Instruction Manual for MODEL S-2460N SCANNING ELECTRON MICROSCOPE WTS 0D Copyright © Hitachi, Ltd. 1992. All rights reserved. Printed in Japan Part No, S0E-9101-3.KS-TH (ST-LT)a Section MODEL S-2460N SCANNING ELECTRON MICROSCOPE TABLE OF CONTENTS Title PRECAUTIONS ON HANDLING INSTALLATION OF MODEL W-4010 CLOSED WATER RECIRCULATOR . SPECIFICATIONS INSTALLATION FUNCTIONS OPERATION u 12 24 22 34 32 33 aa 244 242 243 224 222 223 22.4 225 324 322 323 334 332 333 334 335 336 337 338 344 342 343 INSTALLATION REQUIREMENTS WIRING. CONTROL KNOBS AND SWITCHES ON MAIN UNIT Column bovteeeetee Specimen Stage Evacuating System CONTROLS ON DISPLAY UNIT Control Panel... : Sub-panel Keyboard Evacuation Control Panel Gun Alignment Pane! PRELIMINARY OPERATION ‘SPECIMEN EXCHANGE With Super Eucentrie Stage With Standard Stage With Large-Size Stage IMAGE OBSERVATION . Condition Seiting in SEM Mode (high vacuum mode) - Condition Setting in N-SEM Mode (low vacuum mode} Image Observation Procedure Setting of Accelerating Volzage Image Brightness Adjustment Focusing Selection of Image Field Setting of Magnification Astigmatism Correction PHOTOGRAPHIC RECORDING Photographing Condition Setting DIRECT PHOTO Procedure MEMORY PHOTO Procedure { ‘CONTENTS. Pose oo) a 17 224 24 24 23 249 2.20 221 222 223 225 226 34 31 32 + 32 312 348 319 319 32t 323 323 + 325 + 326 327 328 328 331 331 332 3:33‘CONTENTS: 4, Section 35 351 352 36 361 37 38 39 310 341 32 343 314 316 316 a7 318 MAINTENANCE a4 3.164 3.162 3184 3182 462 Ti SETTING OF MEMORY PARAMETERS (FSI) acursive Filter Image integration SETTING OF FRAME CHANGEOVER (TF) {image Memory SETTING OF DATA DISPLAY ((EB))_ DATA ENTAY (EG) METHOD BRIGHTNESS CONVERSION (EZ) QUARTERED FRAME COPYING ([E8)) REGISTRATION AND SETTING OF OBSERVATION CONDITIONS ((Shift] + [F10)) oo SHUTDOWN se AXIS ALIGNMENT AXIAL ALIGNMENT OF OBJECTIVE MOVABLE APERTURE (ootion) CAUTIONS ON USE OF OBJECTIVE MOVABLE APERTURE . OPERATING PARAMETERS AFFECTING IMAGE QUALITY Operating Parameters Affecting Image Quality (high vacuum mode! Operating Parameters A fecting Image Quality (low vacuum mode) CAUTIONS ON OPERATION SPECIMEN COATING Introduction : General Remarks on Coating MAINTENANCE OF COLUMN Fllament Exchange Cleaning of Objective Aperture Cleaning of Objective Movable Aperture .. Cleaning of Orifice : Cleaning of Condenser Lane Fixed Aperture. Baking of Aperture Plates... Ultrasonic Cleaning with Organic Solvent Replacement of Scintillator ROTARY PUMP CHECKUP AND MAINTENANCE i Change Replacement of Oil Mist Trap Element Precautions on Maintenance RP Fault Isolation Chart CHECKUP AND MAINTENANCE OF AIR COMPRESSOR . Checkup end Maintenance... . Troubleshooting of Air Compressor Locations of Major Components of Alf Compressor. TROUBLESHOOTING ‘Abnormal Emission Current Evacuation System Stopped Not Evacuated as Raquirad No Image on CRT Rough Image Astigmatism Not Corrected Properly... CAUTIONARY INSTRUCTIONS ON MAINTENANCE CONSUMABLES AND SPARES , Consumables Spares Page 334 3:35 3.95 3.36 . 336 3.38 339 at 3.44 3.45 3.48 347 3.40 349 350 350 352 253 364 354 364 at at at 43 47 49 412 413 ana ana 416 < 415 47 47 418 420 420 421 422 423 423 424 424 425 426 426 427 427 427 428CONTENTS: Section Title Page 5. OPTIONAL ACCESSORIES Bt 54 MODEL $-5103 DUAL MAGNIFICATION DISPLAY UNIT . ot 5-1-1 Specifications : 51 5-12 Functions 51 543 Operation 52 52 DBC (DIGITAL BEAM CONTROL) CONNECTOR. a 53 83 X-RAY ANALYSIS IN LOW VACUUM MODE «0-02. 000 025 Sh 83-1 EDX (Eneray-Disgorsive X-Ray Analysis) 54 B32_ WOX (Wavelength-Dispersive X-Ray Analysis} 55 54 MODEL $-5109 RASTER ROTATION/DYNAMIC FOCUS UNIT... 55 541 Outline vecvt eet eee eee eee, BB 8-42 Functions ree vives 85 543. Operation Diltettceretttttetteesterserserers 56 55 CAMERA UNIT 2-6... ee cee reece eee eres 58 55-1 Specifications ....-. coe 58 552 Matching Aperture . a) 853 Assembly Detteeteeeee ees SMT 85-4 Focusing (6x7 Roll Film Unit) cecset eet eees 513 555 Focusing [Polaroid 4" x5")... viceteeees ees BIG 556 General Procautions .. : 1 BIG AFTER-SALES SERVICE For after-sales service of the instrument, the customer should consult with agent. local service “The drawings and photographs contained in this menual illustrate main part names and part ros. (in seven numerals or an alphabetic character plus six numerals) for the order of spare parts,PRECAUTIONS ON HANDLING ELECTRON MICROSCOPE Unlike instruments from which x-rays are taken externally for operation, the electron ‘microscope is not subjected to registration by activity damage preventiva law, ionization active ray damage preventive lav, etc In the recommendations of the International Committee of Radioactivity Protection (ICRP), the electron microscope is mentioned along with domestic TV sets, etc. 25 @ potential source of x-rays as undesirable by-oroducts. It is important to sufficiently pay attention to its safety To ensure safety, you are asked to pay attention to! (1) Use the instrument correctly within the objectives and range of operation written in catalogs. manuals, etc. (2) Donot remove external covers ar other protective components from the instrument ‘nor mount replacement parts on it (3) Donot perform such remodeling as will make the safety devices ineffectivePRECAUTIONS ON HANDLING I. PRECAUTIONS ON HANDLING For the sake of safety, the following points should be taken into consi tion, 1. PRECAUTIONS ON TRANSPORT (1) Do not lift the instrument by holding the table. The microscope column and display unit weigh approx. 220 and 140 kg, respectively. ‘The strangth of table fitting is not sufficient for bearing these weights. Should the table be lifted, the table might slip off and an accident right occur. Hence, employ an appropriate method of transport other ‘than lifting the table (2) The housing supports should be fitted in place before transport Bo sure to call servicomen when the instrument noads to be transport e. Prior to transport, the housing (column console} should be fastened with the fixtures for this purpose 2. PRECAUTIONS ON POWER CONNECTION (1) Wihen removing the front, rear or side cover of housing or the rear or side cover of display unit, be sure to turn off power supply. ‘The internal high voltage circuit constitutes a shock hazard, (2) Connect the grounding wire correctly. Otherwise, not only will the instrument fai! to operate normally but there isa shock hazard, (3) Avoid touching the connector of high voltage unit (HV tank unit) ‘The high voltege unit is at voltages as high as 10 to 25 kV, so danger will bo caused if touched carclassly Only servicemen are allowed to access this unit (4) Donot touch the areas marked DANGER. ‘These areas are supplied with high voltage, constituting a shock hazard. (5) Do not touch the resr of cathode-ray tube. The cathace-ray tube is a dangerous part since It rocelves 2 high voltage of about 10 kV. (6) Before replacing a fuso, turn off the main switch on the power distribu tion board, and make sure that the AC power supply is cut of. | a fuse is touched in the live status. a shock hazard will be constituted. (7) The POST HV cable of the secondary electron detector carries a high voltage of 10 kV. This cable should not be tensed, (8) Allow an interval of at laast five seconds between turning on and off the EVAC POWER or DISPLAY POWER switch (9) Maintenance of the air compressor and cil-seslad rocary pump should be carried out according to the instruction manuals furnished with them,PRECAUTIONS ON HANDLING GENERAL PRECAUTION ‘The maintenance not described in this manual should be dane by the service EMERGENCY OPERATION (1) Turn off the EVAC POWER switch and the main switch on the power distribution board. (2) If water is leaking, close the valve of cooling water (3) After taking step (11 or 12), carry out other suitable measures. (4) Inform the service shoo, 5. CAUTION ON OPERATION (1) Wear clean glovas for specimen or filament exchange. (2) Do not give vibrations to the instrument (particularly during image recordinc), (3) Avoid excessive use of a conductive paste for specimen fixing Reasons: 1. Anexcessive amount of paste prolongs the time for drying 2. Evacuation time will be pro!onged if the specimen is introduced into the specimen stage before the paste is dried adequately, (4) Avoid a significant increase of beam current when the POST HV switch of sub panel is turned ON with emission current flowing, Reason: I beam current is too high, the primary electrons reaching the specimen increase in quantity. In consequence, input signal of the secondary electron detector becomes abnormally intense and will damage the scintillator. The specimen wil also incur damage, (5) Tilt angle of the specimen stage is restricted when observing a lerge specimen at a short working distance. (6) When accelerating voltage is turned off, post-stage high voltage cannot be applied for the purpase of protection, Therefore, the raw image CRT cannot receive 10 kV, so raster does not appear. For beam scan, accel: erating voltage mus: be turned on.PRECAUTIONS ON HANDLING 6. POWER INTERRUPTION/FAILURE a ) ph po! OFE. a 7. WATER INTERRUPTION a (2 Turn OFF both EVAC POWER and DISPLAY switches, Turn off the power distribution board switch, Proceed as follows when poner supply is recovered (3) Turn on EVAC POWER switch, (b) Confirm that the LOW and WAIT lamps are lit and that the oil rotary pump and sir compressor are running (c] Turn ON the DISPLAY switch, This complotas the procedures for re-energizing the instrument ‘Turn OFF both EVAC POWER and DISPLAY switches Turn off the power distribution board switch,PRECAUTIONS ON HANDLING 8. OTHERS oO (2) 3) (a) oe 6 a @ (9) Kop the instrument room under the following conditions even when the instrument is not in operation. © Room temperature - 1510 30°C © Humidity eve 888 than 70.% RH Evacuate the instrument at least one day/wook oven if the instrument is not used for along time. ‘The D.P. cooling water drainage is of natural type and the maximum allowable height of the port 1s 10 cm above the floor. ‘The wator interruption protective device will operate and stop the instrument if the water pressure fluctuates 100 much. Set the water flow at 1 t0 1.5 &/min, In the event cooling water supply is interrupted or its flow rate be- comes inadequate, the overheat protective circuit is automatically activated. (Buzzer emits a continuous soune.) In this case, turn OFF EVAC POWER switch ‘After eliminating the cause of overhest, tum ON EVAC POWER switch again. Note, however, that you must wait at least 15 minutes after overheat before turning on this switch ‘Avold installing the instrument at a place where abrupt changes in current and/or magnetie field occur due to nearby power lines for ‘equipment like a large magnet clutch et. Make sure there fs nt a vibration source like a large machine tool or 2 highway, railway or the like in the near vicinity, And it is recommended 1 install the instrument on the first floor of the building In the TV scan mode, no image appears on the raiw image CRT. Also, the menu screen will not be displayed. In the signat monitor or waveforrm monitor scan mode, the flicker-free image CRT i frozen in the LIVE displey and signal waveform is not displayed. In case the "renzo" status is set by the F1 key or due to the termina- ‘ion of PHOTO mode, specimen is not irradiated with electron beam. “Therafore, no image appears on the raw image CRT even if scan is performed.INSTALLATION OF MODEL W-4010 CLOSED WATER RECIRCULATOR Il. INSTALLATION OF MODEL W-4010 CLOSED WATER RECIRCULATOR For synchronous operation of the Model $-2460N and Model W-4010 closed water recirculator. connection should be made as follows, EVAC board extor wares ] “+ store connection, be sure to tura OFF the EVAC POWER switch of Mode S-2460 ond the main satch of customer's power distribution Boer [After connection, carry out checks with caference to the instruction manual of Model W-4010 and confirm normal operation,SPECIFICATIONS I. SPECIFICATIONS 1.1. Resolution 4.nm (40 A) quarenteed (at accelerating voltage 25 kV and WD 5 mm} 1.2 Magnification 20 to 200,000x 1.3. Electron Optics (1) Electron gun Pre-centered hairpin type filament (2) Bias Self-bias + continuously variable (3) Accelerating voltage 0.30 3kV (0.1 kV step) 35 to 1OKV (O.5KV step) 1110 30 KV {1 KV step) (4) Lens system ‘Hens reduction type (8) Stigmator coll Sole electromagnetic type (6) Getlaction coil 2stege electromagnetic deflection type (x, Y) (7) Objective lens aperture Fixed aperture 0,1, 0.2 mm dia, opening (exchangeable) Movable aperture (option) 18) Alignmont 2estage electromagnetic alignment 1.4 Specimen Stage ‘Any one of the specimen stages (1), (2) and (3) below is equipped (1) Super oucentric stage X-traverse: 0 t0 32 mm (continuous! Y-traverse 0 t0 32 mm {continuous} Tilt angle: -20° to 90" (continuous Rotation angle. 360° (continuous) Ztraverso: 5 10 35 mm (continuous) 10 to 35 mm [with BSE detector! (2) Largesize standard stage Xetraverse (0 t0 80 mm (continuous! Y traverse: 0 t0 40 mm (continuous) Tit angle -20° 10.80" (continuous) Rotation angle: 360° (continuous) Zotraverse 6 to 95 mm (continuous) 10 to 35 mm (with BSE detector! (3) Large-size euventric sage Xtraverse 0.10 100 mm (continuous) Y traverse 0.10 80 mm (continuous) Tile angle 0° to 60” (continuous) Rotation angle: 360° (continuous) Zetraverse 10 to 40 mm (continuous)18 Image Display a 2 3) a c 6) a «@ (9) SPECIFICATIONS Fk es mgly wih ulna meron row rap ey vom TEin TV hort 0 vein car Proto CRT Eyl 1 oi slton CRT Soi fn san ov tse Tin Beles sn PHOTO sean Scan speed Scan speed | X period (meeo) | Y period (see) | No. of sean lines Tv 0.064 0.033 | ‘500 a 1 05 500 a 4 2 500 S 20/16.7 10/8.4 500 = 40/33.3 2016.7 500 DFAT) 05, 0.068 135, Gisiow 2 0.27 135, PHOTOT 20/16.7 40/33.3 2000 PHOTO2 40/33.3 80/66.7 2000 PHOTOS: 160/133.3 320/266.6 | 2000 (Power-synchronous scan: 60 H2/60 Hz region) Signal processing/operation mode Auto focus ‘Auto stigmator ‘Auto brightness/contrast control Dynamic stigmator monitor Gamma control 1 and 2 Polarity reversion Brightness conversion Quartered frome copying Recursive filter (TV, FA and [A scans) Image integration (E and (scars) Auto data display Magnification, accelerating voltage, film number, micron scale, micron value and low vacuum sot value printable on film Data entry Arbitrary alphanumeric characters and symbols overlayab'e at any image position through Keyboard Electrical image shift #20 um {WD = 16 mmSPECIFICATIONS 1.6 Vacuum System (1) Sequence contrat: Fulauto pneumatic valve system (2) Vacuum detection: With Pirani gauge (3) Ultimate vacuum: 7x 10 Pa (4) Vacuum pump’ Oil rotary pump (160 Bind x2 Oil diffusion pump (570 R/sec) x 1 (5) Evacuation time: About 3 min (6) Air compressor. Vunit 17 Safety Device Protection egainst power, water and vacuum failures 1.8 N-SEM Mode [1] Resolution: 6 nm (60 A) [2] Backscattered electron detector High-sensitivity (Robinson type) backscattered electron detector (3) Accelerating voltage: Same as in SEM mode (though limited depending on sample and vacuum degree) (4) Magnification. ‘Same as in SEM mode (though limited depending on sample and vacuum degree) (5) SEM/N-SEM selection: (On menu sereen (6) Low vacuum range: 1 Pato 270 Pe (7) Low vacuum indication with meter (in Pa/Tore} (8) Low vacuum setting (On menu screen {9} Low vacuum control Automatic (real-time vacuurn feed-back system)WW a a) @) 1. INSTALLATION Section1. INSTALLATION INSTALLATION REQUIREMENTS General For installing the Model S-2460N, the sites and conditions mentioned below must be avoided. {a) Room located in the vicinity of transformer substation {b) Room located in the vicinity of elevator {cl Location near electric equipment consuming a large quantity of power (e.g, electric furnace) or its ower supply (a) Location near spark discharge source or high-frequency apparatus fe) Room filled with gas which corrodes metals (8) Place expasod to direct sunlight or strong draft (a) Dusty place Ih) Location subjected to severe vibrations Li) Using ground wire common to other elactrical equipment W) Location adjacent to radio or sound wave source Room Temperature and Humidity (a) Room temperature 18 t0 30°C ‘Temperature Fluctuation should proferably be less than 6°C during operation of the instrument. (bl Humidity. . 70% oF tess The instrument should desirably be operated in air-conditioned room ine Power Requirement (a) 115,200, 208, 220,230, 240 V AC + 10%, 3.5 kVA, 50/60 Hz (with auto transformer] NOTE: Line power fluctuation should be slow, and no abrupt fluctuation is allowable, (b} The main unit should be located within 5 m of the power distribution board on the wall (since input AC ‘ord is only § m long).1. INSTALLATION. (4) Grounding It is normally desirable to ground the instrument at @ grounding resistance lower than 100 ohms, The ground ing terminal must not be common to other electrical equipment, Le. exclusive grounding should be provided. (5) Water Supply and Drain The following water supply conditions should be satisfied Water flow rate 1t0 1.5L per minute Water pressure 50 t0 100 kPa {0.5 to 1 kaffem*) Water temperature ; 10 to 20°C Use tap water and provide natural drainage. Where an appreciable amount of deposit is found, attach a proper water filter. The drain port should be located at the flocr level, and the water pressure should be regulated without burst pulsation, NOTE: Water (coolant) should not be flowed beyond the specified flow rate, atherwise vibration will be propagated through water. (6) Stray Magnetic Field When tho magnetic stray fleld measured at the installation site before mounting the instrument complies with ‘the requirements shown in Table 1-1, no image troubte will occur. Avoid locations at which abrupt electric current change or magnetic field change might occur due to a large- sized magnetic clutch or power cable for other equipment Table 1-1 Stray Magnetic Field AC component (Note 2) ‘requeney component synchronous Frequency compo- Fraquaney component synchronous with | rt aynchronout Vy with power supply Dc component Ieper (Note 1) ati synchronous | observation | oy ring mage | i" power i asynchronous ‘At image | At any scanning} Sonning mode recone | toeed Waxinum atowsale| ag sng cone cone rogue Maximum alowabe ; : Maximum elewsele | se min vmaismin | oameismin | omer mn 1G ligne NOTES: 1. The components due to terrestrial magnetic field ere excluded from the values. ‘The AC component (AC magnetic field} is indicated in peak-to-peak value 3. AC and DC stray magnetic field Nuctuation is defined as varying monotonously and ‘Gradually with time lapse, Thus, magnetic field fluctuation with pulse or step waveform should not occur.INSTALLATION (7) Vibration When the floor vibration measured ot the instalation site before installing the Instrument does not exceed 5 Hz, Sum p-p, no image trouble will occur. (See Table 1-2.) If the instrument is installed on the first floor in a building made of reinforced concrete, the instrument performance will not be degraded by external vibrations so long as vibration sources such as heavy-duty ‘machine tools or transportation facilities (electric car, for example) are not operated nearby. ‘Check circumferential conditions of the installation site for vibration before installation or when ordering, Table 1-2. Allowable Vibration External vibration: Image disturbance will not occur when the conditions in this table are satisfied tion Frequency Total Amplitude He or iss Sum pp mex ote Sam pp mex con "Tum pp mex. Lew frequency vibration range Fesonance point” NOTE: IF there is floor vibration exosading the allowable value (vibration should be measured in advance if itis expected to cause a disturbance), then consult with the nearast Hitachi representatives.INSTALLATION (8) External Noise If the equipment shown in Table 1-3 or its power tne is placed in the vicinity ofthe Model S-2460N, or it an exquioment using a large current is locate even at a distance, then image trouble will occur. ‘To prevent this, the instalation site shouldbe selected after confirming that such equipments do not exist If ee cquioment which uses @ power fraquancy differing from the line frequency used forthe -2460N, or the powerline of such equipment, is alaoed near the S-2480K, the frequancy synchronizing sweep becomes Inet- fective Such e location should be avoided ‘Table 1-3 External Noise Source i Noise Chassitication we Source Equipment Electric equipment | Electric ischarce| Flasher (ndon sign, ornamental electric bub}, relay, with contacts | (spark, arc) | electromagnetic conductor, thermostat (warmer, refrigerator. iron), electconic calculator. cash register Smaltsized Equipment utilizing | Electric discharge] Electric drill, laboratory engine, motor of sewing swe | commuatr motor | ark a, | mocine cara, eee masoxng mache uipment slicing contact {general/home 8 electrical Electric discharge | Glow discharge | Neon discharge tube. high pressure mercury arc lamp appliances) | se Controle utilizing | Phase contrat | Thyrstor dimmer, inverter semiconductor | (transient noise Industrial high | Unnecessary | Industral high frequency heater, high frequency frequeney signal* electric wolder, electronic oven equipment Equipment ssing high | Medical high tre- | Unnecessary | VHF/UHF fulgurators, electric satel freaueney | quency equipment | signal® Equipment utilizing | Unnecessary | Flaw detector, dapth sounder. fishfinder, uhrasonic uitrasonie wave | signal* clsoner High voltage, | Induction of commercial frequency (electrostatic large current | induction, eloctcomagnetc induction currant Power cable leaking in ground) (arensmission tine p Etearie dsr | Cron, oor str, or comes ue to cared cauipment corona, arc) | meta (are cischarel Etectric discharge | Trolley wire, internal equipment, reciler (spark, ate Electric ca Reflection —_| From carbody ic discharge Ignition reveal came Electric decherge| Ignition system bustion engine Auromanile Ore Dynero, voltage regulator, wiper, hora, winkert INSTALLATION tenet Clanton ee source Epa Stal meio’ | rong arent ar Wireless Large power « ‘communication | sending/recsiving Unnecessary ‘Transmitter using high frequency crupeen | Supmene | ree NOTE: The signal merked *"" is used normally in the relevant system, but becomes a disturbance for other (9 (10) systems, Disturbance by Sound Waves ‘Sound waves (vibrations of air) adversely affect the S-2460N regardless of their frequeney and may cause image trouble, To prevent this, confirm before installation that an equipment which may cause a sonic dis- turbance is not located in the vicinity of the S-2460N, If such equipments exist, then check for noise level When conversation is possible in @ usual voice around the installation site, the noise level is allowable, But if ‘conversation is possible only in 2 loud vorce due to an abnormal noise of the equipment, sonic disturbance may occur. Site Requirements fa) Space required ‘A.room of about 2.7 x 2.7 mis recommended, (b) Dimensions of entrance 0.85 (W) x 1.7 (H) mor greater (Durability of floor 300 kg/m? or more (a) Other See Fig. 1-1 for installation layout.INSTALLATION { owes s07 I i Pp Column unit Diss ni 7 ; | rato ear | 1,800¢K) voit "| Fig. 1-1 Installation Layout 27001 INSTALLATION 1-2 WIRING Only cautions with respect to wiring are described here, (1) Power and Ground Wirings The instrument operates normaliy only when it receives 2 power supply of 100 V. When using @ power voltage ‘other than 100 V, tha aute transformer (aption) is required. However, the voltage must be connected to the instrument after confirming with the aid of a voltmeter that the auto transformer outputs 100 V. Fig. 1-2 shows tap voltages of the auto transformer nov nov oJ ww] Rav a ov GO |__o woov 30k —- ao our —-) soy o ° Fig. 1-2 Auto Transformer Voltage Fig, 1-3 shows wiring from the distribution board, “The instrument should be grounded not via @ water pipe or the like but by an exclusive means le VAG wn Pawer ditibution Board {11 When auto transformer i not employed e Power supply ore than roo V ac, Power distribution board ‘auto transocrner vac unit (2), when auto transformer is employed Fig. 1-3 Method of Connecting Transformer1h. FUNCTIONS Section II. FUNCTIONS 2-1 CONTROL KNOBS AND SWITCHES ON MAIN UNIT 21-1 Column Fig. 2-1 shows the appearance of the $-2460N engin unit Fig. 2-2 sketches the sectional view of the $-2460N colurm, Gun alignment coll sction Electron gun ‘Secondary electron detector Backscattered electron detector EVAC POWER suiteh | Specimen stage DISPLAY POWER eniten! Fig, 2-1 Model S-2460N1, FUNCTIONS 2-1-2 Specimen Stage “Thospecimen stage is selectable among the super eucentric stage, large-size standard stage and large-size eucentri stage. Movable range and restriction on it vary with tyge of specimen stage. So reference should be made to (1), (2) ‘and (3) below. NOTE: Scale reading of the Z control of specimen stage matches WD [Working Distance) exactly when specimen is very thin or its thickness is nearly 2er0. In casa specimen is comparatively thick, scale reading of the Z control does not match WO. WO indicates a distance from the upper surface of specimen to the objective lens. If the procedures mentioned in the following (1), (2) and (3} seem too complicated for determining the movable range of the stage, then use the gate provided as a standard accessory and determine the restrictions visually. ‘After putting a specimen stub on the stage and before roturming the stage inta the specimen chamber, carry ovt the following steps (al to (e) (a) Attach the gate (P/N 496-7445) to the specimen chamber, (b) Return the stage with specimen stub to the position where the stub is ust below the gate. {c} Determine one value among the working distance, tlt angle ard Y traverse (unnecessary with the standard stage), then move the staga to the point were the bottom edge oF the gate and the specimen stub are nearly in contact, and record the other two (a) Pull the stage out a little, detach the gate and then return the stage into the chamber. (e) Carry out actual operation within the ranges recorded in step (c. aoe ee 2 Attachment of Gateil. FUNCTIONS (1) Supor eucentric stage ‘stage X contrat 1-18 10 16 en Stage T control (hondted Stage a2 contrat Stage 2 contol [50 35mm) Stage R contrel 360") Stage ¥ control B10 18mm) 921575 Fig. 24 Super Eucentrie Sta11, FUNCTIONS: 157 157 32 ‘specimen chwmbor ‘Movable range of super eucentrie stage ‘Movable aree of super eucentric stage (ich specimen tuo) 2.5 Movable Range of Super Eucentric Stageh. FUNCTIONS Yaroverse Limit (ith specimen stub of 15 mm dia.) Movable Range on Y Axis (ne Remarks: Test is freely posibio within a range of £7.6 mm when the working distance is wider than Torn ara the tit angle is lower than 1 Inany other WD and tlt ange settings, the abscise inalootes the ¥trevrao range (absolute valve). In caso the # range end tit angle Reve been et, the ordinate reads the minimum WD. In-cve the WD ard =¥ range have been set, you must select the tt angle indleted by on oblique line which pases jst blow the crossing point of the WO anc ‘Yeange readin. Example (indies by dashed tine in figure) |Wven WD i 10 me, tftanaie must be loves than 35°, Reference: WD whan ¥ mm *47.6 mm {covers full specimen sub} eauas siod® x 16, WD whan ¥ mm © 0 rm epecimen only titatie) equals siné® x88, ‘Table 2-1 Mutual Restriction among WO, Specimen Tilt Angle and Y Traverse (with BSE detector pulled out)I. FUNCTIONS 34 (vin spacimen stub of 82 mm ain) 32 30 28 é 26 24 22 20 18 16 14 WO tone) 12 Kop 1ob 0 2 4 6 8 10 12 14 16 Movable Renge on ¥ Axi (nm) Romarta: YY reverse i rely posible within a range of £18 mm whan the working distance is wider than 33 mm zd the tit angle is lover than 9” In any other WO and tilt arglesotings, the abecisy indicates the ‘Y sraverae range (absolute value, In case the 2Y range and tilt angle have ben set, the orsinate reeds the minimum #0. In cae the WD and = range Reve been su, you must select th tt eral Indicated Lay an adlkqr lite whieh posses just below the crossing point of the WD end ¥-range readings Examele (inieated by dash ine in figure), When WD is 12 em, i angle mast bo lower than 20" Referens: WD when ¥ eam = £16 mm (covers ful specimen stub) oquel sing” x 93 WD when ¥ mom = 0 min apecimen only tale} equals snd? » 17 Table 2-2 Mutual Restriction among WD, Specimen Tilt Angle and Y Traverse (with BSE detoctor pulled out)ML. FUNCTIONS WO tine) sravers® Limit (ivih specimen stub of 18mm ol) tl Movable Range on ¥ Axis (rm Remarie: Incase WD and tit angle ore 2%, tho ables indicat the ¥ traverse range (absolute valve) Incase the 2 rango and tilt anale have boon set, the orcinate rads the minimum WD. In eave the WO nd 2¥ range hove boon set, you must select the tit angle incated by an ‘Oblique line whieh pastes just below tha erosing palne ofthe WD and range readings. Examole (indicated by dashed line in figure when WO i314 mm, aft angie must be lower than 15°, “+ This table assumes a specimen whove thickness i intintely small, Actual WO Is given by sotrectng spmcimen Thikness from the Z fading on the shecimen stage Table 2-3 Mutual Restriction among WD, Specimen Titt Angle and ¥ Tra (with BSE detector introduced)WD tro n, FUNCTIONS WO limit Y teaver Limit 50" 45" 40° ove 4 6 6 0 2 M16 Movable Rene on ¥ Ass rm eT Irrense WO and tit angle ar st, the abscsss nicates the ¥ travers anes (abso re value) In ease the 4Y range ano tilt angle have been set, he ordinto aac tho rnimum WO. In case ‘the WD ord 2 range have Enon ez, you mut clot the tit angle indicated by an ootique tne vahich panes just below the eremsing point oF the ID end Y-range acing. Example lindicates by dashed line in figure) Wher WD ie 20 mm, it enale must be lower than 5. This able assumes spciman whose thickness infiitaly small, Actual WO is given by subtracting specimen thickness fom the 2 feading on the specimen stoxe Table 24 Mutual Restriction among WD, Specimen Tilt Angle and Y Traverse (with BSE detector introduced)ML. PUNCTIONS (2) Largessize standard stage 2-10 Stage F contro! (350°) sea, Tent PSF (ae Sige Xan — Mo a sep col ee eon {-20't0.20 mm) stone 2 contrat 921377 1510 35mm) Fig. 26 Large-Size Standard Stage1. FUNCTIONS: ‘Spseimen chamber ‘Movabio range of standars stege Movable range of standard stage IBunch specimen stb) aanN. FUNCTIONS NOTE: The stage Z control has the scale shown in Fig. 2-7. Read the scale (marked in white) et the reference point corresponding to the specimen stub used oterence point for Reforence point ‘or Se am feteare pt tr Seshae b 28 mi@nnas Seren nhs wine ~~ ara x im convoisae ance V7 “LETT tr t 15 €xK ro oto sl (on) —1 is "eid scale Fig, 2.8 Z Control Scale wien 1 mm a. specimen stub } Permit movable range ‘Specimen tit anake (1 so 1s m2 3D 35 W. D. (am) —> ‘Table 25 Mutual Restriction between WD and Specimen Tilt Angle1, FUNCTIONS: {with 60 mm in. specimen stub) ‘a w 0 « sa ‘a Permittod movabla range angie 0 Specimen er oe ee ee sw 1 wt 9 3S Ww. D. (nm) —> ‘Table 2-6 Mutual Restriction betwoen WD and Specimen Tilt Angle (vith 126 mm dia, epzermen stub) w Permitted movable ange Specimen do 5 15 m2 aS W. 0. (an) —= Table 2-7 Mutual Restriction between WD and Specimen Tilt Angle 2-13FUNCTIONS (3) Large-size eucentric stage Sia92 T convo! Stage 2 contol (cto 60") (100 40 evn) ‘ogo ¥ contro! 28 10 25 mn (-25 to 25 mmi Stage X conta! [0:0 60 ma} 2-9 Large-Size Eucentric Stage 2-14Fig. 2-10 Movable Range of Large-Size Eucentric Stageh. FUNCTIONS (veh 125 mm da, specimen stub) W. D. (nn) LZERLZZZ IZZIE ZI vos is a a ws Das 0 Movable Range on ¥ Axis (rm) ‘Table 2-8 Mutual Restriction among WD, Specimen Tilt Angle and Y Traverse (with BSE detector introduced) so (ith 125 me dl, speciman stu) w4 of gs 4 Seeman tt ana W. D. (am) ist H ‘Obeervation inallowae n 0 SOLELELEZE LEZ LETT: LTE TEETER EERIE IE Cn Ce Mowable Renge on Y Axi (mn) Table 2-9 Mutual Restriction among WD, Specimen Titt Angle and ¥ Traverse (with BSE detector pulled out) 2-161h. FUNCTIONS Soncimen tit angle W. D. (nm) D5 1 is mo ms O88 ase Movable Range on ¥ Axis (mm) ‘Table 210 Mutual Restriction among WD, Specimen Tilt Angle and Y Traverse (with BSE detector introduced) w. D. (nm) 0 5 is ms as eS sO Movable Range on ¥ Axis (men) Table 2-11 Mutual Restriction among WD, Specimen Tilt Angle and Y Traverse (with BSE detector pulled out) 2-17h FUNCTIONS (With 15 mm aia, Specimen wtangls W. 0. (nm) 0 5 Wis mo 25 4 35 ae a5 Movable Reage on ¥ Axi fen) Table 2-12 Mutual Restriction among WD, Specimen Tilt Angle and Y Traverse ny “s 7 Spsciman tit angle W. D. (an) a 0 § Io ts m2 3s Ao 45 SO Movable Range on Y Asis (mim ‘Table 2-13 Mutual Restriction among WD, Specimen Tilt Angle and Y Traverse (with BSE detector pulled out) 2-1824-3 Evacuating System 1. FUNCTIONS: : peur aves © B= soit aves v8, VE. V8.8) LY ow ‘Specimen chamber low vacuum ~\ ‘contro! valve + ras,nan : anys * Filament ™~ Condenser lens aperture xs ce epee 2 Specimen | comin tamer OQ) vv V3 CD on va ve BL RPI [ vo _ o% Fig. 211 ve BL RP2 Block Diagram of Evacuating System 2-19ML FUNCTIONS 22 CONTROLS ON DISPLAY UNIT Fig 2:12 show the appearance of the display unit Gun aligrment control pane! Fiikar roe image CAT aw image CRT Evacuating systom control pene) Option rack 35:inch magneto opte isk option! Proto CRT unit Control pane! Keybowa Fig. 2-12 Display UnitControl Panel EMISSION CURRENT (uA) Display Indestes emission current by color bar READY Lamp Extinguishes to indicate poor vacuum, Flickers 10 indicate necessity of contiouing ‘vacua furthar fora shart ei, Stays lit to Indleate stainmen of adoauat ACC VOLTAGE Swisches ‘Set accelerating voltage, ON/OFF owitch Turns ono accelerating DOWN suite UP switch oeelrating voltage IMAGE SHIFT Switches crcl shit age fee <0 OP 40 Ov {Uoon depresing one each of X and Y pushbuttonssrsuftaneously, the Flee is ehitad Siogonaty, X contrat Y contrat NNeuteal areserting Upon depressing imo X pusnbuttons simultaneously, the field shift due to mage site erecunss to 260 lentes ro the center) CONTRAST Control Etfoctive only when ABC mode saleeratsuitch teat MANUAL. ABC Switch! ACC VOLTAGE Display Inieatos accolrating voltage A voltage ssected by ACC VOLTAGE switch Is displayed. Cissay is extinguished with scoolerating voltage tornes of MAGNIFICATION Display Inaleates mogiteation ad foestcstance, \Whon shortaning working sistance, inimom magnification i limit Taleates foaslastance (objective ars curt when FOCUS mode at MANUAL SCANNING SPEED Switches Select scanning sped, TV ecan ‘Slow scan (¥ eyelo 0.5 see} Slew sean (Y evel 2 soa} ‘Sow seen (Y cycle 20/16.7 se, 50/60 He) Slow sen IY eyele 40/33 se, 1/60 He) ono0ngD FResuce area (scan within mite area) {case a single switch i used for selecting two speeds, thay are selected altrnatay BRIGHTNESS Control Agius brightness. Effective only when ABC made spbeior switch feat MANUAL, FOCUS Mose Selector Switch Selects AUTO oe MANUAL with lamp indication) STIGMATOR AUTO Switch ployed for automatic FINE Control Finely edits focus, Used fr automatic image aajustment Functions only when the ABC mode eelnstor seitoh it AUTO. FOCUS Switcet [ABC Mode Selscior Switch, ‘Selects AUTO or MANUAL, o a ten amp rato ese coanse we Tare foc onan” | Red fsa wea manuat | liseecaueahe | Guns ction Ions caren) Tens curren) auto ‘Auto toeus coarse salusimers ‘ute focus tine anstment FUNCTIONS IMAGE MODE Swisch Displays Image brightness, BE signet monitor! and FE waveform monitor! are selected alternately, TWIN Photo Switch {Utes 10 expose th left or rit haf fof image wren ptotoaraphing SPEED Selector Switchos Select film exposure time 1 Ad see/reme 2+ WO seifeame 2) 320 ane/trame PHOTO switen Exposes fim Press agen Tor command cercaliation PRESET Switches Preset magnification Selection cosine between two salves via 1 or 2. Each preset value Iseiterabie ~ MAGNIFICATION Switches ‘Chenge mapitiction DOWN 5 Chsrgos high to low agitation up Changes tow to high magnification STIGMATOR X, ¥ Controle correct astigmatism, Fig. 2-13 Conteol Panel -2222 SubPanel “The sub-pane! is provided with controls which are not frequently used in routine operations FILAMENT Contro! POST HV Switch’ FILAMENT Control POST HV Switch POST HV Lamp SIGNAL Switch POLARITY Switch GAMMA Switch CRT BRIGHTNESS VIEW Contro| CRT BRIGHTNESS PHOTO Control ALIGNMENT Switch ALIGNMENT arc augment y {\*°? Fiheostat POLARITY Switch AFC ALIGNMENT X Rhoostat SIGNAL Switch | ‘ABC CONTRAST Contr] Hl. FUNCTIONS FOCUS MEMORY Switch CPU AUTO CHECKER Lamp FILAMENT POST HV|SIG POL GAMMA CONT/ CRT BRIGHTNESS ALIGNMENT\ STIG ia START PHOTO CPU] Cie Sow 3 forF se See asa ay 2 awe ew oe fjeset Lox 2 POST HV Lamp CRT BRIGHTNESS AUTO START Switch: Adjusts filament heating curren AFC ALIGNMENT X Y Rheostats Applies post high voltage for cotlecting secondary electrons Indicates application of post high voltage for collecting secondary electrons. STIGMATOR Switcr Selects signal to be displayed on CAT. SE Sacondary electron signal XRAY; Xray signal AUX; Auxiliary input signal (such es reflected electron ancl cathodoluminesoence signals) Inverts image brightness and contrast image is inverted at INV. Used to adjust the image FOCUS MEMORY Switch 1 4 Image contrast is increased OFF; Normal image quality 2; Part of image with strong contrast is suppressed, and part with AUTO START Switch weak contrast is increased Adjusts brightness on raw irnege CRT. PHOTO Switch Adjusts brightness on photographing CRT. Used for axial alignment of the objective movable aperture and for ‘adjusting the auto focus function, APER —_; Adjusts the abjective movable aperture (aperture alignment) to minirsize image escape in vertical and horizontal directions when the image is blurred, AFC; Adjust the X and Y (auta focus alignment) theostats so that the image rotates around the CRT center as an axis. 244 Sub-Panel Used for auto focus alignment, Functions only when AFC ALIGNMENT switch is at AFC. Selects astigmatism correction mode, DSM —_; Monitors astigmatism correction. A cross mark eppears on CRT. Adjust X and ¥ controls on control panel until image is focused around the intersection of this mark: AUTO; Selects auromatic astigmatism correction RESET; Heducts the effect of automatic estigmatism correction to zero, Consequently, only manual astigmatism correction with X and ¥ controls on cantrol panel) becomes valid ‘Saves focal longth (objective lens current value) SAVE Loap Selects the auto start function, When tured ON, brightness, contrast and focus are adjusted automatically when the accelerating voltage is applied. . Saves current focal length 1 Loads saved focal length Used for automatic image recording Selects the method of image recording to be carried out by pressing the PHOTO switch on the contral ganel 1 + Records an image after activating the ABC and STIGMATOR AUTO functions 2 Records an image after activeting the ABC function, MANUAL ; Oniy records an image. 221. FUNCTIONS preoakey ind S1-z “81d and 04 sho J08IND fen tas, ‘Av oo8cig 038019, on 801s poss 4 sces9, Aas jos.u0) a J 7] Ho ue fox 2 4 oN soeae268 5 AR fon aed | : if 1) Nas i “lA ho 20053 shox 110099) : 0 / shox uopound 223. KeyboardFUNCTIONS: Fir Fa: Fa: Fa: Fe: Fe Fa: LIVE/FREEZE ‘The LIVE status is set when the DISPLAY switch is turned ON, LIVE is displayed at the top right of the flicker-iree image CRT Wen pressing the F1 key in the LIVE status, FREEZE flickers. After completion of 1 frame, the freeze status is assumed VACUUM SET Selects high or low vacuum mode. ‘Sets vacuum dograe in the low vacuum mode Selects tha secondary or backscattered electron detector in the high vacuum mode. MEMORY PARAMETER Sots the recursive filter and integration mode in scan modes KA and KA. FRAME CHANGE Selects A or B frame, ‘The selected frame is displayed at the top left of the flicker-free image CRT. Selection is allowed in the freeze status. DATA DISPLAY Sets ON/OFF status for each data display, and black ares. DATAENTRY Inputs 4 comment freely (in alphanumeric characters and symbole) Entry is allowed in the freeze status, Lut Makes brightness conversion {Intermediate level emphasis, gamma correction, binary conversion, [Nelevel conversion or inversion} in the freeze status QUARTER VIEW Ettects quartered frame copying, Copying is possible only from A frame to B frome and vice versa ‘This function is valid in the freeze status. BEAM CURRENT (setting of condenser lens current} ‘Sets the beam current (specimen irradiating current) Setting range Is 0 to 255, and the higher the setting, the larger the beem currant Shift+F10: CONDITION Fu: Fria: Used for registering and setting the observation conditions, The trial conditions for observe tion can be stored in the internal memory. And the stored conditions can be called out as, desired, HR MEMORY Saves an image into the high resolution image memory (1024 x 1024) Image recording witl not be made. Hit MEMORY operation is cancelable by pressing the F11 key again. Hower, cancellation cannot be accepted after the HR MEMORY display starts flickering MEMORY PHOTO. Records an image stored in memory. MEMORY PHOTO operation is cancelable by pressing the F12 key again. However, cancallation can: not be accepted after the MEMORY PHOTO display stars flickering,Hh. FUNCTIONS 2-2-4 Evacuation Control Panel a i) 3 a 6) 6 a @) EVAC/AIR switch: evac NSEM lamp’ SE lamp: BSE lamp WAIT lone: LOW imp HIGH lamp: © Mm ® @ W O00 00 wee cow wart |facseu |] se ase ak “be \ \ a 0) Fig. 216 Evacuation Control Panel Pushbutton switch for evacuating the column or leaking ar into it, Evecuates the column [Switch surface becomes yellowish.) Leaks ar into the column, Meter for indicating vacuum degree. Vacuum degree in the specimen chamber is indicated. Lights when the N-SEM mode is se. Lights whwn the secondary electron image observation mode is set Lights when the backscattered electron image observation mode or N-SEM mode is se. Lights when the oll diffusion pump is not in the complete operational status (or not yet warmed up adequately) Indicates that the column has not yet been evacuated to a vacuum degree at which high voltage is applicable. Lights when the columa has beon evacuated enough to allow application Of high voltage,4, FUNCTIONS: 2:25 Gun Alignment Panel wo a © GUN BIAS a a ore GUN ALIGNMENT (1) HORIZONTAL controls: (2) TILT controts: (3) GUN BIAS contro! (4) FILIMAGE switch FIL, IMAGE o Fig. 217 Gun Alignment Panel ‘Aliga the optical axis of electron gun (in horizontal direction}. Align the optical axis of electron gun (in vertical direction). Adjusts the bias voltage of electron gun. When turning this contral clockwise, bias increases to reduce emission currant. Turned to ON for displaying the filament image on CRT.3-1 PRELIMINARY OPERATION m a | go. e |e rl (3) carne w ce 11, OPERATION SectionIll. OPERATION Aun cooling water at a flow rate of 1 10 1.6 &/min. (Flow rave should be adjusted while watching the flowmeter on the left side face of the columa.} Turn on the switch of the power distribution board. Turn on the EVAG POWER and DISPLAY switches, Re (Rotary Purp) starts Prase the EVACIAIR switch on the evacuation cantral panel to EVAC. (This switch is usually set in the EVAC status, so only confirmation is required.) LOW and WAIT lamps fight up Atter about 20 min, the WAIT lamp goes out and then evacuation is carried out automatically. When the HIGH lamp comes on, evacuation is completed NOTE: While the WAIT lamp is lit, ar can be admitted into the columa bby turing the EVAG/AIR switch to AIR, but the column cannot be evacuated by turning the switch to EVAC.ML OPERATION 3-2. SPECIMEN EXCHANGE 32-1 With Super Eucentric Stage 321-1 Spe a 921495, 2 3 4) 921466 6 Depress the ACC VOLTAGE ON/OFF switch 0 turn off accelerating voltage, Turn the EVAG/AIR switch to AIR, Pull out the super eucenitie stage Caution: Be sure to set the super eucentric stage contro's as follows beforehand: x Omm Y Omm T ° R Froe Zz 18mm Flemove the specimen stub, Caution: The specimen stub is removed by turning it counterclockwise by the right hand while holding the bevel gear in the rotating section of the spocimen stub by the loft hand, To use the instrument in the best ‘condition, wear vinyl gloves for the purpose of eliminating contemine- ‘on through bare hands. ‘Set the specimen stub which is accommodated with a new specimen by reversing the procedure from step (3) to (2) above.I, OPERATION (6) Annow specimen must be mounted on the specimen stub as instructed below, ‘Specimen Stub Specimen Stub (82mm dia) specimen (Simm dia) Specimen 02 1 = x Fx by silver peste - ma Specimen stub (32 mm dia! Fig. 9-1 How to Mount Specimen Stub 2 kinds of specimen stubs having a diameter of 32 or 15 mm have been prepared as a standard accessory, Use them depending an the size of 2 specimen. A eucentric adjustment of specimen height H is possible within a range of 6mm. Caution on low vacuum mode (N-SEM) Moist, oily or outgas-rich specimens should be set in the smallest size possible.Ni. OPERATION (7) Return the super eucentric stage to the specimen chamber. ross EVACIAIR switch to EVAC. Caution: Vihen the BSE detector is introduced, the staga should be set under the following conditions; Z (WD) 10 to 35 mm and T 0, (8) Wait about 810 4 minutes until the HIGH lamp lights up (9) The READY lamp starts flickering, and thon (after about 1 min) remains lit Press the ACC VOLTAGE ON/OFF switch to apply accelerating voltage and olsserve an image. 921495 3-2-1-2 Working Distance (WD: 5 to 35 mm) Working distance is mechanically indicated on the working distance scale. The aforementioned instructions must be observed strictly when changing a work~ ing distance while a scecimen is tilted Working distance js controllable freely either in vacuum or under atmospheric pressure 921581WI, OPERATION 32-13. Super Eucentric Control (1) 0921582 With the super eucentric specimen stage, image focus will not be affected upon shitting the Feld of view by the X/Y fine controls. Besides, image escape on CAT is only slight when tilting a specimen at the canter of its visual field. For this tilting method, 1wo conditions must be met as detailed below. One is to align the specimen tilting axis with the electron-optical axis. This axial align ment is unnecessary because the optical/ilting axis alignment knob has been factory adjusted. Avoid tampering with the knob though it has been fixed. Should the knob be moved due to some reason, make readjustment with reference to 321-4 The other is to align the specimen surface with the titing axis, This ean be accomplished by the following procedure. U1) Forman image at a low magnification and graduaily tilt @ specimen up 10 245", (2) In the course of tilting, the image on CRT will continue escaping in any direction. So, gradually turn the eucentric contro! knob in adirection permitting the image to return to the original location, Repeat this step Until image escape is minimized. (Whenever menipulating the eucentric, ‘control knob, the image will bur. During this step, therefore, it must be brought into focus repeated'y by effecting the auto focus function.) (2) Increase magnification and repeat steps (1) and {2) until a desired ‘magnification is reached. Widen the tilt angle up to a desired ievel (4) In case the eucentric control is not employed, the above steps (1) ‘through (3) ara unneoassary.Il, OPERATION Fixing bolt Optica ting axis silgnment knob Optiateiting axle atgement erat 921585 4 Super Eucentrie Control (2) ‘As mentioned tiefore, two conditions must be met for tilting a specimen at the ‘center of its field of view. And one of the conditions has already been satis- tied because of shipment after factory adjustment. If the adjuster shoul be ‘manipulated due to some reason, however, the super eucentric control cannot offer the original function adequately unless readjustment is made by the following procedure (1) Loosen the fixing bolts (2) shown in the aoove photograph with the furnished hex. key wrench, (2) Match the stage Y contral with the scale division “0” and set a working distance (Z control) of 15 men {If an image isnot present on CRT, select the field of view by adjusting the stage X and specimen rotation controls.) (3) Form a low magnification image on CRT and tilt the specimen fram 0° 10 about +45°. lo this process, check the direction and degree of imaoe escape on CAT. (4) Return tit angie to 0° (8) Tilt the specimen from 0° to about -48°. During this process, check and record the direction ard decree of image escape on CRT. (6) Compare the check data in (3) and (5! against Table 3 corresponding method of adjustment, 1, and select a rena Diationot mage spe | Orpen otinoge iene | ig ‘Same in both {+) and (-) Almost same between (+) ta) i © Sprain ween) od ‘3 age now “The image at the center of CRT escaped upward to a large extent upon tilting at +40°. It escaped upward to a small extent upon tilting at ~40°. As a result, the direction of image escepe is tho sarre and the degree in one diraction i larger than in the other. In this case, the adjusting procedure (b} must be selecied6912502 Il, OPERATION (7) Adjusting procedure (a) Use the eptical axis-tiiting axis alignment knob for this adjustment (3) Reconfirrn that an image escapes in the sare direction and to almost the sare degree upon tilting the spacimen a6 shown in the figures at the left101, OPERATION (ii) After reconfirmation, tilt the specimen at cout 45° in either (#} or {-) direction. (ii) Adjust the optical existilting axis alignment knob s0 1 to rotura the escaped image 10 the center of CRT. \White gradually increasing the magnification, repeat this adjustment until image escape is minimized ‘Alter adjustment, tighten the fixing bolts firmly. (8) Adiusting procedure (lb) (i) First, conditions must be arranged so as to meet those ‘corresponding to the adjusting procedure (a) by using the eucentric control kno’. Confirm that the image escapes in the same direction and widely in either (+) oF (-} direction upan tilting the specimen as shown in <> 09125001, OPERATION rp eRT (i) After confirmation, :it the specimen at 48° in the direction in which image escape is larger. (i) Turn the eucontri¢ control knob slightly in the direc: tion in which the escaped image Is able to return to the canter of CAT. — cRT iv) Return the tilt angle to O°. (vl Tilt the specimen at 45° in the same jon as above once again and check the degree of image c~oRT A escape era (vi) Return the tit angle to 0° once again c- CRTAl, OPERATION (ui) Tiit he specimen at about 4° in the direction oppo- site to that in (iil, and check the degree of image scape, 0912502 While gradually increasing the msgnification, repeat this adjusterent until the degree of image escape nearly equals between (+) and (-] 48° angles, After adjustment, effect the adjusting procedure (a) in (7) (9) Adjusting procedure (c} (i) Conditions must ba arranged so as to meet thase cor responding to the adjusting prooadure (b) in (8), and then the adjusting procedure (a) in (7) must be effect- ed First, confirm that the image escapes in the opposite directions crt 3-10U1, OPERATION (i) After confirmation, form a low magnification imoge and tHlt the specirran at sbout =45°. Make adjustment —— CRT 4 as in 32-1-8 (1) and (2). Lil) After minimizing image escape, tit the specimen in both (+) and |-} directions and confiem that the image escapes in only one direction. (There is no problem ever though the degree af image escape differs between the (+) end (-) directions) If that is canfirmed, effect the adjusting procedure (b) in (8), and then that (ab in (7) Adjvatment tb) (iv In case image escape is minimal and has the sare crt _ deere in oppasite directions upon tilting the specirnen in the (+) and (-} directions, the optical axis tilting axis alignment knob need not be adjusted, In this case, tighter. the fixing bolt flemily with the furnished hex. key wrench, 912502 “Tghtea fixing bate (10), The adjustments in (1) through (8) must be repeated while increasing the magnification as in 32-1-3, Adjustment is possible to such an ex: tont thet an image at the center of CRT doos not fade out from CRT when tilted at about 40° at a magnification of 4,000 to 6,000x. Although this adjustment is required only once, accuracy may vary after a wide change of working distance,1M OPERATION 3-2-2 With Standard Stage 3-12 1¢ ACC VOLTAGE ON/OFF switch to turn off accelerating (1) Press voltage 0921495 (2) Before pulling out the standard stage, set the standard stage controls as follows: xX. 30mm Y 20 mmm T 0° R Free Zz EX position (3) Turn the EVAG/AIR switch 10 AIR, {Air is admitted into the column in about 1 min. (4) Pullout the stage 0921468, (5) Retnave the specimen holder. 921467 (6) Remove the specimen stub for the previous observation fromm the specimen holder. (7) Mount 2 new specimen on the specimen stub1, OPERATION (8) _ Fix the specimen stub on the specimen holder securely. Specimen stub 1 25mm ia Specimen sub 15 mmdia, __- 1933702 ss Specimen halcer M (22) ca B28 __bstt72 _— Spacimeon holder Ke 536-1058 (9) Loasen the specimen holders (1) and (2—1) or (2~2), adjust the specimen height to the gauge and fasten. Adiustment height depends 'on specimen stub. For the position, see Figs. 33 and 3-4, ( wssrmun_f om ell » l ‘Specimen svcren J SS sa sno eet Fig. 3-3. Specimen Height Adjustment (specimen stub 60 mm dia., 125 mm dia.) 3-13HL OPERATION 3-14 telecon soni sonnei / 26 mm dis. L es » sce Ss i ~~Specimen _d aarey — sy iran rn a Fig. 94 (A) Specimen Height Adjustment (specimen stub 26 mm dis., 15 mm dia.) (10) The working distance can be reduced to § mm by carrying out the specimen height adjustment as in the following figure. But since there are a number of restrictions, the adjustment procedures given in Figs, 33 and 3-4 should normally be followed (with minimum working distance of 10 mm). Only when a higher resolut on is required for performance check of the instrument, ec, shauld the procedure described in the figure below be sec. The working distance at this time can be read from the yellow scale (Z control scale) shown in Fig. 2-8. eign gauge Specimen Hin resolution adjustrent — A —p Position Specimen stubs UiSem aie) > scocimen ‘Speciran tae (91) oer (217 [soecimen wrtsor (1) 77 Fig. 3-4 (B) Specimen Height Adjustment (specimen stub 15 mm dia., high resolution observation) NOTES: 1. Make sure to pull out the backscattered electron detector so it won't be damaged. This means that only an SE (secondary electron) image can be observed in the ‘SEM mode (high vacuum mode) 2. Only a specimen stub of 1mm dia. (P/N 433-3702) is Usable. A specimen stub of larger diarnoter may strike the backscattered electron detector even with the detector pulled out 3 Donot tilt the speci 10mm, ata working distance belowIL, OPERATION {11} Mount the specimen holder to the standard stage, introduce the stage into the spacimen chamer and turn the EVAC/AIR switch to EVAC. by oressing NOTE: The stage must be pushed in with Z (WD) at 10 to 35 mm and T at 0° when the BSE detector is introduced, (12) Wait about 3.or 4 minutes until the HIGH lamp is lt 921991 (13) The READY lamp stars fliccering and then (after about 1 min) stays li. Press tho ACC VOLTAGE ON/OFF switch to apply accelerating volt ‘age and observe an image. 921493 32-3 With Large-Size Stage (1) Press the ACG VOLTAGE ON/OFF switch to turn off accelerating voltage. 921495 (2) Before drawing out the large-size stage, sat each control as fobiows. x 40mm y : 25mm T ° R Free z 20 mm " 921595 (3) Press the EVAC/AIR switch to sot the AIR status. (4) Pullout the stave1h, OPERATION 3-16 © 6 m 8) Remove the speciman holder Flomave the specimen stub for the previous observatian from the specimen holder Wount 2 new spacimen on the specimen stub. Fix the specimen stuo securely on the specimen holder. Specimen stub Specimen swe ‘Specimen sub 325 mm dia sommeia sommdia 598.1278 538-1285, 433.3702 —_- 586-1087 Leck bate 5s1-1782 G- i [ (2) amen! cin Heli an Span ab Te eae eet ‘Specimen holder 538-1206 FS ca Specimen stub so mmdie, cia pe pone sat-1262 ‘Specimen holder 5381286 Spacer exclusive for Targosivestooe 526-1237 T (8) Composition of Specimen Holder and Specimen Stub (for high resolution sorting with lrpesizestagel Fig. 35 Composition of Specimen Holder and Specimen StubUL, OPERATION (3) Adjustment of specimen height ‘Aajust the height of the specimen mounted on the specimen stue to the height gauge as shown in Fig. 3-6 NOTE: The high resolution setting mentioned in (8) of Fig. 36 cannot be made while using the 125mm dia, specimen stub {PIN 538-1278). Nove that at the high resolution setting, neither specimen tilt nor observation with the backscattered, ‘electron detector inserted can be done, Height anuge (tor large aoe) Specimen 7] sono 7 ‘on Holcersorew 2” [> soectmen holder (A) Specimen height adjustment (standard seting) Height gauge or lovee stage) / ib soscinan su | ot son 2 sion Specimen holder Son: echo ora Sele sae —_ (8) Specimen height adiustment {high revolution sorting) Fig. 6 Specimen Height Adjustment 3-17IIL, OPERATION (10) Mount the specimen halder to the large-size stage, introduce the stege into the specimen chamber and turn the EVAG/AIR switch to EVAC. by pressing NOTE: The stage must be pushed in with Z (WD) 10 to 35 mm and T ai 0° when the BSE dezector is introduced 921593, [T1) Wait about 3 or 4 minutes until the HIGH lamp i lt “The READY lamp starts ‘lickering and then {after about 1 rin) stays li Press the ACC VOLTAGE ON/OFF switch to apply accolerating voltage and observe an image. c92149333 IMAGE OBSERVATION il, OPERATION 3-3-1 Condition Setting in SEM Mode (high vacuum mode) in the SEM mode, @ secondary electron image or backscattered electron image can be observed, m 2 3 912907 Frome disp'y (A) oF 18) a TLIVEY For observation of SE image (secondary electron image), it is recom ‘mended to pull out the BSE detector, since specimen can be moved without being restricied by the detector For pulling out the detector carefully draw it with both hands until the stopper functions. “The BSE detector need be intcosuced for observing BSE images, Before introducing the detector, rake sure the specimen stage is set at WO 10 10 35 mm and T 0”. Then release the stopper and push in the detector carefully with both hands. Tho stopper can be released by Aifting it lightly with a fingor. Introduce the BSE detactor completly for observation of an elemental composition image, and introduce the detector halfway and seoure it by the knab for observation of 2 topographic image. The Z {WD} control should be set within a range of about 15 to 35 mm for observation of topograchic image. The topographic effect on this image varies with speciman position IWWD) and detector position, So select ‘optimum position depending on specimen. Select the LIVE status by the F1 (LIVE/FREEZE} key (LIVE display ‘will appear at the top right of flicker-free image CRT) When the DISPLAY POWER switch is turned on, the LI set NOTE: Control panel keys ate inoperable unless LIVE is cisplayed, status is 3-19Wl, OPERATION (5) Press the F2 (VACUUM SET) key, and the VACUUM SET menu in the figure at left will appear on the CRT. wacom Select MODE by moving the cursor with the (7) or () key, 7 ‘Spleot SEM by moving the cursor with the E} or 3 key. + Press the [el key 6 Select DETECTOR by moving the cursor with she (For DD key. z ‘Select SE for ebsorvation of secondary electron image or BSE for observation of backscattered electron image by moving the cursor with the E) or key : + Press the [a] kev. ‘The SE or BSE lamp on the SEQ pane! lights up. a Select EXIT by moving the cursor with the key. 0 Press the Gi) ke. Or press the F2 key, and the VACUUM SET manu will disappear (8) Make the following settings of the switches inside the sub-panel ‘© POST HY switch turned on {this lights POST HV lamp) © SIGNAL switeh sot to SE (9) Set the beam current ( F10) at around [160] (For setting of the beam current, refer to “Beam current and image duality” in Table 34)