a petri;
d) a petri cha nha mu tng phn (en), v d nha polyeste;
e) phim chp nh (tm);

f) knh hin vi trt (trn hoc c ph mng kim loi bay hi);
g) tm gng thy tinh hoc kim loi;
h) phi vi mch bn dn;
i) cht nn du nh bng thy tinh;
phng b mt ca tm kim chng phi thch hp vi kch thc ht s c m m
bo rng cc ht d c nhn thy. Phng tin o c s dng phi c kh nng gii quyt
v o kch thc ht nh nht a m.
B.11.3.2 Thit b ph tr
C th s dng thit b khc nhau m v nh c ht b lng vo b mt tm kim chng.
Chng ri vo bn loi chnh ph thuc vo kch thc ht lin quan [25][28].
a) knh hin vi nh (ht ln hn hoc bng 2 m);
b) knh hin vi in t (ht ln hn hoc bng 2 m);
c) my qut phn tch b mt (ht ln hn hoc bng 0,1 m);
d) quang k n ht (din tch b mt b ph n 1 %).
Khi chn my m v nh c s dng, vic xem xt phi nu ra pht hin cc ht trong
di kch thc lin quan. Cc yu t khc c xem xt gm thi gian yu cu thu gom mu
v phn tch, thi gian yu cu i vi c trng ca phng php. Thit b s dng phi c
chng ch hiu chun cn gi tr.
nh m t trong iu 5:
c) cc v tr im o;
B.12 Php th thu hi
B.12.1 Nguyn tc
Php th ny c thc hin xc nh kh nng ca lp t loi tr cc ht trong khng kh.
Tnh nng thu hi sch sau mt s kin to ra ht l mt trong cc kh nng quan trng nht
ca lp t. Php th ny ch c tm quan trng v c khuyn co i vi h thng dng
khng kh thay i bi v tnh nng thu hi l hm ca t l ti lu thng ca khng kh, dng
hnh hc ca dng khng kh u vo v u ra, iu kin nhit v c trng phn b khng
kh trong phm vi vng c kim sot, nhng ngc li trong h thng dng khng kh thay i
th hin s nhim bng dng khng kh c kim sot v thi gian thu hi l hm ca khu
vc v khong cch. Php th ny phi c thc hin i vi lp t trong trng thi thit lp
v trng thi ngh.
Php th ny khng p dng cho cp 8 v 9.
Khi s dng sol kh nhn to, trnh d lng nhim ca lp t.
B.12.2 Tnh nng thu hi sch
Tnh nng thu hi c nh gi bng cch s dng thi gian thu hi 100:1 hoc tc thu hi
sch. Thi gian thu hi 100:1 c xc nh l thi gian yu cu lm gim nng ban
u bi h s 0,01 ln, v tc thu hi sch c xc nh l tc thay i nng ht
theo thi gian. C kh nng c lng c hai cch ny t ng cong phn gi nng cng
c ht.
Phi thc hin cc php o bn trong khong thi gian m s phn gi nng ht c m
t bi hm s m n, c ch th bi ng thng trn li bn-logarit (nng trn trc tung
l thang logarit, cn gi tr thi gian trn trc honh l thang tuyn tnh). Hn na nng th
phi khng qu cao xut hin tht thot trng khp, hoc qu thp xy ra vic m khng
chc chn.
CH THCH Vic nh gi bng thc nghim ca thi gian thu hi 100:1 l quy trnh o c u
tin.
B.12.3 Quy trnh th thu hi
B.12.3.1 nh gi thi gian phc hi 100:1
Php o trc tip thi gian thu hi 100:1 c th thc hin khi c kh nng t nng ht ban
u ti 100 ln hoc nhiu hn mc sch mc tiu.
Phi tin hnh cn thn trnh sai s ngu nhin v nhim tim n ca DPC quang hc.
Trc khi th nghim, yu cu phi tnh ton nng thc hin php th thi gian thu hi
100:1. Nu nng vt qu kh nng ti a ca DPC s ngu nhin xut hin hoc s dng h
thng pha long, gim nng trnh ngu nhin hoc thay th php th thi gian thu hi
100:1 bng php th tc thu hi (B.12.3.2).
a) t my m ht ph hp vi hng dn ca nh sn xut v chng ch hiu chun thit b.
b) t cc d DPC ti im th nghim, cc im o v s php o phi c xc nh theo
tha thun gia khch hng v nh cung cp. Khng c t cc d DPC trc tip ti u ra
ca dng khng kh.
c) iu chnh th tch mu n c cng gi tr s dng cho vic xc nh cp phng sch.
Thi gian tr ca my m t khi bt u mi ln m n cc ghi chp u ra phi c iu
chnh khng ln hn 10s.
d) Kch thc ht s dng trong php th ny phi khng nh hn 1 m. Kch thc ng dn
s dng bng DPC tng ng vi ng dn ca s nng ln nht ca sol kh.
e) Din tch phng sch c kim tra b nhim bi sol kh trong khi cc b x l khng kh
c a vo hot ng.
f) Nng ht ban u tng ln n 100 ln hoc nhiu hn mc sch mc tiu.
g) Khi u php o ti cc khong 1 min. Ghi li thi gian khi nng ht t ti ngng nng
mc tiu x 100 (t100n)
h) Ghi thi gian khi nng ht t mc sch mc tiu (tn)
i) Thi gian thu hi c biu th bng t0,01 = (tn - t100n).
B.12.3.2 nh gi tc thu hi
Tnh nng thu hi c th xc nh t nghing ca cong phn r nng ht ti cp
sch yu cu [xem TCVN .-1 (ISO 14644-1)], nh sau:
a) nghing d liu ca vic suy gim nng ht trn mt th ta vung vi cc gi tr
thi gian trn trc honh v cc gi tr nng trn trc tung bng thang logarit;
b) tc thu hi sch thu c t cc gi tr nghing ca ng thng.
Tc thu hi sch gia hai php o thnh cng c tnh ton t ng thc sau:
n 2,3
C
1
log10 1
t1
C0
trong
n l tc thu hi sch;
t1 l thi gian tri qua gia php o th nht v php o th hai;
C0 l nng ban u;
(B.12)
C1 l nng sau thi gian t1

= C0 exp(-n t1).
Gi tr trung bnh ca nm n mi thu c t mt php o.
Tc thu hi v thi gian thu hi 100:1 c th c lin quan nh sau:
(B.13)
B.12.4 Thit b v cc im o i vi php th thu hi
Nhng thit b lit k di y phi c chng ch hiu chun c gi tr.
S lng cc im o c th c quyt nh theo s tha thun gia khch hng v nh cung
cp.
B.12.4.1 My pht sol kh v sol kh nhn to, c cng c tnh nh m t trong B.6
B.12.4.2 My m ht ri rc (DPC) c hiu qu m t trong C.1 v C.6.
B.12.4.3 H thng pha long, nu cn thit, nh m t trong C.12.3.
Theo s tha thun gia khch hng v nh cung cp, cc thng tin v d liu sau phi c
ghi li nh m t trong iu 5:
a) n nh mi loi dng c o v dng c s dng v tnh trng hiu chun ca n;
b) s lng v cc v tr im o;
c) trng thi chim gi.
B.13 Th r r nhim
B.13.1 Nguyn tc
Php th ny c thc hin xc nh liu c s xm nhp ca khng kh b nhim vo
trong vng sch t vng bao quanh khng c kim sot ti mc ging hoc khc ca p sut
tnh v kim tra v r r ca h thng trn b p lc.
B.13.2 Quy trnh ca php th r r nhim
B.13.2.1 Phng php m ht ri rc (DPC)
o nng ht bn ngoi ca tng bao phng sch ngay st vi b mt hoc khong trng
ca ca nh gi. Nng ny phi ln hn nng phng sch bi h s l 103, v t
nht bng 3,5x106 ht/m3 ti kch thc ht c o. Nu nng l nh hn, to ra sol kh
tng nng .
Kim tra v r r qua cc im cu trc, cc rn nt hoc ng ng dn dch v, qut bn trong
tng bao ti khong cch khng ln hn 5 cm t cc im, vng m hoc b mt giao nhau
th vi tc qut l khong 5 cm/s.
kim tra cc rn nt ti khong trng ca ca m, phng php quan st dng c gii
thiu. Ghi chp v a vo bo co tt c cc gi tr ln hn 10-2 ln nng ht sol kh bn
ngoi o c ti kch thc ht thch hp.
CH THCH S v v tr cc im th ca php o ny c xc nh trn c s tha thun gia
khch hng v nh cung cp.
B.13.2.2 Phng php quang k
Thc hin sol kh bn ngoi phng sch hoc dng c ph hp vi B.6.2.2 trong nng cao
gy ra quang k vt qu thang o y l 0,1% gi tr ci t.
c trn quang k 0,1% gi tr ci t khi vt qu 0,01% ch th mt r r.
kim tra v r r qua cc im cu trc, cc rn nt hoc cc mi ni qut bn trong tng

bao ti khong cch khng ln hn 5 cm t cc im, hoc b mt vng m th vi tc
qut l khong 5 cm/s.
kim tra v rn nt ti khong trng ca ca m, o nng bn trong tng bao ti
khong cch t 0,3 n 1 m cch ca m.
Ghi chp v a vo bo co tt c cc gi tr vt qu 0,01% ca thang o quang k.
B.13.3 Thit b th r r nhim
Nhng thit b sau y phi c chng ch hiu chun c gi tr.
B.13.3.1 Ngun sol kh nhn to, nh m t trong B.6.5.
B.13.3.2 My m ht ri rc (DPC) nh quy nh trong C.1, hoc quang k nh quy nh trong
C.6.1 v chng phi c kh nng phn bit c ht thp hn 0,5 m hoc nh hn;
Theo s tha thun gia khch hng v nh cung cp, cc thng tin v d liu sau phi c
ghi li nh m t trong iu 5:
a) n nh loi cho mi dng c o v dng c c s dng v tnh trng hiu chun ca n;
b) k thut thu gom d liu;
c) s lng v cc v tr im o;
Ph lc C
(tham kho)
Thit b th
Ph lc ny m t thit b o c s dng cho cc php th gii thiu trong tiu chun ny.
Trong ph lc ny, d liu nu trong cc bng t Bng C.1 n C.19 ch ra cc yu cu cn thit
ti thiu cho mi khon mc ca thit b. Cc khon mc c lit k p li cho Ph lc B,
tc l thit b gn s C.1 c s dng trong quy trnh th nu trong B.1. iu c th p
ng cho vic lp cc k hoch th c th tham kho Ph lc C la chn thit b th v
Ph lc A lp mt danh sch kim tra ca cc php th ngh ca mt lp t v tn s
tin hnh cc php th ny. Thit b o c chn ty thuc vo tha thun gia khch hng v
nh cung cp.
Ph lc ny cung cp thng tin v khng ngn cn vic s dng ca cc thit b tt hn nu
chng c sn. C th s dng thit b thay th thch hp ty thuc vo tha thun gia khch
hng v nh cung cp.
C.1 m ht trong khng kh
C.1.1 My m ht ri rc bng tn x nh sng: thit b c kh nng m v nh c cc ht
n l trong khng kh v lp bo co d liu kch thc di dng ng knh quang hc
tng ng.
Yu cu k thut ca my m ht ri rc bng tn x nh sng c nu trong Bng C.1.
Bng C.1 - Yu cu k thut i vi my m ht bng tn x nh sng
iu mc
Yu cu k thut
nhy/ phn giia
Chn gia 0,1 m v 5 m vi 10% phn gii v kch thc.
khng m bo o
20% sai s nng ti ci t kch thc.
Khong hiu chun
Ti a l 12 thng hoc kim tra tnh nng quy nh
Lu lng mu
(5020)% ti ngng kch thc ti thiu v (100 10)% i

vi cc ht ln hn hoc bng 1,5 ln kch thc ngng ti
thiu.
Di nng di
Tc m sai l khng ng k trong so snh vi tc m

ti thiu mong i thc t. Tc thp phi khng c ht
trong thi gian nht nh (v d khng m trong 5 min)
Di nng trn
Hai ln ln hn gii hn trn ca nng cp sch lp t

ti im s dng v khng ln hn 75% nng do nh sn
xut gii thiu
Thit b c phn gii nh c ht ln hn 10% c th to ra kt qu m ht khc vi

thit b loi quan trng.
a
C.2 m ht cc mn
C.2.1 My m ht ngng t (CNC), thit b m tt c cc git nh hnh thnh do ngng t ca
hi qu bo ha trn cc ht nhn ly mu. Nng ht ly tch c to ra i vi cc ht
ln hn hoc bng kch thc nh nht nhy ca CNC.
Yu cu k thut i vi my m ht ngng t c nu trong Bng C.2.
Bng C.2 - Yu cu k thut i vi my m ht ngng t
iu mc
Yu cu k thut
Gii hn/di o
Nng n 3,5 x 109/m3
nhy
p dng ring, v d 0,02 m
khng m bo o
20 % ti ngng kch thc ti a
n nh
C th b nh hng bi loi kh mi trng
Khong hiu chun
Ti a l 12 thng
Di nng thp
Tc m sai ng k so vi tc m ti thiu thc t

mong i
CH THCH: Lu lng mu xem Hnh B.1.

C.2.2 My m ht ri rc (DPC), thit b c kh nng m v nh c cc ht n trong khng
kh, bao gm cc ht cc mn.
Yu cu k thut i vi DPC nu trong Bng C.3.
Bng C.3 - Yu cu k thut i vi DPC
iu mc
Yu cu k thut
Gii hn/di o
Nng n 3,5 x 107/m3
nhy / phn gii
Nh hn 0,1 m vi 10% phn gii c ht
khng m bo o
20 % sai s nng ti ci t kch thc
Khong hiu chun
Ti a l 12 thng
Lu lng mu
(50 20)% ti ngng kch thc ti thiu v (100 10) % i

vi cc ht ln hn hoc bng 1,5 ln kch thc ngng ti
thiu.
CH THCH: i vi lu lng mu, xem Hnh B.1.

C.2.3 Thit b tch c ht, mt c cu vn chuyn khng kh n gin ti u vo ca dng c
m ht cc mn. Thit b ly cc ht nh hn mt kch thc xc nh. V d v thit b ny gm
c cu pin khuch tn v b va chm o.
Yu cu k thut i vi thit b tch c ht nu trong Bng C.4.

Bng C.4 - Yu cu k thut i vi thit b tch c ht
iu mc
Yu cu k thut
khng m bo o
(50 20)% di chuyn ca cc ht ti kch thc xc nh
Khong hiu chun
Thay i theo loi thit b; in hnh l 12 thng.
Lu lng mu
Lu lng thit b tch c ht phi n nh, 10% vi lu lng

mu ln hn hoc bng yu cu ca my m.
C.3 m ht th
C.3.1 Php o bng knh hin vi ca cc ht thu gom trn giy lc, xem ASTM F312[4].
C.3.2 B va chm theo t, h thng thu gom ht khi mu ct ngang ti lu lng dng mu
khng i qua mt lot vi phun vi kch thc gim dn; mt vi l b mt thu gom. V tc
cht lng tng dn qua mi giai on b vi phun-thu gom, cc ht nh hn c thu gom
cn hoc m sau khi thu gom.
Yu cu k thut i vi b va chm theo t c nu trong Bng C.5.
Bng C.5 - Yu cu k thut i vi b va chm theo t
iu mc
Yu cu k thut
Gii hn/di o
Lu lng dng mu nh quy nh
nhy/ phn gii
Cc ht trc vi k c th c thu gom ti p sut thp
chnh xc
Tng im ct c chnh xc l 90%
tuyn tnh
nh lng ng k ca sa lng kch thc trn v kch thc

di
n nh
50%. Kch thc ct ph thuc vo lu lng dng mu mu
Thi gian phn ng
T pht n ngy, ph thuc vo phng php o mu
Khong hiu chun
Ti a l 12 thng.
C.3.3 My m ht th ri rc, thit b c kh nng m v nh c (khi c yu cu) cc ht th

trong khng kh n gin.
Yu cu k thut i vi my m ht th ri rc c nu trong Bng C.6.
Bng C.6 - Yu cu k thut i vi my m ht th ri rc
iu mc
Yu cu k thut
Gii hn/di o
Nng n 1,0 x 106/cm3
nhy/ phn gii
5 m n 80 m vi phn gii 20%
khng m bo o
Sai s kch thc 5 % gi tr hiu chun ci t
tuyn tnh
C th thay i vi thnh phn v hnh dng ht
Khong hiu chun
Ti a l 12 thng.
Lu lng mu
(50 20) % ti ngng kch thc ti thiu v (100 10)% i vi

cc ht ln hn hoc bng 1,5 ln kch thc ngng ti thiu
C.3.4 Thit b nh c ht theo thi gian bay, thit b m v nh c ht ri rc xc nh

ng knh kh ng hc ca ht bng cch o thi gian ht thch nghi vi s thay i v tc
khng kh. Thng thc hin iu ny bng cch o thi gian chuyn dch ca ht sau khi
thay i tc dng cht lng.
Yu cu k thut i vi thit b nh c ht theo thi gian bay c nu trong Bng C.7.
Bng C.7 - Yu cu k thut i vi thit b nh c ht theo thi gian bay

iu mc
Yu cu k thut
Gii hn/di o
Nng n 1,0 x 107/m3
nhy/ phn gii
5 m n 20 m vi 10% phn gii
khng m bo o
5 % gi tr hiu chun ci t
Khong hiu chun
Ti a l 12 thng.
Lu lng mu
(50 20) % ti ngng kch thc ti thiu v (100 10)% i vi

cc ht ln hn hoc bng 1,5 ln kch thc ngng ti thiu
C.3.5 B va chm cn bng Piezo, h thng thu gom ht khi mu ct vi tc khng i

ngang qua mt lot vi c kch thc gim dn. Mt vi l mt thu gom c lp vi b cm
bin khi lng ca cn vi lng thch anh p in cn cc ht thu gom ti mi tng trong
qu trnh thu gom.
Yu cu k thut i vi b va chm cn bng piezo c nu trong Bng C.8.
Bng C.8 - Yu cu k thut i vi b cn bng piezo
iu mc
Yu cu k thut
nhy/ phn gii
5 m n 50 m ht lin kt ti p sut thp
tuyn tnh
S lng ng k ca sa lng kch thc trn v kch thc di
n nh
im ct trn giai on c th thay i theo lu lng dng mu
Khong hiu chun
Ti a l 12 thng.
nhy thu gom ti thiu
10 g/m3 i vi ht c t trng ring l 2.
C.4 Php o dng khng kh

C.4.1 ng h o tc khng kh
C.4.1.1 Thit b o gi bng nhit, o tc khng kh bng cm gic s thay i trong s
truyn nhit ca dng c cm bin nhit in nh c t vo dng khng kh.
Yu cu k thut i vi thit b o gi bng nhit c nu trong Bng C.9.
Bng C.9 - Yu cu k thut i vi thit b o gi bng nhit
iu mc
Yu cu k thut
Gii hn/di o
0,1 m/s n 1,0 m/s in hnh trong lp t, 0,5 m/s n 20 m/s

trong ng dn
nhy/ phn gii
0,05 m/s (hoc ti thiu l 1% trn ton thang o)a
khng m bo o
(5 % s c + 0,1 m/s)a
Thi gian phn ng
< 1 s ti 90% ca ton thang o
Khong hiu chun
Ti a l 12 thng.
i vi nhy v khng m bo o, tham kho ISO 7726. Cc thit b ny cn cc hiu

chnh v s khc nhau nhit khng kh v s thay i ca p sut mi trng.
a
C.4.1.2 Thit b o bng siu m, 3 kch thc hoc tng ng, o tc khng kh bng
cm gic s thay i trong s thay i ca tn s m thanh (hoc tc m thanh) gia cc
im khc nhau trong dng khng kh c o.
Yu cu k thut i vi thit b o gi bng siu m c nu trong Bng C.10.
Bng C.10 - Yu cu k thut i vi thit b o gi bng siu m, 3 kch thc hoc
tng ng
iu mc
Yu cu k thut
Gii hn/di o
0 m/s n 1 m/s trong lp t
nhy/ phn gii
0,01 m/s
khng m bo o
5 % s c
Thi gian phn ng
<1s
Khong hiu chun
Ti a l 12 thng.
C.4.1.3 Thit b o gi kiu van, o tc khng kh bng m tc xoay vng ca van ng

h o gi trong dng khng kh.
Yu cu k thut i vi thit b o gi kiu van c nu trong Bng C.11.
Bng C.11 - Yu cu k thut i vi thit b o gi kiu van
iu mc
Yu cu k thut
Gii hn/di o
0,2 m/s n 10 m/s
nhy/ phn gii
0,1 m/s
khng m bo o
0,2 m/s hoc 5 % s c, ly gi tr ln hn
Thi gian phn ng
< 10 s ti 90% ton thang o
Khong hiu chun
Ti a l 12 thng.
C.4.1.4 B dng c o tc khng kh v p k, o tc khng kh bng m tc xoay

vng ca van ng h o gi trong dng khng kh.
Yu cu k thut i vi dng c o tc khng kh v p k c nu trong Bng C.12.
Bng C.12 - Yu cu k thut i vi dng c o tc khng kh v p k
iu mc
Yu cu k thut
Gii hn/di o
> 1,5 m/s
nhy/ phn gii
0,5 m/s
khng m bo o
5 % s c
Thi gian phn ng
< 10 s ti 90% ton thang o
Khong hiu chun
Ti a l 12 thng.
C.4.2 ng h o dng khng kh

C.4.2.1 Phu ht c lu lng k, o lu lng dng mu khng kh t vng pha trn c th
c nhng thay i trong dng khng kh, c cung cp mt th tch khng kh t vng . Dng
khng kh chung c thu gom v tp trung sao cho tc ti im i din cho tc trung
bnh ca thit din ngang t vng chung.
Yu cu k thut i vi phu ht c lu lng k c nu trong Bng C.13.
Bng C.13 - Yu cu k thut i vi phu ht c lu lng k
iu mc
Yu cu k thut
Gii hn/di o
Lu lng dng mu l 50 m 3/h n ti thiu l 1 700 m 3/hra
khng m bo o
5 % s c
Thi gian phn ng
< 10 s ti 90%
Khong hiu chun
Ti a l 12 thng.
Di in hnh i vi kch thc np y 600 x 600 mm. Gii hn o v phn gii ph thuc
vo kch thc np y s dng.

C.4.2.2 ng h o l nh c, tham kho TCVN 8113-2 (ISO 5167-2[20])
C.4.2.3 ng h Venturi, tham kho TCVN 8113-4 (ISO 5167-4[22])
C.5 Php th chnh p khng kh
C.5.1 Vi p k in t, s dng hin th hoc to ra tr s chnh p gia khng gian v
khong bao quanh n bng cch pht hin s thay i in dung tnh in hoc in tr in t
do s i ch ca mt mng chn.
Yu cu k thut i vi vi p k in t c nu trong Bng C.14.
Bng C.14 - Yu cu k thut i vi vi p k in t
iu mc
Yu cu k thut
Gii hn/di o
0 Pa n 100 Pa i vi di nh; 0 kPa n 100 kPa i vi di ln
nhy/ phn gii
1 Pa/0,1 Pa i vi di t 0 Pa n 100 Pa
khng m bo o
1,5 % s c trn ton di 0 Pa n 100 Pa

1 % s c trn ton di 0 kPa n 100 kPa
C.5.2 p k nghing, s dng o chnh p gia hai im khc nhau, bng cch nhn
pht hin ch th trn thang o bin nghing nh p sut nh (chiu cao) trn ng o c
y bng cht lng nh nc hoc cn.
Yu cu k thut i vi p k nghing c nu trong Bng C.15.
Bng C.15 - Yu cu k thut i vi vi p k nghing
iu mc
Yu cu k thut
Gii hn/di o
0 kPa n 0,3 kPa hoc 0 kPa n 1,5 kPa
nhy
1 Pa i vi di t 0 kPa n 0,3 kPa
khng m bo o
3 % i vi di 0 kPa n 0,3 kPa
Kh nng thang bin
2 (ti cc tiu) n 10 ti 0 kPa n 0,3 kPa
C.5.3 Dng c o chnh p bng c, s dng o chnh p ca khng kh gia hai vng
khc nhau, bng cch pht hin khong cch chuyn ng ca mt cy kim ni vi mt c cu
c hoc lin kt t tnh ti s i ch ca mt mng chn.
Yu cu k thut i vi dng c o chnh p bng c c nu trong Bng C.16.
Bng C.16 - Yu cu k thut i vi dng c o chnh p bng c
iu mc
Yu cu k thut
Gii hn/di o
0 Pa n 50 Pa i vi di nh; 0 kPa n 50 kPa i vi di ln
nhy/ phn gii
0,5 Pa i vi di t 0 Pa n 50 Pa
khng m bo o
5 % s c trn ton di t 0 Pa n 50 Pa
2,5 % s c trn ton di t 0 kPa n 50 kPa
C.6 Php th r r ca h thng lc lp t

C.6.1 Quang k sol kh
C.6.1.1 Quang k sol kh tuyn tnh, o nng khi lng ca sol kh tnh bng microgam
trn lt (g/l). Quang k s dng mt bung quang hc tn x nh sng pha trc tin hnh
php o ny. Thit b ny c th s dng o trc tip s xm nhp r r b lc.
Yu cu k thut i vi quang k sol kh tuyn tnh c nu trong Bng C.17.
Bng C.17 - Yu cu k thut i vi quang k sol kh tuyn tnh

iu mc
Yu cu k thut
Gii hn/di o
0,001 g/l n 100 g/l - 5 ton di tuyn tnh nhm mi
nhy/ phn giia
0,001 g/l
khng m bo o
5%
tuyn tnh
0,5 %
n nh
0,002 g/l trn pht
Thi gian phn ng
T 0% n 90%, 30 s; t 100 g/l n 10 g/l, 60s
Khong hiu chun
12 thng hoc 400 h hot ng, chn gi tr sm hn
Chiu di ng cc d mu
Chiu di ln nht l 4 m
Kch thc ht
0,1 m n 0,6 m trn ton di o
Dng ly mu
Lu lng dng mu danh ngha 15%
Cc d mu
Xem B.6.2.4
C.6.1.2 Quang k sol kh loga, s dng o nng khi lng ca sol kh tnh bng
microgam trn lt (g/l). Quang k s dng mt bung quang hc tn x nh sng pha trc
tin hnh php o ny. Thit b ny khng th o trc tip s xm nhp r r b lc.
Yu cu k thut i vi quang k sol kh loga c nu trong Bng C.18.
Bng C.18 - Yu cu k thut i vi quang k sol kh loga
iu mc
Yu cu k thut
Gii hn/di o
0,01 g/l n 100 g/l - trn mt di o
nhy/ phn giia
0,001 g/l
khng m bo o
5%
n nh
0,002 g/l trn pht
Thi gian phn ng
T 0% n 90%, 60 s; t 100 g/l n 10 g/l, 90s
Khong hiu chun
12 thng hoc 400 h hot ng, chn gi tr sm hn
Chiu di ng cc d mu
Chiu di ln nht l 4 m
Kch thc ht
0,1 m n 0,6 m trn ton di o
Dng ly mu
Lu lng dng mu danh ngha 15%
Cc d mu
Xem B.6.2.4
C.6.2 My m ht ri rc (DPC), xem C.1.1.

C.6.3 My to sol kh, c kh nng to ra cht ht c ht kch thc ph hp, (v d 0,05 m
n 2 m) ti nng yu cu, nng ny c th c to bi phng php nhit, thy lc,
kh nn, m hc hoc tnh in.
C.6.4 Cht to sol kh th, sau y l cht in hnh to ra sol kh th; sol kh th lng hoc
rn to bng cch phun hoc tn nh phun vo kh quyn.
a) du poly-alpha olefin (PAO)1), 4 cSt (v d CAS No. 68649-12-7)2);
b) diotyl nhn (DOS);
c) di-2-ethyl hexyl nhn (DEHS);
d) dioctyl (2-ethyl hexyl) phtalate (DOP3)) (v d CAS No. 117-81-7);
e) v ondina (EL) du khong cht lng thc phm (v d CAS No. 8042-47-5);
f) du parafin (v d CAS No. 64742-46-7);
g) latex polystyrene (PSL)
Nu c th t c nng yu cu, c th s dng sol kh kh quyn.
C.6.5 H thng, thit b pha long, y sol kh c pha long vi khng kh sch trong mt
t l th tch bit (t 10 n 100) gim nng .
C.7 Php th trc tip dng kh v nhn thy c
C.7.1 Thit b, vt liu v cc ph kin th trc tip v nhn thy c dng khng kh,
xem Bng C.19 v C.20.
Bng C.19 - Vt liu v ht s dng trong phng php si ch du vt hoc phun
iu mc
M t
Vt liu s dng trong

phng php si ch du vt
S t, vi v.v
Ht s dng trong phng

php phun du vt
DI nc hoc sng m lng khc kch thc t 0,5 m n

50 m
Bong bng t trng trung tnh trong khng kh ti v tr o
Sng m th v c hoc hu c
Thit b ghi hnh ghi li

nh hnh dung hoc hnh
nh ht vt
Cc thit b khc nhau nh mn hnh chp nh, mn hnh

video gm ng nhy sng tc cao hoc cc chc nng xy
ra ng thi v thit b ghi hnh s dng trong quy trnh
hnh dung dng.
CH THCH Sau khi hnh dung dng, yu cu phi lm sch li lp t.

Bng C.20 - Ngun ri sng hnh dung dng khng kh
iu mc
M t
Ngun ri sng khc nhau

quan st tng phn
hoc hnh dung dng khng
kh
n vonfram, n hunh quang, n halogen, n thy ngn,

ngun sng laze (He-Ne, ion argon, YAG laze, v.v) c hoc
khng c n chp hoc thit b ng thi ngh.
K thut x l hnh nh
o lng nh lng bng
cch hnh dung dng
Phng php l sng lase, gm ngun laze cng sut cao

(laze argon hoc YAG) cc thu knh gm thu knh hnh tr
v b kim sot khi quan st dng khng kh hai kch thc.
C.7.2 Thit b o gi bng nhit, xem C.4.1.1.

C.7.3 Thit b o gi bng siu m ba kch thc, xem C.4.1.2.
C.7.4 My to sol kh
My to sol kh i vi cc vt kh hnh dung dng c th tham kho C.6.3. Mt s v d ng
dng, v d my to ht v my phun bng siu m nu di y.
C.7.4.1 My phun bng siu m, c s dng to sol kh (sng m), s dng sng m
hi t to sol kh mt cht lng (v d DI nc) thnh cc git cc nh.
Yu cu k thut i vi my phun bng siu m c nu trong Bng C.21.
Bng C.21 - Yu cu k thut i vi my phun bng siu m
iu mc
Di kch thc ht ca git
nh
M t
V d t 6 m n 9 m, hoc t 30 m n 70 ma (MMD)
Nng treo
a
70 g/cm3 n 150 g/cm3 ti dung dch cp liu t 1 ml/min n 6

ml/min
Di kch thc ph thuc vo tn s siu m, v d 1 MHz i vi di t 6 m n 9 m
C.7.4.2 My to sng m, s dng to sol kh (sng m), s dng s chuyn tip gia
cht kh n cht lng bng cch lm lnh hi nc DI n im sng.
Yu cu k thut i vi my to sng m c nu trong Bng C.22.
Bng C.22 - Yu cu k thut i vi my to sng m
iu mc
M t
Di kch thc ht ca git

nh
1 m n 10 m (MMD)
Tc to ht
1 g/min n 25 g/min
C.8 Php o nhit

C.8.1 Nhit k thy tinh, xem ISO 7726.
C.8.2 Nhit k, xem ISO 7726.
C.8.3 Dng c o nhit in tr, xem ISO 7726.
C.8.4 Nhit in tr, xem ISO 7726.
C.9 Php o m
C.9.1 in dung theo di m, xem ISO 7726.
C.9.2 Tc theo di m, xem ISO 7726.
C.9.3 Cm bin im sng, xem ISO 7726.
C.9.4 Dng c o m, xem ISO 7726.
C.10 Php tr tnh in v to ion
C.10.1 Vn k tnh in, o in p trung bnh (in th) trong mi din tch nh bng cch cm
nhn nhy ca in trng ti in cc bn trong cc d qua mt l nh bn trong cc d.
Yu cu k thut i vi von k tnh in c nu trong Bng C.23 v C.24.
Bng C.23 - Yu cu k thut i vi vn k tnh in
iu mc
Yu cu k thut
Gii hn/di o
- 3 kV n + 3 kV
nhy/ phn giia
ng knh du (din tch) 0,8 mm; 0,3 V(rms) hoc 2 V (p-p)
khng m bo o
0,1 %
Thi gian phn ng
< 4 ms (10 % n 90 %)
Khong hiu chun
Ti a l 12 thng
Bng C.24 - Yu cu k thut i vi vn k tnh in cm tay hoc trng k tnh in

iu mc
Yu cu k thut
Gii hn/di o
10 kV/cm
khng m bo o
5 % s c hoc 0,01 kV
Thi gian phn ng
< 2 s i vi 0 kV n 5 kV
Khong hiu chun
Ti a l 12 thng
C.10.2 m k in tr cao, o in tr ca cht v cc linh kin cch in bng cch cm nhn

dng r t mt thit b c s dng in p cao n mt thit b a th.
Yu cu k thut i vi m k in tr cao c nu trong Bng C.25.
Bng C.25 - Yu cu k thut i vi m k in tr cao
iu mc
Yu cu k thut
Gii hn/di o
T 1000 n 3x109
khng m bo o
5 % i vi tng di o
Thi gian phn ng
10 ms n 390 ms
Khong hiu chun
Ti a l 12 thng
in p th
DC 0,1 V n 1000 V
Dng u vo cc i
< 10 mA
Dng u ra cc i
10 mA i vi < 100 V, 5 mA i vi <250 V, 2 mA i vi < 500 V v

1mA i vi < 1000 V
C.10.3 B iu khin tm tch in, thit b s dng o tnh cht trung ha ca lp t b

to ion hoc ion ha.
Yu cu k thut i vi b iu khin tm tch in c nu trong Bng C.26.
Bng C.26 - Yu cu k thut i vi b iu khin tm tch in
iu mc
Yu cu k thut
Gii hn/di o
- 5 kV n + 5 kV
khng m bo o
5 % i vi tng di o
Thi gian phn ng
0,1 s
Khong hiu chun
Ti a l 12 thng
Cch in
T phng in nh hn 10% trong 5 min vi m 40 % RH v nh

hn 200 ion/cm3
in dung ca tm
(20 2) pF
Kch thc tm
150 mm x 150 mm
Tch in
Ti thiu 1 kV cho mi in cc, dng b hn ch.
C.11 Php th sa lng ht

C.11.1 Quang k ht bay, o tng nh sng phn tn t cc ht sa lng trn tm thu gom bng
thy tinh sm ri bo co s liu di dng mt h s sa lng c lin quan n nng ht sa
lng thnh lp ph ngoi b mt ti hn.
Yu cu k thut i vi quang k ht bay c nu trong Bng C.27.
Bng C.27 - Yu cu k thut i vi quang k ht bay
iu mc
Yu cu k thut
Gii hn/di o
n 0,5 % din tch
Khong hiu chun
Ti a l 12 thng
Vt liu hiu chun
Ht hunh quang 4 m v 10 m
C.11.2 My m b mt ht, o s lng (v kch thc) ca cc ht ri rc sa lng trn mt b

mt bng nh sng tn x.
Yu cu k thut i vi my m b mt ht c nu trong Bng C.28.
Bng C.28 - Yu cu k thut i vi my m b mt ht

iu mc
Yu cu k thut
0,1 m n 5 m 10 % phn gii kch thc
Gii hn o
C.11.3 My to ht PSL, l mt dng c phun khng kh nn to cc ht hnh cu v n phn

tn PSL (latex polystyren) bng cch phun sol kh lng. Cc ht PSL c th s dng hiu
chun DPC v ly mu chn c v d b va chm tng t.
Yu cu k thut i vi my to ht PSL c nu trong Bng C.29.
Bng C.29 - Yu cu k thut i vi my to ht PSL
iu mc
Yu cu k thut
Di kch thc o
0,1 m n 2 m in hnh
Nng sol kh
Khong n 107/cm3
Nng
Khong 300 ht/lt n 30 000 ht/lt
p sut phun khng kh
V d, 177 kPa,; 120 l/h
C.12 Php th thu hi

C.12.1 My m ht ri rc (DPC), xem C.1.1.
C.12.2 My to sol kh, xem C.6.3.
C.12.3 H thng pha long, xem C.6.5
C.13 Php th thu hi
C.13.1 My m ht ri rc, xem C.1.1.
C.13.2 My to sol kh, xem C.6.3.
C.13.3 H thng pha long, xem C.6.5.
C.13.4 Quang k, xem C.6.1.
TH MC TI LIU THAM KHO
[1] ASME N510-1999 Testing of nuclear Air-treatment systems (Th nghim h thng x l
khng kh ht nhn) Fairfield, New Jersey, US: Americal society of mechanical engineers.
[2] ASTM F24-00 Standard method for measuring and counting particulate contaminaton on
surfaces (Phng php chun o v m nhim ht trn b mt) Philadelphia, Pensylvania,
US: Americal society for testing and materials
[3] ASTM F50-92 (2001) e1, Standard practice for continuous sizing and counting of airbome
particles in dust-controlied areas and clean room using instument capable of detecting single submicrometer and large particles (Thc hnh chun lin tc nh c v m ht trong khng kh
vng c kim sot bi v phng sch bng cch s dng dng c c kh nng pht hin cc
ht bn-micromet v ht ln) Philadelphia, Pensylvania, US: Americal society for testing and
materials.
[4] ASTM F312-98 (2003) Standard test methods for microscopical sizing and counting particles
from aerospace fluids on membrane filters (Phng php th chun nh c bng knh hin vi
v m ht t cht lng hng khng v tr trn mng lc) Philadelphia, Pensylvania, US:
Americal society for testing and materials.
[5] ASTM F328-98 (2003) Standard practice for calibraton of an airbome particle counter using
monodisperse spherical particles (Thc hnh chun hiu chun my m ht trong khng kh
c s dng cc ht n phn tn hnh cu) Philadelphia, Pensylvania, US: Americal society for
testing and materials.
[6] ASTM F1471-93 (2001) Standard test methods for air cleaning performance of a hightefficiency particulate air-filter system (Phng php th chun i vi tnh nng lm sch khng
kh ca h thng lc ht trong khng kh hiu sut cao) Philadelphia, Pensylvania, US: Americal
society for testing and materials.
[7] Chemical abstracts service registry (S ng k dch v tm tt ha hc) Columbus, Ohio, US:
Americal chemical society.
[8] EN 1822-2:2000 Hight efficiency air filters (HEPA an ULPA) - Part 2: Aerosol production,
measuring equipment particle counting statistics [B lc khng kh hiu sut cao (HEPA v
ULPA) - Phn 2: To sol kh bng thit b o, m thng k ht]
[9] EN 1822-4:2000 Hight efficiency air filters (HEPA an ULPA) - Part 4: Determining leakage of
filter element (scan method) [B lc khng kh hiu sut cao (HEPA v ULPA) - Phn 4: Xc nh
r r ca b phn lc (phng php qut)]
[10] EN 12599:2000 Ventilation for building - Test procedures and measuring methods for
handing over installed ventilation and air conditioning systems (Thng gi cho ta nh - Quy trnh
th v phng php o x l h thng thng gi v iu ha khng kh lp t)
[11] IEST-G-CC1001:1999 Counting airbome particle for classification and monitoring of
cleanrooms and clean zones (m ht trong khng kh phn loi v theo di phng sch v
vng sch) Rolling Meadows, Ilinois, US: Institute of Environment Sciences and Technology.
[12] IEST-G-CC1002:1999 Determination fo the concentration of airbon ultrafine particle (Xc
nh nng ht cc mn trong khng kh) Rolling Meadows, Ilinois, US: Institute of Environment
Sciences and Technology.
[13] IEST-G-CC1003:1999 Measurement of airbon macroarticles (o ht th trong khng kh)
Rolling Meadows, Ilinois, US: Institute of Environment Sciences and Technology.
[14] IEST-RP-CC001.3:1993 HEPA and ULPA filters (B lc HEPA v ULPA) Rolling Meadows,
Ilinois, US: Institute of Environment Sciences and Technology.
[15] IEST-RP-CC001.3:1993 HEPA and ULPA filters (B lc HEPA v ULPA) Rolling Meadows,
llinois, US: Institute of Environment Sciences and Technology
[15] IEST-RP-CC006.3:2004 Testing cleanrooms (Th nghim phng sch) Rolling Meadows,
[16] IEST-RP-CC007.1:1992 Testing ULPA filters (Th nghim b lc ULPA) Rolling Meadows,
[17] IEST-RP-CC021.1:1993 Testing HEPA and ULPA filter media (Th nghim mi trng lc
HEPA v ULPA) Rolling Meadows, Ilinois, US: Institute of Environment Sciences and
Technology.
[18] IEST-RP-CC034.2:1999 HEPA and ULPA filter media (Mi trng lc HEPA v ULPA)
Rolling Meadows, Ilinois US: Institute of Environment Sciences and Technology.
[19] TCVN 8113-1 (ISO 5167-1:2003) Measurement of fluid flow by means of pressure differential
devices inserted in circular cross-section conduits running full - Part 1: General principles and
requirements (o dng cht lng bng phng tin ca dng c chnh p lng trong ng dn tit
din ngang hnh trn ton dng chy - Phn 1: Nguyn tc v yu cu chung)
devices inserted in circular cross-section conduits running full - Part 2: Orifice plates (o dng
cht lng bng phng tin ca dng c chnh p lng trong ng dn tit din ngang hnh trn
ton dng chy - Phn 2: Tm nh c)
devices inserted in circular cross-section conduits running full - Part 3: Nozzles and Venturi
nozzle (o dng cht lng bng phng tin ca dng c chnh p lng trong ng dn tit din
ngang hnh trn ton dng chy - Phn 3: ng v ng khuch tn)
devices inserted in circular cross-section conduits running full - Part 4: Venturi tubes (o dng
cht lng bng phng tin ca dng c chnh p lng trong ng dn tit din ngang hnh trn
ton dng chy - Phn 4: ng khuch tn)
[23] JACA No.24:1989 Standardization and evaluation of clean room facilities (Tiu chun ha v
nh gi tin nghi phng sch) Japanese Industrial standards committee.
[24] JAC B 9921:1997 Light scattering automatic particle counter (My m ht tn x nh sng
t ng) Japanese Industrial standards committee.
[25] SEMI E14-93 Measurement of particle contamination comtributed to the product from the
process or support tool (Php o nhim ht phn b vo sn phm t qu trnh hoc cng c
h tr). San Jose, California, US: SEMI (1997).
[26] US Patent 5,059,349 Method of measuring the efficiency of gas mask filter using
monodispersed aerosols (Phng php o hiu sut lc ca mt n kh bng cch s dng sol
kh n phn tn)
[27] US Patent 5,059,352 Method for the generation of monodispersed aerosols for filter testing
(Phng php to sol kh n phn tn cho th nghim lc)
[28] VDI 2083 Part 4: 1996 Cleanroom technology - Surface cleanlines (Cng ngh phng sch sch b mt). Berlin; Beuth Verlag GmbH.
MC LC
Li gii thiu
1 Phm vi p dng
2 Ti liu vin dn
3 Thut ng v nh ngha
4 Quy trnh th
5 Bo co th nghim
Ph lc A (quy nh) - Chn cc php th gii thiu ca mt lp t v tn s thc hin cc
php th ny
Ph lc B (quy nh) - Cc phng php th
Ph lc C (quy nh) - Thit b th
Th mc ti liu tham kho

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TIU CHUN QUC GIA

ng knh ht trung bnh khi lng (mass median particle diameter).

S kim chng bng sol kh ca b lc hoc h thng b lc lp t bng hi lng th

Tc trao i khng kh c biu th l s ln thay i khng kh trong n v thi gian v

in p c tch ly ln bn dn c cch ly khng np in khi bn c t vo mi

Tham kho trong

TCVN 8664-1 (ISO 146441) v TCVN 8664-2 (ISO

4.1.2 Php th ty chn

Tham kho trong TCVN

Tham kho trong

Nguyn Cch tin

TCVN 8664-1 (ISO 14644-1)

Tng s m ht trong khng kh i

TCVN 8664-1 (ISO 14644-1)

Php th dng khng kh a

TCVN 8664-1 (ISO 14644-1)

Php th chnh p khng kh a

TCVN 8664-1 (ISO 14644-1)

TCVN 8664-2 (ISO 14644-2)

Php th hng dng kh v s nhn

TCVN 8664-2 (ISO 14644-2)

Php th tnh in v pht ion

C.12 TCVN 8664-2 (ISO 14644-2)

Php th ngn chn r r

TCVN 8664-1 (ISO 14644-1)

y l php th yu cu trn c s TCVN 8664-2 (ISO 14644-2). Cc php th ty chn khng

i hng. Tc khng kh c xc nh trong cc phng sch khng i hng. Quy trnh

Kt qu mi php th phi c ghi li trong mt bin bn th v bin bn th gm cc thng tin

Cch tin hnh

Quy trnh Chn

Dng c tch kch thc

Dng c thi gian bay ca

o di knh hin vi trn

Thit b o gi kiu van

Thit b o gi kiu van

Hood meter th tch hp

Hood meter th tch hp

Quang k sol kh logarit

Cht ngun sol kh

H thng pha long

Quang k sol kh tuyn tnh C.6.1.1

Hng dng khng kh

Cht ngun sol kh

H thng pha long

Dng c chu nhit

Nhit k thy tinh

Dng c chu nhit

Phng php quang

H thng pha long

H thng pha long

trong cc ca ct 1, ngi lp k hoch th c th ghi phng php th theo tn s th.

ct th 4, ngi lp k hoch th c th chn thit b th theo phng php th chn.

B.1 m ht trong khng kh phn loi v o th

php hn ch ly mu tng ng trong din tch c dng ng hng[1]. Tc cc d mu

Hnh B.1 - Vng bc c th chp nhn i vi lu lng mu ca thit b chn

B.2.2 Quy trnh m ht cc mn

, n c bt kn ri chuyn n cn hoc knh hin vi nh gi. Cc tng thu gom c ly

ng u ca tc phi c o ti b mt cch b lc khong 150 mm n 300 mm v

p sut o c l rt nh v k thut o khng ng c th d gy ra vic c kt qu sai. Phi

Dp l kch thc ca cc d song song vi phng qut, tnh bng centimt;

qvs l gi tr ca lu lng dng mu mu chun, qvs = 472 cm3/s (28,3 l/min);

a) Pht hin r r tim tng bng cch qut

Nu s m quan st c nh hn Ca[ht] i vi thi gian lu tr lin tc, T r[s], phi xem xt v