September 2011

OPTION: VACUUM COMPATIBILITY

high vacuum (HV) ultra-high vacuum (UHV and UHV-T)
SmarAct positioners are designed for normal atmosphere pressure. However, most positioners can be prepared to work in vacuum, high-vacuum (HV) or ultra-high vacuum (UHV). Please add the according option (-HV, -UHVT, -UHVT) to the order code of the positioner.
Option normal Pressure atmosphere Properties Teflon insulated wire vacuum compatible grease micro- and nanosensors Teflon insulated stranded wires with braid vacuum compatible grease feedthrough with o-ring nanosensors Teflon insulated stranded wires with braid special friction materials no blind holes special glue feedthrough welded into a flange nanosensors electronics outside chamber Kapton insulated stranded wires special friction materials no blind holes special glue feedthrough welded into a flange nanosensors electronics outside chamber

HV

down to 10-6 mbar

down to 10-10 mbar * UHV-T bake-out temperature 150C *

down to 10-10 mbar * UHV bake-out temperature 150C *

UHV and UHV-T positioners are delivered without evacuation and bake-out process. This must be done at the customer's site.

feedthrough welded into a flange plugs are from stainless steel

positioners with integrated nanosensors prepared for UHV operation

SmarAct GmbH Floetenstr. 70 D-26125 Oldenburg www.smaract.de Tel.: +49 (0) 441 8008 79-0 Fax: +49 (0) 441 8008 79-21 eMail: info@smaract.de

September 2011

Set-up for a positioning system in a vacuum chamber

In the picture below you can see a standard set-up for a positioning system in a vacuum chamber. The feedthrough provides an electrical connection between the positioning system and the controller. The sensor module behind the feedthrough reads the sensor data of the positioning system, digitizes and serializes the data, so that the controller can be up to 10m away from the chamber (up to 40m on request)

feedthrough

cable length from positioner to sensor module should be as short as possible (max. 100cm)

sensor module vacuum chamber

cable length up to 10m (40m on request) MCS controller

If you don't need an internal sensor feedback the sensor module can be omitted. You can than choose between the different controllers like HCU, MCS, or AVC according to the required resolution.

SmarAct GmbH Floetenstr. 70 D-26125 Oldenburg www.smaract.de Tel.: +49 (0) 441 8008 79-0 Fax: +49 (0) 441 8008 79-21 eMail: info@smaract.de

September 2011

Feedthrough Options
The feedthrough for a positioning system depends on the level of vacuum, on the number of positioners and on the available flange. For each open-loop positioner we need two pins (HVOUT and HV-GND) and for each positioner with integrated nano sensor we need at least 10 pins. We recommend to use 12 pins, so that we can connect to the calibration of the sensor (SSCL, S-SDA). There are three variants of feedthroughs for single positioners that are all compatible regarding the gender, the pin layout and the tappets.

High vacuum
controller

positioner

male female male female 1 tappet 2 tappets same side red point opposite to red point 14 pin Lemo feedthough with Lemo plugs

Ultra-high vacuum, Lemo plugs

The UHV feedthrough is available as single feedthrough or welded into a flange.

controller positioner male female male female 1 tappet 2 tappets same side red point opposite to red point 14 pin UHV feedthough with Lemo plugs

Ultra-high vacuum, steel plugs

The UHV feedthrough is available as single feedthrough or welded into a flange.

controller positioner male female male female 1 tappet 2 tappets opposite to red point opposite to red point 14 pin UHV feedthough with stainless steel plugs

SmarAct GmbH Floetenstr. 70 D-26125 Oldenburg www.smaract.de Tel.: +49 (0) 441 8008 79-0 Fax: +49 (0) 441 8008 79-21 eMail: info@smaract.de

September 2011

LEMO feedthrough for HV option

LEMO feedthrough

LEMO plug, vacuum side, rectangular or straight possible

LEMO plug, atmosphere side, straight

DN40CF flange

For vacuum level down to 10 -6 mbar LEMO feedthroughs are used. These feedthroughs use an o-ring and are tightened by a screw nut from the vacuum side. Here you see a DN40CF flange with a hole of 16.1mm for a LEMO feedthrough. The atmospheric plug is always straight. Our standard delivery for the vacuum plug is right-angle. If you prefer to have a straight plug in the vacuum chamber please add a -GG to the order code. We deliver the complete system containing the atmospheric plug, the vacuum plug, the feedthrough and the complete cabling. We can deliver the according flange on request. Order code
LEMO-VF-CON-6 LEMO-VF-CON-14 LEMO-VF-CON-16 LEMO-VF-CON-32

number size of pins

6 14 16 32 1B 1B 2B 2B

used for
up to three open-loop positioners one positioner with integrated nano sensor one positioner with integrated nano sensor up to three positioners with integrated nano sensor

The size 1B needs a hole with a diameter of 12,1mm in the flange where it could be tightened. The hole for the 2B series needs a diameter of 16,1mm in the flange.

SmarAct GmbH Floetenstr. 70 D-26125 Oldenburg www.smaract.de Tel.: +49 (0) 441 8008 79-0 Fax: +49 (0) 441 8008 79-21 eMail: info@smaract.de

September 2011

UHVT and UHV feedthroughs

For vacuum level below 10-6 mbar we recommend to use feedthroughs welded into a flange. As a standard, we use one feedthrough with 14 pins for each positioner.

DN40CF flange with four feedthroughs

detailed view of the welded feedthrough

We deliver the complete system containing the atmospheric plug, the vacuum plug, the feedthrough welded into the flange and the complete cabling. Order code
ALB-VF-SJG-CONUHVT-10 ALB-VF-SJG-CONUHV-10 ALB-VF-SJG-CONUHVT-14 ALB-VF-SJG-CONUHV-14 ALB-VF-SJG-UHVTCON-28 ALB-VF-SJG-CONUHV-28 ALB-VF-SJG-CONUHVT-42 ALB-VF-SJG-CONUHV-42 ALB-VF-SJG-UHVTCON-56 ALB-VF-SJG-UHVCON-56 ALB-VF-SJG-UHVT-

number min. flange used for of pins size

10 10 14 DN16CF DN16CF DN16CF up to three open-loop positioners (-UHVT) up to three open-loop positioners (-UHV)

used materials for the plug (vacuum side)

brass, nickel, chrome stainless steel

one positioner (-UHVT) brass, nickel, chrome with integrated nanosensor (-S) one positioner (-UHV) with integrated nano sensor (-S) two positioners -S-UHVT two positioners -S-UHV three positioners -S-UHVT three positioners -S-UHV four positioners -S-UHVT four positioners -S-UHVT five positioners stainless steel

14

DN16CF

28 28 42 42 56 56 70

DN40CF DN40CF DN40CF DN40CF DN40CF DN40CF DN63CF

brass, nickel, chrome stainless steel brass, nickel, chrome stainless steel brass, nickel, chrome stainless steel brass, nickel, chrome

SmarAct GmbH Floetenstr. 70 D-26125 Oldenburg www.smaract.de Tel.: +49 (0) 441 8008 79-0 Fax: +49 (0) 441 8008 79-21 eMail: info@smaract.de

September 2011

CON-70 ALB-VF-SJG-CONUHV-70 ALB-VF-SJG-CONUHVT-84 ALB-VF-SJG-CONUHV-56 ALB-VF-SJG-CONUHV-168 70 84 56 168 DN63CF DN63CF DN63CF DN63CF

-S-UHV five positioners -S-UHV six positioners -S-UHV six positioners -S-UHV twelve positioners -S-UHV stainless steel brass, nickel, chrome stainless steel stainless steel

SmarAct GmbH Floetenstr. 70 D-26125 Oldenburg www.smaract.de Tel.: +49 (0) 441 8008 79-0 Fax: +49 (0) 441 8008 79-21 eMail: info@smaract.de

September 2011

D-SUB feedthroughs for UHV applications

We could equip the positioning system with D-SUB plugs with ultra high vacuum compatibility. DSUB feedthroughs are available for many flanges.

DN40CF flange with a D-SUB15 feedthrough We deliver the complete system containing the atmospheric plug, the vacuum plug, the feedthrough welded into the flange and the complete cabling. Order code
ALL-VF-CON-15

number min. flange used for of pins size

15 DN40CF

used materials for the plug (vacuum side)

one positioner (-UHVT) body material: PEEK with integrated nanosensor (-S) or up housing (optional): aluminium to three open-loop positioners one positioner (-UHV) with integrated nanosensor (-S) or up to three open-loop positioners body material: PEEK housing (optional): alumium

ALL-VF-CON-UHV-15 15

DN40CF

D-SUB connectors only, if feedthrough already exist

ALL-CON-15 15 DN40CF one positioner (-UHVT) body material: PEEK with integrated nanosensor (-S) or up housing (optional): aluminium to three open-loop positioners one positioner (-UHV) with integrated nanosensor (-S) or up to three open-loop positioners body material: PEEK housing (optional): aluminum

ALL-CON-UHV-15

15

DN40CF

SmarAct GmbH Floetenstr. 70 D-26125 Oldenburg www.smaract.de Tel.: +49 (0) 441 8008 79-0 Fax: +49 (0) 441 8008 79-21 eMail: info@smaract.de

September 2011

Sensor Module Options

If there are positioners with integrated nano sensors, you need a sensor module for reading the sensor values of the positioners. Each sensor module can handle up to three positioners and we offer different options, how to connect the modules.

Sensor Module with D-SUB15 plugs

The Sensor Module can be delivered in a standard housing, where up to three positioners can be plugged via D-SUB-15 plugs. It is very flexible since single positioners can exchanged by unplugging / plugging them. The dimensions are 55x83x20mm (without connectors). The order code of this sensor module is MCS-3S-DS15.

Sensor Module mounted onto LEMO plug

We could mount the sensor module directly on the according plugs at the atmospheric side of the feedthrough, so that there is no extra cable between feedthrough and sensor module. The MCS-3SLEMO2B is used for the high vacuum option, where we use the LEMO-VF-CON-32 feedthrough.

Two MCS-3S-LEMO1B sensor modules with two LEMO 1B plugs on a DN40CF flange for connecting two -UHV or -UHVT positioners to each sensor module.

SmarAct GmbH Floetenstr. 70 D-26125 Oldenburg www.smaract.de Tel.: +49 (0) 441 8008 79-0 Fax: +49 (0) 441 8008 79-21 eMail: info@smaract.de