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Hsu et al.
(54)
Publication Classi?cation
(51)
Int. Cl.
B323 3/30
(2006.01)
B05D 5/08
(2006.01)
C23F 1/02
(2006.01)
(52) US. Cl.
CPC
B323 3/30 (2013.01); C23F1/02 (2013.01);
B05D 5/08 (2013.01)
USPC ............ .. 428/141; 428/201; 216/49; 427/508
(60)
PCT Filed:
(57)
ABSTRACT
14/000,857
PCT No.:
PCT/USI2/25949
371 (00)
(2), (4) Date:
Mar. 4, 2014
\.
wwctw
'-
. EEK
chm
Ki?
S eed
Load
Low
Medium
High
LOW
Regime l
. Medium
High
US 2014/0170377 A1
Regime N
Regime Ill
FIGURE 1
Pattern
Type
Baseline_l
Polished
US 2014/0170377 A1
Image
0'9
17'5 A
23
7A;
1.1
7+15
'4
2.3
7 + 15
3.3
7 +15
Deep
2.1
5%
LS
0.9
17.5%
Deep
2.1
7%
US
0.9
17.5%
Large shallow
Baseline_2
(LS)
Deep
Basehne_3
. .
elllptlcal
Mixed
MS__1
LS+deep
Mixed
MS_2
LS + deep
Mixed
MS_3
LS + deep
Compound
OL_1
Compound of
OL_2
FIGURE 2
US 2014/0170377 A1
0.06
I Baseline 1
I
.p
0.05
.BaselineZ
ABaseline3
.9
3
IIVIultiscale
0.04
.
0.03
-~
'
'
UC
'
E 0.01
'
'
.2 002
r
.OL
i I
.
O
0
0.00
0.05
0.10
0.15
0.20
Velocity, m/s
FIGURE 3
0.25
0.30
0.35
US 2014/0170377 A1
iI
25:0.3
0 0.
O. 43r0521
-_--
.I
.
I
.
I
QI
0.5
1.5
Velocity, m/s
FIGURE 4
mm68 1m
US 2014/0170377 A1
-1-1-1
1 11
1111
11111111111
,q},++++1,++1+ 1 11+
.1
a H
11
11
:11.11.
1
11111
11441111111
.11::11
':1:,1.
CoefFicrnto
54
FIGURE 5
US 2014/0170377 A1
FIGURE 6C
US 2014/0170377 A1
I Baseline
A Ellipse
0-1
'
ICircle
Q Mixture
CForefictn
O9 O0 CD00
0.02
0.0
50.0
100.0
150.0
Load[N]
FIGURE 7
200.0
250.0
104
500 mm 566 pm
-5C~O nm - 500 pm
106
FIGURE 8
US 2014/0170377 A1
l31
l 30
FIGURE 9
US 2014/0170377 A1
FIGURE 10
US 2014/0170377 A1
US 2014/0170377 A1
H G Um HA
\\\\\\ \\\
\\\ \\\\\\\
H GUm 1 m
FIGURE 12C
US 2014/0170377 A1
FIGURE 13A
FIGURE 13B
US 2014/0170377 A1
FIGURE 14A
FIGURE 14B
US 2014/0170377 A1
FIGURE 15A
FIGURE 15B
:1.
fixes)
:11
.\
FIGURE 16
201
US 2014/0170377 A1
US 2014/0170377 A1
FIGURE 17A
FIGURE 17B
OCompA
ElCompB
(CompC
AComp A+Comp B+Comp C
0'20
ICompE
A "7:
ABaseline
,H
US 2014/0170377 A1
0.15
U 0.10
A __________
_ If,
a:
O
U
T.
- 0.05
0.00
300
400
500
600
700
800
FIGURE 18
900
1000
1100
US 2014/0170377 A1
.150
cForeiftn
0.00 -
1000
2000
0000
4000
5000
0000
7000
Time, 5
FIGURE 19
'