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Abstract- AMHS (Automated Material Handling System) ven- source location (from), then transported by AMHS and
dors are being expected not only to offer transport capabilities finally erased at a destination location (to). By executing
but also to guarantee its contribution to entire fab productiv-
ities. One of essential techniques for realizing this is estima-
this type of simulations, we can find bottlenecks in AMHS
tion with using simulation studies prior to installation of and make countermeasures prior to installation of AMHS
AMHS into a fab. However traditional framework of AMHS (Fig.2).
simulation cannot enable to estimate entire fab productivities.
This paper describes a new simulation framework for estima- AMHS layout From-To table
AMHS
tion of entire fab productivities, which describes what should parameters
196
takt can-be-overlapped
10
Q ueue T im e * Process
time process time
8
takt can-be-overlapped
time process time 6 S equencial
R ate
4 C oncurrent
takt can-be-overlapped
time process time 2
takt can-be-overlapped 0
time process time 0 50 100
T ool U tilization (%)
Fig. 5 ’Takt time’ and ‘can-be-overlapped process time’ of a process time
4 3LP s
197
simulation cases, we propose three phase simulation stud- [4] H. Kondo, T. Egawa and S. Nakamura, “Combination Bottlenecks in
ies. In the first phase, we do simulation studies with using full automated Fab and its countermeasures.” Proceedings in Interna-
tional Symposium on Semiconductor Manufacturing – ISSM, Sept.
models that do NOT include AMHS model modules. In this 2003, pp.279-272.
phase, we check and solve throughput and fab cycle time
issues and get from-to table as one of simulation results. In [5] SEMI E87-0706 Specification for Carrier Management (CMS)
CONCLUSIONS
AMHS vendors are being expected not only to offer trans-
port capabilities but also to guarantee its contribution to
entire fab productivities. But traditional AMHS simulation
framework cannot say anything about fab productivities
due to lack of production tool models. In this paper, we
described a model framework for advanced simulation that
can predict fab productivities. We also pointed out some
techniques that contribute to efficient simulation studies.
We expect that this framework enable us to estimate tool
utilizations, required storage capacities and via-stocker
ratios, and helps us to propose more optimized configura-
tions of AMHS to our customers.
REFERENCES
[1] Wallace J. Hopp, Mark L. Spearman, “Factory Physics – Founda-
tions of Manufacturing Management SECOND EDITION” New
York: McGraw-Hill, 2000, especially Section 8.6.7
[2] H. Kondo, “Study for realizing effective direct tool-to-tool delivery.”
Proceedings in International Symposium on Semiconductor Manu-
facturing – ISSM, Sept. 2005, pp.21-24.
[3] H. Kondo, “Requirements for AMHS in 450 mm era.” Proceedings
in International Symposium on Semiconductor Manufacturing –
ISSM, Sept. 2006, pp.189-192.
198