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39

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CVD PVD .
Al2O3 CrN Ti(Al,N) Ti(C,N) TiC TiN .

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Page 2

Ti(C,N)-TiN
(C,N)- Al2O3 -TiN

(TiN,Al)N-WC/C) TiN-Ti .

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Page 3

) (Super Lattice . .
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Page 4

:TiC

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Ti(C,N) , TiN Al203 .
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TiN PVD CVD TiN .

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TiN Ti2N Ti2N . TiN .

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Page 5

):((Ti,Al)N
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