Professional Documents
Culture Documents
03 - 2007
Nguyn Vn n(2)
(1)Trng i hc An Giang
(2) Trng i hc Khoa hc T nhin, HQG-HCM
(3) HQG-HCM
(Bi nhn ngy 16 thng 09 nm 2006, hon chnh sa cha ngy 22 thng 01 nm 2007)
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2. M HNH M PHNG
2.1. Qu trnh phn x vt liu
Trong qu trnh phn x, do cc ht chuyn ng ng thi v ngu nhin nn rt kh m t qu
trnh bng mt vi cng thc ton hc n gin. Vi vic m phng bng my vi tnh, chng ta c kh
nng c lng c cc mi quan h gia cc tnh cht mng v cc iu kin thc nghim. Phng
php Monte Carlo (MC) ni chung gm mt s lng rt ln cc s kin ngu nhin to ra mt cng c
hu hiu vi mt t gi thit m phng qu trnh ny.
T mc tiu trn, vic nghin cu c tin hnh vi m hnh sau:
Phn x v cc iu kin m phng:
Bia:
Al, Al2O3
ng knh bia:
75 mm
50 mm
Si, SiO2
Kh phn x:
Ar:O2 ~ 10:1
10 Torr
2
10 10 Torr
p sut phn x:
dJ
E
=C
dE
( E + Eb )2
(1)
E0 =
( kEbom
k=
E b . 1E/ 2
+ Eb ) /( k .E bom ) 1E/ 2
4.m.M
( m + M )2
(2)
(3)
/ 2 dJ
dJ
d =
d
0
d
d
(4)
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0 = 2...
(5)
= .n g ( R g + R p ) 2 1 +
Tg M
Tp m
(7)
Bia
Trc khi n b mt , mt ht vt liu phi tri qua mt chui cc va chm ngu nhin nh trn.
Nu gi l gc to bi ng ni tm ca hai ht v hng chuyn ng trc ca ht vt liu ti
thi im va chm, bin thin hng bay v nng lng ca ht vt liu c tnh theo:
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m. sin( 2)
M + m. cos( 2)
= arctan
=
Vi
E post
E pre
( M m) 2 . cos 2 + ( M + m) 2 sin 2
( M + m) 2
= arcsin 2
(8)
(9)
(10)
M phng qu trnh chuyn ti mi ht c thc hin lin tc, qu o c theo di cho n khi
n that ra khi min lm vic hoc nng lng cn li nh hn nng lng kh lm vic hoc n c
.
Cc kt qu c ghi nhn khi ht n c bao gm v tr n, nng lng v gc ti.
2.3. Phn on lng ng
T kt qu cc phn b nng lng v gc thu c trn ca cc ht n , chng ta c th xem
xt qu trnh lng ng. Mt din tch nh c chn tm ca c kch thc 100 x 100 x 20 n v.
Mi ht lng ng c xem nh mt hnh cu c ng knh n v c t ngu nhin vo ta
(x,y) ca ma trn hai chiu 100 x 100. Ch cc ht c gc ti thch hp (nh hn hoc bng 600) mi c
kh nng to mng. Chng ta gi thit l c mt gii hn khuch tn b mt khi ht n mt v tr c
chn ngu nhin c ta (x,y,z(x,y)) n c th li hoc khuch tn n mt trong cc v tr gn
nht gim thiu nng lng di dng nng lng lin kt. Do , hnh vi ca ht c th l khuynh
hng khuch tn n v tr thch hp ln cn tun theo mt ro nng lng Vs nhm hn ch s
khuch tn ty tin.
i vi Vs ln, ht vt liu li ni m n ri vo, iu ny c gi l m hnh lng ng ngu
nhin. Ngc li, ht c th khuch tn n mt trong tm v tr so vi v tr ri: trn tri, trn, trn phi,
tri, phi, di tri, di, di phi hoc li v tr c vi mt la chn ngu nhin. Nh vy c 9 kh
nng tng ng vi 9 v tr ln cn nhau. K hiu z(x,y) ch cao ca cc lp lng ng ti v tr
xc nh (x,y). Xc sut khuch tn n mt trong cc v tr ni trn ph thuc vo nng lng ca cc v
tr ln cn, ht c khuynh hng ri vo ni c nng lng thp nht ri mt mt phn nng lng cho
s khuch tn v nng lng lin kt b mt. S khuch tn ny c th duy tr cho n khi nng lng
ht t cc tiu. Tuy nhin, trong bi vit ny, chng ta gi thit s khuch tn xy ra nhiu nht l 02
cp. Cc hnh vi nh trn ca ht cng hm v hiu ng che ph v b qua s ti pht x.
Kt qu ca m phng phn on ny l ma trn 3 chiu lu tr cc v tr ht lng ng trn cc
lp v mt ma trn ba chiu khc lu tr nng lng d ca mi v tr. T , chng ta c th trch xut
hnh thi, nng lng d v xp ca mng. M hnh da trn cc gi thit tng t cng c cc
tc gi khc cng b trong [1, 8].
3. KT QU V BN LUN
So snh th phn b s ht theo nng lng t m phng 100000 ht vi cc kt qu tng t ca
cc tc gi khc cng b, chng ta c c s ph hp tt, chng hn i vi Ti (hnh 3), do cc
kt qu i vi Al c th p dng c vo thc nghim.
Cc ht n bia khuch tn trn b mt theo nhiu cch. Do , phn b dy mng l rt quan
trng cn cho m phng v thc nghim. T cc kt qu thu c, c th trch xut hnh thi mng
Al2O3 (hnh 5).
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10000
9000
7000
Xc sut
Target: Metalic Al
Ebombardment: 450 eV
Empty Squares
8000
Target: Metalic Ti
Ebombardment: 450 eV
Filled Circles
6000
5000
4000
3000
2000
1000
10
15
20
25
30
35
40
45
50
Hnh 3. Phn b s ht theo nng lng 100000 ht phn x Al v Ti (tri) v kt qu tng t [8] vi mi
trng Ar v nng lng bn ph c 440 eV (phi).
Qu o M Phng ca 500 Ht Al Phn X
45
Target: Al
Pressure:0.5 Pa
Voltage: 500 VDC
Rate: 7.6%
40
T arg et S ub stra te D is ta nc e 4 0m m
Khong
T a rg e t S uCch
b s tra te DBia
is ta n
c e
4 0 m m40 cm
50
35
30
25
20
15
10
5
45
Target:Al2O3
Pressure: 0.5Pa
Voltage: 500 VDC
Rate: 1%
40
35
30
25
20
15
10
0
0
-5
-40
-30
-20
-10
10
Target Diameter
B Mt Bia
20
30
40
-40
-30
-20
-10
10
20
30
40
Target Diameter
B Mt Bia
Hnh 4. M phng qu o ca 500 ht Al (tri) v Al2O3 (phi) trong min khng gian phn x. T l t n bia
i vi Al c 8% v i vi Al2O3 c 1%.
4.KT LUN
Thun li chnh ca m phng bng my tnh i vi qu trnh phn x l hu nh cc tham s u
c th c tin hnh. iu ny lm gim ng k thi gian v chi ph nghin cu.
Mt s kt qu ban u c rt ra nhm thu hp phm vi thc nghim v lm tin cho vic to
mng:
Cc ht phn x c nng lng tp trung vo c 10 20 eV, cc nng lng c bit cao c s
lng rt thp.
p sut thp 0.3Pa, in p phn x 500 VDC t s n c bia i vi cc ht Al c 8% v cc
ht Al2O3 ch c 1% v c s ht tun theo phn b nng lng tng t nh lc ri bia nhng vi gi tr
cc i thp hn, cc kt qu ny ph hp vi [10]. Phm vi p sut thun li l 0.1 0.5 Pa.
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