Nguyn Vn -c kh 11-K53

Handbook of advanced ceramic machining H v tn:Nguyn Vn Lp:c kh 11-K53 Page:65-71 3.2.3-nt mt bn v b gy vn Trong khi cc vt nt trung bnh hoc vt nt xuyn tm c kt hp vi gim bn,cc vt nt bn cnh c th dn n loi b vt liu.vt nt bn cnh (xem hnh 3.1)bt u ti thi im y vng do,v sau lan truyn theo chiu ngang trn mt mt phng gn nh song song vi b mt mu vt. lch ca vt nt hng v mt t do c th gy ra hng vt liu do gy(v).s nh hng khi ta t 1 lc P ln chi tit c chiu di vt nt bn cnh Cl c tnh bng s dng l thuyt tm n gin[15].nu h l khong cch t mt t do ti vt nt ca chi tit ,v chiu di ca vt nt ny Cl>>h[15] : Cl=CL[1-(P0/P)1/4]1/2 Trong :P0 (3.15)

, A l cc hng s.im tip xc t lc ln(P>>P0),theo cng thc (3.15) ta gim P trung bnh/xuyn tm. Cl8/5,tng t cho cc dng vt nt

Gii hn lc nh nht ca vt nt bn cnh chi tit c tnh bng biu thc,Pl*,v c suy ra t [14,45]: Pl*= (Kc4/H3)f(E/H). Trong (3.18)

l hng s khng th nguyn v hm f(E/H)l hm

khng n nh,nh vy .f(E/H) 2x105.Gi tr cho Pl* c th so snh vi gi tr tI trung bnh bnh thng c th d on

Nguyn Vn -c kh 11-K53

xem c ch gy bn cnh hoc l ph hy do.v d,cc lc bnh thng khi ta t cho mi ca silicon nitride thiu kt(hnh 3.1)s nh hn c tnh ca tI l 30N,trong s l chy do thay v nt bn cnh.trong ,d tnh gii hn lc cho vt nt trung bnh (3N for silicon nitride[9]) l nhiu hn so vi vt nt ngang,

M cho thy rng mi do d to ra vt nt trung bnh v bn gim mnh. kch thc ca vt nt ngang ny c th tnh c bng s nh gi mi mn[45].gi s lng mi b loi b di tc dng ca tI trng bnh thng P nh trong hnh 3.8 l t l thun vi kch thc ca vt nt bn cnh v chiu di di chuyn l,tng th tch b loi b l

Nguyn Vn -c kh 11-K53

Trong l l hng s.biu thc ny c dng vi gii hn mi mn ca vt liu ceramic ch mc ch ph hy nh[45,46].bng chng ca s ph hy vt liu bi vt nt bn cnh c quan st trn rnh try xc. Ngoi vt nt bn cnh,s ph hy vt liu do gy cng lin quan ti s va p[32,47-49].s va p trc v di s lin h gy do ch hn hp thu c t ng sut phng v ng sut ct[29].gii hn ca s va p M hnh ny sau thnh cng c d on l su nghin cho n im mi ca knh,nhng theo d on su nghin cho HPSN[49].nhng khc bit ny c th lin quan n cc gi nh ca mt min ng sut n hi.tp trung bin dng do,cI ny c th quan trng cho cc nitrua silic,s lm gim cng ng sut v chiu su nghin. 3.cch tip cn s gia cng Thng bao gm i lng o ca lc ct v nng lng cng vi nh t vi ca mnh mi vn v b mt trng thI hnh hc ca n.mc d nh t vi cung cp bng chng quan trng v u th ca c ch mi,bt k m hnh vt l tng tc ca phI mi phI k n ln ca nng lng mi v ph thuc vo ch lm vic . 3.3.1 Mnh vn mi Kho st cc mnh vn mi ca vt liu khc nhau nh gin[33,5053] cho thy loi b vt liu ch yu l do s gy gin.v d nh t vi SEM ca mnh vn mi tch t cho gii hn phn ng nitru silic(RBSN) di y vi khong 400 mnh vn nh trong hnh3.9.cc mnh v ny bao gm

Nguyn Vn -c kh 11-K53

ch yu l cc ht hnh tm tng i ln(hnh 3.9a)m dng nh b gy t phi bi vt nt bn cnh,v nhiu ht mn hn(hnh 3.9b) m c th c to ra bi mi.cc ht hnh tm thng c rnh mi mt bn nh trong hnh 3.9a.cc rnh c th c to ra ngay lp tc hoc trc khi ht nt t phi trc khi mi. cc mnh v mi hnh thnh c nghin cu vi nh t vi[50].Nhiu ht nh c quan st ngay khi bay ra trc v sau cc mnh vn,iu ny cho thy s phnb ca vtliu bi vt nt bn l cc ht nh hn.Nghin(s nghin vn)c th cng phI chu trch nhim cho cc ht mn nh hn(dng bt) bn di cc rnh[54,55].bn cnh cc ht d gy gin,tip tc loi ht nh mn cng c quan st ngu nhin tc mi cao v chiu su ct nng[50,56],m s ch ra dng chy do. 3.3.2 nh t vi ca rnh mi v b mt y y l chi tit bc nh ca c ch chi tit c quan st gv pht trin t nh t vi ca vt,rnh mi do ht n im trong qu trnh mi gy ra.

Nguyn Vn -c kh 11-K53

a)

Nguyn Vn -c kh 11-K53

b) hnh 3.9: mnh vn mi,RBSN(coors/eaton) 400 mnh vn mi(notron)[65].a)

Nguyn Vn -c kh 11-K53

Hnh 3.10 ch ct ca silic Rnh th nghim c thc hin bng c nh chiu su ct trn nitrua silic[32] v nhm [58]cho thy s r rng ca dng chy do,nt bn v mnh v dc theo ng rnh,mi bn di v pha trc ca dng c ct th chiu di ct tng.tuy nhin, trong thc t nht l qu trnh mi,chiu su ct tng nhanh khi cc ht mi i qua khu vc mi.trng thi ny c m phng vi ct n im ca phi nghing theo hng ct. ct nghing n im ca silic v gecmani[61],ban u dng chy do dn dn thay i d gy gin sau chiu su gii hn ca vng

Nguyn Vn -c kh 11-K53

ct t c(hnh 3.10).cc lc bnh thng tng tuyn tnh vi khong cch(chiu su ct)trong trng thi do,v sau thay i v gi tr thp hn v gy nt xy ra. Mi gm v s cc vt xc v s tng tc gia cc vt xc lin k nhau.s nh hng ca tng tc gia cc vt xc lin k trn loi b vt liu c kho st trn nhm p nng bng lot cc vt sc song song vi khong cch t 0-250mm [64].Cc kt qu hnh 3.11cho thy s ph thuc ln vo khong cch,cng nh ti trng t ln.Hoc khi khong cch qu ln cc vt try xc khng tng tc hoc nh chng ln nhau,loi b vt liu l tng i nh. khong cch trung gian,loi b tr ln ln hn.

Nguyn Vn -c kh 11-K53

Hnh 3.11 Material removed per unit length versus distance between scratches. (From Xu, H.H.K.,Jahanmir, S., and Wang, Y., J. Am. Ceram. Soc., 78, 881, 1995. With permission.) nh t vi SEM nh trong hnh 3.12 cho bit b mt y HPSN vi 180 bnh mi trc khi khc(hnh 3.12a)v sau khi khc(hnh 3.12b)vi axit HF[65].mc d mt s khu vc b gy c th thy c,nh l b mt y dng chy do lin quan theo hng mi.tuy nhin sau khi khc,nhiu rnh mn hn bin mt trongkhi rnh to bi bt mi vn nhn thy c.b mt y ca nitrua silic c khc bng axt HF dng nh loi b s dnh bn ca lp thy tinh.s hnh thnh vt liu thy tinh trn b mt trt nitrua silic c th l do phn ng xi ha kh[66]:

Oxit silic lp thy tinh cng c xc nh trn mt y b mt silic[67] bng cch s dng nng lng tn sc quang ph.

Nguyn Vn -c kh 11-K53

Nguyn Vn -c kh 11-K53