1

Bi thc tp 1

TO MNG BNG PHNG PHP BC BAY CHN KHNG

I. Tm tt l thuyt

1. nh ngha
Bc bay chn khng l phng php to mng bng lng ng hi vt l
(PVD Physical Vapor Deposition) n gin nht. Hi vt liu cn ph c sinh
ra v bc ln khi nung nng ngun vt liu, di chuyn qua mi trng chn
khng trung gian v cui cng lng ng trn b mt .
Cc qu trnh to mng kim loi trn rn:
S nng chy v bay hi vt liu t ngun bay hi
S di chuyn ca hi kim loi t ngun bay hi n b mt
qua mi trng p sut thp
S hp th cc ht trn
S phn b li cc ht v ti kt tinh trn b mt

2. Cc phng php bc bay
Cc phng php bc bay phn loi theo ngun bay hi:
Phng php t nng in tr
Phng php chm in t
Phng php t nng bng bc x
Phng php h quang
Phng php laser

3. Vt liu bay hi
Vt liu bay hi c th l kim loi, bn dn, hp kim, hp cht, dng
khi, bt hoc lng
Kim loi s dng to mng trong bi thc tp ny l nhm (Al) vi cc
thng s sau:
Khi lng nguyn t: 27g.mol
-1

Khi lng ring: 2,7g.mol
-1
.cm
-3

Nhit nng chy: 930K
Nhit si: 2770K
Ev T = 1460K v Ev p = 7,9Torr
Trong : Ev T v Ev p l nhit v p sut hi ti tc
ph mng t 25A
0
/s (khong cch ngun 10cm, din tch
b mt 1cm
2
)

4. S mt h bc bay chn khng tng qut
Mt h bc bay chn khng gm 4 b phn chnh:
H bm chn khng
Bung chn khng (cng l ni tin hnh bc bay)
Ngun nhit
2
H c nh v iu chnh nhit



5. Nguyn tc bc bay
H bm chn khng s to mi trng p sut thp cho bung. Ngun nhit
cung cp nhit cho vt liu cn bc bay. Khi nhit ca vt liu ny bng nhit
hi bo ha ca chnh vt liu p sut ca bung chn khng, vt liu s
ha hi. Hi vt liu s di chuyn qua mi trng chn khng v tun theo nh
lut Cosin ti ph mt lp mng mng trn . Mi trng chn khng gip gim
thiu s tng tc v phn ng gia nguyn t hi vt liu v phn t kh.

6. Tc bay hi
Tc bay hi ca vt liu c xc nh t biu thc:
2
1
'
) (
4
1
4
1

= TM p k nv

Trong :
n: mt nguyn t kh
v: vn tc nguyn t kh
k

= k.b c xc nh t thc nghim bng 9,55.10

22

k, b: cc h s t l
p: p sut hi bo ha ca vt liu nhit tuyt i K
M: khi lng nguyn t kh

II. Thc nghim

1. Ni dung thc tp
To mi trng p sut thp trong bung chn khng
Bc bay to mng kim loi nhm trn thy tinh
3
2. B tr th nghim
Bung chn khng: lm bng thy tinh ng knh 22cm, cao
40cm, dng duy tr chn khng khi bc bay
H bc bay: gm 2 in cc t gn nhau
H to chn khng: gm bm p sut, bm khuych tn du
H o p sut bao gm:
p k c dng o p sut trn 1 Torr
p k cp nhit in dng o p sut di 1 Torr
Bin p s cp: ng vo l dng xoay chiu 220V cng sut 10K,
ng ra t 0 n 205V.

3. Chun b mu
Mu l lam thy tinh trong sut, c x l b mt bng cch ngm trong
dung dch NaOH, ra li bng nc, lau kh bng vi mm, ra li bng x phng,
lau li bng aceton, sau em sy kh gii hp hi nc, loi b tp cht.

4. Cc bc tin hnh
a) Chun b
V sinh y bung tht k.
t si nhm lng vo trong dy vonfram.
ng bung chn khng li, bt u ht chn khng.
b) Tin hnh
b1> To mi trng chn khng
Bt cu dao in.
M van 2 (s cp ht khuych tn), khong 2 pht m nc gii
nhit khuych tn, m khuych tn. Sau 45 pht, khuych tn sn
sng lm vic.
ng van 2, m van 1 (s cp ht bung), cho s cp ht bung
chn khng xung p sut khi u ca bm khuych tn
(khong 10
-1
Torr).
ng van 1, m van 2.
M van chnh (khuych tn ht bung), lc ny h thng bm
hot ng to mi trng chn khng cho bung.
b2> Tin hnh bc bay
Vn nt tng cng dng t nng tht chm, n khi nhm
bt u bay hi th dng li nhm bc bay ht.
ng van chnh, x kh v bung cn bng p sut bn ngoi.
Ly mu ra.
b3> Tt my
Sau khi thc hin qu trnh bc bay, tt ngun in, ng van x
kh vo bung.
Tip tc cho khuych tn ht bung xung p sut thp, khong
15 pht.
4
ng van chnh, sau tt khuych tn, khong 45 pht sau,
ng van 2, tt s cp, m van x kh vo s cp, ng cu dao
in ngun, kha nc.

Cc thng s thc nghim:
p sut trong bung khi tin hnh bc bay: 10
-4
Torr.
Dng t nng dy vonfram: 20mA.

III. Cu hi tho lun

A> V l thuyt

1. Hy nu (tn, c ch ngn gn) mt s phng php to mng bng lng
ng hi vt l (PVD)
Mt s phng php to mng bng lng ng hi vt l (PVD):
- Phng php bc bay
Bay hi trc tip trong chn khng: cung cp nng lng cho vt
liu chuyn vt liu sang pha hi.
Bay hi phn ng: hi vt liu phn ng vi kh c a thm
vo mi trng chn khng to thnh hp cht ph ln .
Bay hi phn ng c kch hot: phn ng gia hi vt liu v kh
a vo xy ra trong mi trng plasma, khi tc ph mng
cao hn trong bay hi phn ng thng thng.
M ion: ht bay hi c ion ha trong plasma thng qua qu
trnh va chm. Nhng ion c gia tc n nh th m p ln
, hoc th phn cc gia ngun ion v .
M ion phn ng: cc ion to thnh phn ng vi kh c a
thm vo mi trng chn khng to thnh hp cht ph ln
.
Nng lng cung cp chuyn vt liu sang pha hi c th di
dng: nhit, chm in t, t nng bng bc x, h quang, laser.
- Phng php phn x
Phn x diode phng: gia bia vt liu v c p mt hiu
in th gia tc cc ion c sn trong mi trng bn ph vo
bia vt liu bc cc ht vt liu ra ngoi v bay v . ng
thi, in t pht x th cp cng c thnh lp trong qu trnh
bn ph, c gia tc trong vng st th cathode v ion ha cht
kh duy tr phng in.
Phn x magnetron: gia bia vt liu v c p mt hiu in
th gia tc cc ion v cc e c sn trong mi trng. Bn di
bia (cathode) l mt h nam chm c b tr khp kn bt
cc e chuyn ng theo mt trng ua, va chm v ion ha
cng nhiu nguyn t kh. Ion dng sinh ra s bn ph vo bia
vt liu, bc ra cc ht vt liu v in t th cp.
Hiu in th p gia bia v c th hiu in th mt chiu (DC)
hay hiu in th xoay chiu (RF)
5

2. Tc bay hi t ngun vt liu ph thuc vo cc yu t no ?
T biu thc tnh tc bay hi ca vt liu:
2
1
'
) (
4
1
4
1

= TM p k nv

Ta thy tc bay hi ca ngun vt liu ph thuc vo cc yu t:
Loi vt liu (M)
Nhit ca vt liu (T, p(T), n(T), v(T))
sch ca b mt bay hi (k)

3. u im ln nht ca ngun bc bay chm in t cng l nhc
im ln nht ca ngun bc bay nhit in tr l g ? Hy gii thch r v iu
ny.
u im ln nht ca ngun bc bay chm in t cng l nhc im ln
nht ca ngun bc bay nhit in tr l: ngun bc bay chm in t c th s
dng ph mng cc vt liu kim loi c nhit nng chy cao, hp cht,
hp kim, trong khi ngun bc bay nhit in tr th khng th.
Trong ngun bc bay nhit in tr , i hi b phn gi mu phi lm t
kim loi c nhit nng chy cao hn nhiu so vi mu. i vi nhng mu c
nhit nng chy cao nh l W, Ta, Mo,th ta kh c th chn c kim loi
ph hp lm b phn gi mu trong sut qu trnh bc bay.

B> V vn hnh h to chn khng

4. Trnh by quy trnh x l khi c s c mt in
Quy trnh x l khi c s c mt in:
Kha van chnh
Kho van s cp khuych tn
Tt bm khuych tn, s cp
X kh vo s cp

5. Trnh by quy trnh x l khi c s c mt nc
Quy trnh x l khi c s c mt nc:
Kha van chnh
Tt bm khuych tn
M qut
i my ngui (hn 60 pht)
Tt my

6. Trong qu trnh tt my, ti sao vic m van x kh vo s cp li quan
trng ? Nu cch x l khi qun lm vic ny ?
Trong qu trnh tt my, vic x kh vo s cp li quan trng v lc ny c
s chnh lch v p sut gia bn trong bm s cp v kh quyn bn ngoi (p
sut bn trong nh hn p sut bn ngoi), vic x kh s gip cn bng p sut.
Nu khng m van x kh vo s cp, do chnh lch p sut, hi du t bm s
cp s trn vo ng ng, gy nhim bn v do lm gim hiu qu ht bung
6
trong ln vn hnh k tip. Mt khc, du bay hi khi bm s cp c th gy
thiu ht du, nh hng n hot ng ca bm.
Nu qun lm vic ny, cch x l duy nht l tho ton b h bm ra, lau
chi sch du cc ng ng, b sung du cho bm s cp ri lp li nh ban
u.

C> V qu trnh bc bay

7. Ti sao phi ht chn khng cho bung trc khi bc bay ? Trong mt s
phng php bc bay, ngi ta li cho thm kh vo bung sau khi ht chn
khng. iu ny c mu thun g khng ? Phng php ny gi l phng php g
?
Phi ht chn khng cho bung trc khi bc bay gim nng phn t
kh, t hn ch ti a cc qu trnh tng tc v phn ng gia phn t kh v
nguyn t hi vt liu. Nhng qu trnh ny lm gim hiu sut v phm cht ca
mng ph trn .
Trong mt s phng php bc bay, ngi ta li cho thm kh vo bung
sau khi ht chn khng, iu ny khng c g mu thun. Trong trng hp
mun ph mng hp cht, ngi ta s cho thm kh n cht vo bung. Trong
qu trnh cc nguyn t hi vt liu bc bay n , chng s phn ng vi cc
phn t (nguyn t) kh v to thnh hp cht nh mong mun lng ng trn .
Phng php ny gi l phng php bc bay phn ng.

8. ng dng ca mng nhm trong thc t ?
ng dng ca mng nhm trong thc t:
Mng nhm ph trn thy tinh c th lm gng phn x vi
nng sut phn x khong 90% i vi a s vng ph t ngoi,
kh kin, v cn hng ngoi.
Mng a lp ZnO:Al ch to trn Si loi p c th c ng
dng ch to pin mt tri d th.
Mng ZnO:Al trn PET (polyethylene glycol tephthalate) kh
hu ch trong vic h gi thnh, gim trng lng, thu nh th
tch, to mm do cho cc linh kin quang in t.
Mng ZnO:Al c th ng dng ch to my chng ct bng nng
lng mt tri.

9. Cc yu t nh hng n mng bc bay nhm
Cc yu t nh hng n mng bc bay nhm
p sut mi trng
B mt
Lng nhm bc bay





7
Bi thc tp 2

TO MNG BNG PHNG PHP PHN X MAGNETRON DC

I. Tm tt l thuyt

1. nh ngha hin tng phn x
Phn x l hin tng nhng nguyn t trn b mt vt liu b bc ra khi b
bn ph bi ion c nng lng cao.

S m t qu trnh phn x

2. Phng php phn x magnetron DC
a) H magnetron phng

8

(a) (b)
H magnetron phng
B phn chnh ca h phn x magnetron phng l mt h nam chm c
b tr khp kn nh hnh (b) to by t. By t c tc dng nht electron v bt
chng chuyn ng theo mt trng ua nhm tng qung ng chuyn ng
ca chng ln gp nhiu ln so vi khong cch gia hai in cc, qua lm tng
kh nng ion ha cht kh.

b) Nguyn l hot ng
Khng kh iu kin bnh thng lun cha sn mt s in t v ion.
Khi th m c p vo cathode, mt in trng E c to ra gia hai in cc.
in trng ny nh hng v truyn nng lng cho cc ht mang in trong h.
Trong qu trnh chuyn ng, in t s va chm v ion ha cc nguyn t
hay phn t kh, sn sinh thm ion dng v in t. Cc in t di chuyn v
anode. Cc ion dng di chuyn v cathode, p vo cathode lm in t bt ra.
Cc in t b nht trong by t ca h nam chm, chuyn ng theo hnh xon
c, ion ha cng nhiu nguyn t hay phn t kh. p sut cc tiu duy tr
plasma c 0,1Pa, tc lng ng tng do tn x v ti lng ng gim, th dng
duy tr plasma cng gim.

c) Qu o chuyn ng ca e trong in t trng vung gc
Phng trnh chuyn ng ca in t trong in t trng vung gc nhau
trn trc ta x, y, z
( ) t
m
eE
y
t
t
B
Et
x

cos 1
sin
1
2
=

=

9

Qu o cycloid v qu o in t sau khi mt nng lng

d) c trng ring ca phn x
Theo l thuyt phng in kh, s phn b th trong magnetron phng c
chia lm 3 vng:
Vng st th cathode (vng I) c in trng ln. Trong vng
ny in t th cp sinh ra t cathode s c in trng gia tc
i vo vng ion ha theo hng trc giao vi n.
Vng ion ha (vng II) c in trng rt b. Trong vng ny,
in t va chm vi cc phn t kh, ion ha cht kh, v mt
nng lng. Cc ion sinh ra do qu trnh ion ha s c gia tc
trong vng st th cathode v thc hin chc nng phn x.
Vng plasma (vng III): in trng trong vng ny cng rt b.

S phn b th trong phng in kh

II. Cc bc tin hnh

1. To mi trng chn khng
Bt cu dao in
M van 2 (s cp ht khuych tn) khong 2 pht. Khi p sut
ca bm s cp t ngng lm vic ca bm khuych tn, m
nc gii nhit trc ri m bm khuych tn. Sau 45 pht
khuych tn sn sng lm vic.
ng van 2, m van 1, cho s cp ht bung xung p sut khi
u ca bm khuych tn (khong 10
-1
Torr).
10
ng van 1, m van 2.
M van chnh, lc ny h thng bm ang hot ng to mi
trng chn khng cho bung.

2. Phn x
t lam thy tinh c x l b mt vo pha bn trn bia
TiO
2

iu chnh p sut cn thit, m van kh (bng cch iu chnh
van chnh, van kh).
M nc gii nhit magnetron.
Cp in cho magnetron.
iu chnh p sut v th c plasma n nh cho qu trnh
phn x.

3. Tt my
Sau khi thc hin qu trnh phn x, tt ngun in magnetron,
ng van kh.
Tip tc cho khuych tn ht bung xung p sut thp, khong
15 pht.
ng van chnh, sau tt khuych tn, khong 45 pht, ng
van 2, tt s cp, m van kh vo s cp, ng cu dao in
ngun, kha nc.

Cc thng s thc nghim trong vic ph mng TiO
2
:
Dng phn x: 0,4A
Hiu in th: 330V
Nhit trong bung: 33
0
C 40
0
C
p sut kh trong bung: 3.10
-3
Torr
T l kh: O
2
/Ar = 6%
Thi gian: 5 pht

III. Cu hi tho lun

1. Cc yu t nh hng n dy ca mng mng phn x (Nu r nh
hng nh th no ?)
Cc yu t nh hng n dy ca mng mng phn x:
Bn cht ca vt liu lm bia: vt liu lm bia khc nhau th kch
thc ht vt liu khc nhau, do dy mng ph trn s
khc nhau.
Hiu in th p gia bia v : hiu in th cng ln th qu
trnh ion ha tng, ng thi cc ion dng va p vo bia cng
mnh, cng bc nhiu ht vt liu ra khi bia, do nh hng
n dy mng.
Hiu sut ca h magnetron: mnh yu ca t trng do h
nam chm sinh ra nh hng n qu o ca in t, lm thay
11
i qu trnh ion ha, thay i nng ion v t lm thay i
s ht vt liu n .
Khong cch gia bia v : lm thay i cng in trng
ngoi p vo, yu t c tc ng n dy mng.
Thi gian phn x: thi gian phn x cng di th dy mng
cng ln

2. Cc yu t nh hng n nhit
Thi gian phn x
dy ca mng
Hiu in th p gia bia v

3. nh hng ca sch ca ln tnh cht ca mng
Nu khng sch, bm dnh gia mng v thp, mng d b trc ra.
Mt khc, cc tp cht trn c th xm nhp vo mng, mng khng cn tinh
khit, lm thay i tnh cht mng v cht lng mng b suy gim.

4. Cc phng php kho st tnh cht ca mng mng (in, quang, cu
trc)
Tnh cht in: phng php o in tr (hay dn) ca mng
Tnh cht quang: c cc phng php o
- ph hp th
- ph truyn qua
- ph phn x
Cu trc:
- ph nhiu x tia X
- ph tn x Raman
- cc loi knh hin vi (AFM, STM, SEM, TEM)

5. Ti sao phi thit k ng gii nhit cho h magnetron ? Ti sao vi h
magnetron gii nhit khng tt, ta khng th thc hin phn x vi dng ln (cng
sut cao) ?
Phi thit k ng gii nhit cho h magnetron v:
Trong qu trnh phn x, s va p gia cc ion dng vi b mt bia s
sinh ra nhit lng rt ln, lm nhit ca h magnetron rt cao, iu ny lm
cho tnh cht t ca nam chm b suy gim. Nu nhit tng n mt gi tr no
(gi l nhit Curie), tnh cht t ca nam chm c th hon ton bin mt. V
vy cn thit phi c ng gii nhit cho h magnetron.
Vi h magnetron gii nhit khng tt, ta khng th thc hin phn x vi
dng ln (cng sut cao) v:
Khi phn x vi dng ln, ngha l s ion p vo b mt bia trong mt n
v thi gian cng ln, nhit ca h magnetron s tng ln rt nhanh. iu ny
i hi b phn gii nhit phi hot ng hiu qu c th gii nhit nhanh, trnh
nhit h magnetron qu cao lm nam chm gim t tnh.

12
6. Vai tr ca nam chm trong h magnetron. Nu khng c nam chm th
thc hin phn x c khng ? Ti sao ?
Vai tr ca nam chm trong h magnetron:
Nam chm trong h magnetron c tc dng to nn by t, chnh l cc
ng sc t trng khp kn nht cc electron v bt electron chuyn ng
theo mt trng ua nhm tng qung ng chuyn ng ca chng ln gp
nhiu ln so vi khong cch gia hai in cc, qua lm tng kh nng ion ha
cht kh.
Nu khng c nam chm th phn x vn thc hin c nhng hiu sut
phn x s rt thp v lc ny nng ion v in t trong bung kh nh. S ion
bay n p vo bia rt t v do s ht vt liu bc ra i n to mng
cng rt nh, i hi phi tn nhiu thi gian mng t c dy cn thit.

7. Thut ng o trong v o ngoi thng c s dung trong thit k
h magnetron. o trong c lm bng inox, ni vi nam chm, tm ng gii
nhit, bia,o ngoi c ni vi mass, thnh bung v cch in vi o trong,
cch o trong t 3 7 mm. Vai tr ca n nh th no ?
Vai tr ca o trong v o ngoi:
o trong: gi c nh cc nam chm vi cc thanh gii nhit
trong qu trnh phn x. N ng vai tr l cathode
o ngoi: ngn khng cho ng cm ng t thot ra ngoi
nhm nng cao hiu sut phn x. N ng vai tr l anode

8. H magnetron cn bng v h magnetron khng cn bng.
H magnetron cn bng l h magnetron c: t trng to bi cc
nam chm xung quanh bng vi t trng to ra bi nam chm
chnh gia, khi h ng sc khng b lch ra ngoi.
H magnetron khng cn bng l h magnetron c: t trng to
bi cc nam chm xung quanh khng cn bng vi t trng to
ra bi nam chm chnh gia Khi cc ng sc b phn tn
ra ngoi.

9. o trong c p th -300V, o ngoi c ni mass. Khi chm (o
trong chm o ngoi) I rt ln. Nhng thc t, dng chm ch khong 6 8A.
Gii thch hin tng.
V o ngoi c ni mass nn khi hai o chm nhau tc suy gim ca
cng dng rt nhanh, ch c mt phn nh dng my o c th ghi nhn c,
vo khong t 6 8A.

10. u im ca phng php phn x so vi bc bay.
D dng ch to cc mng a lp nh to ra nhiu bia ring bit.
ng thi, y l phng php r tin, v d thc hin nn d
dng trin khai quy m cng nghip.
bm dnh ca mng trn rt cao do cc nguyn t n
c kh nng xuyn su cao so vi phng php bc bay.
13
Mng to ra c mp m b mt thp v c hp thc gn vi
ca bia.
Mng to thnh c cht lng tt hn so vi phng php bc
bay, ng thi dy v cu trc ca mng c th kim sot
c.