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(3)
C
V
= (
C
x
d
) (
x
d
V
) (4)
Using equations 1 4, we can write
N
d
(x
d
) = -C
3
(
1
0
A
2
) (
C
V
)
1
(5)
A measurement of C and C / V Vs V will determine the doping prole.
Eq. 5 can also be written as
( N
d
(x
d
) )
1
= -
1
2C
3
( q
0
A
2
) ( d ( 1 / C
2
) / dV )
3
If N
d
is constant,
1
C
2
=
2(V
bi
V )
0
A
2
N
d
A plot of
1
C
2
Vs. V is a straight line for a constant doping density. From the slope one can get the
doping density and the built in voltage from the intercept. Dopant proling using Capvoltage is a very
powerful technique.
Some sources of errors:
The diodes should not be leaky. This becomes an issue as the reverse bias increases. Measuring the dc
current under reverse bias provides an independent estimate of the leakage.
Another way to quantitatively check whether leakage is important is to look at the phase shift of the
current through the capacitor with respect to the applied ac voltage. (Think about this.)
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