Industrial Optical and

Metrology Instruments
Technology is quickly progressing in elds such as those related to
semiconductors, photovoltacis, energy, medical devices, and aerospace
equipment. As the demands of industry become more specialized and
diversied, the capabilities of research and inspection equipment must
keep pace.
Olympus microscopes and their accessories are developed to meet
the ever-changing needs of research and inspection applications. Our
accomplishments in microscope development date back more than 90
years. Olympus has accumulated a broad range of advanced optical
and precision technologies and we are renowned for our innovative,
forward-looking approach to microscopy. An outstanding example of
Olympus innovation is our new series of DSX Opto-digital microscopes.
Olympus has also won acclaim for its system versatility and broad range
of advanced accessories.
Our microscope systems are evolving with enhanced performance and
operational ease. Olympus continues to answer the demands of industry
and pave the way for future advances with increasingly sophisticated
research and inspection equipment.
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Contents
Opto-digital Microscope . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Laser Confocal Microscope. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Measuring and Tool Makers Microscopes . . . . . . . . . . . . . . . . . . . 5
Image Analysis / Cameras . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Filter Inspector and Particle Inspector. . . . . . . . . . . . . . . . . . . . . . . 7
Stereo Microscopes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Metallographs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Upright Microscopes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Wafer Inspection Microscopes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Wafer Handlers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Components for Integration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Nondestructive Testing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
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Opto-digital Microscope
THE DSX SERIES of Opto-digital
microscopes sets a new standard for
industrial microscopes. Born of Olympus
leading-edge Opto-digital technology, these
instruments ofer operating simplicity and a
level of reliability unheard of amongst digital
microscopes. The DSX100 ofers a free-angle
function that lets you examine your sample
at an angle without sample adjustment or
special holders, and it has a precise 16x
optical zoom range for easy viewing providing
a magnication range of 5x to 287x.
The DSX100 ofers superior high denition
image clarity, as well as a four-segment LED
ring light that makes scratches and defects
easy to identify. You can image in 3D to
replicate your samples surface and use the
build in panorama function that takes you
far beyond the typical eld of view. Once
your image is acquired, a large variety of
measurement capabilities are standard on
the DSX100.
The DSX100 provides:
n Touch screen monitor user interface
n Best image function Select the best image
at the touch of the screen without worrying
about complicated microscope and optical
settings
n Three operation modes so you can tailor the
system to meet your needs
n Free-Angle tilting to easily view your
specimen from diferent angles without the
need for refocusing
n Customizable reports
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Opto-digital Microscope
THE DSX500 and 500i Opto-digital
microscopes are the new standard for
industrial microscopes. Born of Olympus
leading-edge Opto-digital technology, this
instrument ofers superior operating simplicity
and a level of reliability unheard of among
digital microscopes. Any operator, regardless
of experience, can use the Olympus DSX500
and DSX500i for a complete inspection and
accurate analysis every time.
Various observation methods provide quick
and easy image acquistion with clarity far
exceeding the human eye. Image in 3D to
better understand your sample and take
images outside of the standard eld of
view with the DSXs panorama mode. A
large variety of measurement capabilities
are standard on the DSX500 and include
an accuracy and repeatability guarantee,
automatic calibration and a built in GR&R
function to provide you condence in the
measurements.
The DSX500 series provides:
n Touch screen monitor user interface
n Best image function Select the best image
at the touch of the screen without worrying
about complicated microscope and optical
settings
n Three operation modes for tailoring the
system to meet your needs
n XY Measurement guarantee
n Customizable reports
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THE LEXT OLS-4100 is a laser confocal
microscope built for surface metrology
and analysis. The need for repeatable and
traceable measurements to a sub-micron level
in X, Y, and Z is a fundamental requirement in
todays manufacturing environment. Medical
device manufacturers study the surfaces
where an articial hip meets bone, or how to
evenly coat stents with medicine. In alternative
energy, the surfaces of photovoltaic panels
are characterized to determine their ability and
efciency to absorb sunlight. The automotive
industry requires a precise understanding
of surface nish to understand how paint
adheres to panel surfaces.
The LEXT OLS-4100 provides:
n Nanometer-level imaging and measurements
n Traceable accuracy and repeatability for
condence in the measurement data
n Powerful, robust, easy to use interface for
both advanced and rst-time users
n New roughness analysis interface
n The OLS-4100 meets all ISO standards for
roughness analysis
Laser Confocal Microscope
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ACCURATE AND TRACEABLE critical
dimensional measurements are imperative
for reliability and quality control whether you
are in the automotive eld, semiconductor,
electronics packaging or machining industry.
The STM6 line of 2D and 3D measuring
and toolmakers microscopes are designed
to provide reliable and reproducible
measurements that save time and money
by providing real data that allows for
condent quality control. Available NIST
traceability provides peace of mind that the
measurements are accurate and can meet
ISO certication requirements. Measurement
capability is complemented by world-
renowned Olympus optics that provide high-
resolution images with a variety of working
distances. The STM6 series of measurement
microscopes is the complete package for your
measuring needs.
The STM6 series provides:
n Manual and automated systems with the
exibility to meet any application
n NIST traceable 2D and 3D measurements
with superior repeatability
n Sub-micron resolution
n Ergonomic design to reduce operator fatigue
Measuring & Toolmakers Microscopes
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Image Analysis / Cameras
DIGITAL MICRO-IMAGING has evolved
into an indispensable modern quality
assurance tool for image documentation,
analysis, archiving, and report generation in
industries such as automotive, aerospace,
microelectronics, semiconductors, and
alternate energy. Metallurgical laboratories
commonly use image-analysis tools to
determine the quality of aluminum by
analyzing the size and shape of non-metallic
inclusions. Photovoltaic QC laboratories
utilize image analysis to measure critical
dimensional features on solar panels, then
archive the images and measurement data
into the integrated database. Semiconductor
manufacturers require the ability to create
an ultra-high resolution panoramic image
of a wafer, compiled from several hundred
individual image frames.
Whatever your application, rest assured our
powerful software solutions will satisfy your
digital microscopy software needs.
Features and benets consist of:
n Microscope-specic cameras to suit any
application and budget, ranging from 2MP
to 17.28 MP (DP73)
n User-friendly interfaces, allowing operators
of any skill level to acquire quality images,
instantly
n Integrates seamlessly with Olympus and a
wide-variety of third-party hardware solutions
n Dedicated Material-Science software
modules to analyze Grains, Cast Iron, Non-
Metallic Inclusions, Dendrite Arm Spacing,
Layer Thickness, etc. in compliance
with many ASTM, ISO, and international
standards
n Archive images and pertinent data via the
integrated Microsoft

SQL and Oracle

compatible database
n Automatic report creation, integrating
database elds and image metadata,
based on customers pre-existing corporate
Microsoft Word based templates
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Olympus Inspector Series
MATERIAL CONTAMINATION from
particles, down to the micron-size range, has
become an increased concern of modern
manufacturers of automotive and aerospace
components and medical devices, and
pharmaceutical injection liquids (FPM).
The OLYMPUS Inspector Series provides
accurate and reproducible particle size
and distribution data in accordance with
International Standards for quantifying residue
on lters, advanced particle analysis and non
metallic inclusion rating and is customizable
for internal company standards.
The Olympus Inspector Series provides:
n Automatic residue and particle analysis
in compliance with ISO16232, ISO4406,
ISO4407
n Accurate and reproducible measurements
n Highly intuitive, user-friendly software
interface
n Data and reports are automatically archived
into the integrated database
n Distinguishes between reecting, non-
reecting particles and bers
n Single source solution for all hardware and
software components
n Particle standard for system performance
and verication
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Stereomicroscopes
THREE-DIMENSIONAL VIEWING, long
working distances, and a wide eld of view
are perhaps the most useful attributes for
inspecting and assembling small components.
This is why medical device companies and
defense contract manufacturers rely on
stereomicroscopes to assure their products
such as sutures, valves, wires, or diagnostic
electronics assemblies are free from defects
and comply with quality standards.
Olympus stereomicroscopes can be used for
hours on end and are extremely comfortable
due to modern fatigue free eyepieces and
ergonomic controls. Color rendition is top
notch and images are crisp and clear due to
recently improved optical coatings.
Choose from a selection of:
n SZ2 models which are cost efective and
compact in design ideal for routine tasks
n SZX2 models which are modular and
ofer high-resolution optics, extended
magnications, motorization, and
interchangeable accessories
n New ergonomic bases, boom stands, and
bonder arms accommodates most sample
sizes
n A multitude of lighting options ranging from
coaxial, LED, ber optic, and halogen for
numerous applications
n Specialized software solutions from simple
documentation to automated lter residue
inspection for cleanliness compliance
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OLYMPUS GX SERIES of congurable
Metallographs provide exceptional image
quality and software analysis for grain or
particle sizing, inclusions, corrosion, layer
thickness and weld measurement to meet the
specic needs of core metallurgical in-house
labs and of-site independent testing labs.
Whether your need is simple etch assessment
or a sophisticated measurement and analysis
undertaking, our manual or automated
systems are designed to provide you with
reliable and cost-efective results. All of the
Olympus metallographs can be matched
perfectly with an Olympus digital imaging
solution for advanced inspection and analysis.
n GX41 model is a compact bench system
capable of brighteld and polarized light
ideal for quick inspection of grains, etch, or
general review
n GX51 model is a research grade system
ofering superb optical performance and
additional contrasting techniques within
an extremely stable frame a must when
analyzing at the highest magnications
n GX71 model represents versatility at its
best providing a wide variety of imaging
techniques and motorized components
to facilitate the stringent demands of
metallurgical research and analysis
n Complete metallurgical analysis solution
PC control of your digital camera and
microscope, 14 analysis-specic software
modules, and data management at your
ngertips
Metallographs
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MATERIALS RESEARCH and microstructure
analysis remain fundamental for new and
existing product validity with extensive
applications throughout a large number of
industries. Our BXiS models are designed to
meet the demands of diverse applications
such as inspecting high performance lms,
LEDs, or newly designed circuitry and
performing microstructure analysis on engine
components, bers, and residual particles in
fuels or toothpaste.
BXiS digital microscope solutions combine a
multitude of optical image forming techniques
ranging from brighteld, darkeld, polarized
light, diferential interference contrast, phase
contrast, uorescence, deep UV and near IR
with technologically advanced digital cameras
and intuitive image analysis software. The
result: a complete digital system that increases
productivity and streamlines workow.
n Full array of BX models provides users
with the exibility to choose congurations
directly related to your applications
n Motorized options featuring the renowned
multi-spot autofocus for the utmost in speed
and focus accuracy
n Eco green manufactured objectives
including high resolution apochromat, long
working distance uorite, strain free lenses
for polarization, and optics for near IR or
deep UV transmission
n Complete materials analysis solution
including PC control of your microscope and
digital camera, superior phase and particle
analysis, application-specic software
with robust and easy to navigate data
management; single or multi user licenses
available
Upright Microscopes
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Wafer Inspection Microscopes
OPTICAL INSPECTION is an ongoing
requirement for the manufacturers of
semiconductor and related nanofabrication
activities. The use of these low impact and
easy to use tools allows for fast and efcient
inspection and quality control. Each MX frame
is equipped with imaging techniques, that
aid in the detection of particulates and micro
scratches. OLYMPUS Stream combined with
the MX61A platform, of-the-shelf scanning
stages and digital imaging provides wafer
navigation abilities, microscope control and
the ability to capture and archive images.
The MX series provides:
n Inspection for wafers up to 300mm in
diameter, with no restriction of substrate
material
n Variety of imaging techniques including
brighteld, darkeld, DIC, near IR
n Automated platform for fatigue free
operation including autofocus and defect
navigation
n SEMI S2 & S8 compliance
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Wafer Handlers
THE AL SERIES of wafer handlers provide
fast and efcient handling for wafers up to
300 mm and are integrated with Olympus
MX series of microscopes to work with
silicon wafers down to 90m in thickness.
The systems work with all compound
semiconductor substrates. Small diameter
wafers can also be accommodated on a
special order basis.
Macro wafer inspection is available on board
the AL series with the ability to view the entire
rear surface of the wafer without manual
intervention. Coupling the AL series to a new
or currently owned microscope provides fast
cassette to cassette operation, minimizing the
chance of accidental damage to the wafer.
Olympus wafer handlers provide:
n Maximized throughput for thin wafers
n Recipe driven operation, exible for varying
inspection routines
n Full SEMI and RoHS compliance
n Complete macro inspection of the wafer with
360-degree wafer rotation
n Advanced safety functions to ensure safe
and proper wafer loading and unloading
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OLYMPUS IS DEDICATED to assisting
equipment manufacturers in a variety of
elds that incorporate optics and modular
microscope components into their technology
leading products and systems. The breadth of
objectives and illumination systems available
can t most inspection and measuring
requirements that need high magnication
along with assured quality and repeatability.
The Olympus team has in-house staf
dedicated to assist with your integration
project and to provide technical data that
allows for efcient selection of the correct
optical components to t the need of the
design project.
Component support consists of:
n Industry leading precision optical
microscopes and optical components
n Professional and dedicated management of
technical and logistical requirements
n Engineering support for custom optics
projects
n U.S.-based technical team
n International knowledge pool
Components for Integration
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OLYMPUS MAINTAINS a team of factory
trained service and applications support staf.
The service team is capable of providing
both bench top and eld service support for
all of the Olympus imaging and metrology
products. The team can provide calibration
service, preventive maintenance or repairs
to suit the needs of the current and future
installed base of Olympus products. All of the
tools and training is updated and recalibrated
on an annual basis to ensure that the service
provided to the customer is efcient and of
high value.
The applications team is also available to
provide applications training for all of the
current and past Olympus products. Classes
can be organized for both groups and
individuals. Additional training classes can be
provided virtually to improve efciency and
provide a recorded version of the training
for later use. Further the applications staf is
available to solve your most difcult application
problems to allow for the best use of your
Olympus products.
Combined the applications and service teams
are here to serve Olympus past, current, and
future customers.
Our service team provides:
n Staf that is factory trained and refreshed
annually
n Flexibility to perform work at your site or
at the Olympus service facility
n Applications training for individuals or
groups
Service
Service, Applications Support, and Training
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For the industrial professional, Olympus manufactures and globally markets a range of
innovative nondestructive testing and remote visual inspection instruments developed with
a commitment to technology, design, and user friendliness. These products are used for
inspection and maintenance in industrial and research elds ranging from aerospace and energy
to transportation and manufacturing. Olympus products contribute to product quality and add to
the safety of infrastructure and facilities.
Solutions
n
Corrosion Testing
n
Weld Inspection
n
Security
n
Flaw Detection
n
Thickness Gaging
n
Automated Testing
n
Remote Visual
n
Elemental Analysis
Nondestructive Testing
Ultrasound | Phased Array | Eddy Current | Eddy Current Array
Remote Visual | High-Speed Video | X-Ray Fluorescence
Notes
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