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KNITTL

OPTICS OF
u
Z.

WILEY

KNITTL

Optics of Thin Films

WILEY SERIES IN PURE AND APPLIED OPTICS


Advisory Editor
Stanley S. Ballard, University of Florida

allen and eberly

Optical

Optical Information Processing

cathey

caulfield and lu

GERRARD and burch

Hudson

Infrared

Polarization Interferometers

Introduction to

in

Optics

Color in Business, Science, and Industry, Third Edition

Optics of Thin Films

lengyel

Introduction to

lengyel

Lasers,

louisell

Laser Physics

Second Edition

LEVI Applied Optics,

Quantum

Guide

to Optical

Statistical Properties

moller and rothschild

Matrix Methods

System Engineering

judd and wyszecki

pratt

and Holography

The Applications of Holography

francon and mallick

knittl

Resonance and Two-Level Atoms

System Design, Volume


of Radiation

Far-Infrared Spectroscopy

Laser Communication Systems

shulman

Optical Data Processing

WILLIAMS AND BECKLUND

Optics

zernike and midwinter

Applied Nonlinear Optics

Optics

of Thin Films
(An Optical Multilayer Theory)

DR. ZDENfiK KNITTL


Meopta Optics

& Precision Mechanics

Works, Prerov, Czechoslovakia

Wiley-Interscience Publication

JOHN WILEY & SONS


London

New York

Sydney

Toronto

ACCESSION

CLASS

No.

96281

No.

2 9 DEC 1978.

Published in co-edition with

Copyright

1976,

SNTL,

by John Wiley

Publishers of Technical Literature, Prague

& Sons, Ltd

All rights reserved.

No

part of this book may be reproduced by any means, nor transmitted,


nor translated into a machine language without

the written permission of the publisher


Library of Congress Cataloging in Publication Data:
Xnittl, Zdengk.

Optics of thin films.

(Wiley series in pure and applied optics)

"A
1.

Wiley-Interscience publication."

Thin films Optical properties.

-QC176.84.07

ISBN

K57

471 49531

530.4U

X^^

Printed in Czechoslovakia

I.

Title.

73-20896

Contents
1.

INTRODUCTION
1.1

1.2

2.

II

and prefatory notes


The working hypotheses and the

11

Historical

1.3

Wave

1.4

The plane wave

practical bearing of the theory

equations of the electromagnetic

17

20

field

1.5

homogeneous medium
General types of solutions in non-homogeneous media

1.6

Transport of energy

25

in a

....

28
29

1.7 Polarization states

32

OPTICS OF DIELECTRIC LAYERS

35

2.1

Notation and preparatory remarks

35

2.2

Boundary conditions

37

in admittance notation

2.4 Input admittance at a

39
40

2.5

41

2.3 Fresnel's formulae

boundary
Matrix treatment of reflection and transmission
2.5.1 Admittance matrix

42

2.5.2

Phase matrix

2.5.3

System transfer matrix

42

2.5.4 Evaluating the transfer coefficients


2.5.5 Interference matrix

41

from S

and evaluation of the

42
transfer coeffi-

45

cients
2.5.6

Reduced matrix work

R-coefficients only

2.6 Recursion formulae for multiple reflections

46
47

2.6.1

Generalized Airy summation

47

2.6.2

An

49

2.6.3

Vector approximation of r

algorithm for complete Airy summation

2.6.4 Vector

approximation of

r/t

52
53

2.6.5 Quality of the approximations

53

2.6.6 Internal transfer coefficients

60

CONTENTS

3.

2.7

A recursion pattern for the input admittance.

2.8

Notes on numerical computations

66

BASIC DIELECTRIC DESIGN UNITS

69

3.1

The

The Smith Chart

69

single layer

3.1.1

3.1.2

3.1.3

Amplitude and energy coefficients


Analysis of the energy formulae for normal and oblique

69

incidence

70

Reducing and increasing

reflection

by one

layer.

Observa-

75

tion in white light

a prototype of monochromatic filtration


3.1.5 Theoretical principles of measuring the optical parameters

3. 1 .4

62

The

single layer as

79

of thin films

80

3.2 Periodic structures

83

3.2.1

Fundamentals of typology and notations

3.2.2

A rough orientation in a HLH.

3.2.3 Reflection at cardinal points

<p

83
86

system

(21

88

1) rc/2

92

3.2.4 Latent (A/2) layers

3.3

93

layers as correcting elements

3.2.5

Use of X\2

3.2.6

Stop-band theory

3.2.7

Symmetry and

3.2.8

Oblique incidence

104

3.2.9

Phase dispersion

107

by discrete points
The antireflection problem
Principles of achromatization by discrete points

109

Broad-band
3.3.1

3.3.2

96
103

periodicity

antireflection

109

....

Ill

118

Examples of use
3.4 Some detuned multilayers
3.3.3

130

.131

3.4.1

The simulated

3.4.2

134
Design of detuned three-layer antireflection coatings
Some further antireflection multilayers of the detuned type 139

3.4.3

antireflection bi-layer

3.4.4 Beam-splitters corrected


3.4.5
3.4.6

by detuning

Detuning as a means of interpolating


The sloping edge

141
reflection levels

144
148

3.5 Applications of periodic structures


3.5.1 Interference mirrors.

3.5.2
3.5.3

3.5.4

Low-pass and high-pass

The single-half-wave monochromatic filter


The double-half-wave monochromatic filter
Notes on multiple cavity filters

143

filters

148

159

162
173

CONTENTS
4.

OPTICS OF METALS

182

4.1 Generalizing the Snell law.

4.2 The invariants and

4.3 Orientation of the vectors

4.4 Fresnel's formulae

The inhomogeneous wave

on a

and

The

189

190

boundary

192

wave

single metallic film

4.6.1

4.6.2

183

187

H after refraction

dielectric/metal

4.5 Poynting's vector in the refracted

4.6

....

Ketteler's relations

93

195

Computing the outer field


Computing the inner field

200

GENERAL SYSTEMS OF LAYERS

213

214
Absorption in a layer system
218
5.2 Potential transmittance and absorptance
of
case
the
for
5.3 Distribution of absorption across a layer system
223
weakly dissipative media

5.1

229

5.4 Total reflection

233

5.5 Frustrated total reflection

6.

GENERAL THEOREMS ON STRATIFIED MEDIA


6.1 Left-and-right-incidence

6.2 Reversibility
6.2.1

Some

240
240

theorem

241

theorem

conclusions from

the reversibility

theorem

...

245
-

6.3 Equivalence theorems

4?

period
6.3.1 Computing the equivalent parameters for the basic
(0.5B)

249

A (0.5B)

layer
6.3.2 Analysing the spectral behaviour of an equivalent

ripple
6.3.4 Use of matching layers to manipulate pass-band
6.3.5 The stop-band

6.4

7.

potential transmittance

BASIC METAL/DIELECTRIC DESIGN UNITS


7.1

The Fabry-Perot sandwich


7.1.1 Basic

The transmission

....

270
283

283
2 **5

formulae

9~
7.1.2 Fourier expansions for 31 and
7.1.3

267

270

Theorems on maximum

257

270

Theorems concerning induced transmission


6.4.1 Front-extension theorem
6.4.2

251

255

6.3.3 Stacking the basic period

filter

286
293

CONTENTS
7.1.4

The

300

reflection etalon

7.1.5 Laser cavity

320

7.2 Dielectric-coated metallic mirrors


7.3

Some

7.3.1 Pohlack's beam-splitters

7.3.2

8.

328
.

328

....

filter

COMPUTATIONAL PROCEDURES

337

and 1/d

339

Kard's theory of translumination

346

8.4 Circle diagrams


8.5

9.

349

Notes on non-polarizing beam-splitters

359

EXACT SYNTHESIS OF TUNED MULTILAYERS


9.1

365

9.1.1

Transformation of the formulas

9.1.2

Energy relations

368

9.1.3

Finding the a v ,b v

370

The

365

N*\ NJ!?
the matching methods

371

Some remarks about

374
problem
374
Butterworth and Chebyshev approximations of the low-

9.1.5

antireflection

9.2.1

pass
9.2.2

9.3

364

Principles of the procedure

9.1.4 Inversion of the

9.2

374

filter

Frequency transformations

380

germanium substrate
problem

9.2.3 Antireflecting a

380

The

384

semireflection

9.3.1 Pohlack's

expansion and

its

Chebyshev matching

....

9.3.2 Tables of synthetized semireflectors


9.3.3

9.3.4 Simplified

9.4.

9.4.2

398

achromatism by

Ak2 =0

401

405

The sloping edge in Lagrangian approximation


The pole-and-zero plot

405
406

9.5 Phase-change-upon-reflection in terms of the zero distribution

9.7.1

physical

analogies

408

410

9.6 Rational function for tan S

Some

385

390

Oblique incidence

9.4 Other cases of matching

9.7

332
337

Vlasov-Kard recursion formulae

8.2 Kard's dual expansions for r/d


8.3

The induced-transmission monochromatic

SPECIFIC
8.1

323

induced-transmission systems

between thin films and

electrical

networks

412

The

412

transmission-line analogy

CONTENTS
9.7.2
9.7.3

9.7.4

The "monochromatic" LC-network analogy


The "vanishing film" analogy
The rationalized-thin-film analogy

9.7.5 Insertion loss

the

413

416
418

analogy to optical transmission

9.7.6 Darlington's insertion-loss synthesis.

424

tions of realizability

10.

INHOMOGENEOUS LAYERS
10.1

10.2

The

WKBJ

Some
10.2.1

429

430

(geometrical optics) approximation

433

exact solutions

433

Exponential layer

436
437

438

440

10.2.2 Linear layer

Notes on other solutions. Computer-aided solutions


The inhomogeneous layer as part of a layer system .... 438
10.3.1 Generalizing the Fresnel coefficient for inhomogeneous
10.2.3

10.3

media
10.3.2

The

in the

approximation of geometrical optics

an inhomogeneous
inhomogeneous layers

interference matrix of

10.4 Transfer coefficients of single


10.4.1

Exponential layer

10.4.2

WKBJ

film

....

A general method
10.5.1

444

445
445

layer

446
448

10.4.3 Transition layer

10.5

421

Notes on the condi-

of integration

Drude's formulae a

first

approximation

......

453

The hyperbolic profile 455


10.6.1 A relationship between the hyperbolic and exponential
profiles. The method of simple reflections as a Fourier
transform
457
10.6.2 A reciprocity theorem on associated functions .... 458
10.7 Numerical examples
459
10.8 Notes on the preparation of inhomogeneous layers
471
10.6

11.

Approximation by simple

reflections.

THICK LAYERS
11.1 Planeparallel glass
11.1.1

480
blank with coatings

A pile of plates

Cemented plate
11.3 The cube
11.3.1 The simple beam-splitting cube

11.2

480
484
485

487
493

CONTENTS
12.

PERTURBATIONS
12.1 Dispersion

of dielectrics

496
496

12.2 Spurious absorption

507

12.3 Surface roughness

510

12.4 Cumulative tint in lenses

517

12.5 Obliquity effects in lenses

523

12.6 Production errors

536

INDEX

543

1
Introduction
1.1 Historical

and prefatory notes

The anomalous behaviour of matter if it is made to exist in the form


of a thin film is an established phenomenon of modern physics which is
being exploited both in basic research into the properties of matter and
for industrial applications, once the anomalies are under control.

Optics enjoys the historical priority of being the

first

branch of physics

to have been confronted with a thin film anomaly, in the form of coloured
reflection

from soap bubbles,

fatty patches

on water. The

air

wedges between glass surfaces and from

earliest descriptions

of these phenomena were

independently published in the 17th century by several natural philosophers:

Joannes Marcus Marci (1648), Robert Boyle (1663), F.

Robert Hooke (1665).

No

M.

Grimaldi (1665),

explanation was given of these colours apart

from some vague speculations in terms of reflection and refraction.


Thin film colours did not escape the attention of Isaac Newton (1704),
they
eluded an explanation in terms of the corpuscular theory of light.
yet
In fact, they remained the touchstone of optics until the beginning of the
19th century, when the foundations of physical optics were laid by Young

and

Fresnel.

Interference of light waves

of thin

films,

was discovered to be the cause of the colours


and the double-beam treatment of it on a plane-parallel layer

has been one of the classical sketches in physics text-books ever since.
In 1833 G. B. Airy extended this to a multiple-beam model, but his

formulae were unnecessarily exact, and involved, for the thin film phenomena
then under study: both the colours of thin films and Newton's rings were
adequately described by two-beam interference.

OPTICS OF THIN FILMS

12

From the theoretical ideas

of that time

let

us also recall Stokes' principle

of reversion (1849), used to account for the perfect blackness of the central
spot in Newton's rings.

However

have kept their importance in modern

old, all these ideas

optical thin film theory. In fact,

it

was only lack of

practical hints that

prevented 19th-century physics from developing the concept of the multi-

and the corresponding methods of analysis. No technical means were


known of producing multilayers artificially and no multilayers were registered
in nature. The Fabry-Perot etalon of the 1890's was the first element to

layer,

summation to describe the profile of its Haiwas still a "silvered" monolayer rather than a real

require the use of exact Airy

dinger fringes, but this


three-layer.

Not

until 1917

can one discover a paper concerning a genuine stack

of "plates" of alternatively low and high refractivity. The object of the study

was not a technical product, but a work of nature. This paper, by no less
a person than Lord Rayleigh, [1], gave an explanation of the spectral colours
observed in the reflection of light on the covers of some coleopterous
beetles,

known

band theory of

to have laminar structure.

We

have essentially here a stop-

dielectric multilayers, but, since

no

artificial stratifications

of this kind could be produced at that time, the paper

An

fell

into oblivion.

later

redeveloped by various authors in various terms.

The time was hardly

ripe then for the application of single layers.

Stop-band theory was

occasional observation (actually an unconscious duplication of earlier

findings by J. Fraunhofer

and by Lord Rayleigh) of some atmospherically

tarnished lenses led the optics manufacturer Dennis Taylor to the elaboration

of

artificial

unwanted

ageing of glass surfaces by etching, with the effect of reducing


reflection

from the refracting boundaries. The interpretation

of this effect was in terms of an intermediate refractivity step being introduced between air and the compact glass, as if the layer were acting as a thick

no

one, with

interference involved. Strangely enough,

it

was noted

at the

same time that the reflected light changed colour with the thickness etched,
and that maximum effect was obtained with a "slatey bronze" tint in
reflection.

The

British Patent

No

29561, granted for this process in 1904,

is

the

commercial antireflection technique. A similar


in
1919
to L. W. Bugbee in the United States, the etching
patent was granted

first

trace of a would-be

being applied during the polishing process.

gained a footing, however, because


into the process of glass-working.

it

None

of these procedures

was not a popular

step to admit acids

INTRODUCTION
The

13

real birth

of thin film applications in optics had to wait until the

was derived from the advances of vacuum technology


achieved within the framework of the electronics industry. The vacuum
evaporation process in a well-developed plant with an efficient pumping
system was discovered to be the best method of producing an interference
layer of specified optical properties. A. Smakula and /. Strong are cited
middle 1930's, when

it

Germany and
H.
A.
Pfund discovered

as independent fathers of the single antireflection layer in


the United

States, respectively. Parallel to

this,

the reflection-increasing potentialities of evaporated high-index layers.


It

was subsequently

realized that

may

one

evaporate more different

layers in succession. This led, in the period 1937 -r- 1947, to the elaboration

of the

first

multilayer theories for antireflecting and reflecting systems as

well as for monochromatic interference

VaSicek and A. W. Crook,

may

[2-4],

Pierre Rouard, Antonin

filters.

be regarded as the main contributors

to the generalization by recurrence of the Airy formulae to multilayer


systems, although a

computations as

well.

number of other authors have made various ad hoc


Important design work of deep foresight, unfortunat-

ely confined to patent literature,

is

due to Walter Geffcken,

[5],

who

also

pioneered wet and gaseous-reaction deposition processes. A. G. Vlasov

seems to be the Russian

classic

of this

era, [6].

Exacting technological requirements for the production of optically

and physically stable multilayers have caused the practical developments to be mostly confined to the laboratory phase. The manufacture of

effective

the Fabry-Perot type

real

commercial

filter,

which spread

after 1945,

may be

regarded as

hit.

The Airy summation was

also used

by

S.

Tolansky in 1942 when

analysing the Fizeau fringes in a silvered-wedge film.

Post-war development

is

characterized

by increased confidence

in the

rdle of optical multilayers, with corresponding efforts in the experimental

and

theoretical spheres. Special evaporation plants

were developed for

optical multilayers (with only a minority of firms adhering to additive


processes). Large scale research

was undertaken

wet

into materials suitable for

various spectral regions and satisfying the requirements of economical

manufacture and prolonged use of the

films.

Methods of controlled deposi-

tion were developed, optical constants, porosity, structure, adhesion, etc.

were studied and an enormous amount of knowledge and


this

new

skill

was put into

field.

Last, but not least, theory

of spectral

was invoked to discover new possibilities


of the word, which after all it the

filtering in the general sense

OPTICS OF THIN FILMS

14

predominant use of interference films in optical applications. Theory was


also expected to help in interpreting measurements of optical constants,
in setting the production tolerances

and

in guiding the development of

new

or modified systems.
Early milestone papers of this second era are, for example, the Hadley-

Dennison electromagnetic treatment of the reflection and transmission


metallic interference

the

first

filter, [7],

the published thesis of F. Abeles,

[8],

being

general treatment of stratified media in terms of the electromagnetic

theory of light, and a paper by E. T. Welford,

[9],

introducing matrix

compu-

from those of Abeles. Pioneering design work was being


undertaken by F. A. Turner. The first conference on Thin Films summoned
by the Marseille University in 1949 showed how widespread and lively the
tations different

experimental and theoretical activities actually were at that time,


-

[10].

In the subsequent years four basic text-books on thin films appeared,

each having

its

own method

of approach and choice of material, thus

supplementing each other in the demonstration that a self-sustained new

was being born. These were the works of H. Mayer, [11], O. S.


A. VaMcek, [13] and the advanced though less accessible treatise by G. V. Rozenberg, [22], (to be followed only much later by the now
well-known books by H. Anders, [23] and H. A. Macleod, [24]).
discipline

Heavens,

[12],

From then on it would hardly be possible to follow the stormy

develop-

ment in any balanced proportions. Reference to literature in the present

book

is

kept at a moderate

level, the

goal being neither monograph-like

completeness, nor a historical look at every stage of the development.

At this point the author would like to make an apology to the effect that
any shortcomings of documentation should be interpreted as his insufficient

absorption of

all

the existing material rather than anything near

discrimination.

In the early stages, use of the theory was prevalently analytical:


interesting combinations, mostly the result of straightforward reasoning,

were mathematically studied and possibly improved in

detail.

Vector sum-

mation often helped where general theory denied direct insight. Although
thin film theory is a more compact piece of science than, for example,
geometrical optics, the final formulae to which it eventually leads do not
lend themselves to direct analysis in terms of the

many

design parameters.

Recourse was therefore had to large scale numerical analysis, which was
facilitated by the happy coincidence of this opening era of multilayers
with the advent of automatic computers. No desk-calculator teams had to
be formed in analogy to the optical design teams of the past (which also

INTRODUCTION
made

it

15

of the theorists with experimental

easier to integrate the minority

teams).

In the course of time real design theory began to grow, developing


special procedures for various purposes. Analogies with

new concepts and

network theory were established, which made it possible to design some


analog computers and elaborate exact numerical syntheses. Large computer

programs were also written for automatic differential corrections.


The theory of optical interference films has by now developed into a
of physical optics as regards

specific chapter

aspects have formed

it

importance for the science of optical


filters.

The author

is

its

principles, but the design

into a clean-cut technical discipline of about the


filters

as network theory

is

same

for electrical

tempted to apply a quotation from a network theory

classic to the effect that the science ".

physics and engineering." This

is

a beautiful blend of mathematics,

book on thin film theory will try to contribute

to the substantiation of the analogous belief that there

is

a beauty in only

skin deep.
It

should be admitted that the interdependence between theory and

much

practice is

stronger in optics than in electronics, starting with the

fact that the thin-film theorist cannot assemble his systems

separate parts with technical data printed

ially available

from commercon them. The

road to a practical realization of theoretical ideas is more arduous here,


which makes some of the practitionists sometimes think that enough has
already been done by the theorists to keep technology busy over the next

Alternatively,

if we admit that the discovery of


may be postponed in harmony with the needs of practice.
we may tolerate the thriving of some pure theory if the rest

of the science

is

decade or

so.

This view can be justified

fascinating ideas

This

is

flying at

an operational

height.

the philosophy adopted in the present

work which

is

to be

regarded as a text-book meant for advanced university courses or as a


reference

book for those working in the field. The aim is to acquaint the
modern concepts and the procedures of that part of the electro-

reader with

magnetic theory of light which


applications.

is today applied to stratified media in optical


rough knowledge of Maxwell theory is assumed.

Multilayers are regarded as elements affecting the propagation of


infinitely

extended plane waves, none of the recent developments of wave

guiding inside thin films having been considered.

The evolution of the basic theory is the first objective. The dominant
method of approach is matrix treatment, but other useful computational
methods are also followed. The now orthodox material on dielectric films

OPTICS OF THIN FILMS

16

is

more or less

presented in

established notations. There

was more pedagogic

scope for the author in working through- therhwblved formalism of metallic

same time

films, providing at the

for a

physical situations occurring there.

found

maximum

Some

of insight into the new

known

less well

in the sections dealing with the inner field.

inhomogeneous

may be

layers are presented in close connection with the formalism

homogeneous

established for

results

The fundamentals of

Wherever possible

multilayers.

in the intermediate stages

of the presentation,

applications are introduced in special chapters written

from the view-point

was not the authors ambition to present anything like a complete


design theory for thin films, which would call for a special volume, possibly
written by several authors. It is hoped though that enough of this material
has been incorporated to make the book well balanced between basics and
applications. The chapters on thick layers and on perturbations should add
of design.

It

to this balance.

from the other side of the balance is devoted


to a type of exact synthesis, which has haunted the author's mind for some
years. A number of unpublished results are presented here in full awareness
of the fact that their elegance surpasses their utility, at least in the foreseeable future. Nonetheless, the general views obtained here, and the network
substantial chapter

may deepen

physical analogies,

the understanding of thin film interference

as well as supporting the educational value of the book.

In addition to

this,

the equivalent of several papers or notes, so far

withheld from separate publication,

book, (particularly in
it

being

left

is

dispersed over other parts of the

2.6.5, 3.3, 3.4, 5.3, 6.3.4, 7.1.4, 11.3

and

in

Ch.

12),

for the conversant reader to assess their usefulness in the

presentation of the particular subjects.


Finally a few

words on how this book came into being. As is often


was provided by personal notes piling up over the
research, some of the results having been published in

the case, the nucleus

years in industrial

on thin films at the university


a process of arrangement and growth resulting in two inter-

scientific journals.

later initiated

The occasion

to lecture

mediate stages of condensation: Lecture Notes for the 1966 Czechoslovak


Summer School and an enlarged version of these in English for my 1969
stay as guest lecturer at the Kungliga Tekniska Hogskolan, Stockholm.

My

thanks here go to Professor E. Ingelstam for his friendly help and encouragement to make the last, but longest, leap between these lecture notes and
the present book.

This book could not have been written, had

not had the opportunity

INTRODUCTION
to

work

fully to

17

systematically,

my

and

wish to express

my

some extent freely, in the field. I owe


Meopta National Enterprise, Pferov. I

to

Organisation, the

this

also

gratitude to the late Professor E. Keprt, until recently

Head of

the Optics and Fine Mechanics Chair of the Palacky University,


Olomouc, who, at the time when we shared an industrial career, has launched me on the subject and set the conditions for my work. Thanks are also

due to

my wife for having understood the

share of private

life

that activities

like this require.

Having touched upon the early

remember the

years, I inevitably

who

stimulating personality of the late Professor A. Vasicek,

for

many

years disseminated enthusiasm for thin films in our geographical longitudes.

The team work of

my

laboratory has always helped

theory with practice and so to spend most of


flying height mentioned above.

computing centre
to acknowledge

is

my

me

to

combine

time at the desirable

The cooperation of the

staff

also appreciated. Last, but not least,

of the

Meopta

my

pleasure

it is

some advanced student work which helped me survey

several remote corners of the terrain.

book converge

to relative

rather unimportant.
1

The author

Since most of the computations in this


quantities, the question of physical units

is

hopes that occasional Gaussian ornaments

like (47t/c)

will

not offend the

Si-men among us.


Problems for solving are attached to each chapter (with the exception
of the first and last ones). Apart from the tutorial purpose some of them
serve to convey additional information on the subject in a condensed from

on the part of the reader. Such


Another type of problems
assumes the availability of a simply organized computer program for
dielectric films in normal incidence. These are also meant for conditional
use, although writing such a program should be a simple matter for most
requiring a higher degree of cooperation

problems

may well be

skipped in the

first

reading.

of the interested readers.

1.2

The working hypotheses and the

practical bearing

of the theory

Optical thin film theory

is

essentially the

Maxwell macroscopic theory

of electromagnetic waves applied to the propagation of light across layered


systems. Its working hypotheses

may

be summarized as follows:

OPTICS OF THIN FILMS

18

is an optically isotropic medium, characterized


by its refractive index n, real for dielectrics and complex for metals
two adjacent media are separated by a mathematical dividing plane,

the mass of the film

(i)

(ii)

(iii)

where a discontinuous jump of refractive index occurs


apart from this, a continuous dependence of refractivity on space
coordinates is admitted. For practical purposes it is sufficient to consider n to be dependent only on depth in the layer (so called normal
inhomogeneity)

(iv)

a layer

is

its lateral

layer

is

defined in space by two parallel dividing planes, as by

dimensions being practically

(ii),

The thickness of the

of the order of the wavelength of light

the incident

(v)

infinite.

wave

is

linearly polarized in

considered as being plane, monochromatic and

one of the two basic azimuths, p and

s,

with

respect to the plane of incidence


Let us at once mention some existing physical factors which are mostly
neglected, or considered additionally as a possible perturbation on the

adopted simple model of

These

stratified

media.

are:

a) polycrystalline structure

of evaporated

films, possibly causing

some

scattering or absorption of light

and dividing

b) roughness of substrate
as
c)

by

anisotropy of film material due to structure or internal stress

d) dependence of structure

thickness
e)

planes, again leading to effects

a)

(critical

and

optical constants of films

on

their actual

with some metals)

time-dependence of refractivity and thickness (ageing)

f) diffusion

between adjacent materials, giving

rise to internal transition

layers

giving rise to external transition


g) subsequent adsorption or oxidation,
layers

h) inhomogeneity of films
i)

due non-stationary evaporation conditions

dispersion of optical constants of dielectrics

(always taken into account with metals)

To

take account of

a),

b) calls for

more work on

the standard mathe-

matical model with a corresponding increase of numerical

work

in the

applications of the theory.

The papers by G. Ross., [14], may be mentioned as a recent effort to


consider the scattering effects in the mass of the material. The influence
of surface roughness seems to have been studied by more authors. Diffuse

INTRODUCTION
reflection

on very

is

19

either treated in terms of geometrical optics or as diffraction

fine surface irregularities.

for thin films, but so far

it

The

latter

approach

is

of importance

has only been used for single boundaries, to

account for anomalies in measured Fresnel

or for single films,

reflectivities,

to estimate measuring errors of ellipsometry. These problems are discussed


in 12.3. Neither surface nor

volume

scattering have been incorporated

into a complete multilayer theory.

In a simplified approach, volume scattering

of

slight

may

be taken as the cause

energy losses in the collimated beams taking part in multiple

interference. Accordingly,

an empirical damping factor

may be

introduced

summation formulae, leaving the refractive


indices real. This method will be used in sections 5.3 and 12.2 of this book
to account for some phenomena of practical bearing.
Although anisotropic media (point c) have long had their own matrix
for the amplitudes in the Airy

caluculus [15], with a substantial recent generalization in

[16], it

can only

be used to compute the transformation of the amplitudes upon one tra-

no account being taken of multiple

versal of the system,

reflections

due to

internal Fresnel coefficients.

Items d)

i)

could be taken into account by the present theory if

the actual optical parameters and the actual inhomogeneities of the system

were available. Since a surgical look into a completed system


exception (see [17,

18]),

recourse

is

made

then sought between computed and measured

The

interpretation of the

is still

to assumptions, and a best

phenomenon

an

fit si

results, [19].

listed

under d)

is

beyond the

scope of the macroscopic theory, being essentially a generalized theory

of dispersion.

It has been intensely studied by the Marseille group of thin


and others, [20, 21].
Having established the working principles of the theory of thin films,
we may ask to what extent it may give valuable answers in physical research
and in practical applications. The situation differs between dielectrics and

films

metals.

In the optics of dielectrics, multilayer systems are analysed with an

accuracy which

is

adequate for subsequent photometric measurements.

and positions are


made, as well as means being devised to correct long-wave or short-wave
subsidiary maxima outside the bands. With reflectors and semireflectors
energy levels and states of polarization in oblique incidence are successfully
computed and means are devised to obtain broad reflection maxima.
Monochromatic filters with various types of transmission maxima (peak,
Reliable predictions of stop-band or pass-band widths

OPTICS OF THIN FILMS

20

square-topped) are designed and optimized with respect to losses. Many


types of antiref lection layers have been computed for various band-widths

unorthodox demands of individual customers can


be met, the development always starting with a computer analysis.
Some critical situations arise when the resulting reflectivity is meant

and

ripples. In addition,

to be zero or 100 percent (high-performance antireflection films, laser


mirrors). Photometry then raises higher demands than theory is able to

meet with the underlying data. The problem is rather a technological one.
In the optics of metals, possibly combined with dielectrics, structural
effects cause discrepancies between theory and experiment due to uncertainty of optical parameters (see above). Nevertheless, computations are
useful at least to give a fairly good qualitative theory of the system under

which then guides the final refinement in the experimental phase.


Also, some advanced design concepts in the optics of combined metal/
associated
dielectric layers are due to theory alone (e.g. all the phenomena
study,

with the concept of induced transmission).


Last but not least, the macroscopic theory -sometimes also called

phenomenological- defines measurable optical constants n, or r\ and x,


and yields formulae for their determination from suitably conducted
measurements.

1.3

Wave

equations of the electromagnetic field*)

media is concerned with the propagation of


are either
linearly polarized harmonic waves in systems of media which
optical
partwise homogeneous and/or normally inhomogeneous, i.e. their
the
layer.
normal
to
the
along
measured
depth
the
on
constants depend

The theory of

stratified

is not so.
In these cases the form of the waves is planar, but generally this
waves
electromagnetic
the
of
components
We therefore first assume the

to have general phasor functions:


Ja
E(x, y, z) e *

H(x, y, z) e

jtot

= V( " D

following sections
*) Systematic development of ideas called for this and the
details they treat will
to be introduced at this stage of the book, although the full
Any reader
not be needed until much later, in the chapter on inhomogeneous layers.
eager to plunge right
with basic knowledge of the electromagnetic theory of light, who is
this introductory chapter
into the main subject, is encouraged to skip sections 1.31.7 of

and

return for reference

when needed.

21

INTRODUCTION

finding various types of electromagnetic (linearly

The problem of

waves in various types of media

polarized, harmonic)

that of finding the phasor functions as solutions of

is

identical with

differential equations

which result from Maxwell's equations.


Assuming the media to be at rest and without any electrical charge,
Maxwell's equations for the harmonic waves are (in Gaussian units)

where c

is

div (eE)

cud

div (/iH)

H,

-j

the velocity of light

(1-la, b)

H=

curl

and the complex

^ IE

(l-2a, b)

dielectric constant

= s -j

(1-3)
CO

known formal expedient accounting for the conduction current


in (l-2b). (Any time we need to stress that a quantity is complex the horizontal bar will be used. However, other quantities not marked in this way
is

the well

may
is

to

also be

complex numbers. Complexity due to cumulation of layers

marked by bold face types.)


For reasons of generality we shall first assume the material constants
depend on all three variables:

occasionally

e(x, y, z), n(x, v, z), a{x, y, z), e(x, y, z)

We then have
=

div (eE)

div

Setting the left-hand side equal to zero

+-

E grad

and introducing the logarithmic

derivative leads to the relationship

divE
Taking the curl of
curl. curl

where the right-hand

side,

curl

Inserting this

(l-2a)

and

= -Egrad(lne)

we have

grad div E

- AE =

with

fi

variable,

\i

curl

(pH)

(1-4)

H+

(1-4), into (1-5)'

-j

curl (juH)

(1-5)

must be performed
grad n x

and using

as

(l-2a, b)

we

obtain

AE + ^
c

efiE

grad (E

grad In

e)

grad In e x curl E

(l-6a)

OPTICS OF THIN FILMS

22

In a similar

way we

obtain, quite symmetrically,

AH +

ifiH

+ grad (H

grad In ^)

+ grad lni x curl H =

(l-6b)

These are the

differential equations for the

general case of inhomogeneity. It

is

phasor functions in the most

only in this case that there

is

complete

symmetry.

The symmetry
terms In

fi

in fact almost complete, because in the latter

is

alternates with In s or with In

specialize for

i.

This symmetry vanishes

we

normal inhomogeneity:

Introducing the coordinate system in such a


are parallel with Oxy, the material constants

Assuming

two

if

n to be
we have

in addition

optical applications

way that the

may

layer surfaces

be functions of z only.

constant (and possibly equal to unity) in the

JE + ^-i + grad(,^^-) =

(*!)-

(l-7a)

AH

\ ipH +

grad (In

i)

x curl H

(1 -7b)

Now
with

its

let

a linearly polarized E-wave be incident on the layer surface

vector oriented normal to the plane of incidence, this plane being

Oxz.

identified with

(l-7a) then

assumes the form


d

co

_,

,. _ .
(1 " 8a>

v
V
-ri- + -rir + -r ^( z) Ey =
c
az
ox

E E
x

being zero.

Turning to the third term in

a normally

(l-7b), it is evaluated for

inhomogeneous layer as

JdH x
'

\ Szs

dHz \ dln$
8xf) ^ dzM

JdHx
J

\dy

dHy \

din's

dz ) M dz h

The second bracketed term vanishes, however, if we take E


polarized as jEy and insert this into (l-2b), which then reads

>S

(8HZ
_
~
\Jy

8HA - (8H* _ 8H\ + k


cT) j {-oT IF)

to be plane-

(^_^\
\JT
dy )

INTRODUCTION

23

Writing (l-2a) out in

we can

(l-7b)

infer

may
a

full also,

from both equations

therefore be written in

component form as

dx
5x

dz

\d z

te
d

dx

dz

8x J
co

pi(z)J7,-0

(l-8c)

Eqs. (l-8a, b, c) describe the harmonic

wave of the

so-called transverse electric

as s-polarized.

We

shall

adhere to the

field for a linearly polarized


(TE) type, traditionally also denoted

latter term.

Considering the other basic polarization


transverse magnetic (TM), wave, we have

state,

H = jH

the /^-polarized, or

and by the same argum-

ent as above find

The

dy

dy

third term in (l-7b)

is

now

evaluated as

Sine 8H

-J

dz

dz

and the equation reduces to

^
dx

The

aX
dz

aini(z)

8H^

Sz

dz

jgl
c

.
Mz)H
* w y

third term in (l-7a) written out in full yields

(l-9a)

OPTICS OF THIN FILMS

24

where non-zero values appear only in the

We

first

term of

and

in the k-term.

thus arrive at the following component form of (l-7a):


2

^
5x

EX

Ex

6E2

a^ + ^^in^

dz

m2

8 In e(z)

alin^)

dz

dz

_.

dz

^
c

(l-9c)

Eqs. (l-9a, b, c) describe the harmonic field for the p-polarized wave.

Obviously, (l-9a)

than (l-8b,

c). It is

simpler than (l-9b, c) just as (l-8a) was simpler

is

easier then to describe the behaviour of the transverse

component of the electromagnetic wave. Since the vectors and H are


interrelated by the Maxwell equations, we are free to choose the simpler
differential equation as the starting point, determining the other component
from the general field properties (referring to (1-2): essentially using the
partial derivatives of the solution found).

Let us specialize these results for normal incidence using the notation
for the p-ca&e,

assuming E

i.e.

oz

e^ _
dz

We

have from (l-9b) and (l-9a)

_ain
!!

iEx

w L ep,

8z

col

Az) Hy =

a-iob)

E% obeys a simpler*) equation than Hy due to the assumption that n = const.


Finally supposing the

medium

to be homogeneous, (l-7a, b) reduce

to the well-known d'Alembert equation


2

AA + ^-/isA =
C

For

*)

Simpler to solve

0,

A= E

or

(1-11)

J1

complex this is actually the equivalent of the telegraphy equation,


for e real we have d'Alembert's equation proper.
Recalling (1-8) and (1-9) we see that the transverse component always
oscillates by (1-11), but with a variable e = e(z).

Ch. 10 that

it

is

is

not always equivalent with simpler form. E.g.

contains an additional term with the

forE.

we

shall see in

easier to solve the differential equation for the H-vector, although


first

derivative as

it

compared with the equation

INTRODUCTION
1.4

25

The plane wave

in a

homogeneous medium

While we proceed from the general case towards the


deriving the differential wave-equations,

it is

expedient to

special case in

move in the reverse

direction in seeking the solutions.

Taking the homogeneous medium, the basic type

is

the linearly polariz-

ed monochromatic plane wave

A =
where k

is

ajtf exp {][cot

is

z cos 0)]}

(1-12)

medium and the angle


wave normal in the Oxz plane

sin

k cos

a unit vector along whose direction the oscillations of

place, while si

A may

the propagation constant in the given

defines the orientation of the

k(x sin

is

take

the complex amplitude of these harmonic oscillations.

stand for either or H.

Suppose formally we have a />-polarized wave. For the moment let


us take its oscillations along a general azimuth /? in the Oxz plane, so that
the phasor of (1-12) for the electric

With

(i

sin

k cos 0)

component

S exp

[-jk(x

is

sin

respect to the preceding section the magnetic

z cos 0)\

(l-13a)

component must be

taken as

H = jHy = pf exp [-jHx sin

z cos 0)]

(1-1 3b)

Inserting these results in (l-9a, b, c) with e constant, the following condition


results for the

propagation constant:
2
k =.L/ii

= k^i

(1-14)

where k

2jtA

_1
is

the propagation constant in vacuo.

Note: The product as* is sometimes written as the single symbol A, called the
complex vector amplitude. It involves the concept of a physical vector of direction a
and that of the complex vector ^, describing by its rotation with exp (j<ot) harmonic
oscillations of the physical vector A. We prefer the composite notation ast, which is
more apt for a later generalization in the optics of metals: both for E and for H, a splits

up

into

a complex physical vector

meaning.

We

shall often shift

a'

+ ja",

while si retains

s/ in phase along the

2 axis.

its

purely mathematical

OPTICS OF THIN FILMS

26

Introducing by analogy with dielectric media a complex refractive

index n

t]

jx such that the intuitive relationship k

tive index as the ratio of phase velocities)

far for the phase velocities),

no implication so

(with

k n

(n

we

refrac-

k = k n

formally replaced by

is

see that (1-14)

is fulfilled if

(1-15)

y/Ou)

which implies
2
ri

where

is

From

-x 2 =

tive
trics

afii

(1-1 5a, b)

(l-16a,b) one can deduce

is

y [V(*

2 2
+ 4* T ) + ]

0-17a, b)

a relationship between the optical parameters

medium and its electro-magnetic


we simply have
n

The

= JHfJL =

the period of the oscillations.

J}
This

t\x

fis,

explicit

material constants

r\,

e,

x of a

n, a.

dissipa-

For

dielec-

= VO0

(1-18)

importance of these relationships

is

very limited, because

they have only been verified to some approximation in the far infrared.

The problem

is

that one uses the constants

e, \i,

a measured with more or

phenomena involving very high frequencies.


The only inference we shall make from (1-16) and (1-17) is that the
_1
while
optical constants of metals explicitly depend on frequency T
with dielectrics this dependence is only implicit through e. The practical
consequence is that the measured values r\ and x are much more dispersive
less static fields in

than those of n.

We

thus

come

to another point of this discussion: adapting (1-12)

by a condition of the type


parameters
in

r\,

(1-13) leads to the introduction of

measurable by purely wave-optical means, as

x,

due course.
Let us now

insert

as/ exp

k n into

xd

(1-12).

We

ex P

mt

some new

will

turn out

have

~ id

(1-19)

INTRODUCTION
where d

27

= x sin

direction of its

z cos

normal

covered by the wave in the

(9 is the distance

a phase velocity

at

c\n

_1

some amplitude attenuation exp ( 2nk xd).


The components of the complex refractive index t], x may thus naturally
be interpreted as refractive index proper and absorption index.
there being

make

In order to

some

further conditions

with constant
div

fulfilled in

addition to (1-14). Taking (1-4)

(l-13a) yields

s,

= - jk <f(sin

In addition to

compatible with Maxwell's equations,

(1-1 3a, b)

must be

Hs =

sin

we have

cos p cos

also Es

= 0,

0) =

which

=>
is

fi

n/2

the well-known condi-

tion of transversality for electromagnetic waves (established here for the

plane wave within the formalism developed for the />-polarization).

Taking

now

we have

(l-2b) for (l-13a, b)

dH y

dH y

dz

ox

ca

__

which in both components leads to

\JP =
depending on

ft

+
tf

if

nil. Referring to (1-15)

we may

write

= l(\ / - nS

(1-20)

the latter version being important for optics where n

equal to n due to (1-15).


The sign problem is obviously

settled if

we

1.

Js

is

practically

express our result in the

form

H =n[sx
We
wave

have thus shown

in a

with two
related

by

all

the essentials of a plane monochromatic

homogeneous medium.

It is

described by the expression (1-19),

different amplitudes for the electric

(1-20)

and

(1-21)

and magnetic

intensities

(1-21).

Obviously, the planes of equal amplitude are parallel with the planes

of equal phase. Such waves are called homogeneous, as contrasted with

OPTICS OF THIN FILMS

28

inhomogeneous waves, where such a parallelism is lost. Situations of this


kind are encountered when an absorbing medium is entered through a plane
surface at oblique incidence. We shall develop the corresponding generalizations in the section dealing with metallic films.

non-homogeneous media

1.5 General types of solutions in

We

now approach the solution of (1-8) and (1-9) in terms of a


method known as separation of variables. Taking a hint from (1-12) which
shall

can be written as a product of the type as#U(x)

V(z) exp

(jcot ),

where,

and V are the remaining exponentials, we try to write the


s-polarized wave in the normally inhomogeneous medium as
of course,

=/ UWV(z)

=j

Inserting into (l-8a)

we obtain

a 2 -,,A

/a 2 v

\8z

7~ u wV =

tI
+ r
fis(z) v U +
2
J

8x

r
2

which can be reconciled with the following two ordinary

differential

equa-

tions

^
dz

J Az) V = G V,
2

-G 2 U

(1.22a, b)

dx

G being a constant.
Obviously, (l-22b) has a solution

U(x)

const

exp (jGx)

(1-23)

so that

E,
will

*,V(z) exp (+jGx)


is

a solution of

= ^- /i8(z) - G 2

(1-25)

be a correct phasor of the s-polarized wave,

^
dz

f (z)

V=

0,

f (z)

(1-24)
if

V(z)

The constant G is usually determined from the boundary conditions


imposed by the fact that the inhomogeneous medium starts at a surface
the
adjacent to a homogeneous space (or layer) of refractive index n
,

INTRODUCTION

29

incidence angle of the

wave being

6>

Equalizing the corresponding jc-func-

tions for a fixed z yields

G=
n
c
With

y (x,

z)

sin6>

(1-26)

known, the magnetic components

for the s-case are

determined from (l-2a) as

H. =

H =

;--,

dz

JC0/I

--

^-

jCOfl

(l-27a, b)

ex

Turning now to the /^-polarization, we write the transverse magnetic


*

phasor as

H = JHy = WMX)

V(2)

Inserting into (l-9a), separation of variables

is

a solution

The

= jf,v(z)

if v(z) satisfies

electric

again obtained and

exp (+ jGx)

(1-28)

the equation

component

is

then determined from (l-2b) as

*."A^L
ox

*.--A^.
oz
jcoe

The second order

is

0-30a,b)

jcoe

differential equations

(1-25)

and

(1-29) are the

cardinal problems of the theory of inhomogeneous media. Their solution


will

be presented in Chapter 10 for several types of inhomogeneity.

1.6 Transport of energy

The measurable quantity

in optics

is

the radiation flux rather than the

amplitude or phase of electromagnetic waves. Interference films are expected


to modify the energy fluxes rather than the wavefronts.

We

shall

now

briefly treat the corresponding concepts.

Electromagnetic theory defines the energy flux as the vector product

i xH
called Poynting's vector.

(1-31)

OPTICS OF THIN FILMS

30

A theorem then states that for any kind of electromagnetic disturbance


a balance

between the rate of change of electromagnetic energy

exists

and the flux of the vector P across that surface.


as the radiation flux per unit of area normal to it.

stored inside a closed surface

is

therefore interpreted

With quickly

oscillating fields

We

are meaningful.

now

shall

only the time-averaged values that

it is

deduce a formula for computing the time

average of (1-31) given a plane monochromatic wave in complex notation

of the type
part of

(1-12).

This

of course a symbolic replacement for the real

is

allowing easier manipulations provided

itself,

are linear. Such

not the case with (1-31)

is

Taking the

field

(jcot),

components generally as E(x,

we

it

out in

full

*"

in order to see the correct result.

H(x, y, z) exp
in space of

the operations

all

and we must write

exp Qcot) and

y, z)

are interested in the time average at a fixed point

P=

_L [Re ( e

j<ot

x Re (H e^ )]

(1-32)

Writing the real part of a complex quantity z as half the

sum z +

z*,

we

can replace (1-32) by


[(E e

E* e- j0") x (H e"

Jart

+ H* e

**)]

16ji

(E x

H e 2ja" +

E* x H*

- 2jfl> *

E* x

H+

E x H*)

16re

On the time

average the

first

PAV =
which

is

^Re(ExH*)

'

(1-33)

a general formula for computing the average flux of energy of an

electromagnetic harmonic

H(x, y,

two terms vanish and we have

wave with given phasor functions

E(x, y, z)

and

z).

first use this to compute the energy flux carried by a simple


wave of the type (1-12), possibly propagating as a damped but
homogeneous wave of the type (1-19). Using (1-21) we obtain

Let us

travelling

PAv = s-^

where Re()

tj

for metals

and n

Re(B).m 2

for dielectrics.

(1-34)

INTRODUCTION

31

The energy flux of a homogeneous travelling wave is therefore propormodulus squared of its (local) complex amplitude and to the
refractive index proper of the medium. We shall frequently use this result
tional to the

in

forming the energy coefficients of reflection and transmission from the

corresponding amplitude coefficients, which are the immediate results of


thin film computations.

more general use of formula

waves in metallic media

At

present

energy flux.

It is

we

shall

(1-33) concerning inhomogeneous


be discussed in due course, (section 4.5).
mention another general aspect of computing the

will

not necessary that only a single travelling wave be consider-

ed in (1-31) or (1-33). In fact, E and


the integral of P over a closed surface

H
is

must represent the

total field, if

to be in balance with the changes

in the volume-stored energy.

In thin film theory the space investigated for energy balance

an

infinitely

ing one or

is

usually

extended slab of medium, mostly uniform in thickness, contain-

more

layers.

The

total field

on

its

boundaries

the

is

sum of the

incoming and outgoing waves, these waves being of course coherent.


Let us therefore have two travelling waves of equal polarization running

For reasons of simplicity let us take these directions


normal to the boundary. Drawing this boundary as a vertical line in a conin opposite directions.

ventional figure, one

may then speak of a right-going and a left-going wave.


now widely adopted subscripts R and L, respec-

Distinguishing these by the


tively,

we have
cl

Pav/total

- -gj^ Re [(ER + EL) x (H| +

H)]

- -^ L Re(ER xH) + Re(EL xH*) + Re(ER xH + EL xH*)]

(1-35)

Using the obvious substitutions resulting from (1-21)

HR = n(s

HL = (-s

x Er)

x EL)

(understanding that the E-vectors in the R- and L-waves are measured

along the same positive axis)

Pav/total

we can

- s-^ Re(n)

rewrite (1-35) as

SK

2
|

- $-|- Re() /L

+ s -; Re [ 2j Im(E L E*)]

2
|

+
(1-36)

OPTICS OF THIN FILMS

32

This formula indicates that the total (in other words: net) flux of energy
across a surface

given by the difference of the individual fluxes carried

is

by the travelling waves plus a


two waves.

third term

which

is

due to interference of the

we have

the intuitive

result that the net flux is simply the difference (or algebraic

sum) of the
media which

In dielectrics with real n this term vanishes and

two

One can always reason

partial fluxes.

are never metallic,

and

in this

way

in outer

The

in dielectric films generally.

implications for

metallic films will again be deferred to a later occasion, where the effects

of inhomogeneity of waves will also be taken into consideration.

1.7 Polarization states

So far we have only considered linearly polarized waves oscillating in


same direction. This is actually the only case of importance as far as
energy detection is concerned. In this section we shall pay some attention
the

to this aspect of interference.

Let us consider two travelling waves E t and 2 differing in azimuth


in the

Oxy

plane by

/?.

If

El

is

directed along the x-axis,

we may write

the

average Poynting vector of the two waves superposed as

- Re {[iY^!

+ S 2 cos P) + }S 2 sin j8] x

571

x [-i\r|sin0

+ \{*e\ + jftcos #)]}

where use was made of the notation Ej


This

is

\S^ etc.

easily seen to equal

pAv/i +

fc

iW + -^ Re (***!*!)

For two coherent waves with a path


of space

it

cos pl

difference

Az

(1-38)

at a given point

holds that

Sz =
Writing n

(1-37)

e*

7
,

qS' l e

x
,

q proportionality factor-

the third term in (1-38) assumes the form

-^-nqK^cosjS.cosf^-Az +
4jt

\ A

y)
J

(1-39)

INTRODUCTION
This
It

is

33

the

term

interference

obviously vanishes for

ft

n/2,

of the superposition considered.


which results in the following general

statement: no interference can take place between two mutually perpendicular


linear polarizations.

As a consequence, any

other type of polarization

may

be decomposed in an orthogonal system of coordinates into two linearly


polarized oscillations with appropriate phase relationships, which may then
be treated independently as far as detection of energy is concerned.
Having more oscillations of different polarization states, they are
decomposed in one orthogonal system and then each set of projections is
superposed by the pattern (1-37).
In thin film theory the

common

orthogonal system

automatically

is

determined by the plane of incidence and the corresponding normal.

We

compute sets of coefficients for the p- and s-polarizations which are eventually combined into a final result according to the polarization state of the
incident wave.

In most practical situations the incident wave

is

nonpolarized, which

wave packets with


means that
random orientation. The input energy may be regarded as equally distributed between the p- and s-components. Correspondingly, the energy coefficients of reflection and transmission are
it is

a sequence of short eliptically polarized

e*

When

there are

- y(e P +
more

<?*

is

= y(*P +

(1-40)

*.)

thick substrate plates in tandem, their individual

surfaces having coefficients p'v ,p"


v,

the indicence

**

e s )

...

p'

,pl

...

tp ,

Tp", ... t'


s

%l, ...,

and

if

co-planar, then

y (eX - + QW

In optical instruments

it

...),

T,

= -l^

...

+ TX -)

(Ml)

often happens that a ray undergoes a series

of reflections which are not co-planar as regards the planes of indidence.

Then each

reflecting surface has its

own

coordinate system and a

new

decomposition must be made each time the wave comes from one surface
to the next.

Let us for the moment return to (1-38) and (1-39). They represent
two-beam interference in a rather general notation of electromagnetic theory,
including the assumption of a complex refractive index of the medium.
They have served for our demonstration, but will never occur in the "multiple-beam" theory of thin films. Relation to the classical interference

OPTICS OF THIN FILMS

34

formula of instrumental optics

medium

dielectric

(y

0)

is

easily established

and writing

by emerging into a

"intensities" for the energy fluxes:

^1 + 2 = ^1 +3^2+ 2 7(^1^2)008 T^-dz


J

References

[1]

Lord Rayleigh, Proc. Roy. Soc. (London),

[2]

P.

[3]

[4]
[5]
[6]

[7]

Rouard, Ann.

A 93,

565 (1917).

Phys., 7, 291 (1937).

d.

A. VaSicek, /. Opt. Soc. Am., 37, 623 (1947), with later developments.
A. W. Crook, J. Opt. Soc. Am., 38, 954 (1948).
W. Geffcken, German Patents BDP 902191 and 904357 (1954).
A. G. Vlasov et al, Prosvetlenie optiky, Gostechizdat, 1946.
L. N. Hadley and D. M. Dennison, /. Opt. Soc. Am., 37, 451 (1947) and 38, 483
(1948).

[8]

F. Abeles, Ann. d. Phys., 5, 596 (1950).

[9]

writing as

W.

[10] special issue

Weinstein,

J.

Opt. Soc. Am., 37, 576 (1947).

of Journ. de Phys. et Rad., 11, (1950).

[13]

H. Mayer, Physik dunner Schichten I and //, Stuttgart, 1950 and 1955.
O. S. Heavens, Optical Properties of Thin Solid Films, Butterworth's, London, 1955.
A. Vasicek, a) Optics of Thin Films, (in Czech), Prague, 1956,
b) Measurement and Preparation of Thin Films, (in Czech), Prague, 1958,
c) Optics of Thin Films, North Holland, Amsterdam, 1960.

[11]

[12]

[14]

G. Ross, Opt. Acta,

[15]

R. Clark-Jones,

[16]

D. W. Berreman,

[17] J.
[18]
[19]

[20]
[21]

M.

16, 95

and 451

(1969).

Opt. Soc. Am., 31, 488 (1941).

/.

/. Opt. Soc.

Am., 62, 502

(1972).

Pearson, Thin Solid Films, 6, 349 (1970).

H. K. Pulker and K. H. Gunther, Vakuum-Technik, 21, 201


W. N. Hansen, /. Opt. Soc. Am., 63, 793 (1973).
P. Bousquet and P. Rouard, Appl. Opt., 3, 435 (1964).
C. v. Fragstein and H. Romer, Z. Phys., 151, 54 (1958).

[22] seeref. 1. in

[24] see ref. 29.

Ch.

2.

Ch. 2.
in Ch. 3.

[23] see ref. 7. in

(1972).

2
Optics of dielectric layers
2.1 Notation and preparatory

remarks

two possible ways of numbering a system of layers we choose


the one beginning at the left of a drawing (which usually, but not necessarily,

From

is

the

the input side of the system), see Fig. 2-1.

f>,

^s

^-TT-

k+1

,?

h*

^^

E 1L
n

n1

"Z

Fig. 2-1 Notation in

starting

"k+1

"k

a layer system

from the

front.

we reserve the subscript 0, for the right k + 1


number of layers. (There is very small risk of confusing
-1
of Ch. 1.) In many situathis k with the propagation constant k = Ink
index
of
air
(= 1), k + 1 for that of
tions n will stand for the refractive
some sort of glass. In this case ng or n G will be written instead of nk+1
k layers imply the existence of k + 1 boundaries. These will in turn
be numbered from 1 to k + 1.
..., 6> k+ x
The refraction angles will be denoted by O
1
For the

where k

is

left

half-space

the total

OPTICS OF THIN FILMS

36

The

incident

wave

and refracted waves in all of


where only the refracted wave

gives rise to reflected

the media except for the output half-space,


exists.

The

and left-going waves in Fig. 2-1


and L, respectively.
In dealing with the boundary conditions, we provide all the entering
quantities with subscripts identical with the order numbers of the respective
boundaries and with a directional subscript R or L. Thus E 1R is the electric
component of the right-going electromagnetic wave, measured on the first
boundary, <f 1R is its complex amplitude. It remains for us to define on
characteristic parameters of right-

have the subscripts

which face of the boundary these quantities are measured.

We adopt a rule

current in optical imaging that quantities belonging behind the optical


surface

We

(i.e.

to the right-hand face of a boundary) are provided with a prime.

1R and

thus have

'
1R ,

H 1L

and H'1L as

pairs of different quantities.

Fig. 2-2 Orientation of coordinate systems

and the electromagnetic wave

The boundary conditions

trihedrals.

are formulated in terms of the tangential

components of the electromagnetic field. It is therefore expedient to introduce


a special notation for the complex amplitudes of these components:

(A.

=E

We

again distinguish between

On

the other

hand

(*%. = H

Em

and E'1K
1L and H'1L etc.
there are quantities where a distinction by prime
,

E2 , =
on the left face of the second boundary yielding E 2s this
being equal by principle to E 2 , as the tangential projection of E 2s =
= *2K + E 2L
is

unnecessary. These are the total field tangential intensities; e.g.

= 2R + E 2L

OPTICS OF DIELECTRIC LAYERS

37

The orientation of the coordinate system with respect to the stack of


and to the plane of incidence is shown in Fig. 2-2.
The Oxy plane is usually placed in the first boundary, but any other
boundary would do as well, because we only work with phase differences.
All the cases of oblique incidence can be treated as /- and s-polarizations only. This is no limitation in practice, since any state of polarization
may be split into these two cases in the orthodox way (see 1.7).
In every plane electromagnetic wave the vectors {E, H, $} form a righthanded trihedral. We shall orient these trihedrals in the incident and reflected
waves in such a way that for normal incidence both the/- case and the s-case
yield the same result as regards the phases of the E-vector: the H-axis
changes orientation upon reflection, and the E-axis does not. In the refracted wave the orientation of the trihedral is identical with that of the
layers

incident wave.

Note: Most of the literature on physical optics uses, for/>-polarization

whose E- and H-axes are oriented negatively


with respect to the drawing in Fig. 2-2. The convention adopted here
follows a recommendation by Rozenberg [1] and has the advantage of
unifying some signs in Fresnel's coefficients. (See also [2]).
in reflected light, a trihedral

2.2 Boundary conditions in admittance notation

The theory of

optical stratifications is based

boundary conditions

on repeated use of the

between two media, the

for a simple dividing plane

coherent coupling between adjacent boundaries being effected by phase


shifts

applied to the separated R- and L-waves.

concise form of the

s-polarizations under

one
boundary conditions, possibly unifying Hasp- and
formalism, is therefore desirable. This purpose is met by the concept of
optical admittance, borrowed from similar problems of network theory.
Bearing in mind that only the tangential components enter into the
boundary conditions, we define the characteristic optical admittance of
a medium as the ratio of the tangential components of the magnetic and
electric intensities in the right-going

wave:

7 = 5*
Er

(2-1)

OPTICS OF THIN FILMS

38

Specifying
into the

now

for the/>-

and

s-polarizations, projecting accordingly*)

boundary plane and using

Y,

(1-2)

!!*
<f R

we have

(see Fig. 2-3)

-- n cos

(2-2a)

n
Y,

The

Ey

negative sign with

the projection of

(2-2b)

cos

Er

follows from the fact that with a positive

points along the negative x-axis.

Scheme of

Fig. 2-3

projections for the

p- and s-polarizations.

The
left-going

With

may

may

characteristic admittance

wave as

-HL /EL

Then again

these definitions the

also be defined in terms of the


(2-2a, b)

hold for

Ya

boundary conditions for the

and

Yp

v-th surface

be written as

V5

Evs = E vR + EvL = E^ R + E'vL


= r,.!^ - Yv . E^ = FV E; R - YvE' l
v

(2-3a)

(2-3b)

where the Yv Yv . t are taken as rpv Fp/v _i or Fsv F, /v - ls according to


the type of linear polarization considered.
The equations (2-3a, b) have the simple form of boundary conditions
for normal incidence, the optical admittance taking over the role of the
,

refractive index

and the tangential components

E oR EoL
,

...

assuming the

place of the full vectors.

Owing

to the

symmetry of

(2-3b) in the Y,

the negative sign in (2-2a) defining

of the boundary conditions (see

Ys

However,

we may obviously drop

this is

not allowed outside

10.3.2).

Note: Being confined to dielectrics, and excluding for the time being the case of
we may say that all the characteristic admittances will be real numbers.

total reflection,
*)

We do not explicitly deduce the Snell law as a consequence of the boundary condi-

tions, but

proceed directly to amplitude relations assuming the refraction angles known.

OPTICS OF DIELECTRIC LAYERS

39

2.3 Fresnel's formulae

Let us

first

We

R-wave.

consider the v-th boundary in isolation, illuminated by an

then have E^ L

and a simple algebraic elimination

yields

the two formulae of the Fresnel type

E vl _
'vtL

By symmetry of the
components
^vl/^vr

is

The formula

reflection

0\r) s

E cL /E dR

^v-i

E vR _ 2j v _
EvR
Fv _i + Yv

'v

Yv +i + Yv

(2-4ab1

and reflected rays, the ratio of tangential


same as that of the actual complex amplitudes

incident

the

(2-4a) therefore covers the classical Fresnel amplitude

formula at oblique incidence both for

its

p- and s-versions,

Things are somewhat more complicated in transmitted


is

(r vR)

identical with

Fresnel's ratio <^ R /? vR only for the s-case,

light: (2-4b)

where

and

For the /7-polarization we must compute S as E/cos 0, which


an additional factor cos j-^cos V for the />-polarization on the

are identical.
leads to

righthand side of (2-4b).

To

cover this feature generally for the transition of light between any

two media of order numbers

/cos

'vr

full

6>s/cos 6>j

\1

iJ

The Fresnel transmission

Writing out the

and j, we define

for

for

(2-5)

coefficient in particular is then

c v-i/v-r?

1Y

"

form of the Fresnel

_
,

(2-4c)

coefficients is left to the reader

as a problem.

Graphs describing Fresnel


presented in [3] and [4].

reflection

and

refraction at a

boundary were

is practically secured in all cases, where the layer system is evaporated onto
a supporting plane-parallel slab of material. Illuminating at oblique incidence from
either side, the input medium is actually air and no total reflection may occur at any of the

This situation

boundaries.

cubic embedding

is

needed to provoke such a situation

(see Sect. 5.5).

OPTICS OF THIN FILMS

40

2.4 Input admittance at a boundary

Another useful concept of


films is the input admittance of

tangential

components of the

circuit theory

a boundary.

total-field

may

which

be used in thin

defined as the ratio of the

It is

magnetic and

electric intensities:

[XI

y(v)

= _^vS_

(2. 6)

Es

The order number of the boundary

is

now

contained in the upper

bracket, thus expressing the cumulative character of this kind of admittance.

We also introduce the cumulative reflection coefficient rR

v)

influence of

all

the boundaries

v,

E vL =

. .

k,

r^E,vR

Moreover, expressing the magnetic components by the


according to (2-2a, b),
y(v)

we may

covering the

so that

electric

ones

write

_ yv -iEvR Yy-xrR^Eyn _
EvR + rEvR

v_1
1

R
+ #>
r.

(2-7)

from which
v)

"r

Y
= r:i

Y*"'

^7

( for

either of the polarizations)

(2-8)

This formula shows that the cumulative reflection coefficient may be


computed by a Fresnel type pattern, inserting the characteristic admittance
for the input medium and the input admittance of the boundary for the
second medium. A method of recurrent calculation for the Y (v) will be
shown in 2.7.
Let us simply check for a single boundary:
r Rj

Evs = Ev Yw = Yv and

r vR as expected (see Eq. (2-4a)).

Note: The use of input admittance tp compute the transmission factor


venient (see

= l- e

[5]),

and

is

is less

con-

also of limited importance for dielectric systems where r

OPTICS OF DIELECTRIC LAYERS

41

2.5 Matrix treatment of reflection

&

transmission on a thin

film system

2.5.1

Admittance matrix

Introducing the admittance matrix by the relations

-1

v-

'-(w,)

the boundary conditions (2-3a, b)

v*v;1=1

-!(!_)
may be

(2 - 9)

written as the matrix equation

(2- io)

-'fc)- -()

or alternatively

We

shall call the single-column matrices in these relations matrices

field (separated in the sense that one knows the R- and


L-components of the total field). Eq. (2-11) describes the transformation of these matrices upon penetration through a boundary from its right

of the separated

face to the

one.

left

The transforming matrix is accordingly called the matrix

of refraction. Writing out in

W-i/

(i

full

one has with respect to

Yjr-.\, i-r,y,-_YV

(2-4)

Cv-l/v

foip or s
It is

useful to

know

(2-12)

the determinant of this matrix. Obviously

detWD _ 1/D = YJY,.!

(2-13)

Note: We have established Eq. (2-11) in such a form as corresponds to working


through the system from the right to the left, i.e. from what is usually the output towards
the input. However, this does not prevent us from choosing the actual input on any end
of the system (see 2.5.4).

OPTICS OF THIN FILMS

42

Phase matrix

2.5.2

Writing Eq. (2-3a, b) for


for

two adjacent

planes.

Both

and

sets

we have the boundary conditions

1,

of complex amplitudes

E are not independ-

ent, because the undulations on the two boundaries are coherent and are
liable to the obvious phase transformation

-ft

-)(&)

where
(2

Pv=-J- n vK COS V

<

is

the well-known phase-shift angle

(It is actually

shall

traversal of the v-th layer.

1.4.)

denote the square matrix in (2-14) as

determinant

is

Repeatedly using Eqs. (2-11) and (2-16) for v

phase matrix.

U((p),

and

2.5.3

System transfer matrix

call it the

one obtains the

Its

Uv

or in more detail

of unit value.

1, 2,

...

k,

1,

total transformation

R
(f.1

the increment of the z-component of the phasor of a plane

wave, defined in

We

upon one

" 15

01

U t W 12 U 2
S=

where

...

||

k _ 1/k

s ls

U k Wk/k+1 (g+;-)

(2-16)

||

be called the system transfer matrix. It transforms the tangential components of the separated field from one end of the system to the other.
will

2.5.4 Evaluating the transfer coefficients


Denoting the elements of S by s^,

i,j

from S
1,

2 and writing out in

full

for (2-16):

E 1R =
E 1L =
we may compute

SuEk+l.R.
s 2 iE k+1;R

+
+

s 2lE k +i,L
s 2 2E k+lfL

the amplitude coefficients of reflection

(in short: the transfer coefficients) for

and transmission

both directions of the incident

light.

OPTICS OF DIELECTRIC LAYERS

43

We

Let us start with a right-going input wave.

and a simple computation

rR

where

c 0/k+1 is

duced by

(2-5).

= |iL =

2I,

fR

Ek+1L =0

= J%idL = i2l

s 1.1

(2 -l 7 a, b)

" 1R

the reduction for obliquity between the outer media intro-

We

recall that

& k+1

O cos

'cos

^o/k+i-Vi
"XI
and that

then have

yields:

/^-polarization

s-polarization

are read as fpR , fsR or fpR , fsR , according to the admittances

f, t

used.

For the other case of the input wave

rL

= 3Uk.
Ek + 1/R

Considering

=-hl
S

fL

we

and we have

= _i^_ = hUS. det S

W'j and

ll's

(2-18a, b)

5l1

^k+l/L

as the product of the

their determinants,

E 1R =

and knowing the values of

find

detS = Fk+1 Fo

(2-19)

so that (2- 18b) and (2- 17b) yield the important relation

ck

k+1
Ik+i
^
Y
J

2
2

/0

This set of formulae uses


matrix
outer

S and

f
*R
R

all

_
=

n k+l cos0 k+
"k+l^""^k+l

cos
n

ya
6>

.
-

(7.7C0
V- LK})

four elements of the system transfer

describes the behaviour of the layer system with respect to the

fields for

both the possible cases of illumination (R,

L). In oblique

Yp

incidence the basic linear polarizations are respected by taking the


values in the refraction matrices

D/u+1

For further work it is of use to introduce the


complex transfer coefficients.

We

or

full

notations for the

put
?

= re\

i=t<j d

where any of the subscripts R, L, p, s may be applied, e.g. rpR SsL etc.
r and t are the relative changes in the amplitude magnitudes, 5 and d
,

are phase-changes

upon

reflection or transmission, respectively.

OPTICS OF THIN FILMS

44

These values are extracted from r and i, given by (2-17) and


by the usual manipulations with complex numbers, e.g.

= 7(ff *)

Following the discussion of Sect.


ficients,

measured as the
ffR.L

It is

beam of

ratio

1.5

coefficient

obtain energy transfer coef-

0
*R>
"'

n k+1

(2-21)

tl

aperture before and after refraction (those in reflection

which

2-4.

This leads to the definition of a

cos6>

may be

SiL
"

""

cos>
(2-21')

cos@ k+1

interpreted as measuring the ratio of the

energy fluxes.

It is

energy balance p

new transmission

be called normal:

will

_ cos@ t+1

(see

we

f\t*

sometimes useful to make a correction for the cross-sections of a


finite

remaining equal), Fig.

It

of energy fluxes per unit area

TR

rR,L

2Ja

(2-18),

normal components of

only with the normal coefficient of transmission that the

(both for the R- and L-directions)

is

satisfied

problem 2-5).
There is yet another combination of the elements s^ which yields

a valuable

result;

we

find that

Mi
R'L

Vl =

|S|

s 12 s 2i

s z2

(2-22)

<f>-biOtn arta

riw:rf.-HM '
:

Fig. 2-4 Relationship

between beam areas

before and after refraction.

OPTICS OF DIELECTRIC LAYERS

The

45

left-hand side of this equation has

Airy summation

(see 2.4.1). In the

of the main diagonal elements of

some importance

matrix treatment

it is

in the

method of

given as the ratio

S.

2.5.5 Interference matrix and evaluation of the transfer


coefficients
Let us return to the matrix product in (2-16) and use the association
rule for the sets of the type

MV

l '*"
-VUV-'-lf{Y1 -Y
2
){ 0,
'

"

y,

cos

(p y

cos<p v

characteristic matrix.)

The system
S

Vo

\~

\ '

We shall call M v the interference matrix of the v-th


it

'

-^-sin<pv \

\jyv sin<j0

call

Y;1

t-^)[u -177

layer.

transfer matrix

(Some authors

is

then given as

MVk+1

(2-24)

= J7M V is the system interference matrix.


The determinants of M have unit values.
The physical meaning of the interference matrices

where Ml

(2-24) into (2-16)

v
The

and taking V

is

found by inserting

to the left-hand side:

fe)-&)=- -(l;")- M (H^)


v

interference matrices obviously transform the tangential

of the

total-field intensities

The matrix
Writing

M =

||

Wij

Es

components

no simple relation to the transfer


we must first compute S by (2-24) as

bears
||,

coefficients.

^2! + Yt m 12 + Yo l Yt m 22
1
ro n + Y m 21 - Y m 12 - Yo Y m 23
t
t
l
m u - Yo m 21 + Yt m l2 - YZ l Y% m 22
m u - Y m 21 - Yt m l2 - Yo 1 Yl m 22 l

(ii

^o

(2-26)

and then

insert this into (2-17)

and

(2-18) to obtain r RL , t RL .

OPTICS OF THIN FILMS

46

we have

In particular

Yq Yg m 22

= m lt
mu +

7o 'fynjz

Reduced matrix

Working out

Cos

2.5.6

+ Yg m 12 - Yp ^m^
+ Y^m^ + x Yp m 21
.

(2-27a, b)

same denominator

workR-coefficients

the product of the

2x2

only

matrices in (2-16) or (2-24)

represents a considerable amounjt of work. However, for various reasons

one does not usually need the R- and L-coefficients simultaneously. As will
turn out later, a number of symmetries exist among the energy coefficients,
particularly

when

the media are dielectric.

may have

It is

more

for the sake of phase-

compute the complete set of coefficients.


number of operations may be
reduced by one half if one sets out to compute the R-coefficients only. This
is done by putting E + 1L =0 and carrying out the product (2-16) or (2-24)
changes that one
It is

to

therefore useful to note that the

starting with the

one-column matrix

/Ek +1>R\
o

v
on the

right of these equations, proceeding leftwards.

It is easily verified

that the intermediate results will be

matrices from which E^ +1R

may

one-column

be factored out, and that the

final result

must be

()-()*"

<2 -28)

from which we are able to evaluate f R and fR by (2- 17a, b).


In computer practice this is accomplished by starting with the matrix

When
into the

one explicitly needs the


computer in reverse order.

L-coefficients, the layer system is fed

OPTICS OF DIELECTRIC LAYERS

47

2.6 Recursion formulae for multiple reflections

2.6.1 Generalized Airy

summation

The matrix method may be regarded as a modern approach to the


theory of stratified media, having the advantages of succinctness and generality

hand

both for basic research and for numerical procedures.

there have existed

methods of computing the

On

the other

transfer coefficients of

a single dielectric layer since as early as 1833 (Airy). These were later
extended to include metallic films and arbitrary numbers of layers and have

much of the theoretical work in the 1940's and 50's.


summation of multiple reflections inside each layer and
a recursion pattern for working across the system of layers. This method
served as the basis for

The idea here

the

is

forms the basis of the


Anders' book,

approach

it

[7]. It

offers for

in a very short

way

book by Vasicek, [6], and more recently of


importance for the future owing to the intuitive

classical

retains

its

many

practical situations.

We shall derive the method

again using the matrix notation,

[8].

Let us divide the layer system according to Fig. 2-5 into two subsets
and II, separated by a distance layer of phase angle <p v

Denote the

partial system matrices as S,

||

s'

||

and S

||

s'^

\\

and

carry out the product

s =
After some algebra

iKj||

s 21 s 1

Si
3
S 11
11,5,

reducing the expression s'^s'^ exp

by

us

I1

we may compute
S 21

ratios

=s

(2-17), (2-18)

and

r lR

(2-22),

(j<p D )

"

T
+

i 22 s 21

S 12 S 21

and interpreting the newly formed

we have

(t lK tIL

-rlR rlL )rm e


-2i<p

MLMIR

Fig. 2-5 Splitting

up a

layer system into

three basic components with a simple


central layer.

'

2i<p "

(2-29a)

OPTICS OF THIN FILMS

48

Similarly
C 0v

SllSll e

C v/k+l

S 1221 e

*ir*iir

(2-29b)

rIl/lIR e

should be emphasized that the r IR r R etc. concern the subsystems considered isolated (in the actual embedding of the adjacent layer v considered

It

The formulae (2-29ab) thus reduce the computation of the


the computation of two simpler systems I & II. Applying
to
system
starting
the same procedure to I and II, respectively, a further simplification is
as a half-space).

obtained.

left

In practice this amounts to starting with a single layer either at the


end or at the right end of the system, regarding it as subsystem I or II,

The

respectively.

transfer coefficients of this single layer are again given

by

and II now stand for simple Fresnel boundaries, see 2.3.


one further boundaries into consideration, regarding
by
take
one
then
We
subsystems II or I, respectively. This is the essence
corresponding
them as the
of the so called recursion method (see below).
(2-29a, b),

where

The formulae

(2-29a, b)

may

easily

be developed in

infinite

geometric

series

rR

Ir

= rIR +

* IR f ILi- IIR

<,r'r e-*"(l

e-

2j

"(l

+ q +q +

+
1

...),

. . .

(2-30a)

.),

'u/hr e"

2 ^"

(2-30b)

allowing of an interpretation in terms of multiple reflections in the v-th layer


(see Fig. 2-5). This is actually the way the formulae (2-29a, b) are often
deduced: first the series (2-30a, b) are intuitively set up, then they are

summed up to the closed forms (2-29a, b). Strictly speaking, this approach
may raise some doubt as to whether one really sums up everything, considering -the
Intuition

is

enormous amount of

really sure only with

possible zig-zags in the whole system.

a single

layer.

Moreover, Berning,

[9],

has

reported a singular situation in metals, where the series of the type (2-30a, b)
diverge (see Problem 4-8). In the matrix treatment (adhering esentially to
the boundary conditions), the formulae (2-29a, b) are simply the result of
algebraic manipulations. (2-30a, b) should be

of thumb

more or less regarded

as a rule

for deriving the former.

The importance of the formulae

(2-29a, b) is twofold: First, they serve

as a basis for a recursion pattern, which enables one to compute the transfer coefficients of the whole system given the Fresnel coefficients of the

We

shall elaborate on this


single boundaries and the optical thicknesses.
in the next section. Second, they express the transfer coefficients of the

OPTICS OF DIELECTRIC LAYERS

49

whole system by a formula resembling that for one layer

and

singled out) with composite boundaries I

II.

This

looking at multilayer interference in certain problems (see

is

(the v-th layer

a useful

way of

e.g. 3.4.2, 3.5, 5.2).

2.6.2

An

We
section

algorithm for complete Airy summation


show how the recursion mentioned in the preceding
two and three layers and then state (without

shall first

is

written out in full for

actually proving

it)

a general algorithm for writing the complete formulae

and t directly for any number of layers.


Having a two-layer according to Fig. 2-6 and subdividing it accordingly
for recursion from the back (which is simpler than from the front owing to
the identity (2-3 lb)), we obtain system I as a Fresnel boundary with the

for r

following simplifications:

'il

= -r 1R = -r IR

r 1L

we obtain

Inserting this into (2-29a, b)

r iR

The

left

boundary

*i!R

r lR r lh

(2-31a, b)

for the two-layer

'

r 1R rI1R e

t IR t lL

,
tR

'ir'hr^
same denominator

in subsystem II also being simple,

,*,

,->

is

\l-5ldi, b)

we may immediately

write
r ,IR

Everything

omit

+ r 3R e
-2
+ ^R^Re ^ 2

r 2R

now

r 2R'3R

(2-33a b)

same denominator

"*

'

we can
we have for

being expressed in terms of the R-coefficients,

this subscript entirely. Inserting (2-33a, b) into (2-32a, b)

the two-layer

rR

l+

,.

,.

tJih e
= li^LT

+r \*

(2-34a)

i(<pi+<p 2 )

(2-34b)

same as above
rf

rt

r3

"$
Fig. 2-6 Recursion pattern for a two-layer.

OPTICS OF THIN FILMS

50

should be noticed that the scheme presented in Fig. 2-6 calls for r R
to be computed first during numerical work, since it is the only quantity at
the start expressed entirely in terms of the known Fresnel coefficients. This
It

why the process is called recursion from the back. For this purpose it
would have been more convenient to have the films numbered from the
back also, as is the case in some books. However, aiming at the general
algorithm, it remains more advantageous to keep to our present system.
This will only cost us some occasional renumbering when switching from
a two-layer to a three-layer according to Fig. 2-7 and making a subdivition
is

for a back-recursion:

Subsystem

a simple boundary; subsystem

I is

may be computed by

II

(2-34a, b) effecting there the changes


"* r v+i. v

Proceeding

rt
r

r2

now by

e- 2J"

=
+

e- 2j * 2

r2 r 3

!.2, 3

(2-29a, b),

->

<?> v

<p v+1

1,2

one obtains for the three-layer

-a
2
1+ +
e~ 2>l9l+9ii + r4e > + r^r^+
-2 * 3
a,( l+ )
2,( +w>
r 1 r 2 r4 e"
+ ra r 3 r4 e+ JV^e

r3

r 2 rA

Q- 2 '^1+

^+

r 3 rA

e~ 2iV3

r 1 r a r 3 r4

e- 2,( * ,+w)
(2-35a)

tiff
iiWt

-j(<Pl

tH=

n.

n,

+ <P2 + V3)
( 2 -35b)

same as above

"t
Fig. 2-7 Recursion pattern for a three-layer.

We

see that the

formulae become more and more involved and are

not amenable to direct general analysis as functions of

many

variables

However, pursuing the recursion for more

layers, one Would


making it possible to write the result directly as a
simple fraction for any number of layers, [10]:
(i) define the phase, distance of the v-th boundary from the first (input)
(ro

>

9b)-

discover a set of rules

tooandary as

#v

<j?u.+

92

Pv-i.

2, 3,

...*+

1:

<*>!=()

OPTICS OF DIELECTRIC LAYERS


(ii)

51

define the phase exponential of the

a monotonic sequence of integers

number between

and k

and following the pattern

+ $h -

4> l3

...

(#, being defined

by

(i))

exp {2j[-<P h

(iii)

1)

odd type as being derived from


< l2 <
/L (L being any odd

/t

<Z>J}

define the phase exponential of the even type as being derived from
a monotonic sequence of integers // > l2
> 1$ (S being any even
. . .

number between

and k

exp {2j[<*v
(iv) define

4>

1)

and following the pattern

+ $h -

...

<p

s ,]}

the products of Fresnel coefficients:

odd type

rh r, 2

even type

(v) state the

rl3

... r,
.

. .

lt

L,

rls ., l[

<
<

l2
l2

<
<

...
...

<
<

/L

L odd

ls

S even

correspondence rule requiring that:

each odd (even) Fresnel product by (iv) is multiplied by a corresponding


phase exponential of the odd (even) type by (ii) or (iii) respectively
(vi)

the resulting r R and t R for a complete Airy summation


expressed by the formulae

_ sum of all the possible odd products rh rl2


1 + sum of all the possible even products
ru -r

. .

...

exp {2j[

exp

{2j [<*>,,

may

+
<t>

then be

P,

. .

.]}

...]}

(2-36a, b)

_ hh - tt+i exp {-jl>i

q> 2

... <p t
]}

same as above
where the statement
tonic subsets

=
It is

2, 4, 6 ...

lt

<

"all the possible"

l2 ...

lL

l[

full for

would
more than

means one must take

<l2\<l's

but never exceeding k

unlikely that anyone

formulae out in

<

where

L =

1, 3,

all

mono-

5 ..., S

1.

ever use this algorithm for writing the


3 or

layers.

However,

it is

theoretically

important to see the order which exists in the formulae describing the response
of a

One can arrive at equally general algorithms in the matrix


In the present chapter these general formulae will help us to
approximations.

stratification.

treatment,
establish

[1 1].

some

OPTICS OF THIN FILMS

52

2.6.3 Vector approximation of r


In

many

practical situations, particularly in the visible region of the

spectrum, the Fresnel amplitude coefficients r are of the order 0.20 or

0.30. Their products of increasingly higher order therefore tend to zero.

One

is

lead to the idea of neglecting

some terms

in (2-36a, b).

More

infor-

mation can be extracted from the reflection formula.


As a first approximation we have

rJ^Ti + r 2 e" jM +

r3 e

-KX1 + X2)

r k+i'

-j(M + X2++Xk)

(2-37)

where the / are positive or negative quantities and together with the exponentials form a set of complex vectors in the Gaussian plane (Argand diagram). For brevity we now write xv for 2</> v
The formula (2-37) is sometimes called "approximation by simple
reflections", the underlying illustration being given by Fig. 2-8. However,
adhering strictly to the idea of simple reflections, one would have to reduce r 2
.

by a factor

< 1R f 1L

r3

by t 1K t 2ii t21

t 1L

etc -> in order to

account for the Fresnel

attenuation of the emerging rays. This actually leads to a different approxi-

mation, which cannot be seen from our general formulae (2-36a,


Intuitively
is

dubious.

one would expect more

We

b).

exact results here, but the actual effect

shall adhere, as is customary, to the

expansion (2-37).

It is

it is clear that with k


number of approximating rays is k + 1.
The modulus squared T 2 is the object of interest in most applications.
The expansion (2-37) has been of great use in the theory of multiple
antireflection films: either one fixes the relative optical thicknesses by some

usually referred to as the &-ray approximation, although

layers the

integral ratios

and obtains

for the v ) by annulling

explicit solutions for the r v

are determined by the technology available


is

(and consequently

at several points of the spectrum, or the n v and rv

and the Argand diagram of T

jy

run across the spectrum, adjusting the relative optical thicknesses in such
T 1 small. Both methods will be used in the subsequent

a way as to keep
chapters.

Fig. 2-8

Approximation by simple

reflections.

OPTICS OF DIELECTRIC LAYERS

53

The.validity of the expansion (2-37) decreases with the value of the

About 20 percent may be taken

reflection coefficient approximated.

a generally safe

limit,

beyond which increasingly erroneous

T >

obtained, including the physically meaningless values

as

would be

results

(for details

see 2.6.5.)

2.6.4 Vector approximation of r/t

As a second

step one

may

think of the next higher approximation.

Since the binary products are contained in the denominator, the second

approximation would not yield a useful simplification. There

a better

is

way to follow.
Noticing thatj^2-35a) and (2~35b) have the same denominator, one
naturally lead to
rjt

form the
_1

(^/ 2

fk

i)

ex P [J(^i

<Pz

This has rigorously eliminated

...

'

9k)]

sum of au dd

may

T e**

infer that

fk+xJrapC-jfo +

<p 2

expresses

... o k

with the quality of at least the second approximation. Since


greater than unity without violating physical laws, there

fit

products]

the even products. Considering

all

again the simple expansion (2-37), one

Be " = -jiVi

is

ratio

(2-38)

)]

rjt

may be

better scope for

is

with r.

The

practical use of this approximation is effected in the following

way: prescribing q as a function of phase angle


form

\n
as a function of

q>,

tj

multiply this by

(f

<p,

we

take x

p,

\rjt\

. . .

k+ 1 ) and analyse in terms of T.

2.6.5 Quality of the approximations


Since an algebraic analysis of the errors incurred by the respective

approximations would be very

difficult,

recourse will be had to numerical

runs of situations differing significantly in


configuration and refractivity.

For

this

reflectivity, layer

number, vector

purpose a comparative program

OPTICS OF THIN FILMS

54

can be written computing


latter quantities will

For example,

q,

T 2 and B 2

and possibly also

y and

/?

(the

0.33, 0.50

and

5,

not be commented on here).

let

us take three reflection levels q

0.66 respectively, and design tuned (quarter-wave) stacks of the type

l( n i n 2)

Tg

k even

Fig. 2-9

Approximation

50%reflectors with
tpi

gg

numbers 2,

tests for

various layer
4, 6.

OPTICS OF DIELECTRIC LAYERS


in such a way, as to keep q at

55

<p

constant for increasing k

ti/2

kept at the value 1.38 and n^ was computed by the method of Sect.

n 2 was

3.2.3.

At

from the numerical analysis, possibly without understanding how the examples were
devised. These aim at investigating how, for various given q, the layer
present

it is

sufficient for the reader to follow the inferences

number affects the approximations.


The study was carried out for k

From

the

many graphs

a few examples of the

2, 4, 6, 8, 12

obtained in this

0.5-reflector,

way we

and

16.

reproduce as typical

showing some features

common

to

all

the cases (Fig. 2-9).

The coincidence between the

three values q,

T2 B2
,

is

excellent in the

region which will later be called the pass-band of a quarter-wave system

and continues into the stop-band until about two thirds of the maximum
value Q(n[2) is reached. This means safety limits of 0.20, 0.30 and 0.40 for
the three reflectors in question, independently of the number of layers
involved.

Proceeding towards the value

q>

n[2,

B2

and

T2

increase sharply

compared to q, their mutual difference increasing slightly. The ratio between


B 2 r 2 and q increases with the number of layers and with the value e(7t/2),
as illustrated by the following Table 2-1.
Both quantities seem to converge with k to some ceiling values.
The same tendencies can be observed with tuned multilayers having
,

Table 2-1

Constant
refractivity:

reflectivities e(7t/2)

B2

and

T2

12

16

.45

.46

.49

.49

.50

.42

.43

.44

.44

.46

.83

.88

.90

.92

.95

.75

.77

.77

.77

.78

1.38

1.51

1.58

1.64

1.70

1.18

1.21

1.23

1.23

1.24

B2

.42

r2

.42

B2

.64

r2

.62

1.09
1.05

B2
r2

produced by increasing numbers of layers of decreasing

comparison of approximations by

.33

.50

.66

OPTICS OF THIN FILMS

56

pronounced maxima outside of the region

q>

rc/2 (see

for example the

case (D depicted i Fig. 3-27).

A particular fact of practical importance covered by these rules is that


multilayer antireflection systems are well approximated by

T 2 We
.

present a specific figure to this effect because the situation


illustrated

by the curves

interval n/2

<

q>

<

in Fig. 2-9 if we imagine

is

shall not

qualitatively

them to be plotted over the

n.

certain study of refractivity influence can be

made by

taking the

preceding designs and multiplying the same number of high indices and

low

indices, respectively,

by a constant

factor.

The reader

is

again referred

to Sect. 3.2.3 for the substantiation of the fact that this "scaling" does not

Fig. 2-10

00

Approximation

scaled-up designs.

tests for

OPTICS OF DIELECTRIC LAYERS

57

change the value of p(nj2), although generally the function g(<p) is different.
By doing this we may check with the above table what changes occur for the
approximation of a given q if different vectors r t ,r 2 ... are involved in
,

building

up.

it

shows the new situations for a 50 percent reflector realized


by 2 and 6 layers. The scaling factor is 2. The central q now
seems to be approximated more accurately by F 2 and B 2 the reason
probably being that it is no longer the maximum of the whole g(<p) curve.
Fig. 2-10

in Fig. 2-9

This

lies

and

about the value

in this region

original design.

50 for the two-layer, and the behaviour of


q,
about the same as it was about <p = 90 for the

q>

is

similar tendency

computed cases not shown

is

seen in the 6-layer case and in other

here.

maximum"

This supports the "two-thirds of a

above and extends

its

the reason for a local

The

validity outside

maximum.

tolerance for a coincidence of

in a steep edge than

The edge

is

safety rule enunciated

of the central region, whatever

it is

B 2 and r 2 may of course be greater

in a flat part of the curve.

assesed by the slope, and a small shift between true and

approximate curves need not be taken seriously. Therefore correspondingly


greater ordinate differences

From
by

r2

this

may

be allowed in a sloping part.

viewpoint the edges of B 2 in Fig. 2-9 are well approximated

but not so the maxima. The situation

is

more favourable in

Fig. 2-10.

All the cases considered were tuned multilayers having equal optical
thicknesses.

The question may be

affects the quality

raised as to whether the degree of tuning

of approximation.

randomly chosen example a staggered

the r61e of a neutral beam-splitter is

30
Fig. 2-11

SO

Approximation

6-layer,

computed

go
test for

roughly

fulfilling

in Fig. 2-11. It displays

120

a staggered

150
6-layer.

ip'

ISO

OPTICS OF THIN FILMS

58

about the same degree of


described in

between the three functions

fit

q,

T2 B 2
,

as

the previous tuned cases. Analogous situations have been

observed in irregularly detuned systems as well.

To

look more closely at the dependence on configuration, one can


more or less arbitrary configuration of the Argand

devise the following test: a

diagram

is

chosen such that the

tip

of the v-th vector r v passes through the

JDf

so

so

n*

7/
00
to

\\

'

"^

/a*

10

*s-*Vs
180

060

b)

Fig. 2-12

A study in vector configuration.

OPTICS OF DIELECTRIC LAYERS


remaining vectors rv+l

origin, the

figuration

59

F ejy and f 2

If this

r v+2

rk+l determining

Argand diagram

changes, then (2-37) changes only in

its

phase

y,

is

by

their con-

varied so that only

xv

remaining constant. This

does not correspond to an actual crossing of the spectrum (because with X


all the x v must run proportionally to the optical thicknesses A ), but it
v
definitely is a configuration test in the following sense: we compute the

and

B2

for the various sets {x l ,x 2 ,.x v ..xk } with x v


changing and observe their possible deviations from the constant T 2
true reflectivity q

shows several situations of this kind. A six-layer was chosen


with a formal sequence of indices 1/2 1 2 121/2 ensuring
Fig. 2-12

that

the vectors r are equal. This facilitates the choice of the basic

all

configurations.

b illustrate how q and B 2 change with x6 or x s within the


framework of two basic configurations. The levels of constant F 2 are 0.11
and 0.42 respectively. Drastic differences are observed between q and T2
and between B 2 and T 2
Figs. 2-12a,

The

third case (Fig. 2- 12c)

was devised so as to keep

zero value. This required changing two of the values

were chosen in the configuration shown.


Again, one is tempted to say that the

ties

xv

at

T2

constantly at

a time;

x t and x s

T 2 and g or B 2 could

between

not be looser.

Each of the three cases was subsequently checked for spectral behaviour
by taking a specific value of the variable xv and developing this combination
{*!

x2

xv

. ,

x6 } across a range of phase angles

ing ratio. Conventional phase diagrams

in the constant tun-

were then obtained displaying


some significant anomalies. Fig. 2-13 shows the development of case c,
in Fig. 2-12. The values at <p = 90 of the former figure correspond to the
point x t = 135 of the latter. The fact that in Fig. 2-12 f 2 = corresponded
to substantially non-zero values of g

because they
not

make a

all

B 2 need not be taken very seriously,

belong to a through of their respective curves and we need

point of the exact

the discrepancy between

many former

and

g(<p)

situations

minimum

T 2 and B 2 at
B 2 > T 2 This
.

value.

What

is

serious, however, is

low values. Contrary to


seems to be due to a vector con-

relatively

from that which was inherent in earlier cases. The steep


edge, however, is present with good acuracy.
2
It may be concluded that the use of T as an approximation to q or B 2
requires some caution and that in individual narrow ranges of q> it may
behave in a fickle way. This applies particularly to the irregular secondary
figuration different

ripple of detuned multilayers. Regular ripples of tuned

and detuned systems,

OPTICS OF THIN FILMS

60

as well as cut-on

and

cut-off edges of various steepness, are approximated

with sufficient accuracy for the overall shape of the curve to be adequately
described.

The approximation F 1

- q

is

quite reliable in the design of

multilayer antireflection films. Broad-band semireflectors of up to 50 percent


in q should be
least

amenable to the approach

a good starting design

methods. All

below

10, say,

this

is

T2

->

B2

with the chances that at

obtained for further refinement by other

holds almost independently for any number of layers

and for any technologically conceivable

indices of refraction

within the range 1-6.

Fig. 2-13 Reflectivity

corresponding to case

(c)

diagrams
of figure 2-12.

2.6.6 Internal transfer coefficients


field inside one of
and compute the rightand left-going waves in the v-th layer, given a right-going wave at the input.
We shall use the transformation relations for subsystem I, borrowing
from the whole system I-v-II the relation E 1L = r RE 1R Thus
It is

sometimes of interest to compute the internal

the layers. Let us again have recourse to Fig. 2-5

ElR
ElL

SilEvR

r RElR

^laEvL

S 2 lE v H

S 2 2^vl.

OPTICS OF DIELECTRIC LAYERS

61

Solving these equations for the required ratios,

vR

EyR

..

L 0vTj5

The two

(*22
' i t
Sj
tfiRriL

"Vll)

(2-39a, b)

it

,^,V. s ll rR

s 2\)

as follows:

''iR^IL

\I

>v

rR 5 12^

C 0v

jil('lR*IL

r n* riL e

1141 -t-

may now be manipulated

brackets

ir

EvL
'L _

u,
E
1R

Ov
'

C 0v

T7T7V 22

E 1R

ir
^vL

we obtain

^r'il

'

St

r R r II.)

IIR

where use was made of

(2-18a), (2-22)

and

(2-29a).

Further

(s'

where again

rR

s 21 )

(2- 17a)

^(n

r1R)

~2

'lKt,Lrme

= s'n

l-rIL r

IIR

_Z*
2j

and (2-29a) were invoked.

Inserting these results into (2-39a, b) and interpreting by (2-1 8b)


-1
1
as fji. , we obtain the two internal transfer coefficients as
A^ii S
I

1
_
Vrr

-;

l--, L rUR e

*o,rl

^liT'
2j *"

'iR^IIR

l-i"iL-iiRe

rrj
2J ^

r~> ac\
u\
(2-40a, b)

where abridged symbols were introduced, reading for example: t0o RR "transfer from medium o to v, input R-going, result R-going". Similarly
*Gv,RL-

the formulae may be expanded in infinite geometric


again allowing an interpretation in terms of multiple reflections.

Evidently,
series,

It is interesting

to note that
*0v,RL

One would perhaps

We

The computed

*0v,RR

hesitate to set

shall often use it in

v-th layer. In

Ch.

up

ir\

jsv

tov.RL e

(2-41)

this relation inside

a layer intuitively.

transfer coefficients refer to the left

an arbitrary plane

tov.RRCO^ov.RRe"-^
*ov.rl(0

riiR e

4.

at

boundary of the
a distance to the right of this boundary,

the relative amplitude inside this layer

is

given by

fortheR-wave
c
T
for
the Lwave
.,

2k

v
r

= r- n
X

C
v*

cos

,_ Art
6* v (2-42a,

vV

'

b)'

OPTICS OF THIN FILMS

62

2.7

recursion pattern for the input admittance.

The Smith

Chart

We

now deduce

shall

a recursion formula for the computation of the

input admittance of a system of layers, which then determines r R by formula


(2-8). Since it is esentially a recursion from the back, we shall renumber all
the layers and boundaries according to the Fig. 2-14.

Yjc,i
\

ns

nmt

n,\ n.

Fig. 2-14 Notation in a layer system


f(iml)

from

starting

Y">-Yo

Using the definition of input admittance

and the transforming

(2-6)

we may immediately

properties of the interference matrix (see 2.5.5),

'21

y(v+l)

Hy+l,S

Ev+i,s
where the

ik

rear.

_ m 2lETs + Wt22"vS _
mnE vS + m 12 HvS

+
,

m.

W 22

write

y(Y)

Hhi. y (v >
m,,

are elements of the v-th interference matrix. Obviously

m 21 =
jy

v tan<jt> v

m,

m,
m,

nt.
1,

m.

-^-tan<p v

so that

Y(

which

is

(v)

+jyv tany v
Y.+jY^tan^

v+1 )

(2-43)

in

The starting condition


the substrate medium.

is

identical with that used in

the sought recursion formula.

since there is

no L-wave

The formula

(2-43)

treat transmission lines (see

Ch.

9).

The

opticist

may

use

is

Y (1) = Y

network theory to
it

as another basis

computer program for thin films, the advantage being that the
(v)
have direct physical significance, which may
intermediate results Y
for writing a

effectively

be used in design considerations,

[12], [13].

The main importance of (2-43) is that it


simple graphical evaluation by means of the so

is

amenable to a

relatively

called Smith Chart.

OPTICS OF DIELECTRIC LAYERS

To

this

end

it is first

63

normalized by introducing the reduced input ad-

mittance
*

y _
v)

so that

w=

1
1

_ yV W
+ ,W

(v>

'

_(v)

(v)

(2-44a, b)

(2-43) then reads

y v+1) =y y
v

-1
v

.?

+1

(v)

(2-45a)

where

p)_

(v)
J>

+ j tan <p v

+ jy v) tan<jo

(2-45b)
v

may

be regarded as a mere phase transformation of v) from


the right to the left inside faces of the layer boundaries. In fact, using
(2-44b)
(2-45b)

and the

identity

l-jtany =
1

(2-45b)

may

be writtenas

-(v)
y
With regard
cumulated stack

Owing

_
e 2jv

+itan<jD

(2-46)

= r (v) e- 2 ^" is the reflection coefficient of the


T
measured at the boundary v + 1 on its v-side.

to (2-41)

(v),

(v)
2j ^
= l-r e
-(v
(v)
-^v
1 + r )g
e

to (2-44b)

(v)

is then the corresponding input admittance.


formal renormalization to the outside of layer v by (2-45a) is
nothing but a statement of continuity for the tangential componentsv+1 ) =
Y(
y (v)
j>

Its

The Smith Chart is a graphical means of evaluating the formula (2-45b)


by having constant recourse to its interpretation by (2-44b) and (2-46).
Denoting, in accordance with the usage of network theory, y = r + jx
corresponding to resistance and x to reactance), setting r = p +
jq and
inserting into (2-44b), we obtain after some manipulations the following
loci
of constant r and x:
(r

OPTICS OF THIN FILMS

34

(-TT7J + q

=
1

x partwise constant)

(r,

These are two

sets

of orthogonal

circles,

which actually constitute the

Smith Chart shown in Fig. 2-15.


The origin of the Opq system lies in the centre of the great circle, the
real axis + Op pointing upwards, the imaginary axis + Oq pointing to the
left. The system Opq is not actually drawn.
The circles form a curvilinear coordinate system whose lines are
labelled with convenient positive values of r

values of

At

and with positive and negative

x.

this stage

of the presentation

following: given a reduced admittance


in the curvilinear system

and

interpret

we
r

are evidently able to state the

its

jx,

we

locate the point P(r, x)

radiusvector p

jq in the

Opq

system as the complex refaction coefficient


r

= r e6

where

= p2 +

Practically, r is evaluated as the ratio

length of the diagram, which


r

on the

vertical axis

is

2
,

arctan (q/p)

OP

of the vector

to the unit

the distance between the points

0.

and

This must then be squared to obtain

g.

5 could be read on a linear scale (in degrees) on the circumference of


the chart starting on the uppermost point and proceeding counter-clockwise.
However, the angles we can actually read on commercially available charts
are 180

Let us
(2-45b).

5.

now

suppose we

We locate the point

(v)
know some y and wish

(v)

[r

(v)
]

to

compute y

in the chart, interpret

it

as r

(v)

(v)

in

by
Opq

and switch over from (2-45b) to its equivalent (2-46): the radiusvector of r
(v)
Reading the coordimust be turned through the angle -2cp to obtain r
nates of this new radiusvector in the curvilinear system then yields the com.

ponents of

(v)
j;

directly.

Renormalization by (2-45a)

is

a matter for the desk-calculator or slide

This linear scaling of the two admittance components brings about


a non-linear jump in the curvilinear system. The new radiusvector represents
(v+1)
In the next step this is going to be
the actual reflection coefficient r
rule.

turned through -2<p v+1


input

medium

is

reached.

then renormalized by

Yv+2 IYv+i

etc. until

the

D
1

20

K>
i

40

30
i

50
t

60

70

90

80
i

100
i

swrm CHART
Fig. 2-15

The Smith Chart

OPTICS OF DIELECTRIC LAYERS

65

Table 2-2

Example of a form
unity*

125

for

computations with the Smith Chart,

mm

"Jn v + 1

180

225

0.6593/0

0.6593/0

0.25

0.3125

135

cv

1.516
ril x i

0.6593
1

2.3

0.1875
r 'llx

1.36

0.85

Au2
r'2 lx'
2

r 3lX 3

0.5913
3

2.3

A3

2.3

1.28/0.38

1.523/0

1.28/0.38-

2.164/0.64

2.575/0

2.164/0.64-

0.1594

0.2125

'l

r 2 /x 2

1.6912

0.6593/0

Aj

0.64/0.64-

0.416/0.20-

0.378/0.378- 0.246/0.12-

0.2656
0.446/0.21

0.264/0.123

0.1875

0.25

0.3125

r 3lx 3

0.585/0.8-

3.33/1.6

0.85/1.35-

rA jxA

1.345/1.84-

7.66/3.68

1.95/3.10

1.0

0.193

8"

~r(mm)

exact values:

facilitate

0.2868

-139.0

-174.3

-206.5

77.8

100.5

94.2

0.623

0.804

0.753

0.388

0.644

0.567

d
e

To

0.2421

-138.1

-174.0

0.382

0.656

-206.5
0.574

laying off the angles 2q> in the clock-wise direction,

another circumference

is

provided, usually labelled as

lengths toward the generator". This

is

=
2k

the quantity

"number of wave-

OPTICS OF THIN FILMS

66

and the angle


u

0.25 at 2<p

Thus

laid off is 4nu.

for

0.85

2-2.
1

is

A =

A/4

we have

180.

The computation may be organized


by Table

example for

into a convenient

form exemplified

A slightly detuned three-layer with relative optical thicknesses


computed

for three values of the phase angle q> (measured

in the unit layers) at normal incidence.

In the era of automatic computers

it is

that this graphical procedure reduced the

only a pale reminiscence to state

amount of work

in

comparison

with the Airy summation by a factor of 10 and that a team of two could
run a 7-layer in one phase angle in 1 5 minutes. However, the Smith Chart

does retain

its

importance in various odd jobs of

filter

design, yielding

useful insight through the concept of admittance matching or mismatching.

extended to metallic films, as described in [5]. We confine


ourselves to remarking that the chart is already of great help in the simple
case of a dielectric/metal boundary, yielding immediately the complex
Its

use

may be

Fresnel coefficient of reflection,

if

we regard

the complex refractive index of

the metal normalized with respect to the adjacent dielectric as the input

admittance. (See Problem 4-1.)


Note: An affiliated graphical method is based on the use of the exponential polar
admittance chart, where the logarithms of the complex admittance are plotted. It is described in [14] and sometimes referred to as the Kard calculator, [15].

2.8 Notes on numerical computations

general analysis of the complete formulae for a multilayer

is

only

special situations to be

seldom possible. Such cases are confined to some


encountered later in this book. Most of the insight into the behaviour of
multilayers had to be computer-aided. Catalogues of useful systems,
fitting various purposes and corrected to a lesser or greater degree, have
been piling up in research laboratories during the last 15 years or so, but
proprietory reasons caused only a minor part of these results to be published.
Corresponding to subsequent spectral measurements, the independent
variable in these computations

is

wave -number 1/A,


some reference wave-

the wavelength A, or the

or possibly a proportional quantity l

jX,

where A

is

length.

it is

When dispersion of refractive indices is neglected with dielectric layers,


expedient to choose as the independent variable the phase angle <p in

OPTICS OF DIELECTRIC LAYERS


one of the layers regarded as unit
layers for

67

layer.

The phase

any X are then proportional to the

these layers with respect to the unit layer.

angles in the rest of the

relative optical thicknesses

With varying

<p

of

the computer

q> v which enter into the general formulae


and yields, for example, the function g((p). This is more general than the
knowledge of a g(X), since it is only now that we can fix the optical thickness

determines the distribution of the

of the unit layer (and thereby proportionally the thicknesses of the other
layers)

and place the function

ence rule

in a specific spectral region.

The correspond-

is:

choosing nh

plot

A,

g(<p)

the abscissa A

at'

2%

A cos. An

<P

important situation
into X

We

choose

is

with tuned multilayers (see

A =

--

(in

2.6.3), to place q

(*)

normal incidence).

In dealing with all-dielectric systems

we

shall

almost exclusively work

with phase diagrams, the independent variable being

<p

or

x =

2q>.

References 2
[1]

G. V. Rozenberg, Optika tonkosloinych

pokrytij, (Optics

of Thin Films), Moscow,

1958.
[2] P.

H. Lissberger, Optical Applications of Dielectric Thin Films, Reports on Progress

in Physics, 33,
[3]

[4]
[5]

[6]
17]
[8]

[9]

[10]

[11]

[12]
[13]

[14]

No

3,

197268

(1970).

H. B. Boll, J. Opt. Soc. Am., 57, 683 (1967).


J. Komrska, Opt. Acta, 15, 389 (1968).
P. H. Berning, Theory and Calculations of Optical Thin Films, in: G. Hass, Ed.,
Physics of Thin Films, Vol. 1, Academic Press, 1963.
A. VaSicek see ref. 13c, in Ch. 1.
H. Anders, Thin Films in Optics, Focal Press, London, 1967.
K. Ishiguro and T. Kat6, /. Phys. Soc. Japan, 8, No 1, 77 (1953).
P. H. Berning, J. Opt. Soc. Am., 46, 779 (1956).
A. W. Crook, see ref. 4. in Ch. 1
S. Kolnik and K. Macak, Act Fac. Rek. Nat. Univ. Comenianae, Phys. IX, Bratislava,
1969. See also ref. 32. in Ch. 10.
P. J. Leurgans, /. Opt. Soc. Am., 41, 714 (1951).
J. A. Berning and P. H. Berning, J. Opt. Soc. Am., 50, 805 (1960).
P. G. Kard, Proc. Ac. Sci. USSR, 1, 257 (1956).

W. Baumeister, Lecture Series on Optical Thin Films and Multilayers, Institute


of Optics, Rochester, N. Y. (1967).

[15] P.

[16]

H.

S.

Hou, Appl.

Opt., 13, 1863 (1974).

OPTICS OF THIN FILMS

68

Problems
2-1

Write out in

Fresnel coefficients by introducing the proper

full the

admittances into (2-4a,

Compare with formulae

c).

in other literature

taking notice of a possible difference in the sign for r p Verify that for
& = we have r = rs while with the other trihedral orientation
.

one has

although the same

electric vector is described.

impedance

2-2

What would be the Fresnel


Z = Y~ l were used?

2-3

Derive the amplitude coefficients for the magnetic vector in terms of

2-4

Verify that:

either

Y or

Z.

where 9 are the energy


2-5

Coefficients if the characteristic

rv R

fV R

coefficients

c v/v-i

of normal transmission.

Verify in detail the energy balance q

for FresneFs coefficients

in oblique incidence.

2-6

Show

that the product of

any number of interference matrices retains


main diagonal terms

the property of the single layer matrix that the


are real

2-7

Show

and those

in the secondary diagonal are pure imaginary.

that in building

WUW...

up

the S-matrix, any partial product

from

has the property that the terms of the same diagonal are

complex conjugate.
2-8

Consider the simplifications ensuing from Problems 2-6 and 2-7 in

2-9

program for dielectric films.


Using the property proved in Problem 2-7 for the complete S matrix:
s it = s 2 s 12 = sti and tllie formulae (2-17, 2-18)show that f R/=R +
writing a simple

'r'l

fR^R

^l ^

(principle of reversibility for dielectric

films; see also 6-2.).

2-10 Factoring out the c v _

1/v

t~

terms of (2-12) in the product for S

in (2-16), develop the rule for building

.(>(:>

up

the product

1, 2,

and then compute r and i. Note the equivalence with:


of 2.6.2, (ii) another procedure described in [16].

(i)

the algorithm

3
Basic dielectric design units

3.1

The

single layer

3.1.1 Amplitude and energy coefficients

The formulae corresponding


With

to Airy

summation are mostly known.

the simplifications already explained in Sect. 2.6.2, with subset II for

now

a two-layer, we have

+ 2 e-

+ r^e" 2 -"

where

i-

Mie~* rr-

=
l

ri r 2

e- 23 "

n
i m
(3-la,
b)

the coefficients are understood as R-coefficients of the p- or s-type;

all

e.g. (r 1R

monolayer

2J *

rt

for the

and

(r 2R )

leading to

Sometimes formula (3.1b)

is

(j-r),,.

encountered in the literature without the

factor e -J,> in the numerator. In this case the transmitted amplitude

is

mea-

is somewhat less logical.


Another set of formulae, which is very convenient for a straightforward
analysis, can be obtained from the formula (2-27) involving the interference

sured at the input boundary, which

matrix. After

some arrangement we have

yt (Fo - Y2 )cosq> + j(Y Y2 - Y^sing


Y^Yo

+ Y2 ) cos <p + j(y Y2 + Y 2 ) sin <p


2y y2 co;2
=
t

same denominator
Formula

(3-2a) is

sometimes reduced by the factor cos

appears in the imaginary term.

<p,

(3-2a ' b)

so that a tangent

OPTICS OF THIN FILMS

70

Some

simple complex algebra applied to the formulae (3- la, b) yields

for the energy coefficients

+ 2ri/ 2 COS 2<P


+ r\r\ + IrSiCosbq)

r*

n n 2~ *f

"

r*

'

2 2
f

same denominator

(3 . 3a b)

Instead of the squares of the Fresnel amplitudes in these expressions we


might introduce the energy coefficients directly:
rl

From

Qv

r t r2

the second set

n n2

=4(.QiQ2),

tl

x x x2

we obtain

2
2
_ Y{(Y - Y2 ) cos q> + (Y Y2 - Y\f sin 2 cp
2
2
Y\(Y + y2 ) cos cp + (Y Y2 + Y\f sin 2 cp
t

^qi2YqY 1

4nf,n 2

(3-4b)

same denominator

3.1.2 Analysis of the energy formulae for

normal and oblique

incidence

more instructive because of "higher contrast" to deal with g

It is

than with

x.

(Anyway, every statement about q implies a complementary

statement about x

We
variable.

=*=

Q, in

the case of oblique incidence.)

in terms of

cp

as the independent

is

(3-4a).

Obvious importance
multiple of

ji/2,

<p

<

or 9

more simple and general than one using X as


(see notes 2.8). The object of our attention will be

Such an analysis

the independent variable

formula

q,

shall analyse the function

-(2l +

lies

with the cardinal points

cp

even or odd

with the following implications:

= ln=>r.= y
o

=>r

~^

-r 12

Y Y2

-Y

2\
_( Yt -Y
=
7 v

\Yo + Y2 J

(3

" 5a >b)

2
_ (Y Y2 -Y\ \

(3-6a, b)

Since the squared functions cos

2
<j,

sin

cp

are symmetrical at these

and g/2 must be the extremes of the function (3-4a).


being
equal
to the reflectivity of a bare n jn 2 boundary (at the corQn

points, the quantities g x

responding angle of incidence),

it is

independent of the layer index.

BASIC DIELECTRIC DESIGN UNITS

To

71

investigate q k/2 let us first put

(This

Y = Y

tion of the layer with one of th e

= \Iy Y2
is

is

Y2 Then

or

an obvious

reducing in (3-6b), q k/2


Qx
normal incidence, because the condition n x
-

some

after

result, particularly for

n or n 2 means the amalgama-

embedding media.) Further,

= 0. Since V Y Y2 must lie between Y

Y2

Y =

for

and since Qn/2


q %i2
these
summarize
we
may
admittances,
a continuous function of the
,

and

results into the following statement:

Yo^Y %Y2 **0^

<

Q n/2

(3-7a)

Qn

or in words: a monotonic sequence of admittances leads to a reduction of the


original bare reflection.

The opposite of condition (3-7a)


between Y and Y2 We then expect

is

that

^Y %Y ^

Qlc/2

Yx

lies

outside the interval

>

(3-7b)

Qn

or in words: a symmetrical combination of admittances leads to an increase

of the bare reflection.

These situations are termed as reflection-reducing or

reflection-

increasing layers. Another way of putting it is antireflection and semireflection

00

f%

10.0

90

60
\

80
70

60

3.0

2.35

20
2.0

/~\\\

\l

//

/"~\ \\

30

\\

/^\\\

50

\\|

\\l

\v|

10

6
4
2

Fig. 3-1 Phase diagrams g(y) of

various dielectric single layers

a glass substrate (n.

on

1.65) in air

>t-^

>-j-^

<P

2T

OPTICS OF THIN FILMS

72

(both ways being later extende4 even to multilayers with a similar and

enhanced

slightly

effect).

Outside of the cardinal points

g(<p) varies

between g and Q n/2

>

see

Fig. 3-1.

The

application of these Results

simple with normal incidence,

is

where admittances are identical with indices of


practical situations n

1,

most

semireflection

^ nG ,
lower n F brings lower q and vice

n 2 , or, to help the memory, n F

G for "glass":

stands for "film",

and

the decision between anti-

depends on the inequalities t

where

refraction. Since in

versa.

The

analysis

example, n
cos

<

<

equally simple for the ^-polarization. Let us have, for

is

< n 2 Then by Snell's law


&i < cos & 2 Putting YYS

n1

cos

O
=:

>

>

n v cos

2 axid
V

then

accordingly

obviously

*o s < ^i < ^2s- 1 a similar manner any other type of inequality between
the refractive indices remains valid for the corresponding s-admittances. It
is

therefore the combination of refractive indices alone which determines

the kind of extreme at q x/2 for the s-polarization at all angles of incidence.
different situation arises with the/-polarization. The definition being
=
Yyp (cos V ) -1 , the cosines at oblique incidence tend to weaken the

between the = Yv at normal incidence. In fact,


j-eferring to an analysis to be performed in Sect. 3.1.5, with increasing
O
there sooner or later comes a valhe for
O where Y0p = Ylp or Ylp = Y2p
original inequalities

on boundary

(the so called Brewster reflection

1,

or

2, respectively).

Let us

denote these values by 6>o B ob- (ob * s tne Brewster angle for boundary 1,
ob becomes Brewster angle for boundary 2 only after refraction through
the first boundary, but it does define Brewster reflection there in terms of

the input incidence angle.)

Now

@ob and

whichever of them
interval,

is

an

6>S B define

greater.

With

any inequality between the n v

this interval, either the relation

(depending on whether we

ob) or (@Sb>ob)>
from zero towards this

interval (6> b>

&

between

increasing

copied to the Yyp Upon entering


Y0p and Ylp or between Ylp and Y2p

is

or <9qb) * s reversed to the


opposite of what exists between n and n t or n t and n 2 , respectively. Changing
first

encounter

6> 0B

one of the inequalities in (j-7a, b) means converting the monotonic


combination of admittances to the symmetrical one and vice versa. The
effect of the layer becomes the opposite of what it was at normal incidence.

just

Increasing
the

Yp s,

still

O further,

one

ip

weakening the other inequality between

copying that between the coTrcspuuding v

Going "through

the right end of the interval of Brewster reflections, this inequality goes

BASIC DIELECTRIC DESIGN UNITS


through equality to
in (3-7a, b)

we

its

opposite.

73

Now

having both inequalities changed

restore the original condition of the admittances being

monotonic or symmetrical (although in a different way than the v everything being reversed). The layer then again behaves as in normal incidence.
Fig. 3-2a, b shows the regions of antireflection and semireflection at
,

various angles of incidence for the embedding media n

was chosen

(the value 1.2

than

it

would be with

in order to

air as

make

the illustration

1.2,

n2

1.7

more general

).

3.0-

Fig. 3-2

Diagrams

potentialities

illustrating the reflection-reducing

of a single

polarizations.

It is

and

reflection-increasing

dielectric layer in oblique incidence for the

Embedding: n

1.2,

n%

two basic

1.7.

also instructive to plot the value of t

at the particular angle of incidence.

which ensures zero reflection


Without going into the details, we state

the corresponding formulae

n\

(2A)

q sin

-1
[1

+ nllA
- 4Anl sin 2

s-polarization

^(l

<9

)]

(3-8a)

p-polarization

(3-8b)

where

We

(n

2 )

_1

cos

up

as 30.

/-polarization finding

its

7(1

"o"J

sin 6>

(3-8c)

do not differ appreciably from normal


With increasing O they split substantially, the
due passage through the Brewster conditions.

see that the conditions

incidence as far

OPTICS OF THIN FILMS

74

^ >

It is interesting that for

So

far

[1],

see also

Problem

we have only

makes the

layer

forms the basis of interference

highly reflecting for the s-polari^ation. This


polarizers,

of re-

6>ob> the antireflection indices

fraction for the />-polarization are rather high, which

3-11.

dealt wjith the ordinates of the function q(<p).

The

sometimes called the amplitude conditions, while the


is applied to the spectral positioning of the extrema:

results derived are

term phase conditions

We denote the optical thickness at oblique incidence by nh cos


From

(3-5a), (3-6a)

follows that with a given

it

the extremes

<? /2

the extremes q

The
are

linear relations

shown

4A

will occ^ur at

will occur at

between X and

in the Fig. 3-3.

To

A,

A
*3
(3-9a)

JJt
,__
number
odd

4A

2A

even number

integer

(3-9b)

with different orders of interference


of how many extremes

facilitate the estimate

will fall within the visible spectrum, the

corresponding interval

is

drawn

along the A-axis. With increasing A the extremes are more closely packed.
For a given A the extremes are more densely distributed on the short-

wave end.
Inverting the conditions (3-9a, b) one

extremes to be placed at a specific k


for Q /2

by

may

say that, demanding the

one must proceed

A = odd

multiple of -(3-10a, b)

for g n

by

Aq

=t

integral

multiple of -=

visible,

Fig. 3-3

Graph of

the phase

condition for the extrema

of a

dielectric layer.

minima, dashed
maxima.

Solid lines

lines

BASIC DIELECTRIC DESIGN UNITS


Note:
as

we

It is

not our intention to analyse the phase

d as thouroughly

shifts 5,

We

did the energy conditions.

functions

75

confine ourselves to stating that the


d(q>) are antisymmetrical about the points q> = l(n/2),
/integer.

8(cp),

For a single layer of any index of refraction d(n/2) is essentially given


by one traversal of the system, the phase shift being -<p = -90. The

= -q> has a negative derivative ddjd<p. In reflection R(7t/2) =


= ddn IZ) = 180 for all combinations of indices except n > n < n
(e.g. if n
= n g n l = 1) when they are equal to zero. All the derivatives
d5/d<p are negative except for
R in n < n < n g when d5 R /d<p > 0.
function 8

<5

c5

General theorems on phase

shifts are

presented in Ch.

8.

See also Sect

3.2.9.

3.1.3 Reducing and increasing reflection

by one

layer.

Observation in white light


Let us explicitly state the amplitude and phase conditions for normal
incidence in the usual case n
antireflection

(q /2

0)

semireflection

Both cases operate

nF

= Vg
> na

(3-1 la)
(3-1 lb)

in the first order of interference, nh

/4,

leading to

spectrally flat extremes.

The condition
value of !

Yt =

nx

is

(3-1 lb) is only qualitative. To know exactly which


needed to obtain a given gn/2 we must solve Eq. (3-6b) for

In extracting

q, the negative value


must be chosen, since
identical with rnl2 . By inspection of (3-6a) this quantity
is seen to be negative for n
y/n^. With this stipulation we obtain
t
.

the square root

-Jq

is

>

The following Table

3-1 gives

some

typical value obtained in practice

The

results.
is

e /2

pioneering work of 1936,

is difficult

to

fulfil

glass (n G

1.75)

g x/2

=0.25%.

with practically suitable mate-

A compromise is made by letting gn/2 be small,


with MgF 2 ! = 1.38 and G = 1.52 one has
e /2 = 1.4
rials.

ZnS nr = 2.35.
John Strong in his

0.32 using

antireflection condition (3-1 la), attributed to

but not zero. E.g.

%,

while for heavy

OPTICS OF THIN FILMS

76
Table 3-1

Thin film

refractive indices required to obtain prescribed reflectivities

on an

air/glass

and glass/glass boundary (normal incidence).

H
60

10

20

30

40

50

air/glass

1.71

2:00

2.28

2.59

2.98

3.48

glass/glass

2.10

2.48

2.81

3.19

3.67

4.29

%>H/2

( g

1-52)

200

A'W

2-

.6

A/um

a)

BASIC DIELECTRIC DESIGN UNITS


All this

was

analysis at a central point. Across the spectrum the g(A)

and t(A) curves are more or less


reflection

of A

77

bent, this giving rise to

more or less coloured

and transmission. These colours also depend on the positioning

More

colour saturation

is

of course found with reflected

light. Esti-

20

10

d)
:6

/tfTI

soap bubble

e)

A/im

%.

air
^v
^^\\X=&tQ

^=^7 /

r\

-oil -

water

_____-0

\^-280

5
4

f)

jF

& = 7Q0
\/vm

Fig. 3-4 Theoretical spectral reflection curves of typical single-layer systems:


(a) air

MgF
2

(Newton's

glass, (b)

Refractivities used:

A/2 thickness for A

air MgOglass,

water
MgF2 1.38;

rings), (e) air

560

ZnS
glassairglass
water
patches).
ZnS
glass
A A/4 and

(c) air

glass, (d)

air (soap bubble), (f) air

MgO 1.71;

nm considered

are also drawn, the latter

oil

2.35;

(fatty
1.52.

each time. In case (f) curves for 3 A/2 and 5 A/4


also for unpolarized light at 45 incidence.

OPTICS OF THIN FILMS

78

mating the optical thickness of a layer by

its

reflected colour belongs to

well-proven laboratory and workshop practice. (See Table 3-2.)

MgF 2 MgO and ZnS on a light


Each material is supposed to be deposited
in two thicknesses: A t = A/4 and A/2 for A = 5600 A. Both the maxima
and the minima are therefore illustrated within the relatively narrow range
Typical curves corresponding to

glass are

shown

in Fig. 3-4a, b,

c.

of the visible spectrum.


Table 3-2
Interference colours for low-index

and high-index

layers in air-glass

A = XJ4

< 4000

1000

no colour

4200

1050

straw yellow

4400

1100

yellow

4600

1150

yellow brown

4800

1200

5000
5200

1250

brown
dark brown

1300

magenta (red-brown)

5400

1350

violet

6000

1500

blue

yellow white

6800

1700

light blue (cyan)

golden yellow

7600

1900

blue green

rosy golden

order

MgF2

ZnS

no colour

bluish white

>

A/4

;./2

3A/4

embedding.

V white

8400

2100

yellow green

rosy

10 800

2700

green

dark rosy

12 000

3000

yellow

blue

16000

4000

dark magenta

green

gap between two glass


surfaces, such as is encountered with Newton's rings. This is an example
of a symmetrical index combination moderately enhancing reflectivity. The

Another important type of thin

corresponding curve
Finally

let

is

shown

film is the air

in Fig. 3-4d for n

which represent index combinations 1/1.33/1 and


Figs. 3-4e, f

ng

1.52.

us recall the soap bubbles and the fatty patches

show

these curves.

on

water,

1/1.5/1.33, respectively.

Sasic DIELECTRIC DESIGN UNITS

A note on the conditions


shown

79

of observation

may be

useful.

Curves of the

and their analogues obtained by shifting the Qmax


or 0min are encountered by the color-selective system of the eye at the various
points of the Newtonian wedge when illuminated with white light.
In an oil patch, high surface inhomogeneity of thickness is present and
type

the

mean

in Fig. 3-4d

may be

optical thickness

several times

more than

A/4. If

it

happens

to be, for example, 5 or 6 A/4, then the corresponding lines in Fig. 3-4f
replace the simple curves and the much more varied spectral distribution

now

perceived by the eye

is

shifted across the

spectrum owing to thickness

variations.

There
incidence,

also the aspect factor. Observing a thin film at oblique

is

its effective

optical thickness decreases as cos

wavelengths for a physically given

we have 0* =

instead of q

(q p

optical admittances. Fig. 3-4 also


fatty layer at

shift to shorter

^ and

the extremal

wavelengths. Further,

Q a ) owing to the change in the effective

shows the increased

of the

selectivity

45, again positioned at 5 600 A.

All these factors contribute to the lively colour display observed with
patches on water. They apply, of course, quite generally to any type of

oil

stratification.

3.1.4

The

a prototype for monochromatic

single layer as

filtration

It is

evident from Fig. 3-1 that increasing the refractive index of the

layer leads to very flat reflection

the points

We

<p

t2

re,

...

maxima in the cardinal points

cp

/2,

automatically becoming sharp maxima in transmission.

thus have monochromatic filtration inherent in a single layer.


Let us rewrite formula (3-3b) for the important case of symmetrical

embedding

t).

= -r2 = s/q,

{r t

We

=
1

the sign depending

on nF

^ nG and
,

t,

then have

2q cos 2q>

(1

q)

Aq sin

2
q>

l+^sin 2 <p

(3-13)

where

'"o^F

<3 "' 4)

OPTICS OF THIN FILMS

g0

The transmission maximum will have unit value and its location is
(3-10b).
given by the condition sin q> = 0, which of course leads to (3-9b),

&

the
In the vicinity of the maximum value, the greater the value of
#" is sometimes called the coefficient
quicker t(q>) will change. This is why
analysis of the Haidinger fringes
the
in
introduced
first
finesse, a term

of

in the

Fabry -Perot interferometer

&

(see 7.1.3).

maximum

requires q to
us to the
brings
This
be 60 percent or, preferably, more than 80 percent.
indices
present
with the
issue of the realizability of a monochromatic filter:
cannot exceed about
of refraction for the visible spectrum (n < 2.5), o
layer cannot be put into
17 percent. The potential filtering effect of a single
layers, the underlying
more
using
in
consists
actual solution
itself

increases with q.

reasonably sharp

The

practice.

coefficients of reflection
idea remaining the same: to increase the internal
effect being still intertotal
the
with
at the boundaries of a central layer,
that layer. This idea
on
preted as a generalized Airy summation (see 2-29b)
will

be further developed in later sections.

optical parameters
3.1.5 Theoretical principles of measuring the
of thin films

We

shall

now

analyse

some

typical situations

which may lead to the

thickness, or possibly
determination of the index of refraction and/or of the

the optical thickness, of the dielectric film.


Polarimetric measurements

plane wave to be
Let us suppose a linearly polarized monochromatic
of
the polarization
azimuth
the
O
incident on a boundary at an angle
measured from the plane of polarization being e.
,

Looking against the

reflected ray

and using the p- and

s-directions as

point are described by the


reference axes, the electric oscillations at a fixed

components

r^'sinee^',
This
it

is

by

an

elliptically

rp e

Jip

polarized disturbance.

ellipsometric techniques,

one may

cos e e**

By

analysing the parameters of

interpret (though not without

results in terms of the n


numerical labour or tables prepared in advance) the
of effipsometry to thin
and h of the layer. Pioneering work in the application
This work is summarized in his
films was done in the 1940's by A. Vasicek.

BASIC DIELECTRIC DESIGN UNITS


second book on thin

method

this

Many

films, [2].

The

81

recent decade has seen a busy revival of

in connection with the study

of oxide films grown on metals.

papers have appeared contributing to further refinement of ellipso-

metry, see

e.g. [3, 61].

Photometric measurements

Using the

reflection

extremes

Referring again to formula (3-12), we may use it in the experimental


way: suppose we measure at normal incidence (or very nearly so) an
extreme of the q> = jr/2 type, knowing both its value and its spectral location A

x Vs K
Fig. 3-5

% A%

Ao

-*%

Extrema of various orders

in

a q(X) diagram of a single

layer.

Then nF may be computed by (3-12) and the optical thickness by (3-10a).


The appropriate order of interference is generally estimated from the know-

ledge of the preparation of the layer or

the spectral curve

<?(A).

by inspection of a broader range of


is shown by Fig. 3-5, which is

general scheme

a spectral transformation of what

is shown in Fig. 3-1 as a e(<p)-diagram.


Only a part of this <>(A)-diagram is usually covered by measurement. The
method fails when A is below the measuring range of the instrument.

In order to choose the correct type of extreme

maximum) one must know whether nF ^ n G This


.

When

a minimum or a

usually the case.

the material suffers from appreciable dispersion (like

blue region and further downwards), Fig. 3-5

mation of Fig.

more

(i.e.

is

percent.

3-1.

The

true optical

ZnS

in the

no more a simple transforthickenss may differ from A /4 by 10 or

A correcting term is derived in

is

[4].

Dispersion effects will be

discussed here in Ch. 12.

is

Note: The values q k yield no information in this theory as far as F


may be used to compute FAF from their location. We

concerned. They

OPTICS OF THIN FILMS

82

then compare whether n F h F

A /4 and also =Ao/2, where

of the next higher extreme. Generally

not exactly

k' is

the location

Also, q k is not
always equal to bare glass reflectivity. These discrepancies are attributed

and to

to dispersion of n F

this is

so.

inhomogeneity across the normal dimension

its

of the layer, see Fig. 10-10 and

12.1.

Using the Brewster angle of incidence

The formula
at

a particular angle of incidence. In

cos

sin

n t cos

6>

20 = sin2@

sin

this the Snell

With

one has n

Condidering at the same time the Snell law n t sin

one obtains
7i/2.

Y0p = Ylp

putting

fact,

vanish

multiplying these equations together and then by 2,

ai*d

may

(2-4a) has the interesting property that g p

law

which

only possible

is

may be written
tan6> 0B

where the subscript "B" means that

when

= -
OB

is

as

(3-15)

the Brewster angle of incidence

ensuring g p = 0.
Finding this angle experimentally for an air/glass boundary essentially

(on boundary

0/1),

constitutes a kind of refractometry.

decimal places)
other

hand

is

it is

However, the accuracy obtained (three

not high enough for what

sufficient for thin film

modify the method so that

it

needed with

is

problems.

It is

glass.

at the Brewster angle 6> 0B


is

(Fig- 3-6).

first

due to

boundary of the

Then the angle of

in its turn the Brewster angle for the opposite direction


first

is

[5].

Let a /^-polarized wave be incident on the

the

the

correspond to the conditions of observation.

This extension of the Brewster angle measurements to thin films


Abeles,

On

only necessary to

boundary: 0,

6> 1B

As a

result, there are

inside the layer. All the reflected energy

is

no

film

refraction <9 t

of incidence on

zig-zag reflections

given by the simple reflection

on the lower boundary.

- Y2p )j{Ylp + Y2p)] 2 but since the above reflection is Brewsterian, Y0p may be substituted for Ylp Hence the same amount
of energy is reflected by the film in the condition
O = <9 0B as would be
obtained with a non-coated support under the same angle of incidence @ 0B
This

is

equal to [(Flp

A hint for the experimenter is therefore to

and seek such an angle of incidence, when the two


The refractive index of the layer is then
where practically n = 1.

in jp-polarized light

halves present equal luminance.

given by (3-13),

observe a half-coated glass

BASIC DIELECTRIC DESIGN UNITS

83

Experimental arrangements for

Some

The Abeles method

were described in

this

disturbing factors are discussed in

[6]

and

[7].

[8].

F As a complementary method,,
measurement may be mentioned. Thin
general are described in the books [9], [10], [11], [12]
yields only

yielding only h F , the Tolansky step


film

measurements

and

in [13], [14].

in

Fig. 3-6 Brewster reflection

on the

first

boundary of a

layer.

3.2 Periodic structures

3.2.1

Fundamentals of typology and notation

An

important class of interference layer systems, having very


typical
spectral characteristics, are periodic structures.
They are defined by the
repetition of a basic unit. The simplest basic unit is
a two-layer, consisting
of two materials with refractive indices n (the
higher one) and n L (the
H
lower one), and with optical thicknesses A and A
H
L , respectively. These
may be equal or different. Let us choose one of the thicknesses
as unity,
e.g. A H and denote this layer by H.
Let the relative thickness of the otherlayer be c L Then the two-layer basic unit may
be coded as
,

H(c L L)

both cases being optically

An

or

we choose

different.

equivalent definition

would be

(cH H) L
if

(c L L)

L as the unit layer

or

L(c H H)

and then cH

/c L

Cascading these units to a periodic structure


[H(c L L)] k

or

[(c L L)H]

will

be expressed as

(3 -l 6 >

OPTICS OF THIN FILMS

84

where the formal k-th power corresponds to the actual multiplication of the
interference matrices. Obviously, the layer

number

is

now

2k.

from indicating the embedding media here. Whenever


We
necessary, we denote the air half-space by the the numeral 1, the glass
4
half-space by G. Thus 1(HL) G is an eight-layer on glass.
There may be more complicated basic units than so far shown. Even
refrain

keeping to just two materials one

may have

for example,

(c^H)(ci.L)(c^H)(c^L)

For reasons of symmetry we express all of the layers in relative thicknesses.


None of these need be unity, since the unit layer is simply a reference
quantity for the computer.

basic unit with

more

optical materials

may be

(c A A)(cB B)(c c C)(c D D)

be mainly concerned with periodic structures


in the
of the type (3-16), called alternating, since two materials alternate
from
distinguished
as
alternating,
system. More exactly we should say even
In the following

we

shall

systems like

HLHLHLH
H(0.5 L) H(0.5 L) H(0.5 L)

L (HH) L (HH) L (HH) L (HH)


called

odd

sense, but

and

alternating,

whose

L,

(HH = 2H)

which are not periodic

periodicity

is

felt in

in the

above mentioned

the regular alternation of indices

relative thicknesses.

An odd

alternation has a central layer of symmetry.

Symmetry may

also be present with other systems, as

ABCBA
which

is

like
of course not a two-component alternation, or with systems

(0.5 L)

HLHLHLHLHLHLH

which dees not appear to be a periodic

(3-17)

(0.5 L)

structure.

However,

if

we

define

the basic unit


(0.5 L)

the above system

may be

(0.5 L)

written as a formal 7th power of this basic sym-

metric unit, since inside the system always (0.5 L) (0.5 L)

L.

BASIC DIELECTRIC DESIGN UNITS

g5

Symmetric periodic structures have the important property of being


equivalent to one layer with variable parameters (see 6.3).

From
odd

may be

another point of view, (3-17)

alternating

system addition of

1(0.5 L)

HLHLHLG

or

regarded as an extended

on both

(0.5 L)

sides. Similarly

HLHLHLHLG

1(LL)

are extended even alternating systems.

The concept of extension

a change of the optical medium. This

why

interpreted as 1(L)

LHLHLHLHLG,

is

i.e.

involves

the last indicated system

is

not

an extension by L of the odd

as

system 1(LH) 4 LG.

An

additional layer cannot be inserted inside the system, because

it

would be optically identical either with its left or right neighbour. What
would actually happen is detuning of the original system. A third material
is

needed, see 3.2.5.

tuned system

is

one with equal optical thicknesses,

In a slightly more general sense

we

shall regard as

e.g.

1(HL) 10 G.

a tuned multilayer such

a system whose detuning consists of integral relative thicknesses,


[H(2L)] k , but also [(0.5H) L] k , since this

Another example: 1A(2B) (3C) G, where A,


the optical thicknesses are in the ratio

e.g.

essentially the preceding case.

is

B,

are three materials and

3.

detuned system

really

has relative thicknesses which are far from simple rational numbers.
Extensions and detuning are usually a result of a correcting procedure
on the basic properties of the alternating or periodic structure.
Another interesting structure is the type

HLHLHLHLH

(LL)

HLHLHLHLH

which may be regarded as two odd alternations separated by a spacer layer


of twice the optical thickness (we shall explain later why this is referred
to as two A/4 systems separated by a A/2 layer), or it may be regarded
as two face-to-face even alternations (HL) S (LH) 5
.

With
filters,

respect to the functioning of these systems as

the concept of a A/2

spacer layer

is

monochromatic
more apt than the concept

of some systems lying face-to-face.


In concluding these introductory notes

we

wise strictly periodic

(e.g.

two contiguous

a more general
when they are part-

state that, in

sense, such systems are regarded as esentially periodic,

stacks, see 3.5.1).

OPTICS OF THIN FILMS

86

3.2.2

A rough orientation in

As

HLHLHLH

system

stated earlier, the computations of dielectric systems mostly use

2%X~ 1 nh in the unit (possibly Active) layer as the independent variable.


Choosing different layers as units, one obtains different sets of relative
thicknesses and different diagrams q{<p). These are differently compressed
or expanded (along the <p-axis) versions of essentially one phase-diagram
<p

leading to a unique diagram g(A), once the optical thicknesses are

C(ip), all

With a strictly tuned multilayer there is only one such diagram.


For the 7-layer 1(HL) 3 HG it is shown in Fig. 3-7.
For such multilayers the (p-diagrams are symmetrical about the line
<p = ji/2 and have a period tt. Esentially, it would have been sufficient to
specified.

plot only half of the diagram for

A characteristic feature

rc/2.

cp

the existence of high-

is

low-transmission regions, sometimes

With a tuned multilayer

about the value

trically

of periodic structures

reflectivity regions (or, equivalently,

called stop-bands).

<p

this region is situated

symme-

n/2.

With the seven layers considered, the maximum e(rc/2) = 94 percent.


The other maxima are smaller and the central maximum as a whole has
a convex shape.
Increasing the

maximum, which
Jt/2

number of layers would lead to a higher and flatter


k -> oo would tend to fill up the stop-band interval
reflection, and drop abruptly to substantially smaller

for

with unity

oscilations outside this interval. (The band- width 2e will be subjected to

analysis in Sect. 3.2.6.)

The

oscillations

of

q(<p)

outside the stop-band are called secondary or

With seven layers there are three on each side. The


same would be the case with eight layers and it would only be with nine
layers that we would obtain the pattern 414, 1 being the central maxi-

subsidiary maxima.

mum.
etc.

Similarly a 3-layer has a qualitatively similar (jo-diagram as a 4-layer

The

values of the subsidiary

maxima have a tendency

to be smaller

towards the outside. Their envelope, as well as the values of the minima,

depend on the embedding. In

particular for n

n g the minima are

all

zero, see Sect. 6.3.2.

Below the

<p-axis in Fig. 3-7 there are

two nonlinear

scales in A,

corresponding to specific locations of the (^-diagram in the spectrum and

computed
tion

as A

A = ~-

2jtAip~'

1
.

Placing the value

(for all the layers).

g(7t/2) in

leads to the condi-

BASIC DIELECTRIC DESIGN UNITS

The value
wavelength.

sometimes be written as q X is called the design


be a Amin or a Amax depending on the combination of

g(7t/2) will

(It

indices.) This

87

may

term

will later

be generalized simply to

mean any wavelength

of importance for the design of any kind. The relative optical thicknesses
of the design are then expressed as fractions of the design wavelength.

We may give an example of such a generalization in the present example:


suppose we are interested in using the left-hand slope at
as a cut-on edge in a high-pass

filter,

and place

it

<p

into X

85 in Fig. 3-7

X'.

Then we

evaporate by
85

A=

-X'

360
wjhere

now

X'

may be

regarded as the design wavelength.

f>

32

1.6

1.2

1.0

.9

t00%

K'OS
Fig. 3-7 Phase

diagram eif) of a seven-layer 1 (HL) 3 H


(2.3
A-scales for two different quarterwave values.

Keeping the A-scale


rule stated

of what

is

on

p. 67,

1.36

1.52) with

and transforming g(q>) to q(X) by the


one obtains a slightly asymmetrical inverted picture
linear

seen in the ^-diagram. This

is

the A-diagram, Fig. 3-8. Proceed-

ing below A /2 requires the use of the second period of g(q>) etc. Thus we
obtain the central maxima of the orders I, III, V, etc. at the wavelengths

/3,

/5.

The

physical

meaning of the 1-diagram

is

limited to those

regions of the spectrum, where the assumed optical constants are valid.

OFflCS OF THIN FILMS

88

The

central

maxima of periodic

structures serve as interference mirrors,

their slopes serve as cut-off or cut-on edges in low-pass or high-pass filters.

Much

design

Some

of these problems will be dealt with in later sections (3.5.1 and

1.0

work

needed to refine the curves to

is

fit

various purposes.
6.3).

0.5

M
I

iLjWm

0.2

VWn^-^X

maxima of various

orders for a tuned seven-layer being one

quarterwave for

3.2.3 Reflection at cardinal points

[an.

<p =*

This analysis for the odd multiples of


generally with

/urn

Mk

*o/5 AoA-Ao/3
Fig. 3-8 Central

0.5

0.250.33

an arbitrary sequence of

(2/

it/2

l)

*/2

may be

carried out quite

refractive indices n lt n 2

...n k ,

the only condition being a tuned (quarterwave) multilayer.


First of all

we

shall consider the points

q>

tc/2,

5jc/2, 9ji/2.

The

system interference matrix being the product

flttf)
we

obtain the following results

k odd:

m u = m 22 = 0

m,

m
(3-1 8a)

k even:

m 12 = m 2 =
i

0,

m, 2 =

= ("1) 1
Wli

Y2 Y4

...Yk
(3-1 8b)

Inserting these results into (2-27a)

we

= y-Y;2
y + Y e(t

obtain, after a slight modification,

eft'
<?

(3-19)

BASIC DIELECTRIC DESIGN UNITS

89

where

/Y

Feff

k odd
k even

Y,

= < v vg_i
\r r g

j'

called the effective admittance (in

is

yjr4 r 6

n eK

k even

,..

normal incidence:

index of refraction). For two alternating refractivities

Yct{ =

M
(3-20ab)

^3^...
F =

and

or to

it is

nt

effective*)

equal to

k odd

(3-21ab)

Increasing the

number of basic

layers 2.35/1.38

have an

../2.35

an

units in

to a very high index of refraction for

alternating structure

one layer

(at

<p

effective refractive

ji/2,

is

equivalent

.).

E.g. seven

index eff

11.6, the

resultant q being 95.6 percent.

Only a

remains to be said about the cardinal points

little

-,

At

which

equivalent to supposing that

is

= -

<p

the sines in the secondary diagonal are

these points

1,

all the Y v are negative. Obviously,


Yef( becomes negative for k odd.
1) n/2 may be maxima or minima

nothing changes in (3-19), although

The

cardinal points

(see Sect. 3.2.7

<p

(2/

on symmetry): with

alternating

-layers

they are always

maxima.
Table 3-3 shows the dependence of the

and of q

on the

total

number of

of refraction,

effective index

two ways of

layers for the following

alternation
a)

ni

b)

2.35,

n2

nL

Both use the same pair H nL but


,

1.38
,

nL

1.38,

n2

nH

2.35

in a different order. Jointly they cover

a relatively dense pattern of reflecting

levels.

(For an extension of

this see

3.4.5).

In practice, by adding layers one generally means "evaporating some


further layers onto

what we already have". This

is

not the case in Table 3-3

*)
This effective index is not to be confused with the concept of equivalent index to
be introduced later. The former has a much narrower importance than the latter. It is

denned for a more general

class of multilayers, but only in

replaces the multilayer by the effect of one layer.

one point

Compare Problem

<p

= n/2,

3-13.

where

it

OPTICS OF THIN FILMS

90
Table 3-3
Effective index of refraction

increasing

a)

b)

N<"

2.35

%e

32.3

%eo

a)

and

reflectivity for alternating layers 2.35/1.38 for

number of layers.

N"

%
w N*

>o

1.70
39.8

2.90

4.00

1.38

0.59

1.3

9.8

10

87.7

0.34

0.81
15.7

89.8

77.9

11.6

8.41

95.6

96.3

0.28

0.20

0.47
54.8

48.1

11

4.94

6.81

73.1

68.3

0.12

81.4

91.7

12

13

14

15

19.8

14.3

33.6

24.4

57.3

41.5

97.6

98.4

98.7

99.5

99.6

99.8

99.85

99.9

0.16
93.2

0.07
97.1

99.64

99.15

99.0

0.033

0.024

0.056

0.04

0.10
97.6

99.7

where one starts from the top layer and additions occur at the glass side.
However, combining both rows one obtains the answer even to the laboratory
case. E.g. starting with H on the glass and working up from the bottom, the
reflectivities of the systems 1HG, 1LHG, 1HLHG etc. are found in al,
b2, a3...

Having solved the problem {n t n 2 ... k } => q it is also of use to


n 2 ... correspond to a given g ? We leave
it: what sequences of n 1
,

invert
it

to the reader to verify the following algorithm:

Define

Wi?

Veo

+ Vgo

(3-22a)

Then
^eff

with y given by (3-20a).


The amplitude reflectivity

is

ff l,2

(3-22b)

\[y

given by (3-19) and equals

and +V(?o when choosing a 2


The two values are the inverse of each other: g x g 2

chosing

a2

ffj

in (3-22)

smaller, than unity.

when

l,<r t

being greater,

BASIC DIELECTRIC DESIGN UNITS

ai

particular case of interest

ai

Taking the
(3-22b) assumes the form

A
ox
is

91

is

"i"3- =

/s/{n n % )

n2n 4

x^/^noWg

...

>

given energy g

may

k odd
k even

')

be always realized with two different

a 2 and the amplitude phase shift

sometimes of use

With g 0,
of normal incidence,

the antireflection case.

practically important case

may

in interferometry.) Let

therefore be zero or n. (This

how

us see

this

works

in

incidence with alternating systems, where w h l * > 1> Dut Wi.% 1 <
When k is even and the embedding is symmetric (n = n g),

and eff by
= v' 1 < 1

(3-21a)

is

for n l

n2

nH

GHLHLHLG

1-

y = 1
n L and to a 2 =

1 for n x = n
H n2 =
Thus, for example, the systems

>

equal to a t

nL

normal

GLHLHLHG

and

= 0.849, with r R = -yfoo = -0.92 for the first case


+0.92
for the second case.
+y/e
With asymmetric embedding y # 1, and the inverse of eff (corresponding to the exchange L <- H) is no more the inverse of a (corresponding to a
change *- 7t/2 in R). The change L <-> H will ensure <-> n, but simultanhave a

common

and

rR

eously a slight change in the energy level occurs, as


systems

1HLHLHLG
1LHLHLHG
With odd k such

rR

<->

replacing

greater

=0.898

0.780

even in symmetric embedding,

rR
rR

=
=

-0.905

+0.821

So

both ways. The reason obviously

With

eff does not simply become

highly reflecting surfaces in the system,

LG boundaries

for example, the

its

inverse

The systems

GHLHLHG
GLHLHLG
differ in

= -0.947
= +0.883

differences occur

because for the change L


value (see 3-2 lb).

rR

in,

GH

lies in

some

=
=

0.819
0.675

the different

loss being

number of
GL and

due to the

and HG.

numbers of

films these differences will decrease, because


the outer Fresnel reflections form a relatively small contribution to the
final effect.

When

the limitation to only two materials

vanish, because the matching

by

(3-22)

is

is

removed, these problems

possible (or nearly possible,

OPTICS OF THIN FILMS

92

having some technological limitations in mind) with both values a x

and any

y.

In oblique incidence one must either


(3-22)

a2

is

applicable only

if

a g 0p or q 0s

is

work with Yp or Ys The algorithm


.

given,

which

is

seldom the case.*)

Let us briefly mention that the extraction of the refractive indices from the

computed admittances

a straightforward algebraic process, yielding

is

linear equations for the n in the s-case,


p-ca.se.

and n g

and quadratic equations

in the

are of course given beforehand and together with

specify the conditions of observation as well as the admittances


for (3-20a). Detailed formulas are written

down

<9
,

Yg

in Sect. 9.3.3.

No

exact procedure exists


%{g p
so far to synthetize a reflector for a central wavelength by the value g*.

For unpolarized

light

g^

g s ).

Experience shows, however, that, performing the exact synthesis in normal


incidence for g

the value q* at 6>

=45

is

from g

negligibly different

(Compare Sect. 9.3.3.)


g* to the right wave45
certain
(see 3.2.8).
length is to match the optical thicknesses for
All one has to do

in placing

importance

attached to the degree of polarization (g s

is

g p)

(g s

gp )

and to the way it changes at further possible


reflections. Another design problem is the flatness (achromaticity) of the
These problems
p(A)-curve in the neighbourhood of the central maximum g
and
8.5).
will be dealt with in special sections (3.4.4
suffered at such a reflection

3.2.4 Latent

If,

(A/2)

layers. (Cardinal points

in a system of

in the condition that

matrix

is

where

formation of the

The

r,

In)

any tuning, a tuned or detuned layer

its

1 is

phase angle

(p

the unit matrix.

field vectors,

does not influence

<p

g or

t,

In, I integer,

then

its

is

operating

interference

The layer does not affect the

trans-

except for a possible change of sign. (This

only t

may change

behaviour of the film in such a situation

sign with the negative

is like

1 .)

being actually present

but only latently present for <p v = In. We shall denote a layer
in these conditions as latent. (Sometimes the word is absentee layer.) Obviously, the optical thickness of the layer is an integral number of halffo r

all <p v j= In,

wavelengths for the particular

For example,

*)

The

ponent

A.

in a tuned alternation

1HLHLHLHG,

increasing use of the laser in optical experiments

reflectivities interesting.

all layers

now makes

become

even these com-

BASIC DIELECTRIC DESIGN UNITS


latent for

q>

n and the

93

phase angle must be identical

reflectivity at this

with that for the simple boundary 1G. This

is

seen in Fig. 3-7.

In analysing periodic structures one often finds that eliminating a layer


as latent for a particular spectral point, another combination immediately

becomes a

Thus having a simple monochromatic

latent layer etc.

filter

(HH)
or

GHLHLHLH(LL)HLHLHLHG
(LL)

we

see that in the conditions

obviously for

cp

when the central (LL)-layer is

latent (this occurs

of the remaining layers can be paired to further

nj2), all

latent layers, the result corresponding to systems

1G

GG

or

according to the kind of embedding.

With a double-half-wave system we may have

HLHLH LLHLHLHG = GHLHLHG


GLHL HH LHLHL HH LHLG = GLG

GHLHLH

(the latter case having

LL

It also instructive

much

has for

<p

equivalent to

3.2.5

In the same
1

LG

Use of A/2

at

higher q(kj2) than the former).

to realize that, for example, the system

<p

(0.5 L)

HLHLHLHG

reflectivity as

(0.5 L)

G, which in

its

turn

is

7c/2.

layers as correcting elements

The absentee property of

A/2 layers allows

them to be

freely

added

any interference system as outer or inner extensions, without affecting


their performance at the design wavelength (this is now that A = X for
to

which the added layer

is

A'/2).

By

interesting privileged status, without

itself this

would represent merely an

any use, were

of the A/2 property. The result of a A/2 extension

it

not for the dispersion

is

then a more or

less

substantial change of q(X) in the vicinity of X, the value q(X) remaining

unchanged. This fact

is

of importance for the design, because one usually

OPTICS OF THIN FILMS

94

wishes to change an unsatisfactory shape of g(A) without seriously affecting


the reflection level.

The amount of change induced depends on the refractive index of the


on the face of insertion. The extended system need not be
tuned of course, but most of the applications so far concern tuned systems.

A/2 layer and

Since the system to be corrected as a rule consists of an alternating

sequence of two indices h h /w l

the simplest approach

is

to

add

either

2H

or2L
such an insertion

If

3H

is

made

inside of a tuned system, there results

or 3L layer. However, this situation

is

not typically interpreted as the

addition of a A/2-layer, but rather as the use of a 3 A/4 layer instead of the
simplest multiple A/4.

a more

lively

The reason

ing system where part of the layers

band

reflector in

reflect the

The

for such a choice usually

is

to induce

A-dependence into the system. Thus, for example, an alternatis

A/4

and part

3 A/4

is

becomes a narrow-

a moderate sense of the word, which can be made to

green part of the spectrum.

by a A/2

actual extension

layer observing the restriction to

two

materials can only occur at the outer faces of the multilayer.

With a tuned basic system a typical response is the change of the second
d 2 g/d<p 2 at <p = n\2. A peak is then more or less pronounced;
2
2
in luckier cases it becomes flat, i.e. d g\dq> = 0. (For an organized approach
derivative

to this condition see 9.3.4.) If the second derivative assumes the positive
sign,

a trough appears. If

it is

shallow, the case

is

regarded as good from

the point of view of achromatism.

Extensions of this kind are easily analyzed in the individual cases of


interest,

but one must be prepared to discard part of the

addition of a A/2 layer with a given refractive index

is

results,

A choice of useful results is to be found in [15].


We quote (with H = 2.35, n L = 1.38>
H

1
1

as well corrected

(LL)

(LL)

<?*

q*

=
=

32
50

%
%

non-cemented beam-splitters and

G H L H L (HH) G
G LHLHL(HH)G

g*
g*

=
=

50
65

%
%

as cemented cube beam-splitters.

(We

shall refer to the latter

once more in

because the

not an infallible step.

Sect. 3.4.4

.)

BASIC DIELECTRIC DESIGN UNITS

95

Note: Experience shows that systems of this kind may first be corrected to a flat
normal incidence. In the conditions of oblique incidence it is sufficient to match

level in

the optical thicknesses and the reflectivity for inpolarized light g, ..= i(g
g s ) remains
p
very nearly unaltered. The single components g and g also have flat maxima, but these
s
p
are on different levels, thus giving rise to a more or less intense partial polarization. The

problem

particularly severe with

is

with in Sect.

cemented cubes. Polarization

effects will

be dealt

8.5.

n'flff

SO

25

20
1(2X)HLH6
60

70

")

a)

tH(2X)LHG

90

60

70

60

rir-as

50

25
d)

1HL(SX)HG
60

70

BO

90

60

HLH(SX) G
SO

70

various refractive indices: (a)


extension,

30

1.36 2/1.52 by A/2


outer extension, outer
inner extensions.

Fig. 3-9 Extending a tuned three-layer 1/2

left

layers of

(b)

right

(c), (d)

The fully general exploitation of the A/2 extensions calls for a variation
of the refractive index. In particular, studying a tuned system at <p = n/2,
one can always find a refractive index such that a flat top or a trough occurs.
Fig. 3-9

shows a numerical study of this kind.

With a third refractive index one can even start inside additions, but
more bizarre indices are obviously needed to obtain the same flattenning
effect.

OPTICS OF THIN FILMS

96

an antireflection three-layer
by inserting a A/2 layer between n x and n 3
(a) -{!, n 3 , n4 } designed to yield e(ji/2) = 0;
an overall compromise.
(b)

Fig. 3-10 Correcting

not a general rule and internal positions for a A/2


layer may be found in certain designs where beneficial influence is obtained
with realistic refractive indices. A design of this kind concerning the anti-

However,

reflection

this is

problem

fractive indices ,

is

due to Jupnik,
n3

1.38,

[16].

1.548, w 4

The tuning 1:2:1:1 with re1.38 and n 2 in the range 2.2

an efficient achromatic four-layer for the light glass ng = 1.51.


The approach to this system was to use three convenient indices such
that the amplitude condition t n 4 = n 3 V("o g) is met for zero reflection
at q> = jc/2. The A/2 layer at the second position was reserved for manipula-

2.35

is

vicinity
ting (through a change in n 2 ) the shape of the reflection curve in the

of

q>

n/2, Fig. 3-10a.

If the
1

.548

tried for the basic tuning

same were

n 2 with n 3

free,

1:1:2:1 making now

no satisfactory n 3 could be found for a flat reflection

curve. This only confirms

what was

said

about the

relative correcting merits

of a A/2 layer in a system.

On the other hand we may extemporize with the verified second position
for a A/2 layer

and

try

its

influence in a design which only partially satisfies

the condition for g(nj2)

0.

We

1.71

then find that, for example, the index


- 1.49/1.52 never exceeds 0.7 percent

2.22
combination 1/1.49
in an interval of almost 1 2, Fig. 3-10b.
:

In concluding these

comments on the

A/2 layer

we remark

that the in-

an arbitrary cross-section inside the


parts.
system, thus splitting one of the layers into two equal or unequal
However, this possibility dees not seem to offer an easily obtainable correc-

sertion

may

in principle

be effected

at

tion power.

3.2.6 Stop-band theory


In this section

we

shall deal in

some

detail with the theory

of the stop-

the
band, first mentioned in 3.2.2. The complexity of the analysis depends on
sytems
alternating
to
ourselves
structure of the basic unit. We shall confine

/
BASIC DIELECTRIC DESIGN UNITS

97

of the even type. (Considering also the odd type would lead to complications not

worth

tackling, because

20 or 22 layers as good as 21 in stop-band

predictions.) In this case the basic unit

matrix

cos

ify

is

cos

j(Yt sin

a two-layer, whose interference

is

the product of two simple matrices (2-23)

q> 2

fl?!

cos

sin 99j sin

<p 2

^2 cos

9s !

<p 2

-^- siB
sin
J

<p

sin

(^r
cos ^i cos

cos 9?)*

y 2 + -^ cos

<P2

Y
^
"~

s *n

9i

y>j

s'n

-a
Before proceeding further,
the folowing

let

cos

y2

(3-24)

us rewrite the secondary diagonal terms in

form

=j

sin (Pi

c=)Yi

ship?!

^2)

<y>

~
2)

r i2 sin (<Pi

V2)

+ r 12 sin(<jg 1 + r ia
t

q> 2 )

where

- y2
= Y
ri + r2
t

*12

is

two media (taken in the order 1-2).


The problem now is to find a suitable analytical expression for the
power of the matrix (3-24), representing the use of Ik alternating

the Fresnel coefficient between the

fc-th

layers.

its

Denoting the bilayer interference matrix (3-24) by B and considering


unimodularity, one can easily derive

B 2 = 2x B .

x and

where x

We may

compute

after

+d
z

where q 12

r{ 2

1 is

(3-25)

the unit matrix.

some manipulations
cosppi

tp 2 )

QuGosjqf!
(?12

<p 2 )

OPTICS OF THIN FILMS

98

B2

Multiplying (3-25) succesively by B,


relationships

. . .

and recurring from previous

upwards one has

- 1) B - 2x 1
= (8x - 4x) B - (4x 2 B 5 = (16x4 - 12x 2 + 1) B B3 =

(4x

B4

2
3

1) 1

(8x

Ax)

thus discovering the rule

Bk =

-i(*).B-ek _ 2 (*).1

where the Q v (x), v = 0, 1 2,


of the second kind, see e.g. [17].
Their argument in our case
,

. . .

(3-27)

are the so called Chebyshev polynomials

v (x) are related to

is half the sum of the diagonal terms in B.


some transcendental functions in the following

Q B (x) VO -

/_!(*)

way
*2) =

sin [(v

arccos

1)

x],

(3-28a, b)

&(*) V(*

1)

^-i(*)

sinh

where the square root on the left-hand


sin co or sinh co if

we

1*1

arc cos

<

x],

be interpreted simply as

normal

for cosine,

arg cosh

or

shorten the subsequent formulae,

for sine,

may

side

argcosh

1)

introduce the respective interpretations

co

To

[(v

we

(3-29)

introduce the unified notation

or hyperbolic, depending

on the value

1.
Let us

now take

the

k
term of B in view of (3-27) and (3-28a,

We can write
<5[(fc-l)co]

(SQcco)

_ a

S(fcco)

(5(a))

(co)

(co)j

a-d

S(fcco)

s(co)

@[(fe-l)co]
@(co)

Exchanging the r61e of a and d yields the ( ) 22 term.


No manipulations will be effected in the secondary diagonal.

Making use of the

identity

/k (x)

- Uk _ ,(x) = Tk (x)

@(x)

b).

/
BASIC DIELECTRIC DESIGN UNITS

99

where

Tk (x) = (*),
is

Chebyshev polynomial of the


power of B

the

A>th

+C(fcco) +

first

kind, one finally obtains for the

<5(fcco)

<S(co)

<S(o>)

S(fcco)

(co)

"[3
where

2r 12

sin

and the

A, B, C,

sin

<p t

l-r? 3

<p 2

are real, in accordance with the expectations for a dielec-

multilayer system.

tric

According to (2-27a) the reflection coefficient of the whole stack

_ (A-Yg Yo D)+j(BYg -CYo


(A+Ye Yo D)+j(BYg + CYo
l

_ L
*(k<o)(Y

+ Yg ) +

<5(oo)

)
)

(5(co)

+j^W

- n>]

(Yo
(

((o)

is

c)

<S(co)

(3-30)

Recalling that the stop-band

is

defined by

->

with k tending to

easy to state from (3-30) the corresponding necessary condition:


only with the hyperbolic functions that some members of the formula

infinity, it is
it is

tend to

infinity,

which k

->

thus making

oo implies

-*

converge to unity. All values of

for

co

then define the stop-band. Obviously, the

outer media are irrelevant.

The decision

lies

92 =

<ty-

x
some detuning

with the inequality

analyse, introducing into (3-26)

which we now
such that <p i

ratio c

shall

<p,

\
OPTICS OF THIN FILMS

100

Dealing with absolute values of (3-26) requires the analysis to be

up

into

two

split

numerator positive and negative (denominator always

cases:

being positive).

For a

c)

<p],

positive numerator,

>

when cos

i.e.

[(1

cos

[(1

c)

>

<p]

q 12 cos

[(1

leads to the condition

Q12 {1

cos Rl

c ) <?)}

>

c)

<?]

or equivalently
2

ei2 sin

[(l-c)|J>sin 2 [(l+c)^]

For a negative numerator we have cos

[(1

<

c) q>]

q 12 cos

[(1

c) q>]

and
C12 {1

cos

[1

c) p]}

>

cos

[(1

c) cp]

or equivalently

Ql2 cos

The

["(l

- c)|1 >

periodic structure being given

the intervals of

We

<p,

+ e)|J

cos [(l

by q 12 and

c,

the inequalities define

in which hyperbolic functions are applicable in (3-30).

show with a few examples how these conditions are

are going to

used.
(i)

Let us have a tuned multilayer. Then c


either

cos

or

cos 2q>

There

is

2<p

>
<

q 12

first set

<

cp

<

tc/2

s,

where

sine

Checking the

first

e is

inequality,

we

sin

cos

is fulfilled

all

<
<

<p

2
<p

for all

<

<

q 12

q>

set

we

start

in the interval

(3-31)

re/2

of the second

see that the solution


2<j

cos

2
<p

sin

situation arises in all intervals shifted

the one computed. Therefore

given by

= +sfoT2

anticipates its validity in that eos

The same

and we have

of inequalities. In the other

with the second inequality. Obviously, this


jt/2

and simultaneously
and simultaneously

q 12

no solution to the

the cardinal points

centres of stop-bands with a width 2e.

<

cp

by
q>

it

cos 2

<p < q 12
with respect to

(2/

1)

n/2 are

BASIC DIELECTRIC DESIGN UNITS

101

k
As a second example let us have a system (HHL)
c = 2 and we must have

(ii)

cos3<p

either

>

and

Q 12 cos<p

e 12 sin

or (HLL)

> sm 3

2 <P

Then

q>

(3-32a, b)

or

cos3<p

< Q 12 cosq>

2 <P

and

g 12 cos -^-> cos

<p

(3-33a, b)

the

With some intuition we find that the second set is satisfied with (p = it/3,
with <p = 2rc/3. These are just two isolated points of the stop-

first set

bands, which will evidently be situated symmetrically about


It

remains

q>

it/2.

about these "centres", or cardinal

to determine their limits

points (we shall see subsequently that

ti/3

and 2n/3 are not exact

centres

of the bands).
Let us equalize (3-33b) and take the positive and negative square roots.

we

After some goniometry

find that the limits of the stop-band about rc/3

satisfy the condition

= yV( 1 +Vei2)

sin|-

combination they are

E.g. for the 2.35/1.38

case the value 60

<p'

51, cp"

68.4. In this

nearly the centre of the stop-band. Principally this

is

not so, because as p 12 tends to unity,


is obviously asymmetric.
It is clear

(3-34)

-* 0, <p" - 90

<p'

that the solution found by (3-34)

is

is

and the stop-band

compatible with (3-33a).

we find by similar goniometry the condition


on the left-hand side. This means that the stop-band
obtained by mirroring the stop-band about n/3 with respect

Considering (3-32ab),
(3-34) with cos <p/2

about

2jt/3 is

to the line

<p

jt/2.

So far we may say that the cardinal points of the stop-bands were
found by solving the equation
(p t

which worked for

<jp

(1

and

that (3-33b) degenerates to

being latent.

2.

(c

Trying

1) <p

now

which

is

In, I integer

3,

making

q>

accompanied by

(3-35)

all

n,

we

see

the layers

3 does not lead to a stop-band.

The condition
not give

c) (p

(3-35)

is

rise to latent layers.

therefore valid with the provision that

it

does

OPTICS OF THIN FILMS

102

An

equivalent statement of (3-35)

of the basic unit equals


(iii)

As a

third

is

that the total optical thickness

example we take [(3H) L] k or [(3L) H] k with

3.

We

then have by (3-35)

<P

7t

3tt

~4~

>

as the cardinal points of the stop-bands. The widths of these are now computed from a more involved goniometric equation, which will not be solved
here.

The cases (i)-(iii) are illustrated by Fig. 3-11.


The smooth curves outside the stop-bands define the limits within
which the subsidiary maxima can oscillate. Their shape depends on all the

Fig. 3-11

Symmetry and

periodicity of simply detuned periodic stacks

(schematic).

BASIC DIELECTRIC DESIGN UNITS


indices n

nG

nH

103

n h and on the detuning factor

c.

depends on the number of periods used. (See Sect.

when

In the case

The

density of fill-up

6.3).

additional correcting layers are attached to the

periodic structure, the limiting curves are affected, but the stop-band remains

unchanged.

The number and

determine generally. For

computed with

maxima are difficult to


may of course have them

location of the subsidiary

examples one

specific

arbitrary accuracy

and

at the

same time obtain the stop-band

widths, without solving the pertinent goniometric equations.

In the special case of a tuned multilayer, the number of subsidiary

maxima
is

An

For

follows a rule indicated in 3.2.2.

number of

proportional to the

important practical remark

convergence

q -

and using nH

2.3,

e(n/2)

nL

is

we

only state that

it

slower. E.g. for the systems

1H(3L) 4

1(H2L) 4 G,

maximum

1.38, the

0.96,

that with increased detuning c the

is

within the stop-band

1(HL) 4 G,

periods.

g(jc/3)

0.92,

reflectivities are

e(it/4)

0.86

respectively.

Also, with increasing

the band-widths for a given n H / L

decrease.

3.2.7

Symmetry and

The

basic 1/4 system has been found to be symmetric with respect to


q>

sin

<p,

the values

of cos

q>,

periodicity

n/2,

it,

3rc/2

This follows from the fact that the squares

which only appear

about these points. This

is

symmetric

in the energy coefficients, are

obviously true of any system, not only alternating

systems.

The same property

is

preserved with rationally detuned systems,

because a doubled or trebled A/4 layer

may

be regarded as two or three

adjacent layers of the same index of refraction and the proof follows from
the last remark. It

is

only necessary to rewrite systems like

0.5

as

2:1:2.
Since
the

bands

no other symmetry may

will

be symmetrical about

we may infer, for example, for


maximum in the ir/3 and 2n/3 stop-

exist,

2 case of the last section that no


itself,

but, rather, that the

two stop-bands

OPTICS OF THIN FILMS

104

accomodate maxima being mutually symmetrical about cp = n/2. This


maxima is then mirrored about <p = n into the cardinal points
= 4 it/3, 5 7t/3, since q> = n is a point of symmetry.

will

pair of
q>

On the other hand, in the

some maxima happen to fall within


maxima at ji/4

3 case

region and are therefore symmetrical. The fellow

the

7t/2

and

3 jc/4

must be asymmetrical. All the three are then mirrored to the next
Owing to the internal symmetry about n/2, this mirroring
of course equivalent to shifting by jr.
The period of a g(<p)-curve will be recognized as the smallest increment

period
is

(it, 2it).

to the unit phase angle

<P

by an

integral multiple

all

the squared cosines

3/2

In the
:

and

l2

3.

we
.

2 and

which causes

<p,

each, v

/v tc

and

all

3 cases the period

these circumstances

is

obviously

it.

Having a detuning

$ = lt n, 3/2 d> = /2 with integral


<P = 2jt, being compatible with l t =

Obviously, the period

Under

running through the same values.

sines start

solve the equations

the phase angles c v q> to increase

1, 2, ...

is

lx

7t

2,

When there are more detuning factors c in a system, we check each c v


separately and then take the least common multiple of these partial periods.
l2

Notes:
(i)

odd

were analysed by Kard

alternating layers

in [18].

Even systems follow as

a special case when amalgamating one of the outer layers with the adjacent
embedding. This paper uses another method of raising a matrix to a power.
(ii)

odd systems are more common as

representatives of interference mirrors,

because they converge faster to high

reflectivity, see tab. 3-3.

coverage of different levels n semireflection

is

Where a good

concerned, both types of systems

are of interest.
(iii)

another important version of

s.c

p-band theory

will

be presented in Sect.

6.3.

3.2.8 Oblique incidence


In oblique incidence, the effective optical thicknesses are v /i v cos

where
cos

^/(l

nln~

sin

O)

so

n v h v cos
This has a two-fold

6> v

effect:

h y x/(v
(i) all

o sin

O)

(3-36)

the optical thicknesses are smaller

(which causes an overall shift of the A-diagram towards smaller wavelengths)

(ii)

the relative tuning of the layer changes (which causes

deformation in the

<p-

and A-diagrams).

some

BASIC DIELECTRIC DESIGN UNITS

105

design taking account of oblique incidence must pre-set the optical


-1
choice of possible values in
v

thicknesses proportionally to cos


different situations is given in

Table

3-4.

Table 3-4

Matching factors for 45 incidence.


Incidence at 45 from the

"F

COS

sec

air.

1.38

1.49

1.75

2.00

2.22

2.35

0.8552

0.8802

0.9147

0.9354

0.9479

0.9537

1.169

1.136

1.093

1.069

1.055

1.049

Incidence at 45 from glass 1.52.

1.38

1.49

1.75

2.00

2.22

2.35

cos

0.6272

0.6926

0.7892

0.8433

0.8750

0.8893

sec

1.594

1.444

1.267

1.185

1.143

1.125

Oblique incidence also

A split-up into q p and g


simple systems at two

affects the Fresnel coefficients at the boundaries.

occurs, always with Q s > q


Fig. 3.12
p
different angles of incidence.
s

By using pre-setting according to Tab.


back to the symmetrical position about

more

reflecting (securing

maximum

<p

shows some

we could shift the diagrams


Jt/2 and make them slightly

3-4,

constructive interference in all the

but the split-up between e and g s would remain, see Fig. 3- 12b.
p
Controlling the difference g s g represents a difficult design problem
p
where semireflectors are concerned, see 8.5.
layers),

The problem
of

many

Qs

QP

is

less severe

with highly-reflecting systems consisting

periods, because both q


p

is

sma H compared with

The stop-band

and gs converge to unity.


the average level q*.

for s-polarization

is

The

difference

enlarged, that for p-polarization

reduced as compared with normal incidence. This may be accounted for


by the changes in the optical admittances which now determine p l2 in the
is

conditions (3-31), (3-34)

etc.

OPTICS OF THIN FILMS

106

30

60

90

120

130

180

oo

an

so

120

vm

wo

a>

match at

Fig. 3-12

ISO

120

Behaviour of an alternating A/4 stack


(2.3

1.36

p 2/o

match at 60

$5'

30

b)

210

ip'

(HL) 3

HG

1.52) at oblique incidence.

incidence 45 and 60 without matching,


with matching; (owing to restored symmetry

(a)

(b)

about

180

= 90 only halves of the graphs are plotted).

BASIC DIELECTRIC DESIGN UNITS


In the interval

common

107

to both stop-bands g #

with zero degree

of polarization.

The angular variation of the spectral properties of multilayers, though


normally a disadvantage, can be made use of in providing valuable
documents with difficult to counterfeit authenticity features, [59], which
either consist of a specific colour
test is

made by superposing

scheme in variable

the tested piece

tilt or a more severe


on a complementary master

transmittance curve.

3.2.9

tion,

Phase dispersion

We shall make a brief first mention here of the phase shift upon refleci.e. the quantity
R We consider tuned systems only.
<5

While

g(<p) is

symmetrical in the cardinal points

<p

antisymmetrical there and has a positive or negative slope


(5(71/2) being 0 or 180.

HLHL...G

LHLH...

Ik/2, 5(<p) is

d(5/d<p,

the value

S-w

the positive contributions


prcfo///ng
to

Fig. 3-13 Determination of

alternating stack

phase

4 " 0'

shift

from the simple

d on a tuned

reflections.

For alternating systems it is relatively easy to guess the value <5(7t/2)


from the design, adding up the phase shifts of simply reflected rays, Fig. 3-13.
(See also Problem 3-4).

The

slope

is

negative in both cases.

Generally, the value of f(;t/2)

The

criterion for the slope

is decided by y ^ Y?
K Eq. (3-19).
depends on more complicated functions of the u
,

(see 9.6).

study of two alternating stacks

is

shown

in Fig. 3-14.

OPTICS OF THIN FILMS

108
100

IS

25

SO

30

and phase-dispersion graphs of two


4
1.36
(HL) 3 H G; (b) 1 (LH) G (2.3

Fig. 3-14 Reflectivity


(a)

y>'

SO*

alternating stacks:

1.52).

BASIC DIELECTRIC DESIGN UNITS

109

3.3 Broad-band antireflection by discrete points

3.3.1

The

antireflection

problem

Before embarking on the main subject of this section,


the antireflection problem
Fresnel reflection

on

more

air-glass

tion layer. Its theory

is

generally.

The natural

boundaries gave

let

us outline

loss of light

rise to the

due to

simple antireflec-

completely covered by the material presented in

Sect. 3.1.3.

Technological difficulties in strictly satisfying Strong's amplitude


condition for crown glasses called for the extension of antireflecting techni-

ques to multilayer systems.

The

first

idea at

hand was

to use several quarterwave layers at a time.

Referring to the formula (3-23)

we then have

the following amplitude

conditions for zero reflections:

n t n3

n 2 n4

13

These should be easier to


E.g. with

satisfy

owing to the wider choice of materials.

= 2andg == 1.52 one can combine the individually inadaequate


= 1-38) with MgO( 2 = 1,71) to obtain a virtually zero minimum.

A:

g F 2("i
However, the selectivity of such a layer is greater than that of a single layer
of MgF 2 its values outside of the pass-band even exceeding the blank
,

glass reflection (curves (D

and

(2>

in Fig. 3-15).

Note: In view of the theory to be outlined in


paragraph will be x 2q>.

3.3.2, the

independent variable in the

figures of this

Keeping the ratio n 1 ln 1 constant, but using higher indices of refraction


would even deteriorate this situation. The curve (D of Fig. 3-15 is therefore
the optimum that can be achieved in practice. The importance of such
a two-layer
Let us

is

therefore limited.

now take the three-layer and

stipulate again n t

.38.

Then

1.38

"2

= -f= n 3
V"g

and we have,
1.8

for example, for n


g

1.61; 1.91

1.7; 2.1

1.52 the following n 2 - n 3 pairs:


2; 2.35 - 2.1. From the reflect-

1.88; 2.22

OPTICS OF THIN FILMS

110

ance curves shown in Fig. 3-16 that corresponding to the third combination
has

maximum

analysis

secures g

flatness considered as a local

would discover

at

more

its

system

x =

at

180. Closer

index combination {n 1 ,n 2 ,n 3 } not only

180, but also d g/dx

tically fulfilled since the

in the cardinal point

that

minimum

is

0,

dg/dx

being automa-

tuned. This condition for a

180, originally

due to Pohlack,

flat

extreme

discussed in

is

general terms in Sect. 9.3.4.

However, the

flatness of curve (D in Fig. 3-16

is

not pronounced

enough to be of practical importance. (One would also note that the cases
and (2>, although numerically worse in some insignificant decimals in the
range 8090 of q> are better in the broader range 20 90.)
A substantially flatter curve would call for more layers. We quote
from W. Gejfcken's patent [19] a four- layer combination 1/1.23 - 1.975
2.41 1.84/1.5 whose curve is shown as in Fig. 3-16. No doubt the
small value of the

first

index helps in the flatness.

These inherent limitations of the one-point antireflection occasioned,


in the late 1940's and later, further research into the possibilities of obtaining

low

reflectivity in

a broad spectral region. Such more or

antireflection coatings

applied also to

less nonselective

were once called achromatic, a term which

semireflectors

is

and interference mirrors exhibiting

now
flat

reflectance curves over an important part of the spectrum. The theoretical


process of obtaining such curves is then called achromatization.

an
any design problem). The general

Different approaches are possible to the problem of achromatizing


antireflection coating (and in fact to

dividing line runs between tuned

210

Fig. 3-15

and detuned systems.

x"

A A/4A/4 two-layer with zero

Fig. 3-16

one point: 1/1.38


1.7/1.52
curve Qi, compared with a single MgF 2

reflection at

A/4A/4A/4

antireflection

three-layers with varying flatness at

curve

films

G>

n
(3)

180. Basic design

1/1.38
2

n n

2.1/1.88;

3 /l. 52.

@ 1.9/1.7;
@ 2.22/2.0; 2.35/2.1.

1.8/n 3

1.61;

BASIC DIELECTRIC DESIGN UNITS

The former method


layers.

uses layer thicknesses in small rational ratios

and

performed through the choice of the refractive indices of the


The latter relies on two technologically convenient indices and exerts

the design

is

on the curve forms through variations of the optical thicknesses.


Both approaches may be effected with various degrees of sophistication.
influence

In the subsequent section

on the

we expound

the principles of a

method based

postulate of several discrete points of zero reflectivity, which leads to

the condition of tuned multilayers and to the variation of indices at the

design process.
Relatively simple mathematics yields a

number of

useful results.

In a later section (9.2) reflectivity of a tuned system will be continuously


controlled over a broad spectral region and a much more advanced

formalism will be needed for the extraction of the refractive indices.


Variation of thicknesses will be illustrated in Sect. 3.4 in several examples,
some of them being antireflection layers.
conceivable to use a combination of both approaches and carry
out variations of both refractive indices and optical thicknesses. This can
only be done with large computer programs within an automatic correcting
It is

process.

The

methods

strategy of these

is

3.3.2 Principles of achromatization

As mentioned above, one of the


reflection-reducing multilayers
at several discrete points

outside the scope of this book.

by

discrete points

possible approaches to the design of

the idea of annulling the reflectivity


q(x)
of the x-axis in the hope of being able to describe
is

by some reasonably simple conditions. These should enable extraction of


is similar to exact synthesis. However, we
must bear in mind that reflectivity is controlled only in discrete points and
one must add the hope that for reasons of continuity the reflectivity will not
it

design data so that the process

rise

unduly inbetween the control points. This

is

what we understand by

achromatization by discrete points.

The

limitation to isolated points

would not by itself suffice to develop


must be had to the approximation

the theory in any generality. Recourse

by simple
r

reflections in the

reJ*

rx

r2 e

form

_Jxl

'

xv
which was discussed in

2.6.3.

r3

e~ Hxi+X2 >

r4

e~ j(;" +JC2+X3)

...,

4nX~ n v h v

(3-37)

OPTICS OF THIN FILMS

112

This expansion

is

a good approximation to r for the reflection reduc-

ing case.

may be

Since the expression (3-37)

closing the

Argand diagram

problem assumes a geometric nature: annulling q


ixi
vectors r t r 2 e~
... are then the

in the Gaussian plane, the

means

interpreted as the

Argand diagram. The

sides of a polygon. Further: annulling q in several discrete points of the


<p-axis means finding several closed polygons with the same side-lengths

whose angles are compatible in the optical sense.


To show what we mean let us consider a two-layer with a monotonic
and construct the corsequence n < n^ < n 2 < g so that r u r 2 r 3 <
responding triangle starting "upwards". A remark on the construction
itself is perhaps useful: the angles x t ,x t + x 2 ... are laid off the +Ox

rt

,r 2 ,r 3

...

axis in the negative sense.

advisable to

negative r

draw the pure sums Sxu

leaving a dashed line behind (see

Now

it

is

equivalent to adding

correctly

and

but

it is

by

angles y l5 y 2

We

Fig. 3-17).

instructive to introduce the internal

is

re,

indicate reversion

obviously have in the lower triangle

xi-n-Yi,

x'2

=n-y

(3-38a)

where the dash indicates that the values are connected with some wavelength

A'.

From

the purely geometrical point of view

same r t ,r 2 r 3 and other Xi = x'2 x 2


shown above in Fig. 3-17. It follows that

triangle with the


triangle

*2=* +
the phase angles corresponding

To

obvious that the only

it is

4=Jc +

yi>

now

to

x"2

is

the congruent

(3-38b)

y2

some other

A".

be quite exact, these equations each hold (modulo

2rc), still satis-

fying the condition for a closed triangle.

Coming now to the interpretation of these results as Argand diagrams


thickfor a two-layer, we must observe the fact that, with the given optical
any
at
x
ratio
the
=
determines
/A
c
A
2
/*i
ratio
their
nesses A lf A 2
t
2
,

wavelength.

It

follows that

x2
x\

From

k - y2 _
~ *-yi

+ y 2 + m 2% _
n + yi + 12*

tc

c(/

x'[

we obtain y 2 = (1 equation, we obtain

the left-hand equation

inserting this into the right-hand

x"2_

1) 2tc

(m

1)

2k

c)

cy t and

(3-39)

BASIC DIELECTRIC DESIGN UNITS

= m = 0, c =
m = 0, c = 0.5 etc.)
(e.g.: /

This
1

is

0.5

1; /

m =

0,

113

1,

only possible with an integral


is

equivalent to 2

c,

2;

0,

m =

or a rational

c.

so that a rational factor

1,

2, c

3;

1,

Obviously a ratio
is

as

good as an

integral one.

An

integral optical thickness ratio

is

the inevitable condition for the

by closed polygons. The

discrete achromatization

free design

parameters

are then the refractive indices of the films.

Fig. 3-17

Argand diagrams

for a

Argand diagram for


a two-layer with r t , r2 negative,
r 3 positive. Tuning ratio 1 2 anticipated.
Fig. 3-18 Closed

two-layer closed at two wavelengths;


r l ,r2

r 3 negative.

So far we have considered the case of a monotonic sequence of indices.


we had, for example, n < n t < n 2 > n making r 3 > 0, we could
g
draw a similar triangle as before, but we would have to interpret x'2 difIf

ferently: x'2

2%

y2

(Fig. 3-18).

By analysing more
changes sign after r _ l

we would discover the rule that any time an r


xv - x =2n, - internal angle. When there is no

cases
,

change, the internal angle

In every case

is

subtracted from

we would prove

it.

the necessity of integral ratios.

OPTICS OF THIN FILMS

114

The possibility of achromatizing antireflection films by toppling over the


closed polygons was firstreported in 1949 by Turner, [20], but other authors
contributed to the subject almost simultaneously Muchmore, [21],
Blaisse, [22], Vasicek, [23] using more or less different approaches.
We shall adhere essentially to VaSicek's ideas, but some improvements
will

be added.

place we shall cease to explicitly rely on the internal angles


They have served the purpose of proving the rule of integral
ratios, but in the general case of more layers they are not suitable for
preparing the computations in a form suitable for programming.
Further we shall formulate the problem for an arbitrary (though
perhaps small) number of films and use r^ (instead of n,) as the unknown
quantity. We thus avoid the necessity of setting up the coefficients of algebraic
equations in n x of different orders and simply solve a regular pattern of
linear factors by iteration.

In the

first

of the polygon.

Thirdly, any integral ratio c x

much dependence on

intuitively

c2

c3

...

will

be admitted, without

drawn Argand diagrams. In

fact,

we

shall

abolish the geometrical approach and formulate the conditions of zero


reflection purely analytically.

Finally,

some

We now

method will be discussed.


x and the relative thicknesses

generalizations of the present

define a reference phase angle

The various values of x which correspond to a closed polygon


will be denoted by x', x", x'", ... the corresponding wavelengths being
Then we state the zero conditions (dropping the minus sign
A', A", A'",
ci

>

c2

>

with the sines)


rt

+ r2 cos (xc ) + r 3 cos [x(c i + c 2 )] +


+ rk+1 cos [x(c x + c 2 + ... + ck)] =

+
(3-40a, b)

r 2 sin (xc t )

r 3 sin [x(c t

rk+1 sin [x(c t

c2

+ c 2 )] +
+ ... ck ) =

where the c are known and x is yet to be chosen.


Every time we choose a value of x, we obtain two equations of the
type (3-40a, b), provided x does not equal a multiple of n. In the latter case
only the equation (3-40a)

is

added, having coefficients

with the

/.

The unknown quantities are the Fresnel coefficients r. However, we


must not set up as many equations as there are unknowns. One reason is
purely algebraic: a complete system of linear equations with zero right-hand

BASIC DIELECTRIC DESIGN UNITS

115

sides has only the trivial solution r = r = ... r = 0. One might generalize
t
2
k
the conditions (3-40a, b) in that the right-hand sides are small quantities.
Then the algebraic limitation would fall, but there is always another

practical aspect

which must be respected. This

best seen

is

by developing the

following pattern:

n_,

*=

Multiplying

all

nv

"^-r-fw,-,

=>

(3-41)

the equations after the implication sign yields the relation

*+!

* +1
1 - r.
= n-n-ro

"g

(3-42)

This means that any set

must

{/} found as a solution of the algebraic equations


inbetween the given outer indices n
n g by Eq. (3-42).
way of securing this is to have at least one equation less than there

fit

are unknowns. Clearly, for an even

number of

layers k,

we have

of equations of the type (3-40a,

b), for

k odd we take

it/2 pairs

pairs of this

type plus one equation of the type

fi

r2

r 3 ...

rk+l =

where the signs are determined by factors cos (n!c B ).

Each

time, there are

ratios of the r v

may be

unknowns

k equations and only the

for

determined.

Let us therefore choose, for example, r l as the reference quantity and


define

Pv

= -J-,

1,2,3,

...,fe

(3-43)

'v

It is then a straightforward matter to solve the algebraic system by


Cramer's rule for p 2 p 3 ..., p k+1 (p x being by definition unity).
E.g. for k = 3 we have
,

rx

+ r 3 cos (c x + c 2 ) x' + r4 cos (c + c 2 + c 3 ) x' =


r 2 sin c x' + r 3 sin (c t + c 2 ) x' + r sin (c + c 2 + c ) x' =
4
3
+ r2 cos c^n + r 3 cos (c + c 2 ) + r4 cos (c + c 2 + c 3 ) =
r2

cos c^x'

rt

jt

ti

(3-44)

OPTICS OF THIN FILMS

116

the solutions being

+ c 2 )x',
+ c 2 ) x',
+ c 2 )k,

-cosc^', cos(c t
P2

-sinc^', sin(c t

cosCiit,

and

1,

cos (c x

0,

sin (c t

1,

cos(c!

similarly for p 3

Given now

all

p4

all

+
+
+

We do
by a

sin (c t

c 2 )ti,

cos(c x

c2

c2

c2
c2

+
+
+

c 3 )x'
c 3 ) x'
c3)

Jt

c 3 ) *'
c 3 ) x'

c 3 )ir

1,2,3,

we

...,fc

from

extract

(3-43)

(3-45)

'-l

these equations one obtains

(3-45')

it

rt

normal form, because


method in the interval

into

trial-and-error

an algebraic equation of (k

Having thus found

by

c2

for r B (3-41),

-i>

essentially

not put

+
+
+

c 2 ) x',

is

+
+
+

c 2 ) x', cos (c t

and writing

This

cos(c!

sin (c t

c2

the p

Pv

Multiplying

cos(c t

+
+
+

cosCCi

r lt all the

(3-45), the condition n k+l

nv

it

may

<

rx

l)-th order for r t

conveiently be solved
|

1, 2, ...,

<

1.

computed

are

n g being automatically secured.

remains to say some more on the choice of the x. The trigonometric


coefficients in equations (3-40a, b) are symmetrical about the value n. If,
It

with some positive


values used to set

y'

>

y"

>

0,

x'

y'

and x"

it

four equations of the type (3-40a, b) for a four-layer

up

system, then these will automatically also be satisfied, with the


the symmetrical values x"

<

x"

<

x. This

is

=n +

y",

y',

rc

-y

y'

it

x'

same

<

x"

rv

<

for

<

Argand diagram.

holds that

A'

>

A"

>

(3-46)

A"

This shows that with a four-layer

to (3-46).

where

the algebra of toppling over the

Denoting the corresponding wavelengths accordingly,


> A > I" > A' and further

in the q(x) diagram,

two

y" are

Jt

y"

we may have

Aq

tc

-y

four discrete zero points

which are distributed in the optical spectrum according

BASIC DIELECTRIC DESIGN UNITS

The

distribution of the zero points in the phase diagram

in Fig. 3-19. (Since the phase

as examples of

computed

shown

is

diagrams of tuned multilayers are of necessity

symmetrical about the value x

117

be shown

n, the actual reflection curves to

results will

be drawn only in the interval

it.)

The

central point

x = n

is

not automatically a point of zero

reflection.

numbers of layers. If we have five


layers then the system of equations (3-40a, b) must be augmented by one
which is only possible by choosing x" = jt. The centre n is then a zero point.
Proceeding to six layers, we cannot choose Jt a second time, so we must
abolish the centre and choose x'" n y'", having then six zero points at
This

is

typical for all cases with even

We

have thus developed

all

the facts necessary to have the design

To summarize:

procedure programmed for an automatic computer.

The input data are the number of layers k, the integral ratios c 1 ,c 2 ...,
c k and the values of the phase angles x',x" ... in the unit layer. For a
,

. .

given set {c}, the

x',

x"

...

may

of course be distributed differently in

various ways.

The computer
side of (3-45').

By

function the value

up the

iteration the value

njn

set {c u } several distributions

solution {n l ,n 2

logical point of

e,

<

rv

<

is

found, giving this

computed by

(3-45).

conduct the study systematically, inserting for a given


x',x"

...,

for several substrate indices (e.g. w


g

interval (x'

rational function

Finally the refractive indices are


It is possible to

Each

and uses
on the right-hand

solves algebraic systems of the kind (3-40a, b)

the values of p obtained to set

...,

nk }

and to repeat the whole procedure


1.4

is liable

1.8).

to assessment from the techno-

view and to a spectral check by computing q(x) in a larger


x'

e)

in order to see the continuous shape of a curve

which was synthetized by discrete points. (It was stated in the introduction
we risk undue oscillations between the zero-points.)

that

Note: In using the geometric interpretation, we have regarded

x = xy

as the unit phase angle. This has facilitated the drawing of particular situations. In the analytical design we

proceed quite formally and guide the choice

Fig. 3-19 Typical distribution of zero

points with a four-layer.

OPTICS OF THIN FILMS

118

simply by spectral demands according to

of the

x',

(3-46).

When drawing the Argand diagram for any

x"

...

in the unit layer

of the solutions obtained,

we compute the rv from the n v and for the closed conditions lay off the angles
xv = c v x', c vx" etc., v = 1, 2, ..., k.
The theory of discrete achromatization may also be exploited in its
general terms to achieve an important picture of a class of tuned anti-

be developed in the next paragraphs.

reflection systems. This will

3.3.3

Examples of use

Double-layer combinations

We

of discrete achromatization in the simple case

shall start the study

of a two-layer tuned in the ratio 1:1.

c2

1,

and

We

then have in (3-40a, b) c t

easily find

rjr 2

The closed Argand diagram

therefore

is

rjr 3

2cosx
an

(3-47a, b)

isosceles triangle with r y

r3

This equality implies in (3-41) that

n t n2

n ng

This condition secures two zero minima at

and

Note: The condition (3-48)

tion in

(3-47a),

where

rx

stringent in the visible spectrum, because

is

one of the

number of other

in detail various analyses,

Since the point

check

its

results to follow. Besides,

which sometimes lead to

is

This value will be zero

h +

n\ h )

if

nl

(n

same accuracy

as the geometric

2-

also instructive to carry out

this two-layer design,

The

(n

,A

we

Using (3-19) and (3-48) we have

2
3
= [ (".M'-KK)'2 ) = ( nt-n n g
2
\(i/"2) + (o/ g ) /
V t + 0g

found to equal

+ V n g)

it is

unrealistic indices of refraction.

not under control in

value in terms of n t

e(w)

(V n o

x given by

must be smaller than the hardly attainable \]n% n There is more scope for exploitathe infrared, where substrate indices with n = 4.0 or more appear. The same
g

applies to a

shall

x',

determined by the choice of n x , n 2

r 2 are

indices

(3-48)

= tj(n%n%). The
+ nj 4) 2 which
,

is

ratio (3-47a)
is

that x'

may

then be

identical to 1/2 to the

mean ^/(n ng) is equal to

practical inference

the

harmonic mean

in (3-47a), so that

BASIC DIELECTRIC DESIGN UNITS

119

two zeros coalesce into one located at the centre of the phase diagram.
ir is computed as curve (D in Fig. 3-20.
With t increasing the central hill grows and soon reaches the value
for a blank substrate. This occurs for n l = n 2 = V(M w o)> when the layer is
g
effectively a single A/2 film. The phase diagram is then periodic in
< x< n
and a zero minimum occurs at x = jc/2, where the film is a quarterwave.
(Curve @ .) An intermediate case of a central maximum accompanied by
intermediate band width is shown as curve (D
the

An

example for the

Fig. 3-20

A/4A/4 achromatic

two-layers

of various bandwidths and ripple on


substrate n

n2

2.83;

4.0.

! =
More

n = 1.413,
1

n2

1.6,

n2

n1

= V"g = 20
= 2.5.

>

interesting results are obtained

when

the ratio

is

considered.

(3-40) has a solution

rjr2

sin2x' _
= -

No

short cut

We

is

r t lr 3

2cosx' =.

2 cos y'

(3-49)

sin3y'

sin3x'

numerically.

sin2y'

possible as with

and

results

reproduce from Vasicek's paper

[23]

have to be solved
a typical table for

light glass. (Table 3-5.)

x = 180, the central maximum is


when applied alone. The dividend of
have two zero minima on both sides of the value

Since the second layer


as good as the

using the double layer

Qo

[("?

is

minimum of

o)

(nl

to

is

latent at

layer t

n )f.
Table 3-5

Refractive indices of a
Kg

2 achromatic two-layer (after VaSilek).

1.6

"l

1.1247

1.1350

1.1500

1.2000

1.2500

1.2649

1.3000

"2

1.4226

1.4097

1.3913

1.3333

1.2800

1.2649

1.2308

x'O

180.00

148.99

133.14

106.97

93.10

90.00

83.88

1.3500
1.1852

77.10

OPTICS OF THIN FILMS

120

Technological considerations raise the question as to what can reason-

1.38 (MgF 2 ). As was first shown by Pohlack,


some tolerance on the index n 2 which may well be lower than
the value required by discrete achromatization. The zero minima are lost
ably be combined with n x
there

[24],

is

without seriously affecting the broad-band antireflection character of the


layer.
It

and

may be

1.85

is

good

same materials

Fig. 3-21

A/4

is

1.7/1.52.

A compromise design for

on

result for
:

of the

A A/4 A/2 two-layer with


= \Av ("g = l-^)> *^e free va u6 of

Fig. 3-22

light

"l

the
1/1.38
1.7/1.52;
(D
same index combination produced in the
1

anything between 1.7

Curve (D in Fig. 3-21 shows the


(For comparison the tuning 1
restated here from Fig. 3-15 as curve (2).)

A/2 achromatic two-layer

glass:

1.65),

for the A/2 layer.

a combination 1/1.38

<

stated that for light glasses (


g

'

n 2 controlling the

minimum

tuning.

at

flatness of the zero

180.

n 2 = 1.661
the
n2 =

obtained by discrete achromatization

maximally

flat case; (J)

3)

1.8;

2.0.

chosen as V(M o" g)> tne two zeros are forced to coalesce
A
A
combination with refractive
to one point at x = n. In fact, any
If the value n t is

indices y/(n n^) n 2 has a zero at

double zero corresponding to a


of discrete achromatization ( 2

makes

the

n (curves

specific value

minimum maximally

1.6.6

for n

flat in

(2)

1.5,

One
little

in Fig. 3-22).

<3)

= landn

the sense that both the

second derivatives vanish (curve ). However,


means of achieving achromatism.

of

and

The

of n 2 obtained by the method

this

is

=1.225),

first

and the

only a moderate

could also contemplate the converse tuning ratio 2:1, but this

interest for the practice. If the residual hill at

is

is

to be small,

BASIC DIELECTRIC DESIGN UNITS


the inside A/4 layer

121

must have a low index of

by discrete achromatization

is

<

n2 ,

it

will

refraction. If the n t required

be unrealistic.

If n x

>

n2

we

an air-high-low-glass combination which substantially enhances


reflectivity for phase angles where the outer layer is approximately quarterwave. The value g (n) would be a relative minimum in an overally bad antihave

reflection curve.

Three-layer combinations

Turning
1

1,

now

to the three-layer combinations in the basic tuning

we can compute from

(3-44) after a

moderate

effort

cossin y'/2

3x'

^-=1

(3-50)

sin 3 y'/2

cos

whence
r2
this

=r 3

rx

(3-51)

r4

implying for the refractive indices

l3^=2 ="0g

Fig. 3-23a, b Deltoid

Argand diagrams

(3-52)

for a

three-layer.

Eqs. (3-51)

mean

that the closed

Argand diagram

is

a symmetrical

deltoid.
If the

sequence of refractive indices

r v are negative

internal angle

is

and the
y'

congruent triangle and

is

deltoid has the

monotonically increasing,

form depicted

in

all

the

Fig. 3-23a. Its

x' at all apexes, x' = n + y' would define


x = n yields the third degenerate form of
it.

the

OPTICS OF THIN FILMS

122

If

<

configuration

>

nt

n2

>

n3

<

ng

and

r2

are positive and the basic

r3

may

given by Fig. 3-23b. Even this

is

be regarded as a gene-

ralized deltoid. (In fact, even the isosceles triangle of the

nation

is

The

combi-

a deltoid of a kind.)
idea of deltoids was introduced into the theory of discrete achro-

matization by Vagicek in his treatment of double- and triple-layer antiit may be pursued up to any
1:1:1... tuning and that it can spare us the
of systems formed by the cumulation of (3-40a, b).

reflection coatings. It is

number of films

our aim to show

in the basic

tedious solutions

Fig. 3-24

A/4 A/4
Q> 1.47 2

Achromatic A/4

three-layers

on n

4.0:

1.38 2.0 2.9;


2.0 2.0
(degenerate case).

2.7,

2.0,

(J)

we first computed (3-50) and then arrived at the


and the simple rule (3-52) for the refractive indices.

In the present case


deltoid property (3-51)
It

remains to determine the location x' of the outer zeros.

scheme of the type


we assume the property (3-51) and write first the two

Taking the hint that a deltoid


(3-40a, b) with c

1,

fits

into every

equations of (3-44) as
r t (l

cos

3jc')

r t sin 3x'

r 2 (cos x'

r 2 (sin x'

cos 2x')

sin 2x')

Both these equations represent one and the same


r 1 cos

The angle

It is

x' fitting here is

x
3

r 2 cos

x
1

in

relation

determined by the formula

now clear that choosing the n v by (3-52) we

Argand diagram

two congruent

are in a position to close the

configurations.

BASIC DIELECTRIC DESIGN UNITS

The degenerate configuration

123

also secured, because the conditions

is

(3-52) are compatible with the condition for zero reflection of a three-layer

at

x =

Jt

= V(w ow g)-

n 1 n 3 jn 2

Checking the various combinations of refractive indices numerically,

one

is

led to the conclusion that

tonically

clear in

most

it is

the step-up designs proceeding

mono-

from n to n% that behave well between the zeros. (It will become
9.2 that a step-up design imitating an exponential index profile is

effective).

Once again, the conditions (3-52) are stringent for the visible spectrum,
since the same condition is imposed on n 2 as with a single layer. In addition,
either n t or n 3 must be still smaller.
Examples for the ir are computed as cases , (2> in Fig. 3-24. The
subsidiary

maximum

inbetween the zeros

A-layer with a zero

minimum.

Its

n3

2,

phase diagram

is

condensed to the

by the relationship

affected

is

between n 1 and n 3 Taking the drastic example n l

one has a single

0120 and then repeats itself. This gives three zeros at 60, 180
and 300 with subsidiary maxima equal to blank-substrate reflection (case ).
The other extreme is n 1 1, 3 = 4. The system degrades to a single

period

A/4-layer with

The

one zero minimum

at 180 (not shown).

For the intermediate cases the outer zeros lie between 60 and 240.
maxima. In the example (D

closer they are, the smaller the subsidiary

the indices were chosen so as to approximately

fit

onto an exponential

transient curve between the values n Q


4.0.
1 and n
%
The second case of interest with a three-layer is the tuning ratio

The

p are general functions of the x'

and no

simplification

is

1:2:3.

possible.

reproduce the complete Table 3-6 computed by Vagicek.

Table 3-6
Refractive indices of a

ng

3 achromatic three-layer (after Vasicek).

1.6

"l

1.3375

1.3486

1.3728

1.4286

1.6200

"2

2.2512

2.2253

2.1932

2.1840

2.3414

"3
x'

1.6983

170

1.7114

160

1.7407

150

1.8090

140

2.0451

130

We

OPTICS OF THIN FILMS

124

The corresponding

reflectances are

shown

respect.

On

ripple at

the contrary, the

The

in Fig. 3-25.

increases with the band-width, but only the last case

three cases have practically

first

ripple

critical in this

is

no

visible

all.

some tolerance on the refractive indices if the condition


The results presented may guide the development
of convenient practical combinations of about the same performance.
Again, there

of strict zeros

As

is

is

abolished.

we choose

the next item of interest

the ratio

Although

antireflection triple-layers of this type are widely referred to in the literature,

seems to have escaped attention.

their exact characteristic

The

story begins

by solving

(3-44) with c x

c3

1,

c2

2,

when one

obtains

-rjr 2 = rjr 3 =
This means

r2

= r3

rx

r4

rjr*

= -1

(3-54a, b)

2cosx
the implication for the refractive indices

being
g

n3

Obviously the case

1:2:1

considered from the viewpoint of discrete

achromatization degenerates to the following symmetrical scheme of a


3-layer

njri

ri

ri\n

AAA
4

at x'

and
n

180 (seen by amalgamation). To obtain another


one has to use (3-54a) to compute

x",

+ q

,1

E.g. with n

Cases

like

1,52, ri

and

1.7

shown as
this have no

responding curve

having a safe zero at x

two zeros

is

x'

.n.-n'
+ ri

2 -*
ng
135

cos x

we have

ri

1.99.

The

cor-

(D in Fig. 3-26.
practical importance (because

one does not

insert antireflection layers between two identical media), but this does not

mean
is

that the tuning

to adopt

should be completely discarded. The point

a flat curve on a very low level and


an appropriate design approach. The idea is very simple:

to admit small non-zero

minima or

BASIC DIELECTRIC DESIGN UNITS

The
180

125

central layer being latent, the condition for

an exact zero at

is

i2
n2 n 3

n_

~~

n3

ljh_
nt

(3-55)

(The system must formally be considered as a four-layer with identical


internal indices.)

With various values of n 2 this zero will remain fixed, but the overall
will change. (A typical reasoning of thin film theory when,

shape of the curve


ever a A/2-layer

is

used to correct the curve of a tuned system, see

3.2.5.)

A/2
Achromatic A/4
3A/4
on n = 1 .6 with different

Fig. 3-25

three-layers

bandwidth and

ripple:

1.349 2.251 1.698,

2.225 1.711;
2.193 1.741,
(3)1.429 2.1641.909,
Vasicek).
D 1.620 2.341 2.045
(2)1.349
(3)1.373

(after

Fig. 3-26

The

A/4

A/2 A/4 case of

achromatized antireflection:

degenerate
achromatization;
out
@ one-point zero
discrete

flattened

by a central A/2 layer

(after

Cox

&

Hass).

OPTICS OF THIN FILMS

126

It is

a simple matter to run, with an automatic computer, a set of values n 2

for various twins i/n 3 obeying (3-55)

& Hass,

approach adopted by Cox

and

see

what happens. This was the

[25].

convenient combination for light glass (1.50) in the visible

example, n x

One does not

1.38,

n3

1.7

and n 2

lying about 2. (curve

<2>

for

obtain true zero side points (which would be in contradiction

to the above), but the flattening effect over the affiliated curve
is

is,

in Fig. 3-26).

<2>

in Fig. 3-15

very pronounced. Designs of this kind are even considered as superior to

the

1:2:3

combinations with true zeros (possible technological problems

with the thick

3 A-layer with no

compensation in a broader minimum).

We shall take a third look at the case 1:2:1

within the framework of

the four-layer.

Four-layer combinations

now

Let us

consider a A/4

A/4

A/4

A/4 layer.

We

shall

have

recourse to the deltoid concept and seek a short-cut solution of the two

on the assumption

pairs of equations (3-40a, b)

rt

rs

r2

r4

r 3 free,

this leading to the conditions

"l4

now

(3-40a, b) are

23

(3-56)

"o g

represented by one equation


2r x cos 2x'

2r 2 cos x'

r3

or
4r t cos 2 x'

which

will

be

2r 2 cos x'

r3

2r t

(3-57)

satisfied if

cos

x'

-r*M +**-+)
4r t

Both values of cos


four zero points

x', x",

Examples for
in Fig. 3-27.
realistic.

The

An

this

Ir

x' are

compatible with the problem so that we have

x" x, as expected with a four-layer.

kind of antireflection are shown as curves

substrate n g

4.0

indices were chosen in accordance with (3-56), the zero points

were found without solving (3-58) by simply computing

(3-57)

q(x). Obviously,

again obtained with a step-up design (case ).


extension
important
of the theory can be made considering that

true antireflection

An

(D

was chosen to make things more

now

is

stands for two equations.

We may

therefore impose a further

BASIC DIELECTRIC DESIGN UNITS

127

condition without overdetermining the system of r v

odd

cases) q(k)

The

0.

inference by (3-23)

is

We

choose (as in the

that

n,n
1"3

(3-59)

n-,n
2"4

Combining
If !

with (3-56) leads to the following

this

is

of formulae:

set

make

chosen,

60)

Then

o
n

nt

= V"o

~V n

~ "o"gV w o
V"g + n ogV n o

w iV n g

g
'

w.

Mi

V"o +V"g

'

(3-61)

\
\

V
"\*.

/
/r

9- Vl/'/
VA\/^
w
^

Fig. 3-27 Various deltoid solutions for

Q) 1/1 .65

1.7

.82

Fig. 3-28 Five-point antireflection

by

a four-layer of the deltoid design:

layer:

2.35
2.22
1/1.38 1.82 2.2

0) 1/2.72

(3)

1.77 2.262
1.951 2.05
1/1.413 2 2
<D 1/1.6 2.262 1.757

1.47/4.0,

<D 1/1.25

2.9/4.0,

(2)

2.9/4.0.

1/1-38

3.2/4.0,
2.9/4.0,

2.83/4.0,

(3)

2.5/4.0.

This five-point antireflection by a four-layer of the deltoid design


illustrated

by

x =

180 so that in practice

five,

the central one being broader than usual.

lating

is

The inner zeros converge toward


one has three minima of reflection instead of

several curves in Fig. 3-28.

an exponential

In this respect

it

profile is

most

Of all

the designs, that simu-

efficient (case (D).

isinteresting to try the additional restriction n 2

This effectively leads to a three-layer tuned as


generate in the previous approach.

1,

n3

which proved de-

OPTICS OF THIN FILMS

128

This

is

"1

not the case here. The condition can be met

t/("o"g).

= V("o" g),

This particular choice inside the scheme (3-61) leads to


r3

0,

and

(3-58)

now

yields x'

180, x"

if
tj'(r>o n l)

r1

(3

r2

"

62 )

r4

r5 ;

60.

X
T

A* I
180

120

Fig. 3-29 Five-point antireflection

a four-layer in the

by

tuning

derived from a six-layer deltoid case:

2.35
2.22
2.11
1/1.413

(3)1/1.413 2.11
2.83/4.0,
1/1.413 2.22

1/1.413 2.35
@ 1/1.4132.0 2.0

2.83/4.0,

(D 1/1.413

1.7

1/1.413

1.8

2.83/4.0.

1.9

2.83/4.0,

(2)

(3,

2.83/4.0,

1.9

120

k"

180

<S>

1.8

(g>

1.7

2.83/4.0,

2.83/4.0,

a reference curve from Fig. 3-20,

is

where

The
and

it

was

form of a rhombus with

deltoid assumes the

labelled as

internal angles 120

60.

The

central

minimum

is

a triple zero. Since such a zero cannot be

postulated in the original theory of the three-layer tuned as

1,

the

present three zeros 60, 180, 240 could not be predicted there.

This case

is

exemplified by curve

(3)

in Fig. 3-28.

Only the

ir

application

can be contemplated.

As a final item we shall deduce a certain four-layer combination based


on the postulate of a A/4 six-layer having an additional zero at x = 180
and simultaneously fulfilling the condition n 2 = n 3 4 = n s Then, we
actually have a four-layer in the tuning 1 2 2 1.
Writing for the 6-layer deltoid n t n 6 = n 2 n 5 = 3 4 = n n g and also
,

postulating

"l35
n2 n4 n 6

BASIC DIELECTRIC DESIGN UNITS

129

one arrives at the conditions


free;

-^V(o\),

n ng

= v-A/Ov!)
"2

n n n
(3-63)

chosen as ^Jnln g then 2

If j

is

being

free.

Also n.

n-,.

n5

njn 2 n 2
,

still

A series of solutions of this kind is shown in Fig. 3-29a, b. The step-up


medium performance over an extremely broad region;
inverting the inner indices (case (D) yields excellent antireflection over one
octave about x = 180.
design

A/4
the

<3)

gives a

Making n 2 = n 3 = 4 = n s = 2 effectively leads to a three-layer


A A/4. This curve is shown as in Fig. 3-29c. Simultaneously,
curve (D of Fig. 3-20 is again shown (dashed), because the 1 4 1 case

under consideration

may

of the design 1/1.413

that the choice n 2

be regarded as an internal extension by a A-layer

2.83/4.0 in the

2 for the A-layer

is

1
ltuning. Numerical checks show
an optimum where the configuration
:

and height of the maxima of the three-layer are concerned.


The examples shown more or less exhaust the possibilities of this kind
of antireflection. Very little additional material is to be expected from
repeated solutions of the system (3-40a, b) with various tuning ratios, at
least for glass substrates.

Let us give some modest examples:


Table 3-7

Achromatic three-layers with some unorthodox


tuning ratios.

tuning

1:2:2
1:3:1
1:3:3
2:3:1

i "2--3 4

1.330

2.00

1.600

1.8

1.116

1.265

1.433

1.6

1.250

1.520

1.62

1.8

0.868

1.000

1.303

1.7

An unusual tuning, as in the last case, leads to a non-physical


index.

refractive

OPTICS OF THIN FILMS

130

of generalizing the present theory. One is to


of zero reflection in the discrete points.
condition
abolish the stringent

There are two

While there

is

possibilities

only one complex

number

zero, in the

new approach any

result Jgexpid with small q and arbitrary 5 could be the sum of (3-37).
For reasons of continuity, however, one would not obtain anything sub-

from the basic theory.

stantially different

refractivity

from the

On

ideal designs, motivated

the other hand, deviations in

by technological

be numerically checked and assessed in terms of a

reasons,

maximum

may

non-zero q

allowed in the pass-band.

The other approach follows this idea: if experience shows


small, let us fix it by a value 1.38, say, thus also fixing r 1

that n Y

is

too

Let us have, for example, three layers altogether. Fixing

We

rt

makes

must drop one

the system (3-44) overestimated in the optical sense.


equation at the cost of having chosen n^ The only equation to be sacrificed
.

of course the third one because otherwise we would lose two zero points
n y and n + y instead of one.
We of course lose control over reflectivity in the entire interval
achromatization
(n _ y, 7! + y) so that the situation is analogous to discrete
by a two-layer, but we expend three layers for the purpose now, with one

is

index chosen conveniently. There

is

therefore a chance of finding

new

by two discrete points.


Anders,
[26], computed a three-layer in the tuning 1:2:1,
In this way
=
1.39 and putting up with only two zero points. The result
prescribing n t
was n = 2.12, n = 1.63 (with n = 1.52). This is another example of
solutions to achromatization

how

1:2:1 combination may

be

listed

among

succesful antireflection

designs without actually being subjected to the singularity mentioned

on

p. 124.

3.4

Some

detuned multilayers

There being no general theory of detuned multilayers, the classification


of the various systems and methods of approach is difficult. In this section
we make a more or less random selection of interesting systems and methods.
Note:

The index combination obtained

is

very near to the case

shown as curve Q)

Fig. 3-26, but this does not diminish the importance of this generalized
situations.

in

approach for other

BASIC DIELECTRIC DESIGN UNITS


3.4.1

The simulated

antireflection bi-Iayer

A double-layer with tuning


is

known

131

and

= ^{n /)
one wavelength. Let us try

refractive indices n 2 \n
x

to posses a zero point of reflection at

to solve the dual

problem of securing one zero point with a given pair of


computed from the zero

refractive indices, the optical thicknesses being

condition.

Following a procedure due to King & Lockhart, [27], we establish


the
formula for the complex reflectivity of a double-layer in terms of
the input
admittance.

Numbering for the moment the layers from the substrate upwards and
considering in general either of the polarizations in oblique incidence,
we have
Y( 3)

(2)
= Y +jy2 tan<? 2
Y2 + jY< 2 tan cp 2

(2)

yp+JMan^

Y + j^tan^

'

>

and

Y< 3 >]

Y2 (Y3 - Y

[Y3

(3 " 64)

Y< 3 >] so that

+ (Y Y 22 - Y3 Y\) tan <Pl tan q> 2 +


+ )[Y2 (Y Y3 - Y\) tan cPl + Y (Y Y3 - Y 22 ) tan <p 2
=
[Yl Y2 {Y3 + Y ) - (Y Y 22 + Y3 Y\) tan <?, tan <p +
2
+ J[^2 (^o^3 + Y 2 )tanq> + Y (Y Y3 + Y 22 )t<m<p 2
[^i

[Y3

7l

The conditions for zero reflectivity are obtained by separately setting


the real and imaginary parts of the numerator equal to zero.
This yields
two conditions for the two quantities tan (p tan cp
l
2

Coming back

to the original

tan,,,

= r3
tanffl!

numbering of media we obtain

(n -

/f

-tan(? 2

W; -

r.r.)

Y^ Y2 ~ Y 7^
Y2 (Y\-Y Y% )

(3-65a) will have a practical meaning, if the square root is real. The implication for normal incidence from the air is that either one or all three

of the

following inequalities must hold:


"i

The
that

> V" g

case "all three"

make

it

>

yfn t

n 2 \ ni

>

yfn t

(3-66a, b, c)

is just in agreement with the technological facts


impossible to obtain a virtual zero in the visible when using A/4

OPTICS OF THIN FILMS

132

or A/4

from

Thus the case under consideration is a

A/4 layers.

suitable expedient

this situation.

Denoting the main solution of (3-65a) with the sign + by q> 2 this angle
and n/2, the minus sign yields <p"2 = tc - <p'2 The corlying between
when
responding solutions of (3-65b) are then <p[ lying between n/2 and n
,

all three inequalities (3-66) are valid,

and

<p"[

<p\

The optical thicknesses corresponding to a given solution (q>i , q> 2 ),


wavelength of
expressed as general multiples of A or A /4, where A is the
zero reflectivity, are

n v fc v

The

first

'

360

(3-67)

l,2

90

of the above solutions therefore leads to a thinner than A/4

other solution.
inner layer and a thicker outer layer, and conversely for the
shows that the latter is more spectrally selective about the zero

Experience

indices for
point and will therefore be discarded (at least with the refractive

the visible region).

The tuning of the individual solutions depends on the substrate index.


Table 3-8 shows computed results for the index combination n x = 1.38,
n2

2.22.

Table 3-8
ratios for the simulated

Tuning
2

2.22

on various

"
Cl

c2

=
=

<pJ90
<p 2 /90

representative curve

1.516

effect

with n l

1.38,

1.626

1.558

1.755

1.288

1.251

1.220

1.143

0.229

0.208

0.206

0.204

is

Evaporating on various

The

bi-layer

glasses.

shown

as

in

Fig. 3-30.

glasses actually calls for fine readjustments.

of keeping one design for various glasses

destroying the zero reflection as in shifting

it

is

not so

much

in

spectrally. This is illustrated

the
by the curves @ - in the same figure. However, one may disregard
the
here
as
good
as
almost
heavy glasses, because a single film with 1.38 is
the
design
for
double layer. For the region 1.5 < n g < 1.65 a compromise

BASIC DIELECTRIC DESIGN UNITS

133

may be accepted. While a single-layer antireflection coating


A = A/4 applied to various glasses always reflects the same

central n g

with

a given

hue,

only the saturation increasing with higher n g , the double-layer shifts in hue,

keeping a relatively high saturation.

The energy
detector,

is

effect in

given by

compared with
type of coating

white

1.5 percent for


is

light,

evaluated with respect to the eye as

a typical loss of 0.5 percent per surface of 1.5-glass,


a single

MgF 2

layer.

A disadvantage

of this

a stronger tendency towards cumulative tint in transmitted

light when

more surfaces with the same coating are used in tandem. (See 1 2.4.)
note should now be added on the designation for this layer used in

the caption.

The inner
ferences. Its

layer of this design

function

may

reflection of the glass

index layer

is

is

so thin that

it

does not exhibit inter-

be interpreted as helping to increase the Fresnel

boundary so that the subsequently deposited low-

deceived into thinking that

it is

antireflecting a heavier glass

120

y>

f>

Fig. 3-30 (a)

andn g

150

130

The simulated antireflection bi-layer designed for n i = 1.38, n 2 =


= 1. 52. (b) The effect of using the same design on various glasses.

2.22

OPTICS OF THIN FILMS

134

than there actually

This led H. Osterberg,

is.

which

that simulate monolayers",

to speak of "bi-layers

[28],

we adopted.

fitting characterization

This bi-layer has been given wide attention in the literature and
widely produced. Further details

may

In particular, a class of solutions


inequalities (3-66a, c)

may

is

is

be found in MacLeod's book,

also
[29].

possible in the infra-red where the

be inverted owing to the high value of the n


g

available.

3.4.2 Design of detuned three-layer antireflection coatings


It is difficult

to obtain a general theory of a detuned three-layer coating.

Methods so far published are always devised for a certain purpose and have
some more or less specific features. To illustrate the situation we briefly
mention two methods concerning the analytical design of three-layer antireflection coatings.

The

first

method

is

due to Thetford,

[30],

and

is

based on the idea of

regarding the three-layer as a Fabry-Perot type interference


layer of index n 2 being the spacer layer.

be regarded as subsystems

Denoting accordingly the


r R exp

and

layers w x

the middle

and n 2 may

introduced in Sect. 2.6.1.

II in the sense

by

partial reflection coefficients

Q5 UR) and invoking

in Sect. 6-2, the

The outer

filter,

r, R

exp

(j^

),

the relationships (6-17), (6-19) to be derived

numerator of (2- 29a) may be written as


~J*IR

MR c

"T"

<J*IRr

The conditions

LMR

,J28i
c
]]B

i(iue.-2<i>z)

MIR e

j(<IL+*IIR-2<?2)l
J

for zero reflectance are

MR = ML = MIR
^il

d UR

The internal reflection


beam approximation as
Mi.e

j * ,L

r 21

r 10

2q> 2

I2n,

coefficients are

e" 2j>1

0,

now

M e* R =

1,

(3-68a, b)

...

expressed by the double-

r 23

^e" ^
2

(3-69a, b)

where
v

"

nv

BASIC DIELECTRIC DESIGN UNITS

135

numbering of

are the Fresnel amplitudes involved. (The


sign of the phase-shifts S

<p x

and the

layers

opposite to the original paper.)

comparatively easy to design with the n v given a coating which

It is

satisfies (3-68a, b)

of

is

(p 2

q> 3

with (3-69a, b) for a single wavelength,

number of q> 1 and

In fact, there are a large

i.e.
cp 3

for one set


which make

(3-68a) valid. Generally, however, the reflectance does not remain

low over

a broad band of wavelengths. For this reason the analysis was aimed at
obtaining zero reflectance in two wavelengths and, from the

many

existing

solutions to this requirement, to choose those which remain low inbetween.

The point
q>'

q>\,

for A

is

to graphically equate (3-69a) to (3-69b) with such a pair

understood to operate at some A

A',

that the corresponding pair

A":
n

again secures the equality (3-68a). Each time the S are also
<p'

q>2

known and

Since (3-68a) only concerns the moduli r and not the phases
are

the

are determined by (3-68b).

many
One

starting pairs q>\

selection process

within a net of values

q>\,

to simultaneously obtain g(A')

is
(p'

there

refer the reader to [29]

g(A")

A". It remains to discard those cases,

X',

where large intermediate values

We

S,

to choose from.

<p'

<

q(X), X'

and

<

X", occur.

[30] for full details

of the method and

only quote one of the successfull designs:

1/1.38-

2.1

-1.8/1.52

0.22-0.359-0.152 x A
Note: In order to translate the definition of the optical thicknesses to
tion of the phase diagrams,

we

multiply

the thicknesses as multiples of A


(0.88

/4.

all

If these

<p

our organiza-

are considered as relative thicknesses

1.436 0.608) the resulting phase diagram

of the original design at the phase angle

fit

the coefficients by four, thus obtaining

rr/2.

g((p)

has the reference value g(A

(See Fig. 3-31.)

Another method of designing a three-layer

antireflection coating with

et at., [31]. The aim


was to obtain a small total optical thickness of the three layers so that there
would be relatively thin physical thicknesses involved when designing for

detuned optical thicknesses was described by Kard

the infra-red.

OPTICS OF THIN FILMS

136

we may

Referring to Problem 2-6,

write the interference matrix of

dielectric stack as

fill

I
\Ji21

J^12\
Hnl^22 +/*i2/*2i

1*22/'

1,

Using (2-27b) with the modified notation for the

Hu +

= 1 and using
some manipulations

Postulating t

("ojii

is

(3-70)

we have

4n n.

= \i?
(n

after

real

n g fi 22 )

(fin

Wo g /*i2)

the unimodularity of (3-70)

- V22) 2 +

G"2i

we obtain

n n g n 12 ) 2

so that the necessary and sufficient conditions for zero reflection (at one

wavelength) are

"o/*ii

g^22

^21

= >W*i2

(3-7 1 a, b)

whatever the index pattern and tuning of the multilayer.

These formulae evidently include as particular cases the conditions


for zero reflection at

q>

nj2 of a tuned stack (see (3-23)).

6
5
4
3

w J

'

90

SiJ

120

<)

5
b)

4
3
2 ~\
1

400

500

600

700

V
Fig. 3-31

A three-layer antireflection

design after Thetford. (a) phase diagram


1

A dOOnm

q(<P), (b) spectral reflectivity

curve g(A)

BASIC DIELECTRIC DESIGN UNITS

Kard and

out to solve them for the case of a symme-

set

of general tuning:

trical three-layer

"1

coworkers

his

137

"3

n',

<Pi

<Pi

<?>'>

n",

q> 2

y"

straightforward multiplication of the three matrices (compare also

6.3.1) leads to the

0u =

022

formulae
cos

2<j'

cos

q>"

sin 2q>' sin q>"(n'

n"

2
)

(2n'n")~

(3-72)

M12

' _1

sin 2<p' cos <p"

n' sin

2<jo'

+ (2n'V)
_ *)] sin

2
('

+
H 2l =

_1
[(n'

cos 2q>

+
(3-73)

<p"

n"

9*

+ (In")' [(' 2 +
- (n' - " 2 )] sin <p"

cos

n"

2
)

cos

2<j'

Since the case n

from

(3-7 la)

and

g does not

for antireflection,

call

(3-72) that inevitably n Q

0ii

With equal diagonal terms

fi l2

^22
is

(3-74)

we may

infer

n % and

(3-75)

then the inverse of n 2 i an d

we may

conclude from (3-7 lb)


012

= +(n

g)~

1/2

021

("o" g)

1/2

(3-76a,b)

Eqs. (3-71) (3-76) define the conditions for zero reflectivity in one

Given the refractive indices the tuning may be computed, but one
might also proceed conversely or combine the variations.
point.

In the present case ri and n" will be regarded as given.

The Eqs. (3-72) (3-74) are not independent and we


use only (3-73) and (3-74) to extract the angles

Inserting (3-76a, b) into the left-hand sides of (3-73)

subtracting these

Eliminating
2(p'

and

(3-74)

and

two equations, we obtain

sin cp"

cos

shall actually

tp', q>".

q>"

n"(n'

from

n n g)

(n'

n"

2
)

{n

n tf ' 2

(3-77)

(3-73) or (3-74) leads to a quadratic equation for

with the double root

cos2<p'

(n'

n n g )(n'

n" )(n'

n g)

_1

('

2
n" )~

(3-78)

OPTICS OF THIN FILMS

138

If the resulting optical thicknesses are to

angles

q>',

must

q>"

be as small as possible, both

For

in the first quadrant.

lie

this it is sufficient,

but not

necessary, that
(' 2

(i)

" g)

("'

2
n" )'

>

(3-79)

simultaneously taking the plus sign in (3-77).


(ii)

and

(i)

inequalities for the refractive indices


' 2

They are
first

n',

n ng

(3-78)

<

must be

1.

leads to the following basic

(ii)

n" of this design:

n"

(3-80)

some high g
somewhat stronger

typically to be fulfilled in the infrared with

<

These conditions secure


than at

and

the right-hand sides of (3-77)

Combining the conditions

required, but

it

2q>', <p"

<

n/2 which

is

enables the following useful estimate to be

made: in the expression


q>")

The numerator

is

tan

(2q>'

because with the help

tan

<p") (1

tan

2<p'

x
tan (p")~

now known to be positive. So is


of (3-75) it may be shown to equal
-n") 2

('

(3-81) being thus positive,

of the three-layer

(tan 2<p'

is less

(n'

we may

2
n" )'

A"

is less

the denominator,

>

infer that the total phase thickness

than m/2, which

total optical thickness 2A'

(3-81)

is

than

equivalent to saying that the

Xj4,

which was the goal of the

design.

The authors present

the following example:

1/2.22 (ZnS)

1.4

(MgF 2 ) -

2.22 (ZnS)

0.428

0.131

0.428

4.0 (Ge)

x A

/4

to

00

30
Fig. 3-32

^v

io\

HO

90

60

ISO

p'

A symmetrical detuned three-layer antireflecting germanium


(after

Kard et

al).

IX)

BASIC DIELECTRIC DESIGN UNITS

The corresponding

139

curve (Fig. 3-32)

reflectivity

is

practically identical

with that of the single A/4 layer of ZnS. The present design
superior to the single layer. However, there

may

is

not optically

be a substantial technolo-

advantage in replacing a relatively thick A/4 layer in the infra-red

gical

may

with three thinner films of two materials. This

solve problems like

peeling due to unidirectional internal stress in the materials.

The authors
is

bandwidth defined by g > g where g


They obtain rather involved formulae

also analyse the

the reflectivity of the bare substrate.

which we

made by

refrain

from

stating because this a posteriori check can easily be

inspecting the final curve obtained with a computer.

The only thing the designer can do


and n" at the start.

in the

way of the bandwidth

to

is

try various ri

3.4.3

Some

further antireflection multilayers of the detuned

type

A tempting practical problem is to use only two well-behaved materials


to obtain broad-band antireflection. In contrast to the methods discussed
in 3.3 the design

must be made by variation of thicknesses.

minimum number

Experience shows that the


design

is

of layers for an effective

four and that the sequence of refractive indices should start with

the low index next to

air.

The sought design

is

therefore of the type

1(c!L)(c 2 H)(c3L)(c 4 H)G

By extending

his

method described

computer refinement, Thetford arrived


-2.1/1.52 in the tuning

2.12

0.334

in 3.4.2,

and combining

at the design 1/1.38

0.227. It

is

with

restated here in a slightly

different tuning of the third layer (c 3

1.47/2.22 which will be used in several

more examples.

0.4) to

it

2.1 1.38

fit

the index combination


(Fig. 3-33, curve

).

Another approach is to use the results of Sect. 2.6 and manipulate the
Argand diagram so as to yield zero or small reflectivity in at least three
vector configurations,

corresponding to three wavelengths,

A',

A",

A",

conveniently dispersed across the spectrum. Doing this with the above
given index pattern, one inevitably converges to the configuration

{A t
originally

pair

is

(thick);

due to Millendorfer,

shown

as

<2>

in Fig. 3-33.

A 2 A 3 A4
,

[32].

(very thin)}

K typical curve for the adopted index

OPTICS OF THIN FILMS

140

teo

i.

3
2
1:1.7

1 \

no

60

30

ao

fi*

ISO

.?

ao

^
/l

1.8

no p'
Fig. 3-33 (a) antireflection multilayers

H
CD

2.12

0.334

0.227,

on n g

1.52 using

two materials n L

1.47,

2.22 and corrected by detuning:

0.476 0.4 0.2, Q) 1 0.64 0.2 0.75 0.4 0.22,


1
detuned to produce achromatic antireflection:
1.74/1.52 withrelative tuning 1 0.5 : 2 1 curve @,
:

(b) three materials

1.74 2.08
_ _ 2.22 1.71/1.52 with

1/1.38
1/1.38

1.71

relative tuning 0.8

0.5

1curve

BASIC DIELECTRIC DESIGN UNITS

141

Manipulating the seven vectors of a six-layer in four properly spaced


wavelengths in the same way the author's laboratory was led to the design
represented-by curve (3) in Fig. 3-33a, with the tuning 1 0.64 0.2 0.75 :
:

0.4

0.22.

spectral widths of these designs

The

ratio of the wavelengths

between which

Ax

reflectivity is

indicated in the figure.

may

be characterized by the

X 2 (or phase angles

lower than

A width of

1.5 is

q> 2

q> t

for that matter)

%. These relative widths are


enough to cover the substantial

part of the spectrum.

The measured eye-matched

integral reflectivity of the designs

shown

between 0.5-0.7 %
bi-layer
is comparable with the integral performance of the simulated
described in 3.4.1. The importance of the extremely flat curves is in reducing
problems of tinted transmission where there are many coated surfaces in
tandem. Also, non-selective radiation detectors may call for broad-band
almost irrespectively of the actual band-width.

is

This

antireflection if

An

low integral

loss is to

be incurred.

objection to these designs could be that

very thin layers of different tuning, but this

is

it is

evaporate

difficult to

only true

when

relying

on

methods alone.

optical monitoring

Rational tuning in a four-layer using three materials was described


in Sect. 3.2.5. We present another case with three materials in a four-layer
combination, which was designed so as to have a simple detuning ratio
1

0.5

1,

[33]. Its

n4

is

characterized by the curve

An improved version is
= 1.71 and c = 0.8, curve .

obtained

3-33b.

performance

when

taking n 3

(3>

in Fig.

2.22, n 2

3.4.4 Beam-splitters corrected

by detuning

simple method of enlarging the reflection level of an alternating


stack (i.e. to achromatize the resulting reflector) is to build up the layers in a
sequence of staggered optical thicknesses. Heavens and Liddell, [34], analysed
the effectivenesss of this approach

on

high-reflectance mirrors.

As many

as 36 layers were used to obtain broad-band reflectors with relative spectral

more and extremely small ripple.


number of layers (having in mind
ripples as large as 5 %) one
admitting
mirrors
and
partially reflecting
neutral tint both in reflection
with
a
semireflectors
may obtain fairly good
and transmission.
widths

2.0 or

Trying the same principle on a small

OPTICS OF THIN FILMS

142

Thus, for example, the system

1/0.5H-0.7L-0.8H-1.1L-1.3H/1.52

=
=

nL
yields

92

<

a half-mirror

<

q>

152,

The deviation
is

oscillating

i.e.

2.22
1.47

between 44 and 54 percent in the interval

in a spectral interval

1.65 (curve

Fig. 3-34).

from the arithmetic progression of the c v


a correction ensuring a balance between the short-wave and long-wave
in the central layer

lobes of the central trough.

Another useful combination may be extracted from the paper

[35],

presenting designs obtained with the aid of an analog digital computer.

Taking the 2.35/1.38 index pair in the tuning


1/1.34H

0.97L

0.61H

0.98L

0.434H/G

one obtains the curve

As a

third

<2> in Fig. 3-34 oscillating between 42 and 46 percent.


example we present a detuned 7-layer obtained by the

iso

f'160

t?
50
iO

3050

60

70

80

SO

no

110

ISO

130 iff 140

by detuning: @
a seven-layer (for the designs see main

Fig. 3-34 Beam-splitters corrected

Q)

five layers,

text).

BASIC DIELECTRIC DESIGN UNITS

143

graphical method using the Argand diagram


The detuning is

1/H (0.5L)

with H

2.22, n L

1.47,

[36],

(1.27L) (1.45H) (1.47L) (1.7H)/G

ng

1.62 (curve G) Fig. 3-34).

more pay

Finally let us once

mentioned

attention to the achromatic cube-reflector

has too high a

in 3.2.5. It

as an approximation to g/r.

reflectivity for

a semireflector. Clapham,

introduced a detuning of the central period

LH

such that

its

The modified design 1/LH

optical thickness remained the same.

total

(0.67L)

(1.33H) L (2H)/G then oscillated about the value 50 percent. This reduction

of the reflection

level

in a tuned stack

was

by somewhat impairing the constructive interference


seems to be no general theory or

called spoiling. There

experience with the behaviour of this kind of detuning in various situations,

but this

is

tionone has to invent, even by trial


and store the succesful ones up one's
designers

life

sleeve for other occasions. Part of the

inevitably has to run this way.

3.4.5 Detuning as a

work described in this secand error, various ad hoc procedures

quite in conformity with the style of

means of

interpolating reflection levels

current practical requirement

of specified

reflectivity for

is

to

one wavelength

produce an interference mirror


(e.g. in laser light

experiments,

holography).

Taking the

partial results in

a discrete set of values


ant values

(see, for

is

3-3), in

n/2 yields

which some import-

inevitably led to detuning.

important practical requirement

maximum or minimum in

reached as a
it is

example, Table

<p

may be absent. Trying to interpolate these without having recourse

to further materials, one

An

a quarter-wave system at

only then that the value

Even with

sensitive to

is less

this restriction there are

because one essentially maps

e(<j)

...(c v _

that the given value q

is

a detuned-system curve

many

o((p),

be

because

production errors.

solutions to a given problem,

for systems like

H)(c v L)(c v _ 1 H)...

where most of the c v are unity, some

differ

from unity and one

c v is variable.

g(<p) corresponding to a variable c v displays a number of


If o(<p ) is a convenient maximum
different maxima q at different values <p
value, it is spectrally located by setting the unit optical thickness equal to

The

set

of curves

<jo

360" i X

(Sometimes a minimum

will

do

as well.)

OPTICS OF THIN FILMS

144

More

sets

of interpolating

maximum

values g((Po) are found by taking

further basic systems of different detuning.

Let us, for example, take some interference reflectors for the 10 fim
region supposing the use of germanium as the high-index material ( H
= 3.95) and ZnS (n L = 2.22) as the low-index material. The substrate

=
is

massive germanium.

The tuned system

1 ...

LHL Ge

the following set of levels

yields

(proceeding in the order of evaporation)

36

1.3

73

Values outside of

this

20.5

62

91

97... percent

sequence can be interpolated by the above

mentioned method.

Thus the 50

level

may be

<p

1(l.5H)(0.2L)Ge

q>

1(0.3H)(l.5L)Ge

<p

Coming

levels

we

find, for

Ge

cp

65 %: 1(1.5H) (0.5L)

Ge

<p

%r1(0.44H)LHL Ge

<p

must

to lower reflectivities one

22 %:

142.5

90

95

example,

by having very few quarterwave

It is

=
=
=

40 %: 1L[0.5 (HL)]

85

ference

by any of the following designs

Ge

1(0.19H) L

For further

realized

1H[0.25 (LHL)]

=
=
=

43
100

85

spoil the constructive inter-

layers, for

Ge

<p

example,

37.5

a simple matter to carry out interpolations of

this

kind with the

help of an automatic computer.

3.4.6

The

sloping edge

As examples of
interference

filters

rather unorthodox detuned designs

The point is to obtain a mild


between the low and high reflectivity

slope long

the interval

levels,

*)

present two

and
enough to span
say 10 and 90 %*.)

cut-off edges, [37].

like 1

we

exhibiting particularly low steepness in the cut-on

60%, then already the simple systems

If the reflectivity interval is small, e.g. 10

HLG,

HLHG

offer

moderate slopes.

BASIC DIELECTRIC DESIGN UNITS


First

we

145

whose phase diagram is shown


composed of 13 layers with indices H = 2.35, L
1.52 and having the following optical thicknesses:

describe the design

Fig. 3-35. It is

on

glass G

1/(1.24H) (2.49L) (1.15H) L (1.26H) 1.06(LH) (1.08L)

in the

1.38

(1.07L) (0.84H)

(1.14L)(0.39H)/G

The design has been obtained by automatic refinement of a manually


precorrected system, whose starting design

1/[2(HL)](0.5L)(HL) 5 (0.5H)/G

tOOr

30
Fig. 3-35

90

SO

13-layer detuned to display

150

120

180

an upward edge of mild slope

across a large range of reflectivities.

proved good only because


variation

on the

first

two

it

had

failed to serve a different goal.

1/(1.5H)(2L)(HL) 5 (0.5H)/G
with the reflection curve

simple

layers yielded

(3-82)

in Fig. 3-36. This already resembles a sloping

edge. Further variations were effected to straighten


in Fig. 3-35. This blunt statement

is

it

out to the state shown

the only methodic

comment

the author

can make here.


In the region 20
to a straight line.

<

<p

<

80 the design

The edge may extend over

is

a good approximation

the whole visible spectrum, the

transmission being a slowly increasing function of X.

OPTICS OF THIN FILMS

146

Having

this

This time

we

shall

happens to be

filter, one may develop the


where x(X) would be a slowly decreasing function.

kind of degenerate high pass

desire for a dual design

proceed methodically, trying to

We intuitively suppose the dual system to


other side of what
(p

make

the best of what

at hand.

have the sloping edge on the

of the stop-band in the Fig. 3-35 and choose


90 as a line of symmetry.

Further

we

is left

tentatively

in the present design

We

shall

and

now make

of the functions cos

choose

q>"

<p y ,

<p'

60 as the central working point

120 as that of the sought dual slope.

use of the symmetry and periodicity properties


sin

<p v

taking into consideration that

intervening in the interference matrices,

it is

essentially their absolute values obtained

through squaring and mutual multiplying that determine the energy coefficient.

To make

the reasoning

more

lucid,

of the imperfect but simpler design

we

shall set out to find the dual

(3-82), envisaging its

subsequent cor-

rection.

In the tuning (3-82), the working point 60 implies the following phase
angles in the system
1/90

120

60

30/G

These are visualized as the four vectors


@ in Fig. 3-37a.
The phase angle q>' = 60 in the unit layer of the first design (vector Q>)

30

60

Fig. 3-36 Starting design for the


starting design for the

upward slope
(J), the mirrored
downwards slope
@.

180

BASIC DIELECTRIC DESIGN UNITS

b Transposing the working angles between the upward and

Fig. 3-37a,

downward

is

by

slope designs.

definition transferred to the value <p"

dual design, vector


If

120 in the unit layer of the

<D' in Fig. 3-37b.

increasing, the absolute values of cos

<p' is

the same

manner

as

contributes in the
to a

147

downward

when

first

q>"

in the dual design

design to an

upward

is

<p'

and

sin

<p'

behave in

decreasing. Hence, if

q>'

should contribute

slope, <p"

slope in the dual design, provided that the other phase

angles are in their turn properly modified.

Obviously, to satisfy the same argument,


position

is

@'

is

to be transposed to the

Considering the phase angle of G)' as unity, the relative tuning of


120 = 1.25.

150

($>'

Analogously (D
270

(3>

at 150.

120

is

transposed to ', obtaining the relative thickness

2.25.

Finally @' will cooperate properly


The new system therefore reads

at

240 keeping

its

original tuning 2.

1/(2.25H) (2L) (HL) 5 (1.25H)/G

Curve

<2>

in Fig. 3-36 confirms the expectations:

we have obtained

a kind of mirror image of the original curve .

refinement process subsequently led to the design


1/(2.27H) (2L) H[0.87(LH)] (1.02L) [0.9(HL)]
[0.98(HL) 2 ](1.23H)/G

whose
*)

reflectance curve

The author

Messrs.

AGA,

program.

is

shown

(3-83)

in Fig. 3-38.*)

gratefully acknowledges the cooperation of Dr. Roland Jacobsson of


Sweden, who subjected the rough designs to refinement by his computer

OPTICS OF THIN FILMS

148

These sloping filters may serve as a basis for moderate colour conversion
or for the construction of all-dielectric variable beam-splitters. The latter
problem is discussed in [38], where a more sophisticated sloping edge of

exponential upward profile, based on the use of three materials,

is

also

presented.

SO

60

Fig. 3-38

120

The

13-layer

ISO

downward

1BC

210

slope.

3.5 Applications of periodic structures

3.5.1 Interference mirrors.

Low-pass and high-pass

filters

We

have already become acquainted with the basic properties of the


(Sect. 3.2.2 and 3.2.6). In a certain sense it may replace the metallic
stack
A/4
mirror: not only can its reflectivity attain values that are higher than the
best metallic reflections (e.g. 92
falls

short of 100

This property
mirrors

is

is
is

made with

for silver), but the value

by which

it

almost fully available in transmitted light.


typically exploited in laser resonators.

as large a

number

One of

the

of layers as technologically feasible

(e.g. 99.3 %). In the visible region


accomplished with a layer number not substantially in excess
of 20. Adding more layers would only increase scattered light with no
mark.
measurable convergence to the 100

to attain a reflectivity greater than 99


this is usually

The other end of the resonator is provided with a slightly less reflecting
mirror, the transparency of which depends on the type of generation inside

>
BASIC DIELECTRIC DESIGN UNITS

149

the resonator. Anything between one and three, or possibly a

percent

may be

required.

The

Great technological care

layer
is

number then goes down

little

more

to 15 or so.*)

required to keep scattering losses (equival-

ent to absorption) below 0.5 %. (See also 5.5.2 and 12.2.)


Since a laser usually generates light at one wavelength at a time, these
interference mirrors are exploited only in a very

narrow part of their stop-

bands.
If the interference mirror

is

called

upon

to replace metallic reflection

over a broader spectral interval, such as the visible region,

width

will

become evident

its

limited band-

in that the reflected light is not exactly neutral,

at least not in series production. Slight yellow or greenish-blue tints are

a frequent occurrence, which degrades the mirror in visual use.

By means of
width of the high
6

15

and

are 10

ities

These

A'

and

the formula (3-31) one can easily compute the relative

For the 2.35/1.38 index pair it yields


For the pair 2.22/1.47 the analogous quant-

reflectivity region.

A"

1.27.

1.4.

relative intervals are not sufficient to cover

more than the central


mind that with

part of the visible spectrum. In addition, one must bear in

numbers of layers the reflecting curves have a convex shape only


partly filling up the theoretical stop-band. This only increases the sensitivity
finite

to tint.

An

expedient from this situation

different tuning deposited

or

less

overlap or they

may be

when

to use

two quarterwave stacks of

contiguous.

In certain kinds of illumination

incoherent coupling

is

onto the same substrate. The stop-bands more

it is

conceivable to think in terms of

the two stacks are deposited onto the opposite

An optically superior solution, free from double images,


two stacks successively onto one face of the substrate.
The coupling between the stack is then coherent and one may wonder
what will be the effect of the two superposed interferences depicted in
Fig. 3-39. Invoking a theorem due to Lord Rayleigh (see also 7.1) that a
thin film on a perfect mirror does not exhibit interferences, one may conclude
that the subsidiary ripple of each component mirror will interact with the
high-reflectivity zone of the other mirror. The chances of unwanted ripple
in the enlarged stopband will be the smaller the more perfect mirrors the
component stacks are. A sufficiently high layer-number should remedy
faces of a substrate.
is

to deposit the

the situation.

*)

We

About

have the

ten layers in each stack are the necessary

visible applications

such as with

HeNe

lasers in

mind.

minimum

V
OPTICS OF THIN FILMS

150

in

the visible

90

spectrum to secure a

than

less

ripple

on the

level.

The enlargement of

maximum when

the stop-band will be

the partial

stop-bands are brought into contact. Let us for simplicity consider two

even alternating stacks


Cl (HL)

where c t and

c 2 (HL)

k>

c 2 represent their relative tuning for the q(<p)

question as to which of these will be deposited


left

diagram. (The

for the

first is

moment

open.)

To make two

stacks of this kind contiguous

we may proceed in various,

though equivalent, ways.

Take

for example c t

If 90

stopband
(90

e)

limits
:

c2

is

and

>

c2

1.

the stop-band in the basic tuning with c x

of the second stack

will

with the centre lying to the

at 90

left

c2

Contact between the stop-bands will be


the c 2 -block will reach the value 90 s.
This establishes for the detuning the condition

Conversely,
shift to the right

90

e.

is

90

90

-s

the

the right end of

were supposed to be less than unity its stack would


of the basic stack and (90 - e): c 2 would have to equal

if c 2

This yields
c,

which

1,

secured, if

c,

obviously occur at the values

90

-e

90

the inverse of the above value.

"1
1

c,>1>ct

WfcA/ita JbO&tew
o

(90-t)
Fig. 3-39

c,

Two

90

(me)

c,

contiguous stacks.

f* no

y
BASIC DIELECTRIC DESIGN UNITS

For reasons of symmetry we

151

shall agree to distribute the

between both stacks in such a way as to make


(It is in this

way

Assuming

that Fig. 3-39

90

which

>

90

-a =

+ _L.,

c2

we

require

9q0

latter

expression

is

= l-

c2

'

90

90

'

width

is

90

+
-

the relative width of the basic stack.

e)

c t to (90

e)

c2

therefore

90

= (jEt\ ^

ci

90

Two

90

>

c2

The enlarged stop-band extends from (90


Its relative

the

>

yields

The

detuning
90 the point of contact.

drawn.)

is

above stated stacks c t

in the

<p

\cj

/90

^90

+ e\ 2
- a)

contigunous stacks have a relative width which

is

the square of

component width.
If A is the central wavelength

achieved,

we then

deposit c t

of a region where high

A/4 and c 2

Their order in the actual design

is

reflectivity is to

be

A/4 stacks.

a free option. If k t and k 2 are

sufficiently large
1/ Cl (HL)

k'

1/c 2 (HL)

k2

c 2 (HL) '/G

and
Cl (HL)

k2

/G

good in the stop-band. In fact, even the dual designs with H


an L interchanged could be considered.
However, if the layer number has to be kept on an economic level,
one of the options may prove better. Individual corrections inside the stacks
are equally

may

then improve residual ripple or at least

shift it to regions

of

less

im-

portance.

From a more general point of view it is evident that k t and k 2 need


not be exactly equal and that the parity of the two stacks need not be the
same. These circumstances represent manoeuvring space for the designer.

We
shall

shall come back to broad-band reflectors a little later, when we


have explained the concept of low-pass and high-pass filters. The

common designation

for these

is

edge filters.

OPTICS OF THIN FILMS

152

Idealized curves of these types are

shown

in the Fig.

Since

3-40.

nothing but essentially quarter-wave stacks are available to produce regions


of high reflectivity, it is evident that the prototype curves cannot be fully
realized. Referring to the Fig. 3-8, the high reflectivity region

simple case at a
transmission this

maximum
is

high

niters

may

in this

working in

the rejection zone, for the dual use in reflected light

the admission zone.

we proceed to

equal one stop-band. For

The zone of contrary

effect

it is

now depends on whether

higher or lower wavelengths as referred to the position of the

reflectivity zone.

-r

or

sptctra/

sptctra/

variobk

rariablt

Fig. 3-40 Prototype curves for high-pass

and low-pass

filters.

Going to lower wavelengths and considering the transmission filter,


the admission zone extends from 90 + e to 270 - s. The dividing line
between rejection and admission lies at 90 + e and is referred to as the
cut-on edge for the lower wavelengths or, alternatively, as the cut-off edge
for the higher wavelengths, whichever of the regions
It is to

be noted that

all

is

used for reference.

when the indeMost of our graphs

these definitions are inverted

is the wave number or the frequency.


shown as functions of the phase angle q> which is proportional to the
latter two quantities. However, our terminology will be based on the envisag-

pendent variable
are

ed transformation of these curves into spectral diagrams with 1 as the independent variable.

The secondary maxima of the orthodox quarterwave stack shown in


Fig. 3-8 would of course seriously impair the function in a real admission
zone a smooth transmission curve on a high level. Outer extensions of odd
alternations

by A/8 low-index

layers are a well-known expedient

A full theory of these extensions is given in Sect. 6.3.


A typical use of a thus corrected transmission

low-pass

a design
k

1/(0.5L)

(HL) H/G

3,4 or

more

from

this.

filter

with

/
BASIC DIELECTRIC DESIGN UNITS

153

where the cut-off edge between visible light and


the adjacent heat radiation is placed somewhere about 7000 A. The rejection
zone extends from 0.7 to 1.1 \an and thus covers the near infra-red region,
which is critical for heat protection with most practical light sources.

is

the heat-reflecting

Nonetheless

filter,

it is finite

and the

sense of the word, because

it

filter is

of the low-pass type only in the limited

actually passes radiation

300

above

TOO

1.1

/im as well.

Anm BOO

%*10 3 cm

Fig. 3-41 Dichroic mirror reflecting the red light. Experimental curve,

45 incidence.

On the other hand it starts to reject at about one third of the wavelengths
contained in the 0.7
<p

1.1

fim region, because the other stop-band at

270 of the periodic phase diagram

q(<p)

now comes

into operation.

This ultraviolet rejection band (with dubious properties with respect to


dispersion and absorption of

many orthodox

"visible" materials there)

of no importance for the given application and we


definition that the

is

may accept a compromise

is a low-pass filter for the visible and


hand there may be other applications
cells from longer- wavelength radiation,

above stated design

near infrared regions.

On

the other

such as the protection of solar

with an extremely long pass-band extending into the ultraviolet. This required

V
OPTICS OF THIN FILMS

154

the design of special stacks with


as described by Thelen,

Placing the
periods

HL

filter

some higher-order

central

maxima

missing,

[39].

edge of the same design (but perhaps with more

to increase edge steepness) at a value around 5850 A, one

obtains the red-reflecting element of the family of dichroic (i.e. colourdividing) filters. It is normally produced in 45 incidence matching, Fig, 3-41.
It reflects

the red part of the spectrum at a right angle to the optical axis

and transmits the green and blue

parts along the optical axis, Fig. 3-42.


obvious that in this instance the finite widths of the pass and stop-bands
are not felt to be a limitation at all.
It is

rmf

wNteHghf

Mm rtfkdor

rtd rtfkctor
'

Fig. 3-42. Schematic

"

mirror)

(metallic

diagram of a colour-dividing

set

of dichroic mirrors.

Returning to the basic stop-band in the Fig. 3-8 and proceeding to


higher wavelengths without limitation, one runs through the phase angles
from 90 + e down to zero.

In transmitted light the design


infinitely

may

thus serve as a cut-on

filter

for

an

long pass-band of wavelengths, the rejection zone remaining

confined to the stop-band of the stack. Again (see Sect. 6.3) outer extensions
are needed to flatten out the transmission in the pass-band. This time

the A/8 layers of the high-index material added

on both

sides

it is

which cause

the desired effect.

Thus the

blue-reflection dichroic mirror


k

1/(0.5H)(LH) L(0.5H)/G

may have
k

a design

6 or more

with the edge located at about 4850 A.


Placing such a
red-reflecting

filter,

and

filter (Fig.

3-43) in tandem,

we obtain

the second element in the color dividing

in parallel, with the

system shown schematically*) in Fig. 3-42.


*)

Additional correcting

the energy distribution

filters

among

are as a rule inserted behind each reflection to improve

the three channels in accordance with the requirements

of true colour rendition. These are not shown in the figure.

BASIC DIELECTRIC DESIGN UNITS

155

The green light behind the two elements is evidently the result of the
two superposed pass-bands. By means of two dichroic interference reflectors
it is therefore possible to split up white light into its three basic components.
it
Colour television cameras are the most important users of this system.
A number of variations are possible, including the use of prism systems.
One of the critical problems is the dependence of the edges on the working
angle of incidence in the various zones of the mirrors,

oo

600

500

[40].

700 A/im

80

TV.

90
80

m
so

50

>

30

20

10

20

22

Unto3 cm 1

IS

Fig. 3-43. Dichroic mirror reflecting the blue light. Experimental curve,

45 incidence.

Independently of
reflection filtering.

this,

green light can be produced directly by a single

Although being too narrow for a neutrally white mirror,


is not narrow enough to serve as a reflector over the

the simple A/4 stack

width 800 1000


of

of green

light.

Recourse

is

had to higher odd multiples

A/4.

If all the layers

of the stack are 3 A/4, the mirror works over the relative

+ e) which
ed above with the central value 90
width (270

s)

(270

istic

values for the

is

definitely less than the results obtain-

1.12 and
two index combinations.)
.

(1

1.08 are

now character-

OPTICS OF THIN FILMS

156

Intermediate widths can be obtained by choosing only part of

th^

layers as 3 A/4.

Advanced designs of such narrow-band

reflectors serving to reject

limited protions of the spectrum by normal-incidence filtering (so called

minus

filters) provide for the suppression of secondary ripple on both sides


of the stop-band, [43, 44]. Their systematic use in the design of unorthodox

spectral filtering curves by incoherent coupling of several such filters in


tandem is described in references [4, 5], Ch. 11.*)
The blue, green and red dichroic reflectors, when used singly in normal
incidence, form a set of subtractive colour niters, each eliminating one of the

basic colours of the spectrum.

subtractive set

'

400

500

600

700400

500

600

700400

500

700

600

additive set

Ired
i

400

TOO

^'

>

600

700400

500

600

700400

500

600

Fig. 3-44 Transmission characteristics for a subtractive

of colour

700

and an additive

set

filters.

The dual set of additive niters must yield curves which are obtained
by exchanging the rejection and admission zones, still counting transmitted
light.

The pattern curves are shown in Fig. 3-44.


The green filter is of the broad-band type.

in the

*)

form of a multiple-half-wave interference

It is

It

may

be produced either

filter (to

be described in a

important to note the following: for a given edge-filter design matched for 45

incidence the steepness of the edge for unpolarized light

is to a certain degree less than


due to the narrowing of the stopband for the
p-component, as observable in Fig. 3-14 and to the subsequent averaging of the s- and
p-edges. This cannot be effectively counteracted by simply increasing the layer numbers.
The paper [60] is concerned with this problem.
is

attainable in

normal incidence. This

is

BASIC DIELECTRIC DESIGN UNITS

157

subsequent section) or as an incoherent superposition of two edge-filters


evaporated onto the opposite sides of a glass support.

The red and blue mirror

may

be used for

this,

designs of the above discussed dichroic set

provided that the two edges are adequately shifted


(More design work would be needed

in the proper directions. (Fig. 3-45).


to perform the

same thing with coherent coupling, when both systems are

evaporated onto the same

side, [41]).

SW Knm

It.

Fig. 3-45

Broad-band
filters.

800

M3 ah-'

filter formed by incoherent coupling of two edge


Experimental curve, normal incidence.

The blue additive filter calls for an interference reflector with an enlarged
stop-band covering the green and red regions, corrected so as to have a flat
transmission curve in the short-wavelength pass-band.
Conversely, the red additive

filter

requires a

broadband

reflector

with

a smooth long-wavelength pass-band.

As mentioned above, a method for enlarging the stop-band is to use


two contiguous stacks. In the present case we have the additional problem
that the short-wave or the long-wave pass-bands of the combined system
must be corrected for secondary maxima. One therefore combines simple

OPTICS OF THIN FILMS

158

periodic structures such as described above in reference to the red

and blue

dichroic reflectors, which allow of an explicit correction in either of the


side-bands. There

is

a chance that two corrected side-bands

will

combine

into one corrected side-band of the enlarged stack. Problems associated

with the combination of such structures are thoroughly discussed in


Practical examples of these systems are

shown

in the Figures 3-46

and

7110/Um

Fig. 3-46

tOO

A low-pass filter with extended rejection band acting as additive


blue

filter.

Experimental curve, 45 incidence.

If the red additive filter


its

[42].

3-47.

of

this corrected type is shifted to the right so

cut-on edge for red light becomes a cut-off edge for the infrared,

obtain a prototype of what


reflection filter
visible light,

it

but

is

behaves as a

silver

or aluminium mirror as regards the

rejects the entire infrared

dielectric, it transmits the

we

commercially dubbed a cold mirror. Used as a

by

non-reflection. Being all-

heat radiation onto the opposite side of the protect-

it is dissipated in the lamp house.


number of projecting and other systems are nowadays heat-protected
in this way. The amount of heat stress is lowered by about 50 % (considering
that the wanted light also contributes by its share of energy). The credit
for the idea of the cold mirror based on interference goes to H. Schroeder
[45], and A. F. Turner [46], with a number of other subsequent contributions
of technical and theoretical nature.

ed space with the optical elements, where

BASIC DIELECTRIC DESIGN UNITS

159

700

Off

Aim

too

* K> 3 on'
Fig. 3-47

A high-pass filter with extended rejection


red

3.5.2

The

filter.

band acting as additive

Experimental curve, 45 incidence.

single-half-wave monochromatic

filter

Let us consider the periodic structures

G...LH(LL)H L...G
G...

HL(HH)LH...G

These are A/2 layers of high or low refractive index embedded between
whose phase angles will be denoted by ^ R These

alternating A/4 layers

A/4-stacks act as interference mirrors over the interval of their stop-bands,


hence the A/2 layers are essentially working in the conditions analysed in
3.2.4 and should display sharp transmission peaks. It is immaterial whether

the reflectors consist of an even or

are identical, the transmissivity at

Denoting the transfer


<Jq exp

(jS) (the latter seen

function

is

coefficients

2q> R is the

+e 2

layers.

Provided they

nj2 equals 100 percent.

of the component reflectors'as

t,

inside of the A/2 layer), the transmission

by (2-29b)

J.
<p s

<p R

from the

&=
where

odd number of

-2ecos(2<ps -2S)

phase angle in the spacer

layer.

OPTICS OF THIN FILMS

160

Since q

may be

the formula

1,

$=

put into the form*)

1
1

+^sin

$F

2
((p s

4o

-S)

(i-e)

(3-85)

where the coefficient #" determines the sharpness of the transmission peak
[compare (3-13, 14)].
The composite transmission 3~ assumes a maximum of 100 percent
whenever

q> s

0,

2ic.

it,

(HH)

If the spacer layer is

8=0, for (LL) this is


at q> s = In, I integer.

Obviously the points

which are not of

(p R

7i

it,

accomodate 100 percent maxima

2it

We

do not act as
must therefore discard the even multiples

in the condition for

^s

The 100 percent peaks must be expected


q> s

i.e.

as

maxima occur

interest for us, because the outer systems

reflectors in these conditions.

of

the adjacent reflectors have a phase shift

equal to n. In any case, therefore, the

2<j R

at

= odd multiple of

at the centres of the stop-bands

y.-j-

it

f the embeddin S

was to be expected from the general layout.


In studying the profile of the peak in the immediate

reflectors,

vicinity

of the

point <p R
7c/2, we develop the sine in eq. (3-85) as a function of (p R ,
also considering the dependence of 3 on <p R This is a strongly changing but
.

linear function (see Fig. 3-14), so

= or
= m 2<p K

.[q> K

"fj*

*-(d<p R ,L/2

n and S is normally a negative number. Further let us


where m is the order of the filter (number of J./2 thicktake cp s
nesses in the spacer layer) and denote <p R rc/2 = A<p.
Then (with / odd)
where S

sin (9 S

8)

sin

(lit)

cos

(/it)

(2m

A<p

= -{2m -

A<p

r=
1

+ 3F(2m -

2
)

(Aq>)

*)
Trying to make this analysis self-consistent we inevitably repeat some of the steps
undertaken in 3.1.4 with the single layer. A similar excuse is offered to the reader for
Sect. 7.1.3 when the object of analysis is a metallic FabryPerot type filter.

BASIC DIELECTRIC DESIGN UNITS

The form of

the peak

terms of the function


values at which &~ =

a sharp parabola. Defining the half-width in

is

as

^"((?> R )

Wv

<p'

<p'

R,

where

<p'

<

q> R

are the

we obtain

1/2,

Wv =
filter

161

2m

-i-Z-?-

-8

(3-86)

y/j

The sharpness of the peak therefore increases with the order of the
and is additionally supported by the negative slope of the phase disper-

sion 6(q> R ) in the vicinity of

This

is

<p R

by no means a

ji/2.

negligible effect. E.g. in a

7-

based on ZnS and MgF 2 the first-order half-width without dispersion


would amount to just over 100 A, while the actual value is 50 A. For higher
filter

orders

this effect is less

pronounced.

Extremely high phase dispersion


mission maxima. These can occur
higher multiples of

may

when

also bring about spurious trans-

8(<p R )

changes by at least jc or

within the stop-hand region of the reflectors. This

it

change then prevails over the moderate detuning of <p s

2mcp R and another

fringe appears.

This is never the case with strictly tuned reflectors, but the effect has
been observed and interpreted in the mentioned way by Baumeister and

was embedded between irregularly detuned


whose phase dispersion happened to be about 15 times

Stone, [47]. Their spacer layer

broadband

reflectors

greater than

usual with orthodox A/4 stacks.

is

Conversely, by designing reflectors with a positive slope of the

8((p R )
curve, one could push the single-half-wave system to the broad-band type

of

filter.

A
filter is

This possibility
typical

is

mentioned in

[48].

transmission curve for an all-dielectric monochromatic

seen in Fig. 3-48.

width of the reflectors


with the metallic

is

filters

to handle this situation.


glass filters, recourse

is

The

loss

of suppression due to the limited band-

a typical shortcoming of these

of the same type.

Owing
had to

More

filters

blocking

to a certain shortage

as

filters

among

compared

are needed

the absorption

interference blocking filters (edge or broad-

band), with correspondingly increased cost for the complete system.

Like

all

interference

monochromatic

systems, the

filter is liable

ADI

(all-dielectric interference)

to obliquity effects

and

to problems of light

collimation, [49], [50].

*)

For a

9 and fVx see Problem 3-11.

relationship between fV

OPTICS OF THIN FILMS

162

Spurious absorption due to scattering and other effects, as well as


due to manufacture, cause the theoretically predicted
fall
to values between 60 and 80 percent, depending on the
maximum to
errors of symetry

materials

and technology. The

of weak absorption in

effect

dielectric

systems will be studied in Sect. 12.2.

Further aspects of the single-half-wave (SHW) monochromator will be


discussed in connection with the metallic Fabry-Perot type filter (Sect. 7.1.3).
Also, references [32-34] in Ch. 12 are

y.

drawn

to readers'" attention

now.

WO]

<9

90

60

/>

Fig. 3-48 Transmission curve

LH) 7 G
G (HL) 7 H (LL) H O-H)

Fix) of an

(a)

ADI

single-half-wave

filter

overall shape, (b)


(b; detailed study of the

peak for the two lowest orders.

3.5.3

The double-half-wave monochromatic

The transmission of the Fabry-Perot type


exhibiting impressive sharpness,

still

rl

interference

filter,

although

leaves something to be desired as

nominal wavelength. In fact,


causes half of the total energy to be trans-

regards the energy efficiency of the

the parabolic shape of the line

filter

filter

at the

ri

o)

b)

Fig. 3-49 Defining the square-topped

transmission curve: (a)


(b)

physically

ideal,

realizable.

BASIC DIELECTRIC DESIGN UNITS

163

mitted outside the half-width. The proper shape for an efficient


monochromatic filter should be rectangular, as ideally shown in Fig.
3-49a. This
pattern is physically approximated by a curve of the type shown in
Fig. 3-49b.
We then speak of square-topped filters. The optical means of obtaining
transmission curves of this kind

type

is

to extend the concept of the Fabry-Perot

and use two spacer layers instead of one, adding a further


as well. For reasons of symmetry we then have a pattern

filter

reflector

GRYmAWmi-W
where

R',

R" stand for reflecting systems and

This pattern

is

called the double-half-wave

is

the order of the

(DHW-)

filter.

commercial designation

is resonance interference filter,


parallel-edged transmission curve with a little through on
the resonance curve of two coupled oscillating systems.
sense the transmission peak of a single-half-wave filter is

An

[51],

filter.

alternate

because

its

the top resembles

However, in

this

nothing else than

the resonance curve of a single oscillating system, so the above


mentioned
is actually not very fitting.

term

The

Our

reflectors R', R"

present goal

is

may

again be regarded as metallic or dielectric.

to discuss the

The reflectors then

ADI

are A/4 layers

filter.

and the design of the

filter

must go by

the following scheme

GHLH

...

LH(LL)

HLH

...

H(LL)

HLH

...

LHG

(3-87)

or by analogous schemes to be discussed subsequently.


The idea of these (and of the multiple-half-wave, see below) filters goes
back to A. F. Turner (1952), possibly also to Ch. Dufour, [52], where
metallic

DHW

are concerned.
design theory for all-dielectric
filters was
published in 1958 by S. D. Smith, [53], using what was later
called
the split-filter technique (compare Sect. 2.6.1). The paper
was aimed at
filters

first

infrared applications where the high refractive index of


germanium film
offers the possibility of obtaining high reflections in the R',
R" with few
layers. The ir designs cannot be simply imitated in the
visible region. This
lead, in 1963, the author

Fig. 3-50

A DHW-filter pattern.

of the present book to a new approach to this

OPTICS OF THIN FILMS

J64

problem, described in sources of lower circulation, [54], [55]. We therefore


filters at full length.
present this theory of
combination according to Fig. 3-50.
Let us consider a cemented
phase
respective reflector systems will be denoted as I, II, III, the

DHW

DHW

The

angles in the

two

layers as

<p

2JLT

(normal incidence considered

only).

Carrying out recursion from the

left,

the formulae of multiple refactions

yield

*ir*iir*hir

(3-88)

We

now

shall

write out in full the amplitude coefficients, respecting


reflector R"
filter and in particular that of the central

the symmetry of the


r IL

Vtf' e

r HlR

ja '

r IIR

l^Y

r IIL

'""

V(?" e"

= V?C ""

-i^y
n s stands for the

refractive index of the spacer layers.

common

The system being dielectric, the bracketed expression in the denominator


of (3-88)

& +
sr

p"

is

Eq. 6-44). Denoting 8' + S" - 2</> =


v, the composite transmission is given by the formula

equal to exp

2<p

2j3' (see

u,

t'V

=
1

'2

4q'q"

4(1

q') sIq'q"

further simplification

is

cos u

2q' cos 2r

4q' \/q'q" cos (2r

possible here due to a theorem

on

u)

dielectric

layers stating that generally

2d

SK

-n

(The corresponding proof is to be found in Sect. 6.2).


Since we have R = S'i = 5', we may write 2d" - S"
2v

2v

2h

= k +

*" and

BASIC DIELECTRIC DESIGN UNITS

With

formula assumes the

this the

iT

final

form

t'V

=
1

As

165

4q'q"

4(1

in the case of the simple

_=

(3-89)

q') s/q'q^cos

filter,

ii

the quantities

2g' cos 2

t', x", q',

may

g"

regarded as constants in a certain vicinity of the cental point and

&

be
is

a function of u only.

To

investigate the extremes of

y (w)

derivative of the denominator, D(),

4(1

it is

sufficient to concentrate

on the

which equals

e')vVe"sin

4e'sin2

dii

It will

be zero in two cases:


sin

cos (8'

The
if

first

=> 2<p

8"

8'

2q>)

8"

i- ^-*1

condition always has a solution.

the combination

fails

bottom of a through

if

In,

(1

It

filter is

(3-90a)

+ g')

(3-90b)

defines the top of a peak,

to produce a rectangular

the

integer

maximum, or

it is

the

of the square-top type. In other words,

(3-90a) defines the inevitable extremes at the cardinal points of a tuned


multilayer.

This will become clear

if

we

spacer layers are (LL) and 8'

if the

take into consideration, that 8' = 8" = n


= 8" = if they are (HH), (see discussion

of the sign of the reflection coefficient in Fig. 3-14).


In any case, the condition (3-90a) eventually
is

known

to be

The independent

(3-90a)

is fulfilled

by

(p

is

sin 2q>

of

Since

0.

assuming the values

mit.

variable in the phase diagram of the pattern (3-87)

should of course be referred to the phase angles of the

These are equal to

q>

layers.

so the central extreme by (3-90a) occurs at a value

this variable, as expected.

DHW

HLH

For convenience we

shall treat the reflectors

and the complete


system in terms of the phase angle x = AnX' 1 A R ,
where A R is the reflector optical thickness. For a first-order filter A s = 2A R
and x = <p.

OPTICS OF THIN FILMS

166

The value of the

central extreme can be

found by the method of suc-

cesive elimination of -^- layers as they appear in the system starting with

the spacer layers (see 3.2.4). Obviously there must be a certain balance

between the layer numbers in the outer


kind of symmetry involved in a
this simplest

and 15

system to be

reflectors

DHW system with

GHG

and that of the inner

be the simplest system possible. The

reflectors for the irreducible rest to

GLG. The

or

three reflectors implies


residual reflectivities 1.2

percent, respectively, determine the depths of the possible troughs

in transmission.

Now,

clear

it is

by inspection that the following systems reduce to

GLG:
scheme
of reflectors

0-1-0

G(HH)L(HH)G
GH(LL) HLH(LL)

1-3-1

HG

2-5-2
3-7-3
4-9-4

GHL(HH) LHLHL(HH) LHG


GHLH(LL) HLHLHLH(LL) HLHG

GHLHL(HH) LHLHLHLHL(HH) LHLHG

We

shall

Further,
if

denote these combinations as


it is

GLG 373

clear that the remaining reflectivity will

the above systems are outer-extended by an

layer

etc.

remain unchanged

on each end,

e.g.

GLHL(HH) LHLHL(HH) LHLG

G 35-3.
H in all the above combinations we obtain dual sets

This system will be denoted by G(3L)

Exchanging

which reduce to

for

GHG,

or possibly to G(3H) G. Thus

GHG

1-3-1

= GLHHLHLHHLG

G(3H)G 2-3-2= GHLHHLHLHHLHG


The
will help

possibility

first

place

This occurs

when

In the
all.

of using either a

extreme

GXG

is

G3XG

system

it is

clear that (3-90b)

the right

hand

side

need not have a real solution at


greater than unity.

a real solution, the central extreme should be a

the vicinity of which there appear two


present.

is

The

central

then a peak.

If there is

is

or an extended

us in finding solutions of the second extremal condition (3-90b).

maxima a

minimum in

through-like square top

BASIC DIELECTRIC DESIGN UNITS

167

In order to see this more exactly,

&r

D2

da

dV

dD

x'x"

'

In the point u

= mln

(<p

us compute

- ,2 -" Va2

~&[2"-ffi\

let

dD

dV

we

where ^

mri)

eventually have

t'V d 2 D

<.-.

(3 - 9,)

with

d 2
If the right-hand side

negative

and

(3-91)

minimum of 9~
Conversely,

at

if

q>

e ')vV<?"

of (3-90b)

(3-92)

smaller than unity, then (3-92)

is

is

This confirms the existence of a trough with

positive.

is

4(1

mn.

no

(3-90b) has

solution, (3-91) is negative thus signifying

a peak.

When

solving (3-90b) for

one must also consider that

q>

functions of x. In fact, this dependence

but for our purposes

it

is

may be approximated by

S'

and S" are

very strong in the vicinity of x

7t,

a linear relationship

Ax

where

-;
rflX

^o

at

it

and

Ax = X

7t

Denoting the right-hand side of (3-90b) by Q, we


cos

0o +

81

(d'

d'o)

Ax -

In view of the particular values of S'

S'^

2(rc

may

Ax)]

write

= Q

mentioned above

this

equation

has a solution

Ax

arccos

=
2

The solution of

So

(3-93)

So

(3-93) therefore requires

knowledge of the phase

dispersions dSjdx at the central extreme. Although there exist explicit

formulae for the computation of these as far as tuned multilayers are

OPTICS OF THIN FILMS

168

concerned (see

9.6),

obtained from

in the present analysis they were

numerical calculations for the 5(x) functions of the two types of reflectors
involved in the

filter.

The same

applies to the values

q" at

q',

x =

it

inter-

vening in Q.

We have already sorted out

some convenient layer combinations securx = n. These combinations must

ing the simplest possible residual system at

now be

scrutinized in view of the condition (3-90b), the goal being

Taking the definition of

Q we may
2
4fl g'

0+e')

Q <

express

= %')

1,-7-1/
0.9

63LG
0.8

G3H6

07 *~GLG252
a 6H6 2S2
6
q
5 1-GHG373
OA

02

Fig. 3-51 Graphical solution of the condition for

a through-like peak.

This function
Fig. 3-51.

We now

is

graphically displayed

numerically for the potential

Those points which

It

lie

DHW

below the curve labelled as

turns out that all the

in

Q =

evidently yield

for the index combination


sensitive to small deviations

GLG and GHG combinations must be discarded,


above the curve

combinations of the G(3L) G, G(3H)

points from both groups are

We now
will

values.)

their characteristic points lying


all

Og QJ

computed
combinations evolved on p. 166.

Q < 1, thus securing a trough. (We specify


H = 2.3 and n L = 1.36, but the results are not
from these

for various

insert into this figurethe set of points (q", q') as

come

shown

Q =

On

the other

hand

type are good. (Only few typical

in the figure 3-51.)

to the computation of the

filter

widths. Although these

be somewhat larger than the spacing of the subsidiary maxima, we

BASIC DIELECTRIC DESIGN UNITS

169

Table 3-9

Some

design parameters of square-topped

G3LG

b'

232
353
7_4
4
595

0.549
0.857
1.076
1.222

1.025
1.297
1.412
1.444

G3HG

8'

d"

232
353
474
595

0.588
0.884
1.094
1.223

1.025
1.297
1.404
1.444

6"

DHW

filters.

2 d' 8"

Ax

Ax/180

3.575

0.952

4.995

4.154

0.983

2.543

4.487

0.994

1.393

4.667

0.998

0.794

5.55%
2.85%
4.55%
0.88%

26' d"

Ax"

Ax/m

9.10%
4.71%
2.58%
1.48%

3.614

0.870

8.173

4.181

0.953

4.221

4.499

0.983

2.328

4.667

0.994

1.333

2-3-1

90

ISO

ISO

180

210

2W

k'STO

10

Fig. 3-52 (a) Transmission curves 3~(x) for the

120

ISO

180

210

22S

jc'

270

G 3L G and (b) G 3H G DHW niters

with a square top.

OPTICS OF THIN FILMS

170

confine ourselves to the

latter,

evaluating (3-93) with the numerically de-

termined values of the phase dispersions.

The

summarized in Table 3-9. All the angles and their


computed from finite differences of 5 for x = 180 and
In the last column the relative width is shown as a percentage of the
results are

derivatives were
172,5.

central wavelength.

The final check is made by computing &~(x) diagrams for the two sets
of solutions. These are shown in Figure 3-52 in the interval 135 < x <

<

225 approximately. Outside of this interval transmission side-bands

occur for the same reason as with the single-half-wave

The systems G(3H) G, although reduced


layers,

have a

significant

filters

filter.

minimum of non-latent

trough of 15 percent which

demonstration purposes when studying these

G(3L)

to a

is

quite

welcome

for

experimentally, but the

G systems must be preferred in practical use.

The

layer combination 2-3-2 has

and must be discarded


ceptable set of

DHW

filters

G(3L)
where v

3, 4, 5

poor monochromaticity and blocking


As a final result we have as an ac-

in both types.

(v)

has so far been

(2v

verified.

1)

For A

(3-94)

(v)

5500

tions should have first-order band- widths about 300, 100

A these combinaand 50 A, respect-

ively.

The scheme (3-94)

retains its validity even for larger v and, for example,

the 6-11-6, 7-13-17 combinations

may be checked on

the computer to be of

the square-top type as well.

100

179

180

181

182

38
06

\r&

7^\

too

38
[06

Fig. 3-53

6-11-6

A tolerance study on a G3LG

filter

concerning errors in the spacer

layers. Relative spacer thicknesses:

2.01 2.01, 2.02 2.02,


@) 2.02 1.98.
2.01
(2)

1.99,

BASIC DIELECTRIC DESIGN UNITS

171

DHW

filters can be manufactured with the inevitable limitation by


The
spurious absorption, which reduces the ^"max values. It can be shown,

DHW

however [56], that a given degree of absorption causes less damage to a


than to a SHW filter. Production errors may also cause a decrease of ^"max
and some asymmetry between the side peaks, but the main feature of the
square-topped filter, viz. the steep band edges, remain preserved.
Fig. 3-53

shows a

partial tolerance study

on a G(3L)G 6-11-6

filter

provided that the reflectors are properly tuned, but the half-wave layers are
off-set in

a symmetrical or an asymmetrical way. Obviously the

leads to a heavy penalty in the

Two

maximum

latter error

transmission.

experimental curves for the 4-7-4 combinations are shown in

Fig. 3-54a, b.

Note: So far

we have

left

unmentioned the interesting

fact that the

produced on the two sides of a trough attain the values


100 percent. This is by no -means evident from the analysis presented

theoretical peaks

because the existence of a zero derivative d^"/d in the vicinity of x

6 /um
Fig. 3-54 Experimental
(a)

DHW

filters

made

with

ZnS and MgF2

G 3L G 4 7 4; (b) G 3H G 4 7 4.

OPTICS OF THIN FILMS

172

does no automatically entail &~

system

is

system

II.

To

we must resort
Here a G3LG 3-5-3
decomposed into a simple reflector I and an essentially SHW
The corresponding reflectivities seen from the inside of the first
1

at this point.

to the split-filter method, as suggested

layer are

shown

are simultaneously

in the figure. In

shown

for the

by

see this

Fig. 3-55.

dashed

lines the

analogous functions

GLG 2-5-2 filter which was found

not to

be of the square-top kind.

The

criterion for the existence of a trough

is

the intersection of the

corresponding curves: Recalling, for example, Eq. (3-68) we

Fig. 3-55

Analyzing a

lines

split-filter

technique:

G 3LG 3 5 3 system,
2. Intersection of IL and HR signals trough.
(b)phase dispersions for the G 3L G system.

internal
G L G 2 5

(a) solid lines

dashed

DHW system by the

may

reflectivities for

then

BASIC DIELECTRIC DESIGN UNITS

173

infer that at the point of intersection the equal internal reflectivities

lead to zero composite reflecion


(3-68)

tom

is

The

also met.

to 5"

(i.e.

1) if

pertinent phase dispersions are

shown

in the bot-

part of the figure.

Taking the point of intersection at x

S lL

can

the phase condition

The value

2.4.

dition 8 lL

S UR

of Eq. (3-68b)

2q> 2

2x

0,

2tc

is

...

is

we have 8 IlK =

182.6,

here 2x

fulfilled

7.2

365.2, so the con-

with an error of -0.4.

small enough to produce unit transmission in the given point.


However, it is evident that the unit value of the outside maxima is only

This

is

a practical fact, not an inherent necessity. It is conceivable to think in


terms of specially designed reflectors as regards the phase dispersions
filters with markedly less-than-unity
make up
*il> *hr> which would

DHW

subsidiary maxima.

The

sensibility to

asymmetric

the phase condition

is

also exemplified

by the

cases in the tolerance study in Fig. 3-53.

problems associated with the phase condition substantially


filters if the goal is a "resonance"
complicate the design of metallic
Finally,

DHW

curve.

3.5.4 Notes

on multiple cavity

The idea of

filters

alternately placing

more half-wave

layers

and

reflecting

stacks in series leads to the expectation that the square-top property will
become more pronounced, provided the dimensions of the reflector stacks

are properly chosen. Observing the principle of symmetry

to triple-half-wave

we

are thus led

filters

GR'yR"yR"yR'G
quadruple-half-wave

filters

GR'Ar"Ar'"Ar"Ar'g
which are generally called multiple cavity filters.
The theory of these filters does not seem to be definitely elaborated.
However, many a useful result may be obtained by a trial-and-error ap-

etc.,

proach.
Referring to the method of the proceeding paragraph, there seems to
be no simple way of extending it to multiple cavity systems. We at least

OPTICS OF THIN FILMS

174

take note of the fact that at one stage of the analysis we had to try out which
of the reasonable combinations obeyed the condition (3-90b). This was
actually a kind of trial-and-error approach although, let us be allowed to
say, in

a correctly analysed mathematical context. As a result

we have found

the right proportions between the inner and outer reflectors. Being able
to disregard the problem of mathematical labour thanks to the automatic

computer, there seems to be no obstacle to running the &~(x) curves direcly


with differently dimensioned reflectors and sorting out at will.
This approach is particularly simple with triple-half-wave filters, as we

have only two variable systems R' and R" (each of course in the
or

LHL

This

is

. . .

versions). In addition there is

true of all

odd multiple

HLH

...

n.

a safe 100 percent peak at

jc

cavity systems as contrasted to the even-type

systems, which require a starting analysis of the kind

shown with

the

DHW

filter.

Trying various layer numbers in the R' and R", we discover the various
at x = % to be simple peaks or Chebyshev-like triple peaks which

maxima

are separated by deep or shallow valleys.

The

figures below). In this straightforward analysis

obtaining maximally
case

when

everything

there are
is

flat

filter

cavities

(see

point of

than three (owing to symmetry about %

equiripple in the triple cavity

theory,

our goal

solutions or anything like an equiripple peak in the

more

pulation of the refractive indices.

wave

latter are

we do not make a

An

filter).

attempt at

was presented by Baumeister,

7-15-IS-7

This would require manithis,


[57].

derived from micro-

BASIC DIELECTRIC DESIGN UNITS

We

present four classes of solutions, distinguished by the parity of

the layer numbers in the reflectors.

and

175

MgF2

The

refractive indices are those of

ZnS

The odd-odd type

(HL) m

rn

ms
Ins
08

at

offers solutions

n
(LL) (HL)

(LL)

(LH) (LL)

(LH) m

(3-95)

ISO

no
~ ~

ms

r-K-te-7

178

180 182

186

6-13- tt-6

Fig. 3-56-61 Triple-half-wave filters with a flat top or with

moderate

ripple.

OPTICS OF THIN FILMS

176

with the exponents (m,

only

ri)

forming pairs

The

(1, 3), (2, 5), (3, 7).

ripple*)

is

percent, the band- widths range from 3 to 0.5 percent of the central

wavelength. Simplified phase diagrams 9~{x) are shown in Fig. 3-56.

The dual design with

and L exchanged requires exponent pairs

order to be square-topped, but the troughs are 6 percent

(1, 2), (2, 4), (3, 6) in

deep.

The odd-even type

(LH) m L(HH) (LH) n (LL) (HL) n (HH) L (HL) m

G
with (m,

(3-95)

ri)

and

(3-96)

the ripple being less than 0.5 percent

(1, 3), (2, 5), (3, 7),

The

(Fig. 3-57).

has a good sequence in

class

relationship to the preceeding class

is

to take the dual of

delete the central A/2 layer.

This time, the dual to (3-96) has a

favourable ripple of 8 percent

less

or so.

Another useful

with (m,
while

its

ri)

set in the

(HL) m

(1, 4),

dual

is

(LL) (HL)

(2, 6),

ri)

(2, 4,

and

its

G
with (m,

ri)

ri)

(3, 8),

which

is

(LL)

(LH) m

maximally

(3-97)
(Fig. 3-58),

flat*)

we

find

(3, 6),

(4, 8)

(3-98)

to have a ripple less than 0.25 percent

dual

(HL) m (HH) (LH) n (LL) (HL) n (HH) (LH) m

(1, 3), (2, 5), (3, 7)

Finally, the

with (m,

(HH) (LH) n

(LH) m (LL) (HL) n (HH) (LH) n (LL) (HL) m

G
with (m,

is

peaky.

In the even-even class

(Fig. 3-59)

odd-even class

(3-99)

to be maximally flat (Fig. 3-60).

even-odd class has the following

yield:

(HL) m (HH) (LH) n L (HH) L (HL) n (HH) (LH) m

(1,2),

(Fig. 3-61), while

its

(2,4),

(3-1C0)

(3,6), the ripple being just over

dual with (m,

ri)

(1, 1),

(2, 3),

(3, 5)

percent

has a ripple

of 6 percent.
*)
By ripple we understand here the
of oscillations about a mean value.
*)

This

is

total

a rough characteristic of what

this solution exactly fulfils the

mathematical

change between two

we

levels,

see in the graphs.

criteria

of

maximum

We

not the amplitude

do not claim

flatness.

that

There may be

a large tolerance on violating these without destroying the practical flatness of graphs

drawn on a reasonable

scale.

BASIC DIELECTRIC DESIGN UNITS

177

Combinations with even numbers in the inside

reflectors obviously

alternate the materials of their spacer layers. Baumeister calls these diverse
raciry filters as contrasted to the homologous cavity filters, where only one

material

is

We

present in the A/2 layers.

shall not enter into the details of

the relative merits of these classes.

Again, production errors may cause distortions in the computed forms


of the maxima. Fig. 3-62 shows how a maximally flat design may become
asymmetrically indented or peaky owing to small disproportions in the
truly realistic tolerance study must consider more different
spacers.

deviations in randomly chosen layers.


interference filters were introduced

sidered

good when reasonably

Such

by

statistical studies

Seeley, [58].

insensible to

design

of multilayer
is

then con-

randomly cumulated

errors.

Fig. 3-62 A tolerance study on the


GHL...LHG 3-8-8-3 THW filter:

(D basic curve,

(2)

thicknesses 2.02
(3)

References

[1]

[2]
[3]

2.02

2.02,

relative spacer

2
@> 2 1.98
1.98,

2.

H. Schroder, Optik 3, 499 (1948).


A. VaSicek, see ref. 13b) in Ch. 1.
a) Proc. Symp. on Ellipsometry of Surfaces and Films Nat. Bur. Stand. Misc. Publ.
256 (1964),
b) Proc.

Symp. on Recent Developments

in Ellipsometry, special issue

of Surface

Science, 16, (1969).


[4]

F. Abeles, in: Progress in Optics, Vol.

II,

Ed. E. Wolf, North Holland, Amsterdam,

1963.
[5]

F. Abeles, These, Paris, 1948, (see

[7]

W. Traub and H.
M. Hacskaylo, J.

[8]

O.

[6]

[9] S.

S.

Ch.

1.)

Opt. Soc. Am., 54, 198 (1964).

Heavens and M.

Liddell, Appl. Opt., 4,

Tolansky, Multiple

[10] S. Methfessel,

ref. 8. in

Osterberg, /. Opt. Soc. Am., 47, 62 (1957).

Dunne

Beam

Interferometry

Schichten, Halle, 1953.

629

(2) (1965).

of Surfaces and

Films, Oxford, 1948.

OPTICS OF THIN FILMS

178

[11]

[12]
[13]

[14]

H. Mayer, see ref. 11. in Ch. 1.


G. V. Rozenberg, see ref. 1. in Ch. 2.
O. S. Heavens, Measurement of Optical Constants of Thin Films, in: Physics of Thin
Films, Ed. G. Hass and E. E. Thun, Vol. 2, Academic Press, 1964.
K. H. Behrndt, Film-Thickness and Deposition-Rate Monitoring Devices and Techniques for Producing Films of Uniform Thickness, in: Physics of Thin Films, Ed. G. Hass
and R. E. Thun, Vol. 3, Academic Press, 1966.
Miyake, Journ. de Phys., 25, 255 (1964).

[15]

K.

[16]

a private communication cited by

P.

J.

T.

Cox and G. Hass,

for Optical and Infrared Optical Materials,

and R. E. Thun, Vol.


inCh.9.

2,

Academic

in:

Antireflection Coatings

Physics of Thin Films, Ed. G. Hass

press, 1964.

[17] see ref. 12.

[18] P.

G. Kard, Trudy

Inst. Fiz. Astr.

German

[19]

W.

[20]

A. F. Turner, Journ. de Phys.

[21]

R. B. Muchmore,

Geffcken,

Ak. N.

Est.

SSR, No.

5,

Tartu 1957.

Patent 759767 (1944).


et Rod., 11,

444 (1950).

Opt. Soc. Am., 38, 20 (1948).

J.

Ned. T. Natuurk., 14, 317 (1948).


A. VaSicek, Opt. Acta, 8, special ICO issue, 20 (1961).

[22] B. S. Blaisse,
[23]

[31]

H. Pohlack, Jenaer Jahrbuch 1951, 144.


T. Cox, G. Hass and A. Thelen, /. Opt. Soc. Am., 52, 965 (1962).
H. Anders, book, see ref. 7. in Ch. 2.
P. King and L. B. Lockhart, /. Opt. Soc. Am., 37, 689 (1947).
H. Osterberg et al., /. Opt. Soc. Am., 42, 291 (1952).
H. A. Macleod, Thin-Film Optical Filters, Adam Hilger, 1969; p. 42.
A. Thetford, Opt. Acta, 16, 37 (1969).
P. G. Kard et al., Izv. Ak. N. Est. SSR, t. XVIII, No 2, 186 (1969).

[32]

A. Millendorfer, Austrian Patent 221835

[24]

[25] J.
[26]
[27]

[28]
[29]
[30]

[33] Z. Knittl,

(1962).

Cz. Patent 121729 (1967).

Heavens and M.

Liddell, Appl. Opt., S, 373 (1966).

[34]

O.

[35]

R. Badoual and P. Giacomo, Appl. Opt., 5, 63 (1966).


P. B. Clapham, Opt. Acta, 18, 563 (1971).

[36]

S.

Jemna mechanika a optika, 20, 12, (1975).


A. Dobrowolski, Appl. Opt. 7, 1981 (1968).
A. Thelen, /. Opt. Soc. Am., 63, 65 (1973).
H. de Lang and G. Bouwhuis, Philips' Techn. Rundschau, 24, 282 (1963).

[37] Z. Knittl,

[38] J.
[39]

[40]

[41] L. I. Epstein, /.
[42]

[43] L.
[44]

[45]
[46]
[47]

[48]
[49]

Opt. Soc. Am., 42, 806 (1952).

A. F. Turner and

Young, Appl.

P.

W.

Baumeister, Appl. Opt., 5, 69 (1966).

Opt., 6, 297 (1967).

/. Opt. Soc. Am., 41, 365 (1971).


H. Schroder, Photo-Kino-Technik 8, 186 (1949).
A. F. Turner, Journ. de Phys. et Rad., 11, special issue (1950).
P. W. Baumeister and J. M. Stone, /. Opt. Soc. Am., 46, 228 (1956).
A. F. Turner, J. Opt. Soc. Am., 42, 878 A (1952).
P. H. Lissberger and J. Wilcock, /. Opt. Soc. Am., 49, 126 (1956).

A. Thelen,

[50] see ref. 29., p. 261.


[51]

H. Gunzler, Feingeratetechnik

[52]

Ch. Dufour, Journ. de Phys.

11, 539 (1962).

et Rad., 11,

413 (1950).

BASIC DIELECTRIC DESIGN UNITS


[53] S.

D. Smith, /. Opt. Soc. Am., 48, 43


Jemnd mechanika a optika,

[54] Z. Knittl,

[55] Z. Knittl, Proc. Coll. Thin. Films,


[56]

L. Young, see

[57] P.

W.

6 in Ch.

ref.

Baumeister, Sect.

179

(1958).
8, (1963).

Budapest 1965, 153.

5.

IX

in:

Lecture Course on Optical Interference Coatings,

Rochester 1971.
[58] J. S. Seeley, see ref. 31, in

Ch.

12.

[60]

A. Dobrowolski et al., Opt. Acta, 20, 925 (1973).


K. Rabinovitch and A. Pagis, Opt. Acta, 21, 963 (1974).

[61]

R. M. A.

[59] J.

Azzam

et al., Appl. Opt., 14,

1652 (1975).

Problems

3-1

Putting

Y = Y

Y = Y2
t

in (3-6a)

one obtains the Fresnel amplitude

and

between the media

coefficient

the result

is

2,

but the sign

why

normal. Explain

the

is

first

reflection

negative.

For

result is also

correct.

3-2

Make

and
Note the importance of the
and the complete breakdown of a possible

the thickness of the single layer in (3- la) converge to zero

find the resulting Fresnel coefficient.

denominator

+ rj 2

approximation by simple
3-3

3-4

reflections.

two delimiting curves @qb> ob m Fig- 3-2b pass


through the n and g levels with the same abscissa (equal to the
Brewster angle between n and n g).
Explain

why

the

Inserting (3-1 8a, b) into (2-27b) derive the amplitude transmission

formulae for

(-lr^-co,,

f(rt/2):

-^-j, k odd;
y

(-l)\

+ Y*t

^k
y

k even

Extracting the phase information, verify the rule that

dR
3-5

As an extension of Problem
(i)

the last,

(ii)

coherence of
3-6

If

yeff

^>

n%

the

first,

-fcjt/2

3-1 take (3-19) for

any k and amalgamate:

layers with the adjacent outer media. Verify

results.

in (3-19),

show
T

that approximately

= 4yFe2

ff

OPTICS OF THIN FILMS

180

3-7

Referring to Fig. 3-13,

show by

inspection that any multiply reflected

ray with however bizarre a pattern of zig-zag traversals will be in

phase with the second simply reflected ray.


3-8

Derive the conditions for the detuning

make them

periodic stacks such as to

3-9

>

Cj

c2

>

c 3 of three

contiguous.

Consider a 2 1 stack with its two stop-bands about jt/3 and 2rc/3.
Using Eqn. (3-31) and (3-34) find the conditions for VS12 which would
secure that the gap about <p = rc/2 in Fig. 3-1 1 b is just filled up by the
:

stop band of a tuned A/4-stack. Which is the necessary ratio n H jn L to


be used ? Compute the width of the enlarged stop band.
3-10 Compute the tuning ratios for two contiguous stacks at 45 incidence

from the

air,

considering separately the p- and s-components.

3-11 Find the relationship between the half-width of a monochromatic


filter

of order

when expressed

3-12 Having a sequence {n

for the incidence angle

boundaries

in terms of

"""^

H
>

fr example, for n L

1.38,

nH

2.35

that the device in the cemented condition n

Note

A(WA).

(W^) and

is

n*sin

Compute

<p

n H n L , ..., n g } show that the condition


Brewster reflection at the n H /n L
securing
O

...,

appropriate angle

6>

has a tendency to highly

and

reflect the

45.

seen at the

s-component

and highly transmit the p-component.

Maximum
This

is

efficiency will

of course be achieved in the tuned condition.

the polarizing beamsplitter after Banning.

Investigate the residual reflectance q p at the design wavelength for

odd or even number of

alternating layers.

3-13 Recast the formula (3-19) into the form

where

_ Y - ix
Yo + p

an

BASIC DIELECTRIC DESIGN UNITS

may be

3-14

Show

boundary
y/Yt for k even or odd.

interpreted as the effective input admittance at the

Note the
Compare 7.3.1.

n ln x

181

different terminations in

that the conditions for zero reflectance g n/2 of a single layer in

oblique incidence

tan
sin

may be

also expressed as

= tan
t

26>j

sin

20 o

tan

sin

20 2

p-c&se
s-c&se

4
Optics of metals

lic

From the point of view of macroscopic electromagnetic theory, a metalmedium is characterized by its complex index of refraction n jx.
r\

This formal change (substantiated by the analysis of the wave equations in


metals, see 1.4) has severe consequences not only in the quantitative, but
still more in the qualitative behaviour of the waves, particularly in refraction,
when studying the wave inside the metal. We arrive at such new concepts as

inhomogeneous waves, the generalized


energy which give

rise to

interesting, situations

advanced design

(e.g

Snell law

and interference

flux

of

mathematically involved, but physically rather

Although some of the

results find application in

induced transmission problems),

it

may

be admitted

minimum.

It is

methodically expedient to draw a line between problems of the outer

field

that they

do

not constitute a vital part of the practicionists

when studying the wave in the embedding media (here the computations
become more involved only formally -having more complex numbers than
with dielectrics but not conceptually) and between problems of the
internal field, with all their

new features. Thus,

for example, the Airy

summa-

what they were in dielectrics,


owing to the insertion
complex
only the Fresnel coefficients f, i are now

=
q>'
jcp" is complex yielding
of a complex n 1 and for the same reason <p
exp (-j<p) = exp(-<p") exp ( j<p'), where exp (-(?") is the amplitude
damping factor in metals. One does not have to ask about the physical
meaning of, for example, ? 1R which part of the refracted wave is here
related to the incident wave (for the answer see 4.3). However, for oblique
incidence, one must first learn to understand the concept of a complex angle
of refraction before being able to generalize the Airy summation. Thus the
tion formulae for a metallic film look exactly

introductory sections of this chapter are necessary even for a later concentration

on the outer field problems.

OPTICS OF METALS

183

4.1 Generalizing the Snell law.

We
(n l

Wl

a boundary between a dielectric (n

shall consider

The inhomogeneous wave

but mostly dropping the subscript

jxj),

1.

and a metal

The consequences

of a complex n t are most easily analysed by starting with the Snell law of
refraction. Writing n

sin

sin

0, one

sees that, inevitably,

0=0 and correspondingly a complex

assume a complex

sin

one must

0.

Let us write

find

from the

Snell

In the following

we

(4-1)

js"

law

n sin

== s'

sin

shall also

cos

If,

n sin

O
2

n
n'

6>

(4-2a, b)

*r
x-

need

c'

)c"

V(l

sin

0)

(4-3)

The components of this complex number can be found

to be

(4-4a, b)

where

[for

s'

s"

-2s's"

c'

2c'

c"

(4-5a)

c"

(4-5b)

a commentary on the negative sign in (4-4b) see below].

The complex angle of

refraction

0'

j0" may be determined

from the relations


s'

js"

sin (0'

j0")

sin

0'

cosh 0"

+ j cos

0'

sinh

0"
(4-6a)

c'

}c"

cos (0'

j0")

cos 0'

cosh 0"

-j

sin

0'

sinh

0"
(4-6b)

from which

OPTICS OF THIN FILMS

184

cosh 2

0" =

c'

s'

a'

sinh

0"

c"

s"

a"

(4-7a, b)
2

cos 20'

c'

2
c'

-s'

s"
s"

s'

-c"
+ c" 2

2
c'

c"

2
s'

having introduced in (4-7a, b) some useful short notations

Owing

s"

(4-8)

a', a".

to (4-5a), the expressions (4-7a,-b) satisfy the necessary condi-

tions for the hyperbolic functions

cosh

0" -

sinh

0" =

a'

a"

(4-9)

and any of them uniquely determines the absolute value 0"


and cosh 0" is always positive. Therefore,
According to (4-2a) s' :>
and n. We choose < 0' <
in the real part of (4-6a), 0' must lie between
< n/2, corresponding to actual refraction. Then cos 0' > and the sign
\.

of the imaginary part of (4-6a)


s"

>

by

determined by the sign of 0". Since

is

must be

(4^2b), this sign

positive,

which determines 0" to be

positive.

With

these choices made, c" as the imaginary part of (4-6b)

negative. This explains the

minus sign with the square root in

Let us try to form the generalized scalar product x sin


appearing

which

now

in the analytical expression for the plane wave:

x(s'

+ js") +

may

z(c'

jc")

(xs'

zc')

j(xs"

must be

(4-4b).

z cos

zc")

be written as the scalar product of the position vector


ix

kz

with the expression

s=a' + ja"
where the

real vectors

a'

a'a'

is'

kc',

I. It

symbols

a',

a"

a"a"

Is'

kc"

(4-lla, b)

and imaginary vector parts of what is called the complex


regarded as the complex wave normal. The use of the
a" for its components is justified by (4-7a, b), those values a', a"

represent the real

vector

(4-10)

may be

being just the absolute values of

a', a".

OPTICS OF METALS

Making

185

and

the scalar product of a'

a',

we

by

find

(4-5b) that

it

is

equal to zero. The two vectors are therefore orthogonal. Restating (4-9),
they have the properties
a'

-a" 2 =

(o'.a")=0

l,

(4-12a, b)

which leads to the following property for the wave normal:


(s)

=($.!)=

a'

The complex wave normal has a

+ 2jaV =

a"

unit square.

In the real domain, the unit square

is

the

same as

the unit modulus,

since
(s)

For our complex vector

is

different

make no

= a' 2 -

shall

a"

a'

a'

(4-13)

from
(I)

We

|s|

holds that

it

which

*=(s.s)

effort

a"

a"

towards normalizing the modulus of $ in order to

adhere to dielectric stereotypes.

On

the contrary,

we

shall see that every-

thing that results from a systematic (and cautious) generalization in the


optics of metals gives logical, though sometimes surprising answers.

The generalized

Snell

law

is illustrated

by

Fig. 4-1.

Let us proceed to form the product which

is

sometimes called the

vector of refraction:

fa

(i/

- jx) (a' + jo*) = N - jK

(4-14)

where

N = i/o' +
K=xa' -

Fig. 4-1

xa"

i(t]s'

i/o"

i{xs'

Components of the complex


wave normal.

+
-

xs")
i\s")

+ k(i/c' +
+ k(xc' -

xc")

(4-1 5a)

i/c")

(4- 15b)

OPTICS OF THIN FILMS

186

The time-space

factor of the refracted

wave may now be written

as

(with r denoting the position vector)

exp {Root

exp

n(sr)]}

Kt) exp

k (N

k Nr],

exp {][wt

[jcat

- jK) *]} =
= 27tA _1

This describes the inhomogeneous wave, whose planes of equal amplitude

and equal phase follow two different normals N and K, respectively. (In
metals for normal incidence, for that matter, there is a common normal to both planes.)
The quantities N, K are not unit vectors, which does not prevent us
from using them properly. The formulae for their squared moduli may be
found to be
dielectrics, or in

N2 = y

2
{(ri

2
)

sin

<9

+ V'[V* +

0?

o sin

2
<9 ) ]}

(4-1 6a)

X2 =

Y {-(r,

2
)

nl sin

V[Vx 2 +

<9

2
(r,

n% sin

O ) ]}

(4-16b)

The orientation of N in the Oxz plane is given by the angle / measured


from the z-axis. It may be computed by a formula strongly reminiscent
of the

classical Snell

law

smx =
but substantially differing from

it

sin@
(4-17)
jj

in that

N depends

on

It is

therefore

not a true optical constant.


Defining the unit vector of the phase normal
to the planes of constant phase) as n

now

sin x

(i.e.

k cos

of the vector normal


x,

we

write

N=

JVn.

x-component of the vector K with respect to (4-2),


thus making K normal to the boundary.
found
to
vanish,
is
The analytical expression for the electromagnetic wave after refraction

By

this

inspecting the

has the form

A exp
where the amplitude

is

r-

Kz

exp

< j

\cot

yet to be determined.

JV(nr)

(4-18)

OPTICS OF METALS

187

appears here as the orthodox extinction coefficient, but, again,

it

depends on the angle of incidence. Nevertheless, one finds comfort in


having the wave described in formally the same way as before.
orientation of the vectors N, K behind a boundary is shown in
The formation of an inhomogeneous wave with K normal to the
boundary is quite natural, considering that equal damping may be incurred
only on the equal paths 1 - V, 2 2', 3 3', covered in the direction N.
In computing the s-admittances or the phase shift in oblique incidence,
one has to deal with the now complex expression

The

Fig. 4-2.

n
This

may

cos

(r\

jx) (c' +

{t]c'

xc")

j(xc'

rjc")

obviously be written as

n.cos =
The normal
be seen

jc")

projection

of

- jK = Ncosx- )K

is

of use in

many

(4-19)

other situations, as will

later.

/
Fig. 4-2

The inhomogeneous wave and


its

4.2

The

one

(NK)
quantities

and multiplying

subtracting (4-16a, b)

easily obtains

recalling

The

hi.

invariants and Ketteler's relations

By mutually
vely,

vector of refraction.

- K1 =

2
rj

= NK cos x =
- K2

(4-15a, b), respecti-

(4-5a) in the second case

x2

NK=
Z

= 2(NK)

t\x

(4-20a)

yB

are called the

(4-20b)

first

and second

invariants, respectively; their relations (4-20a, b) to the optical constants

of the metal are named after Ketteler,

[1].

OPTICS OF THIN FILMS

188

It is

easy to verify

N = N\l 2

Denning in addition a

=
we may

x2
sin

= A - jB

2}rix

)=N

(4-22)

6>

(4-23)

third invariant

= N 2 - K 2 = JV 2 cos 2 x- K 2 =
- K 2 -n% sin 2 O = A - n% sin 2

write

Nz2

=Uc +

2
yJ(B

C 2 )-]

X 2 = y [ - C + V(8 2 +
(4-24b)

is

another version of

want to compute
It is

n% sin

(4-21)
2

C 2)]

(4-24b)

(4- 16b). (4-24a) replaces (4- 16a), if

we

instead of JV (see, for example, the formulae (4-29)).

interesting to note that the projection

the sign with n% sin

(4-24a)

obtained by simply changing

2 is

O in front of the square root for

2
.

So far we have only worked from the true optical constants t], x (and
to the parameters of oblique incidence N,

O)

K. In interpreting measure-

ments we need to proceed in the reverse direction: photometric or ellipsometric measurements on a massive metal yield the parameters JV*Z and K
[see (4-30)] and we want to find r\, x. Ketteler's relations yield two biquadratic equations for r\ and x, respectively:

u*T
where for u = r\ we take
and solve for x.

From

A and

-i-B 2 =

solve for

r\,

the algebraically possible solutions

Measurements of
example,

A 2

[2], [3], [4].

Q = -L-

(4-25)

while for u

we

x we take

+A

take the following

2
V[ + A + V(A +

B 2 )]

(4-26)

optical constants of metals are discussed in, for

OPTICS OF METALS

189

4.3 Orientation of the vectors E and

after refraction

Knowing the complex wave normal s = a' + ja", we now require the
E and H to be orthogonal with it. This is a consequential generalizaof the situation which we know to exist in the homogeneous waves.

vectors
tion

Orthogonality will again be defined by the zero value of the scalar product

of the two vectors in question.


Let us

consider the s-polarization. 1R

first

plane of incidence, and so


real

is

by symmetry

E'1R

and imaginary components in that plane,

it

is

at right angles with the

Since s

with both

lies

holds that E^ R

(a'

its

+ ja") =

0.

The vectors H 1R and H'1R he in the plane of incidence. H 1R could not


be simultaneously orthogonal with two other vectors a', o" in the same plane
unless we admit it is complex in the same sense of the word as the wavenormal.

form

Its

for a complex

H=
[in the last

most easily found by generalizing the formula (1-21)


and s (and writing jSy for the s-polarized E-vector):

is

(=

ft

y/e)

x jy)

($

member

= nSy (-a'a" + jaV) = (N - jK)

use was

made of (4-14),

in the middle

x \Sy

one

(4-27a)

Fig. 4-1

is

of

help].

We

then have
i

H~

[i

= (a' + ja") (-a'a" + jaV) =


= - ja'a" + ja =

j]

as postulated.

The

refracted magnetic vector in s-polarization

is

therefore a

complex

vector in the plane of incidence with a rather complicated structure by


(4-27a). It is of course orthogonal with E'1R .

For the

it is the H-vector which remains simple


complex by the formula following from (1-21):

/-polarization

refraction, while

is

- [>f j x s]
y

again ensuring s

The
are

E =

(4-27b)

\n\

0.

vectors (4-27a, b) are essentially given by {a'a"

ja"o').

Looking

we find that they are not orthogonal with N-the true wave normal.
thus lead to the conclusion that the electromagnetic wave is no

at Fig. 4-2

We

= -?
3ry (a'<L - jaV)
z

after

OPTICS OF THIN FILMS

19o

longer

and that one of

strictly transverse

vectors (according to the

its

polarization) oscillates both transversally and longitudinally. Since these


oscillations are
state

may

be

coherent obeying the same rotating vectors

classified as elliptical polarization.

The

$ or Jf their

ellipse lies in the

plane

of incidence.

Having found the complex nature of some refracted vectors, we must


now investigate the manner in which they are projected into the boundary.
According to Fig. 4-1 anything in the o'-direction is projected by
sin ', while the o"-direction

(4-27a)

has the factor cos 0'. Taking, for example,

we have

= ny (-a'

(H)tan

cos 0'

ja" sin 0')

-J3f cos

where an abridged notation Jf was introduced for


of (4-6b), (4-7) in the interpretation

and use was made

of the brackets.

Similarly for (4-27b)

()

('

cos 0'

ja" sin 0')

= $ cos &

We may
among

infer that the

boundary conditions

are essentially relations

the rotating complex amplitudes, which are formally projected by

the complex angle of refraction. For the dielectric/metal boundary so far

considered

we have on
.

5-polanzation
r

f...

<
[...

the metal side

=S\u*

= -nS 1R cos0

the input sides being orthodox. Obviously, the


as before

/>-polanzation

by introducing complex admittances.

f...
<
.{...

=
=

(T'irCOS!
_ ,
ti^ir

two cases may be

unified

Coefficients of the Fresnel

type deduced from these equations will therefore indicate the ratios of the
rotating

complex amplitudes,

the complex structure of

their interpetation

some of the physical

remaining unaffected by

vectors.

4.4 Fresnel's formulae on a dielectric/metal boundary

With reference to 4.3 Fresnel's formulae will be obtained by inserting


complex admittances for the second medium. Recalling Sect.

into (2-4)
4.1

we have

OPTICS OF METALS

- F s - Y's + \Yl =
n

iy" =
y
*"
"

y
1 p =
P

J * d
P

= Nz - jK;
A-jB

n cos

(4-28a, b)

N,-jK

ncos0

number of various algebraic versions of the Fresnel coefficients may be


found in the literature, including approximations for weak absorption.

We

one of the exact versions making use of the

shall present here

invariants.
It

holds that

or fp

may be computed
P

way

A cos

via fs

O)

(4-29a)

(4-29b)

by the relation

- ^ Nz ~
(Nz +

In the normal

A cos

(n

Nz + }K
+ iVz jA'
- j(n K ~ B cos <9 )
- }(n K + B cos O )

n cos 6>

N Nz +

(n

cos

" Sin
n sin

6>

'

tan

tan

<9 )

~ ]K
- }K

(4-29c)

r*

computed

the energetic reflectivities are

as

fp>s

2
.
|

Fresnel's coefficients at oblique incidence in metals using the angle


as parameter were discussed in

[5].

important to know- the^ relation of these quantities to ellipsometric


jA
measurements. Denoting the amplitude ratio in (4-29c) as tan
e
where
It is

A=

J>

<5

<5

and tan

Nz =

|*

fjfs

it

n sin

|,

o tan

may be shown
_

cos2d>

Kv = n

sin

tan

and

K are processed as in 4.1

This

is

(4-30a)

cos

(4-30b)

to yields, x.

the principle of determining the optical constants of metals

ellipsometric measurements

We

2t|>

Q
1

A
sin 2d sin A
sin 2*J> cos A
;

sin

that*)

leave

it

by

on a massive metal.

to the reader to insert (4-28a, b) into (2-4c) in order to

obtain transmission coefficients (needed for computations with thin films).


*)

The angles

i|*

and

computed from the measured orientation and oblateness


The formulae (4-30) are written for the simplest case
polarization has an azimuth of 45. For other azimuths a correc-

of the reflected polarization


that the incident linear
tion factor

is

are

ellipse.

introduced into the relation tg

r
I

//-

OPTICS OF THIN FILMS

192

4.5 Poynting's vector in the refracted wave


Let us suppose a plane-polarized wave of arbitrary azimuth to be
incident at an oblique angle on the dielectric metal boundary. Then the

s~ and/>~ components obey the Snell law jointly and the boundary conditions separately. The simultaneous existence of both basic polarizations

now

causes both

E and

With

to be of complex nature after refraction.

reference to Sect. 4.3 the complex Poynting vector for the total field

4- WaV - Xa') +

gj\ x {) nS v + s*,(-aV + jaV)]*


.

is

(4-31)

4jc

Multiplying out,

n*

*,

we
(a'

obtain three terms

+ jo"), *K,l 2 ('-JO,

where use was made of Fig. 4-1 and the


a" x j

= a', i'xj=

real part of the

<0 a'a'j

(4-32)

relations

-a", a

The time average of the energy

2j*(<? P

'.

a"

= j,

flux is obtained

complex Poynting vector

(4-31),

x j

by taking

the

whose components are

(4-32).

The

first

two may be treated according to the formula

Re

{fi*(a'

jo")}

=r\a'

xa"

so that the energy fluxes carried by the two polarization components


separately are

by magnitude and

^|*

2
s

(a'

direction

xa")

= -rNKJ 2 n,
(4-33a,b)

~N

This means that the formal proportionality of dielelectrics: energy


times squared modulus of amplitude is preserved. Things are "normal"
x

^ *-~
.7

Fig. 4-3 Directions of propagation of the


s- and p-components
an inhomogeneous wave.

energy fluxes for the

in

OPTICS OF METALS

193

with the s-component even as regards the direction of the

flux. It

goes along

the wave normal.

new

situation has arisen with the />-component.

energy propagates along a direction

&

a'

with

a" being orthogonal

we may

a",

infer

from

& in the negative

and

n',

which

is

The corresponding

deviated from n.

from n only by the sign


from a' by the angle
deviated by the same amount

n' differing

Fig. 4-3 thattt' is deviated

direction, while

N is

in the positive direction..

In normal incidence

=tfk and the energy flux

5T*l'l
It is

as

--*. I'l

is

given by

therefore proportional to the real part of the refractive index


(just

N was the real part of the complex vector of refraction in oblique incid-

ence).
It

remains to pay attention to the third term in (4-32).

It is

remarkable

for being oriented at right angles to the plane of incidence

and being the


result of an interaction between the s-and ^-components. It is a
kind of
interference flux of energy -a term which we shall encounter in the
optics
of metals on several occasions. Since its direction is parallel with the boundary, it makes no contribution to the energy balance and only represents
an
irrelevant shift

4.6

The

of energy in the

is

extending space.

single metallic film

Let the metallic

from the

infinitely

right

a metallic

medium of

the present situation Wo/t^ be

by another boundary njn 2 with a

bounded

dielectric, so that there

film.

Writing the generalized Snell law

n sin

one can

@ =

sin

n 2 sin

wave emerging into the back medium will be homohas a real angle of refraction
2 (This assumption is of
course justified only on the condition that the layer is plane-parallel
and
that the inhomogeneity of the wave inside the layer is not caused
by any
other means than by a complex refraction of a homogeneous wave on
infer that the

geneous, since

it

the

boundary n

jn.)

OPTICS OF THIN FILMS

194

one can therefore neglect the existence


and use the formulae
and <p complex there.
making
n
for
dielectrics
by
originally developed
involved,
as we have already
more
much
Studying the internal field is
Dealing with outer

fields only,

situations inside the layer,

of some complicated

seen in 4.2 and 4.4. However,


insight into the

if

one wants to obtain an

macroscopic formalism of absorption and to develop design

tools for multilayers

We

of importance

it is

combined from dielectrics and metals.


between these two aspects as mentioned

shall distinguish

in the

introduction to this chapter.

Before proceeding any further,

let

us briefly analyse the situation on

the second boudary. Introducing again the subscripts

and L, one can

generalize the reflection law


L

By

7t

R =>

we come

analysing (4-6a, b),

'

01= -01

0'

R,

to the results

4 = 4, 4 = -4, 4

= -4,

4 = -4

so
a'L

is'R

kc'R ,

a'i

= hR -

kc'R

Putting formally for the L-direction

4=4 + K.
we

see

N^=r,al +

xal,

KL = x< -

by the change of all the k-components that the vectors

are mirror images of their R-counterparts. This again


generalization of what

we

is

K
$L ,

NL and

fCL

a consequential

are used to in dielectrics.

Finally, as regards the tangential projections onto the second

boundary

obviously the same holds as was stated at the end of Sect. 4.3.

The phase angle of the

metallic film

becomes complex

in the following

way

,,'- fr-

= ^-nhcos0 = ^- (Nz - sK)

(4-34)

so

exp(-j^)

exp

(~^-Kh\ exp(-j^Nz h) -VtT*


.

(4-35)

where

%=
is

e"**

the amplitude attenuation factor.


(4-35)

may be

introduced into the Airy summation formulae.

(4-36)

OPTICS OF METALS

195

For the interference matrix we need the expressions


cos

(<p'

sin

(<p'

- j(p")

where the damping

4.6.1

=
=

j>")

cos
sin

<p'

<p'

cosh
cosh

<p"
<p"

+ j sin <p'
- j cos <p'

sinh

q>

sinh

q>

(4-37a, b)
.

essentially involved in the hyperbolic functions.

is

Computing the outer

field

Airy summation formulae


Generalizing as mentioned above,

rR

where

all

tR

T +Va * e -**
=

ry

'

TTT^e^

(4 ' 38a ' b)

R in the Fresnel coefficients were dropped.

the subscripts

Writing f v

we obtain

e*\

iv

*v

ja

",

1, 2,

the energy coefficients are

obtained in the form

.2

ji+^i + M^r^ cos(2tp' +

+*

+ 2^

r?r*

r,r 2 cos(2<p'

"2

<5

5,

- 52)
- d2)

'

,2,2,,,,2
a

-lfi*
'2

TR_r

where

2
<2r

may be

.^ ,2
|tRl

Tame as above"

may be

and
2 ,2,2
'

^
taken to use

(l

2 ,2
_
"'
2

escape

-^' 1=

as
"

we introduced the two Fresnel energy


as we were able to do in (3-3a,

+
*

JJ

(4-40)

transmission coefb).

Care had to be

N (or q in normal incidence) as the proportionality factor for

the Poynting vector. However,


(4-40b) as Tj

interpreted as g y , r

same way

ficients in the

4 " 39b )

interpreted as the energy attenuation factor.

Throughout these formulae

In this equation

<

t2

we need not
By formally computing the

interpret the

numerator of

left-hand side of (4-40),

we

the peculiarities of the internal field, in particular


that of the
energy balance on the second boundary. Since the reader
might already at
this point run into troubles by simply checking
the recommended way
all

of

generalizing the Fresnel coefficients,

we

shall briefly outline the

problem,

OPTICS OF THIN FILMS

196

although the

answer can only be given


normal incidence.

later (p. 204).

final

fine ourselves to

Taking n x to be complex, n t =tf l


2

Qui

jx x

(n

(o

We shall

we have for the first boundary


2

>h)
2

h)

+ x\
+ *?

(4-41)

PlR
Tin

2n

fi

("o

We take the energy balance

con-

fi)

T 1R

1>

(4-42)

fc?

an obvious necessity,
no path is
boundary
since during reflection and refraction at a simple
covered and no energy loss should be incurred. The same goes for the
second boundary considered isolated and the light coming out of the metal.
Let us see what

62R

we

side as

obtain:

nl

on the right-hand

n2

-jx

(li

(fi

~
+

2
+*
n 2 f + x]

W2)

(4-41')

Qik
T 2R

n2

- jx )
+ "2 - J^i

2(h
i

+ 4n 2 x
+ n 2 )2 +

4H2I/!

(li

t 2R

>

2
1 lri 1

(4-42')

The energy balance (set up in the way so far usual for us) is violated in that
the sum of the two Fresnel energy coefficients is greater than unity by a
surplus term
2

4n 2 x Ah

W=
(/i

However,

this

n2

f+

(4-43)

x\

we have wrongly generalized the Fresnel


metal-to-dielectric transition. The correct interpretation

does not

coefficients for the

mean

of the apparent discrepancy

that

lies

in the detailed study of energy fluxes in a

metallic medium, where there simultaneously exist right- and left-going


waves. This will be undertaken shortly. (The reader is also reminded of
Sect. 1.6.)

Let us return to the formulae (4-39a, b) and (4-41). For highly refleand already the first reflection
cting metals (Ag, Al, Au) x t >i/ t , n
coefficient g t R is near unity. (In addition 8 1 R a: n.) Under these circumstances
is
(4-1 9a) is almost constant and nearly unity. Very little real inferference
involved here: either the film is exceedingly thin (say h = 300 A) in order

OPTICS OF METALS

197

to be transparent, but then

spectrum; or h

with

X,

is

changes

<p'

little

as X runs through the visible

greater, so that cos (2<p' ...)

might change appreciably

but then the attenuation factor swamps this term so that

it is

with respect to # 1R If there are appreciable changes of q k with


more due to the dispersion of the optical constants: r\(X), x(X).
.

Of course
as attenuation

of dispersion,

there

do

exist intermediate cases,

negligible

X,

they are

where interference as well

affecting the g R function. In order to eliminate the influence

is

let

us choose as the independent variable the geometric

thickness h, with X fixed. This corresponds to the practical situation

the film

being evaporated onto a blank glass and

is

transmissivity are monitored in

and

monochromatic

light.

when

and
With h changing, q>'
reflectivity

its

change proportionally.

<p"

75

aC

/"

MqFi/Qt/gfoss

'\c(

50

25

X-4300A

IV

^^

\\

500
Fig. 4-4 q, x

hi
1300

1000

and a

in

dependence of the geometric thickness of

a germanium layer in two substantially different regions of absorption.

Fig. 4-4 illustrates

germanium on

glass at

two

= 4300 A the optical constants were taken


= 6500 A = 4.98, x = 0.92. We thus have

For X
for X

r\

acts as a strongly

respectively.

(For other reasons the input medium

see that with slackening attenuation

are displayed, until for x -+

maxima would then occur


h

3.73,

x.

= 2.30,

is

more

situations,

MgF 2

.)

interference oscillations

complete periodicity would be attained. The

at the thicknesses

*ii

and analogously

r\

two

where
and an intermediately absorbing metal,

germanium

We

different wavelengths.

as

for the minima.

odd, X fixed

OPTICS OF THIN FILMS

198

Absorption in a metallic film

Attenuation of amplitude brings about attenuation of energy. The

sum of
The

the normal coefficients for the outer field

r
is

is

smaller than unity.

positive quantity

Qr.

9r

interpreted as absorption.

This

If there are interference oscillations in


q r and # R , a R must also oscillate.
is clearly seen from Fig. 4-4. Already this should suffice to declare

absorption an interference quantity. However,

we

shall find

more substan-

tiation for this in the further course of this discussion.

Let us open a different approach to absorption by starting with the


transformation

WnE 2s + w 12 H2s
m 2l E 2s + m 22 H 2s

E is =
=

H is
where
this

all

the matrix elements are

now complex by

(4-28a, b), (4-37a, b).

We now take the complex conjugate of the second equation and multiply
by the first equation. Owing to the orthogonality of and H this

corresponds to forming the normal component of the complex Poynting


vector of the total

The time average

field.

ClS/norm

-jSn

**

11 "1

=
*
1

is

then

"g

^e {EisH] S } =

E2S

|2

+ m w|2 (E 2S H|s ) +
t i

Considering that the second boundary

+ ^12^*2

H 2S 2 +
I

m, 2 i^i(Ejs H2S )}

is

the

(4-44)

we have

last,

H 2S 2 = H 2R 2 = n\ E 2R
E sH2S = E 2R H2R = "2(E 2RE 2R = E 2S H 2S = n 2 E 2R
I

E 2S

= E 2R
|

the right-hand side of (4-44)

we can

C*2R)norm

which

is

On

is

no L-wave

flux.

2
|

therefore factor out

"gT" n 2

E 2R

the normal flux of energy carried by the

the layer. There

R-wave when leaving

OPTICS OF METALS
Contrary to
right

and

this (Pi S) norm is the net difference

the input boundary (for

left at

We may now
normal

199

compute

more

r-(rr lR
.

Wuw|i +

Rel

/norm

#R

of net

referred to the flux

and output boundaries,

fluxes at the input

flowing

is

detail see Fig. 4-6).

relative absorption as the difference

of the incident wave (Pi R ) no rm

between what

n 2 fn 12 mt 2

fnnfnt 2

fn 12 fn\ x

(4-45)

The absorption

is

formally proportional to (normal) transmission of

the layer, the "proportionality factor" being a certain combination of the

matrix elements fn i} and the substrate index of refraction n 2


After insertion from (4-28a, b), (4-37a, b) a R may be put in the form
.

<*R

= l{l(y'sinh2<
^)" +
v
?

2 |n 2

-1
y/2
.

From

this

ferentially as

formula

it is

9 R does, but

explicitly containing
,

y//2

q>',

it

<p".

(7
v

"2

Y 2 + Y" 2

(Y'sihhlcp"

Y"sm2<p')}+

'

'

Y"sin2<p')
^

'

sinh

<p"

Y"

sin

(4-46)

cp')

seen that not only absorption changes inter-

has an interference factor (4-46) of

its

own,

Also, the explicit appearance of n 2 , but not

in this factor is typical.

Although 9 R and the factor (4-46) are interdependent, we state the


following: absorption in a metallic film is a relative quantity in the sense
that for a given # R

it

may have

different values according to the value of

the right-hand side of (4-46).

We

shall

come back

to this subject later.

OPTICS OF THIN FILMS

200

4.6.2

Computing the inner

field

Poynting's vector of two encountering waves in metals

We have seen in the introductory Sect. 1.6 that two encountering


waves in a metallic medium give rise to an interference flax of energy which
must be considered along with the orthodox fluxes carrie J by the two travellThe key to a correct analysis of any situation involving
two coherent waves is to add up field intensities first and form their

ing waves separately.


at least

Q
vector product -5

Re

[E s x He] second.

The new thing we are now going to do in comparison with 1.6 is to


take two encountering inhomogeneous waves forming inside a metallic
layer in oblique incidence.

Consider the 5-polarization. The total

J(^r

electric field is

+ A),

with reference to (4-27a) and Sect. 4.6 the total magnetic

may be

field

expressed as

n y S R (-a'<

where

in the

ja"a'L

+ jaX) +

n^ia'n'i

ja"<)
a'a'l

a mirror image of s R in both

its

second term use was made of the relation

following from the fact that s L

is

$L

components.
Inserting into the Poynting vector
J X

we

S=

-r.

x r

r,

and using the

a'i

= a'L

relations
j

<

-<

obtain after some arrangement

PS = JVtR + P Ln L +

-^ Re {n*[L

K - }<) + <^ K R

JOl)]}
(4-47)

As

expected, the total-field flux of energy

is

the vector

sum of

the

by the R-and L-travelling waves, plus a third vector whose


existence depends on the simultaneous presence of the two waves in the
medium. This interference Poynting vector is associated with the existence
of the standing wave in the metal and its physical role will be duly interpreted
fluxes carried

in a subsequent section.

We shall decompose Ps into

the normal

and

and
wave by

tangential directions

express everything in terms of the parameters of the right-going


OPTICS OF METALS

201

applying proper reflections at the second boundary and corresponding

phase

shifts.

The computation

directly, referred to

behind the

first

any

rather laborious

is

and we give the

parallel plane in the metal at

boundary.

It is

expedient to use

from the second boundary) as the independent

'

results

a distance z

'

backward distance

(the

variable.

Writing

xfr

we have

(4-48)

for the s-polarization

normal

in the

= ^-Nco*x-C

direction:

PSz(C') =

Pr(C')

U - r|e

cos z

- r 2R sin

(i^

<5

2R )

(4-49a)
in the tangential direction:

Ps,(C)

Pr(C')

sin

X <1

r 2K

e~T K + e~^ KC
'

'

2r 2R cos ty

<5

2R )>

(4-49b)

P R (C)

is

the non-projected flux of the

the inhomogeneous

wave

is

R-wave

in the given plane. Since

attenuated in the normal direction,

P R(C) does

not depend on any other coordinate.

Analogously we have for the p-polarization

Ps,(O
.

r2 R e

-
k

normal direction

in the

= PR(Ocos(20'-*)x
2Kcos26>

2Xcos20'
'

-%-kc
k
.

JVcos(20'

,.

r 2R sin

(^

<5

2R )

x)

(4-50a)
in the tangential direction

Psi(O
x <1

The
energy.

r 2K

= PR(C')-sin(20'-

e~T KC '

e~~^

Ki '
.

Z )x

2r 2R cos

(ip

<5 2R)

>

(4-50b)

third terms in the brackets represent the interference fluxes of

It is interesting

to note that they oscillate harmonically with

'

OPTICS OF THIN FILMS

202

[starting with a

phase (-<5 2R ) for

and that the amplitude of these

xj/

'

at the second boundary]

oscillations is constant:

PR(C')exp (-*)The

first

2R

terms are simply the net sums, or differences, of the travelling

fluxes.

The normal
with K.

On

interference flux can only exist in metals, since

it

vanishes

the other hand, the tangential interference flux exists indepen-

dently of this even in dielectrics.

With
two-beam

K=

and

(4- 50b) represent the

orthodox

interference as with the Lloyd's mirror experiment.

Looking

the brackets in (4-49b)

along the Ox-axis there exist interference fringes parallel with the boundary

and having a width A/2w t cos Q x


Dwelling for a while on this diversion to dielectrics, let us decide
whether the fringe system is anchored in the boundary by a dark or a bright
.

band.
Considering the angle of incidence '

x (i

now

being real) in the

neighbourhood of grazing incidence, we may take (f2 ) p = + 1, (f2 ) s


[follows from (2-4a) making <9 V _! = rc/2] and we have in both cases
<1
giving a dark fringe for
larized light,

which

is

ty

+ r\

0.

2r 2

cos^> p

The same

will therefore

hold for unpo-

used in most experiments.

The corresponding

orientation of the electric vectors

is

shown

Fig. 4-5.

Fig. 4-5

Determining the phase


polarizations.

dR
two

shifts

at nearly grazing incidence for the

in

OPTICS OF METALS

The
real) r

/>-case is interesting because

it

203

of the fact that with a positive (and


of incidence, while

yields destructive interference for large angles

with the same r


p

it

would give

constructive interference in the

neighbourhood

of normal incidence.
If the plane polarization

had a general azimuth, a still more complicated


would combine the results of this section and of Sect. 4.5. There
would again be some tangential components at right angles to the plane
analysis

of incidence.
Fig. 4-6 illustrates the results of this section for normal incidence on a
numerical example chosen so as to make the observation of the typical

features easy.

Pr
describe

boundary
layer.

Pl

all
it

is

the net difference of the travelling fluxes, but this does not

the energy shifts inside the layer. In particular,

does not equal

Similarly there

qr

where q r

on the

first

the reflectivity of the whole

is

would be a discrepancy on the second boundary

when comparing with t r Superposing the interference flux w(Q onto the
P R - PL establishes the correct energy balance at the boundaries.
.

difference

In addition, the interference flux takes part in the energy balance for the
dissipation of energy inside the layer, as will soon be shown.

The energy balance on a

We

are

now

metal/dielectric

boundary

in a position to account for the discrepancy with the

metal-to-dielectric energy balance outlined


is

that writing intuitively

g 2R

on

we

t 2R ,

p. 196.

The

critical

7 -40, k-0.5
* -

1/t ,
h-0.0665u
'
rio-ng-f

n
'2

^f^W-^

n.

600

500

*-*

/?,

300

200

Fig. 4-6 Superposition of the transport

and

point

disregard the interaction of

m
m
*

100

nm

interference fluxes of

energy across a metal layer in dielectric embedding.

OPTICS OF THIN FILMS

204

the incident and reflected waves resulting in the interference Poynting


vector.

Confining ourselves again to normal incidence, we obtain the actual


=
net flux impinging on the metal face by using (4-49a) or (4- 50a) with 0'

and

C =

0:

2R \ 1

r\*

x
2 -^ r 2 R sin 5 2tL
n

must equal the R-wave

continuity of the boundary conditions this

By

energy transport on the dielectric face.

P2 r ~

1i

^2R

we may

Knowing

that

<f 2R

i29

&2

v.

an<*

write

P2R =
Comparing

(4-51a)

2
I

?2R

P 2r =

t 2R P 2R

(4-51b)

(4-5 la, b) leads to the equation

+ ^12=

QiK

(4-52)

t 2R

where

W 12 = -2^-r 2R sin5 2R =
Although the interference

-2-^i-Im(f2R)

flux

1v

KO = P R i~ r
2

is

an

since

sin (*

oscillating function across the layer, w(0)


<5

2R

<

0.

Actually

it

(4-53)

(4-54)

^2r)

W12

is

always positive

equals the surplus term established on p. 196.*)

*)
In connection with equation (4-52) we may tentatively state the following: if we
could directly measure the energy fluxes inside metallic media, we would have to conclude
that the total energy incident on boundary 2 is proportional to 1 + w 2 and we might

define locally true energy coefficients of reflection

e 2R

(1

+ w2v),

r 2R

and transmission as
:

(1

+ w2R)

We could

not, however, find any reasonable complex quantities of which the new coeffiwere the squared magnitudes and which could reasonably be used for the amplitude
description of the electromagnetic wave. This is still secured by the orthodox Fresnel

cients

The fact that g 2R and t 2r do not retain their usual meaning is


f 2R
sometimes regarded as a breakdown of the concept of energy coefficient. Obviously it is
a harmless breakdown in a situation when such a coefficient is never needed. Moreover,
coefficients f 2R ,

OPTICS OF METALS

205

Computing absorption from the inner

field

This operation consists of setting up the energy balance for the normal

components of the total-field


two boundaries, i.e.

_ / Pis ~

^2s \

*1R

measured at the internal faces of the

fluxes,

or

/norm

We have dashed the P ls in order to stress the point of the method.


The normal components of

the fluxes P'1S

and P 2S are special values


= h and respectively

of the expressions (4-49a), (4-50a) for PSr(0> putting '

We

obtain after arrangements

s-polarization

aR

x/(l

_
-

cosx
Toi

-coT07

2
+ W 2 r 2R
) + -l^-^r^sin-jo'cos^'

U ){\

2R )\

(4-55a)
/>-polarization

_
aR_To1
x /(l

<*

2
) (1

r 2K )

cos(20'-x)
x
coi;

4Kcos20
Ncos(2& -

'

^2

sin

cos {(p

\
I

x)

(4-55b)

where (with regard to

2.6.6)

N
l

"o

is

^ 2 e-

f,Rf2R

2j "'

the internal coefficient of transmission

metallic face of the

we

'1R

oi

first

or

(4-56)

from the input medium to the

boundary.

shall subsequently see that everything that

accompanies

this proves indispensable for

the logic of the energy balance of the thin metallic film as a whole.

The energy balance on a metal/dielectric boundary was set forth as a problem in 191
[6], later by Salzberg, [7], and Vasicek [8]. The interpretations
of this chapter are based on the papers [9] and [10].
by Born and Ladenburg,

OPTICS OF THIN FILMS

206

In particular for normal incidence

(1

aR

= JL

- ^ 2 ) (1 +

rl K )

2
f 1R

"

rfR sin

<p'

cos

(<p'

<5

2R )

!L_

2
<2f

r R r| R

^ + 2r 1R r 2K <%

cos

(2ep'

<5

1R

2R )

(4-55c)

where the denominator of (4-56) has been fully developed.


We have thus derived new explicit formulae for absorption, which
are in their numerators (but not the denominators) quite different from
what we obtain in taking 1 - q r - 9 R The contribution of attenuation by
.

transport

is

from the more variable contribution of the

clearly separated

interference fluxes.
It is

evident from this

method of derivation

that the external environ-

ment of the

We

metallic film could have consisted of further interference films.


should again arrive at the formulae (4-55a, b) or (4-55c), provided that

t 01

and r2R exp Q8 2R ) are properly interpreted as the

transfer coefficients

of the external interference systems.

Forming the
factor

ratio a R /S R ,

f2R

we should

obtain (apart from a constant

complementing (4-56) to 9 R

the brackets in (4-55a, b)

or the numerator of (4-55c), respectively. Manipulating r


2R exp(jS 2R ) by
proper design of the additional backing layers in such a way as to give
sin

<p'

cos

(q>'

<5

2R ) a

maximum

negative value,

we minimize absorption

relative to transmission. This is the starting point

of a design procedure

leading to the so called induced transmission.

To complete it we shall first


need to derive a theorem concerning the addition of layers on the input
side (see 6.4.1.).

The Joule heat of dissipation


The standing wave and

in

a metallic film

the interference flux of energy

The time-average of the heat

dissipated per second in unit

Q =
In normal incidence

P = Ps

k, so

-div P

volume

is

(4-57)

OPTICS OF METALS

div

P =

dP

-rr1-

dz

207

where P,

be taken from (4-49a) in the form

will

ft'

g
PS (D = Pa(Oe-^"

'

(Jr* - 4e"T^' + 2 ^sin(^< -

<5

2R

))

P2R

We then

have

= ^-xP 2R /e^-* + r^e ^*' +


5'

Q(C)

2r 2R cos(4p-i,{'

<5

2R

)
(4-58)

For a

later

purpose we denote the brackets as a function

now

Considering

P 2R = -r

that

r\

<f 2R

2
|

F(').

factoring

? 2R

into

the brackets, further verifying that


2

l*2Rl

e^'=

|/(OI

'r(0'2(0 =

K2R|

2
2 R|

e"^'=|/ L (ni

(^ xC '"H

r 2R e

and using the well-known material relation r\x. = c/v (a ... conductivity,
frequency of the monochromatic wave), we may write (4-58) as
v
. .

Q=

Now

all

{y

**(C)

2
I

2
I

'l(C')

the three terms in the brackets

may

averages, totalling the time average of [EK (t)

y Re

[<f R (C) <?(')]

be interpreted as some time-

+ EL(t)] 2 =

|(t), if

E is

the

absulute value of E.

We

thus have Poynting's theorem (4-57) in the form of

Q(C)

The

= aEl&t)

(4-59)

rate of energy dissipation across the layer

buted according to the function

Ohm's law

Fiji').

is

nonuniformly

distri-

This does not depend on the input

embedding and on the thickness of the layer. It is defined for all ' ^ 0, i.e.
in the whole half-space in front of the second boundary.
For a layer of specific thickness the definition of F(C) is of course
limited to the interval <0, h}. The specification of h (withf/, xn ,n g and 6>
given beforehand) determines also

P 2R which
,

is

proportional to the trans-

OPTICS OF THIN FILMS

208

mittance of the layer as a whole.

t- x ?2r to indicate

(?(') for

The function

F(') is scaled

by the factor

that layer. Fig. 4-7 illustrates this in a specific

example.

Owing to the damping factors in (4-58) we may only speak of relative


maxima and minima of Q('). These occur for those ', which statisfy the
conditions
4jt

lC

"d

/I2n

-<(2/-l)K

The same conditions hold


vector

h-(C'),

maxima
minima

,. , n

<**>

b)

for the zeros of the interference Poynting

given by (4-54).

x10S

W/cm 3

Fig. 4-7 Distribution of energy dissipation along the

layer normal.

Drawing

we

this function into the

same diagram with Q(C),

Fig. 4-8,

find the following correlation: the interference flux of energy changes

sign in such a

g(C)

way

to regions of a

One

as to cause energy shifts from places of a

minimum

maximum

Q(C).
must bear in mind that the interference flux

fluxes of the travelling

waves so that

its

is

superposed on the

local negative value does not

mean

a negative net flux coexisting with a positive incident flux. The net flux
is always positive, as can be seen from Fig. 4-6. The role of the oscillating

term w(Q consists of modifying the distribution of the net flux in such a way
as to fit the needs of the outer field (g R t r ) as well as to cover the loss
,

unevenly distributed throughout the

layer.

remains to find the outer reasons for

this kind of distribution. This


has to do with the standing wave inside the metal. Referring everything
It

OPTICS OF METALS

209

boundary and using the

to the second

01,' axis,

ference of two encountering waves by the

which for x

and r2R

r 2R

With

,<ot

cos

and f2R < 1, the interference in the


not be completely destructive. Nevertheless the standing wave

the attenuation present

will

inter-

leads to the well-known pattern of a standing

wave

nodes

one can describe the

sum

does exist in a form schematically shown at the bottom of Fig.

We may

4-8.

modulus of the complex amplitude C(C)


to be exactly equal to the brackets in (4-58). This means that the maxima
and minima of Q(C') follow the antinodes and the nodes of the standing
find the squared

wave.
This makes the picture of the energy situation complete.

Notes:
(i)

Throughout the analysis of the inner field we have considered


two encountering waves to be irrelevant. For a theoretical

the origin of the

medium to be an
and the incident wave just to exist. With respect to the
results of Sect. 2.6.6 on the internal transfer coefficients and in particular
to Eq. (2-40a), it would have been allowable in the computations to interpret
<^ R as belonging to a wave inside a layer, which has built up through multiple
analysis

it is

of course possible to assume the metallic

infinite half-space

As a matter of fact, we have already extrapolated the results


by commenting on the function F(') and showing Fig. 4-7.
The optical properties ofj metallic films are surveyed in a recent

reflection?.

to a layer
(ii)

article

by Abeles,

Fig. 4-8

[11].

The standing wave and the

distribution of the interference flux

of energy with respect to the distribution


of energy dissipation.

44

OPTICS OF THIN FILMS

210

(iii)

purposeful manipulation of the standing wave locating

its

antinodes outside of the metallic layer so as to minimize absorption is


actually involved in the design procedure leading to induced transmission
(Ch.

5.)

A more explicit application of this viewpoint has recently led to the

development of an unorthodox high-reflectance multilayer for the vacuum


ultraviolet by Spiller, [12]. The usual HLH... scheme is replaced by sandwiching the transparent

layers inbetween properly dimensioned ultrathin

metallic layers that simulate the required Fresnel reflection with tolerable

absorption loss for the whole system.

References
[1]

E. Ketteler, Theoretische Optik, Braunschweig, 1885, p. 126.

[2]

O.

[3]

S. Heavens, see ref. 13, in Ch. 3.


A. Va&cek, Tables for the Determination of the Optical Constants of Metals, Prague,

[4]

A. P. Prishivalko, Reflection of Light from Absorbing Media,

1964.
(in Russian),

Minsk

1963.
[5]

A.

I.

Mahan,

J.

Opt. Soc. Am., 46, 913 (1956).

[7]

M. Born and R. Ladenburg, Phys.


B. Salzberg, Am. J. Phys., 16, 444

[8]

A. VaSf&k, Z. Phys., 161, 26 (1961).

[9]

C.

[6]

v. Fragstein,

Ann. Phys.,

7,

Z., XII, 198 (1911).


(1948).

63 (1950).

Z. Knittl, Czech. J. Phys. 9, 133 (1959).


[11] F. Abeles, Optical Properties of Metallic films, in: Physics of Thin Films, Ed.
Francombe and D. W. Hoffman Vol. 6, Academic Press, 1971.
[10]

Space Optics

[12] E. Spiller,

ISBN

M. H.

0-409-02144-8, Nat. Ac. Sci., Washington, D. C.

(1974).

Problems

4-1

Smith chart for determining the Fresnel reflecan air/metal boundary considering r\ ]x as the
input admittance, r\, x positive. Reconsider the Opq system of Sect. 2.7
and the orientation of the complex vector f in it. Check the angle-ofreflection scale of your chart for the correct optical meaning, eg.
for r\ = x = 1 it should indicate the angle of the vector p = -0.2,
q = 0.4. Note the interplay of r\ and x in the formation of r and 5.
Practise the use of the

tion coefficient f at

Which
values?

is

the admissible range of d, if x must be confined to positive

OPTICS OF METALS
4-2

211

By analysing the complex

Fresnel coefficient f on an air/metal boundary

x] of constant p = ? 2 and of constant 5. Draw


the corresponding graphs and note their relationship. If one
wants to
obtain g nearly unity, what are the requisite trends for x if rj
is
find the loci

{i\,

fixed

and for*;
4-3

Some

What are the accompanying trends of the angle 5 ?

if x is fixed ?

authors describe the waves by exponentials of the type


exp
i
+ a>t)], which again represent the right- and left-going

\}(2nX~ nz

A dissipative medium must then be described by


a complex refractive index of the form// + jx, r\, x positive. Check
this
and the signs of the angles b and d in Fresnel coefficients. What do the
terms phase advance and phase retardation mean in either
of the

waves, respectively.

What are the new phase matrices?


Treat (4-24a, b) on the assumption that x p r\, which

descriptions?

4-4

metals.

You

N2

4-5

is

true of

many

should obtain

=ri

N =

n\ sin 2 0,

ij,

K=x

Consider the simplifications for (4-29) and (4-30) and the implication
for the angle x if, in addition, r\ <4 1
The principal angle of incidence for metallic reflection is defined by
the condition
reflected light

A =

<5

<5

n\2. The polarization

ellipse

of the

then erected at right angles to the boundary. Note the


corresponding simplification in the formulae (4-30).
4-6

is

Drawing a parallel between the power flux in an electromagnetic wave


and that in a wire carrying alternating current note that taking Re (ft) =
= /I cosy as the proportionality factor in metals (refer to Sect. 1.6
and 4.5) is analogous to applying the power factor cos e when computing
the time-average of the oscillating

4-7

power

V(atf)

3(cot

e).

Rotate the coordinate system Oxyz about the j>-axis by the angle
x so
as to make the new axis Oz' coincide with the normal
N. Find the
analytical expression for the refracted
(i)

(ii)

(iii)

damping factor along the


determined by K cos %
the

wave

(4-18)

and note that

direction of phase propagation

is

the inhomogeneity of amplitude along the x'-direction is


given by
^Tsin x
introducing the true wavelength of the refracted wave X = XjN,
the absorption coefficient is
cos XjN

(iv)

with respect to the

ous wave n

tj

last

point

- jx =

for the true wavelength X\ n

it is

possible to write for a

- j K) so
is x\r\ = k.

n(\

homogene-

the absorption coefficient

This

is

the notation to be

212

OPTICS OF THIN FILMS

found in some older

literature.

Care must be taken when using

the formulae for the determination of the optical constants in either

of the notations.
4-8

Referring to (4-5 la), consider

its

values for various r 2R and

<5

2R

medium may be backed by a further,


system. r 2R and
2R may now assume more

admitting that the metallic


possibly all-dielectric

<5

varied values than are admissible with Fresnel reflection. In particular

2R may even be positive. The only physical requirement placed on


(4-51a) in these circumstances is that it always indicate a non-negative
<5

flux of energy across 1/2.

securing this.

Note

it is

Find the locus of the vectors

now

r 2R

exp

j<5 2R

be greater than unity


(Such a value has indeed

possible for r 2R to

without violating the energy balance in toto.


been encountered as an intermediate result by Berning during the
design of induced transmission filters, see ref. {6] in Ch. 2 and Fig.6-13).

5
General systems of layers
Having found

all

the implications of the complex refractive index for

the theory of a single metallic film,

we may generalize for an arbitrary layer


we meet a metallic layer, we compute

system in the following way: any time


its

complex phase angle

formally in the same

cp

way

and the complex admittances Yp Fs and proceed


as in Ch. 2 to compute the outer field from the
,

elements of the system transfer matrix.


In the rather exceptional case that the outer media are absorbing, the

concept of energy transmittance

and the concept of energy

is

generalized with respect to Eq. (4-33)

reflectance actually breaks

down, as was shown

in 4.6.2.

As a new

situation we may also have two adjacent metallic layers.


This has no effect on the computation of the outer field; the inner fields in

these layers

may

layer in Ch. 4.

only there

is

be treated in the same way as was established for one


concepts are needed to understand the situation,

No new

a greater variety of possibilities for the interference fluxes to be

way or other.
The same is true for a

oriented this

There

is

encing

now a much

single layer

embedded between

wider scope to manipulate

its

dielectric stacks.

internal field

by

influ-

second reflection factor r2 which was discovered in Ch. 4 to hold


a key position as regards the absorption of the metallic layer. In fact, most
of the new concepts emerging in the theory of general layer systems are
its

concerned with absorption as an interference quantity. These


introduced in the subsequent sections.

Another item
ntially

as

we

still left

open

is

concerns dielectric films, but

will

be

the case of total relaction. This esseit

could not be covered

shall see, total reflection gives rise to

earlier, because,

a complex wave normal after

OPTICS OF THIN FILMS

214

we

refraction, so that

are better equipped to handle

it

after a chapter

on

metallic films.

Total reflection will be treated in Sect. 4 of this chapter. Combining

more

films leads to the further concept of frustrated total reflection,

will also

which

be given some attention.

5.1 Absorption in a layer system

Let there
layers

"be

a general systems of k layers including some absorbing

between the boundaries

absorbing layer altogether) or


lic

m and
m =

/.

In particular cases

and/or

= k +1

= m +

(one

(some of the metal-

films being adjacent to the

In this

way

embedding media).
divided into two non-absorbing parts I & II
which may consist of any combination of metallic

the system

is

and an absorbing part III,


and dielectric films, but definitely

starting with metallic films at

its

outer

sides.

The sequence of metallic films contained between m and

/,

taken in that

order and with the actual geometric thicknesses, will be called the metallic
skeleton of the absorbing stack.

The

dielectric

media in-between may be

regarded as a kind of spacer. They are not part of the skeleton, but
ed, the

subsystem

Denoting by

will

be called the

[fn { ^

core. This is the

if

includ-

system HI in Fig.

the interference matrix of the system

III,

5-1.

we may

up a transformation between the matrices of the total field in the same


way as in 4.6. 1 and obtain an expression for the time average of the net
flux of energy on the w-th boundary, which is identical with (4-44) except
that we write m and / instead of 1 and 2, respectively.
The difference in further manipulations with (4-44) is given by the
fact that the rear boundary of the absorbing system (i.e. the /-th in the whole
system) is no more the last one, so that we must replace the simple relations following (4-44) by more general ones, considering that the net flux
on the /-th boundary is not simply the right-going flux behind it.
set

It is

expedient to introduce the internal reflection coefficient for an

R-going wave behind the


r,'

i.e.

it is

/-th

e- 2J "r DR

boundary, which

is

e^*" 2 ^ =

evidently

the reflection factor of the dieletric system

by a phase shift

2<p t

due

to the fact that

we measure

e*'<

(5-1)

(Fig. 5-2), corrected

the waves at a phase

GENERAL SYSTEMS OF LAYERS


distance

from the input to

to the left

<p,

215

(without any boundary having

been crossed).

We

have shown in

of reflection on the

Sect. 2.6.6 that coefficients

second boundary of a layer apply to a right-going wave be


a composite sum of multiple

it

simple or

reflections.

We may therefore compute


E =
(s

E,'R (1

r,'

H,s

R ),

H,' R (1

r'/R)

(5-2)

k*1

RT~1

Fig. 5-1

The absorbing core of a

Fig. 5-2 Defining the reflectance

general

metal-dielectric system.

The squared moduli

2
l

= ER

'

2
IS

are

nf

E,'R

of the rear matching stack.

now
{1
2
I

{1

EH* = (E*H1S)* =

'
r( R 2

2
r,'
I

E,'R

2
I

Re

2 Re(i-;R )};

{1

(r'lK)}

2
|

r,'

2j

Im

(r'lR )}

Further write
(^llOnorm

Inserting

now

(Pms)no

"g^"

Ej'R

into the equation of the type (4-44)

(P'm)n mm {A

+ Bq d + 2C ^fc cos 0 +

we have
*,*)}

(?*)

O (5-3)

with the following notations

= Re-} mumti +

n,m 12 ml 2

+ m lt m2 2 + m l2 ni:

'A

OPTICS OF THIN FILMS

216

B = Re<

(.

cos

C sin

/Mnw*!

+ n,m 12 m*2 m vv m%2 m X2 m^

fi

= Re-j wnW*!

ft

Im {fn^fn^ w* 2 /m*i}

It is left

n,m 12 w* 2

quantities A, B, C,

fi

(5-4a, b, c, d)

somewhat laborious proof

to the reader to carry out the

C 2 - AB =
The

that

(5-4e)

are completely determined by the system III

, which may be regarded as the backing


medium for III. The quantities gD and 5'm depend on the system D and
on the /-th layer in accordance with (5-1)

alone and by the index of refraction

Qdr

No

dr

parameter of the system

2
l

I is

s 'm

>

s dk

(5-40

2(Pi

involved.

now compute

Let us

absorption as the difference (PmS


referred to the incident flux (/, 1R ) orm and denote (P) norm = P.
Since everything behind the /-th boundary

of energy ensures a relation


Pm+i.R-

It is

is dielectric,

ls ) orm

the conservation

= P(m+ 1)S where the last net flux is

Pis

essentially

therefore expendient to use the obvious relation

p ls = p;R{i-ir;R

= Pm + i.R

0-5)

and write

PmS

Pis

1R

*U-|r|R

P'ir

where the ratio in front of the brackets


whole system. We therefore have

=T

cos

^i

COS

A ~

_ p; + i,r (

l)

+ (*+

is

A
/

the normal transmittance of the

go
1

+ 2CVfocos (n +

S;R )

QD

As a generalization of what we already know about a single layer


we may conclude that the absorption of the system I HI II is proportional
to

its

transmission S, while the proportionality factor

nation of the parameters relating to

system

I are

III

and

involved only in the factor 9.

II alone.

is

given by the combi-

The parameters of

We may infer

the

that the ratio a/9

GENERAL SYSTEMS OF LAYERS

217

is independent of I and -in addition -for a given III


+ ,, it may be regulated by the choice of D and <p, If we design the backing system in such a way
that a/5 has a minimum value, then we have optimized the conditions
for III
in the following sense: with various preceding systems I the
complete system
may have different q' s and 5' s, i.e. different beam-splitting ratios, but for a
.

given 5 the absorption has always a minimum*) possible value. If the


design were not optimized in this way, then we could say that, for example
for a given q we have less transmitted light than theoretically possible.

The

ratio a/5 has

of Kard's papers,
in his

monograph

been the object of optimization techniques in many

now summarized and developed

in considerable depth

The underlying formalism

rests on the Vlasov-Kard


formulae treating the ratios 1/5, g/5, a/5 directly by recursion. This formalism
is introduced in Chapter 8 of this book. Simultaneously,
the present section

treats a/5 in terms

[1].

of the orthodox interference matrices.

In order clarify the language of confrontation between the approach


through a/5 and that resting on the concept of potential transmittance (to

be introduced in the next section), we venture to propose a terminology


for
the a/5 case, for which there seems to be no precedent in English written
literature so far.

The process of minimizing a/5


a

is

called

by Kard

prosvetlenie,

which

homonym

to the Russian equivalent of antireflection (also "prosvetlenie"). Literal translation of this term would be translumination,
and it

is

would not be homonymous with its English counterpart -antireflection.


Alternatively, English offers the possibility of confronting antireflection
with a symmetric term antiabsorption, or counterabsorption: counterabsorbing a system, or transluminating it, would then mean minimizing its a/5
ratio.

This in its turn deserves a proper name. There is no pattern for it in


Kard's vocabulary, but inevitable absorptance seems to be a convenient
parallel to the existing term potential transmittance. Whereas the latter
indicates the transmittance that could be reached in the absorbing stack
were antireflected to g = 0, the ratio a/5 represents the amount of

if it

absorption as a fraction of the transmitted energy whatever the value of


*)

This statement about a


be explained later.

tion, to

minimum

is

q.

only valid in the sense of external translumina-

OPTICS OF THIN FILMS

218

If this

have

zero, transmittance will be

is

its

fixed share of

The

effect

maximum, but absorption will inevitably

it.

of the counterabsorbing process

a transluminated system,

is

i.e. one with induced transmission. This closes the circle of correlations
between the two possible ways of looking at the problem.

5.2 Potential transmittance and absorptance

Another useful way of looking at absorption is to follow the distribution of net power fluxes across the system. We shall confine this discussion
to normal incidence.
Let us introduce the concept of net power-flow ratio

PBS

PBR

PbL

+ WB

between any two control planes

A and B.

In accordance with the results of the preceding

power-flow

is

written as the algebraic

corresponding interference fluxes,

if

sum of the

chapter, the net

travelling fluxes

and of the

any.

If the control planes are just the left

->

7
(5 7)
ft: "

^"P^-Par-Pal + w.

and right

faces of a simple

boundary

owing to the boundary conditions.


If A and B are the left and right inner surfaces of an individual absorbing layer v of the system, then cr AB = ct v may be computed as (compare the
setting up of Eqs (4-49, 50))
then

ctab

l_
CTv

= *J
*

'

rR

+1 > 2

v+1)
v+1)
sin[-<5 R
+ 2-^rR
]
(

Hi
1

<r

v+
R

1)2

2 -^-

A
2

V+

!)

sin

r>; -

+
d '>]

I*.

Gv
(5-8)

v+1)

where rR

v+1)
v+1)
rR
expj<5 R

the system of boundaries

{v

is

the cumulative reflection coefficient of

1}

and the other notations

are taken over from 4.6.2.


Finally, if

respect to (5-3)

and B are the boundaries


and (5-5)

and

i-KR r
-

mS

of Fig. 5-1 then with

(5-9)

GENERAL SYSTEMS OF LAYERS

219

It is also possible to express a


m in terms of the interference matrix
between m and / and of the input admittance concerning the backing system.
This will be developed in 6.4.2.
,

Using the net power-flow

we may

ratio systematically across the layer system,

write

Pir

Pil

0-2P2S

=
=
=

CTkPkS

Pis

CT iPis

Multiplying

Pk+i,R/PiR>

we

these

P'is

P2S
Pas

(5-10)

Pk+l,S

Pk+1

and introducing q

equations

= P 1L /P 1R

obtain
(1

0)0-10-2 -..o-k

(5-11)

For the completely loss-less case (a


1, v = 1, 2, ...), the equations
(5-10) state the obvious fact that the net power-flow across the system is
a constant, equal to 1
x.
q

In the presence of absorption, the

initial

gradually reduced to the final output value

net power-flow

is

t.

Berning and Turner have discovered the expression

V=
appearing in

(5-1 1) to

be a very useful concept in the optimization techniques

for the performance of


called

it

combined

potential transmittance,

It is

(5-12)

l-Q
metal-dielectric

systems.

They have

[2].

related to the ratio a/r, introduced earlier,

'"(

t)""

by the formula

(5-13)

Obviously, P obeys the same general rules as oc/t with respect to forward
and backward manipulations (see end of 5.1). In interpreting potential

we may then state the following:


should be considered as a system function rather than a fixed
quantity. It indicates the maximum energy potentially to be transmitted by
an absorbing stack if the net input radiant flux is maximized through
transmittance

OPTICS OF THIN FILMS

220

manipulating q down to zero by forward dielectric extensions. Alternatively


may be said that W represents the energy actually transmitted per unit

it

net flux on the incident side.

For a given absorbing system (or subsystem) the function


maximized by proper matching of the backing subsystem. Then

Y may be
f max is the

maximum of all the potential transmittance maxima T max = W corresponding


to the antireflected stacks. *P

is

of the whole system and by

ratio

of course identical with the net power flow


(5-1 1)

it

equals the product of the net power

flow ratios of the individual layers, which are given by formulae of the type
(5-8).
It is fully justifiable

to also call these potential transmittances (and

denote them by W), although no relation


context. This will

become evident

if

we

like t /(1

q v)

seen in this

is

independent of

realize that (5-8) is

the structure of layers adjacent to the right of the v-th layer and determining
v+1)
( v+1)
expj(5{l
As a function characteristic for the metallic film it has

rR

a definite physical meaning whatever the environment of the layer.


clear that for a simple
will

It is

then

embedding between two half-spaces the same function

be identical with an expression of the type

(5-8). (5-1 1)

may

thus be

replaced by

V = 9 t T2
There
either

By

is

...Vk

(5-14)

dramatic literature on the design procedures controlling

or a/t, [14]; see also references in Ch.

(5-14),

6.

and with respect to some unit values

in the dielectric sub-

systems, the potential transmittance of the complete system

is

the product

of the !P-functions belonging to the individual parts of the metallic skeleton


+
+
computed in the context of the system: the r' 1) and S ^ 1)
on the parts of the design (including spacers and skeleton)
(

in (5-8)

depend

to the right of

the v-th layer.

Obviously, the complete system will attain

component

its

maximum

value

if

the

potential transmittances of the skeleton are in their turn maxi-

a formidable problem, because regard to this internal trans-

mized. This

is

lumination

may

interfere with the usual intentions

of the design which

combines metallic and spacer layers to obtain spectral

filtering effects.

Basic formulae securing internal translumination are presented in the

mentioned monograph by Kard. In all its generality


a routine process leading to practical solutions.

The Fabry-Perot type


layers

is

filter

with

its

this

has not yet become

simple skeleton of two metallic

investigated for induced transmission in 35 of the

same mono-

GENERAL SYSTEMS OF LAYERS

22 j

graph. Another approach to this problem concerning an uv application of


filter is described in [5].

the

simplified approach to induced transmission is to regard the


absorbing core as a unit, again responding to outer extensions in the two
ways described. In fact, the expressions for the inevitable absorptance (5-6)

and for the potential transmittance

(5-13), are

formulated from this point

maximum of f reached in this way may fall short of


maximum attainable within the given metallic skeleton.

of view. Clearly, the


the actual absolute

We

shall call this external translumination.

only one metallic layer, the difference between the two


We shall mostly confine ourselves to this simpler case.
The corresponding design procedures will be further evolved in Sect. 6.4.*)
If there

is

treatments vanishes.

Absorption defined in the usual way as a fraction of the incident


P 1R can now be expressed as

energy

= l_

_ T= (l_

e )( 1

CTiCj2

(5-15a)

CTk)

or equivalently

t(CTiCT 2 ...

By properly manipulating
alternative

Ok)"

the system

1]

(5-15b)

we may

(5-10),

ways of expressing the contribution xv of the

whole absorption a
a,

= Zav

...

Apart from normal absorption, the quantities

We

*\

o\,

it

as

(5-16b)
1

...o-k )- T

(5-16c)

suggest the definition

coefficient, expressing the loss as

denote

A=

(5-16a)

incident net flux.

three

v-th layer to the

= (1 - Q) c^o-2 <* -i(l - o- )


=
- 0(o- v+1 o-v+2 Or)= (1 -e)ofi2 ...o-v _ -(<7v+1 o- v+2

of another absorption

fiid

a fraction of the

and may compute

Ot<J 2

...

ak =

(5-17)

*) It is interesting to note that the ratios (1


g)/r were found of use in disentangling
the formulae for the reflection of light on a metallic layer supported by
a metallic medium.
Computer-aided solutions for rj 1 and x were thus facilitated, [25].
t

OPTICS OF THIN FILMS

222

It is

when

correspondingly called potential absorptance, reaching

V = W ma Some
.

maximizing A, which

is

its

minimum

rejection problems of filtering techniques call for

secured by keeping

if/

low.

The paper

[4]

deals with

this situation.

For a

single

component

layer of the system the potential absorptance

is

PvS

A=

Pv+1

'

,,+1

CTv

vS

+ ^ 2 fiv+1)2) +

(1

-<ar )(l

- <THV+1 +
>

4x v
r

^-

r*

+1

>sinp;cos|>;-# +1) ]

>sin|>;

"v

4V+1) ]
(5-18)

Suppose now that only one layer


is

at a time is

absorbing and that a D

Then absorption in that single


coming into it would be constant

constant for each layer.

terms of the net flux

Av =

On the

1,2, ...k

(5-19)

other hand, the absolute absorption would not be constant because

we must

write
,

where

- a

= a

film, expressed in

= (!- GO

Q' is the reflection coefficient


y

that the v-th layer

We know

is

why

(5-20)

of the whole system with the condition

net-absorbing with a ratio o\

that (5-20) truly determines

structive to see

o)

what

is lost,

but

it is

also in-

(5-19) is not competent. (Although, in a way,

it

may

sound reasonable to state that "what is lost is what actually enters".)


Consider first of all a loss-less system. The equations (5-10) state that
the net flux

is

constant across the system, but this does not

that the net difference


internal fields

is

formed of constant terms.

On

mean

the contrary, the

may vary considerably and we may expect situations according

to Fig. 5-3.

m\
Fig. 5-3 Distribution of the net fluxes

ft

across a layer system.

GENERAL SYSTEMS OF LAYERS

2 23

In a dissipative system, this scheme


ations, but

it still

may

be distorted by some attenu-

holds that the average levels are varied.

Since by (4-59) the energy dissipated per unit time and volume
portional to

(f i S , it is clear

proportion to the energy


Starting

we may compute

(1

pro-

levels.

from the energy balance between the

j o E 1R

is

that absolute absorption will be distributed in

q)

o- l0 2 ...

1st

and

v-th boundaries:

av _ t = -- n , E;R
|

2
I

the squared modulus of the internal field in the v-th layer

as

l^l

--^^^^-^...^.,

This relates the absolute

contained in

The

and av

it

layer

the internal reflection coefficients

actual computation

transfer coefficient

but

field intensities via

(5-21)

from

is

not simpler than that using the internal

to the v-th

medium

(see subsequent discussion),

gives us straightforward information for the case that only the v-th

absorbing and the absorption

is

(5-21) is roughly constant,

at a2

...

is slight.

o,.,

Then, for any

and G,

v, 1

(v+1)

q in

The

intensity of the internal field is inversely proportional, to the value of


(v+1)
shall correlate this result with some conclusions of the
1
.
e

We

next section.

5.3 Distribution of absorption across a layer system


for tiie case of weakly dissipative media

We

shall

now

continue the discussion in terms of the internal

fields,

using for absorption a formula of the type (4-55c), but written for a general

embedding I
Denoting

II

of the absorbing layer

T Or, fat

v.

*m

"0

where

T| 2

T=l-r, LrIIR^ 2 e- 2j S
= + r*Lr* R<&i - 2rILr IIR * 2 cos (2^ 1

<5

IL

^ IIR)

OPTICS OF THIN FILMS

224

we have
v

*ov,rr|(1

*J)(1

*?-m)

+ -^-^v'-iiRsin^cos^; -

m)l
(5-22)

The bracketed

factor

a combination of the individual and induced

is

capacities of the layer to absorb, given

The

by the

amount of energy absorbed

actual

going flux t 0d RR present at the

left

is

v-

and

II-terms, respectively.

then proportional to the right-

face of the layer.

With the outer embeddings I and II given, a D is strongly dependent on


-2
the term |T|
which has a resonance character: changing the phase
angle <p[ inside the layer may bring about substantial changes in t 0u rr and
thus in a D These changes are more pronounced than those ocurring simult,

aneously in the numerator.


It is

worth remarking, however, that speaking of resonance has

sense with metals having large

*:.

small geometric thicknesses, where very

(compare notes on
slightly

The following

p. 197).

little

These can be kept transparent only with


little

interference

real

occurs

discussion applies therefore to

absorbing metals.

Apart from
electric systems.

we

these,

composition of the layer

phenomena

often meet with

weak absorption

This "spurious" absorption


(e.g.

material. This scattering

is

Absorptions of
attenuation factor

this

either

in purely di-

due to the chemical

imperfectly oxidized metallic films), or to such

as the scattering of light

in collimated interference

is

on the granular

structure of the film

equivalent to the loss of amplitude taking part

summation.
kind manifest themselves mainly through an

slightly less

than unity,

2
<#r

0.99 or more, the

refractive index remaining essentially real.

Interference

phenomena

in such systems are

resembling those for metallic films in that

%<

computed by formulae
1, but having unlike

metals real Fresnel coefficients.


There is no easy way of determining the granularity and computing <$T V
from it. We may of course choose <% v empirically so as to fit measured
results. Many interesting conclusions may be drawn from such numerical
studies.

We

shall continue our general discussion for weak absorptions of this


The formulae then become simpler owing to x = (no interference
fluxes) and, in addition, allow interference to become effective: the phase

kind.

angle 2<^

2<p

in the resonance term

\T\ 2 may now assume a range of

GENERAL SYSTEMS OF LAYERS

225

values without the attenuation factor

neutralizing the changes of the

<$r v

cosine.

Let us take as an example an

and carry out

We

its

all-dielectric interference filter (Fig. 5-4)

analysis in A mM

= 4AL

4A

then have for the central layer:

= Psji = P9/16'

2<p 8

2it

and

<5,

5 im

it,
g lL
value (1

minimum

attains a

q 8/1 )
for the dielectric system I,
.

Having in view that t 1/8 = 1 - g l/8 - 1 - g 8/1


we can write by (5^22) for the central layer in the resonance condition
suffers from an attenuation factor ^
s

(1

2,

Fig. 5-4

to

08/1

10l1

12

16

15

*LL

An ADI

Coming now

(5-23)

if it

*S)

1Z3t5G78,9

q iir

10

12

11

13

ft

IS

interference filter analysed for spurious absorption.

any of the A/4

layers,

one might be inclined to expect

antiresonance, but owing to a cooperation between the phase changes 8 v/l

and <5 v+ i /16 , which always total n, we still have resonance. Further we find
that g vl
q v+1/16 (everything concerning the 8 and q follows from the

amalgamation rule for A/2 layers, see 2.6.4). The formula (5-23)
valid for any a v v = 1,2,... replacing the index 8.

is

therefore

From the

= ^2

arily different

may

=
is unlikely to ever have %
x
depend on the geometric thicknesses, which are neceswith two adjacent layers. In a tuned alternating system one
experimental point of view one

since the

have

% =

<>U V

<% 5

...

is

<% 3

Since our discussion

and <% 2 <$f4 =


aimed at discovering the
.

absorption with differently positioned layers


the trends of a v with v for a constant <^ v

latent dangers of

to analyse

etc., it is justifiable

<>U.

only in the spacer layer

It is

we adopt for ^ the value <% % = ^r2 (in the first order).
We may now state that for a given <W V = <%, a v varies with the order
number of its layer through the dependence on p v/1 this in its turn is an

that

increasing*) function of v for

*)

Not

8,

while

it

to be confused with the oscillating g-sequence of

taken in reference to

air.

e vl

is

always taken relative to the

again decreases along

HG,

LHG,

HLHG,

medium from which

it is

seen.

OPTICS OF THIN FILMS

226

symmetrical values for v

but this

is

9.

In other words: each layer

is

in resonance,

stronger or weaker.

The inner

layers will thus

have a

tendency to absorb

relatively larger

energy. In particular, the difference between a 8 (the spacer layer absorption)

and, for example, a 6 will essentially be one of position rather than of geometrical path.

and a 8 with

On the other
n 8 = n L may

hand, the difference between a 8 with n s

be determined by the

specific material

nH
con-

ditions.

These tendencies
field intensities as

may be correlated with those for the magnitudes of the

derived from (5-21) or, alternatively, from (4-59): large

amounts of energy are dissipated when intense oscillations are set up.
Let us show a table for a monochromatic system of the ADI type with
the dependence of t and a in the central wavelength on the order number
of a single absorbing layer and on other distributions of %:

Table 5-1
Effect of energy attenuation factor If

0.995 in individual

H and L layers

of the

G (HL) 3 H (LL) H (LH) 3 G. n H = 2.35, L = 1.38, g = 1.52. Layers numbered


from bottom to top. For v = 9, 10, ... the results are symmetrical about the centre v = 8.
system

(Compare

4rin:

also Table 12-2 concerning a tuned reflector.)

T max

0.994

0.992

0.988

0.981

0.968

0.946

0.005

0.007

0.012

0.019

0.032

0.053

10

Win:

-3

allH

allL

allHL

max

0.912

0.742

0.762

0.645

0.516

1.000

0.086

0.238

0.223

0.316

0.408

0.000

0.002

0.020

0.014

0.037

0.074

0.000

in

none

GENERAL SYSTEMS OF LAYERS


So

far

we have examined

227

the all-dielectric system in the central wavemakes the reasoning more difficult:

length. Leaving the tuned condition

one cannot, for example, use the amalgamation

way of

seeing the trends

rule, etc.

to start with formula (5-20)

is

where x = 0.
weak absorptions

An

alternative

and use the now

simplified formula (5-18)

In addition, with

- q' to be - q, where
system. We have, with % 1,
take

.-(!-

<)<1

a.)

(1

in one layer at a time

is

,)(1

- *)J JL*I3l^IL
4
+1 2
l-<ar |7

(l-

g )(l-r*)

>|

-L

J+ ^
+1)
l-li

(5-24)

The last fraction is the ratio of the so called gross power flow
power flow (in the absence of interference fluxes). The formula
(for a given

The

<8r)

a increases with

we may

the reflectivity of the non-absorbing

v+1) 2
r
,
|

gross to net power-flow ratio

to the net
states that

[5].

sometimes expressed by means of

is

the standing-wave ratio

+ l# +1)
l-|rRv + 1)

_
SWR =

(5 " 25)
|

as

Gross

p.

-f.

_ (SWR) 2 +

1
(5

2SWR

Netp.-f.

"

26>

having the structure of the inverse Fresnel coefficient of


transmission.
For a given layer position and attenuation <%, a varies with

the reso-

nance factor, which essentially means that it varies with the


transmissivity
of the whole system: more transparent systems are likely to
absorb more.
But this is not an absolute rule and one may encounter cases
outside tne
tuned conditions, where more transmission is accompanied
by less absorption or, alternatively, where transmission
oscillates at the cost of reflection alone.
It is instructive

Fig. 5-5

to consider

shows the functions

tuned for 0.56 urn, with H


attenuation factor

W = 0.995

constant and absorption

some numerical examples:


x(k), (A)

2.35,

(i.e.

<^

nL

main features more conspicuous. All


the same absorption factor.
the

is

for a 16-layer A/4 system 1(HL) 8

1.38.

0.99)

slightly

was chosen

exaggerated

in order to

layers are supposed to suffer

make
from

OPTICS OF THIN FILMS

228

We

see that in the stop-band region absorption

is

relatively low. It is

definitely smaller than the sum of 16 absorptions of the individual layers,


if they were singled out to simple environment 1 LG or 1 HG. In this case

the energy loss

is

very nearly

slightly less (0.75 percent) for

% 2 = 1 percent for low-index layers and


n H = 2.35, so that the sum would be about

13 percent.

On leaving the stopband,

<x(A) rises

to 32 percent,

which

substantially

is

more than the simple sum.


These two facts show what we have alleged on several occasions:
absorption is an interference quantity.
Another feature to be observed in Fig. 5-5 is the correspondence

between the

oscillations of t(A)

and

portionality between both factors.

in the blue

maxima of x(A),

which speaks in favour of the proHowever, there is a growing tendency

a(X),

while those of a(A) are decreasing.

further numerical experience

almost the

full

amount

is

that, with low-reflecting systems,

of absorption incurred

for example, multilayer antireflection films

they

may

not yield enhanced transmission.

The loss
may become

is

still

On the

subtracted from

t.

Thus,

deserve their name, but

other hand,

it is

q that

negligible in the strictly

is

tuned

affected in high-reflecting systems.

is

cases as in Fig. 5-5, but

quite serious with broad-band

reflectors designed

it

by any of the methods of contiguous

stacks, Sects. 3.5.1,

6.3.5.

type. If the
Suppose we have two contiguous stacks of the HLH
"blue" stack is seen by the incident light first, then the red part of the spectrum
.

must pass

this stack outside

of

its

stop-band, incurring a lot of absorption.

Then it strikes the lower stack, tuned to reflect the "red" part of the spectrum,

Fig. 5-5 Absorption as a function of A in a tuned 16-layer stack suffering from, spurious
losses.

GENERAL SYSTEMS OF LAYERS


and

travels

back to

229

up the broadened stop-band. Again it incurs losses


way dips of q in the originally flat p(A) curve are

fill

in the top stack. In this

caused in the long-wavelength part. In the converse situation blue dips are

formed.
Prediction of absorption loss in weakly dissipative media
[6]. The
The effect of weak absorption
was analysed in [8].

concept of potential transmittance

in

is

invoked for

was

treated

this in [7].

by the turning value method

in monitoring

5.4 Total reflection

We
n

>

now

shall

consider a boundary between two dielectrics /i with


O sufficiently large to make

n lt and with the incidence angle

W Sin6>0

ine,-

>1

(5-27)

Recalling the formalism in 4.1, Eq. (4-1) &(4-6a),


(5-27)

it is

evident that

6> x in

must be complex of the form

= 0[

0\ =

where

+j0',

0';=argcosh(M^2-)
In accordance with 4. 1 the bracketed expression should be denoted as s'
so that sin

Energy considerations

By

(4-3)

>

1),

s'.

& (4-6b)

call for the positive sign

with 0'[

we compute
cos 6>!

= ]c" =

-j Vs' 2

(5-28)

Evidently the remaining components of (4-1) and (4-3) are zero:


s"

c'

0.

Again

inferring

normal, (4-10)

from the complex

& (4-1 la, b),

this is

making

(Ix

kz)s

xs'

zc".

is'

wave
form

the existence of a complex

now found

+ jkc"

to have the special

230

OPTICS OF THIN FILMS

The time-space
exp

C+koZcX) exp

(Evidently n t s'

This

factor of the refracted

n sin

[j(co*

is

then

xs' ni )],

= -Vn 2

n^c"

wave

sin 6>

InX' 1

(5-29)

n\).

a special case of an inhomogeneous wave, having its phase


normal parallel to the boundary (while the attenuation normal is perpendicular to

+z

it,

is

as usual.) Such a

direction, since c"

<

wave

is

called evanescent. It is attenuated in the

0.

Using (4-28) to compute the characteristic admittances behind the


boundary and introducing the relative index of refraction n = njn (< 1),
we can compute the amplitude Fresnel coefficients to be

cos 6>q

- j Vsin 2

cos

+ j Vsin

-n

rp

-n -n
====
=

Vsin
-^
2
Vsin
j

's

cos

n cos

O
O

(5-30)

2cos

cos

+ j Vsin

^=^=
+
2n cos

.
t

'

>

j Vsin

cos

(5-31)

Obviously

Ifj

=|rp

2
|

(5-32)

which means that all the incident energy is reflected back to the input medium.
This

is

why such a situation is

called total reflection.

The minimum angle

OC
arc sin (n^n^.
OC
There remains the peculiar fact that, despite the total reflection of

for which

s'

1 is

called critical

and

it

holds

non zero amplitudes f


behind the boundary.
These two facts can be reconciled within the concept of the evanescent wave

energy, theory indicates

established above.

We

In fact, let us compute the average flux of energy in the second medium.
can formally use the results of Sect. 4.5 where n = n x x =
and the
,

We

wave normal s is complex because of total reflection.


a" = k c ". Eqs. (4 33a, b) yield for both polarizations

-^ K,p
which means that energy

2
I

n t s'i

is

= -^"o sin

<f s>p

I
\

have

a'

is',

(5-33)

being transported parallel to the boundary,

making no contribution to the time averaged balance of energy across the


boundary: the oscillating field inevitably has fluctuations of the normal

GENERAL SYSTEMS OF LAYERS

231

tr

tr

tr

u
The radiant flux of the evanescent
wave behind a totally reflecting boundary.
Fig. 5-6

Fig. 5-7 Totally reflected

beam

of finite

aperture: problem of the distribution

of the radiant flux in the transition regions


of the evanescent wave.

component of the Poynting

vector, but their

mean

value

is

zero.

The only

non-vanishing values are just (5-33).


In the case of a general azimuth of polarization, there exists an additional flux of energy

We

due to interference between the two basic components.

have already shown in 4.5 that

this flux is

boundary, so that nothing qualitatively new

always directed along the

added to the situation

is

desribed above, apart from the fact that the third contribution

is

at right

angles to the plane of incidence.

In the following

we

shall confine ourselves to the basic states

of polari-

zation.

Denoting either of the expressions (5-33) as P(0), the


a distance z from the boundary
P(z)

flux

of energy at

is

P(0)exp [-2k z Vo

sin

6>

2],

or s

(5-34)

I. For further work we denote the square root as Q.


shows schematically the fluxes of energy above and below the

the direction being


Fig. 5-6

boundary.
This situation, although peculiar,

may now

compatible with the Maxwell boundary conditions.

be understood to be

Some

further strain

on

provoked when considering the incident wave of limited


a perture. Applying the scheme of Fig. 5-6, we arrive at the contradictory
physical intuition

situation,

is

according Fig. 5-7: while any cross-section like

may be interB and C are

preted in terms of Fig. 5-6, the tangent fluxes in the outer planes
untenable.

More

exactly, they are untenable unless

area between the zero state and the


are touching

on a

delicate subject here,

literature as diffraction

the field

full

is difficult.

we allow

for a transition

tangent flux according to A.

We

which has been discussed in the

of non-planar waves,

etc.

detailed description of

OPTICS OF THIN FILMS

232

We shall present here a simplified picture enabling at least the computGoos Hanchen shift, [9]: by this we mean the lateral
beam relative to the incident beam (Fig. 5-8).
has been observed and its value may be determined in the fol-

ation of the so called

displacement

This

shift

at

of the reflected

lowing way:

The

total flux, traversing

a central plane

as an integral over (5-34), extending from z

in the x-direction

towards

is

given

infinity.

We have
oc

P(0)exp(-47tA

_1

zO)dz

AP(0)
(5-35)

4tiQ
Since there

is

no macroscopically observable exchange of energy

of the boundary, the value f^ builds up somewhere


B
in the region B' B from that part B B of the incident flux, which is contained in a cross-section d and which infiltrates into the second medium
because B' B is a transition space, where complete total reflection is not
along the part

established.

To
into

fm

the right of A, the flux

C C

eventually channelled out via

is

of the same cross-section

The energy balance requires


we obtain

ing (5-33) and (5-35),

as the

f x while d = x cos
Goos Hanchen shift

0q

4k

d=

CC

d.

tan

6>

Combin-

(5-36)

p - sl
'

(according to the state of polarization).


is based on the idea of Renard, [10]. More sophisticated
phenomenon may be found in [11 13] (considering, for

This derivation
analyses of this

Fig. 5-8

The geometry of computing


Goos Hanchen shift.

the

Fig. 5-9

The scheme

for frustrated total

reflection.

GENERAL SYSTEMS OF LAYERS

233

example, spherical waves or Gaussian beams). The theory of the

Goos

was extended to multilayered media in [14].


shift was proposed in [15].
Finally let us remark that our computations were relatively simple,
because we were only concerned with time-averaged fluxes of energy. The

Hanchen

shift

A refractometer based on this

time-microscopic look at the distribution of

complicated and

may be found

two adjacent media are then

field

amplitudes

work

in Schaeffer's

[16].

is

The

much more
fields in

the

than they appear in the present

less disjunct

description.

The phenomena connected with


examined in various

The behaviour of light


remarkable way,

and

small) thickness

if

if

The

in the conditions of total reflection

the third

would not be

(considered as isolated)

It

some

is

changed

medium n l has a finite (and sufficiently


medium n 2 behind the second boundary has

>

i such that the reflection between 0/2 at

total (Fig. 5-9).

of energy originally occurring at the boundary 0/1

total reflection

there being

steadily

in Ch. 12.

the second

a higher index of refraction n 2


the angle

wave are

17]

(FTR)

5.5 Frustrated total reflection

in a

the evanescent

situations, see also references [13

is

now frustrated in that it becomes partial reflection,

lossless leakage

of energy from the

first

should be stressed that the boundaries 0/1 and 1/2 are

ing,*) the partial transmission

of interference in the layer

and

reflection being

to the third media.


still

totally reflect-

due to a peculiar kind

In order to see this in terms of the electromagnetic theory,

let

us

establish the interference matrix for the situation according to Fig. 5-9.

Using some of the

(p

n^i
2it

l=

sin ^>j

*)

results in 4.1

cos

= j sinh

<p'[

we have

=
,

2k
-j -j.

cos

h^_ =
,

<p t

cosh

q>'[

This statement holds about boundary 1/2 in the sense that by

transmit energy from the evanescent

ing characteristic admittance

-j^!

itself it

could not

wave existing to the left of it, because the correspond-

is pure imaginary (see below). If 1/2 is considered isolated


a homogeneous wave at grazing incidence from 1, then there is of course
transmission of energy at the critical angle
2 1 in the emergent medium.

and there

is

'

OPTICS OF THIN FILMS

234

Further
n t cos

The

*ip-

=
COS]

MQ

(5-37)

interference matrix has the elements

m lt = m 22 =
y

= jQ,

cosh

being taken as

Ylp

q>'[

1
sinh q>\
m 12 = -t^-

or

Yu

cosh

sinh

<p'j

Inserting into the formula (2-27),

cosh

m 21 = Y

q>'[

(1

ql

(1

we

obtain

b) j(c d) sinh
+ b) - j(c + d) sinh

(p'[

(4-38)
<p'[

where

b.=

n 2 cos
n

2 cos
n

&2

cos

'

cos 2

'

cs

Cp

n 2 cos

n cos
"2

(5-39)

d=- n

n t cos6> 2

The squared modulus of (5-38)

is

6>

cos

nod

no longer identically equal to unity

total reflection is frustrated.

Since no absorption

is

involved in these phenomena,

we

obtain normal

transmission as a complement to reflection:

1.0,

cos

6> 2

cos

6>

(5-40a)

0 T P

0.5

FTR

Fig. 5-10. (a) Partial reflectances g , q s in dependence on A/A in a


system,
p
(b) Dispersion of some partial reflectances taken from part (a) of figure.

GENERAL SYSTEMS OF LAYERS

235

or
T

The numerator of

known

value

is

(5-40b)

normal

flux across the

to n

sin

n 2 sin

directed in the 6> 2 -direction

is

whole

of the boundaries. Since the emerging wave

homogeneous (owing

to be

this expression is the net

Poynting vector

real), its

q) cos
COS,

layer, including the outer faces


is

(1

and

being

its (relative)

obtained by (5-40b).

Fig. 5- 10a

shows some typical functions for a

specified index

com-

bination.

Choosing now h 1 in such a way as to make q = q 0s or g 0p for 1 one


may compute g s and g p in dependence of A. These curves, shown in Fig. 5-10b,
enable us to assess how far such a loss-less FTR semireflector can replace
,

the classical

Ag

or Al semireflecting films. These possibilities (though

necessarily limited to either of the polarizations) were recognized as early

as 1947,
papers.

[17], and used for the design of FTR filters, [18],


Under the term optical tunelling frustrated total

sively reviewed in [21] including the case

[19], [20]

and other

reflection is exten-

when some absorption

is

present

in the leaking film.

computed example for an FTR filter is presented in Fig. 5-11. The


shows two differently dimensioned filters as regards the

figure actually

spacer thickness

A2

actual fact there

is

the s-peak as the

more pronounced

so both

maxima may

always one tuning of


one.

lie

at the

A 2 which

same wavelength. In

can

serve, for

X//m
Fig. 5-11

= 2 =
for s

54.4,

when

FTR

filter

(highly schematic).

=h 3 = 4000 A. A 2 = 4080 A for p,


m 0, and 3700 A for s when m = 1.

ht

example,

The accompanying /7-peak must be

l&ik

OPTICS OF THIN FILMS

236

by an additional polarizing device. {Kurd, [20], discusses filmoptical means of evading the two peaks.)
The situation will become perspicuous if we refer to the formula (7-22)
rejected

for the

maximum

of a Fabry Perot device (which the

FTR filter essentially

and realize what phase-shifts 5 actually apply in the given case. In


computing the data for Fig. 5-1 1 it was found that, at the chosen thicknesses
h t = h 3 = 4000 A, <5 p 253, d s x 48. (These values show very little
dispersion with X.) Hence for A max = 5890 A we have in the zero order
(m = 0) A 2p = 4080 A, A 2s = 760 A. Using m = 1 for the s-case one has
A 2s = 3700 A. It is these three designs that are shown in the figure.
is)

It is

now

also clear that, for

A 2 = A 2p = 4080 A

5890 x 4080

3700

interpreted as

A 2s

positioned at approximately

the nearest accompanying 5-peak will be

6500 A (neglecting the weak dispersion of

S). Its

order will be by one unit higher, whereas the accompanying peak of the

same order (m

would approximately

0)

at

lie

5890 x 4080

760

3.16 /im.

Despite the higher reflectivites for the s-component, the half-width

of the s-peak of the same order

than that of the />-peak. This


order

m+

djn,

Let us

i.e.

m positioned

is

because

at a given
is

2 max

by the actual thickness of the spacer

now pay some

is

much

greater

determined by the effective


layer.

attention to the inner field of the FTR-film.

Since the optical admittances of the outer media are both real and those

of the film medium pure imaginary,


of reflection on boundary

how

it

follows that the Fresnel coefficients

and 2 are unimodular. One may then wonder

the leakage of energy through the film

The answer

is

is

accomplished.

found by having recourse to

Sect. 4.5.2,

Poynting vector of two encountering waves. The

for metals are easily adapted to the present case, where the

normal

is

(with x

due to evanescent waves.


Recalling (4-1 5a, b) and using some

\j/

by

complex wave

facts established in 4.1,

we have

0):

From

concerning the

results originally derived

N=

r\a'

K =

xa'

(4-17)

(4-48).

sin x

+ xa" =
- ria" =

o sin

r\a'

-rja"

= in sin 6>
= -n^'k = kl
tn^s'

N' 1

=> %

n/2

which makes

GENERAL SYSTEMS OF LAYERS


Further, a' equalling

237

the angle 0' defined in Fig. 4-1

is',

Using these values in (4-49a) the normal net

also n/2.

is

flux inside the layer for

the s-polarization we find that the only non-zero component of this flux

given by the interference term:

PJO = Pr(H exp (


where PR(C)
where P(0)

is

*')

^~
N

r 2R sin ( -<5 2R )

(5-41)

R-wave
computed by a formula of the type (5-34),
of the evanescent R-wave, built up as the internal

the value of the non-projected (total) flux of the

is

in the given plane. In our case

wave

is

now the flux

it is

inside the FTR-film.

Using

(2-40a),

we may

write

where a prime

is

$s

'oi,RR/s

again used to denote "behind the boundary".

and (5-34), we obtain the z-distribution


of R-flux, directed of course along i. Its absolute value is used in (5-41) to
compute the normal flux. Changing variables from ' to z = h - C, we have
Inserting this value into (5-33)

Px( z )

-g--

8*

t 01 ,RR/,

2
|

sin

exp

(-~ zQjx

P(0)

^L--.

x S xp\-~(h-z)a\.
A
|_
J n sin

2K/N
aK

[-Im(r
2R )] =
v 2RJJ
L

O
r 2K

n\ cos

-Im (f2R ),

0\ +

sin(-d 2K)

o sin

but also

0\ -

f2R

2
\

nl

n 2 cos 6> 2

This shows two things:


(0
(ii)

ps*(z) =

Pint, independent of z

(it

does of course depend on h)

rearranging
C

-n~
""

<^ s

2
I

incident flux

2
i,

RR/s

2
.

1
'

i2K

-^cos
0

energy transmission

=P

cos

OPTICS OF THIN FILMS

238

we may

write

Pint

Po

cos

which reads: it is the contant interference flux P )NT which feeds the normal
flow of energy onto the second boundary in order to maintain the normal
outgoing flux of the whole layer.
,

In a similar manner

we should proceed with

(4-50a), there being

by cos 20' = 1
Apart from the tunelling phenomenon there is a certain effect of lowrefracting single dielectric films placed on the rear side of the totally
a change of sign in Im(f 2R), but

reflecting

this is cancelled

hypotenuse in refractometers. This

is

discussed in [22], [23], [24].

References
[1]

P.

G. Kard, Analysis and Synthesis of Thin Interference Films,

(in Russian), Tallin,

1971.

H. Berning and A. F. Turner, /. Opt. Soc. Am., 47, 230 (1957).


J. Hemingway and P. H. Lissberger, Appl. Opt., 3, 471 (1967).

[2]

P.

[3]

D.

[4]

P.

[5]

in Ch. 2.
Am., 52, 753 (1962).
D. J. Hemingway and P. H. Lissberger, Opt. Acta, 20, 85 (1973).
H. A. Macleod, Opt. Acta, 20, 493 (1973).
F. Goos and L. Hanchen, Ann. Phys., 1, 333 (1947) and 5, 251 (1949).
P. Renard, /. Opt. Soc. Am., 54, 1190 (1964).
H. Schilling, Ann. Phys., 7, 122 (1965).
K. V. Lotsch, J. Opt. Soc. Am., 58, 551 (1968).
B. R. Horowitz and T. Tamir, J. Opt. Soc. Am., 61, 586 (1971).
T. Tamir and H. L. Bertoni, /. Opt. Soc. Am., 61, 1397 (1971).
G. Guillemet, Trans, of the ICO Conference on Optical Instruments and Techniques,
London, 1961.
C. Schaffer, Ein fuhrung in die theoretische Physik, Bd. HI/1, Berlin, 1950.
P. Leurgans and A. F. Turner, 7. Opt. Soc. Am., 37, 983 (1947).
B. H. Billings, J. Opt. Soc. Am., 40, 471 (1950).
H. D. Polster, /. Opt. Soc. Am., 39, 1038 (1949).
P. G. Kard, Opt. i Spektr., t. VI, No. 3, 389 (1959).

[6]

[7]
[8]

[9]

[10]
[11]
[12]
[13]
[14]

[15]

[16]
[17]

[18]
[19]

[20]

P.

W.
W.

L.

Young,

[21] P.

[22]
[23]
[24]

[25]

W.

Baumeister, App. Opt., 8, 423 (1969).

Baumeister, see

ref. 15,

J. Opt. Soc.

Baumeister, Appl. Opt., 6, 897 (1967).

H. Anders, Optik 13, 175 (1956).


H. Anders, see ref. 7. in Ch. 2.
P. G. Kard, Opt. i Spektr., t. VI,
S. G. Tomlin, Brit. J. Appl. Phys.

No
{J.

3,

533 (1959).

Phys.

D)

Ser. 2, 1, 1667 (1968).

GENERAL SYSTEMS OF LAYERS

239

Problems

5-1

Derive from (5-30) and (5-31) formulae for 5 and


p
angles for the manipulations).

For which n

(with Wl

When is the difference


can

<5

<5

(using half the

<5

maximum ?

equal 90? Refer to* some basic


text-book for the theory of Fresnel prism.
5-2 Write out in full the instantaneous normal Poynting
vector
1)

it

(in real

notation)

and determine the amplitude of energy

fluctuations across

the boundary.

Do fluctuations exist in subcritical reflection?


5-4 Derive a formula analogous to (5-38) for the
case that even the
reflection at 0/2 would be total (Y thus being
imaginary).
2
What is
5-3

for such a layer?


5-5 Referring to (5-38)
in a

FTR

layer

show that for n

sin <9

5-6

n g the condition for q to equal


e,
p

is

=V2

[1+ (o/"i)T 1/2

Does one obtain realistic index ratios for @


Note that the formalism of total reflection
a degenerate metallic layer

(=0-j

=
is

45?
equivalent to that of

thickness h c ) in

normal

incidence, taking

for s-polarization

xc
xt

for/>-polarization

Refer to [21] or to

ref. [13]

optical tunelling for the

= },
= -n\ C" 1

h,
,

h[

=h
= h^/j-J
i

in Ch. 6 for the substantiation of the

FTR

situations.

term

6
General theorems

on

media

stratified

This chapter will be devoted to the formulation and use of some general
theorems on stratified media. Their importance is both theoretical and
practical.

6.1 Left-and-right-incidence theorem

We

coin this term to express the well-known fact that the two normal

coefficients

two

of transmission for an arbitrary layer system embedded between

dielectrics are equal:

with regard to (2-19), (2-20) and (2-21)

we may

write

o
L

cos0 o

n k+1 cos6> k+1

|fL |2==

ZVtl cos0 ^_

(6 _ 1}

n cosfc/

(for either of the polarizations).

Nothing of the kind holds for the reflectivities unless the stratification
will be left
itself is purely dielectric. We then have p R = p L but the proof
,

With some absorption present in the system we


have p R / p L The practical implication is that the two spectral functions
sides
are different, so that observing an evaporated specimen from both
is
absorption
some
that
indicates
tint
of
difference
slight
a
in white light

for another section (6.2.1).


-

present in a system meant to be loss-less.

With equal 3 R L but unequal p R>L


absorptions must be different.
,

the

left-

and right-incidence

GENERAL THEOREMS ON STRATIFIED MEDIA


For
is

which are

single metallic films

a rule due to Wolter

than about 100

With h

4.14, a L

6.7

250 A the ratio

thick there

o/ g

the combination 1/0.15 --3.36jfl.62 (silver

with a R

stating that

[1]

r/l

For

less

241

and p R

is 1

20.7,

1.56, i.e. still

pL

on

glass) this is fulfilled

18.2

at h

100 A.

near the limiting value /

Corollary: Using (2-20) for dielectric embedding of a general system implies


for the phase shifts upon transmission
dR

dL

(6-2)

6.2 Reversibility theorem

By adopting

the mechanical principle of reversibility, Stokes (1849)

postulated the following theorem to hold for light waves:

Considering reflection and transmission at a boundary with the rays


and B R , Fig. 6-1, let us formally invert time and let
L and B

A R AL
,

proceed backwards as

A* and

B'L , respectively.

New

R
divisions of amplitude

yield the respective pairs A^, C R and B R , C'L The superposition of these
rays must restore the time-inverted original situation, i.e. the reverted ray
R to the left of the boundary and zero state behind it.
.

In terms of transfer coefficients this

Vr

t R tL

These should be considered as

1,

rR f R

identities

is

expressed by the relations


tR rL

which must be

(6-3a, b)
satisfied

by the

set

r R ri> 'r> ^l> whatever the actual form of these coefficients.

As a partial result we have from (6-3b) r R = rL This enabled


Stokes to account for the "perfect blackness of the central spot in Newton's
.

Fig. 6-1 Reversion of light rays in Stokes'

principle (Subscript 2 should read L).

OPTICS OF THIN FILMS

242

rings" at a time

when

the position of the formulae today

known

as Fresnel's

was not yet definitely established.


With respect to the immediate purpose, Stokes was originally concerned
with a boundary between two dielectrics, but in the same paper he extended
his considerations to include the more general case when "the reflections
and transmissions are accompanied by changes of phase different from
or 7t". He then anticipated the form

Vr + V* =
It

was only

modern

in

Mi +

'V* =

(6"4a, b)

thin film optics that these equations found their

revival with dielectric multilayers.

On

the other hand, checking their

complex Fresnel coefficients occurring on simple metallic


boundaries, one fails and has to fall back on the original form (6-3a, b). *)
These seemingly contradictory facts can be reconciled within a general
approach treating the problem of time reversion in connection with the
invariance of the Maxwell equations. This was done independently by
validity for the

and Kard, [4], and the results (valid for any combination of
and absorbing materials) may be stated as follows:
An adaptation is made in the complex transfer coefficients for the
reverted waves, which consists of
changing the signs of all the x implicity involved in the analytical
(i)
expressions for the f RjL fR-L these coefficients becoming r R L fR L
*
(ii)
taking the complex conjugates of these dashed coefficients, i.e. rR L
Santavy,

[3],

dielectric

'R,

Restoration of

fields

and backing media

in the incidence

is

then

expressed by the equations

Vi* +
This

is

'Vl*

r K i

iK rl*

(6-5a, b)

the most general form of the reversibility theorem. For rigorous

We do present, however,
an alternative derivation remaining purely on the computational level and
proofs

we refer the reader to the above cited papers.

dispensing with the physics of time reversion.

We

shall use

an ad hoc principle of negative path, defining for an

arbitrary system of layers

following way:

*)

in

S a negatively conjugate

jt is physically identical

system S* in the

with S (being the same sequence of

A historical review of the problems associated with Stokes' qrinciple


[2].

is

to be

found

GENERAL THEOREMS ON STRATIFIED MEDIA


and

refractive indices
all

of

its

243

optical paths), but for certain computational purposes

geometric paths are taken to be negative.

Denoting the corresponding transformation by the symbol #, the


interference matrices of the single layers are to be transformed according
to the following pattern:

sin -\*

cos

q>,

<p \

jn sin

Actually the result

cos

<p,

is

q>

cos q>,

now

"o, v

-\
q> \

cos

<p

the inverse of the original matrix, but

we may

(6-6)

we

shall

adhere

achieve the desired result.

carry out multiplication of matrices both in the S and

systems, observing the formal convention that


q>

sin

\ jn sin q>,

to the concept of negative path so that

Let us

1, 2, ... will

S*

the complex quantities

all

be processed as simple symbols without writing out


full. This means that the resulting system

the real and imaginary parts in

interference matrices will have the forms

respectively,

where

(On

jG\

\JG

<W

all

in (6-6), there being

complexity of
If now,

<p

G u -}G 12 \
\-}G21 G22 J
'

the imaginary units originate

some

from

G through the

by the established procedure, the complex

for the normal system

reflection coefficient

is

~G

Gn
rR

their counterparts

further j's implicitly involved in the

-G

2l )j

21 )j

(n k+1

G 12

G 1 +^1-G22 +

(n k+i

G 12 +

22

then the corresponding r for the system S*


the signs of G 12 and G2l

is

obtained from r R by changing

Similarly

denominator of rR

'

" k+1

U.=
denominator of fR

OPTICS OF THIN FILMS

244

Inserting

equation

into (6-5a), provisionally interpreting '* as

now

is verified

-^G)*+U
\

(o li

"O

Gll+
(

+1

G 12

LG

^G

22

is verified

(n k+l G l2+

+4^ _

2l )

"0

Equation (6-5b)

We

#,

this

as the identity

"0

2i

in a similar way.

have thus proved that (6-5a, b) are valid

identities

among

the

normal coefficients f R fR fL fL and their "sharp" counterparts fjf if,


f*, i*, which may be interpreted as normal coefficients concerning a nega,

tive system.
It

remains to establish the relation to the general principle of rever-

sibility (6-5a, b).

The

The

interpretation in the sense of Fig. 6-1

identity of

is obvious.
with '* becomes obvious bearing in mind that the

geometric paths occur only in exponentials of the type

exp(+jv)

exp(

+-^- Kh

expf +j-^-JVcos/

h)

->

Thus changing h

-h

is

equivalent to

taking the complex conjugate. (The

two

steps

K -* -K and
happen

simultaneously

to appear in factorized

form.)
Further, changing the sign of

the change x -*

x:

s",

>"

K may

be brought about by making

This changes some signs established in 4.1, viz

>

0,

c"

<

- s", 0" <

0,

c"

>

which means that the vector K defined by (4-1 5b) is reverted.


The proof is thus completed.
Let us add the remark that for the multilayer case the simple Fresnel
surface of Fig. 6-1 is split in the input and output boundaries, respectively,

and the rays A,

B,

belong to the outer

fields

of the layer system.

Returning now to the simple Fresnel boundary where no path is


covered, we see that # is an identity so that (6-3a, b) express the reversion
even for metallic media. For non-absorbing systems # = *, which leads
to the form (6-4a, b).

Any of
L are

R and

of incidence.

the equations (6-3, 4, 5) remains valid when the subscripts


exchanged, expressing the principle for the opposite direction

GENERAL THEOREMS ON STRATIFIED MEDIA

Some

6.2.1

conclusions from the reversibility theorem

Solving (6-5) and

common

with a

245

mentioned counterparts as

just

its

linear systems

determinant

g = g e"

t R tL

f R fL

(6-7)

one obtains

*=- A

fR

?*=-A,

fL

JL

g
Comparing now

f*=A,

(6-8a,b,c,)

# -transform of (6-8b) yields

(6-8a) with the

gg*=\,

i.e.

gg'

=
#

Further, comparing (6-5a) with the

Y=Y'

\,

(6-9a,b,c)

transform of

its

counterpart

gives

?*.?*

* =

r L f *,

fR fL

tL

f*

(6-lOa, b)

while an analogous procedure with (6-5b) yields

(6-11)

= r exp j<5, i = t exp jd, r* = r' exp ( j<5') etc.


from these equations a number of general relationships
among the amplitudes and phases, respectively, of the transfer coefficients.
Thus from (6-10a, b) follows
Writing out in

one

is

full: f

able to derive

Vr = Vl,

t R tl

(6-12a, b)

tR t L

Expressing g from each of the equations (6-8) yields for y


y

=d K +

d'R

dL

d'L

=5'R +

dh

n=S'h +

8K

(6-13a)

so that
dK
a

and

for

d'R

.u

;,'

-SR -S L\_
a'(

(o-l 3b)

_!i-

(6-14)

g
2?_

Ik.
/'

f'

*R

Note:

rR

r'
'L

r'
'R

We are not in a position to prove by the mere use of the reversibility principle

the equality (6-2) between dR and d


L Accepting this,
.

turn equals d.

it

follows

from (6-13a) that SR

in its

OPTICS OF THIN FILMS

246

now

(6-11)

gives the phase relation

2k

(6-15)

-5 R -5 L =28 -5 L -5 R

(6-16)

(o

-to'

where
eo
is

dR

8L

a characteristic angle of multilayer theory, (see Ch.

These relationships

7).

become practically conclusive if we confine


ourselves to non-absorbing media. Then the operation of dashes becomes
an identity so that by (6- 13b) we have the additional proof of the above
mentioned equality (6-2) and (6-1 3b) itself assumes the form
will

(o

(6-13a)

and

g =

may be

(6- 12a)

(6-14) yield

28

t R iL

5R

dL

28, so that

1,

f R rL

Pr

exp

+7C

(6-17)

(6-18)

(2jd)

read as
(6-19)

Pl

stating that the left-and right-hand side reflectivities of a dielectric system

are equal.

Owing to
Making use of
and
is

its

the product

(6-2)

(2-19) to replace

counterpart

tL

iR
,

iR i* may be written as ? R / L
found to equal 9 R = 9L (6-4a)

then be written as p R + 9 R = p L + 9 L = 1, which


It should be stressed, however, that in the

may

the statement of conservation.

general case the equation (6-5a)


tude, not allowing

concerned with the restoration of ampli-

is

any energy interpretation.

Returning to general systems,


(jo)] exp j(d R
.

8 L ).

We

tR tL

2
g = PkPl
all

Thus g
it is

is

g = pR

tltl

=
+

the media are dielectric,

to the energy balance

let

us write (6-7) as

[t R t L

r K rL

exp

can then compute

rlrl

For dielectric embedding


above and we may write

If

tf=

t R th is

9R

32

pR
9

2r R rL t R th cos co

9L

9 by the same argument as

- 29\/pr7l cos (o

= pL m =
= 1.
,

(6-20a)

(6-20b)

n and the equation reduces

constant only in the case of non-absorbing media, otherwise

equal to any of the ratios (6-14).

GENERAL THEOREMS ON STRATIFIED MEDIA


/L from (6-20a) by
2
g may be cancelled and the equation

Eliminating rL and
(6-14),

rlrf
is

of

tit?

247

dashed counterparts in

their

Ir^it^tl cos

m =

(6-20c)

obtained as an invariant of the theory of stratified media. With the help


(6-1 3a) it

(6-5a).

may

be interpreted as a statement on the absolute values in

This will be exploited in 6.4.2c.

6.3 Equivalence theorems

Introducing with Herpin,


films,

we

the Pauli matrices into the theory of thin

[5],

find that the interference matrix of a single film

+Y

cos

(p

sin

q>

at

be written as

- Y2

M =

may

jy sin <p

a2

(6-21)

where
ff

ffi=

o=(ii)'

ff2=

(ii)'

o )

with
2

^0

= W22 = a

Multiplying two expressions of the type (6-21),

we

are led to the adop-

tion of

with

"(i-0
so

we may cover

the products

r 1

o2

a*

ff

= ^2*1 = j<*3-

two-layer has therefore the matrix structure

w +

a^

a 2 <T 2

a 3 ff 3

(6-22)

where the aD are some complex numbers.

<t 3 w 2 =j<*i ^3^1 = ^1^3 =J W 2> no further basic


matrices are needed to express the product of any number of interference

Since

matrices:

a2 a 3

we again obtain

linear combinations of the type (6-22). This

suggests the formulation of the following theorem:

An

arbitrary layer system

to a suitable two-layer.

may be

formally regarded as equivalent

OPTICS OF THIN FILMS

248

to be stressed that the equivalence

It is

for different wavelengths X (or phase angles

angles of incidence

on the

is
q>,

not a physical one and that,


for that matter)

and

different

real system, separate

of the refractive indices n, e , n 2e

computations must be made


and phase angles <p u , <p u of the equivalent

We refrain from discussing the involved algorithms of the matchbecause the practical importance of the general equivalence theorem is

two-layer.
ing,

limited.

Of utmost

importance, on the other hand,

is

the special theorem

on

equivalence, concerning interference systems symmetrical with respect to


the outer media (the media themselves being irrelevant).

Let us invert the matrix transformation (2-25)

Et+1/S = m 22 E ls w i2H ls
H* +1/s = -ifi 21 E ls + m u H lg

(6 " 23)

+ 1 and 1 boundaries written for the


wave normal directed from 1 to k + 1.
Taking the opposite direction as incident, we must change the signs of
This

is

a relation between the k

positive direction of the incident

the H-terms in order to preserve the right-handedness of the

wave trihedral.
For reasons of physical symmetry (6-23) now describes the same situation
as (2-25), whence w u = m 22 This relationship, together with the unimo.

dularity of the interference matrices, permits the following definition of

an

equivalent layer to be made:

cos<p e

= mn = m 22

sina>

J = m
.

12

)n e sm<p e

= m 21

(6-24a, b, c)

(Nothing prevents us from taking the equivalent layer in normal incidence.)


A single layer whose phase angle and refractive index are

<p e

respectively,

is

arc cos

mu

ne

Im-,,

/--

= vm?i

(6-25a, b)

equivalent to the symmetrical layer system in the sense that,

for a particular wavelength

same

and angle of incidence of the

latter, it

has the

interference matrix. In oblique incidence, only one of the polarizations

may

be considered at a time.
Again, the equivalence is purely formal and the equivalent parameters
are generally strongly dependent on the q> or A of the real system. We thus
have significant "dispersion" not only of n e but also of the equivalent phase
,

angle

<p e

2nX~ 1 nJi e

which implies more than the dispersion of n e

Despite these complications, the concept of equivalent layer has developed

GENERAL THEOREMS ON STRATIFIED MEDIA

2 49

into a powerful design tool of thin film theory, particularly for dielectric
periodic structures. The pioneering papers are by Epstein
and Thelen
[6]

review of the methods

is

given in

and

[7].

The concept of equivalent


absorbing systems by Landau and

[8]

layer has recently been extended to

[9].

Lissberger [10], in connection with the theory of induced transmission

of this chapter). Graphical aids in the use of equivalent


index in multilayer design problems are described in [11].
In this book we shall first present examples of the compution and
use
of the equivalent parameters, then we proceed to the standard stop-band
theory for periodic structures and conclude with a less well known treatment
(see later sections

of contiguous stacks.

6.3.1

Computing the equivalent parameters for the basic


period

(0.5B) A(o.5B)

The simplest symmetrical period (apart from the trivial case of a single
Having many such periods in tandem leads
the system (cB) [A(2cB)] k A(cB) which is essentially a double-component

layer) is of the type (cB) A(cB).

to

detuned alternation, A(2cB) k


It

was as

A with outer extension by cB (see 3.2.1).


Lord Rayleigh, [12], studied such periodic strucaccount for some phenomena observed with the natural

early as 1917 that

tures in order to

stratifications in the elytra


first

of certain insects. It was perhaps here that the


stop-band theory was given, but the method was different from the

equivalent layer.

We have a similar reason to make the alternation strictly periodic by


using the outer extension. We confine ourselves to the
practically most
important case of a tuned alternation and therefore choose c =0.5.
The computation of the interference matrix for the basic period (0.5B)
A(0.5B) with phase angles \<p, <p, \<p and refractive indices
n B , n A Br
respectively, leads after some arrangements to the following
results:
,

ii

i 2

= m 22 =

sin

cp

(1

N') cos 2

[(1

JV')

[(1

N') cos

cos

(p

N'

(p

AT],

A/"]

(6-26a

6-26b, c)

m 2 = j B sin q>
i

cp

where

*'-4L,
2ab

AT

~ "a
\
2n A n B

(6
v
"

26d
uu

.^

,
'

e)
c/

OPTICS OF THIN FILMS

250

N'

to be noted that

It is

N" ^
leaves

Restating (6-25a, b) for the given case,

,
cos 2 <p - N
/,
= (1
+ N')
J
K

cos Ve
<p e

and nA

^ B Further, interchanging B
constant, while N" changes sign.

for n A

N'

always positive and greater than unity, while

is

n.e

in the basic period

we have

IHI +N') cos <p-N"-\

nB

\Jl(l

N')cos(p

+ N"

(6-27a, b)

The computation of <p c by (6-24a) would be ambiguous unless a suitable


is made, e.g.: the sign of sin <p e must be such as to allow the

stipulation

equivalent index n e in (6-24b, c) to be interpreted as a positive number.


(In case

be

shall

turns out to be imaginary, see below, then

it

imaginary part

its

positive.)

In dealing with (6-25a, b) one encounters two qualitatively different


situations,
(i)

m lt <
|

nc
(ii)

is real,

1.

Then

since

the computation of

<p e

by (6-25a)

is

meaningful and

m 12 is imaginary (see 6-25b).

mu ^ This is necessarily the case around


Wn = N' < n computed by (6-25b)
1.

<p

is

now

tc/2

and

3n/2,

when

1.

nary, which

may of

definition of
<p e

cp e

pure imagi-

we must adapt

course be accepted. However,

the

Setting

= odd number

of n

j<p e

<p e

arg cosh

m u ^0

(6-28)

secures

COS

(p e

-COS

(j<Pe)

= -COSh

(f> c

= - =
|

/M lt

as required.
Further, sin
in (6-28)

is

<p e

= -j

sinh

cp e

so that the sign to be chosen for

determined by the above given requirements for the sign of sin

The matrix of

the equivalent layer for the case

m tl >
\

q> e
q> c

may be

written as

(-!)[

cosh

^,^

^sinh$
cosh<p e

-j|n e |sinh^ e ,
Its

unimodularity

The
by

is

(629)

preserved.

multiple of n to be used in (6-28)

(6-29),

e\

but for general reasons

continuous function of

cp

(see

is

irrelevant for the computations

we choose

it

so as to

graphs in Fig. 6-2b).

make Re

(<j9 e )

GENERAL THEOREMS ON STRATIFIED MEDIA

251

The region of imaginary n e is defined by the conditions m 12 orm 2i = 0,


implying m tl =1 by the unimodularity of M. This leads to two angles
cos<Pl

-Jf = +
1

AT

situated symmetrically about the value


is

|MA

"a
7i/2, i.e.

~
+

nB

'

(6-30)

(p t , 2

rc/2

e,

where

the inverse sine of the right-hand side in (6-30).


In view of the implications for multilayer structures the interval

(<Pi> <Pi) is called

the stop-band, the outside of

By way of an example we

= 1.36
and B = H
for L

The

The two

L(0.5H).

and nH

wL

2.3 in

<j?

the pass-band.

indicate graphs of equivalent parameters

both arrangements,

i.e.

nB

L , nA

yielding the periods (0.5L) H(0.5L)

and

cases are labelled as

results for

it

and

<X>

Continuous

(2>.

curves can be drawn separately for the real and imaginary parts of
as

shown

in Fig. 6-2b.

The only

nH

respectively (Fig. 6-2a, b).

(2>

are almost identical for

and (0.5H)

difference is in the sign of

<p e

q> e

in the stop-

bands.

The equivalent indices for


and (2>
some interdependencies of the following
e O)

n e (n

"CD-

"(2>

<p)

n|

= '^a"b =

tions of

N' and N".

It is

e (0)

may

for

and n

h w l (for any fixed

These relationships have a general


symmetrical periods they

differ substantially,

but there are

type:

validity.

for

<2>

<p)

(6-31)

(6-32)

In our special case of

be deduced from (6-27a, b) using the

defini-

simultaneously quite easy to compute

V("a"b),

.()

/2

/2

(6-33)

b /a

The formulae (6-31), (6-32), introduce some inner rules into the graphs
and @ and all the information is actually condensed in one
fijsp) curve drawn for
^ <p <; 90. Nevertheless, it is convenient to have
of n e for

a sketch of the situation in the whole period

6.3.2 Analysing the spectral behaviour of


It

has been said that the equivalent layer

is

<p

360.

an equivalent layer

a highly dispersive element

(dispersion being understood as ^-dependence rather than explicit relation

to A). Figs. 6-2a,

b bear

this

out in

full extent.

OPTICS OF THIN FILMS

252

To
we

shall

analyze the behaviour of the equivalent layer in dependence on

proceed along the same

lines as in 3.1.1.

was analyzed as a function of q>.


The complication now is that
(pj

cp ((p),
e

but there

Fig. 6-2
(0.5

L)

is

Y =
Y

q>

where formula (3-2a)

n e {<p) depends on

(p.

So does

the useful fact that at least in the region of real

Graphs of equivalent parameters for the periods


(p, and (0.5 H) L (0.5 H)case @,

H (0.5 L)case

Refractive indices: H

2.3,

wL

1.36.

GENERAL THEOREMS ON STRATIFIED MEDIA


e

two:

almost

(p e is

(p e k, 2(p.

strictly

We

<p,

the factor being very nearly

then have (taking everything in normal incidence)

n e (<p)

proportional to

253

n eW)

(w

(o

n g)
g)

+
+

cos2<jo

cos 2<p

j[w n 8

j[n n g

n,(<p)] sin2(?
*(<?)] sin 2<P

(in the real-n e domain).

As

in 3.1.1

we may speak of cardinal

2<p

yielding

ln,

points whenever

,
g,

n
"
(
(

~
,

ns

JY

(6-35)

and
2<p

where e

(2/

is

+ l)^
^

yielding

g. /2

=f

WW

'

\ n ng

taken as e

Owing

(2/

1)

~
+

"

"e

(6-36)

to the limited validity of (6-34), cardinal points falling out of

the region of real n e must be discarded. For the periods considered, only
/

0, 2,

4 apply for qk while


,

all

integers

are admissible for q I2

In 3.1.1 these cardinal points gave extremum values to q = f 2


With ne strongly dependent on <p this is no longer the case. However, the
|

structure of (6-34) being identical with that of (3-2a),

that for any

infer

still

tp

Q,2(.<P)

Q(<P)

where en/2 (<p) denotes the right-hand


function of

we may

(p.

is

(6-37)

side of (6-36) with n e taken as a

constant.

Thus the expressions

(6-35),

(6-36) define envelopes of the actual

oscillations of o(q>) in the region of real n e

Any time the independent variable

assumes a cardinal value, either of these envelopes

is

touched. Outside of

the cardinal values the envelopes represent upper and lower bounds for

g(<p).

Envelopes pertinent to the two cases CD and


are drawn in Fig.
Owing to symmetry only the first two quadrants are covered.
Since the equivalent index for case
first

quadrant,

it is

to be expected that at

6-3.

runs through small values in the

some

q>

the antiref lection condition

n g will be met, implying Q n/2 = 0. This actually happens at


which is a zero-point for the envelope Qn/2 (<p)n\

q>

60,

Apart from this, one sees that there are two points (<j =48 and 68),
where Qn/2 ((p) = Qn and the envelopes exchange their roles in the inequality

OPTICS OF THIN FILMS

254

The function

(6-37).

remaining in-between,

g((p)

through these intersections, as

Although

q>

60

it

must

necessarily pass

also seen in Fig. 6-3b.

is

a good point for complete antireflection as


= 90

is

regards the refractive index n e the corresponding phase condition 2<p


,

is

not

This

fulfilled.

why

is

this zero point

touched by the actual function

g((p). It

of the lower envelope

would only be so for n

the constant-valued envelope Q n coincides with the

<p

axis

ng

is
,

not

when

and the two

intersections converge to this point.

An

analogous reversal of envelopes occurs for case

quadrant, but there

V w o

second

In the region of imaginary e


(2-27a) and writing n e for

where

in the

(J)

no zero point for Q n/2 ((p), since n e never equals

is

<p e

n e ((p) (o

e(<P) (0

depends on

The only

we have by

from

(6-29) into

M g) cosh

q> e

COsh

<Pe

g)

inserting

+ j [n ng +
+ J [ W 0g ~

n\ (<?)] sinh

<p e

(6-38)

"e (<?)] sinh ^e

no simple way (see semicircles in Fig. 6-2b).


we can make from (6-38) is that there are likely to

<p

inference

ne

in

be no oscillations inside the interval {(p x <p 2 )So far, both (6-34) and (6-38) might be regarded as only a more elab,

orate alternative of expressing

r(cp)

for the basic period to a straight-

forward computation without the equivalence concept.


discussed

some

We

have not even

unusual situations the equivalent layer experiences in

certain singular points.

1.0

05

Fig. 6-3a,

(05h)l(0SH)

A
J

b Envelopes of reflectivity corresponding to the two basic periods

and Qs.

GENERAL THEOREMS ON STRATIFIED MEDIA


. Then ne

255

and n e - 0,
h e -*
h t -* oo for (D and <2> respectively. These are cases of degenerate thin film
interference, which bring about peculiar states of the (formal) electromagTake, for example,

and of

netic field

its

cp

-*

q> x

-* oo,

boundary conditions. Sometimes continuity conditions

are violated in favour of displacement surface currents.


to [13] for a systematic discussion of such cases.
it is

These are easily determined for a degenerate layer

by equivalence computations.

originated

In the above chosen point of degeneracy

sin

sin

q> e

<pi

some

<p e

- 0+

m 21

->

for case
-

For our present purpose


depend on the

sufficient to state that the resulting reflectivities generally

rates of convergence.

and

We refer the reader

(and

It is

in such a

m 12

way

0) for case <D

these finite values

as oo/oo for

and 0/0 for

it

must hold that njtt

->

jt

as to have by the definitions (6-24) w e

and

sin

yji' 1

we need
. The result

-*

m 12 (and m 2t

in evaluating lim g(cp) for


is

correct, but

-> 0)
<p

we have had

extra manipulations.

All these formal complications are unimportant in view of the role

the equivalence concept plays in the analysis of periodic structures.

6.3.3 Stacking the basic period


If the basic period

must be equivalent

is

repeated &-times, then for physical reasons

to a single layer of the

same

refractive index

it

e and of

A e for each q>. In other words, the equivalence


a convenient means of expressing the fc-th power of an interference matrix belonging to a symmetrical period: we simply take cos (k(p
c ),

fc-times the optical thickness

theorem

is

sin (k(p e ) in the real

domain and (-

domain of imaginary e
It is

l)

cosh (kq>j, (- l) k sinh (kq>J in the

(see (6-29)).

with these values that

we go back

to the respective formulae


view of what we know from
the analysis of the single period, the point being that the envelopes remain
(6-34), (6-38).

The

results will

be

easily seen in

fixed.

The pass-band and

q>

its

subsidiary

maxima

In the domain of real n e the straight envelope (6-35) will be touched for
integer x nj2k, the bent envelope (6-36) for q> = odd integer x njAk

(using only permissible values of the multiples). This

number of periods increasing, there


dary maxima in the pass-bands.

will

means

that,

with the

be an increasing number of secon-

OPTICS OF THIN FILMS

256

The asymmetric shape of the envelope g n/2 ((p) with


implies that for case (D the short-wave

maxima

respect to

cp

njl

(with reference to the central

cp = n/2) will be smaller than those on the long-wave side.


For case (2> the situation is reversed. This prediction is illustrated by Fig. 6-4.
The first case may be interpreted as a 7-layer HLH
H with outer
extensions by (0.5L), resulting in suppression of short-wave subsidiary
maxima. Analogously, the second case may be visualized as a quarter-wave
stack with outer extensions by (0.5H), leading to suppression of long- wave
maxima. (Since such an extension forces the basic stack to be terminated
by L-layers, an 11-layer was taken in the second case in order to approximately
preserve the same performance in the stop-band.) However, it is not easy

wavelength at

an interpretation of these simple extensions as antireflection layers


L
of the equivalent index of the basic systems HLH ... H or LHL
respectively. These are now essentially new periods, whose pass-bands
to give

in terms

. . .

t(aSL)(Hl)H(0.5L)G
j

~.

60

\r\
90

iso

ISO

p'

no

A
\\\ ir\-M/\

05-

l(0.SH)(LH)L(aSH)6

I!
ll

60

90

Mi'

too

f>

Fig. 6-4a, b Phase diagrams for the two basic periods stacked. High
imbalance of secondary maxima predermines these systems as useful

prototypes for edge

filters in

the visible spectrum.

GENERAL THEOREMS ON STRATIFIED MEDIA


(identical with those

of

[(0.5 L)

H(0.5L)] k

and

spersed with real and imaginary domains of n e


levels

257

H) L(0.5H)]) k are

[(0.5

of subsidiary maxima as a fact proper to the stratification of the two

basic periods, which

From

filters.

may

well be exploited in the construction of edge-

a different view point

we

elaborate

on

this

on

features of the pass-bands of periodic structures, this discussion


specific choice

<

nH

p. 6-28

MS.

to be stressed at this point that, although revealing important

It is

inter-

We therefore take the uneven

<

2.5

of n H n L The results remain essentially valid


,

and

<

1.33

<

are obtained in this

way if we take H

based on a

for, let

us say,

two-component
spectrum, but no good edge-filters

1.5, i.e.

systems manufactured in the visible

is

for the orthodox

4.0 or so, as

is

usual in the infra-red,

Fig. 6-5. Further design work, possibly again exploiting the equivalence

concept,

is

necessary to flatten out the pass-band. This will be dealt with

in the next section.


10

j
/V^^jSL

1
1

05
1

~2^\i W

*\3

iso

Fig. 6-5a,

6.3.4

aoftao

30

60

to

120

isop'iao

b Phase diagrams of stacks using two basic periods with a different index pair:
L = 2.3. Substrate 4.0. No good edge filters are obtained. (The extrema are
numbered for further analysis.)

4.0,

Use of matching

We

now

layers to manipulate pass-band ripple

some examples of outer layers added to a basic


multilayer with the aim of reducing subsidiary maxima, the philosophy of
shall

give

the approach being antireflection of the equivalent system.

Matching then means choosing such a value of the added refractive


fit into the antireflection condition for the newly formed

index as will

combination.

OPTICS OF THIN FILMS

258

Denoting the additional indices according to the scheme of Fig. 6-6


choose either of these layers or both. Apart from this their choice
depends on the respective phase conditions in which the added layers shall

we may
work.

Since a subsidiary

contact of

very nearly identical with the points of

is

we

face

two kinds of problems:

maximum associated with the constant envelope,

to antireflect a

(i)

maximum

with either of the envelopes,

g(q>)

with an essentially A/2 equivalent layer embedded between


to cope with a

(ii)

system

no)

r>,

In the

is

ne

the

by A/4

first line

n,

/?*

case the original layer

first

Scheme of indices
by bi-layers.

Fig. 6-6
\

to antireflecting the

is

and g

near the bent envelope, where the original

essentially equivalent to a A/4 layer.

nB

antireflection

maximum

dealing

boundary

/w

is

We

for extension

and the problem reduces

latent

shall first agree to use the simple

layers, single or double.*)

The

result then obviously

in Tab. 6-1.

Table 6-1

Matching indices of refraction for the three possible extensions of a stack by outer
single layers, the aim being suppression of subsidiary maxima or minima.

front extension

constant envelope

ri

bent envelope

ri

In the second case

= V

"g

n e yjnjn g

we compute by

rear extension

ri

bilateral extension

""/"'

<Jn an s

H e Vg/"o

n'n"

(3-23) for the three

n/" 8 /"o

n e \fn ng

columns respec

tively

"eff

2;

n eff

-5-,

2;

n"
nff

*)

n'n"

Since bilateral single-layer extension of a latent layer actually amounts to applying

a two-layer to the

substrate.

GENERAL THEOREMS ON STRATIFIED MEDIA

259

Annulling reflection as expressed by (3-19) then leads to the

marized in the second

line

of Tab.

two degrees of freedom

Since the bilateral extensions have

we may
the

postulate simultaneous matching for both envelopes.

two equations

in the last
"'

In

all

results'

these formulae ri

may

conditions

n"

\/("o"e)

and n" depend on

= Vt'VO

ri,

n",

solving

<p

(6-39a, b)

through n e (<p). The antireflection

be applied to any of the maxima on the corresponding


lies

its minima may


two adjacent extrema,

very high, even

be subjected to antireflection in this way. Reducing


lie

By

column one obtains

envelope. In fact, if the lower envelope

which both

sum-

6-1.

too high and belong to two different envelopes,

is

a typical

situation for using (6-39a, b), see Fig. 6-7.


If the critical point occurs for
is

used" to compute

ded layer

is

ri

some

q>

q> crit

then the value n e (cp

taken as 90/^rit

60

Fig. 6-7

crit)

or n" and the relative optical thickness of the ad-

90

Manipulation of the short-wave maxima

in the original system

shown in figure
main text.)

described in

6-5b. (Designs

OPTICS OF THIN FILMS

260

This is all one can do in this kind of design. It remains to be verified


by numerical analysis across the spectrum of <p, how far this antireflection
extends into the neighbourhood of the critical points under control. It
will be seen in the examples to follow that useful results are obtainable.

Before doing

on

sion

Fig. 6-6.

we

this,

either side or

The

present yet another table (6-2) concerning exten-

both by 1/4

derivations are

left

bi-layers,

with notations according to

for the reader.

Table 6-2

Matching indices of refraction for the three possible extensions of a stack by outer
aim being suppression of subsidiary maxima or minima.

bi-layers, the

front extension

constant

envelope

envelope

By

= vW"g)

"i/"2

bent
"l/"2

rear extension

bilateral extension

IK = vWg)

= \/WgV"e

"Vn 2 =

n'in '{/n'2

"e/\/(Vg)

'i

"i"2'/2"l

column we obtain

solving the conditions in the last

V(/g )

= V("o"gV"e
as matching

for both envelopes

= V/-

= v/

"e

ll'2

(6-40a, b)

Examples of use

As an example

methods let us
bad high-pass filter

for the application of these matching

take the system according to Fig. 6-5b.

It is

and would even remain so if we made g


inner (0.5H) layer optically significant.
Let us number the extremal points

to

evidently a

=
1 1

1.5 in

an

effort to render the

and impose the

antireflection

conditions on them in various combinations, preferring, of course, those


nearer the stop-band.

We

may, for example, reason in the following way: 4 lying not very

we concentrate on 3 and 5, both belonging to the constant envelope .


Having two points we need two layers and the extension must be bilateral.
From Table 6-1 we take
high,

ln-

V4 =

GENERAL THEOREMS ON STRATIFIED MEDIA


being

this

satisfied, for

(a mixture of

The

ZnS and

example, by

c'

3,

may

c"

ri

2.76

be chosen in two ways: the outer layer

the inner layer covers

or

(MgF 2 SrF 2 ) and

1.38

Ge).

relative thicknesses

covers point

ri

261

5,

and

vice versa.

Then

90

90

C = ^-=1.637

or

c"

3,

30

55

respectively.

We

out both alternatives owing to the uncertainty we have

shall try

outside of the cardinal points.

The

resulting diagrams

q(</>)

shown

are

in Fig. 6-7a, b. Substantial

reduction has taken place at the cardinal points 3,5, but the range about

point 4, which was not treated,

is

somewhat

deteriorated. Also,

be noticed that antireflection of 3 and 5 in Fig. 6.7b


zero, although the conditions for ri, ri were properly

is

it

should

10 percent above

set.

This

is

because

of mutual interaction of the extensions.

We now make
and

5,

another attempt with a new pair of adjacent points 4

belonging to different envelopes.

If the outer layer is to cover

4 and the inner layer

5,

we have*) by

(6-39a, b)

= Vn

ri

e(43)

= 4lJ =

n"

1.643

C- 1 -2.09,

= Jngn55) = ^4x2.35 =

c"

= i?L-

43

3.07

(6 " 41a ' b)

1.637

55

In the converse situation


ri

s/n n c (55)

The

V2.35

1.532

c'

1.637

results are

shown

n"

>/ e (43)
g

c"

in Fig. 6-7c, d.

The

= V4x2.7 =

2.09

first

3.286

(6-42a,b)
case

is

obviously very

satisfactory over a broader region of the spectrum.

Let us

now turn our attention to the short-wave maxima of the diagram


down the points 8 and 9, occuring at <p = 136

6-5b with the aim of bringing

and

150: e (136)

5.9,

e (150)

5.53.

*)
The values of w e for 43 and 55 are taken from a diagram analogous to 6-2b computed for the 4.0/2.3 index pair. It is not shown here.

OPTICS OF THIN FILMS

262

Repeating the above scheme we have


for 8

and

9:

for 9

and

c'

0.662

ri

4.69, c"

0.6

(6-43a, b)

2.345,

c'

0.6

ri

4.86, c"

0.662

(6-44a, b)

8:
ri

The

2.43

ri

d show good results. These even


computed indices by those

spectral checks in Fig. 6-8a,

remain nearly so

if

we

replace one or both of the

already at hand in the system (Fig. 6-8b,

We may

c, e, f).

as well distribute our interest

on both

of the central

sides

stop-band and require, for example, 5 and 8 to be reduced, which would


result in a

more

90

isolated central band.

120

150

HO 90

WO

ISO

120

90

ISO

120

**

ri-2A3

180

rV)

n"- iO

ri-2.0

n'-*.69

\'

so

ri-2.3

ri-4.69

so

00
20

\J\

K./l

120

120

Q
IJO

ISO

1M 90

d
ri- 2.3iS
ig.

150

180

IV/^

90

n'-tM

ri-23

ISO

120

n"-*86

6-8 Manipulation of the long-wave

ri-

maxima of

in figure 6.5b.

Z3

180

n"-k.0

the system

shown

GENERAL THEOREMS ON STRATIFIED MEDIA


It is

263

obviously sufficient to combine the conditions (6-42a) and (6-44b)

or (6-43a) with (6-4 lb).

results are shown in Fig. 6-9. Both antirenarrow and more sophisticated extensions would

The

flection regions are rather

have to be contemplated to extend

these.

wo
P

1,

1
50

V\
BO

Fig. 6-9

Attempt

ISO

30

SO

tSO

120

at simultaneously manipulating a long-wave (5)

a short-wave

(8)

maximum

A relationship between low-pass and high-pass

ISO

and

in figure 6-5b.

filters

To illustrate the r61e of bi-layers in the manipulation of pass-band


maxima we digress on an attempt at finding a relationship between low-pass
and high-pass

filters.

Let us start from the latter having the basic pattern 1(0.5H) LHL ...
HL(0.5 H) G and a typical curve according to Fig. 6-4b. Setting out to
reduce its exceedingly high short-wave maxima by bilateral extension in the
form of bi-layers chosen so as to match at the gn/2 points of the bent envelope

we must

<

<p

fulfill

the formula in the right-hand

bottom corner of Table

6-2.

Referring to Fig. 6-2a, the average value of e in the region 120 <
< 180 for the case
is about 3.5. Choosing n\ = n' =
2
L = 1.36

and 2

n'[

nH

2.3,

we

'

find that the

formula

is satisfied

accuracy, viz:
HiTlo

n^n
2"1

A-36V

A .

y i.52
3.5

Jn

ng

with excellent

OPTICS OF THIN FILMS

264

The

high-pass

to a low-pass

filter

filter 1(0.5 H) LH
HL(0.5 H)
by extension of the type
.

lfc'(LH)] [(0.5 H)

LH

Considering the region about

...

<p

may

HL(0.5H)] [c"(HL)]

ISO

180 as critical leads to

and we arrive at the standard form of the low-pass


H(0.5L) G, Fig. 6-10a.
0.5

ito

thus be converted

filter

c'

c"

1(0.5L) HI

iio

100

30
SO

C-0.5

10

c*-o.a

c)
ISO

ibo

iho

d)

<)

f)

Fig. 6-10.

The low-pass

filter

deduced as a manipulation on

its

high-pass counterpart in figure 6.4.

GENERAL THEOREMS ON STRATIFIED MEDIA


Such an approach makes
in the short-wave pass-band:

for example,

c'

if

interplay of the

c"

do not have

to be equal

= 0.7 or 0.8 (Fig. 6-10b, c),


= 120, where some residual

q>

number of quarter-wave

the

A fair compromise is also


hand, keeping c"

and

0.5, c"

of the region about


standard design

possible to predict further flattening effects

it

c'

265

0.5

c'

and

c"

setting

two extensions

ripple exists for the

layers exceeds 9, or so.

0.6 or 0.7 (Fig. 6-1 Od,

c'

0.6

and choosing,

one takes good care

0.8 leads to

e).

On

the other

an unfavourable

(Fig. 6-10f).

Let us once again turn to the high-pass pattern and try bilateral
antireflection at the g n/2 -points by adding a pair c'(LH) in the front and
c"H(2L) in the rear. The latter stipulation means that we are envisaging

an
in

antireflection layer

Table

yeff =

6-2,

but one

of the X\4

may compute

k\2 type. Such a case

is

not included

directly (taking the A/2 layer as latent):

n\n'e ln'2 n'[, which for zero reflection with an even

number of

layers

leads to the condition


ft

Inserting ri[
n'2 = 2.3, n\ = 1.36, 3.0 < n < 3.25 for 150
c
180, the equality is very nearly fulfilled as 3.84
3.7 -r 4.0.

<

<p

<

Choosing

c'

c"

we

0.5

obtain the system

1(0.5L)HL...HLG
which should be a low-pass

The dotted curve

filter.

in Fig. 6-10 a

shows it is in fact an even better design


than the orthodox bilaterally (0.5L)-extended quarter-wave system.
Trying the same thing from outside, i.e. choosing a c'(2L) H front
extension so

match

we may obtain 1 HL

LH(0.5L)

<<
(3.84

G does not lead to a satisfactory

in the corresponding condition

on the

left

fa

side being substantially different

Analogously to the above

results,

from

2.5

a similar conversion

on the

right).

may be expected

to exist from the low-pass to the high-pass design. It would of course be


pulling the reader's leg to state that the method consists in cancelling the

extension of the high-pass pattern.

low-pass

filter

which

What we

seek

is

an extension of the

actively suppresses its long-wave ripple.

OPTICS OF THIN FILMS

266

However, following exactly the established pattern of

bilateral exten-

sion by two quarter-wave bi-layers does not lead to the expected result.
The procedure having by now been adequately exemplified, we state its
result directly:

l[c'(XY)] [(0.5L) H(0.5L)]

where n\\n] must equal


region of

in Fig.

6-2.

V*W"e>

ie

Choosing y

- 6 for "

[c"(YX)]

2.3,

2 - in the h ig h "P ass

we have w x =

1.8.

30
* -

-18

ne

20

?K
v..y

60
to

k'1

30

nn-25

'

20

to

90

60

00

k-if

30

nt'1.6

20
I
10

Fig. 6-11 Suppression of the long-wave


maxima by bilateral extension using two-

layer periods with indices of refraction 2.3

and

^y

\{

J
90

60

30

to

JO

1.8.

r\

K'*

nt-2.5

20

O
Fig. 6-12

A study

of the antireflecting effect

by very thin outer

r\

extensions.

'V*
60

p.

good high-pass filter has


our original goal.
from
indeed been obtained, but the result deviates
The standard high-pass filter design will be obtained if we adopt a
on
different antireflection technique. The following discussion will be based
the knowledge of the final result and the conversion will be presented as an
Fig. 6-11 shows, for various

c',

c",

that a

interpretation rather than a cute design step.

GENERAL THEOREMS ON STRATIFIED MEDIA

and

The point
= k 2<p

<p e

is

267

whether an essentially quarter-wave layer with n e 2.0


modulo 180 (k number of periods in the low-pass

90,

system) can be antireflected by a sequence of indices 1/2.3

1.36

2.3/1.52, the

embedding layers being very thin:

1.36

in fact the

e
working

range of the unit phase angle of the envisaged high-pass

filter under study


about 45. The layers expected for extension are 0.5 -multiples of this,
while the antireflected body is in its peaks equivalent to at least 90 for

lies

1,

possibly fc-times more.

So we add

at the

most 0.25-multiples of the

optical thickness of the layer being antireflected, possibly &-times less.


Fig. 6-12

shows a study of such an

antireflection in terms of the original

unit phase angle, the sequence of optical thicknesses being


1[0.5(HL)] ffc(2E)] [0.5(LH)J

where E stands for a unit layer of refractive index e The values for
e
were chosen to be 1.8 and 2.5, covering both wings of the high-wavelength
.

region of the low-pass design. Obviously, for n variable between these values
e

according to curve

of Fig. 6-2, the extension 0.5(HL) ... 0.5(LH) will


be effective everywhere within the pass-band in question, as expected for
the standard high-pass design.
Note: Only those regions of Fig. 6-12 are meaningful for

do not coincide with the stop-band of

6.3.5

this discussion

which

the basic period.

The stop-band

Simple stack

Looking at (6-38) with <p e replaced by k<p t we are in a position to infer


any qt l < <p < cp 2 that r -> 1 as k ~* oo. This is because the hyperbolic
,

for

functions tend to infinity.

We thus come to the result that a multilayer composed of many basic


periods of the type (0.5A) B(0.5A) has a stop-band defined by (6-30) which
is

equal to that of a periodic structure (AB) k as computed in 3.2.6. The


differ by outer A/8 extensions, which evidently have no effect on
,

two cases

the stop-band width.

They do,

as

we have

seen, strongly influence the pass-

bands.

For basic periods of other types the stop-band is again defined by the
condition of imaginary n e this occurring between such q>, where m
12 or m 21
assume zero values.
,

OPTICS OF THIN FILMS

268

Two

contiguous stacks

We

have mentioned in

3.5.1

the possibility of enlarging the high-

by having two stacks of the same type


same numbers of layers,) centered at two
different wavelengths. Maximum efficiency of this method is expected when
the two stacks are contiguous, i.e. their relative tuning is c, = 1 + e/90
and c 2 = 1 e/90, where e is half of the stop-band in degrees. In the
present section this angle is computed by (6-30), the result being identical
with the former computation by (3-31).
Invoking a theorem by Rayleigh, we declared in 3.5.1 the interval
covered by the two separate stop-bands to be the stop-band of the composite

reflectance region of a tuned stack

(but not necessarily with the

system.

Having now a new theory

for the stop-band, let us try to apply the

concept of equivalent layer to the case of two contiguous stacks of the


modified type with A/8 extensions.

e.g.

Let the two component mirrors have basic periods of the same kind,
(0.5H) L(0.5H), p and q being the numbers of periods in either of them.

>

Let the tuning c t


to the second. If

cp

be applied to the

is still

first

stack seen from the air, c 2

<

the independent variable, then the equivalent

parameters of the two stacks are

where n e and

are the functions defined in Fig. 6-2.

<p e

Considering
the

first

stack

now

the partial stop-band interval to the

of

left

<p

90,

operating in the conditions of imaginary equivalent index,

is

the second stack has a real n e

Dropping the subscript e (thus

n'e

ri etc.)

we have

the following

product of equivalent matrices

CC-
(-l)-l
\ j(

S'S",

- n'S'C" +

'

"C'S"),

}( S'C"+

C'C"

CS")\
f

S'S"

where (6-29) was used for the matrix of the first stack. Thus ri = , is a real
number. C, S' stand for the hyperbolic functions of the argument pip',
while C", S" are goniomstric functions of the second argument qq>".

GENERAL THEOREMS ON STRATIFIED MEDIA


It is

269

convenient to investigate the transmission coefficient

which

is

inversely proportional to
(a

n C'C" +

a 12 S'S")

j(a 21 C"S'

a 22 C'S")

(6-45)

the coefficient matrix being

flu

n.

~,

a 12

=n.

ri

n"

"o

n"

ri

"o

=~

a 21

a 22

s-

n
If the left vicinity of

to zero as

-* oo.

For

<p

90

is

to be a stop-band, then

must tend

large values of pip' (6-45) equals

|eP?'[(<"nC" +

a 12 S")

j(a 21 C"

a 22 S")]

which will tend to infinity with p if we exclude the possibility that the real
and imaginary parts vanish simultaneously. This could only occur if the
determinant

a V)

were zero, which would entail the controversial condi-

tion*)

n g(n' 2

n"

2
)

{n

ri )

(6-46)

In a similar manner the right-hand vicinity of <p = 90 covered by the


second stack could be shown to behave as the stop-band of the composite
system.
If the mutual detuning is less than would correspond to exact touching
of the two stop-bands, then a region of overlap forms, which can be shown
to belong to the composite stop-band.

If the detuning is

bands
is

pushed a

little

further so as to

make

the

two stop-

disjunct, then the breech is not part

kept moderate, then with

finite

of the stop-band. However, if it


numbers of layers it may be covered by

the side-slopes of the two reflectors. Sufficient reflectance

may thus build


up, comparable with that present in the stop-bands proper. Allowing for
some oscillations in q, the resulting mirror may have a practical bandwidth

slightly larger

than two exactly contiguous stacks.

*)
We tacitly exclude the possibility that ri and n" simultaneously vanish. Inspection
of the graphs in Fig. 6-2 (shifted in accordance with the detuning of the two stacks)

reveals that the case cannot occur.


kind,

one

However, combining stacks based on periods of different


Ch. 3.

risks reflectance gaps in the stop-band, as discussed in ref. [42]

OPTICS OF THIN FILMS

270

6.4

Theorems concerning induced transmission


In Chapter 5 the basic features of the concept of induced transmission

have been outlined. In the present section we

and

subject

derive

some theorems

shall further elaborate

vital for the design

on the

of transluminated

systems.

6.4.1 Front-extension

theorem

We simply restate the rule substantiated in 5.


we

that the ratio

any

called inevitable absorptance) remains constant with

dielectric extension

first

(which

outer-left

of the absorbing system. Alternatively, the same holds

for the potential transmittance *P related to a/t

The

oc/t

by

(5-13).

to enunciate this theorem was Abeles,

[14].

The

invariant

g)jx, which is the inverse of W. However, the


quantity was taken as (1
invariance was then in no way associated with the concept of induced

transmission. This

6.4.2

was

later

developed in the papers cited in Sect. 5.2

Theorems on maximum potential transmittance

Single metallic layer

The
formula

potential transmittance of one absorbing layer


(5-8) as the ratio

boundaries, expressed via the internal

y=
<8T

where

r=

tan y

reflection coefficient

exp

*)

the

4nX~

is

given by the

of the net fluxes at the emergent and incident

field.

We

shall restate

l-g-2T Vising
W 2 Q - ir Ve sin - 2q>')

*) and yfg

it

in the

form

(64?)

(<5

exp (j<5) stands for the effective amplitude

2
of the second boundary. <% has the original meaning

xh).

The angle y has the same meaning as


same symbol introduced by Eq. (6-7).

in

Eq. (1-39) and

is

not to be confused with

GENERAL THEOREMS ON STRATIFIED MEDIA

We can plot,

on

271

the complex plane, the loci of y/g exp

correspond-

(j<5)

ing to constant W. Eq. (6-47) can be written as

- W% 2 ) g + irw sin 2cp'

(1

=
Setting
circle

X=

Y=

yjg cos 8,

+ 2r(l - cos 2<p')


-f<ar 2

yfg cos 8
1

yfg sin 8, (6-48) can be

shown

yjg sin 8

.(6-48)

to represent a

with the centre

(TW sin 2<p'

r(l

<Pcos2<p'))

and radius
2

[!P (1

+ T 2 )-2!P(r 2 cos2< / + cosh2<P ") +


J

For various

!P this is

(1

+ r 2)] ,/2 [l-

TO 2 ]"

(6-50)

a set of nested circles whose centres lie on a


{% 2 - cos 2q>')lsin 2y' intersecting the imag-

straight line with the tangent

inary axis in the point


to

Problem 4-8

T. The corresponding radius is Vl + T 2

reveals that the isotransmittance contour for

identical with Berning's circle, as

For

>

it

the centres shift to the third quadrant

(See Fig. 6-13 concerning a

We know from Ch.

lie

chromium

than unity

Reference

W =

is

should.

parts of the isotransmittance contours

reflectivities greater

may be

and

substantial

outside the central unit circle.

layer.) This

means

that energy

required at the second boundary.

no contradiction to physical laws insofar


inside Berning's circle. With the centres travelling sideways this imposes a constraint on the isotransmittance radii such
that the contours must lie within the greatest circle "F = 0.
With W increasing, the radius (6-50) must therefore decrease until it
reaches zero value^The corresponding point of collapse then determines
4 that

as the vectors yjg exp Q8)

this is in
lie

the unique value y/g m exp (j<5m ) which determines a


Setting (6-50) equal to zero one obtains

^max

maximum

of

V^7

W = fmax

(6-51)

where
e

= ^ 2cos

V+
i

The negative
than

1.

sign

must operate

cosh2<?"
}

+ r2

in (6-51) to furnish

!P real

and smaller

OPTICS OF THIN FILMS

272

The

real

(6-49) with

and imaginary parts of y/gm exp

V replaced by
_

<Fmax

m) are then given by

(j<5

This leads to

yix -2ymM cos2</ r2


(1

(6-53a)

- ^a** 2 ) 2

and
tan|<5J

= l-^costy'

<

Sm

<

3rc/2

^maxSin2<i9'

Fig. 6-13 Tansmittance contours for

a chromium

layer.

(6-53b)

GENERAL THEOREMS ON STRATIFIED MEDIA


now important

It is

273

to note the following: the target value

T,max

depends uniquely on the parameters of the layer, not on its embedding.


Neither does it depend on the direction of incident light, i.e.

9W = SW
although generally

*F R

To maximize
(6-53a, b)

^
it

P L , since
is

gK

eL

(6-54)
.

of course necessary to synthetize the values

by proper backward extension. There

dielectric structures leading to (6-53a, b),

for a fixed metallic layer. (It

is

is

an

infinite variety

of

but these target values are unique

to be recalled that the whole discussion

is

limited to one wavelength only).

now have

Let us

and consider

it

translumination.

tension S 2

now

a transluminated layer with a backing system S 2

for the L-direction of incident light, again postulating

By

6.4.1 the

new

may

process

appearing on the incidence

disregard the former ex-

side.

Since the metallic layer

unchanged, the design value s]gm exp (j<5m) for maximizing "P is the
same as before, but nothing prevents us from synthetizing it by a different
structure S t We then have the metallic layer in asymmetric embedding
itself is

when

qk

QL

Simultaneously

it

must hold by

w
r max _
1

Qr

(6-54) that

Ql

only possible when g R = g L = 0.


follows that the stack S t which was designed to maximize W for the
L-direction has the property of completely antireflecting the composite

which

is

It

system

MS 2

for the R-direction.

by the uniqueness of gm exp (jdm) and by the symmetry of the


device, S 2 can replace S t in its role, we have arrived at the following theorem:
Since,

A single metallic layer is manipulated into its maximum transmittance


= !Pmax for g K = g L = 0), if the matched system MS 2 is
extended into the symmetrical system S 2 MS 2
This theorem is important for the design of induced transmission
possible (Tmax

monochromatic
Fig. 6-14

filters. (Sect. 7.3.2).

shows the Argand diagram of the

reflectivities

,/^ exp

maximizing the potential transmittance of chromium layers (n


A = 5500 A) at various geometrical thicknesses. The !P
max - and

versus-/; curves are also

O'^m)

(a/T) min

3j,

shown.

Such diagrams may be computed for any single metallic film indepenits embedding. During a particular design procedure, however,

dently of

OPTICS OF THIN FILMS

274

the factor V#m ex P (j^m) 1S not a convenient design quantity, because it


corresponds to a system inserted on the emergent side seen from the metal.
It is difficult

to acquire a practical insight into the properties of a stack

starting with a metal/dielectric boundary.

(We

also recall that the deisgner

have to cope with situations where q > 1.)


It is easy to dispose of this situation by setting up an Airy summation
formula for the layer / in Fig. 5-2 as the spacer layer, the first system being
will

200

100

ij\

25
30

000

WO

500

EOT

700 h A'

tfmCosSm

m\

/4

js"

m\/

-"^^
:L

Fig.6-14 The (a/r)


chromium layers of different thickness
(a). The Argand diagram of the

xoK

a\

3B0*
wo

b)

corresponding matched rear


reflectances

(b).

GENERAL THEOREMS ON STRATIFIED MEDIA

275

represented by the metal-dielectric Fresnel reflection coefficient fM( , the

system

playing the part of the rear subcoating.

Expressing thus

^Qm
rD e

exp

ja ">

The absolute value of


is

performed through

we can

(j5m)

invert the formula to obtain

= ^-ygme*"

the right-hand side determines r D

the tuning

2q>,.

General absorbing system


a) Reflectance matching

The problem of maximizing

potential transmittance will

now be

investigated for a general layer system, with a limitation to external trans-

lumination.

We

shall again single out the metallic core as in Fig. 5-1

and

with

refer to Eq. (4-44) connecting the net radiant flux across the plane

the total-field components in the plane /.The exploitation of this relationship

depends on the type of media behind the core. Let us

first

review the existing

was only one metallic layer backed by a semi

infinite half-space,

possibilities.

If there

we

obtained the formula (4-46) for the inevitable absorptance with the
substrate index n 2 as the design parameter. (This formula even admits
oblique incidence.)

One can

seek the

but the limitation to a real n 2

extremum, because the Fresnel


variable

represents

coefficients,

may

minimum

of

oc/t,

or

maximum

of T,

hinder the attainment of the absolute

reflection

on

one-dimensional

r\

from which the optimum value

r\, x fixed and


2
complex reflection
may be absent. In fact,

\x\n 2 with

of

variety
(6-53)

a serious principal limitation already exists in the circumstance that the


Fresnel reflection coefficient is smaller than unity, while maximum potential
transmittance often calls for q > 1. Nevertheless, practically useful improvements may be obtained in this way, as will be shown in 7.3.1.

The next generalization so far made was the manipulation of Eq. (4-44)
with respect to the existence of the system II behind III (Fig. 5-1), introducing
the reflection factor (5-1) in accordance with Fig. 5-2.
If

we now use

mittance by (5-13)

the resulting formula (5-3) to compute potential trans-

we obtain

the expression

* ??

A + Bq d + 2 C^Jqo cos (/i +

(6 . 56)
S'lR )

OPTICS OF THIN FILMS

276

which

is

an obvious generalization of

may be

(6-47). It

regarded as the

potential transmittance of the core III plus the adjacent dielectric layer

All the quantities involved in this formula are given by the relations

An

/.

(5-4).

advantage of the formula (6-56) consists in the important rear

reflection factor being directly defined with respect to the first

behind the core, not to the

last

boundary of the core

been explained why such a situation lends


procedures.

Among

itself. It

more

itself

readily to design

>

other things, the paradoxical case g

This will become evident in the course of a

boundary

has already

is

avoided.

new computation of

isotrans-

mittance contours on the basis of formula (6-56).

They form

circles

on the complex plane with

l+BW

and

TC sin

-yCcosn

'

ft

centres at

^' J

1+flfJ

radii

[(C

where

- AB) T 2 +

C 2 - AB =

The

centres

contour of zero

A)

V+

l/2

l]

[1

+ BY]'

(6-58)

1.

lies

{B

is

on a

straight line passing

through the origin and the

identical with the unit circle. All the other circles are

nested inside and the

maximum

equal to zero. Thus

value of

found by

is

I/A-B^
^A-B
T^ Vl"V1
.

The proper value

<

!Pmax

<

is

setting (6-58)

+1

(6 - 59)

-J

then inserted into (6-57) to obtain

the real and imaginary parts of the reflection coefficient yJg Dm exp
securing that !fmax

(j<5'iRm )

The

dielectric stack

to the required g D
S[ K is

in Fig. 5-2 need be designed only with respect

Whatever the accompanying phase

then secured by choosing a convenient value for

If the stack

D is alternating and quarterwave,

shift
q>

which

8 D the required
,

in (5-4f).

is

usually the case,

or n depending on whether the layer / has a lower or higher


then 8 D =
index of refraction than the following first quarterwave.

The present approach involves as a special case the single metallic


from (6-47) in that the spacer layer / is included in the
and
absorbing stack
^q d exp (j5J R ) is seen from the spacer layer a result
which formerly required the separate step by (6-55). The denominator is
correspondingly more involved, containing the combinations A, B, C of
layer. (6-56) differs

GENERAL THEOREMS ON STRATIFIED MEDIA

On

the matrix elements.

277

the other hand, the numerator does not contain

any interference term.

Having proved the existence of the value


it is

again independent of the direction of

y^, we may
,

The answer

light.

is

ask whether
positive,

but

the proof will be deferred to the next paragraph using the admittance

formalism.
b) Admittance matching

Another important approach to the manipulation of Eq. (4-44)


is backed by a dielectric multilayer

case that the absorbing stack

introduction of the relationship H, s

= Y (0E

is

Y (0

where

is

in the
is

the

the input ad-

mittance on the /-the boundary seen from the metal. Since this quantity

continuous across the boundary


plane

/.

Denoting

it

formally as

is

we may well take it at the right face of the


Y' <0 we obtain the input admittance of the
,

boundary by transforming Y' (,) according to the formula (2-43),


taking the angle q> negative owing to the crab-like shift between the two
quantities. Thus
(/

1) th

y^^-J^ang

(6-60)
V
'

^-jY'^tan?,
l)

is the matched admittance securing maximum potential transmittance, then the design admittance for the matching stack is computed

If Y'

by

The angle

(6-60).

cp t

furnishes one degree of freedom in this matching.

Part of the literature

formalism.

We

on induced transmission

not enter into the details of

shall

written in admittance

is

this

matching, but derive

in accordance with Baumeister, [15], the admittance version of the theorem

on maximum potential transmittance.


Eliminating H,^ by means of the input admittance,
be written in the form

Ems H* = (w^m*! + Y")|s12


+ Y m l2 m*21 + Y^m^mtz) E
5

Writing further

of (6-61)

is

jz and

i}

m'n

(6-61)

m'^, the real part

evaluated as

D(x, z)

where the

(,)

(s

may be

+
2

(4-44)

coefficients

D o0 +

D, x +

D 01 z + D 22 (x 2 +

of the quadric are defined thus

z2 )

(6-62)

OPTICS OF THIN FILMS

278

wii^i + w w 2i
Dio = m'i2 m'2l + m"X2 m"2x + m'xx m 22 +
= + lim'^m"^ + m 21 m'i2 )
Doo

'i'i

m'xl m 22

D 01 =

D 22

(6-63)

m"xx m 22 + m'x2 m 2X - m"x2 m'2x - m'xx m"22 =

= 2(m 2x m'X2 - m'22 m'xx ) =


= m'X2 m 22 + m"X2 m'22

(The condensed form of the central


interdependencies

among

the m\ v

2(m"tl m 22

made

coefficients is

m"

Vi

m'21 m"12 )

possible by

some

following from the unimodularity of

the interference matrix.)

The

net flux behind the absorbings stack

Re

(E, S H*)

is

proportional to

= Re (Y<>) E
|

2
(s

(6-64)

hence the potential transmittance as the ratio of (6-64) and (6-62)

is

given

by

^T

*=

<6

65 >

D(x,z)

Isotransmittance contours are circles of the type

D 22 W(x 2 +

z2)

+ (D 10 P -

l)x

and, again, the point of colapse indicates


It

may be

+ D 01 z + D 00 P =

fmax

expressed as

^ x=(D.o + 2Fr^
mil

F = (r> 00 V 22 - ^T>l,y

(6-66)

and the components of the corresponding matched admittance are

D 22
For

< W <

!Pmax

max

= zmax

remains to prove the symmetry of

sible directions

2D

the circles of constant

positive half of the straight line z


It

D 01

_
'

(6-67a, b)

have centres on the

max with respect to the

\j/

two pos-

of propagation.

Stacking the elements of the core in reverse order

may

be described

by a sequence of interference matrices which are related to the present


ones in such a way that the elements of the main diagonal are interchanged.
(Compare the considerations around Eq. (6-23).) Inspecting the formulae

GENERAL THEOREMS ON STRATIFIED MEDIA

279

D 10

and F are invariant


to such a change, hence Waax is the same for the R- and L-directions.
According to (6-67) and (6-63) the matching admittances for either of
the directions are different (unless the core is symmetrical.) This means that
the antireflecting stack on the incidence side is not obtained by simply

(6-63)

from

this point

of view one

mirroring the matching stack.

matched and

may

It still

verify that

holds, however, that for a properly

from both

antirefiected system the reflectance

sides is zero.

This allows to regard antireflection for the R-direction as matching the

emergence side for the L-direction.


c) Potential transmittance in terms of bilateral invariant

We shall now elaborate on some further aspects of induced transmission


using recent results of Thetford,

of

[16],

and

relating these with the principle

reversibility.

Thetford studied the properties of the expression

K=

2[Re {m iv mt 2 )

+ Re (m X2 m*2l )}

(6-68)

and found

this to be a characteristic quantity of the absorbing core, independent of any left and right dielectric outer extensions. (The proof is straight-

forward when writing out the product of the three matrices and using their
unimodularity.) This two-sided invariance is a new result as compared with
the invariance of potential transmittance to the outer-left extensions alone.

Referring to our equations (5-4a,4>)

K=
It

requires

some manipulations

we note

that

A -B

(6-69)

to establish the relationship of

to

measurable quantities:

Kx
The right-hand

We
as

t/t',

qr

x'

qk ql

side of this equation

shall consider

where

ql

2t

vWl cos

5.

By

transmittance

qJt =

(6-70)

(6-14), taking

concerns a negatively conjugate system (x -+

using the relationship

CO

identical with that of (6-20b).

normal incidence with

ing the corresponding potential


finally

is

q'^x' following

t'(1

from

x), introduc Qr)' 1 and

(6-14), the

com-

parison of (6-20b) and (6-70) yields

K=
+
/

u/'

(6-71)

280

OPTICS OF THIN FILMS


Suppose now that the system

reach the conditions

W = fmax =

from

g'

as follows

(6-14)

transluminated and front-extended to

is

T max with g R

ql

Then

0.

also q'r

and (6-71) then reads


"max

By

(6-14)

lumination

equals t/t' in any case. In the condition of absolute trans(6-20a) also equal to T 2 ax

by

it is

T max

"max
In view of

is

in agreement with

It is

^max

(6-72)

*max

this

K=
which

Hence

"Pm ax

(6-73)

^max

one of Thetfords interpretations of this invariant.

evident that the quadratic equation for ?, ensuing from this

is

identical with (6-59).

The

invariant

has so far been introduced as a formal quantity

without any direct physical interpretation.


ference to the reversibility principle and

We

shall try to find this

some of

its

by

re-

consequences evolved

in 6.2.

Let us rewrite (6-70) with


transluminated,

isT!fmax

<?

i.e.

(1

K expressed as (6-73) and assume the system

q r ) !Pmax

t.

The

left-hand side of (6-70) then

Referring once more to (6-14)

t, t r

t'l

t'.

equation (6-70) becomes

t/t',

Wl +

further replace

Ql

where t r = tl
Reducing

we may

QrQr

2 \/(*rt:LQrQr) cos

a>

t' !Fmax

(6-74)

qr

In terms of the negatively conjugate potential transmittance, q r may


be expressed as 1 t' 5** and the right-hand side equals unity because

of

(6-72). (6-74) is

We

thus

then identical with (6-20c).

come

to the conclusion that, in the counterabsorbed case,

Thetford's equation (6-70) is actually a statement on the absolute value of the

amplitude, obtained after reversion in accordance with equation (6-5a).

When

the system

is

not counterabsorbed, the identity (6-70)

may

formally be written as

vf +

R t*

2
|

t'

(k - -~ -

(6-75)

GENERAL THEOREMS ON STRATIFIED MEDIA


which

is

again compatible with (6-5a), because the bracketed term

ally equal to zero

Let us

now

owing to

so,

equation by

may be

r, it

Ql

Regarding

this as

y/oL

^l

again,

is

identic-

(6-71).

return to (6-70), express

transluminated,

Since

281

(1

K by (6-73) and suppose the system


=

q r ) *Fmax

recast into the

Dividing

t.

the

resulting

form

YmBtx JqrQl cos (d +

q r "P^x

a quadratic equation for s/q l we can solve

= -

must be

^max

real

COS

V^R

and

>

Vt^ma^R^OS 2

positive, this

CO

1)]

imposes the condition

co

and we have

The phase behaviour of a transluminated system therefore resembles


The relationship (6-76) may be of help in

that of the purely dielectric case.

monitoring the manufacture of an induced transmission

filter.

It

defines

the imbalance between q k and g L for a transluminated system being frontextended until the final condition g R = g L =
is reached.

The reader

is

referred to Thetford's paper for a proof that q d

may

also

be expressed as
n
^D

1
1

and

for other

new

details

_ u/ip-i
max
_ WW
z I max

of the design when more metallic layers are

contained in the core.

Note:

A novel technique for maximizing potential transmittance was described


in [10].

It is

based on the extension of the concept of equivalent layer to

(symmetrical) absorbing systems and a

maximum

of

*P is

secured by manip-

ulating the imaginary part of the equivalent refractive index to zero.

References

[1]

H. Wolter, Z. Phys., 105, 290

[2]

Z. KnittI, Opt. Acta, 9, 33 (1962).

[3]

[4]

[5]

I.

(1937).

Santavy, Opt. Acta, 8, 301 (1961).

G. Kard, Opt. i Spektr., t. XI, No 2, 237 (1961).


A. Herpin, Compt. Rend., 225, 182 (1947).
P.

[6]

L.

[7]

A. Thelen,

I.

Epstein, /. Opt. Soc. Am., 42, 806 (1952).


J.

Opt. Soc. Am., 56, 1533 (1966).

OPTICS OF THIN FILMS

282

[8]

[9]

A. Thelen, Design of Multiayer Interference


G. Hass and R. E. Thun, Vol. 5, Academic
see ref. 29 in Ch. 3.

[10] B.

V. Landau and P. H. Lissberger,

[11] P.

W. Baumeister and

[12] see ref. 1. in

Ch.

[15] P.

[16]

W.

Physics of Thin Films, Ed.

Opt. Soc. Am., 62, 1258 (1972).

C. Ufford, /. Opt. Soc. Am., 64, 329 (1974).

G. Kard and Z.
see ref. 8. in Ch. 1.

Knittl, Opt. Acta, 8, 185 (1961).

[13] P.

[14]

/.

Filters, in:

Press, 1969.

Baumeister, Appl. Opt., 8, 423 (1969).

A. Thetford, Opt. Acta, 19, 533 (1972).

Problems

6-1

Try do deduce the general Airy summation formulae (2-29a, b) by


applying the reversibility principle to parts I and II of the split system
and connecting the two sets of equations by phase transformation
across the spacer.

6-2 Defining with dielectric embedding

consider that

r'R

cos o).=

t'L

aR a L

x'R

k + i ~VR

and then compute from

(Qr

Ql)

t-a R

-tt L

r=

x'L

n nk + it[

2
,

(6-20a)

tt'"

2t ^JQ RQ L

and compare with Cownie's inequality


COS

0)

<

cos CO L

Note the inference that


6-3

What

are the inferences

g2 <

from the

(ref. [15]

in Ch. 7)

oe
R + aL
principle of reversibility for
.

(ii) two-sided antireflection q r


sided antireflection q r =
Distinguish between the dielectric and absorbing cases.

6-4 Considering the

<p e -function

in Fig. 6-2

on the transmittance maximum

(i)

ql

one-

0?

what prediction can you make

of a Fabry -Perot sandwich

spacer consists of either of the periods (0.5 A) B(0.5A)

if

the

7
Basic metal/dielectric design units
The FabryPerot sandwich

7.1

When,
(initiated

by

in the metrology techniques


their teacher

of the 1890's, Fabry and Perot

Raymond Boulouch*)

replaced the Michelson

new experimental set up consisting of parallel-sided


mirrors some centimeters apart and monochromatically illumin-

interferometer by a
half-silvered

ated over a collimator with extended circular

towards what

is

slit,

they

made

the

first

step

today called multiple-beam interferometry. The super-

position of the many effective partial reflections inside the air gap gave
rise
to a type of Haidinger circles of equal inclination, exhibiting extreme
sharpness in the bright transmission maxima. This enabled exact evaluation

of the distance between the

reflecting surfaces in

and the Fabry-Perot interferometer with

terms of hundreths of A

was born.
Conversely, keeping the air gap fixed and observing a composite
variable spacing

one could further enhance the resolving power of a normal


spectroscope by means of the Fabry-Perot etalon, placed in tandem with
the main instrument.
spectral line,

This occasioned the


formulae, because as

made

first effective

use to be

made of the Airy summation

much

as sixty zig-zag reflections inside the spacer


significant contributions to the geometric series of complex amplitudes.

was recognized that the high reflectivity (betwen 60 and 90 percent) of the
interferometer surfaces was responsible both for the sharp fringes and for
the slower convergence of the series and the concept of multiple-beam
It

interference began to
*)

grow as a synonym for sharp

See a retrospective note

in [25].

fringes of

any kind.

OPTICS OF THIN FILMS

284

This was particularly brought forth in 1942, when F.


produced multiple-beam interference in a Fizeau wedge by
surfaces. This time extremely sharp

S.

Tolansky

silvering its

dark fringes of equal inclination could be

observed in reflected light (or the corresponding bright fringes

in transmis-

sion).

At about the same time sharpness


in the spectrum
filter.

This

is

in space obtained its counterpart

when Walter Geffcken invented the metallic interference


Fabry Perot etalon whose thickness is chosen

essentially a

to be extremely low (amounting to only a few half-wavelengths).

Despite the high reflectivity of the interfaces, the Haidinger central


fringe

now widens

across the whole aperture of, say, 50

mm,

because the

variations of the incidence angle cannot produce significant changes in the

phase angle Ink" 1

when A is small. However, a significant change


may be brought about when k varies over the visible spectrum. Then,
cos

qualitatively speaking, again

as sharp a function of A as

Placed in a

it

due to the high silvering, the transmission


was of & when A was large.

beam of white

light

is

of moderate collimation (simply

observing a white wall or the sky, with the eye some distance behind the

specimen) the degenerate etalon acts as a monochromator. This


often referred to as the Fabry-Perot type interference

is

why

it is

filter.

on the basis of formulae


spacer layer, embedded between two

All three types of interference are analysed


describing the behaviour of a dielectric

more or

less

semitransparent metallic films.

We

Fabry

shall call this the

Perot sandwich. The immediate variables of observation are in turn the


angle of incidence, the geometric thickness and the wavelength,
effectively leading to a variable

all

this

phase angle of the spacer layer (the properties

of the metallic interfaces being regarded as approximative^ constant).


There are some points of detail to be respected in the geometry of
observation in the fomer two cases, which will not be dealt with here
the wedge-versus-sharpness problem with the Tolansky fringes).

keep to our assumption of plane waves reflected on parallel-sided


ations, so that
results,

our analysis

however,

may

will best

fit

the interference

serve as a reference

problems of interferometry.

filter.

when studying

We

(e.g.

shall

stratific-

Many

of the

the actual fringe

BASIC METAL/DIELECTRIC DESIGN UNITS

285

7.1.1 Basic formulae

The

pattern for the basic reflection

Fabry Perot sandwich was


the subsystems

and

and

out in

set

and transmission formulae of the

We only need to interpret

sect. 2.6.1.

the metallic films (generally of different materials

II as

thicknesses).

Considering the media n

n t 2 n3 4
,

us agree on the following

let

notation:

h = sq'
tm

jS '

rn

= v q" eja

with subscript

Ncos^

\]

n 2 cos

ln 2

\J

n 4 cos

cos0

n cos

or

6>

@4

Because of theorem 6.1 the transmissions


with any subscript of orientation.

#',

S" need not be provided

The energy coefficients of reflection and transmission for the composite


system will be denoted by St and ST. We shall consider these coefficients for
the R-direction only and the corresponding subscripts will not be used.
Finally let us write in the spacer layer 2q> = x and the bracketed

expression in (2-29a) as
Starting

g exp (jy).

from

(2-29a, b)

ek

(V(?i

g QR

Q'lQr

+ gVe R ) 2 -

and using the notation

2g Vgjgj cos (x

2 Ved?R cos (x

4g vW?r

sin

5'
R

S'L

(6-7),

S*

we

obtain

y)

(7-la)

- SQ

^-

y)]
(7-lb)

(1

Jq'lQ*)

,=
^
An alternative
summed

4 V<?a?R sin

~(x -

S'L

5)1

9'9"

denominator same as above

formula for 0t

(7-21

is obtained when taking the first reflected


then start from (2-30a), where the geometric series is
up in closed form, but we do not form a common denominator.

ray separately.

After

We

some complex algebra we obtain

OPTICS OF THIN FILMS

286

m = g' +

9'

a 'gR

2\/gLgRC0s(a>
1

qLQr

ip

2 Vgi.gR cos

where some further angles were introduced


usage:

defined by (6-16) as 2d'

is

* =
Some
in

all

<5

8'

2gRVgRg^cosct))

(\ji

x)

Si while
-

5l

and

(7-4)

(7-3) are given

7-1.

these formulae the metallic coefficients

may

often be regarded as

constant, at least in the narrow regions covering a fringe. If


spatial

(-7.3^

in conformity with existing

hints for proving the equivalence of (7- la)

Problem
In

x)

fringe,

we

it is

a Haidinger

neglect the extremely small departure from normal

incidence and the corresponding implications for the p- and s-components.

Studying the spectral profile of an interference


of the optical constants and interference

filter,

effects

we

in

neglect dispersion

the extremely thin

metallic films.

These simplifications are typically made when analysing the fringe

We

profiles in general algebraic terms.

shall also use

them

in the next

section concerning a type of trigonometric expansion for the sandwich.

On

the other hand,

when numerically

analysing the spectral transmit-

tance of an interference monochromator by a computer,

it is

easy to keep

the metallic films as "live" as they actually are.

&

7.1.2 Fourier expansions for

and sr

If the geometric series (2-30a, b) are not

summed and

the moduli

squared are calculated directly from the expanded forms, we arrive at


infinite trigonometric series which may be regarded as the Fourier expansions

and transmissivity. The method proves useful


analysing many of the typical features of the Fabry Perot sandwich.

of the formulae for


in

reflectivity

Introducing the notations

2d'

5R

QiQ*

and using those already defined


amplitudes

may be

written as

= z\<

=x

-xjj

1)

in 7.1.1, the infinite series of

(7-5)
(7-6)

complex

BASIC METAL/DIELECTRIC DESIGN UNITS

= Vek e

fR

^'

S'

287

^ eK- I= z k e"
k
>

(7-7a)

It is easily seen that carrying out the summation from


to finite k
means summing up the contributions of the first k + 2 interfering rays
in reflected light and k + 1 rays in transmitted light. The ambiguity of this
rule is caused by the first term in (7-7a) which stands outside the summation

We

shall

"odd" term causes important


and

subsequently that this

see

differences in the behaviour of the sandwich with respect to reflection

transmission.

Let us take transmitted light

We

first.

have

ST

$'"

m,n = 0,

m+n

(cos

SX

m,B = 0,

which for a

m cos n +

-~{\l ~ z2(k+1
This relation gives for
two-, three-, four-,

m{ sin nt) =

m+n

cos(m-n)

I,...

number k of summands

finite

sin

1,...

>]

1, 2,

yields

z"[l 3

...

2 <k

- +

]cosK

(7-8)

a mathematical description of

-beam interference in transmitted light. For k -* oo


the terms in the brackets simplify to unity and we have the exact
solution
. . .

f(x)

The
is

infinite

[1

zm cos m(x - i/0]

(7-9)

trigonometric series obviously converges uniformly and


series. Since the expanded transmissivity

thus a Fourier trigonometric

function

is

known to be periodic, (7-9) represents the Fourier expansion of


(We recall the assumption of constant metallic parameters,

this function.

explained in

(7-1)).

In reflected light

we

obtain, after a

more

tedious arrangement,

= Qk + V 2QZ I
=
in,n

29' Veie

m+n

cos(m-nK +

0, 1,...

z m cos (m + x -

<x

<%)

(7-10)

OPTICS OF THIN FILMS

288

Xm

Obviously the summation

latter is

covered by the summation

m =

n beginning with

Let us

now put relation

terms

contains interference terms between the

among

ray and those multiply reflected, while interference

first reflected

2mn

the

In addition there are pure intensity

q'

k.
(7-10) in ordered form, proceeding to the indi-

For reasons of generality we again write first the result for


number of summation terms k and then pass to the limit k -> oo.
The double sum has already been rearranged into the form (7-8),
wherein the summation index commences with one. In order to adapt
ourselves to it in the last term in Eq. (7-10) we renumber the indices here
from m to m 1 and make the summation limits 1 and k + 1. The last
vidual harmonics.

finite

term

will then

be written separately.

Introducing the quantities

P =
and noting that a

Qk

(1

\ji

+ P[l-

ra_1

<5r

2(k+1)

a>,

(7-10)

2(k-m+1,

9'

Ve^

(7-1D

can be written in the form

+ 2Qz k cos

}Pz[l

Q =

Qie'ir

{{k

+ l)(x-il/)-m] +

]cosm + gcos(m -

co)}

(7-12)

m=l
which equation gives for k = 0, 1, 2, ... the mathematical description of
the
two-, three, four, ... -beam interference in reflected light. For k =

term

falls off.

For k

-> oo, z k -*

and some terms

in (7-12) simplify. Let us

now

introduce the substitution

Then,

after
I

^( X) =

some rearrangement of the absolute term,


/a/2

JL J"V

rf

which

is

We
will later

Q sin $ = Q sin to

= Pz + Q cos to,

Q cos

\ si

fj
-gRgJgR
+ 2Q
rt

QlQr

(7-13)

(7-12)

becomes

<x>

^n-1 CQS [w(x

^)

(7

$]

_ 14

m=1

the Fourier expansion for reflectivity.


shall write the absolute

terms in (7-9) and (7-14) as ^"

,^

They

be shown to be identical with the transmissivity and reflectivity,


between the two

respectively, of a thick layer with incoherent coupling

surfaces (Sect. 11.1).

by Fabry and Perot

The expansion (7-9) may be found in an early paper


[1]. The expansion for reflectivity and the following

applications of both series were presented by the author in

[2].

BASIC METAL/DIELECTRIC DESIGN UNITS


First partial

289

sum and two-beam approximation

As an immediate application of these expansions let us assess the quality


of the two-beam approximation, occasionally used to describe interference

The

in a single film.

By using

0k

while the

first

role of the film

(7-12) for

partial

k =

$' 2

Qr

sum of
0t o

is

in

our case played by the spacer.

one has

(7-14)

sum of a

>{/

(7-15)

to)

is

+ 2Q cos (x - ^ -

These are different expressions. Since


that each partial

29' Jeke'k cos (x

it is

Fourier expansion

(7-16)

4>)

is

known from

series

theory

a better approximation in

the sense of r-m-s deviation than any other trigonometric series with the

same number of terms, we may question the

quality of (7-15) as

compared

with (7-16).

The

may
Qi

latter is justified in place

already

still

come about when

there

is

no

if

<

1.

Such a situation
first boundary,

metallizing of the

being allowed to be large.

Then q^
The

of (7-14) only

q'

l is small, o>

it (see 6.2.1) and therefore

$ = 0.

now becomes

substitution (7-12)

Q = PZ - Q
while the absolute term

is

approximately q^

9' 2 q'^. (7-16) then

assumes the

form
Qk

,2

e'k

(i

eS> 9'

Veiei cos (*

(7-17)

*)

is to be compared with (7-15) where a> = n.


Assume first that even q'^ is small. The two expressions are then identical
and the two-beam approximation may be declared as the best one, when,

This

for example, used for a dielectric film.


If 0r is large, then the first partial sum of the Fourier expansion yields
a smaller variable term than the two-beam approximation. The maxima and
minima will be less pronounced, which is in accordance with a classical
theorem due to Rayleigh that a dielectric interference film on a perfect

mirror does not exhibit interference colour.


In fact, for qI = 1, Pz Q
exactly and the absolute term
equal to unity: 0l(x) = 1 without any interference.
(7-17) has the

same tendency, although

unity by the small value S'g.

its

absolute term

falls

is

short of

OPTICS OF THIN FILMS

290

On

the other hand (7-15) behaves quite erroneously, keeping up inter-

and substantially exceeding unity in the maxima.


one thing, however, that one can extract from (7-15) correctly
even for large q'k. It is the location of the interference extrema, which, after

ference oscillations

There

is

what matters when recourse is had to the two-beam approximation.


The argument is in fact x 5^ <5, which yields results in accordance
all, is

with the correct formula (Sect. 7.1.4, Eq. (7-28), also 7.2 Eq. (7-60).)
In transmitted light there exists clear identity between the two-beam
series

the

and the Fourier partial sum for any value of z and for any kind of
system. Both are of course justified only for small z.

first

Position of the extrema

Let us appreciate the usefulness of the various approximations for


finding the extrema in the case of the completely metallized etalon.

By

setting the derivatives of the functions (7-9)

one obtains the following

and

(7-14) equal to zero

table.

Table 7-1
Conditions for the extrema of a Fabry

Perot sandwich

in various

approximations

=
d#/dx =
2 ms m sin m(x y) = 0; ,/(l 2z 2 cos 20 +
+ z 4).sin(* y> =
= 2z sin 0*)
sin (x y> <P) =
1
=
> sin m(x
sin (x y> <o) =
f
d-T/dx

(A) Complete description

j8)

(B) 1-st partial

sum

yt)

(C) two-beam

interference

The transmitted
result

jc

With

\j/

In, I

light

poses no problems and

0, 1,

versions lead to the

...

reflected light there exists a difference

and between (C) and

all

both between (B) and (A)

(B).

An idea of the differences involved may be gathered from the following


Ag MgF2 Ag-

table 7-2 concerning a reflection sandwich of the type air


*)

This formula was obtained by putting the expansion of the

closed form

summing over complex

series.

tanS

The angle

fi is

2
= 1+z 2r-tan#

1-z

defined by

first

derivative in

BASIC METAL/DIELECTRIC DESIGN UNITS


glass,

where the

first

291

Ag-layer has a variable thickness

h,

the other being

very thick (1000 A).

The

values

(in degrees) securing

first

minimum

order reflection

are computed. In addition to the computation by (A), (B), (C) a fourth


is added, resulting from the simple requirement that the argument
of the numerator cosine in (7-la) be equal to 180.

value (D)

Table 7-2

Comparison of various computations of the


St
for an air/Ag

phase angle x securing

MgF Ag/glass
2
in degrees).

reflection e talon.

(Phase angle x

hk

(A)

100

223

195

237

231

150

242

213

245

200
300

252

225

263

241

500

269

251

240
247
254
296

(B)

(Q

(D)

254
263

269

ooo

100a
o

The angles co,


and jS with dependence on metallic film thickness h x for the
combination air/Ag/MgF 2 A = 5500 A, n l = 0.15
3.36 j, n 2 = 1.38.

Fig. 7-1

OPTICS OF THIN FILMS

292

This

is

a simplified look at the extremum, taken over from the purely

which in fact is not allowed when the cosines of the numerator


different additional phase-shifts: the extrema of ^?
are then not identical with those of the numerator. We shall look for the
extrema in a correct way in Sect. 7.1.4. We have already one version of the
dielectric case,

and denominator have

correct result in (A).

Nevertheless, case (D) compares

more than favourably with the other

approximations, at least in the chosen numerical example.

3S0

Argand diagram for g eiy with dependence


on h i for the system mentioned in figure 7-1.

Fig. 7-2

In general one

may

say that the differences between (B) and (C) tend

to vanish for heavy coating of the

with the fact that both

and

For small values of h, (C) is


We append Figs. 7-2, 3

<P

first layer,

which

is

common

tend to a

inevitably connected
value. (See Fig. 7-1 .)

better than (B).


illustrating the

behaviour of the quantities Q,

<P, g, y for the given layer system.

Shape of the extrema


Since the expansion for &~(x)

extrema at (x

On

\fi)

the other

In, these

hand

0t(x)

is

a mixed

series

+ 2Q (cos # 2 C +

where E c 2 S are pure cosine and


,

a pure cosine series and S~(x) has

is

are symmetrical about their centres.

of the type

sin <P

sine series in (x

2S)

^).

(7-18)

BASIC METAL/DIELECTRIC DESIGN UNITS


There

is

293

an antisymmetrical component

in 9&{x) proportional to sin

which causes the reflection extrema to be asymmetrical. The wnspicuousness of this effect depends on circumstances and is particularly manifest
with reflection minima. We shall refer to this problem later.
Putting (7-18) in closed form by summing the corresponding complex
series

we

obtain

M = ^o + 2G cos

tf>

[cos (x

ij/)

z]

which

is

an analogy to the formula

2z cos (x
(7-3).

$ sin (x
+ z2

sin

ifr)

if/)

(7-19)

The antisymmetrical element

is

clearly visible in the sine term.

tit*
too

Wf20o(

250

so

\3D0

050

\
i

\? y- 4

A,

Argand diagram for Q e j * with dependence


on h t for the system mentioned in figure 7-1.

Fig. 7-3

7.1.3

The transmission

We

have recognized the

layer in Sect. 3.1.4.

we need

filter

We

then

filtering potentialities

left

of the single dielectric

the analysis with the conclusion that what

maxima is some means of


of the interfaces. The purely dielectric solution

in order to obtain sharp transmission

enhancing the

reflectivity

was discussed in Sect. 3.5.2.


The simplest device to put this

into effect

is

the metalic single-half-wave

normally considered in the cemented version glassmetal-dielectric-metal-glass. For reasons of symmetry its performance will
interference

filter. It is

be optimum when the two metallic films have identical properties. (One

OPTICS OF THIN FILMS

294

would hardly contemplate two


h t =h 3 .)

We

then have

q'^

&=

different metals, but the point is -to

%'

T"

t, S'l

<5

=5

and

make

(7-2)

may

be written

*
1

r-
-2q cos

(x

25)

which may be recast into the form


$-

j^

(7
v

+J^sin 2 (<p-5)

. 20)
'

where
*

_/

~_

4g

(j + aj'

Ve e

J*

is

the metallic coefficient of reflection seen from the inside of the

holds that q + x + a.
concern either of the metallic films alone.

spacer layer and

it

1,

where

all

three coefficients

The designation ^"max for the expression (7-21a) is justified by inspection


of

(7-20); this function clearly attains its

maxima

for zero values of the

sine.

These are obtained when the argument

q>

S equals an integral

multiple of n, which leads to the following condition for the tuning of the
filter:

A=
The value of
slightly on

depends

<5

n2h2

= m+

for an

-~
j

MgF 2 /Ag

filter lies

integer

(7-22)

between 100 and 140

the thickness of the metal used and on

X).

(it

The fractional

part of the

filter's order lies between 0.60.8 and one may start the sequence
of m in (7-22) with the value and still obtain a physically reasonable result.

For practical purposes it is useful to plot the function (7-22) graphically,


taking 6 for a contant value of h, say 350 A, yielding the reflectivities in the

85 percent range.

If we start with
= and if 8 were independent of
obtain a straight line with the tangent S/2it.

Now,

for

slightly with X in

Ag

at the normally used thicknesses

such a way that the function

2re

A,

we would

happens to increase

BASIC METAL/DIELECTRIC DESIGN UNITS


is

essentially a straight line

of the type

A=
where A'
It is

>

42 - A

a constant correction

is

then clear that for any order

A=

295

'

shift.

we have

in place of (7-22)

(y~ A ') + w y = (m + 1) T~ A

'

Therefore, renumbering the orders from 0,

we have the same net as

1, 2, 3, ...

to

1, 2, 3, 4, ...

in Fig. 3-3, only the straight lines are shifted parallel

to the A-axis by a constant

amount

A'.

Ag/Mg^Ag
AgjZnSJAg

corrections

ford
1.0

Fig. 7-4 Calibration lines for


filters

Ag

&(/im)

Fabry

Perot type

with two different spacer media.

All this has a sense only in the spectral range


rely

on the quoted

4000 7500 A, where we

optical constants of silver. Outside of this region, or with

other metals, or with a highly dispersive spacer dielectric such as ZnS, this
exceptional situation would break

bent calibration
Fig. 7-4

"new"
it

orders

yields. It is

down and we would have

to put

up with

lines.

shows calibration
2, 3, 4.

Number

lines for the

1 is

Ag-MgF 2 -Ag

omitted owing to the low

obvious that the design data significantly

would obtain from the simple mkjl

rule.

differ

filter

for the

filtering effect

from those one

However, for high

the relative

error thus incurred decreases.

The graph

also offers important information

on the position of the


filter is being manu-

neighbouring maxima in the case that a higher order

OPTICS OF THIN FILMS

296

factured. Additional coloured

glass or interference

needed to dispose of this.


Returning to the formula (7-20) in the

blocking

maximum

are

filters

condition one

may

continue the analysis in the following way:

As

the sine deviates from the zero value, the greater the coefficient 3F

the faster &" will

abandon

its

maximum

value. Since

it

influences the defini-

tion of the spectral line (or of a spatial fringe, for that matter)

it is

affection-

ately called the coefficient of finesse.

While the maximum transmission of the prototype filter in Sect. 3.5.2


was 100 percent, the presence of absorption in the metallic films causes it to
fall

For the

to substantially lower values.

ultraviolet region,
It is easily

maxima, for

q>

visible region it is practically only

among

a reasonable compromise

silver that offers

aluminium

seen that the

is

the values g,

r, a.

For the

more adavantageous.

minimum

transmission occurs in-between the

odd multiple of n/2, and that it is given by


when q is replaced by + g in the denomin-

6 equal to an

a formula analogous to (7-2 la)


ator.

We

then define as the contrast of the

It is

some

to be noted, however, that the

filter

(7-23)

minimum

transmission occurs at

substantially different wavelengths than Xmax , so that (depending

the actual dispersion of the reflectors)

on

we should use different g in the numer-

ator of (7-23). Similarly, the condition for l m!n analogous to (7-24) should

use a different

5,

but these are points of detail which

the rough estimates for which these formulae serve.

may be

neglected in

computer check of

the function 3~{X) reveals the final details.

The sharpness of the filter line is conveniently characterized by


called half- width, or more generally 1/fc-width, defined as

iTk =

K-K

and, of course, A

<

XmiX

where

<

j- A

= *K) = 1 ^(Xmn )

A.

To a first approximation
of the maximum condition
sin

iT(4)

the so

sin {pin)

it is

computed by developing

cos (inn)

A
x

Ak

in the vicinity

(mn +

S)

Kmax

BASIC METAL/DIELECTRIC DESIGN UNITS

297

where we have used (7-22) and have neglected the dispersion of

6,

which

is small.

Inserting this into (7-20)

we

obtain the profile of the line approximately

expressed as the inverse of a quadratic polynomial in dA.

This yields an estimate of the basic shape of the lines the transmission

peaks resemble sharp parabolas.


Secondly,

it is

now

easy to compute

1-g

= 2d/

mK +

For the half-width the square root drops


times used

the tenth-width. Obviously

is

commented on
filter

y/k-l

out.
10

(7-24)

Another value some3iT2 which may be


,

as showing that the edge steepness of a Fabry-Perot type

leaves something to be desired.

We are now able to see the dilemma of the F-P filter between

a large

^max ard a small iTk One is paid off by the other. Increasing the order of
the filter helps to keep nr reasonably small with not too large a value of
q,
.

i.e.

with

little

loss a.

Typical curves of the

Fabry Perot filter of various orders and various


= 5500 A are shown in Fig. 7-5. It is

metallic thicknesses centered at X

a computed performance based on the widely accepted optical constants


measured for vacuum-deposited Ag by Schulz, [3]. The dispersion is given

by table

7-3.

Table 7-3
Dispersion of the optical constants of silver (after L. G. Schulz).

AA

3800
4000

4500

0.14

2.42

5000

0.14

2.89

AA

0.20

1.77

3.36

1.95

5500
6000

0.15

0.18

0.15

3.82

0.13

4.27

0.14

4.68

6560
7100

v.

Practical filters stand up to this performance fairly well. Typical values


are 5"mai = 30 percent, nr% = 100 A. In the blue region, however, silver is

less effective reflector

and more thickness h

performance (compare Fig. 7-5c,

is

needed for a

d). It is also to this effect

slightly

lower

that one can

OPTICS OF THIN FILMS

298

somewhat deteriorated suppression of the green filter on the


short-wave side. Conversely the red region offers a more favourable compromise between ^"ma![ and
2

attribute the

In accordance with the graphs in Fig. 7-4, with increasing order


further

maxima appear

in the visible region.

The blue peaks conform with

the tendency just mentioned.

AA

6000

5000

300

7000

m-1

6000

5000

A.

>ooo

These unwanted maxima are suppressed by cementing with auxiliary


filter glass-plates,

An

effective

^"max versus

iV

but long-wave

maxima

way of comparing

for a given order

are difficult to dispose of.

the performance of

and a given Amax

filters is

to plot

BASIC METAL/DIELECTRIC DESIGN UNITS


This

is

done

in Fig. 7-6 for the order

299

m=

for six wavelengths across

the spectrum.

With decreasing Amax the same ^"max is obtained with increasing #".
Similar graphs may be set up for other orders. With increasing m the
differences diminish.

m-2

woo

6000

5000

7000

m-3

WOO

5000

7000

Afi

6000

Ag

d Spectral transmittance curves for Ag MgF 2


of various orders at two typical thicknesses of the metallic

Fig. 7-5a, b, c,

Basic papers on Fabry -Perot type


duction problems are discussed in [6], [7].

filters

are

[4]

and

filters

layers.

[5].

Some

pro-

A selection of colour glass rejection

filters is

made

in

[8].

Filters

with variable spacers are described in

[9], [10].

OPTICS OF THIN FILMS

300

tOO

200

500

400

300

/f

/"

Fig. 7-6 ^"max -vf-* 2 curves for Fabry-Perot type filters of first order positioned at six

typical

7.1.4

The

We

values.

reflection etalon

refrain

from using the term

reflection filter because

it is

only in

monomuch more common to

exceptional conditions that the Fabry-Perot sandwich can act as a

chromatic

filter

with a sharp reflection peak.

It is

observe sharp reflection dips so one has a channelled spectrum or a system

of dark spatial fringes. This closer connection with interferometry supports


the

word etalon.
Looking at the formula

(7- la) let

us

first

establish

its

relationship with

simpler situations:
(i)

a dielectric layer in dielectric embedding

Then g
<5r
<5r

=
=

The

$L
<5l

=
=

1,

^r

0, q'l

n
= Sr

f r a

Qk
1

q'

r , S'l

or n and

f r a symmetrical combination of indices

reflection function

where the

monotonic combination of indices

is

+ Qrr2V<QRQR COS X
Qr6r

sign operates for the

(7-28)

2VeR eR cosx
two index combinations,

respectively.

BASIC METAL/DIELECTRIC DESIGN UNITS


This formula

and

rR

is

301

essentially identical with (3-3a), only the signs

are taken care of differently.

on a metallic substrate: n n x n 2 <5r may have a gefrom


or jc. We obtain a formula of the type
where x is replaced by x 8'^ and the + sign applies for n ^ n 1

dielectric layer

(ii)

of

neral value, different


(7-28),

We shall discuss this


Now w& assume the

formula

later (7.2).

general form (7- la) and introduce the positive

quantities
i

eu?R

= A

2VSeR =
i

tnf%n u
(7-29a, b,

c,

d)

These are roughly constant.


It is

useful to realize at this stage that

C ^

A ^

D,

(7-29')

because these inequalities are equivalent to the evident relationships

- W<?r) 2

(Jq*

o, (i

VeLe*)

o.

<?l

Further, introducing the angle

we may

<5r

a= -c
s depends solely
it

also

write

may be

on the

(t

T r

<<

A B cos f

first

metallic layer. Considering Eq. (6-1 3a)

expressed as
e

-at

(7-31)

where 6 is the difference d-d' for the first layer in the notation of Sect.
where the dash meant the system taken with negative absorption.
Let us

now

6.2,

seek the extrema of (7-30).

Setting the derivative d^/dd; equal to zero leads to the condition

= AD cose +

b sin

c cos

(7-32)

where
a

= BD sine,

BC,

= AD sine

Setting

E cos x

b:

E sin x

c:

= Vb 2 +

2
,

tan %

(7-33)

OPTICS OF THIN FILMS

302

with x ia the proper quadrant, the extremes of


occur for
ic

arcsin

(tH +

M with respect to
I2n

(or x)

(7-34)

In the following we shall denote the principal value of arcsin (a/E)

having a positive cosine as

Fig. 7-7

'
p

that with a negative cosine as

Mutual relationship between the extremes

Perot sandwich.

of &~ and St in a Fabry

BASIC METAL/DIELECTRIC DESIGN UNITS

The
on

this,

sign of

the

,'

Depending
the upper or lower quadrants, respectively, and it

any of the

lie in

303

sin

is

identical with that of sin

e.

holds that

*-

(7-35)

Fig. 7-7 illustrates the implications of the fact that the extrema
lie

in the cardinal points 0, n,

do not

2n

The top part of the figure is the usual situation in a transmission filter.
If the first reflector had the properties of a dielectric system, then e would be
equal to 7t and (7-30) would have the structure of (7-28). The minima ofM
would be exactly complementary with the maxima of IF and vice versa.
Increasing the reflecting power of the interfaces leads to more pronounced
maxima of ST and nothing other than pronounced minima in reflection is
possible.

now

Let us

consider a genuine reflection etalon with a metallic

layer. Taking, for

1000 A,

l/Ag-MgF2 Ag/G
= 300 A (when gmia =0)

example, the system

we would have

for h t

first

with h 2
e

181.8,

= -4.9, ?p = 184.9. Exaggerating these values (and


X = 193.8 and
not insisting on the zero value for g min) we obtain in the third part of Fig. 7-7
a qualitative description of the extrema in the case that sin e < 0. It is
convenient to have the abscissae plotted both as and as + X- Since there

is

no extreme

in the

upper quadrants, the curves have an assymetry such


minimum is steeper than its left-hand coun-

that the right-hand slope of a


terpart.

If sin e

were

would be depicted by the bottom


The asymmetry of the minima would be reversed.

positive, the situation

part of the figure.


It is

important to note that the position of the extrema by (7-34) not


on the phase-shifts in the sandwich, but also -through the

only depends

a, b, c on the reflectivities accompannying them. We refer the


reader
back to row (A) of Table 7-1 for another version of the phase condition for
extremum reflection, which also makes it clear that the reflectivities explicitly

cooperate.

An important
dispense with the

case of a minimum is one with zero value. We can then


cumbersome computation by (7-34) and infer by direct

inspection of (7-30) that SI

(i)

GO

Jt,

3n

...

i.e.

C =D

if

x + S^
i.e.

<5

ea=g 2 eR

n, 3n,

...

(7-36a)

(7-36b)

OPTICS OF THIN FILMS

304

This

is

the only situation in the reflection etalon

condition contains no

When

the amplitude condition (7-36b)

is

not met, (7-35a)

the correct phase condition, at least principally.

from

when

the phase

reflectivites. *)

may be negligible,

The

no more

is

practical deviations

shown by case (D) in Table 7-3.


was carried out in Fig. 7-8 showing a
series of curves concerning the Ag etalon mentioned above, with h t assuming
a number of different values. Since h 2 = 1000 A, the transmission is practically zero everywhere and only the g(X) and <x(X) curves are shown. The
spacer thicknesses were computed by (7-36a) for all values of h 1 the aim
being to center the g min value at A min = 5500 A. The deviations from the X min
it

Another study to

as already

this effect

value are negligible, particularly for higher values of A t


refractive index for Ag was

The

reflection curves

assumed

shown

in the relatively

so far exhibited

than the neighbouring maxima. However,


with the reflection etalon, and situations

this is

constant

narrow region assesed.

minima that were sharper

not an invevitable situation

may be brought about when

are sharp reflection peaks, the reflection minima being in their turn

there
flat.

We

then speak of transmission-like bright fringes in the reflection etalon,


resembling the inevitable bright fringes of the transmission Stalon. Obviously,

from complementarity between the


and the minima of the former etalon, if both kinds
of sharp fringes are to be bright. The scope for this is proportional to the
amount of absorption involved in the first layer. We shall now look more

must be a

there

maxima of

substantial deviation

the latter

closely at the factors that decide the type of reflection.

The method will consist in studying the second derivative at the extremal
The sign determines the type of the extreme, the absolute magnitudes

point.

allow a comparison of the respective sharpnesses in the immediate vicinity


of the extremes. Since the curves are of a fashionably smooth kind, we

may

expect these local sharpnesses to determine the overall sharpness of the

extreme.

Taking the second derivative at the extremal point

AD cos (g +

d2 &
dx
*)

e)

{.

one has

+ BC cos g e

[A-Bcosj 2

Despite the long history of the 6talon, the conditions for zero reflection were
relatively recently by Schroeder, [11], although in somewhat different terms

deduced
(for

7-5). A historical review of the problem is to be found


approximate formulae in proper physical terms for the reflection

a comparison, see Problem

in this paper, as well as

of infra-red and radar waves The

work

[4] is

also

recommended

in this respect.

BASIC METAL/DIELECTRIC DESIGN UNITS

305

hfWO

so so

N^
Mac

5500

ssao
\eoo

5500

6i

so

5500
Fig. 7-8

with h 2

The curves

1000

and

a(A) for a reflection etalon

6500

air/Ag/MgF2 /Ag/G
and different values of /r t The spacer tuned by the simplified condition
for ^ min = 5500 A. Tuning in first order.
e(X)

..>

OPTICS OF THIN FILMS

306

The numerator may be put


with the notations (7-33),

may be

AD sin (^ e +

into another form, noting that (7-32),

written as

e)

+ BC

= BD sin e

sin ( c

Squaring and manipulating properly one eventually has for the numerator of (7-37)

+ VE 2 -

= +E|cos p

To choose

the correct sign we consider the case of a purely dielectric


n. If (7-37) is to indicate,
Then e = it, / = tc and e =
for example, the minima of 01 at the obvious values e = 0,2ti when P =
= n, 3n, ... and the cosine of p is negative, we must evidently write

first reflector.

EcOS

J^- =
dx
where p

<!;

<j;

,, e

[A - B

x for

cos

^max and i

(7-38)

,',

Vp

x for

&(% e) will be a maximum (minimum), if cos p ^ 0.


Considering now the absolute value of (7-37), the numerator
a constant value E cos

<!;

Mmin

will

have

for both kinds of extrema.

Z
The denominator is inversely proportional to !F taken at the value e
decreases
However, we must bear in mind that with this expression fixed,
with the thickness of the second metallic layer and can in fact vanish whilst
its denominator still has a small finite value. It is more proper to say that
.

the denominator in question

is

inversely proportional to the energy internal

transmission coefficient for the spacer layer.

When

its

value

is

low,

we speak

of resonance inside the spacer, see sect. 5.3.


Now, if 0tmia lies at least approximately at the resonance values

= 0,2;t, (7-38) shows sharp reflection dips.

In-between there are

flat

reflection

maxima.

common

situation with transmission filters viewed in reflected


in reflection if the second metallic layer is
changes
light. Almost nothing
made infinitely thick so as to obtain a reflection etalon proper. This is
because q r 5 r incur very little change with respect to the values present

This

is

in a reasonably

monochromatic transmission

remains practically the same.

We

filter

and the denominator

thus cannot expect to produce

flat reflec-

by sharp reflection peaks inbetween) by simply


suppressing the ^"-function which otherwise forces 0t into the shape XS'
some absorption, where 1 3~ is something we do not want. It turns out

tion dips (accompanied

that absorption has overtaken the sharp peaks so that 1%

unsatisfactory (See the a-curves in Fig. 7-8).

s4

is

again

BASIC METAL/DIELECTRIC DESIGN UNITS

307

One may even think of the second interface as of a perfect mirror and
then clear that the shape of the reflection fringes need not
be in any

it is

relation to the position

To
first

and shape of the actual transmission fringes.


achieve transmission-like fringes in reflection a modification
of the

layer

is

required.

Amplitude manipulation

A straightforward argument
Airy sum (2-30a). Both geometric
structure

and the

reflectivity

is

to supress the

first

reflected ray in the

series (2-30a), (2-30b)

then have the same

function

m must inevitably offer the possibility

of sharp peaks.

Fig. 7-9

qualitative view of the mutual position of


transmission and reflection peaks obtained by
suppressing the first reflected ray.

Making ^ =
The sequence

e = D =
and also
where the odd multiples (implying
cos p < 0) correspond to minima, the even ones
to maxima.
By (7-38), what is at the even multiples is sharp, and it
is now the

0.

peaks.

The

situation

in

our calculations, one has

e is

is

now

depicted in Fig. 7-9. There

complementarity between

3T^ % and

T rem he.,brought down to


of .^ remaining.

0, n, 2n,

^min

is

now maximum non-

The dotted line indicates that


zero by heavy backward metallizing, the peaks
.

OPTICS OF THIN FILMS

308

The

peaks will in fact be sharp only

reflection

is sufficiently large.

ClQr'

We

if B, i.e.

the product

thus have the following postulates

on

the

first reflector
q'i

q' large
l

(or small),

(7-39)

Systems of this kind are called asymmetric reflectors (asymmetry


concerning performance, not build-up). They represent maximum violation

of a theorem valid for all-dielectric systems, where the


incidence reflectivities must by principle be equal.

IM
HI

and

left-

III
01

right-

12

111

in

III

In

111

Fig. 7-10 Scheme of the embedding necessary to


asymmetrize the reflections of a metallic layer 12.

In layer systems involving at least one metallic film this is no longer so,
but the drastic conditions will not be met without severe design effort.
They are clearly not fulfilled with a simple reflection etalon. One has to

sandwich the first metallic film of appropriate thickness between additional


(mostly, but not of necessity exclusively, dielectric) layers serving a two-fold
purpose: (/) to antireflect the input face () to keep up or enhance the q l
.

The second requirement is of importance when the design has recourse to


a weakly reflecting metal such as chromium and/or extremely low thicknesses
of the

first

metallic film.

The new subsystem may be schematically considered according to


Fig. 7-10.

The medium
01 plus

layer

12.2

We
It is

is

identical with that of the spacer layer.

constitute a front extension of the original simple metallic

plus 23

is

the rear extension.

consider purely dielectric extensions.


useful to detach the layers

extensions, because in terms of the

and 2 from the bulk of the respective

split-filter

techniques applicable during

BASIC METAL/DIELECTRIC DESIGN UNITS


the design, they serve to tune in a proper
interfaces

309

way

the interactions between the

01-12 and 12-23.

The condition for zero reflection is essentially given by (7-36a, b)


with the simplification that the one-prime system is purely dielectric now.
This means g0l = 1> Yoi = 2d 0i and it must hold that

Qoi

0i3,

2<Pi

<5oi

2d01

S 13

In,

/odd

(7-40)

where the meaning of the double-subscript notations is evident.


These conditions determine the front extension alone, but a deeper
theoretical insight is needed into the problem of choosing a suitable thickness
for 1 2 and a suitable design for 2 plus 23 so one may obtain not only
q 03 =0,
but also e 30 large enough and, in addition,
of
the
complete
etalon
max
large enough for the peak to deserve its name.
A complete theory of this is beyond our intentions. We refer the reader

to Kard's original papers [12], [13] which paved the

way for asymmetric


be commented on here
on the basis of some of Kard's formulae which will be presented without

reflectors.

Only the

of the design

critical points

will

proof.

The

basic equations for the asymmetric reflector are


003

a 03

=0
1

e 30

a 30

2t cosh <p

t(2 cosh <p

(7-41a,b)
t)

These relate g 03 q 30 and the corresponding transmission t


03
an important design parameter tp, defined as *)
,

(7-41c, d)

t 30

via

cosh <p

P,

tp

where
1

/a

a'\

The angle cp remains constant for both directions of propagation and,


more important, it is determined by the properties of the metallic film
alone, independently of any front or rear extensions,

and also of the outer


computed once and for all for any embedding
of a single layer, depending only on its thickness, not on the embedding.
A table to this effect, 7-4, is shown for Ag and Al taken at X = 5500 A.
<p changes much faster for Al than for Ag.
media.

It

may

therefore be

*)
We adhere to Kard's notation. The quantity tp is not to be confused with our
phase angle <p. We elaborate more on <p in Sect. 8.3. a', x' are taken as in 6.2.

OPTICS OF THIN FILMS

310
Table 7-4
Kard's function <p(A) for

Ag

(0.16

3.36j)

and Al

5.45j) at

5500 A.

Al

Ag

*A

(0.8

coshcp

cosh<p

<P

0.0081

35

1.000 001

0.0000

1.000 033

75

1.000 013

0.0031

1.000 705

0.0376

150

1.000155

0.0176

1.012 283

0.156

225

1.000 823

0.0405

1.071

460

0.376

300

1.012 787

0.0746

1.277 965

0.729

400

1.010156

0.1420

2.270 239

1.460

shows a graph of the function (7-4 lb). No material specificaThe parameter is partwise variable and we may
observe the relationship between q 30 and t 03 on the condition that (at one
design wavelength!) q 03 has somehow been reduced to zero and that a certain
<p results from the choice of the metallic material and its thickness.
If e3 is plotted downwards, then the space below the parabolas and
Fig. 7-11

tion has yet been made.

the diagonal t 30
t 30

t 30 (plotted upwards) represents the absorption a 30

may be changed

independently of <p by manipulating ^23 an(i tne

corresponding phase angle

The graphs show


both cp and t 30 to be

<p 2

that a high degree of

asymmetry

(g 30

>

0) requires

low. a 30 then increases.


t 30 may bs decreased to any small value by choosing q 23 sufficiently
large. However, with too small values of t 30 , the
max of the composite

P'1.5 is

0.1

0.01

Fig. 7-11

Graphs of the function q 30

with dependence on

003

0. <p is

r,

compatible with

a variable parameter.

BASie-iWETAL/DIELECTRIC DESIGN UNITS


etalon would

fall

backing reflector

311

off proportionally to the small difference

falls

by which the

short of the 100 percent value. Therefore, the require-

ment of a small

t 30 should not be pushed too


ence with t 30 of ^?m3l towards an optimum
reasonably high values.

far.

Fortunately, the converg-

slow and we

is

may

stop at

Very powerful, but somewhat lengthy formulae which we refrain


citing, yield relationships between a chosen t
30 and the value q 23
required to bring about the transmissivity of the whole system 03 just to

from

when it is aditjonally front-extended by a system obeying (7-40),


thus reducing the value g 03 to zero. The theory simultaneously secures for
030 the value corresponding to t 30 by one of the curves in Fig. 7-11 (using
this value

the proper <p for the case).


Table 7-5

Some
asymmetric

design

Ag 225 A and
T 03

parameters

reflector

with

a perfect rear

for

thickness

the

of

reflector.

0.1

0,2

0.4

023

0.896

0.781

0.513

S30

0.809

0.639

0.359

<5?

0.998

0.998

0.997

Table 7-5 indicates some values for a silver film 225 A thick, taken
at
in MgF 2 embedding. We shall document the design on
5500
energy

coefficients only, leaving aside the

phase shifts, which are of course needed


(The latter specification is now needed for the
computations leading from t 30 to p 23 <p is independent of this and for the
in the actual calculation.

given thickness

amounts to 0.0405.)
The value max is computed for a perfect supporting reflector, because
the values t 03 are high enough to make this idealization safe.
The 0t
it

tia%

are indeed high with t 03 as large as 0.4. The other criterion


is of course
the sharpness of the peak. This calls for a high
and
thus
the
values t 03
e 30

should not exceed about 0.15.


As a numerical example let us choose for 23 a 5-layer reflector (HL) 2
with n H = 2.35, n L = 1.38. Further let n = 1.38. Then
= 0.849 and
2
q

23

by table 7-5 a value

t 03

=0.15 may be

expected.

OPTICS OF THIN FILMS

312

The coupling of

80.684,

With

i.e.

this

A2 =

12 requires a phase angle

this reflector to

1235

<p 2

for the design wavelength 5500 A.

backing of 12 system, 13 as a whole will have a

reflectivity

= 0.8683. To fulfill (7-40) a 5-layer front reflector with H = 2.2,


L = 1.38 in the embedding n = 1, 2 = 1-38 will do. The coupling layer
must have q> = 150.78 i.e. Aj = 2300 A.
q 13

The asymmetrized Ag

film of 225

now

thickness

has the following

performance
q 03
a 03
*03

=
=
=

0.0024

e 30

0.864

a 30

*30

=
=

0.7412
0.126

- 1373

^^N\^
/

r
6
\fo3

.2
i

Fig. 7-12 Dispersion of q 03

and g 30 of a

asymmetrized for A

Let us
with a

finally place this

reflectivity

requires n 3 h 3

We

hr
2405 A

70

reflector

5500 A.

modified reflector onto a fully silvered surface

0.938.

(<p 3

A A

sooo

5000

WOO

The tuning

157.6).

Now

must remember, however, that

for a

maximum

the design

all this

is

at 5500

complete.

has taken place at one

design wavelength. The addition of a. number of dielectric layers introduces


dispersion of q 03 q 30 (Fig. 7-12) and other important quantities. The
asymmetry of the reflector may be expected to break down sooner or later.
,

Fig. 7-13

shows that soon

is

the appropriate word.

The

reflection

peak

has the expected shape, but severe sidebands due to dispersion of asymmetry
spoil the

whole

filtering effect in reflection.

much more

sophisticated approach in the design of the extensions

would be needed to improve on

this.

Obviously, the reflectors 01 and 23

BASIC METAL/DIELECTRIC DESIGN UNITS

would have

to be achromatic in amplitude

313

and

in phase.

Moreover, their

coupling with the metallic layer would have to be achromatic. This cannot

be done otherwise than by eliminating the coupling layers altogether. If


we regard them as spacers between the reflectors 01, 12 and 23, the new
design would have to be spacerless (a term
the induced transmission

filter,

see

[2],

Ch.

we borrow from

5.).

for the achromatic reflectors. Their constant phase

to the singular values

or n (such as

we

of tuned achromatic reflectors, Sect.

the theory of

This poses a further problem

must not be confined

shall later encounter in the synthesis

9.3),

but the design must be capable

of meeting the requirement of any phase change upon reflection so the


internal complex reflection coefficients seen from the inside of layer 12

have the same (and moreover constant) values as those occuring in the
one-wavelength design by the above given procedure. These problems are
yet to be solved.

The procedure described turns out to be free from dispersion problems


in mind transmission-like spatial fringes in reflection. Observing
these in the design wavelength, q03 remains constantly zero and it is only
if

one has

the variable 2q> 2 in the spacer layer that changes because of a change of

n 2 h 2 across the wedge


Fig. 7-14

Such a

film.

shows the

profile

of a spatial

1-st

order fringe of this kind.

situation has been experimentally demonstrated

by Koch,

[14].

5000
Fig. 7-13

The

reflection

peak of a

etalon with asymmetrized


spoiled by dispersion

first

The same

reflection

Fig. 7-14

reflector,

Figure 7-13 viewed in monochromatic light

shown in Figure

7-12.

reflection etalon as in

with the spacer


5500
shaped so as to observe

slightly

spatial

wedge
fringes.

bright fringe in reflection appears.

3J4

OPTICS OF THIN FILMS

His asymmetrical

first

reflector is

made-up of a chromium

which

film,

lends itself better to single-sided antireflection. Altogether three dielectric


layers (of unknown design) were sufficient to bring about a disproportion

>

Ql such that transmission-like fringes appeared in a Fizeau wedge.


In fact, the asymmetrized chromium film was moderately free from
dispersion of q'r , q'l so that a bright spectral fringe was observable in white

ek

light (although

tion Q'R

with some background owing to the slight flaw in the condi-

0).

Phase manipulation

Another approach to transmission-like

Then by

(7-13)

<2>

0,

fringes is to

and the condition (A)

suppose

m=

0.

in Table 7-1 for the

extremes yields their locations at the cardinal points 1=0, jc, 2jc, ..
Again, if a maximum falls in the even multiple of jc it will be sharp. In
fact, even <o = jc, implying $ = /J =
or tc*) seems to promise the same
.

thing.

In order to gain

more insight

with respect to the fact that sin

into this, let us study the condition (7-32)

0. It

then reduces to

BD sin e = AD sin e

We

(for cos

discard the possibility that sin e

A = + B.

imply the impossible condition

= 1)

(7-42)

= 0, because (7-42) would then


(The minus sign renders the case

meaningless, the plus sign requires q'l q r = 1, which is unattainable.)


Therefore, we must suppose (7-42) to be fulfilled by sin e = 0.
yet to be decided

which of the values e

0, 2n, ...

compatible with the starting assumptions that


(7-31)

we must suppose
,

For

To

(o

these

"

it

this with (7-43a)

or (7-43b),

always holds that d

The

result

tions are possible.

=
=

It is
. . .

is

In regard to

0:

0, 2tc
re,

3tc,

(7" 43a ' b)

*-

3tc

d'

two types of condition let


y [see (6-1 3a)]. Combining

we obtain
28

2d

jc.

tc,

converse.

investigate the consequences of these

us consider that

*)

27C...fore

'-
3jr...for
\n, .*is

or

alternatives to exist with to

[0,

"

the alegiance

tc

two

o=

or e

or tc for to

=
tc,

2d'

=y
=y-

2d'

(7-44a)

(7-44b)

jc

= tc depends on whether Pz ^ Q

in (7-13).

Both

situa-

BASIC METAL/DIELECTRIC DESIGN UNITS


Let us

now compute

in the notation

of

315

Sect. 6.2

Vl - Vl = IVl - Vl e-

jra

2ja

= g e

In the cases (7-43a, b), respectively, this reduces to

[Vl <g <

where

1,

and g

l e-

J<0
]

=g

is real:

This can only hold in the situations summarized in rows 2 and 4 of

Table 7-6 (where z

written for

is

For reference to the earlier case of


added containing an admissible
rows 3 and 5 see p. 318).
t K t h ).

amplitude manipulation a sixth row


situation in the

first

column

(for

is

Table 7-6
Conditions for the reflection extrema lying in the cardinal points f

0, n,

2k and

compatibility with reflection peaks.

o < t

to

a a' = o,27r,

Ve Re L = s <
3

=0

<

Jt

...

o<Tg(i-V^)(i VeZ)

+ V^rPl =
3 = 71

<

T + VsrPl) = * (inadmissible)
(

=0

realizable

with:

0)

=7C,37t,

TC

2Sr< 2Ve^eZ

with:

= 3_d'

o< VeRe L r = s< r


3 =

(i+V<fc)(i+Vei>-

realizable

(0

...

sa+Ve*)0-VeL>
= 0,
t = #,
y = 28
8'

= 0)
=
d
3
o (and

gR

0,TT

only these situations that are compatible with the extrema lying

It is

in cardinal points (

We
zero or

inadmissible

first

it.

0,

it,

2n

....

consider the implications of e

it,

independently of

<o

being

OPTICS OF THIN FILMS

316

The

reflectivity

function (7-30) then assumes the

form

DC S
4 = g- ^

(7-45)

A-Bcos

We now

making

prefer direct analysis to

specifications in the

former

general results.

We have
&M _ (AD-

[A-

dx

the extrema indeed occuring at sin

Taking the second derivative

4 _

The sharp extrema

will

0.

at the extremal points

one has

(AD-BC)cos e
[A-Bcos e ] 2

dx 2

The type of the extreme

BC)sin

Bcos] 2

occur in the resonance points of the denominator.

will

depend on the inequality

AD ^ BC
In the
tion

first

case the points e

maxima equal

0,2rc,

(7-47a, b)

. .

will

accomodate sharp

C- D
~
=
A B
The

flatter

reflec-

to

(7-48)

minima

C + D

A+
will

be located at e

it,

3n,

If the inequality (7-47a)

. .

(7-49)

..

is

reversed to (7-47b), the words

and minimum are exchanged.


The condition (7-47a) leading to a sharp peak

<

[K Al&
.

V Cr

qIq'k

is

maximum

written out in full as

(7-50)

BASIC METAL/DIELECTRIC DESIGN UNITS

The quadratic equation

in

317

the inequality (7-50) has the

g determining

roots*)

< ve R/eL

VeL<?R

g must

lie

If g R

outside of this interval.

<

must hold that

it

gL ,

either

>

if Qk

< Vg L e R

or

(7-5 la, b)

ft.

< VeZe R

g
is

> g > VeR /e L

(7-51c)

required.

Considering

now

the case to

0, e

tc

in Table 7-6,

(7-5 la, c) are automatically fulfilled with

and

>

any t

0.

>/e R (? L

Hence

at

3n secures a sharp peak.


in the condition of the first column implies e = 0.
Taking to
The analysis of (7-30) is then identical with that of (7-45) if D is taken
negative. The second derivative (7-46) turns out to be always negative at

in the condition 6

n,

t,

0, 2%,

thus giving sharp peaks at these points.

We thus come to the conclusion that the

(though not neces-

sufficient

sary) condition for transmission-like fringes in reflection

For

to

and

it

g =

simultaneously with (7-5 lc)

when

sIqkQl

>

0.

+
We

T>

is to

0.

which cannot be fulfilled


therefore have sharp dips at

which are exactly opposed to the transmission


0, 2tc,
or n in this case. However, if
and are symmetrical, because $ =
(7-51b) and yet having g =
possibility
of
fulfilling
there
is
a
Ql>

the cardinal points

. .

fringes

<
V^r^l +

t as required

to have a sharp peak in

When m #
qk

0.

because

0,

by the case

0.2rc. It is

reflection with to

n there

is

therefore not impossible

7t.

a way of obtaining reflection peaks by securing

This was analysed previously. Again, the fringes are symmetrical

Q =

0,

which implies

<P

0.

must be emphasized that we were only


e involving <5 R <5 L y and other angles,
but we have taken no heed of the accompanying amplitude or energy coef-

At

this stage

of the analysis

discussing the angular parameters

ficients.

In other words,

it

co,

we have proved

that the condition to

does not

violate physical laws and secures sharp reflection peaks, but we are unable

*)

From now on we assume

results to

some

the supporting reflectivity g R

extent at the cost of the conditions being a

the actual values of g R obtainable. Evidently,


parameters of the first reflector.

little

we may drop

all

1.

This will simplify the

more

stringent than with

the primes denoting the

OPTICS OF THIN FILMS

318

to sythetize the corresponding

first reflector. This is still an open problem.


some constraints on the energy coefficients following
from the requirement that any extremum e must lie between and 1.
The postitive sign of 0t t is evident from (7-29'). It remains to study the
conditions for the sharp maximum by (7-48) to be less than unity. Inserting
from (7-29) and again taking, for simplicity, q'r = 1 we have

We may

at least find

(V-s) 2 <0 from which

<g <

\/Qk

it

may

be deduced that either yjg^

y, writing

y =

These conditions must

-y/g L

finally

yfoi, or

^<

is

with (7-51) which actually

a peak.

have a general admissible interval


sIq*

valid for q r

-y <g <

now be combined

ensure that the sharp extremum (7-48)

We

slol)

<

q l If q k
.

- y <g <

q l then there

Ve R /e L < g <

is

vWr

(7-52a)

the additional possibility

V^ + y

<

(7-52b>

ensuing from (7-5 lb).

The contrast of the

reflection peaks

^ma,

J-D/C

^min

For high contrast B

is

is

+ D/C

U
I

B/A

- B/A

to be only slightly less than A, while

should be

much less than C.


To illustrate

this discussion, we shall present several examples of a


general character: the energy coefficients will be chosen directly so as to

intended manipulations of the reflection ourves and simultaneously


not to violate the optics of metallic films. The actual design of the first
suit the

layer (n l

A,) will remain unspecified.

The basic example may be taken over from a paper by Cownie, [12],
which discusses these problems in somewhat diffetent terms but the angle
here denoted as at remaining the decisive factor for the shape of the reflection
fringes.

According to Cownie, a reflection peak of high contrast

will

be obtained

with
qr

0.2,

ql

0.4,

0.2

and, of course,

to

0.

(7-53)

BASIC METAL/DIELECTRIC DESIGN UNITS

We

319

then have in our discussion

g e jv

- Ve^J

(t

2ja

0.083

e<

2a+ *>

(7-54)

hence

The

jc

28,

inequality (7-52)

is

fulfilled as

0.08,

part of it being only tight, because

The

*)AD <

<5

dL

0.08

<

0.083

-e>

<

0.283, the first

^max will be very near unity.

assumes the form

reflection function (7-30)

where

0.207
1.40

-0.0742 cos
-1.27 cos <

BC. The corresponding reflection peak

is

shown

as a solid

curve in Fig. 7-15.

Keeping the choice

(7-53),

but assuming

<o

it,

we must

write instead

of (7-54)

g ej " =

(t

v&) e

2j0

0.483 e

2j8

(7-55)

hence

0.483,

2d,

<5

<5

-co

With the new value of g the right-hand part of


important, also the left-hand part of (7-52b)

The
The

is

violated:

(7-52a) and,

Vsr/^l

case cannot yield a peak that would be sharper than the


reflection curve

is

Jt

more

0.707

> g.

minimum.

given by the formula

(0 =

-0.431 cos
1.40- 1.27 cos I

0.434

Fig. 7-15 Reflection peaks and dips


produced by manipulation of the phase

angle to to the values

or

iz.

-la* -eo*

S,

-so*

so'

izo'

r-2X

iao'

OPTICS OF THIN FILMS

320

where

AD >

BC. Indeed, a reflection dip

is

obtained, as documented by

the other solid curve in Fig. 7-15.

We

shall

now

construct a third example, where the reflection peak

produced in the conditions


(7-5 lb)
It

and

to

= 0.783, which is greater than


+ y = 1.447 - 0.633 = 0.814.
The

is

the inequalities

e.g.

y/Q K iQ L

0.5.

Then g

0.5

0.707 and smaller than

reflection curve is

0.814

KQ ~
and

fulfilled

(7-52b).

obviously sufficient to choose

is

0.283

being

Jt,

AD =

0.98

is

slightly less

but a reflection peak

The conditions

is

1.40

-0.701 cos
-1.27 cos {

BC =

than

The contrast

1.033.

will

be poor,

clearly visible (dash-and-dot curve in Fig. 7-15).

(7-52a, b) for a realizable

from the various


among the q'r q'l and

structure of g, as evident

g may be combined with

the

of Table 7-6, this resulting

cells

some inequalities
t. These are the "realizability"
rows in the same table.
With this we end the discussion of the reflection etalon. The analysis
of its extrema is not only important for filtering techniques, but also for
the interpretation of measurements with the Tolansky-Fizeau fringes, as
shown in [15] and elsewhere.
More design scope is available in the problem of extrema with three
or more metallic layers, but this is beyond the intentions of this section.
in

We

quote

of Ch.

ref. 11

for this purpose (Bd.

I,

p. 231).

7.1.5 Laser cavity

One of

the

modern

techniques where

it

uses of the Fabry-Perot type sandwich

is

in laser

serves as a resonance cavity, providing through the

partially reflecting walls

a feed-back mechanism for the generating medium

enough amplification results in oscillations.


Although the exact formulation of the cavity problem is three-dimensional, useful basic information can be obtained by adhering to the
plane-wave model and to the method of Airy summations.
In this approach the laser cavity is an extremely thick etalon, the spacer
until

medium

exhibiting negative absorption so that the attenuation factor

greater than unity.

We

gain and write

G'

it

as

shall accordingly

= G'(v).

It is

call its

is

energy version single-pass

a function of frequency exp

( K(v)

d),

BASIC METAL/DIELECTRIC DESIGN UNITS

32 i

where d is the length of the cavity and K(v) is the absorption coefficient
of
the pumped medium (computed by some of the methods of
quantum electronics for a Doppler-broadened line). It becomes negative
when population
version is brought about.
As a rule, the band-width of the optical amplifier (i.e. the width of the
transmission fringe at the given resonator length and the given
mirror
reflectivities g) is much smaller than the Doppler line
width. G'(v) may
therefore be considered constant, equal to G'(v
) where v is the centre of
the Doppler line, when analysing the gain-vs-frequency curve of
the laser
cavity.

This cavity gain function G may reasonably be identified with


the
energy transmittance of the Fabry-Perot sandwich. As a straightforward
generalization of (7-2) for the case that the spacer has

4G' and

factor

2rtc

Wv

g'

g,

d'i

g"

pv, Si

7l
(1

g;

<P(v)

*(v)

'

pv

(7-56)

is

occurs for

an amplitude gain

and writing InX'^nd

-q, we have

2^^
n r>V^A
r>
gG
) + 4gG sin 4>(v)

The maximum gain

it

5*

(l-g) 2 G'

and

y=

Mit,

2
_ (l-g) G'
<\2
(i - eG')

M integer.

(7-57)

The resonance

frequencies are

therefore

Vm

M --1)!L_

(q negligible)

(
and

their separation is

"M+l

where practically n

result in separations

1.

- v
VM =

2nd

Cavity lengths of 100

cm and

10 cm, respectively,

by 150 and 1500 MHz.

Referring to the formula (7-24) for the half-width and to


(7-57), we
eG' is now the effective reflection factor so that the result of gain

see that
is

to decrease the band- width.

however.

and nd

We may

The

difference relative to (7-24)

is

small,

a typical band-width 0.5 MHz for g = 0.99


100 cm. The resonance lines are therefore extremely fine relative
state as

to their spacing in a one-meter laser.

OPTICS OF THIN FILMS

322

Generation of light by stimulated emission


First, there is the evident

associated with the values

resonance condition

qG'
which renders

is

(7-58)

(7-57) infinite. This will actually never happen, because

linear effects with large

non-

cause the magnitude of K(v) to

field intensities

decrease. This cannot of course be predicted in the purely interference

theory of the cavity.

Second, owing to random fluctuations of the working conditions for


laser, its action cannot depend on a singular state such as defined by

a gas

(7-57).

We must expect generation to be present in an interval of frequencies

around a resonant frequency v M

(this in its

turn lying well within the Doppler

line), provided that the corresponding line has a peak

substantially

Crmax

greater than unity.

To check
Let qG'

<

small values of

we have two

(7-57) for this inequality,


1.

Since G'

q. This,

>

qG'

1,

however,

is

>

and

Gmax >

uninteresting, because

typical intervals.

> 1, even
Gma% tends to

G'

for

the

relatively small value G'.


If,

<

1.

on the other hand, qG'

This, together with

its

>

the condition for

Gmax >

isgVG' <

precondition leads to the interval


1

G'

Fig. 7-16

1,

<Q

<z=
1

(7-59)

VC

Resonance curves for the gain of a

laser cavity.

BASIC METAL/DIELECTRIC DESIGN UNITS


Fig. 7- 16a

tion

is

is

a graphical display of these inequalities.

that for a given G' the reflectance q

<

323

This

An

intersting implica-

must not be too

great, otherwise

in contradiction to the simple reasoning of geometrical


optics, according to which the gain will improve with the product
qG'.

Gmax

1.

is

shows the profiles Gmaxfe) at two different values of G'.


These actually show the sensitivity to the resonance condition. For a given
Fig. 7-16b

threshold value,

Gmai

,, h

the tolerance

on g

is

larger for larger G'. It

may

be shown to approximately equal

<?

'

G'-l

VGmax>th .G'

the second term being an increasing function of G'.

similar tendency holds for G' variable and q fixed. The single-pass
gain G' for a laser of given type can be slightly varied by the pumping
power. The smaller G', the narrower the interval of practical resonance.

These are typical differences between, for example, He-Ne and ruby

lasers.

7.2 Dielectric-coated metallic mirrors

In 1947 Messner,

[16],

presented the idea of enhancing the reflectivity

of metals by adding some

dielectric interference films onto the metallic


surface (so called Verstarkungslamelle.) This of course required the mirror
to be produced on the first surface of the substrate so that technologists

at

once began to think in terms of protecting

layers. In fact, in the first

years, the aspect of protection prevailed over that of enhancing reflection

and no more than a single layer would be used on a practically massive


metal. It must be admitted, however, that the mere fact of bringing the
reflecting surface from the rear to the front of the surbstrale already meant
some 5 to 10 % in favour of the method.
Multilayer overcoats became of importance in connection with metallic
mirrors where some residual transmittance was needed, such as with FabryPerot interferometers or filters. The contribution of pure interference to the
basic metallic reflection enabled, for a fixed q, the thickness of the metal
to be smaller, thus reducing absorption in the whole system. This led to a
higher S~max for the same line width, which is determined by the reflection

from the spacer. Alternatively, keeping the metallic base fixed,


the dielectric overcoating reduces the line width thanks to an increase of
q
factor q seen

OPTICS OF THIN FILMS

324

while &~ma% remains constant, because by (7-29) and with respect to the
results of 6.4 it is equal to the square of the potential transmittance of the
single mirror,

which remains unchanged by applying the overcoating in

question.

Examples of such improved Fabry-Perot type

are

filters

shown

in

Fig. 7-17.

Another motive for the use of multilayer enhancement

some spectral
examples. Aluminium is the

is

The

the lack of
violet

and

highly reflecting metalic surfaces in

regions.

ultraviolet are typical

best substitute for silver,

but even then

it

compares unfavourably with the standards

set

by

silver in

the routine applications of the visible spectrum.

Unfortunately, it was not possible to rely on all-dielectric interference


mirrors owing to the presence of slight absorption in the materials serving
as the high-index components.

In

fact,

we must

discard most of the verified materials refracting by an

index higher than 2.0 and put up with as low a value as 1.72 (A1 2 3 ) for n H
The low-index components do not suffer from absorption, but dispersion
.

magnesium

brings, for example,

fluoride to the rank of

Si0 2

(1.46).

Many

needed to obtain the same q, the inherent absorption


of the H-layers then invalidating the performance of such a reflector in
interferometric devices. A compromise is then sought in combining metals

more

and

layers are then

dielectrics.

aluminium have probably


the ultraviolet and in the visible

Dielectric-coated front-surface mirrors of

been paid the widest attention both in

50

6fy(LHf(LL)(HLfA9 G

GAgLH(LL)HLfig6

\ h-SOO
\, h ~ 300

-^i

-j

6000

5000
Fig. 7-17

Combined

5000

6000

metal-dielectric interference filterscomputed

transmittance.

BASIC METAL/DIELECTRIC DESIGN UNITS

As already mentioned,

spectrum.

oxidation, atmospheric tarnishing

Ample

Fabry-Perot type

An

filters

case protection against

higher than corresponding to a bare

literature is to

a good review being available in the book

ed by Turner,

latter

and scratches was the dominant aim,

much

while reflectance was not pushed


(unoxidized) Al surface.

in the

325

be found on the subject,

[17].

with dielectric enhanced reflection were describ-

[18] (see also [19]).

unorthodox case of metal-dielectric combination is a type of cold


first described by Turner on the occasion of the 1949 Marseille

mirror, again

conference,

[20].

This time the dispersion of the metallic base

drawn

is

into

play.

Germanium
in the region

is

below

marked

for behaving like a moderately reflecting metal

1/an, while in the infra-red

Taking a layer of germanium some 200 A


in the visible

to enhance

it

ranks

thick,

to 90

its reflectivity

it

about 60

with a sufficiently flat top to

behaves in the visible spectrum

reflector, while seven, or so, purely dielectric layers

reflectance level at the risk of

marked

like

make

the

a metallic

would reach the same

tinting.

interference mirror acts as a high-pass or a low-pass

same time

dielectrics.

spectrum and only four layers of the type 1.38/2.35 are enough

mirror look white. Hence

An

it

among

reflects

filter

at the

Taking the former function, one can obtain a cold


mirror. Using many layers to make the top wide and the white reflection
stable in series production, one obtains a commercial all-dielectric cold
mirror. What does an overcoated germanium offer apart from the white
(see 3.5.1).

reflection in the visible

spectrum?

The dispersion of its optical constants helps with the required application and renders the combined stack all-dielectric in the infra-red, so that
an almost orthodox pass-band develops as would correspond to a dieletric
5-layer. This would never happen if the base layer kept its metallic character
in the potential pass-band.

We shall now very briefly explain the mutual interaction of the metallic
film with

its

overcoating.

The key point

is to find the proper matching of the first


can be done by considering the numerator of the Airy formula

r+r"el

rV'ej(

*"- x)

layer.

,., 2
\r\

(The corresponding energy formula has already been mentioned in

This

(7-60)

7.1.4

OPTICS OF THIN FILMS

326

One must

distinguish between n

positive, its orientation being described

With regard

to this

we then

odd or

To

even, respectively.

reach a

maximum

A = m
I

H
71

For

r'

5".

<

r'

>

when

r'

maximum

or

r"

0.

is

is

minimum

x =

requires 5"
the converse

always

absolute

mn, where

true.

of q the optical thicknesses must be matched by

)-r>
JT'

b "\ X

"1,

seek the

value of the numerator, which for


is

5
by

m=

1, 3, 5,

...

for n

<

nt

(7-61a)

m=

0, 2, 4,

...

for n

>

nt

(7-61b)

Some doubt may arise as to whether the manipulation of the numerator


is justified when one notes that the tendency for the magnitude of the

alone

denominator

is

always opposite to that established in the numerator.

We leave it to the reader to show that no conversion can occur in the compete
fraction (7-60).

The

use of the condition (7-6 la)

protective layer (such as a hard

and

it is

is

MgF 2

required that reflectivity

typical in a situation

film)

A/2, the

maximum

where a single

applied to the metallic surface

not impaired. Thinking in the simple

is

terms of protecting a bare glass surface in

and A t

is

this

way, one would have b"

reflectivity equalling, as

we know,

=n

that of bare

5500 A, with, for example, r\ = 0.8, x =


= 5.45 and n x = 1.38, we have 8" = 152.1 and A t = 0.923 1/2 (in the
first order). A slightly less than A/2 layer is therefore needed. Transformed
over the monitoring practice of the workshop, it is simply the A-half condiglass.

Taking aluminium at A

tion.

Computer-analyzed curves are shown in Fig. 7-18 for the

first

three

orders to document the degree of increased selectivity and the value of the

minima. For didactic reasons the aluminium was taken without dispersion,
because we only want to follow the salient features of the overcoating.

The

horizontal dashed line represents the reflectivity of a bare airjAl

boundary.

It

may come

as a surprise that the low-index layer not only

decreases but also increases the reflecting power of a metal. This

is

simply

accounted for by the fact that the positions of the extrema determined by
(7-6 la) for 5

0,

n never coincide with the points x

0, 2tt at

which alone

the formula (7-60) yields the reflection of bare substrate.


It is

seen that the increase over airjAl reflection

the proper matching of the layer

decrease toward a

is

minimum, which

is

unimportant, but

necessary to evade a possible important


is

83 %.

BASIC METAL/DIELECTRIC DESIGN UNITS

left

327

There is yet another point to be considered: if the Al surface were


without protection, then the spontaneous growth of an A1 2 3 film

with refractive index 1.66 would tend to antireflect the mirror. The

would be reached with h

700 A,

much

surface actually stops

its

minimum

The ageing of

value being 75 %.

the

sooner (at a geometric thickness between

50 and 90 A), but even so the

reflectivity

degrades to a value around 88 %.

%
l/Af

SO

v-x

t/-v-/-/'

85

\>

Y'/

81

tooo

5000

Fig. 7-18

MgF 2

6000

reflection-increasing films of the first three orders

aluminium

0.5

The complete gain


%.

in using

7000

on an

substrate.

MgF 2

is

therefore 3.5

instead of only

Recourse to condition (7-6 lb) must be had if one plans to evaporate a


like 1/H
H(cL)M/G. It is clear that in the first place it is necessary

system

to secure a

maximum

partial result at the H/(cL)

in (7-60) the cumulated reflection coefficient will

the following layers

may go by

thickness matched by (7-61 b)

combination the factor

Due

is

boundary. With

have a phase S

r'

>
and

the A/4 condition. In the zero order the

is

slightly less

than

1/4.

For the

MgF2 /Al

0.845.

to spurious losses there

is little

sense in using

more than about

four dielectric layers on a metallic substrate reflecting 90 %. The ultimate


reflectance then is about 96 %.

OPTICS OF THIN FILMS

328

Some

7.3

induced-transmission systems

In this section we shall be concerned with single metallic films the


absorptance of which is manipulated by outer dielectric extensions in accordance with the tendencies established for the quantities a/t and W in the
general theory of Ch. 5 and Sect. 6.4.

7.3.1 Pohlack's beam-splitters

The
is

first

exploitation of

due to Pohlack,

what was

index of the substrate medium, which


r2

exp

(j<5 2 )

As a

in (4-55c).

changes and one

later called

[21], [22]. It consists in

may

seek

is

equivalent to changing the factor

result, the inevitable

minimum, or

its

induced transmission

changing the effective refractive

at least

absorptance ratio

make

it

oc/t

smaller than

the value corresponding to the usual air\glass embedding. This can be done
for various metallic layer thicknesses, and various beam-splitting ratios

may

thus be found with the absorption mitigated.

In numerical studies where n was varied directly, a general tendency


g
could be discovered to the effect that a marked reduction of a was achieved
only with large values of the substrate index, mostly exceeding realistic

bounds.

Pohlack suggested the insertion of one or possibly more A/4 layers


between the metal and substrate, thus producing (at the design wavelength,
at least) a high effective substrate index

by means of realistic index combina-

tions.
It is easily verified

that the tail of the

reduces to either of the forms:

v'" ( - i

^">/f(i"i)V
V (V
1

f*

V* =

("^ /('

Only the

and

first

MD D 2
1

...D,V f

"""

n 2 n 4 ...n,_ lN/ g

)>

new system matrix

ViT-

""*" "'-'^

<" m
for

even

columns operate in the evaluation of the R-coefficients


assume values corresponding to a backing medium

fR , q r obviously

with refractive index

ja.

BASIC METAL/DIELECTRIC DESIGN UNITS

fR

has a modified numerator 2

v |i/ g

but forming the energy coefficient t r

329

instead of the usual factor 2,

=-|/ji\

"0

4a

the equivalence

"o

of the /j-substrate again becomes evident.


These considerations are valid at one wavelength where the inserted
layers are A/4 thick. This considerably simplified the computation, but two
latent questions remain to be answered: (i) is the quarterwave thickness
optimum for minimizing <x/t (ii) what is the spectral behaviour of the
design ?

The first remark anticipates the matching procedure described by the


algorithms for maximizing the potential transmittance. In fact, the inserted
XjA stack is an approximation of the matching systems of Sect. 6.4. Never-

350
Fig. 7-19 (a) g(A), t(A), a(A) functions for a single

hA

chromium film
and a ZnS-A/4-rear-extended film (vertical hatching),
absorptance functions for the two cases and the minimum

(horizontal hatching)
(b) inevitable

UOO

a/r function possible.

OPTICS OF THIN FILMS

330

theless,

remarkably useful improvements of metallic beam-splitters were

achieved by Pohlack with single A/4 high-index layers.

The design of a prescribed beam-splitting ratio requires the knowledge


of the g(h), x(h) and a.(fi) curves for the given metal-H combination at the
design wavelength. An example of such curves for chromium (single and
back-coated, n = 2 3j, n 2 = 2.35, w g = 1.52, ja = 3.5, X = 5500 A) is
shown in Fig. 7- 19a, b, from which the following table may be extracted:
Table 7-7
Typical working parameters of single and simply transluminated

chromium

layers

of different dividing ratios.

hk

q/t

Cr
1

0.22

0.44

0.34

0.772

0.33

0.66

0.02

0.03

0.31

0.31

0.38

1.225

74

0.435

0.435

0.130

0.299

0.247

183

0.405

0.202

0.393

1.945

162

0.530

0.265

0.205

0.774

0.771

72

oc/t

T )mi

:2
A
2.5

Cr
1

124

0.02

Cr
2:

Cr

(The transluminated
layer, because

ZnS happens

2 reflector degenerates to a single dielectric

to reflect 32

% in the

A/4 condition).

The present approach does not control the degree by which a/t has
been reduced to a potential minimum. Let us additionally make the check.
For a beam-splitting ratio g = t realized at the maximum potential
transmittance of the device it must evidently hold that
Q

l+pS'n

py

(7-62a, b)

i+py.

Let us compute, on the basis of Fig. 6- 14a, the values q and t for the
as a function of h:
j8 = 0.5, 1, 2, regarding

three ratios

f^

BASIC METAL/DIELECTRIC DESIGN UNITS

331

Table 7-8

Working parameters of maximally transluminated chromium

hk

beam-splitters.

50

100

150

200

250

300

350

400

0.329

0.314

0.285

0.256

0.218

0.180

0.138

0.105

0.658

0.628

0.571

0.513

0.437

0.361

0.276

0.210

=T

0.493

0.478

0.444

0.408

0.360

0.305

0.246

0.195

0.662

0.646

0.616

0.580

0.528

0.468

0.390

0.320

0.331

0.323

0.308

0.290

0.264

0.234

0.195

0.160

0.5

We may now

compare Pohlack's beam-splitters with the maximally


It is natural to perform the comparison

transluminated chromium layers.

on the same

q-

and

r-levels*).

nesses to be 50, 150

Then we

and 250 A,

find the corresponding optical thick-

The minimum

respectively.

values

100

,0
?

%
75

f.

'

25

__,

,r
50

-^-ZZZT"

500

100

r
1.

600

Fig. 7-20 Spectral characteristics of a

air/Cr

100

700

chromium 1:1

air/Cr/glass system, metallic thickness 124

50

75

~~T~

A,

(2)

reflector.

simple

transluminated

A/4 ZnS/glass system, metallic thickness 74 A. (Dispersion of


chromium not

*)

ot/r

considered).

Increasing the levels one would obviously

work with

thinner

Cr

films, the

thus tending to a purely dielectric state. The comparison would be unfair.

system

OPTICS OF THIN FILMS

332

extracted from Fig. 6- 14a are inserted into the last

The simple A/4 coating turns out

column of

table 7-7.

to be surprisingly near the

optimum

attainable.

This, together with ease of manufacture, has predetermined


splitters

of

this

beam-

kind as viable induced transmission systems.

Figure 7-20 documents the spectral behaviour of the second mirror.

There
ratio

layer

very

is
is

little

dispersion present and an almost constant

maintained on the 45

would act

as a "half-mirror"

dividing

whereas a non-treated chromium

level,

on the 30

% level.

This figure simultaneously answers the question of

how

serious the

problem of exact matching was. By scanning the spectrum with an inserted


fixed layer one actually tries different tunings. No significant improvement
can be observed in a across the visible spectrum and the A/4 condition may
be regarded as accurate enough.

7.3.2

The induced-transmission monochromatic

The

filter

beam-splitter discussed in the preceding paragraph operates

on

the princple of induced transmission but

it is not a full-bred device of this


kind because no front extension was applied to maximize transmission

(the design being satisfied

extension alone).

by the values q

t there were after the rear

Chromium being only moderately

reflecting,

a single A/4

H-layer was sufficient for this extension, which also secured a fairly A-insentitive situation.

Taking a highly

reflecting metal,

such as

maximum

silver

or aluminium, and

in f and !P,
is led to a symmetrical
embedding of the metallic layer by stacks of 7,8, or so, alternating layers.
The need for these relatively high numbers is easily seen by roughly inter-

designing for a true

one

preting the matching as antireflecting the metallic core.

The complexity of the

dielectric

embedding introduces

dispersion into the phase condition of the matching of

much

significant

the

same

character as that discussed with the theory of the asymmetric reflector.

However, in the present


practice

shows the

case, this turns out to

be a virtue, because as

rapid spoiling of the matching in the vicinity of the

design wavelength gives rise to a transmission peak which turns the device
into a

monochromatic

mized

filter.

In

at the centre of the

fact,

peak

the very

will

work

same mechanism
in favour of

that maxi-

away, which means enhancing potential absorptance. The result

is

further

a trans-

BASIC METAL/DIELECTRIC DESIGN UNITS


mission

333

with extremely good rejection outside of the pass-band.

filter

Another advantage of

this filter is

freedom from transmission maxima of

other orders.

Maximum
40

transmittance attainable in the visible spectrum

for a half-width of 50 A.
in the ultraviolet

filters is

where

films for the Fabry-Perot type

For

[17].

full details

is

about

potential sphere of interest for these

it is

difficult to

obtain highly reflecting

filter, [23].

of the design the reader

is

referred to the

monograph

production-oriented treatment of the induced transmission

given in

is

filter

[24].

References
[1]

Ch. Fabry and E. Perot, Ann. de Chim. etPhys., 12, 459 (1897).

[2]

Z. Knittl, Czech. J. Phys., 8, 285 (1958).

[3]

L. G. Schulz, /. Opt. Soc. Am., 41, 1047, (1951).

[4]

L. N. Hadley and D. M. Dennison, see ref. 7. in Ch. 1.


A. Hermansen, A Theory of Interference Filters, Kong. Danske Videnskab. Selskab,
Math.-Fis. Medd., 30, No 6, 1 (1955>.

[5]

[6]

K. M. Greenland, and C.

[7]

Ch. Dufour, Le Vide,

[8]

N.

[9]

R. Blythe,

[10] J.
[11]

J.

Billington, Journ. de Phys. et Rad., 11, 418 (1950).


480 (1948).
Sperenskaja and G. N. Rautian, Zhurn. Tehn. Hz., 11, No4, 620 (1952).
/.

Opt. Soc.

A. Dobrowolski,

H. Schroder,

3,

in:

Am 34,

336 (1954).
Am., 49, 794 (1959).
Auwarter, Ed., Ergebnisse der Hochvakuumphysik und der

/. Opt. Soc.

M.

Physik dunner Schichten, Bd.

I,

Stuttgart, 1957.

G. Kard, Izv. Ak. N. Est. SSR, t. XII, No 4, 359 (1969).


P. G. Kard, Opt. i Spektr., t. XVIII, No 4, 684 (1965).
H. Koch, Transactions: Optik u. Spektroskopie alter Wellenlangen, Akademieverlag,

[12] P.
[13]
[14]

Berlin, 1962, p. 139.


[15]
[16]

A. R. Cownie, Journ. Opt. Soc. Am., 47, 132 (1957).


R. Messner, Optik, 2, 228 (1947),

Macdonald, Metal-Dilelectric Multilayers, Adam Hilger, 1971.


A. F. Turner, Journ. de Phys. et Rod., 11, 305 (1950).
M. Born and E. Wolf, Principles of Optics, 2nd edition, MacMillan, 1964,
A. F. Turner, see ref. 46. in Ch. 3.

[17] J.
[18]
[19]

[20]

[21]
[22]
[23]

[24]

H. Pohlack, Ann. Phys. (6), 11, 145 (1952).


H. Pohlack, Jenaer Jahrbuch 1954, Bd. I, 276 and Bd. II, 430.
P. W. Baumeister, V. R. Costich and S. C. Pieper, Appl. Opt., 4, 911
R. J. Holloway and P. H. Lissberger, Appl. Opt., 8, 653 (1969).

[25] P. Duffieux, Appl. Opt., 8,

329 (1969).

(1965).

p. 349.

OPTICS OF THIN FILMS

334

Problems
7-1

Prove the equivalence of

common

(7- la)

and

denominator, interpreting

2
g and introducing

t'

cos

to

by putting the

(7-3)
t'

q' q'

l r

on a

latter

2t \q'l q'r cos

as

the substitution

v q'l qr

g cos

x' sin to

y,

= g sin y

where

Y =
7-2

^r

<5l

Prove that the half-width of two identical

36
7-3

less

than that of a single

F P

tandem

in

filters

is

layer.

Design the scheme for computing and plotting the contours of constant
(equilateral hyperbolas) and contours of constant ^"
(curves

max

of opposite

curvature

F P

than

the

l^yhyperbolas)

for

asymmetric

Deduce from the qualitative knowledge of the


optimum filter having a maximum
^"
r
given
and
f
minimum
^"max
2
2 for given
max Pursuing the
analysis in concrete terms for Ag and having the true ^"max = const,
curves you would find that with h t given and evaporating the second Ag
film you reach a maximum 3~'max for h 3 < h t which is slightly larger
than that corresponding to symmetry h t = h 3 but the accompanying
(/*!

h 3)

contours that h t

filters.

h 3 furnishes the

Chosing another symmetric combination h l = h 3


the same iV 2 could be attained with a ^^(ft, h 3 ) > &~'m!a Symmetry

W"2

is

also larger.

is

7-4

always optimum.

Generalize the condition (7-22) for oblique incidence, taking into


consideration that for the metallic lyaers
in the transmission

maximum

of a

F P

8 S Predict the changes

filter

in (collimated) oblique

<5

incidence.

7-5

Show

the equivalence of the conditions for 0t

(7-36a, b) with those

due to Schroder,

as stated by Eqs.

[11].

Hints:

Keeping our notation except for the symbols g 1 . lt


plitude condition

7-6

=rc
(a)

Q^g'igl

T = tltR = t'.
-<5 R - $i + y.

ding that
i

is

1.

It is sufficient to

The key

The problem of finding the


etalon without having to

prove g

to the phase condition

values

first

then substituting into (7-30),

Schroder's am-

= g 2 QlQ'Ri
is

min-

the proof of

^max and Mmin for the reflection

calculate their positions

may be

by

(7-34)

and

solved by an expedient due

BASIC METAL/DIELECTRIC DESIGN UNITS

335

to Thetford-Bates-Macdonald ([17], p. 23).


that the inverse reflection function

0k

S?mSiX or

MmiB

It

uses the obvious fact

,{&) is single-valued if

Apply the procedure to the formula

the difference from the quoted case being that the

ray

incorporated into the one fraction of Eq. (7-30). (The proce-

is

dure

(7-30),

first reflected

is

straightforward, the quoted reference

it

not inevitable for

the solution),
(b)

= 1 {SI + ^") may be studied analogously


in (7-30), t't" + C instead of C. Note the inference that s/
own turning points unless t" = 0, when s/ = 1 St.

The extrema of s4
taking

has

its

When
{St

the
3T) m

and that
7-7

first

subcoating

^ = ^max +

it is

is dielectric, it

fmln

{St

can be shown that

$-) min

Slmin

^max

^max that secures sfmia in a dielectric-coated metal.


F P

sandwich

(a)

Prove that the resonance term of a symmetrical

(b)

can be written as cos y, where y is the


(<5 <p)]
[1 + #"sin
argument of the input admittance Y = Y exp (jy) of either half of
the filter seen from a central dividing plane halving the spacer
Trying a similar thing for the numerator of the ^-function of the

_1

same sandwich (assuming additionally


it

ni

"4) show, that

can be written as
q(\

where x

is

g)

cos

-2

the argument of an input admittance obtained

when

seeing an auxiliary film of amplitude reflectance ~Jg exp (ji?) from


a phase distance q> A/8, where q> is the phase thickness of the
spacer.
(c)

Using the above


trical

results, express

the energy coefficients of a

symme-

sandwich as

= (-rzj) cos2 y = y r 1 + cos 2y )


2
- e 1 8 ] cos22 y - e./i-gY 1 + cos2y
\l-Qj l + cos2x
\l-a) cos x
9-

(*)

(**)>
^

Use (*) to rededuce the formula for the half- width.


Note that (*) is a simple cosine function for 5" in the transformed
variable y, which is a function of q> formulated in the course of the
proof.

OPTICS OF THIN FILMS

336

7-8

Modify for the input

side of

a system the procedure used in

7.3.1

when changing the effective index of refraction of the substrate medium.


Consider a simple A/4 extension in the front and rear with indices

and n", respectively, and write out separately for the p- and
components in oblique incidence. Show that choosing

ri

n'

n os/2cos(0 o ),

n"

n g ^j2cos(-j

secures equality of the effective characteristic admittances Yp

Yp

F"
s

standing

(This procedure
8.5.)

now

is

s-

= F\
s

for the outer media.

important for the subject matter discussed in

8
Specific computational procedures

The mathematical apparatus so

far evolved is fully capable of meeting


have also shown some examples of its use
conducted towards a design goal, but then we mostly modified the straightforward formulae for r and t so as to suit the given situation. Generally

any

it

We

analytical problem.

may be

expected that any deeper modification of a formal value opens

up new design

possibilites.

In the present chapter

we submit

to the reader a

selection of specific computational procedures.

8.1 Vlasov

Kard recursion formulae

Let us take the recurrent formulae (2-29a, b) and form the ratios

*R

fa

jgj

'IR'IIR

*R

may

'lI^HR

}<P

-j(j>

MR'IIR]

*IR*IIR

Introducing the notations a IR


relations (6-8) following

JJ

IRIIR

'

r IR /*, R , A, R

l/f IR ...

from the generalized principle of

and using the

reversibility,

we

write the above equations as

Or

fc

=*iR*iiRe

ir*iir e

lv

J,,

+
+

a, 1R A,t e
,

_j "

a IIR a*e-^

(8-1 a,

b)

OPTICS OF THIN FILMS

338

These are essentially the formulae derived by Kard'va.

[1]

as a generaliza-

tion for absorbing systems of some earlier formulae due to Vlasov.

A number

of important papers in Russian thin film literature are written in

this

formalism.

Some minor modifications are to be added.


Kard introduces the so called reduced transmission

//n v+1 cos6> v+ ,\

n v cos6 vJ

yj\

having the obvious properties

The formulae
Further

it

S RL =

now

RL

rf

and dK
a

= dL
= r/d,
.

1/rf.

holds that

bL

(8-3a)

(6-8)

.*

which

\J\n v+l cos& v+l J

(8-la, b) are then again valid for

bR

and by

v cos0 v

//

R'

factors

is

(8-3b)

equivalent to (6-4b).

The

first reversibility

relationship (6-4a)

b R b+-a Ra*

may

then be written as
(8-4)

One of the advantages of the formulae (8-1) is

that during the recursion

process across the whole system the partial results in a and b are obtained
as linear combinations of given data.
that the fractions are set

By

It is

only at the end of the process

up

"R

using the formulae (2-17a, b) (2-18a, b) and (8-3a, b) one

may

establish the relationship

Sk
where Si +1

is

Building
builds

up

the system transfer matrix.

up S by continued

the quantities a, a*, b,

multiplication of matrices one essentially

b* introduced

in this section.

SPECIFIC

COMPUTATIONAL PROCEDURES

339

8.2 Kard's dual expansions for r/d and 1/d

Expansions of the

New

first

kind

formal aspects of multilayer computations will come forth,

if

we

put with Kard


1

-j-

cosh u y

-JL

sinh u

(or r

tanh u)

(8-6)

where
,

Obviously, (8-6)

on the

coefficients

only a different

is

v-th

= yln(n_

1 /y,)

way of

expressing the Fresnel

boundary using the reduced amplitude d instead

of/, but the introduction of the hyperbolic functions brings about


important
advantages in the subsequent manipulations.

In the

where

Gv_

new

t /V

is

notation the refraction matrix equals

the matrix

_,
/cosh
GM
- (sinh u

i/ v

sinh u\

cosh

(8

"7

>

The system transfer matrix S may therefore be written in the form


we replace each W_ 1/v by G v _ 1/v and multiply the whole result by

(2-16) if

V(n + i/ro).
Now it is

useful to note that for

that with any third index

any pair

i,j

G,"]

Gjj and, further,

G u = G

G,j

=G

X
.

Gh

(8-8)

Setting i = v - 1, j = v, v = 1, 2, ... and / =


or g, we may
express any refraction matrix as a product of two refraction matrices (for
the media v - 1 and v, respectively) in relation to any of the outer media.
For / =
or g, respectively, we shall call this left or right outer hinging.

OPTICS OF THIN FILMS

340

We may now write


1
S = /-^i-Gj; (G U 1 G
Il

The

(8-9)

or

associated products, which are actually outer-hinged interference

may

in general be written as

"

1
)(G Ia U 2 G ; )...(G Ik U k Gi )G I/k+1

matrices,

"

/cosh v sinh u v \ /e " v

\/coshu v

_
~

\sinh u v cosh u

-sinhu v \
coshu v /

e-^V-sinhu,

which may further be expressed as


cos

where

the unit matrix

is

<p

G(2m v)

(8-10)

C
M ~ S in U
= f t
l )
V^sinhu, coshwy

(8-1D

sin

<p v

and
'

G(u)

is

'

a further auxiliary matrix.

The matrices G and G have the following important


l

G()

G(t>)

G()

G(o)

+
= G( G(n

G() G(r)

v),

_
G() G(o)

),

=
=

G(

_
G(m

properties:

+
-

v)
(.""".)
t>)

which may be verified in a straightforward way.


These together with the structural representation of the interference
matrix as (8-10) enable important rules to be discovered in the continued
multiplication by (8-9).

We
book

[2],

refer the reader to

Kard's original papers, summarized in his

We

for full details of the derivation.

only show what the typical

manipulations are in the example of two layers.

We compute
G 01 [cos

<p t 1

sin

(p x

G(2i)] [cos

<p 2

sin

q> 2

G(2 2 )] G, /k+1

where

G 0( = G( M( ),
G, /k+ i

G(u k+1 ),

Mj

lln^

k+1

yM y^-

COMPUTATIONAL PROCEDURES

SPECIFIC

Using (8-12) we obtain in the


cos

q> 1

cos

step

first

sin

<p 2

G(w,

+j

cos

[sin <Pi

G(

<p 2

cos

sin

<p x

(j!>2

G(m

2u t

2u 2 ) G(wk+1 )

2u 2

k +i)

G(2Hi) G(w k+1 )

G(w,

M k+1 )

G(w,) G(2j

G(tt k+1 )

q> 2 G(t/,)

G(w,

sin q>

341

2u t

u k+1 )

G(2m 2 ) G(k+ 1 )]

G(k,

2w 2

M k+1 )

where immediate indications are made of further use of (8-12).

The

respective arguments

may

be expressed as

+ "k+l =o- k+l


+ 2M t 2 2 + "k+i = u o 2t) + 2v 2
, + 2u x - w k+1 = v - 2v y + v k+1
K, + 2V 2 - M k +1 = 0 - 2t>2 + "k +
i

m,

r k+1

where now
t>

The
right

the

= ylnyv

general rule (to be derived by complete induction) states that the

hand

side of (8-9), apart

from the square

root,

may be

expressed as

sum of matrices

Ef

sin

cp

pi

sin

cp

sin <p .
pi ...
p

+
which runs over
Pi

all

2v P2

cos

cos

<p qi

...(-l)

cos

<p q2 ...

2t> ps

?2

^k- s

Cs

T(v

2v pi

(-l)'ty)

the possible 2* divisions of the

<Pi- -j_ < P*> 9i


= G if s odd.

q> qk _ s

0, 1, 2,

1,
.

2, ...

k)

(8-13)

k into two groups:

and T

= G

if

s even

and r

Referring to (8-5) and (8-7), one


will represent

b R or a R

if

may

the arguments (v

immediately state that (8-13)

2v Pi

...)

are related to

cosh or sinh, respectively, in place of the symbol I\ These are expansions

of the

first

kind for r/d and

1/d.

typical feature of these formulae is that the phase angles

<p v

are

OPTICS OF THIN FILMS

342

number of

separately contained in a

refractivity parameters v v are

factors sin

(.

.),

cos

(.

while the

.),

cumulated in the arguments of hyperbolic

functions.

Expansions of the second kind

One may

also deduce dual formulas

exchanged.

where the roles of

<p v

and

v v are

Let us introduce the matrix

We may then verify

G(u)

=T

Ti

7fG-i>
v^ v -v

(o e")

"

<

1=TU (- jW ) T_1

which formally expresses the refraction matrix G as a transformation of


a phase matrix U with a properly adapted argument.
Writing

now

S =

y^-

T U(-j Ml ) T- 1
.

Ufo) T U(-ju 2 ) x
.

xT- ...T.U(-juk+1 ).T- 1


we

associate the T-matrices with the true phase matrices, obtaining

COS
^
T \U(cp ).7 = (\jsni(p
v

jsin<

cos<p v J

which may formally be written as a refraction matrix G( v) with w v = j<p v


For formal reasons let us also define <p = <p k + 1 =
so that U(<p )
.

and

G(j<p k+1 ) are unit matrices.

We may

then write in the former way [(8-9) written without outer

hinging]:

S =
and

in the

y^-U(<p

)G(H 1 )U(Pl )G(u 2 )...G(M k )U(<? k)G(u k+1 )


,

(8-14)

new way

J^T U (-J"i) G

0Pi)

U(-j 2 ) G(j<7> 2 )

xUC-JWk + OGOVk + OT

...

G(j<p k )x

-1
(8-15)

SPECIFIC

COMPUTATIONAL PROCEDURES

343

Interpreting the latter equation as a transformation

following rule

may be

stated: taking the system transfer matrix

in Kard's formalism (8-14)

jv

S = TS'T -1

the

S expressed

and performing an exchange of arguments

v = 1, 2, ... k + 1; we obtain a
j<p v
which also contains the complete information on the system
and may easily be transformed to S. The two expansions (8-14), (8-15) are
dual in the sense that the phase and refraction elements (<p v and u v respec<?> -

matrix

0, 1, 2, ...

&; m v ->

S',

tively) are alternatively placed in the

U and G

matrices.

We shall now elaborate the dual expansion (8-15) into a more concrete
form, which will enable us to find the dual of (8-13).

Let us tentatively put

G(tv)

COsh

\sinh

w
w

w
sinh

cosh

In -^- so that

w
\ =
w)

2y/u'u"

/V +
~
V*'

J"" A*'

^" n'

~ ^"\
+ I*")

which may further be written as

This amounts to coming back to the admittance matrices


this time the "refraction indices"

angles

q> v

n',

will

n"

when wv is identified with j<p v


we may write (8-15) as

of the system

Using

(8-16),

s=

_A

f__I
'

V 2 yi

/l

e ""7 2

^'A

V -Wi)

^3

Mi

/S7

M2

We"'

\L IK(

-1A
j

(2-9),

!/A_\

T" 1
1

'"

//*_ /l

V
M.

AV

I
1

\/e u * +I

e-- + 'J

-MjA
1

but

be associated with the phase

rest

/l

V2

-1,
1-

OPTICS OF THIN FILMS

344

now

our goal

It is

matrices

following values for the


\i\

Hi

Hi

J*k

to

make

this

resemble a product of interference

This can be arranged by setting w v

to be denoted as

1,

fi %

V-i

Us

/*k-l

/*k

this

w =

w3 =

cp v

H3

nA

0, it

^k + i

holds that

^ y+1

or

= e -^o + ^ + ...^)

0, 1,2, ...k

fi v

in

terms of the physical

<P

we have ^+1 =

of the layer system.

Writing in particular
the value of

The expression

"V

/i 2

1
A*k
w k = -=-ln-^_

This formula defines the so far free parameters

w2 =

j<p

is

= In

implying wj

w + Wl +...w v = ~ln(ll^ +1 )

which

and by choosing the

Since by definition

parameters

= je v

/*

all

1I

q> t

...

q> k

e'*,

the products of the \n'/n" type.

(8-17)

CJ

q>

Mv

now becomes

-{ 2

-h+J\

+1

e-""')(l -l)\

where

M =

cos v

JKsine,

cose v

j^ v sine v ,

are the converted interference matrices, e containing the refractivities,

fi v

the phases.

The remaining product


the equality

.}

lWl

(l

i0

{.

can be disposed of when considering

l/^ +1 \/e *
j

We finally have
1

S =

/HZrr
V

yo

JKsineA

>"..

v=i \JAt v

smev

cosev /

SPECIFIC

COMPUTATIONAL PROCEDURES

345

(The factor U($) is unimportant and if it

we simply compute

neglected

is

the transmission factor with the phase taken relative to the input boundary.)

of

We shall now write out in full for k =


dual expansion. Writing cos s = C

this

s lt

5>1^2^-'3^4

ej

*(^ s c 2 c 3 c* + ^c
i

s 2 c 3 c4

SjS2S 3 C4

/*3

A*2

cosh w v

/*3

-2j<pi

ifi.

r;

sinh w v

and

4f

"

-2j( 2 + 3)

_-2j(>l+>2 + >3)

Jff.

^2^4

g-2j>3

/*3

'

--2JP2

/*2

further

^4

--2j(^i+ V3 )
C
y

'

c 2 s 3 c4 +

^2

'

Ml^3

= j

^4

-2j> 2

A*2

o
q
n
^l a 2 a 3 d

A*3

sin e v

/i3C 1

Sib2C 3 S4

PzPa

n c c
aj^^^

Pit1 * Q

cos e v

^2

/*2

Now,

S!S2S3S4V

H
/*l/*3

+ ^ 4 C C 2 C 3 S4

/*3

CiC 2 S 3 S4

>^1^2^3^4

1*2

S21

S v we have

/*3

7l^77

ev

siri

*-1^2^3*^4

"

Vl

SJS2C3C4 S C S C4

<C 1 C2C 3 C4

3 to illustrate the manipulations

-2.i(<l+>3)

'"
/<lA<3

Multiplying out by e j * or je J * and extrapolating by incomplete induct-

ion

we

aR

bR

state the following general rules

= Ixhuj
= Zxhw!

.xhM 2 --"xhk + i- ex P[ _ J(9'i <Pi---

.xhw 2 ...xhu k+1 .exp[j(<p 1

<p 2 ...

<Pk)] (8- 19a)

<p k )]

(8-19b)

rf

where xh means cosh or


of

sinh, in (8- 19b)

sinh.

Each term

an even number of

possible combinations, their

an odd number
The sums run over all such

in (8- 19a) contains


sinh.

number being 2 k

OPTICS OF THIN FILMS

346

The

rules for

q> v are as follows:

taken positive (negative)

<p v+1

has the same (opposite) sign as

xh h v+1

if

xh u 1

<p t is

q> v ,

cosh u t (sinh u t )

if

cosh u y+1 (sinh w v+1 ).

These are expansions of the second kind for rjd and

!/</.

8.3 Kard's theory of translumination

In this section

we

shall establish parallels

between

the* theory

of induced

and 6.4, and Kard's theory of


translumination of absorbing systems. The development of the latter will
not be systematic, but rather its main features will be drawn to the reader's
transmission, as already outlined in 5.2

attention.

Let us start with the input-side-extension theorem. The fact that


(1

q)jt is constant

may now

be written in terms of

----^- =
TR

may

This

TR

b R bt-a R a*
R

(8-20)

be proved by having recourse to the relationships

the invariance of (8-20)

is

known form

6.4,

we

shall

(8- la, b). Since

demonstrate the same

proof on the invariance of another expression, viz*)

U R e *=a R b R -a R bR
j<

(8-21)

With reference to Fig. 5-1, we front-extend the core HI by a dielectric


I and compute by (8-la, b) (with <p =
and writing, for simplicity,
= i a in, r = o 3 etc)

stack
ir

- ab' = (0l b'3 + a'.b^ib.b, + a 3 a*)- ("i^s + a 3 b*) (b^ + a'3 a*) =
= (bX - a ia *)(a'3 b 3 - a 3 b'3 ) = a'3 b 3 - a 3 b'3
a'b

(the first bracket in the third line being (1

g)jx

for the dielectric

extension.)

We

*)

symbols

coefficient

adhere to our notation introduced in 6.2 and therefore translate Kard's


b to a', b' (meaning that the system is taken with negative absorption

o,

^#=

x).
*.

Further, a*,

b* are replaced by a'*

a*

etc.

For a

dielectric

SPECIFIC

COMPUTATIONAL PROCEDURES

The new
series

347

invariant will be of use in further computations.

It is one of a
of quadratic parameters introduced by Kard in his development of the

theory of thin films, two of which will be defined subsequently.

may be

Realizing that inevitable absorptance

&R&R

RR

written as

*R

may be

induced transmission

treated in the following way:

Adding the matching stack II, again conceived of as the spacer layer
/ + reflector D, Fig. 5-2, we compute by (8- la, b) (writing <p for q>
using
the subscript 2 for anything concerning the reflector D and omitting entirely
t ,

the subscript R):

= bb* - aa* -

=
I

b 3 b 2 e*

b2

2
(|

a2 a* e"*
b3

2
|

- a3
- a 3 b'3 )

a\b 2 e 2j *(o 3 b 3

- 1 =
- of ) +
o2
b*
) 2
^
a
+ 2 b*2 c~ (a*b*3 - a*3 bf) -

2
|

2
|

a 3 b 2 ej "

a 2 b* e~ j *

(|

Introducing the notation

the above result

b= /le*
t

= /le*.
\ t

may be put

form

into the

- ^-4 +2U -^ -cos(2? + a


TX - -T-TT
X
X
2

X2

Translumination
2q

and then

x3

finding the

now

a3

consists in

v 2 ) (8-22)

/i 2

v2

making the cosine equal

jc, +3jc,

...

to

1,

i.e.

(8-23)

minimum of (8-22) with respect to q 2


we recast (8-22) by introducing another two quadratic

Before doing this

parameters*)

coshp

*)

angle

The bold-type
q>.

Neither

is

q>

now

''*)

(8-24a)

= i-(bb*-b'b'*-oa* +

o'o'*)

(8-24b)

= Y^ bb * + bb

introduced

S system matrix.

is

aa *

not to be confused with the ordinary phase

OPTICS OF THIN FILMS

348

In view of (8-3a, b) cp
light.

Further,

it is

is

independent of the direction of the incident

idependent of any front-extension, which, together with

the invariance <p R =<pL> makes it independent of any dielectric outer


extension whatsoever.**) Thus <p 3 for the absorbing core is identical to <p

computed
S

is

for the complete system

distinguish between S 3
It

matched for translumination.

invariant to front extension, but S R

may

easily

S 3R

be verified

and
from

SL

We

therefore

shall

S 3L , see (8-30).

(8-24a, b) that

cosh p

cosh tp

(8-25b)

S2

(8-26)

(8-25a)

t'

and

U2 +
These formulae

relate p

(1

and S with the orthodox parameters a and

Using (8-23) and writing


ac_

sinh q>

t2

g 2 )(cosh<p 3

=
-

1)
1

Q%

>

may now be

(8-22)

+ S 3 (l +
~ Qi

Q2 )

t.

written as

- 2U 3y/Q 2

which assumes a minimum value


(8-27)

\ ^ /min

for

^=

S3-sinh y3
S3

(8-23)

and

(82g)

sinh<p 3

(8-28) define the rear extension for

<x/t

to assume the

minimum

value (8-27).
Inserting (8-27) into (8-25a) (with <p 3

which by (8-26)

is

U =
This condition

= <p !)

may be

(for the

R direction)

It is

sinh

<p

(8-29)

regarded as a criterion of translumination for any

outer-extended absorbing core.

**)

one finds

equivalent to

another kind of bilateral invariant; compare (6-71).

SPECIFIC

COMPUTATIONAL PROCEDURES

The transluminated system

as a

whole

349

will

have the following transfer

coefficients

(S 3

1
- sinhq^Q" 1
x = (1 - e^"" ) Q'
3
a = 2 sinh tp 3 (l - e^*" ) CT
3

(8-30)

where

Q=
The appearance of
front-extension

III

S 3L

sinh tp 3

S 3L indicates that the parameters

depend on a possible

to be additionally applied to the transluminated system

I,

II.

Carrying

out to obtain

this

maximum

transmittance,

i.e.

securing

q
0, amounts to matching the value S 3L to equal sinh <p 3 Looking now
at the condition (8-28) in terms of the L-direction means reading S 3 as S 3L
.

and
1

interpreting @ 2 r as 0il f r tne extension

i.e.

no further extension

is

regarded as some reflector

obviously implies g 1L = 0,
gR
needed to secure the translumination of the

The condition q

plus a spacer.

core III for the L-direction. This has already been ensured by antireflecting
III

II

There
III

a result

an

is

known from

6.4.

interesting consequence for the transluminated system

from

II resulting

(8-29).

By

(8-21)

must then hold that a K b R

it

= a R b'K which is only possible for r R = rK


transluminated system has
therefore the same reflectance q r = 0r whether the absorption coefficient
.

is

taken with

a'

= a

exp

+x

or k. Further

it

may be shown

that

x'

t exp (2cp),

(<p).

In conclusion,

let it

be stated that Kard's theory

is

pushed much farther

beyond these basic concepts, dealing with matters like external and internal
translumination and with the achromatism of translumination.

8.4 Circle diagrams

We have already become

acquainted with two graphical methods used


in the design of multilayer films vector summation and Smith's chart.
Both have been widely used on the designers' desks and in the literature.

There is an important version of graphical displays which has not enjoyed


such a wide popularity in the published literature, although it was already
developed in the mid 1950's.*) Apart from a principal description by
*)

Frank Rock

is

the reported father of the method,

[4].

OPTICS OF THIN FILMS

350

[3], it was not until the 1972 paper by H. Apfel, [4], that
seems to have been confined to the sphere of unpublished front-line
routine work.

Berning in 1963,
it

Since the

method

mations involved),

offers

it is

a high degree of visualization (with no approxi-

of great help in conceptual designing of multilayer

systems, which usually becomes the starting point for further refinement

by
it

digital

computations.

We present a brief account of the method, regarding

as one of the specific computational procedures being described in this

chapter.

Let us carry out the following numerical experiment: having any dielec-

compute the

tric multilayer, let us

partial results of amplitude reflectance as

obtained by recurrence from the substrate upwards, taking these in reference


to the outer incidence medium. (Such a computation is a recommended

option with any thin film computing program.) Let us in addition extend
the monitoring of the partial results into the individual layers, dividing each
layer into, e.g., five parts of equal optical sub-thickness and refractive index.

Thus
lowed,*)

if

1/1.35-2.11-2.365-1.83/1.5

it will

is

the multilayer to be fol-

be visualized as a 20-layer system

refractive indices

l/[1.35]

[2.11]

[2.365]

relative optical thicknesses

The

[l.83] /1.5

20

= r exp jd as obtained in the phase angles cp =


measured in one complete layer of the basic pattern)

partial results for r

and

70, 90,

are

[0.2]

shown

10

(<p

in Fig. 8-1.

Obviously, the tip of the vector r describes circular arcs whose centres
and radii vary from film to film, but all the arcs form a continuous (though

cranked) contour.**)

It is

beyond the capacity of

this graphical display to

reveal that the centres of the arcs corresponding to a given sublayer

C2 ,C3

and

ment of the

it is difficult

division of the individual arcs into five segments


this will

*.)

This

minimum

is

become evident

to note
is

how

far the sub-

uniform or not. Details

in the analytical discussion to follow.

a tuned antireflection system due to Kard,

[5],

designed by the criterion of

quadratic deviation from zero in a certain interval.


are therefore encountered in the displays.
* *)

in the three parts of Fig. 8-1. Also,

of

{C l

C4 respectively) are not fixed in position, because the displaceCv is much smaller than the change of the corresponding radii

No

true zero points of q

Recalling the property of A/2 layers of being effectively absent, one

may say

hand that T(<p) must travel in closed contours returning to its starting value
a multiple of A/2. The interesting point is that the contours are circles.

for

before-

A equal to

SPECIFIC

We

COMPUTATIONAL PROCEDURES
shall

adopt a simple approach, directly aimed at proving what

seems to be an established
result r"

exp

j<5"

arc depending

fact: building

up a

further layer

on any

partial

whatsoever, makes the ensuing vector f follow a circular

one' and on

The addition of a
r'

351

the refractive index of the

with respect to the incidence

medium

is

+ r"expji^
+ r'r" exp j^

r'

(Ce

$ =

Co

,*

layer.

q>

5"

0.1

05

new

and amplitude reflectance


described by the formula

layer with phase angle

~ 01

c,

2<p

p'90*

0.1

-01

0.1

0.5

,*A

\J

\-0.2 C4

-0.1

jP'110*

\
0.1

Cl

\
-0.1

Fig. 8-1

Development by

partial results of amplitude

reflectance of a four-layer antireflection system in

three values of the phase angle

q>.

Tip of vector f

describes circular contours.

(8-31)

OPTICS OF THIN FILMS

352

should be recalled at

It

seen from the

We

q>

exp }5"

is

the starting value as

whereas the starting value proper

layer,

from the constant incidence medium n

r" exp jd", seen


(8-31) with

this stage that r"

medium of the added

is

obtained by

0.

shall later find

in terms of r", for

convenient to express the absolute value r"

it

which (8-31) with

r"

ty

set equal to zero yields

r"
1

r'

(8-32)

r'"r'

However, the present discussion will proceed with f".


If the statement about circles is true, it must be possible to find points
(i ri) in the Gaussian plane such that
,

r-Z-Jn=bexpJP
with b a constant for

q>

variable. This will define circles

ance contours in the sense r"

is
<p

on

const, where r"

we might

value. Referring to Fig. 8-1

centres

(8-33)

is

which are

isoreflect-

the modulus of the starting

well assume that

r\

and seek the

the real axis. This will in fact be done, but the formulation (8-33)

taken in a more general form so we

may

seek the answer to the dual case:

constant, r" variable. This will throw light

on the distribution of the


nonuniform scale being

optical thicknesses onto the circular arcs, the

defined by the isophase contours

ty

const. These will again

be found

to be circles.
Inserting (8-31) into (8-33) the absolute value squared

[r'(l
t ^L'
I*

+
t

)cos^] t
+ 2 ;vwyj
+ r"(l
yx
2
+
r'V
2r'r"cos^
+

r" ) -r r"(l
i
yx -r r'
,
'

<[<
>?

is

2
r'
i

The postulate of a constant b 2 with (|, tj) fixed is equivalent to


part of (8-34)] being equal to

)smij/
jam
<//

[r

fractional

some other constant C.

We shall express this condition in two ways, differing in the way a proper
variable

is

factored out for the isoreflectance and isophase contours.

Taking

rj

we may

C(l

first

case

- C) - f(l + r' 2 )] cos =


+ r'V 2 ) - r' 2 - r" 2 + 2r'(l +

2r"[r'(l

write for the

x//

r" )

(8-35a)

'

SPECIFIC

COMPUTATIONAL PROCEDURES

353

and for the second case


r"\Cr' 2

+
Now,
of cos

ij/

2fr0

f/(l

if (8-3 5a) is

r' ) sin

zero.

(C

r'cos

* + 1 +

r'

must in

n_

cos

+ +

2r')

\//

(8-35b)

variable, the factor

Hence

(8-36)

turn be zero, which determines

its
'

2
r' )

= (1-C)r'
.,2
1 + r'

side

1)

to hold with r" constant and

must be equal to

The right-hand

2r'[(C

r"

- 2fr'(l +
+ r' 2 r" 2

r"

2
)

Inserting this value into (8-36) leads to the final determination of


{ as
1

may

This

easily

assumed for

tj/

be verified to equal the

difference of these.

r"

mean of

the extremal values of r

and n and the radius of the


Hence

circle

must be half the

-r

,/2

'

r
1

For a given combination n

jn x (i.e.

with

r' fixed)

conveniently defined by letting r* take the values


r"

by

(8-32)

and drawing the

(8-38)

,'2_2
2

r' r'

circles as defined

1, 0.9,

by

set

(8-37)

may be
computing

of circles

0.8 etc.,

and

(8-38).

The

diversion over r" secures that these circles pass through convenient
cardinal
values of the real axis (see the closed circles in Fig. 8-2).

Turning

now

to (8-35b) this must hold for any r" with

quantities fixed. Setting the

and third

first

coefficients

all the other


of this polynomial

in r" equal to zero leads to


1

Cr'

2
r'

2r'

which can only hold for

C = -1
,

<

-C

2r'

and we have

2
r'

-^T-

(8-39)

OPTICS OF THIN FILMS

354

Setting the second coefficient equal to zero, with

and

taken as

determined, leads to
'2
1

cotan

(8-40)

\j/

ir

The
(8-39)

on

i/f

centres of the isophase circles

from the imaginary


by (8-40).

axis

and

lie

on a

their distance

vertical line at

from the

a distance

real axis

depends

16

5-

10

All these circles must pass through the point corresponding to r"
when r = r'. This yields for the radius the condition

[(r'

& + ft

Since in most applications


half-plane.

r'

2-li

<

_/2
t -I-'"

(8-41)

2r'|shnM

0, the centres are situated in the left

SPECIFIC

COMPUTATIONAL PROCEDURES

355

Entering the diagram with a certain starting value /-'"exp j<5'" plotted in
the rectangular system, one

is automatically on the r "-circle by (8-32),


whereas S" could be read off the positive real axis counter-clockwise along the
circle. This is not actually done, but the phase angle 2<p is laid off the starting

point clockwise in accordance with the meaning of

Fig. 8-2 Circle diagrams for: a)

incidence

MgF2

The

medium.

<p

scale

is

1.38), b)

ZnS

\j/.

2.35),

calibrated in multiples of

with air as the

A.

Fig. 8-2a,

b shows

typical displays for the 1/1.38

and

1/2.35

combin-

ations.

The

9-scale

may be calibrated in

terms of A/ A, a half circle correspond-

ing to 0.25.

For each isophase circle q> there is a symmetrical circle tc/2 <p.
The use of the graphs is straightforward considering that any of

the

OPTICS OF THIN FILMS

356

partial circles

shown

e.g. in Fig. 8-1 is

contained (possibly by interpolation)

in the corresponding circle diagram for boundary l/n, v

1, 2, 3, 4.

For two-component systems the procedure consists in switching over


from one diagram to the other, correctly transferring the intermediate
results and advancing clockwise along the corresponding circles until proper
A/A ratios are covered. No renormalisation is needed, as with the Smith
chart, when crossing the boundary. The modulus of the final result is
squared to obtain energy reflectance.

03

02

y^

~~~\L
ai

-03

Oil

1 -as

?\

4B.2

02

0.1
1

0]

&(?)

1
-0.1

~r-

-02

-fi3

Fig. 8-3

Design of the simulated antireflection

bi-layer in terms of the circle diagram. Extension

into a four-layer.

When

the variable dielectric layer


(p

on

It is

the real axis.

is

not the top one, the diagrams of f

are again circles, but their centres

progressing with

do not

necessarily

immaterial in this case whether the overstructure

absorbing or not. The reader

is

referred to

[4]

lie
is

on how this may be


filter. The case of the

for a hint

proved by applying the matrix techniques to the split


variable top layer would of course be covered as a special case.

More complicated
if

the variable film

is

web-like patterns evolve from the circle diagrams

absorbing. This again

is

covered in

[4],

including

many

design aspects.

To

illustrate the potentialities

of the method

simulated antireflection bi-layer (2AR, see

with the established circles

2AR

case.

let

us

first

rededuce the

Extemporizing further

we shall find that the detuned antireflection


4AR, may be regarded as a certain extension

four-layer, described in 3.4.3 as

of the

3.4.1).

SPECIFIC

To

COMPUTATIONAL PROCEDURES

design

2AR we

shall

assume the

357

refractive index pattern 1/1.49

one wavelength, the L-material

The aim being zero reflection at


must pass through the origin. The other material cannot but start at
the bare substrate which determines the H-circle (Fig. 8-3).
The two known solutions for 2AR emerge clearly in terms of circular
arcs to be covered by deposition:
2.22/1.52.

circle

L-material

H-material

0-

II

Let us

now

concentrate

layer of the type 1/[1.49

2'

is

(A H

3-4

(A h

on

solution

2.22] /1.52, again postulating q

and extend

much

4.

The scheme

a four-

at the design

as possible to the structure of

obviously done by returning from 3 over

completing to

< AJ
> A L)

this two-layer into

wavelength and adhering as


This

1-2-3-4

therefore

once again to

2AR.

and then

is:

glass

0-1

1-2-3
3-0-1
1-2-3-4

H
L
a
It

remains to determine the optical thicknesses corresponding to the

The isophase contours are not drawn in the simple diagram


because the case may be fully determined from the knowledge of the basic
2AR design, as computed by the formulae of 3.4.1, having only schematic
arcs chosen.

reference to Fig. 8-3.

For the

refractive indices

under consideration one obtains by the form-

ulae of a 3.4.1
(p 2

Knowing

01

30.1;

<p t

1234

117.73

(8-42)

that a full semicircle over the real axis represents 90 in

one can immediately write


12

23

34

90

=
-

cpi

23

90

62.27

27.73

<p,

OPTICS OF THIN FILMS

358

hence the two inserted arcs by which

The values

may be

(8-42)

and

90

is

55.46

301

2 x 30.1 =60.2

the

(8-43) determine the tuning of the

new system which

0.668

0.616

0.334

taken as unity, or by

first

The

4AR

(8-43)

described by the relative numbers

if

was extended are

123

1.31
if

2AR

layer

latter

is

0.51

0.47

0.255

taken as reference.

notation shows that the design

layer of 3.4.3, viz.

0.474

(Fig. 8-4) is very similar to that

between the two tunings

is

0.4

0.3,

is

very near the tuning of the

and, in fact,

just the

its

phase diagram

The slight difference


retouching needed to make the diagram

of Fig. 3-3a, case

2.

of Fig. 8-4 more symmetrical.

Fig. 8-4

Phase diagram

g(<p)

of the four-layer obtained by extension.

Tuning referred to

first

layer as unit.

COMPUTATIONAL PROCEDURES

SPECIFIC

359

8.5 Notes on non-polarizing beam-splitters

Recent years' development of laser-oriented long-path interferometry


with its increased demands on the factors affecting fringe contrast has
brought into focus the problem of beam-splitters that treat the p- and
^-components equally. This task is rather severe, because at 45 incidence,

which

is

the usual case, the Brewster angle situation

simulated in every dielectric system


visible.

This

is

particularly true of cemented mirrors.

how easy it is
M. Banning).

An

to secure g p

is

less closely

with q s

Problem 3-12

illustrates

high (interference polarizer after

analytical theory for the non-polarizing beam-splitter

given by Baumeister,

was

mode of observation (n n g & ).


Without much loss in generality one may

the given

pairs n v , n 2 repeated m-times,

i.e.

g s at

<p

consider a cascade of index

2m. The conditions

for n t

and n 2

then be stated in the following form:

w =
define

sec

o lsec

for

to y:

2
t

an auxiliary term
r.

Pi. 2

and the solution then

y m i^r

2m / VO,.2-

is

nl

4 sm &o i^==
2

n\

n sin

O
1

For the non-cemented mirror

P2
= + v/<?

leads to a negative n\ hence only


,

the case that either r p

= +Jq

rs

(possibly to occur

(8-4*0

\lw

rs

in

tc/2

Making use of our former parameters y, formula (3-20a), taken


even, and a, formula (3-22a), and introducing a quantity analogous

we

first

assumes a A/4 stack and derives the conditions

[6]. It

for the refractive indices to secure a prescribed level g p

may

more or

made up of materials conventional in the

~ _
2
-f
^/w

<

(8-44b)

n g) the solution with

Pt

based on a 2 applies. This corresponds to


(the usual case at 45) or r p

when above

the Brewster angle for

-y/g,

some of the

For the same mirror seen from the other side, P x with o t is
competent. The formulae yield the refractive indices in reverse order and
the sign distribution is either r = r s = y/g or r p = +Jg, r s = -y/g.
materials).

OPTICS OF THIN FILMS

360

For 45 incidence part

a)

of table
Table

8-1 is obtained.

8-1

Non-polarizing index pairs computed after Baumeister's theory: a) non-cemented


plate, b)

cemented cube

= 45.

a)

minimum

1.815

2.034

2.120

4.476

3.139

2.672

2.541

"i

1.902

2.294

2.584

2.695

"2

6.043

4.089

3.446

3.267

being the absolute

in a

There

1.504

The phase diagrams of these


Jt/2, this

"i

b)

is

solutions have a

maximum

for the

common

point at

^-component and a

broad trough for the j-component.


an obvious demand for unusually high

<p

relative

refractive indices,

when the number of layers is small. This demand is eased, if the


computation is made for other incidence angles. A set of computations for

particularly

30

< o <

85 was systematically carried out by Mahlein,

[7],

the results

having been plotted in diagrams concerning the non-cemented situation


for both even and odd numbers of layers. However, explicit information

on the reflectance levels is missing and must be interpolated by checking,


with the exception of the 50
case. We can extract from Mahlein's table

that for a technological pair


reflection level

and

of 50

is

combined as

secured with

m =

(1.38 2.35) m 1.52,


1, 2,

3 for 6>

81, respectively. Unfortunately, these values are far

an unsplit

40.9, 72.4

from the

practically

desirable 45.

For the cemented beam-splitter the solution with even parity

as given

by (8-44a, b) breaks down since w = 1. This situation may be circumvented


through the addition of an extra layer on the outside, say n
k+1 = fi, where n
is a fixed technologically convenient value. Part b) of table 8-1 shows some
refractive indices for a 45 semireflecting cube if
n = 2.0.

SPECIFIC

COMPUTATIONAL PROCEDURES

3 61

Again, the results are technologically inconvenient and the situation


at other angles of incidence. Thus [8] reports on a cubic beam-

may improve
splitter

of seven XjA layers

1.7/1.515

working

1.35

1.515

1.7

1.515

1.35

1.515/1.7

at 50, this exact value being very critical.

One method of

obtaining cross-sectional points of the curves


q (A),
&(A) outside of the tuned condition seems to be the use of high-pass designs,
as discussed in 3.5.1, but considering now the highly oscillatory ripple
on the
low-pass side.
Further, instead of looking at

random for direct cross-sections of such


look for the cross-sectional poits of the equivalent
admittance functions Ytp (<p), Yep(<i>) of simple symmetrical periods allowing
of this approach. The parameters varied are technological index pairs
and
one

q(X) curves,

may

(with less efficiency) the tuning ratios.

The standard

ratio 0.5

0.5 seems

to cover the situation sufficiently.

Although there

more design scope

a randomness, too, in looking for these intersections,


opened for combining the periods thus found into

is

is

systems with various reflectance levels.


In addition to using some periods

= Yesll

and

II

with equal

Ycpl = Ynl

one must also take care of two further factors:


(i) the equivalent optical thicknesses of
the periods alternated should
be at least approximately equal to odd multiples of A/4. This may
be helped
by repeating some periods 2 or 3 times.
^epii

matching of outer media must be secured. The corresponding


is provided by Problem 7-9.
As an example of a system synthetized in this way (as an extension of
(ii)

material for this

a germinal idea due to Costich,


l/'[(2.22

1.49

[9])

we may present

2.22) (1.7

1.38

the multilayer

1.7)

]"V

1.52

with relative optical thicknesses


[(0.75
n'

1.3,

m =

2,

and 56

where
for

n"

1.5

2.09

at

0.75) (0.61

and the

1.22

reflectance level

5940 A for

m=

0.61)
is

41

2
]

at

3, if unity optical

6250 A

thickness

is

taken as 1500 A.
This level
strictly

may be slightly varied by modifying the values ', n" from

matched condition. Thus

ri

1.7,

n"

2.22,

m=

2, yield

the

a cross

OPTICS OF THIN FILMS

362

section on the level 30 % with a


by new overall retuning.

slight shift in k,

which may easily be redressed

The number of layers required in these solutions is rather great and the
tuning will demand sophisticated monitoring, because the cross-sections
occur at upward or downward slopes of tightly packed maxima of the
p- and 5-curves. However, there seems to be no other way, if readily available
indices are to be used in beam-splitters of this kind.

The same method applied to the cemented case gives the curious,
though highly logical, answer that, with the orthodox indices of refraction,
the equality g p = g s may be secured at nearly zero level only.
The inherent limitations of the cemented case due to Brewsterian
reflections may be overcome only by having recourse to combined metal-

dielectric systems.

patent
(n

0.07

simple

Following

[10].

D-M-D

design

this idea for the

4.2/ at 6328

A) by ZnS, one

is sufficient,

as indicated

by the

symmetrical embedding of

is

silver

lead by trial-and-error numerical

interpolations to the solutions

A2

A!=A =

=205A;

1590A;

qp

=& =

48

%;

=3%

or

=A

The method
absorption

may

References

[1]

P.

=540A;

also

Qp

q,

G. Kard, Opt.

Spektr.

t.

IX,

No

1,

[7]

95 (1960).

P.

[8]

[6]

[4]

%;

P.

W.

(1957).

Baumeister, Opt. Acta, 8, 105 (1961).

H. F. Mahlein, Opt. Acta, 21, 577 (1974).


W. Baumeister, J. Opt. Soc. Am., 63, 494

P.

A (1973).

V. R. Costich, Appl. Opt., 9, 866 (1970).


[10] S. J. Refermat and A. F. Turner, US Patent 3 559 090 (1970).
[9]

4 %.

works with other metals, but the accompannying

[5]

[3]

40

not always be as low as desired.

G. Kard, book, see ref. 1. in Ch. 5.


P. H. Berning, see ref. 5. in Ch. 2.
H. Apfel, Appl. Opt., 11, 1303 (1972).
P. G. Kard, Opt. i Spektr., t II, No 2, 245

[2]


SPECIFIC

COMPUTATIONAL PROCEDURES

Problems
8-1

3 63

Divide

(8- 19a)

cosht*!

coshw 2

by
...

(8- 19b)

coshwk

and reduce the fraction by the product


Referring to (8-6) you should be able to

read the result as (2-36a).

Proceed similarly to obtain (2-36b).


8-2

Compute

the quadratic parameter (8-24a) for a single metallic film:


2

cos <p

n cosh 2m"
2
t\

+ x 2 cos 2m'
+ x2

Taking the expansions for a very thin film show that


2

8tc

8-3

Extend the proof for the

/hV

circularity of f(<p)

used in 8.4 to cover a

general overstructure (the variable layer remaining simple

and non-

absorbing.)
8-4

Show that the amplitude

transmittance yields in

its

turn circle diagrams.

9
Exact synthesis of tuned multilayers
It is the ambition of every applied science to arrive at its results in an
economic way, i.e. with a minimum of computations. If the problem allows
of an explicit solution, the amount of work is easily kept at a reasonable level.
However, many problems are of a complex nature, so that it is impossible to
simply revert the analytical aparatus in order to be able to compute the
parameters of the system from the desired performance. As a rule a qualitativ-

ely

new approach

is

required, deserving the

name

synthesis.

The

birth of

on the
by many workers.
A classical example of a technical science with a long analytical tradition
well
established synthetic procedures is network theory. For reasons to
and
be elucidated further on, many a formal parallel may be drawn between
cascaded lumped-parameter networks or transmission lines on the one hand
and multilayer film systems on the other. It should therefore not be surprisa synthesis

is

generally preceded

by years of

analytical activities

subject

ing that most of the synthetic procedures so far tried for thin films are transplantations or borrowings depending on the author's original profession
from network theory. A broad survey of these methods is to be found in [1].
In this chapter the reader will become acquainted with the essence of
the author's borrowings from what is termed Darlingtons insertion-loss
synthesis, e.g. [2], [3]. The procedure was adapted for dielectric thin films
in 1967, [4]. Further (mostly unpublished) results achieved by the author
and his co-workers are also described here.
Before embarking on the subject some general remarks on the approach

may be

useful.

The

synthesis

we

are aiming at

is

of the so called exact type, where

all

the design parameters chosen as variables are computable by a set of

EXACT SYNTHESIS OF TUNED MULTILAYERS

365

algorithms once the performance specification is given. Except for the


matching problem, nothing is left to approximation. This is in contrast to

approximate syntheses (one of which was described in 3.3) or to the methods


differential correction, where the set of algorithms is replaced by a wellorganized trial-and-error convergence to the desired result. We might

of

term

synthesis

it

by

large-scale analysis,

[5].

form expressions to work with.


the problem to dielectric multilayers with

Clearly, exact synthesis requires closed

This will be achieved

if

we

restrict

equal optical thicknesses. Then we are confined to the variation of refractive


indices which, in the present state of the art, still seems to be the less convenient alternative to the variation of thicknesses. Nevertheless, the sacrifice
in versatility has lead to the elaboration of mathematical formalism of
The keystone of the method is conversion of the

considerable basic interest.

transfer coefficients to the

form of rational functions.

9.1 Principles of the procedure

9.1.1 Transformation of the formulae


In network theory, a

number of design procedures

for lumped-parameter systems


circuits

became

available for certain transmission-line

thanks to a transformation introduced by Richards,

films are essentially optical transmission lines, the

may

originally developed

[6].

Since thin

same transformation

be expected to open up a useful synthesis formalism for the optics of

thin films.

Let us therefore make


s

jco,

co

= cotan p

where <p is the usual notation for a phase


concerned mainly with the interval ^ <p ^

( oo, + oo)
sin

<p

= (1

in the

shift
it

(9-1)

across one layer.

We

are

corresponding to the interval

Equations (9-1) yield cos q> = js(l s )~ i ,


2 )~*;
s
and the interference matrix of a single layer is obtained

in the variable

<o.

form

Mv =

COS

^'

-S7

yjn v sin<p,

(where normal incidence

is

5mfl,

co$(p v

assumed).

M=
J

=!___(- *'"*]

*v >

'

(9-2)

OPTICS OF THIN FILMS

366

Taking now a system of k tuned layers, s t = s2 =


sk = s, and
applying the rule for continued multiplication of interference matrices of
the type (9-2), the resulting system matrix is of the form
. . .

The elements

are the following polynomials

ti

P u =s k + Ns k 2 + iVftV- 4
p 12 =
Npy- + N$s k - 3
P21Npy- + n<8s*- 3 ...
k
p 22 = s + jvay 2 + jvav-* ...

...

...

each ending in JVg,


is

JVffi

or

(9-3)

A^^j,

^k/i-iJ. according to whether k

even or odd.

The
from the

N\8 =
i

of these functions are real numbers and are formed

coefficients

refractive indices in the following

I= ,

n,

n3

5-

-J-

=2

ii

= l ni2

n2

...

n3

nk

=3

-3

i2

-2

=2 u=

.n,

"i 3

n,n
13

n*

To form N$,

...

w,n
i"k
n2

...

k-i

n.nj

ni3"5

MV =

2_

*- H

n2
14

(9-4)

W k-2k

+ -- +

k-i

J246
all

the j in the corresponding


X

JVff_L+_L +

These combinations of refractive indices


[7]

Mi,

nk

2
+ ...+=- +

ia

ii

n,

manner:

and are here denoted by the

definition see below.)

original

first

JVft*

are inverted, e.g.

"k

appeared in Pohlack's work


,b)
(For a recurrent

symbols JVkav

EXACT SYNTHESIS OF TUNED MULTILAYERS


reflection coefficient is obtained

The

'(>)

Pn +
where n

and the

from the interference matrix

J
P21

"Sit +

"0

"o

real coefficients

(a)
aN (b)x
fiN ky
N
kv +pN

= 1.
= n^

i?

with the square of the modulus, the numerator

ij s

=
=

./o.

for v even

1/n()>

for v

k
equal to (-l)

shall

odd
2(s

l)

k/2

be primarily concerned

may be multiplied by exp jd' =

k /2

(-l) k which is unimodular for the purely imaginary


then have the more homogeneous result

= jca. We

i)

/'()-

few >,*[liv

The reflectivity and transmissivity formulae


forms

(9 ' 5)

'_J

=0

f is

we

divided by the same denominator. Since

^ aj^

of the expansions are

Similarly, the transmission coefficient

(s

?
-^22

as

n g are the input and output indices of refraction, respectively,

a vj

367

(9-5),

are thus brought into the rational

Manipulation of these rational functions

(9-7).

is

a salient

feature of this kind of synthesis.

The simple character of the transformation


correspondence

between

r, t,

or

and

5, d-versus-q>

curves
7t.

is

r, f,

any

extremes,

8, d-versus-s plots.

and
The mutual

minimum in the neighbourhood of <p =

Putting

s'

Ijs

(9-1) secures

jc/2,

a one-to-one

ripples

slopes

of

the

distortion of the

maximum for <p =

one can have an undistorted view of the situation

even in these areas.

The

artificial

nor proportional

we

regard

<p

frequency s introduced by (9-1)


to, the optical

neither identical with,

as the independent variable in the optical

possible in dielectrics -s

formation.

is

The new

and

<p

However,

if

problem which

is

frequency cjX contained in

(p.

monotonic trans-

are identical except for a

functions of s are the optical analogy of the system

functions of network theory which, evaluated for s

= ja>,

yield the system

frequency characteristics. Although we shall occasionally refer to some


deeper analogies, most of the following material should be accessible to
any opticist as a sequence of more or less straightforward mathematical
operations serving a well-defined goal.

368

OPTICS OF THIN FILMS


sometimes convenient to deal with the rational functions (9-5,7)
their root factors. Denoting the common set of poles
by
an
d the zeros of (9-5) as z x z2
Pk
zk we may write

It is

pa terms of
ii

Pi

n (s-p
v

n (s-p )

v)

'

The poles and zeros are either real or they form complex conjugate
The coefficient i'(s) has a fc-fold zero at s .= - 1.
The conditions of physical realizability (to be discussed in a later

pairs.

section) require that the

without zeros on the

Re

{P*}

9.1.2

<

0.

No

constraint

strictly Hurwitz, i.e.


or in the right-hand half of the j-plane:
placed on the zeros of (9-5).

is

Energy relations

We

regard as the object of the synthesis the squared modulus of f(s)

or, equivalently, i'(s),

both being related by the statement of conservation


Q

denominator polynomial be

jco axis

typical manipulation of

with the squared moduli of

(njn

) t'

network theory

(9-5,7). Instead, the

=
is

(9-9)

not to operate directly

so called modulus functions

are defined

R(s)

f(s)

r(-s),

T(s)

= -2s. ?'() i'(-s)

coinciding with q and t on the imaginary axis

(i.e.

(9-10a, b)

in the optical interpret-

but not in the whole j-plane. The last point is irrelevant and the
advantage drawn from this procedure is that we immediately obtain the
ation),

poles and zeros of (9-10) by simply taking those of (9-5,7) and their mirror
images along the jco-axis. If zv = a v ja> v are, for example, a pair of zeros
of (9-5) then z and -z v = -<r v jco v is a quadruplet of zeros of (9- 10a).
These are displayed in the j-plane with quadrant symmetry. Of necessity,

any zeros on the


It is

which

jco-axis

must be of even

multiplicity.

evident from (9-10a, b) that the modulus functions are even in

may

s,

be stressed by writing R(s 2 ), T(s 2 ). In addition, in the physically

relevant case, s

= (jco) 2 =

-co 2 . Interpreting

<o

as the transformed optical

frequency, one speaks of frequency characteristics, which in their turn are


even functions of to. It is in this context that the complex modulus functions

EXACT SYNTHESIS OF TUNED MULTILAYERS

R(-s 2), T(s 2),

are often written as


R(co

369

the frequency characteristics then being

T(w ).

),

We now
2

T(<o ) not

come

from

problem of determining R(co 2), and


pole-and-zero plots, but from the rational functions

to the alternative

their

(9-5,7).

Denoting any of the polynomials involved by y(s)

= gvs k ~ y
=

the

its modulus on the imaginary axis is obtained by taking y(s) x


x y(-s) and evaluating at s = jco. (Obviously, we work with the modulus

square of

functions of the separate polynomials.)


I

y(s)

\l

(.gl

Thus

= g co + (g - 2g g 2 ) co 2 *- 2 +
~ 2g,g3 + 2g gt) o> 2 * + ... +
2k

+
In turn, making

(gk-i

"

2gkgk _ 2 )a)

gv = av bv

coefficients of the

(\

= I G v t 2(k ->
v=

Eq. (9-11) defines, through the g v , the

power functions
- v)

q(co)

(9-11)

2(k
- Rim 1 ) = ZFv o>2(k_v)
Z to
-'

r(<)= r(<u 2 )

n
= 4-^

"o

ZK^co

*-*

ZE vco 2ik

- y)

(9-12a, b)

where

0, 1,

E =

al

=
E2 =

ax

Ek =

2?i

k and

a2

2a a2
2a t a 3

E =b
F = Oj
F2 = b\t

2a a4

Fk =

2b<Jb 2

2b t b 3

2b b 4

b\

K =
}

(9-13)

OPTICS OF THIN FILMS

370

Due

to Eq. (9-9), the

and F

(or a v

and b v for that matter) are not


,

independent and must obey relations of the form

Fv +

4 g /

# = Fv

(9-14)

This relationship would appear to be a limitation in the matching


process for

q((d),

but actually the law of conservation enables synthesis

to be carried out in terms of transmittance.

matched
from
the
{F
v } may
v
theory
in
network
This
is
used
realization.
term
be
called
in a certain sense
and
the
configuration
predicts
both
the
to denote that part of synthesis which
has
curves
been
matching
of
parameters of network elements once the
Since the

are the

quantities are constants, the only parameters to be

The subsequent process of

finding the n v

accomplished. Since the topology of optical films

inevitably of the cascade

is

type, realization reduces to the computation of the {n v }. This requires


knowledge of both a, and b v , which in their turn are determined by the F

and

Eq. (9-14)

is

the key to finding the F once the

Fv have been determ-

ined by transmittance matching.

suppose {} and {F} are given and describe the next steps
of the realization process. Matching methods for {} will be discussed

We now

later.

9.1.3 Finding the

The

first

ay , bv

step in the realization computation consists in finding all the

physically possible functions (9-5,7), which have the quadratic moduli


solve algebraic systems of the kind
(9-12a, b) on the imaginary axis.

We

(9-13) with the left-hand sides given. This cannot

elimination, but the following

Regarding

(9-1 1) as

method

is

a polynomial in

be done by elementary

known:
*

co

2
,

its

roots are

by

definition

the negative squares of the roots belonging to y(s). Therefore solving

Gv

k-v

0,

tfv =

1,2, ...,*)

(9-15)

v=

=
by any of the orthodox methods providing for complex roots, we set sv
%
obtain
we
j
= yf= r Multiplying out (G ) C* - jj (s-s2 )...(s- k),
by comparison the required gy Some precautions must be taken when

combining the various s v quantities, since the resulting polynomials are


bound to have real coefficients. Therefore, we must always combine complex
roots so as to form conjugate pairs.

EXACT SYNTHESIS OF TUNED MULTILAYERS

371

First let us apply this process to Eq. (9- 12b) yielding {}

- {a }.
v

From the

purely algebraic point of view, there are 2 possibilities of combin-

ing the s v However, the condition "strictly Hurwitz" imposed on the


.

denom-

inator polynomials leads to only one permissible set of roots, all having

negative real parts.

The* procedure of Eq. (9-15) is repeated in Eq. (9-12a) after the Fv


computed from the Ev by (9-11). Since there is no
objection to a zero lying in the right-hand half of the .y-plane, we have more
quantities have been

possibilities.

Then

pairs.

same power

Suppose there are A^


there exist 2

kl+k2

(We

characteristics.

and k 2 complex conjugate

real roots

possible combinations of the b v yielding the


shall see later that the difference lies in

the phase behaviour.)


Alternatively, adhering to the factorized

form of the modulus functions,


from the given frequency characteristic T(co 2) and use the
energy balance for the modulus functions on the imaginary axis setting
R(-s 2 ) = f(s) r(-s) = 1 - T(-s 2). We then compute r(s) according to the

we may

start

following rule: factorize the rational function

- T(-s 2)

and divide its


two groups: those in the left half (or on the jo-axis as
regards the zeros) and their negatives (which necessarily exist). Then f(s) is
factorized from the left-hand half poles and from zeros of both halves of the
poles

and zeros

j plane

into

taking only conjugate pairs at a time.

9.1.4 Inversion of the JVk

JV>

Having obtained a compatible

jV(a)

fszA

set

bD

we

*> =

easily derive

from

^+A

(9-6)

(9 _ 16a> b)

with the same convention on a and /?. By inspection of (9-4) it follows that
the
k , must be positive. This imposes the necessary (but not sufficient)
condition of physical realizability a v b v > 0.

We are now faced with the problem of inverting the system of functions
N$, N>

to find the n v .

The

solution will be given in terms of a recursion

sequence.

For any

positive integer v

in inf, identical for j


all

>

v.

0, 1,

we

define the sequence


v with (9-4)

N$.

it

0, 1, 2,

. .

and having zero elements for

OPTICS OF THIN FILMS

372

we

Also,

define the alternating pattern

nv

^^

{u,

jT

nr

-1

/*, ft

H=\\

...inint'}

odd

for v

(9-17)

for v even

we may

Expressing algebraic addition by a column scheme

p-Wlifi-i HN?l l/v _ 3 Ai-^'ii/,-*

^N<"2 1/v -i

jr(a)

A^i/.-i

MV-2

iV^t/v-3-

v(a)

M (a)

*r(a)

v*rite

/^A^i/o

(a
_>
v
1/t

^1^0 = 1,0
r(a)

jvrta)

q q

The first row contains the scalar product of {/*} and {iV^j/v-i-j}.
appropriately chosen according to Eq. (9-17). It is easily seen from
being
fi
1
in the last nonzero term of this product is always equal
Eq. (9-4) that n
to n v , independent of the parity of

sequence
for

A^i^-x-j

any k

we

if

{JVj/\_j}

{n t

carry

out repeatedly for v

it

...}.

In an analogous

by a

starting sequence {l/i,

for

in Eq. (9-17).

n
Both

In the second

row we

find the simple

shifted by one column. This scheme defines the

1, 0,

v.

1, 0,

these schemes follow

2, 3,

the

N& could be defined

with the parity pattern reversed

...}

from the

way

N$

starting with

rules inherent in the multiplication

of the transformed matrices of Eq. (9-2) and in the formation of the poly-

nomials

(9-3).

N$. The

problem of inversion
requires an algorithm for finding the Ni 2 in given the N}. It can be shown
that any fixed set {N$} induces exact values in its predecessor set {A^yj}
which may be computed without the previous knowledge of the intervening
Let us for the

moment

consider the
a

sequence

{/z}.

The required n v

is

obtained as a by-product.

known quantities as
unknown quantities as A^/.-j-j = u3

For the purposes of this reduction write the


Ni'l-i

qt ,j

0, 1, 2, .... v

flU

0, 1, 2, ..., v;

aT

1.

We

then have
_i

"!

\m2

...

/z' v _ 3

Mq

lit

...

U v -4

-3

-2 v-l

4v-3

?v-2

?v-l ?v

9l

9%

The pattern is valid for


and / specified as + 1

(9-17)

the

/l

-2 ^'"v-l

even or odd with

for v

odd and

-1

it

interpreted according to

for v even.

EXACT SYNTHESIS OF TUNED MULTILAYERS


Taking

\i

# /o from tne nrst column and introducing


obtain after rearranging into equation form

ql

respectively,

we

( j"

= -1

qv

-i,

2 ,...

,_!

v, i

odd

for

Now we may

v is

v.

odd or

even:

...evenv

easily solve for

"o

4o

obtaining in both cases

0-lo)

+^2 +4 + ;

4o

From

+u
"o

u1

= ?o"o + "oi;
oi = o?2 - ?o2;
= ?0?3 - 0 M 3
"03 = 0?4 ~ tfo ^ etc
W K_ 2 = 0?v-2 - 1o u y-U
<lo u v-l = fttfv
ov-i = "o?v
? v-2 = 9o0v-2 - "o"v-i;

?0 M 2

Odd

q2

depending on whether

tfotfi

...

"v-2

Multiplying out by q or u ,
obtain the following system of equations ending in two

for even

different ways,

~u
Qo

<Zv-l

into the

it

we

remaining ones

where

373

the separate equations

"2

=
=

/*

(?2

"v-2

v(tfv-2

"i

M v _!

where

fi

and

known

n are

q^ =
"o

qo
9i

+
+

(?o/o) (?i

-1

=n

_1
(?v-l

"o)

Pi<li

"o)

i)

"v-3>

"v-2>

to be

q2
g3

+
+

q*+...
g5

...

odd

\l/v

even

This solves the problem of finding the predecessor set


given {N>} and simultaneously determining v

procedure for v

k,

A:

... 2,

1,

By

{JV'L'i/j}

to any

repeated use of this

the inversion

{N$}

- {n v } is

acomplished. The refractive indices are obtained from the substrate upwards.
It

remains to verify whether a similar procedure using the

ing with the

We

N$ (coexist-

N$ according to (9- 16a, b)) would result in the same set

{}.

confine ourselves to stating that the inversion along both channels

possible

and unique provided the a v b v


,

satisfy the

energy relations.

is

OPTICS OF THIN FILMS

374

9.1.5

Some remarks about

Although our
t(A),

the matching methods

final interest is

a desired spectral transmittance function

we usually start from a suitable x-versus-q> plot, which is a more universal

definition of the performance of a dielectric multilayer. In the rational

function method, presuming tuned multilayers, this plot must be a function


symmetrical about the value <p = jt/2. In accordance with the transformis further projected onto the oo < to < oo interval as
an even function T(co 2 ), suffering unsubstantial distortion with respect to
t(cp) in most of the useful range <p = rc/2 Aq>, Aq> = n/4 or more.
The matching problem consists in finding a realizable function (9- 12b)
which is a close approximation to the desired characteristic T(co 2 ). Generally,
this is a vast field of numerical mathematics.

ation (9-1) this plot

Things are simplified,

if

the typology of desired functions

to a few characteristic plots, for which matching

is

then

is

reduced

made from an

arsenal of only a few prototype functions.

A common
T(co

2
)

to be

flat

feature of

many

synthesis problems

in a certain range about co

is

and

the condition for


at a certain level.

Depending on this level we have the antireflection or the semireflection


problem, the flatness of T(co 2 ) securing spectrally neutral (achromatic)
performance.
These two problems

will

now be dealt

with by two separate approaches

in the approximation phase, illustrating all the typical manipulations of


this

kind of synthesis. Their elaboration for the optical case and computation

of tables of refractive indices are due to A. Kucirkovd [8] and K. Kuznikovd [9],
respectively.

9.2

The

antireflection

9.2.1 Butterworth and

low-pass

problem

Chebyshev approximations of the

filter

Being interested in broad-band antireflection systems, our ideal transis of a square-topped form, shown in Fig. 9-1.

mission curve

Owing to symmetry about cp = rc/2, or co = 0, it is sufficient to consider


only one half of this curve. Confining ourselves to the positive co-axis and
using the language of network theory, we are formally confronted with the

EXACT SYNTHESIS OF TUNED MULTILAYERS

375

.0

Fig. 9-1 Ideal transmittance curve for

a broad-band antireflection system.

as

p
f-*P

t-ay?

a>.

design of a low-pass

filter.

Two basic approaches

of the Butterworth and the Chebyshev


approximations

in

Fig. 9-2a,

to this design are in terms

explains

rough sketch of these


the terms maximally flat and

functions.

equiripple used in conjunction with these functions.

Referring the reader to any basic text

we immediately

on network

theory, e.g. [10],

[1 1],

write the prototype Butterworth frequency characteristic as


1

G k (o> ) =
2

(9-21)

+ dk<o 2k

where dk determines the value of Gk at the cut-off frequency to = 1. We


choose this to be 0.5 so that d k = 1. With the order of the Butterworth
polynomial B k = 1 + co 2k increasing, the approximation to the ideal curve

Fig. 9-2 Prototype curves for Butterworth (a)


filters.

and Chebyshev

(b)

low-pass


376

OPTICS OF THIN FILMS

is improved in both the pass-band and stop-band. The


transition region
becomes steeper.
With reference to the antirerlection problem the property

Gk (cu 2
is

for

<

co

as

increases

of main importance.

substitute s = jco in (9-21) (with d k = 1), we see that the


continuation in the whole complex plane of the frequency
function (9-21), i.e. the corresponding modulus function, is
If

we now

analytical

2
GJ-s
) =
V
'

(9-22)
K
}

l+(-l)V k

and the poles are given by the roots of the denominator


2v+l
j

2v +
__
Tt+jcos 2v +
1

= _ sin

2k

pv=J .e

2k~

2k-

0,1,...,

(9 " 23)

thus the poles are equally spaced on the unit circle in even multiples of
n/2k, these multiples being laid off the -t-j-axis.

An approximation
pass-band (Fig. 9-2b)

is

more uniform coverage throughout the


one using the Chebyshev polynomials of the first

that gives a

kind defined by the recursion formula

pk+1 (co)

2P k (co)

- P^^co)

(9-24)

1, P^oJe co, (see e.g. [12]). For


^ 1 these polynomials oscillate between the values +1 and 1,
for co > 1 they increase monotonically towards oc. For our purposes we can
only use polynomials of even order, having a horizontal tangent at co = 0.

the starting functions being

((o)

co

These are polynomials in

co

2
.

Defining a small ripple factor

2
,

the transmission function

Gk (co 2 ) =

l+y8
between

oscillates

able

and

value

may be

2
(e /2).

and

(1

e )

(9-25)

+ P 2k (co)]

[l

-1
as 1

2
,

which

is

physically reason-

interpreted as double the oscillation around an average

EXACT SYNTHESIS OF TUNED MULTILAYERS

377

Since the Chebyshev polynomials also obey the formula

+ P 2v (co) = 2P v2 (a>)

(9-25)

often written as

is

2
=
Gk(-'>
) =

Z
1

Putting

co

s/j,

we

L
T^TT

( 9 -26)

P?(()

obtain the corresponding modulus function as

ok (-* 2 ) =
Its

^7-77
t
l+e^Pfc/j)
J.

(9 - 27 >

poles are determined according to the formulae (see e.g. [19])

where the value

4> is

Re (p v )

Im (pv )

sinh

sin


+
2v

cosh

<P

cos

n
(9

"

28a b)
'

7i

given by
sinh(fc4>)

1/e

(9-28c)

A comparison of (9-28a, b) and (9-23) shows that the poles of the


Chebyshev approximation lie on an ellipse whose horizontal and vertical
semi-axes are sinh 2 <P and cosh 2 #, respectively. Obviously, they may be
deduced from the circularly distributed poles of the Butterworth case.
9.2.2 Frequency transformations

A problem

open

in our

approach to the approximation is the fact


(9-27) have a constant numerator, while (9-7) has a binomial
expansion there. In other words, while the modulus function (9- 10b) has k

that (9-22)

still

and

1 and k zeros at s = + 1, the absence of any variable in the


numerator of (9-22) and (9-27) may be expressed by saying that they have
a 2&-fold zero in infinity. This difference is obviated by having recourse to
zeros at s

what network theory calls frequency transformations.


Consider a complex function As), where the variable complex
frequency is s = a + jco. Assume a new complex variable p = + )r\
related to s through the functions X, W;

p =

X(s),

F(P)

(9-29a, b)

OPTICS OF THIN FILMS

378

mapping the complex plane

A
It is

upon

=A

(s)

the plane

a l<F(p)]

p and

conversely.

= A p (p)

evident that if p and s correspond by (9-29a, b) the values

are equal.

Then

The frequency transformation brings about a

A and A p
s

redistribution of the

function values in the complex plane.

Let us

now

in factorized

express the

two approximation functions

(9-22) or (9-27)

form

Gk(-s =
2

[C(s

- sO (s-s2 )...(s-

s 2k)]-

(9-30)

where the poles are given either by (9-23) or by (9-28). C is the coefficient of
the highest power in the polynomial used (in particular C may equal 1 with
the Butterworth polynomials).

The transformations

^V^'

(9 " 31a ' b)

jd7y>

= +

evidently have the property of turning infinity in s into the points s"

= j.

Moreover, they preserve quadrant


function,
so will be the transformed
modulus
a
was
symmetry, so that if (9-30)

and

infinity in s" into the points s

function obtained by inserting (9-31b) into (9-30). This already yields

a function with the proper numerator,

viz.

(1

,_ sl 2 =
C(s"

Sl Vl -

s" )(s"

s2

*" 2

T
- s" z )

V'l

(s"

...

s 2k

VI -

s" )

(9-32)

Owing

to the quadrant symmetry of the poles s t

ator

again a rational function which

is

CB\s"

s'l)

(s"

may by

-s'...

s2

s 2)L , the

written as

(s'

j^)

where B is the normalizing factor of the new rational function.


of poles is written as a v ]b v so B" may be shown to be

B" =

EC 1

*v

blf

denomin-

+ 4aXH

(9-33)
If a quadruplet

(9-34)

v=l

another fact to be respected. As a> tends to infinity, <j - or 2it so


that light is effectively incident on a bare substrate with a transmissivity

There

is

4n n g
("o

g)

EXACT SYNTHESIS OF TUNED MULTILAYERS

379

This should be the result with any modulus function eventually used for
exact synthesis.

Now

since

functions (9-22)

B" and C in (9-33) are uniquely determined by the starting


and (9-26) and by (9-3 lb), we have no possibility of making

{B"C)~ l equal to t g unless we introduce another degree of freedom. This


consists in first transforming (9-30) by

=
a'

and using the value


exists, since

Gk(<o

2
)

co

at

which

y real

(9-34a)

Gk(co 2 ) assumes the value xg

changes from

to

We then stipulate this frequency co

as

o<

00

(Such a value

and

1.)

to be transformed to infinity by the

next transformation of the type (9-31) -writing now s' for s- which will
then completely bring the modulus function to the optically reasonable
form.

Thus
s

where

s' is

= jco =

1/y

s'

(9-34b)

the value obtained from (9-3 la) if s" -the final optica] variable
is of course + j, so that (9-34b) yields

tends to 00. This

With

(9-34a), (9-30)

It is

only

now

that

l/<o

(9-35)

assumes the form

G k (-s' 2 =
)

[('

we apply

y Sl )(s'

(9-31b)

ys 2 )

...

and obtain

(s'

ys 2k

)y

(9-36)

(9-30) in the factorized

form

Gk (-s" 2) =

(*-'

>

(9 . 37)

where B" is a normalizing factor different from that of (9-34) owing to the
presence of y in the root factors of (9-36). The procedure guarantees
Gk(CO)

=
CB"

Tg

(9 " 38)

Since the preceding transformations of poles are always carried out with

a limited accuracy only, (9-38)


these values

is

will not be fulfilled exactly. Comparison of


used for checking the accuracy level.

OPTICS OF THIN FILMS

380

remains to assess the effect of these transformations on the funda-

It

mental features of the original approximation chosen. By shifting


infinity
i.e.

we

co

to

loose the possibility of independently specifying the bandwidth,

the range of

<o

in which, for example, the Chebyshev approximation of

To some-extent this may be


by the order of the approximainvolved (see (9-26)). But these are parts of

a given order exibits the equiripple property.


influenced by the
tion.

The

number of layers

ripple factor e

2
,

too, is

used,

i.e.

design specification rather than design factors and one usually puts up

with that bandwidth, as computed from the t g

The

redistribution of the poles

t(oo) condition. (See below.)

quite drastic, as seen

is

from

Fig. 9-3, to

be

explained in the next paragraph. Despite the substantially changed picture


after the transformations, the essential feature

of the design,

band region of almost constant

is

transmissivity

a broad-

is

<

1.

the transformation (9-1) induces only small distortion for

9.2.3 Antireflecting a

i.e.

retained. This
s

because

germanium substrate

The formalism so far evolved will now be applied to broad-band


germanium plates in the infrared. (It will be seen from the

antireflection of

role high refractive indices

assume throughout the exact design that the

choice of the ir-domain yields a better working field for the theory.)

Taking the
tivity

refractive index of

of the substrate

is

determine the refractive indices for


designed by the maximally
Fig. 9-3

shows the

mation (curve
ripple: e

original

1)

0.01,

loci

flat

Ge

to be typically n g

4.0, the reflec-

The goal of the synthesis will be to


the total number of layers k = 3, 4, 5, 6

0.36.

or the equiripple approximation.

of poles for k

6 for the Butterworth approxi-

Chebyshev approximations of different


0.02 and 0.05 (curves 2, 3, 4, respectively.) Both the

and

for three

and the frequency-transformed contours are

indicated. (Similar

Some of

the corresponding

graphs obtain for the other layer numbers.)

frequency characteristics are exemplified in Figures 9-4,

of the optical variable

q>.

(They were computed as

Q(q>)
2

5,

6 as functions

x((p), where
= cotan <p.)

determined from the matched function k (co ) using co


Obviously the Chebyshev approximation leads to a broader pass-band than
x(cp) is

the Butterworth matching. Nevertheless both ways will be followed.

For the equiripple approximation the pass-band is conveniently


2
i.e.
<p = Jt/2 + Aq> for which x = 1 e
2
It is evident from Fig. 9-5 that, for a given order k of the approxie

defined by the extreme values

EXACT SYNTHESIS OF TUNED MULTILAYERS

Fig. 9-3 Distribution of poles for

381

a six-layer antireflection system

before and after frequency transformation. Curve (1)

approximation; other curves


ripple factors e

90

120

Butterworth

Chebyshev approximations with

0.01 (2), 0.02 (3)

iso

and 0.05

(4).

tao

Fig. 9-4 Butterworth frequency characteristic for antireflection layers with

3, 5, 6.

OPTICS OF THIN FILMS

382

Fig. 9-5

Chebyshev frequency

characteristics for

an

antireflection four- layer

with different ripple factors.

Fig. 9-6

Chebyshev frequency
a ripple factor e

characteristics for antireflection layers v^ith

0.05

and

layer

numbers

3, 4, 6, 8,

EXACT SYNTHESIS OF TUNED MULTILAYERS

383

mation, the band-width 2A<p increases with the ripple factor


the width of the tolerance channel

i.e.

with

Enlarging this channel

1.

mean easing the strain on the multilayer system, since


an increase in the band-width. Analogously, the same holds true
2
for e fixed, and the number of layers increasing (Fig. 9-6). More comment
on these interdependences will be given in the section dealing with semidoes not necessarily

it entails

reflectors.

To
resort to

some conventional extreme value at the edges of the band. Whatever

this value, the

band-width increases with

k.

Being in possesion of the poles (and zeros, at s


mission modulus function

we may

so

one must

define band-width for the maximally flat approximation

T{

2
),

we

= 1)

of the trans-

factorize the function

find all the zeros of the reflection

case of the antireflection problem, these zeros

modulus
lie

T(

2
)

functions. In the

on, or very near, the

+ yo axis (depending on whether we deal with the Chebyshev or Butterworth


matching). There
left

and

is

no occasion to

distribute the zero

right halves of the s-plane, as

mentioned

tation of obtaining substantially different solutions.


consists here only in the

for the equiripple.

of the results

number of layers used and

We refer the reader to

is sufficiently

[8]

complex pairs

earlier,

The

in the

with the expec-

variety of results

in the tolerance channels

for the full tables.

The essence

presented by the following two designs using

four layers: The common feature of the results is that the refractive indices
form an increasing sequence of values nested between those of the incident
and emergent media. This calls to mind inhomogeneous layers which can
be approximated by homogeneous layers of stepped profiles (see Ch. 10).
Numerical analysis of the index profiles obtained with more layers
show that continuous curves interpolated through them converge to an
exponential for the Chebyshev case or to something like a sinusoidal halfwave in the Butterworth case (Fig. 9-7).
Table 9-1
Synthetized antireflection designs for germanium.

matching

"l

"2

"3

"4

AIR

1.092

1.544

2.590

3.663

Ge

Butterworth

AIR

1.253

1.686

2.380

3.200

Ge

Chebyshev, e

0.01

OPTICS OF THIN FILMS

384

We may further anticipate the following:


were varied, but

still

if the type of approximation


observing the condition of a broad pass-band, the

would still be a monotonically increasing function of"depth.


The exact design method thus essentially aims at the inhomogeneous
layer as the optimum broad-band antireflection unit.
profile

There

yet another interesting point about the numerical solutions


obtained here. Inspection of the tables shows that pairs of refractive indices
is

situated symmetrically about the central optical depth of the layer system
have a constant product: n t nk = n 2 n k - t = ... = n This pilaces the results
g
.

in the

same

class as the deltoid type solutions, arrived at

of discrete points.

We have seen in 3.3 that these

the zeros if the sequence of indices resulting

duct

made

is

to increase monotonically.

by the method

are well-behavejd inbetween

from the

rule of constant pro-

Now we know

that the equiripple

or the maximally flat designs are special cases of these well-behaved solutions.

There remains the practical aspect of how to make the films required
by theory. Since there has never been an embarras de choix in thin film
technology as regards the materials, one must have recourse to mixing of
materials or to equivalent designs.

The

latter are

used in

Chebyshev designs, the ultimate numbers of physically


Ge and MgF2 lying between 30 and 40.

[8]

for

some of the

different films of

Fig. 9-7

Continuous

through the index

by Butterworth
(b)

intej-polation

patterns!

(a)

obtained

and Chebyshev

approximations

total optical thickness

9.3

The

semireflection problem

We shall now use the rational-function method for the design of


achromatic beam-splitters. Since there was no essential difference in the
results for the Butterworth and Chebyshev approximations in the previous
we shall confine ourselves to the latter. By choosing a very small
we may after all simulate a flat curve. Moreover, a frequency transfor-

section,
ripple,

EXACT SYNTHESIS OF TUNED MULTILAYERS

385

mation performed directly on the energy function t(co 2 ) (instead of the


factorized form of the amplitude coefficient i(s)) leads to some interesting
algebra resulting in a very useful expansion for

This will

1/r.

now be

in-

troduced.

9.3.1 Pohlack's expansion

As Pohlack showed

and

in 1952,

Chebyshev matching

its

the inverse transmittance

[7],

may be

expressed in the form


1/t
i.e.

= Ak0 + Ak2 A 2 + A k4A 4 +

+ A k / 2k A 2k

A=

cos

(9-39)

<p

an even polynomial in a properly chosen variable A.


The coefficients A k / 2v) v = 0, 1, ... k were stated in terms of the

as

N$, being therefore functions of refractive indices.

quantities written as N$,

However,

their definition

was rather involved so that a general algorithm


A k / 2|) due to some matching

for obtaining the refractive indices out of the

was not given.


The expansion (9-39) had served the purpose of a limited synthesis,
based on the simple condition Ak2 = 0, leading to a class of flat semireflectors.

Our

This will be discussed in a later section


present interest

(9.3.4).

exact synthesis, exploiting

is

all

the coefficients

of the expansion (9-39). Its relation to the rational function


be found by introducing the transformation
2
co'

A2 =
1

Then

(9-39)

may be

t(co ) will

(9-40)

+o> 2

transformed into
1/t

= X Hy co 2 7(l +
v=

2
2\k
co )

(9-41)

where

Hn =

v k0

A k0 +

H2 =

Hk

Q
=A +A
Al

k0

Obviously, the set of equations

k2

(V)
(V) A

*k2

+ Ak4 +

may

easily

(9-42)
k,

. .

(V>

A k/2k

be solved in both directions.

OPTICS OF THIN FILMS

386

Comparing

and

(9-12b)

identical with the

Ek _ v

we note

(9-41),

multiplied by n /4n
g

A k2v

open for extracting the n v from the

that the

quantities are

so henceforth the

E v by

via the

way

is

using the algorithms

stated in 9.1.3, 9.1.4.

We

match the polynomial (9-39) td> any curve


Our present interest is to interpret it as a Chebyshev

are of course free to

compatible with

its

type.

polynomial of even order.

From

different use will be presented later,

wo

the general theory of Chebyshev polynomials

recall the

recursion formula (9-24) and the fact that they secure the equiripple property

only in the interval <

+1>,

1,

oscillating there

+ 1 and

between

-1.

Outside of this interval they converge to infinity, their asymptotic behaviour


nearing a hyperbolic cosine.

For reference we give some of the


2
4
n
n
a + a2 C + a4C +
aC

Pn (0 =

P 2 (Q =
P4 (0 =

P 6 (0=
P 8 (0 =
P 10 (Q =

2C

32C
128C

4
6
8

512C

10

first

even polynomials of the type

2k:

8C

+
4

48{

256C

(9-43)

1280C

18C

+ 160C - 32 + 1
+ 1120C 6 - 400 4 +

50

The corresponding geometrical patterns shown in Fig. 9-8 iire inverted


about the horizontal axis in order to better conform to our purposes.
-1
= V, the upward and downward trends for V are
In fact, writing
obviously the same as for q, only the absolute levels differ in 4hat V = Q.
-r

Pn(Q

Taking the plots of

then secures an essentially concavi curve just

as in the case of the g((p) or R(co


oscillate

between

e,

>

2
)

functions. It being prescribed that t

0, the inverse function

is

required to oscillate

between

Vmi =
While
the

mean

is

the

(t

mean

_1
fi)

Vmax = (t - e) _1
(9-44)
*
extrema, V = Tq is different from

and

value of

its

value

v=4(v + vmax/ =
*

The

difference

systems. Moreover,
It is

is

'

To

not significant unless dealing with high-reflecting

V is

not needed in the matching process.

evident from the plots in the Fig. 9-8 that the value of

at the

edge of the equiripple interval shall always have to be a Vmin while that
at the centre of the band will be identical with Vax if k is odd or with

EXACT SYNTHESIS OF TUNED MULTILAYERS

Vmin

if

even.

The

total

always being one trough

The matching

number of troughs and peaks

less

consists in a vertical shift

there

1,

and a change of the

oscillations

for the function V. In addition, there

vertical

about zero to those required

must be a change of the horizontal

A assuming the value + A w for the edges of the equiripple

band, the corresponding Chebyshev polynomial


It is easily verified

V(0 =
(Obviously, the

is 2/fc

than peaks.

scale in order to transform the

scale such that for

387

first

is

that

all this is fulfilled

by

- Vmax) P2k (0 +

y (V

-"in

exploited to

1.

setting

+ Vmax )

min

(9-45)

coefficient is negative, as anticipated in Fig. 9-8.)

X" "\

*ff)

/
-Iff)

AV

V/

-I

tl

K-2

A
VV

\r \

-%(0

k-1

*1

k-3

\
+1

1
-*(0k
f-7

-w
Graphs of some even-order
Chebyshev polynomials.

Fig. 9-8

\
\

k-k

''l

kS

OPTICS OF THIN FILMS

388

Vmin and the band-width are not indepen-

The tolerance channel Vmax

dent, being both involved in the condition of a clear substrate: for


(i.e. <p

-y 0)

Vg =

must converge to

l/r

where r g

->

the Fresnel trans-

is

mission air/substrate.

To

find the relationship

between ripple and bandwidth

from P 2k(0

to single out the absolute term

V(A)

where

= Vc +

(Vmin

A
A

+ +
4

- Vmax )f a 2

it is

expedient

in (9-45), writing

a4

A 2k \

...

a 2k

-^J

(9-46)

V = V^,,, for k odd, and V = Vmin for k even.


= V g we derive from (9-46) the following equation
c

Setting V(l)

A2k + a2 A 2k-2 + a4A 2k_4 +

...

a 2k

(9-47a)

where

_
_2
->

'

a
a

^g ~ ^c
V'man - VY min

For a given

/Vmax.

v _

~\V
x mjn

'

>

fc

Odd

feeven
K. CVCI1

C y -4/b)

Aw the band-width in wavelengths is computed as


n

= y + A<P
Y -A<p

A'

(9-48a)

where
cos(|-A<i())

= Aw

(9-48b)

All the typical features of a matching are illustrated in Fig. 9-9.

For a

and number of layers k, we may


and find the corresponding Aw by solving the
algebraic equation (9-47a). However, it is more convenient to regard A w
as given and solve (9-47b) for e, inserting properly from (9-47a) and (9-44).
specified transmittance level t

try different

We

e,

compute a

then have the simple quadratic equation

\(<*

1)6 +

r (T g

r )

d
0,

fe<^

^n

(9-49a)

where
a2
2

_,_

a4
-71-

At

_,_

a 2k

tS-

(9"49b)

EXACT SYNTHESIS OF TUNED MULTILAYERS

389

Matching a Chebyshev

Fig. 9-9

k-3 To -0.$

polynomial.

v-c

V(Aw)-Vmin

V(t)-Vf

Besides the purely computational simplification

we do not run

that

factor

and

it

into exaggerated band-widths

also has the advantage

by choosing the

from natural photometric experience. For example, with four

0.5

we have

width of the order

for the innocent value e


5.

We expect this

0.01 (1 percent) a

to impose too great a strain

ripple
layers

band-

on the

system.

more tactical to go from A w towards


we show some values for t = 0.5, A w =
=0.7 (band-width 1 3) for various k:

It is therefore

As an
1

2)

illustration

Aw

and

by (9-49a,

b).

0.5 (band-width

Table 9-2
Relation between layer

Aw =

0.5

A w = 0.7

The

ripple

number and

ripple for

two

different bandwidths.

2.5

0.02

0.001

0.00009

1.3

0.22

0.037

0.006 2

is

exceedingly small so that

we have

6.10

-6

0.001

10" 6

0.0001

practically flat trans-

mittance curves.

To show how the prototype functions (9-43) are adapted by the matwe present a table of the coefficients A k / 2o corresponding

ching process,
to the

3 half-mirrors:

OPTICS OF THIN FILMS

390

Table 9-3
Coefficients for

Chebyshev expansions of

1/r

matched for q

0.5

and

Av =

^,

A kl0

0.7

with different layer numbers.

^kO

Ak4

^k2

Ak8

^k6

1.776 52

1.947 692

0.870 49

2.009 258

0.326 65

1.777 69

1.998 526

0.097 17

0.991 58

3.247 83

3.303 91

2.002 436

0.025 20

0.411 49

2.351 40

5.484 32

A k0 is essentially equal to Zq =
1

2.418 64

0.5

_1

2.0,

4.477 07

but in fine detail

it

must

correspond to either of the values (9-44) according to the parity of k,


with

being dependent on k.

9.3.2 Tables of synthetized semireflectors

The above given procedure was

systematically applied in

[9]

to the

design of semireflectors on the levels 0.3, 0.5 and 0.65 with bandwidths

and

3 each, observing the multiplicity of solutions as regards the various

zero distributions. Non-cemented

reflectors

on

glass,

ng

1.5,

and

at

normal incidence were considered.

One complete
concerning a

set

of solutions

is

exemplified by the following table,

2 band-width three-layer half-mirror.

Table 9-4

A
Aw =
case

complete

0.5,

set

"o

"l

of synthetized solutions for a three-layer half-mirror.

1.5

1.

"2

"3

o
O

0.954

0.751

0.398
4.108

1.060

1.470

0.365

1.021

1.415

3.766

1.997

1.571

-o

o
2

o-

EXACT SYNTHESIS OF TUNED MULTILAYERS

391

The corresponding zero plots for the four cases are shown
neously. The sketch is schematical, the actual values being
zt

The

poles are in

Pi

Cases

+9.067

all

cases

and

-2.273

= 0.69743

61, z 2 3

13,

p 23

-0.751 18

simulta-

0.235 33

+ j 0.21485

Although
framework of the present theory
the outcome of a need for sign-reversal in the

3 result in refractive indices smaller than unity.

this is physically unacceptable, within the

may simply be interpreted as

it

Fresnel amplitude coefficient of a particular boundary.


discard these solutions so that even the full tables

kl+kj

We

may have

do, of course,
less cases

than

as defined earlier.

Full tables of this kind will be published here only for one representative
case, already singled out for

Table

9-3.

These are summarized in Table

9-5.

become clear in the section on extremum phase reflectors


other reflection levels and other band-widths will be covered to a limited

For reasons
(9.5),

to

Table 9-5
Refractive indices of semireflectors synthetized for g
1

/l

3).

=
k

0.5, /l w

0.7 (bandwidth

Various zero distributions considered.


0.7

0.5

1-5

serial

"3.

"l

"2

"4

1.349

3.915

3.664

1.884

"5

number

1.095

1.591

4.309

3.897

2.123

1.616

1.029

1.189

1.797

4.605

1.117

1.306

4.526

1.962

1.378

4.500

1.816

1.646

4.068

2.307

1.719

1.537

1.009

1.067

1.279

1.974

4.821

1.119

1.139

4.416

2.460

1.618

10

1.092

1.842

4.741

1.595

1.677

11

4.184

2.457

1.816

1.581

1.512

12

OPTICS OF THIN FILMS

392

extent, giving only solutions with zeros in the left half-plane.

The

structure

of the complete tables would be the same as that to be traced in 9-5: one
inevitable high-index layer
this

high index

On

is

somewhere

the other hand, having

high index

is

in the system. In the case chosen

placed in the input layer. (Tables 9-6a,


all

b).

the zeros in the right half-plane, the

located in the output layer. These are the

first lines

in each

^-section of the full table 9-5: proceeding downwards, progressively

and more
the

left,

real roots

until finally

more

and/or complex conjugate pairs were transferred to

Re(zv )

<

for all

v.

This gradually shifts the high-

index layer to the front. If there are breaks in the diagonal rule,

some non-physical solutions were discarded.


Now, from the practical view-point of the

it is

because

visible region, these results

are disappointing, because (possibly with the exception of the 0.3-level)


the maximum index exceeds the limits of technological realizability. The
maximum values could be plausible in the infra-red, where, of course, the
substrate should be

a band-width

4.6

germanium with n% = 4.0. A set of half-mirrors with


(A w = 0.85) is presented in Table 9-7.
Table 9-6a

Refractive indices of semireflectors synthetized for q


0.7 (b). Zeros in the left half-plane only.
m

0.5 (a),

A w = 0.5
*

0.3, 0.5, 0.65

Aw =

and

A =

=h

ng

1.5

serial

"l

"2

0.3

2.533

1.682

13

0.5

3.523

1.787

14

0.65

4.662

1.870

15

0.3

2.640

1.805

1.547

0.5

3.766

1.998

1.571

17

0.65

5.087

2.157

1.589

18

"4

"5

number

16

0.3

2.713

1.901

1.598

1.513

19

0.5

3.931

2.169

1.652

1.519

20

0.65

5.385

2.398

1.692

1.524

21

0.5

3.981

2.296

1.728

1.548

1.505

22

0.65

5.613

2.607

1.796

1.560

1.506

23

EXACT SYNTHESIS OF TUNED MULTILAYERS

393

Table 9-6b

Av

= 0.7

"o

ng

'.

1.5

serial

"4

"5

"l

"2

0.3

2.608

1.750

24

0.5

3.664

1.894

25

0.65

4.900

2.008

26

0.3

2.707

1.880

1.577

27

0.5

3.897

2.123

1.616

28

0.65

5.314

2.328

1.644

29

"3

number

0.3

2.806

1.989

1.644

1.535

30

0.5

4.068

2.307

1.719

1.537

31

0.65

5.684

2.603

1.779

1.545

32

0.3

2.829

2.061

1.702

1.554

1.508

33

0.5

4.184

2.457

1.816

1.581

1.512

34

0.65

5.845

2.818

1.905

1.601

1.516

35

Table 9-7
Refractive indices of half-mirrors

0.85 (bandwidth

A =
k

0.85

4.6).

on a germanium

substrate synthetized for

A^

Several zero distributions considered.


0.5

"o

l'

"g

serial

"2

"3

"4

number

1.120

1.710

7.327

36

5.227

4.584

4.199

37

4 -

1.532

7.076

4.115

4.316

38

5.460

4.763

4.323

4.094

39

1.021

1.098

1.360

2.294

8.718

40

1.194

1.076

5.613

5.588

4.311

41

5.405

4.806

4.389

4.150

4.040

42

OPTICS OF THIN FILMS

394

Independently of

the computed results could be of interest for


more versatile methods exist for the preparation

this, all

the microwave region, where

of a prescribed refractivity.
1.0

t1.0

-r-\

r~

-i

1.0

1.0

?
=a

<p

n"

-1

/fc

fc

16

19

14

17

2:1

k
*
2

k
*
Cases

=
=
=

i.

ip

18

23

Vt

-k

not comprised in our tables.

=
=
=

24

30

=
=
=

25

31

* are

k
A:

ii

:2

13

=
=

A selection of g(,g>) curves of synthetized semireflectors.


A w = 0.7

:1

*
k

-^

90

=2
k = 3
=4

180

:2
fc

n r
I

-i

0.5

180

t1.0

90
Fig. 9-10

Aw =

90

1.0

T"

90

fl

180

tp

=2
=4
=l

26
32

180

EXACT SYNTHESIS OF TUNED MULTILAYERS


It is

results
their

now

395

proper to show that "the curves are there".

was made

in Fig. 9-10. Obviously, all the reflectors

performance prediction.

refractive indices are slightly

It

makes very

little

selection of

conform with

difference if

some of the

rounded off to assume some technologically

significant values or to coalesce for simplicity with their neighbours,

be

it

a film or a substrate. Changes as large as 0.2 are quite acceptable with

when a change of reflection level is


recommended in all cases.)
become comprehensible in view of an interpreta-

the exception of the "heaviest" film,


risked.

(An

individual check

These tolerances
tion

we

shall

now

will

is

give of the results contained in Tables 9-5, 6, 7.

Inspection of these reveals that the high-index layer

embedded

is

in

monotonic sequences of refractive indices sloping down to the outer media.


Interpolating smooth curves through the index profiles, it is as though either
of the two patterns in Fig. 9-11 were followed, where the edge distance

g A e ^ A, A being the
We then essentially
(which

is

total optical thickness

of the system.

have Fresnel reflection on a discontinuity 7 W "


achromatic!), with free propagation of the electromagnetic wave

through the adjacent, roughly exponential inhomogeneous layers from, or


towards, the outer media. This

is

trivial

design strategy, but in the terms

of the exact design, we are induced to believe there


arriving at a truly wide-band beamsplitter.

homogeneous

layer established in 9.2.)

To prove our
mirror:

is no other way of
(Compare the role of the in-

1.096

proposition by a numerical example,

1.138

4.239

2.199

1.570

let

us take a 0.5

1.5

(not actually

contained in our tables) and plot the refractive indices as functions of optical
thickness in points l-j~,

Fig. 9-11

The main

odd, being the centres of layer intervals <vA 1;

features of Chebyshev-synthetized index patterns.

OPTICS OF THIN FILMS

396

(v

1)

Aj),

and

parts

1/1

1)

shown

We

where

At

is

some

reference optical thickness

subdivide each of these intervals into, say, four equal

interpolate roughly exponentially (each time using three adjacent

(v

tion are

0, 1, ... 4,

Now,

from the basic

n-values

<vA t

for one layer.

>, A x =

profile) for the centres of these

Aj/4, v

0, 1,

... 19.

new

intervals

Details of such an interpola-

in Fig. 9-12.

eventually obtain the following index pattern

1.09-1.12 1.16 1.2 1.25-6 4.75 3.65 3.05-2.55 2.25 1.97

1.03 1.06

1.77-1.68 1.61 1.59 1.57/1.5 (approximately)

Fig. 9-12 Interpolating a synthetized five-layer pattern

following two exponential profiles of the type

Regarding
reflectance in
flat

this as

a tuned 20-layer,

dependence of

q>

27tA

_1

shown

by 20 layers

in figure 9-11.

we may compute

Ai. Fig. 9-13

its

a shows a

spectral
relatively

half-mirror.

now

above mentioned tolerances for the v are


do not destroy the principal function of the
sloping section approximating smooth admittance matching of the highIt is

clear that the

acceptable as long as they

index layer to the outer media.

There is yet another point to be mentioned. The patterns of Fig. 9-11


should be regarded as limits converged to when the number of layers is

EXACT SYNTHESIS OF TUNED MULTILAYERS


increasing.
is

But for the discontinuity there

no

is

397

of layers, there

is

some scope

left

jump between ri and n" may be


an

n'

1.25

is

to Fig. 9-12

we

for constructive interference so that the

36 percent of the energy. The rest

now

level.

relatively smaller. In

adjacent to an n"

The ratio n'jn"


With finite numbers

reflection.

then solely responsible for the desired reflectance

6.0,

the

made good by

is

our numerical example

common boundary

reflecting

interference. Referring

see that a further subdivision (leading to

40 layers)

would bring us to a higher maximum value in the right-hand section, while


that in the front section would only increase negligibly. Taking this to be
n' = 1.3 and n" = 7.2 we have 48.2 percent of Fresnel reflection, only the
small difference of 1.8 percent being

on the very thin

for interference

left

films.

the

This tendency can in fact be noted in Tables 9-5, 9-6, where for a given q
high index increases with k.

maximum

In view of these interpretations it may be stated that the relative merit


of the exact design grows with small numbers of layers, when the one-

boundary concept breaks down and it is up to the general theory to say


what is good enough for the given specification.
Saying all this we must not forget, however, that we are dealing with
Chebyshev-type semireflectors, which may be only one of the ways of
achieving a broad-band maximum. An attempt was made in [9] to use
Lagrange's interpolation instead.
Setting

A2 =

z in (9-39)

and being

careful to distribute the

interpolation points in the interval <0, 1> in such a


oscillations,

0.5

one can

and k

arrive, for

13 671.2637A

10

k +

undue

example, at the following expansion for

85.1638A

22283.6299A 12

2229.0A

m
Phase diagram of a half-mirror

interpolated in figure 9-12.

928.9579A 6

- 20959.0811A 14 +

0.5

Fig. 9-13

as to shun

9:

T = 1.995 186 - 2.6848A


-

way

18

4830.8358A 8

10590.4033A 16

OPTICS OF THIN FILMS

398

The following index

patterns can be extracted here:

Table 9-8

Some

half-mirror designs of 9 layers synthetized in Lagrangian approximation.

"l

"2

0.5

"4

"5

"6

1,

*7

"8

"9

1.5

1.026

1.035

1.033

1.074

1.137

1.118

1.022

1.204

3.585

1.165

1.714

2.382

1.987

1.144

1.187

2.408

1.104

1.722

3.291

1.567

1.367

1.488

1.572

1.537

1.503

1.524

1.529

1.0

Fig. 9-14
iso

Phase diagram of a half-mirror

synthetized by Lagrange interpolation.

fm

The corresponding spectral curve and distribution of interpolating


is shown in Fig. 9-14.
The refractivity level in Tab. 9-8 is now set lower than with Chebyshev
reflectors and there are some extremely low indices. This should pose no
points

problems in the microwave region.

Moreover, we note there


to
is

some

now

reflecting

is

edge so that

responsible for the

flat

no

trace of inhomogeneous profiles leading

it is

the thin film interference proper which

curves.

The second solution

is

particularly

interesting in this respect.

9.3.3 Oblique incidence


All the semireflectors have so far been treated in normal incidence.
Matching the optical thicknesses for oblique incidence (45 from the air
side), one makes the comfortable discovery that almost no change occurs
for q* = (g + q s ), i.e. for unpolarized light. However, one and the
p
same Q*(q>) curve for different solutions of a &-cell in Table 9-5 may suffer

EXACT SYNTHESIS OF TUNED MULTILAYERS


from

of partial polarization, as exemplified in Fig. 9-15,

different degrees

concerning the

cell

399

4.

(The space-saving way of presenting symmetrical diagrams

is

used

again.)

Should the design procedure


oblique incidence then

with the

start

initial

assumption of

could be performed for one of the polariza-

it

tions only.

so

ISO iffiao

120

uoyfw

ISO

Fig. 9-15 Several solutions

from Table 9-5 (serial numbers 5-8) checked


matched 45 incidence. Observe different degrees of partial

for

polarization, although the

Let us have n

n g and

>

mean

value g

is

achromatic.

as outer parameters.

We then compute

the outer admittances


s:

Y =

n cos

0.707

Yg =

ng cos

Yg =

n g (cos

6>

1.323

P-

Y =
It is

n (cos

_1

with these values

obtaining a set

6>o)

1.41

l
0J~ =

Y Yg that we perform the


,

{Y v } of layer

The

admittances.

1.699

required synthesis,

actual refractive indices are

then extracted in either of the following ways:

Y = V 2 -

s:

P-

sin

6>

=> v

= Vyv +

n2

sin

2
O

(9-50a)

=
Vv

o sin

(9-50b)

(only the plus sign to be taken for

>

1).

OF THIN FILMS

OPTICS

400

The

last

formula

may

be converted to a concise form,

refraction of a ray with input angle

with refractive index pattern {n'v },

0'

= 20 o
o
=
v
0, 1,

if

we

consider

across a Active layer system


2..., where n'v

= Yv The
.

refraction law then gives


_,,

Y sin2@

sin 6> v

^sin0
2n o

and (9-50b) may be expressed as

nv
If

we

r-v

cos(-^-J

use these formulae with v

(9-50c)

and

=k +

g,

and n g

are automatically obtained.

Note

that for

=45 the

system {n'Y }

is

traversed at grazing incidence

in Holt is interesting

how

to see

these computations

converting a normal-incidence design to serve the

s-

may

be adapted for

or j>-component in

oblique incidence.

The normal design


be extracted from

0,

1,2, ...*

it

{} is

now

interpreted as

{Yv },

1.

Using (9-50a) for v

we must now

Ho

(n

write for

i4 sin

)'A

so that

^~The

rest is

"o

cos0 o

then computed by
liy

For

/^-polarization

(n

we have by
^o

2
n tan

)'A

(9- 50c)

"o os ~y~

n cos

and
H,

where 0'v

is

for s or p, that to

for oblique incidence will be written as

obtained from n

sin

&'
n v cos-^-

20 o = n v sin 0'y

s:

{/i v },

EXACT SYNTHESIS OF TUNED MULTILAYERS


Taking, for example, design No 17 from Table 9-6a,
to behave like a half-mirror in either of the two ways:
s:

p:

401

it is

adapted

- 2.23 - 1.862/1.804
0.707/3.727 - 1.929 - 1.48/1.402
1.41/3.894

This may further be scaled up or down, respectively, so we may again


have air at the input. This is accomplished by simply dividing all the refractive
indices by the /i of the particular design. Such a change
does not affect
the Fresnel coefficients of the individual boundaries (nor the optical
thicknesses).

We then

have
s:

1/2.755

p: 1/5.264
If a better

ng were

Fig. 9-16

1.317/1.275

2.091/1.982

s,

the normal design

would have

resulting phase diagrams are

Normal

to be obtained for

to be biassed by taking a greater n

The

1.579

2.727

hown

in Fig. 9-16.

incidence designs for

0.5 converted to serve the s-

and

/(-components at 45:
(a) 1/2.755

(b) 1/5.624

1.579 1.317/1.275,
2.727 2.091/1.982.

9.3.4 Simplified achromatism by

MO*

A =
k2

We

have just seen that the exploitation of the full expansion


(9-39)
leads to broad-band beamsplitter designs at the cost of some
non-realistic w
v

There was no way of easing the strain on a system by allowing a


greater
oscillation s or using

more

films.

A simplified approach consists in defining flat A/4 semireflectors

in the

OPTICS OF THIN FILMS

402

sense that at

postulate

is

<p

ji/2

2
not only do/dy but also d e/d>

due to Pohlack,

and

[7],

is

vanishes. This

equivalent to setting

Ak2 =
in the expansion (9-39).
is

(9-51)

vicinity

reflection curve at

The tangent of the

then zero and stationary, which leads to a

flat

q>

jc/2

top of the curve in some

of the central point.

A k2

a rather involved algebraic function of the refractive indices.


The reader may compute it by the procedures already given, but for reference
to some earlier papers we restate it in Pohlack's terms
is

^2=\{XW
Nkv (different from Aft

-i

- kN*k - 2Nk/k _ 2 Nkk )

,b)

in the present notation

-1

V(on g ) v
(9-51) may be solved by a trial-and-error sequence on an automatic
computer, where various nets of fixed and variable n u may be chosen.
where

) is

However, doing this alone would not be satisfactory, because the


reflection level of the beamsplitter is not under control. This is secured by
imposing the calibration condition

A tn =

"o
4rt

'

Fig. 9-17

(9-52)

-<-(tL

to

Nomogram connecting

the refractive

indices of a two-layer designed to satisfy


at various reflectance levels

a2 branch

<5

Ak2 =
= n,

o Y branch: 8
0.

EXACT SYNTHESIS OF TUNED MULTILAYERS


(9-51)

and

(9-52)

may now be

empirically solved

403

by reserving

at least

two

variable refractive indices.

The reader

is

referred to [13] for a detailed description of such a proce-

IS

VMS
"1.36

Fig. 9-18

Nomograms

of

2 and

the condition

semireflectors achromatized

Ak2 = 0.

by

OPTICS OF THIN FILMS

404

dure, starting with the explicit solution for a two-layer.

conveniently visualized as

There
for n t

is

and a

realistic

shown

branch

non-realistic

I,

The

results

may

be

in Fig. 9-17.

corresponding to one root of a quadratic

branch

II

given by the other root. Each of the

is divided by the intersection point with the q = 0-line into parts a t


and a 2 the a having the meaning of Sect. 3.2.3. It simply means that the
amplitude reflectivities at <p = n{2 are ^Jq and +s/q, respectively.

branches
,

%
50

25

~5

Fig. 9-19. Spectral reflectance curves for

a) 1/2.4

1.46

designs extracted

from

Fig. 9-18:

2.1

1.78/1.52, b) 1/2.25 1.46 2.4


1.46

c) 1/1.8

Solid

some

Tc/U

2.4

1.9/1.52,

1.87/1.52.

linenormal incidence, dashed linematched

at 45.

EXACT SYNTHESIS OF TUNED MULTILAYERS


By appending

405

layers in the front and/or in the rear,

nomograms were

developed from Fig. 9-17 for flat-top four-layers. These were later recomputed to a form now published here in Fig. 9-18.
The scheme of computation was such that in the sequence
1

n 2 and 4 were part- wise fixed, while n t was variable and n 3 was implicitly
determined by the calibration condition. Being of the same parity, this
fixed (see Ytf[ in 3.2.3). By numerical
meant keeping the product

n^

interpolation the zero point of the function


for a net of values n 2

Some

,n 4 the fellow n 3
,

A k2 (i)

was repeatedly found

being also printed as a

spectral reflectance curves for these designs are

result.

shown in Fig. 9- 1 9.

9.4 Other cases of matching

9.4.1

The

It is

sloping edge in Lagrangian approximation

a tempting design problem to produce something in contrast to


filters. We have already approached

the steep edges of low- and high-pass

an earlier chapter (3.4.6) and arrived at a solution in terms of a highly


detuned alternating stack for the cut-on and cut-off cases, respectively.

this in

was called the sloping edge.


We shall now look at the problem in terms of tuned multilayers.
If a solution can be synthetized, then owing to symmetry about <p = 90
one design will display the up- and down-edges simultaneously.

The opposite of the

Fig. 9-20

steep edge

Lagrangian interpolation of

a slope.

OPTICS OF THIN FILMS

406

by the

Setting the goal of the synthesis


inverse of x

is

solid curve in Fig. 9-21, the

given by Fig. 9-20, the hyperbolic

the linear parts of

bows being produced by

In the bottom of the latter figure a set of g points is


indicated which have served for a smooth Lagrangian interpolation of t _1
in

t.

[9].

The corresponding expansion

T = 6.66996 - 9.78701A
+

11286.1321A 8

26337.3021A 10

15730.4663A

is

289.13955A 4

2731.91568A 6

37541 .0148A 12

+
16

3256.08924A

32517.2871A

14

18

From the solutions extracted the following one is of interest (Fig.

9-21).

The corresponding g(<p) is drawn by a dashed line in the right-hand half


of the figure. The left part was reserved for a study of oblique incidence:
the dashed line here represents g*> while q p and g a are shown in dotted
lines.

w
]

f
_.

0.75

..

\
\

*/
OS
y*

\?

.*"

$-<*

9 -o

\
\

0.25

/
Q

60

90

Fig. 9-21 Synthetized sloping edge in

1/4.941

ISO

wo

normal and 45 incidence. Design:

1.262 1.719 1.609 1.450 1.595

1.581

1.52

1.517/1.5.

9.4.2

The pole-and-zero

We

plot

were able to see in every version of the synthesis procedure so far

described that

it is

and zeros in the j-plane the


which is responsible for the spectral characteris-

the distribution of the poles

so called pole-and-zero plot

EXACT SYNTHESIS OF TUNED MULTILAYERS


tics.

In a way,

we could

407

skip the matching of curves in the approximation

phase and manipulate the roots directly -if we had any insight into the
behaviour of the modulus function on the jco-axis. However, this is difficult
to obtain, because one has to geometrically interpret many factors of the
2
type, where q is a pole or a zero and s = jo, co variable.
q
In particular, in the antireflection problem, one would obviously tend
to place the zeros of r(s) on the imaginary axis, but there it no further
guidance as to the distribution of the poles. Working off-hand we could
|

run into such non-physical situations where q + x > 1 or even t > 1.


The distribution may be kept under direct control when the number
of layers is small, but the amount of work soon becomes larger than starting
easily

an ordinary matching process, which automatically keeps the pole-and-zero


plot within physical limits.

maximum

A
a

sum of

is

about the

method of organized manipulations within the pole2


2
or T(s)
based on the fact that the logarithm of R(s)

is

all

This

the type

E
taking

reflection-reducing two-layer

sophisticated

and-zero plot
is

to be tried this way, [14].

In (s

z v)

- Z In (s - p v)

the roots of the corresponding modulus function.

may be

in the j-plane

interpreted as a superposition of electrostatic potentials

due to a distribution of

infinitely

long orthogonally placed

wires with proper electrostatic charge per unit length. 2k positively charged
wires are

made

to intersect the j-plane at the zeros, 2k negatively charged

wires are placed at the poles.

This potential analogy, due to Darlington,

is

occasionally put into

practice in network theory, the problem being additionally converted to


that of a conductive plane to which point sources of current are applied.
The modelled frequency characteristic due to the given distribution of
poles and zeros is an exponential function of the measured potential distri-

bution.

The accuracy of this device

is

limited, but even the purely theoretical

treatment of the electrostatic problem gave

rise to

specific chapters in

network synthesis. The design of an antireflection system in terms of this


analogy is described in [15], however with no surprising results in the schemes
of refractive indices.

OPTICS OF THIN FILMS

408

9.5 Phase-change-upon-reflection in terms of the zero


distribution

Let us take a pair of zeros in the

z*) evaluated
i + <*2 (Fig. 9-22)
{s

= jco

half-plane.

left

The product

(s

a.\

z') (s

<x'

Similarly, taking a real root in

In particular, for

f(s).

p =

0, P'

z)

yields a

z' = -z*, z'*


an argument

Transferring this pair to the right half-plane as


the corresponding product (s

Further,

complex term with the argument


both angles being dependent on co.
at s

co

2n

z'*) yields

&!

tx

= -z,

both positions, we have

-p

P'

a2

= at

so a x

a2

0, ai

a'2

In.

n.

These simple facts imply important rules for the phase behaviour of
Let us recall its factorized form (9-8a) where b ja obviously is the

Fresnel coefficient of the clear substrate r

j(J

s-/o

s=j<o

z'*

cC,t4e

Ujl-oCi

33?

SX
cj

0J

-7

Fig. 9-22 Mirroring

T
of root-pairs in the complex plane.

EXACT SYNTHESIS OF TUNED MULTILAYERS

409

extremum-phase

Consider
because

all its

3Y

r(s)(m^d

arq

Fig. 9-23 Tendencies leading to


reflectors.

first

w =

0.

The denominator then

roots he in the

left

yields zero argument,

The complex

half of the j-plane.

of the numerator contribute either by

or by

2ji,

pairs

which may be disregarded

modulo 2%. There only


an odd (even) number of

for the evaluation of 5, this being important only

remain the contributions of the

real roots: for

these in the right half-plane, the contribution of the factorized term in


(9-8a) will be
itself,

7t

(zero), again

determines r(0):

Now, having

in

it is

(mod

2tc).

This, together with the sign of r

a real number with a positive or negative

mind the scheme of

Fig. 9-22

function 8(co) must be antisymmetrical about

co

we can

sign.

infer that the

can pass through

0. It

but as will
shown this sign cannot be determined from the configurazeros. What we can do, however, is to make estimates to as the

the values 5

or 8

2k with a positive or a negative

slope,

be subsequently
tion of the

amount of this

slope.

Let us start with an f (s) having Rcfo)


will

>

for all

v.

The function

behave in either of the typical ways shown in Fig. 9-23

8((o)

(solid lines.)

and denoting
remain unchanged, but 5' will be

Shifting a pair of conjugate roots to the right half-plane

the

new

different.

function by

For each

f'(s), \r'Qco)\

will

a>

5'

al

<x

This means that the slope of the function

2
<5(co)

will

be turned in a clock-

wise direction, decreasing for a positive slope and increasing for a negative
slope (dahed lines.)

similar transfer of a real root will bring about the

change (although ( /?)

may be

a smaller change than

same

(oc l

qualitative
<x

2 ),

depen-

OPTICS OF THIN FILMS

410

ding on the configuration). In addition, there will be a change by n in the


vertical scale, this

not affecting the assesment of the slopes.

In view of this

we may say

that of all the designs corresponding to a

given modulus function, that with

maximum

have a

Note: This

The analogy

will

the zeros in the

minimum

be established

we

if

left

half-plane will

negative slope.

the analogy of what network theory terms

is

minimum phase

reflectors.

recall the following: in electrical circuits

Taking the phase angles

positive co-axis has a physical meaning.

>

all

positive slope or a

algebraically,

only the
<5(ci>)

>

>

and the starting design with Re (zv ) < then represents a maximumphase reflector. At the time when Bode (1944) introduced this concept into network theory,
it was current usage to define transfer coefficients by ratios of the input/output type. We
_1
e~J*, which changes the sign of the above inequality and
would then have to take r
one is induced to speak of minimum phase. Anyhow, we refrain from introducing these
<5'(co)

for

all to

concepts into optics, because they

on the whole of

fail

to describe the situation properly once

9.6 Rational function for tan

The

we operate

the co-axis.

qualitative conclusions

explicit analysis

<5

about

<5(<w)

can be supplemented by a more

of the phase angle.

Noting that
e
j

and

2ja

tan
2J

1
1

setting

^(s)=

^- = -^-,

we can

(9-54)

write
.

tan o

j/(s)-1

j/(s)

which

= jo)

(S

f(-s)

r*(s)

is

the rational function for tan

Inserting

from

tan d

(9-5)

is

f(-s)
f(-s)

5.

we obtain

+
Cq

Obviously, tan S

f(s) =
r{s) +

+ +

d3 s
-f-

C2S

...d 2k _

2k "

...

^-^

= jo
.

^2^5

a real antisymetrical function of to.

(9-55)

EXACT SYNTHESIS OF TUNED MULTILAYERS


The

coefficients

of the numerator

may be

411

written in the

form

v+l

d
"v

~2Wg
o

2-,

ia)
(vN
V J *k/k + 2j-v-l
I

W (b)

-^k/k-lj +

(b)
(a)
-
)V
JV
""^k/k
+ aj-v-l^k/k-Zj
+

j=i \

1
I

j
(9-56a)

where

y=

/n

k even

\lln g

fcodd

(9 ' 56b)

In particular

di=
The

coefficients

^r (vN"

N ^- 7
1

of the denominator are

"-)

much more involved:

<

9 - 57>

there are

altogether four different patterns repeating every fourth coefficient.

We

from writing these out in full, because exact synthesis of tan 8 by


the formula (9-55) is hardly feasible. Apart from exercising much more

refrain

caution in distributing the poles of (9-55) without violating the realizability

of

r(s), there is

If the goal

no control over the eventual


of the synthesis

is

q((d) function.

achromatism, one

may remain

satisfied

with the results of the converse situation where exact synthesis of

was

in

some

We

cases accompanied

shall

make

by a

flat 8(<o)

limited use of the formulae developed here for estima-

ting the slope of 8(co) at the central point co


It is easily

q(<o)

curve.

0.

seen that

/d(tan<5)\

rf,

dc

c
*-o

(9-58)

The

simpliest of the c v

may be written as

Co

Since a k

is

/=,"
o

= a[Nk6k>] 2 - PlNftf =

always positive, the sign of c

in turn coincides with the sign of f (0)

Hence a
tan

b,

positive (negative)

dt

identical with that of b k ,

= bjak

(9-59)

which

implies a positive (negative) slope of

or vice versa, according as f (0)

It is

is

ak bt

0.

to be noted that the computation of (9-58) cannot be circumvented

by simply observing the distribution of zeros, as described in the earlier


is known, however, the change of slope with the shifting
of zeros is qualitatively predictable.
section. After (9-58)

OPTICS OF THIN FILMS

412

Note:

Analogously to the simplified achromatism of q(o>) by A k2


one may contemplate simplified achromatism of S((o) by dt

(see 9.3.4),

again observing the calibration condition of a given

A k2 =

0.

An

attempt at

this in

terms of the variable

A k0
A =

and possibly
cos

<p is

=
= 0,
also

described

in the paper [16], dating before the elaboration of the rational function

method. Additional checks of the solutions obtained there show that all
the zeros lie in the left half-plane so that they essentially belong to the class
of functions recommended here for a flat 8(a>).

9.7

Some

physical analogies between thin films and electrical

networks

So

far

we have only

exploited the formal consequences of Richards'

transformation (9-1) and used the ensuing rational function approach for
the design of tuned multilayers. In this section
the physical analogies behind the
First,

common

we

shall inquire

deeper into

mathematical formalism.

some quadripole analogies based on the matching of transfer


The concept of insertion loss will then be

matrices will be established.

introduced as a suitable basis for electrical experiments simulating the

behaviour of an optical multilayer between the outer media.

9.7.1

The transmission

An

analogy

known

line

analogy

for a long time, [17], consists in the parallel that

can be drawn between the vectors E and

of an electromagnetic wave

propagating in a homogeneous dielectric and the instantaneous values of


voltage and current at any point in an infinitely long non-dissipative parallel-

wire transmission

line.

The corresponding

quantities

admittances of the media being


is

the series inductance and

The analogy

C the

obey wave equations, the characteristic


/

and

~j-> respectively, where

shunt capacitance per unit length.

to a dielectric multilayer

is

then a cascade of uniform

transmission line sections. Voltages and currents are transformed from one

junction to the next by a transfer matrix which

is

identical in

form with the

EXACT SYNTHESIS OF TUNED MULTILAYERS

413

interference matrix established for thin films, if the characteristic admitt-

ances are interpreted as refractive indices and wire lengths as optical thicknesses.

The input admittance of such a multisection line is computed by


a recursion formula underlying the use of the Smith Chart. (This has actually
served as a pattern for elaborating an analogous procedure for thin films,
see 2.7.)

The

may be

multisection cascade

regarded as such a model of the

where both the wavelengths and the dimensions of the


media are scaled up to larger dimensions, but the relative behaviour of the
corresponding field intensities remains the same. By measuring the insertion
optical stratification,

loss

of such a network (see below) even the energy transfer coefficients

may

be simulated.

Now, we could
changing the input

follow the spectral behaviour of these quantities by

frequency in appropriate

electrical

However,

limits.

it would not be possible to simulate the effect of oblique incidence of the


light unless rebuilding the sections both in their specific values for L, C and

in their lengths. Refraining from this latter claim, the transmission line

analogy

may

be regarded as a

quency-true response.

Its

model, distinguished by a

fairly close

practical importance

is

limited

fre-

owing to the

large dimensions required for the line sections to simulate optical thin
films at reasonably

We

low analog

electrical frequencies.

refer the reader to [18] for full

mathematical details on

this

kind

of analogy.

9.7.2

The "monochromatic"

A
at the

compact
problem

electrical

in terms

LC -network

analogy

analog of a thin film will be obtained

of lumped parameter

if

we look

circuits.

Let us seek the chain matrix of an elementry T-network (Fig. 9-24)


with the aim of attributing to

its

that the resulting chain matrix

basic elements such impedances

may

matrix.

Z6
.

r
L

2i-

1-

v,
Fig. 9-24

An

Za Zb Z
,

formally be regarded as an interference

elementary T-network.

414

OPTICS OF THIN FILMS


to start with the open-circuit impedance matrix z
ik

It is easiest

elements are (see


Z ll

A\

e.g. [19], p.

23 and 71)

Z2 2

Z*,

= Zb + Z

Z 12

The elements of the corresponding chain matrix

'

Z 21

whose

= Zc

z 21

are then

Zc

Zu

According to the reciprocity theorem of network theory

it

must hold

that

AD - BC =

(9-60)

Formally the same


tation

is true for the interference matrix, but the interprethe law of energy conservation rather than reciprocity in the sense

is

understood in

circuit theory.

In (9-50) the

first prerequisite is thus fulfilled for our intentions.


Further, the main diagonal terms must be equal, which implies

Za = Z b

A = D = 1+

so that

A,
A

B =

A. + 2 Z
Z

Matching now

C=
we may

infer that

convenient units

we

-=

= jn sin q>

should be a pure capacitance. In order to obtain it in


on this occasion switch over from the Gaussian

shall

to the SI system, writing the refractive index as

376.5 (ohm)

is

nY =

Zq

where

Z =

the wave-impedance of vacuum.

We then have
Z (ohm) ^
zc _
jnsin<p

If co

is

jeuC

the circular frequency fed to the analog network, the capacitance

must have a value

C-

nsinm

-7^-

( farad )

<9

" 61

EXACT SYNTHESIS OF TUNED MULTILAYERS

415

Za is conveniently determined from the m'y term as the pure inductance


tan(y<p)

Z a = Z c (cos

<j

1)

= jZ

'-

= jcoL

so that

JW

otan^lyj

L
Owing

<w>

(henry)

to the validity of (9-60), the fi-term automatically assumes the

required form

sin

<p.

The equivalent T-network

is

now

complete, consisting of two identical

inductances in series laddered by a capacitance (Fig. 9-25a)'.


As a dual network we could derive a II-configuration according to

computed by the formulae (9-61) and (9-62),


of L and C and write Z / instead of njZ and vice

Fig. 9-25b. Its parameters are


if we

exchange the roles

versa.

Pohlack,
purposes.

used a cascade of the T-networks for demonstration

[20],

One may

also alternate

T and

n networks, obtaining then a more

regular distribution of L-and C-elements across the cascade.


It is

an obvious drawback of

the analogy

C fixed,
and the
In

is

there

not frequency-true,
is

no

this

lumped-parameter approach that

i.e.

with the material parameters L,

linear relationship

between the

optical frequency implicit in the phase angle


fact, there is

electrical

= 5- tan -?nL

and

to

T
i

co

cp.

relationship whatsoever, because co

no meaningful

would simultaneously have to change according to the two


co

frequency

T
'

-=-=- sin

Z C

relations

q>

'-

Fig. 9-25 (a) T-network equivalent to an interference


film, (b) II-network equivalent to
film.

an interference

(9-63a, b)

OPTICS OF THIN FILMS

41 6

These functions

may

common

only have one

by the

point, given

condition

^ = ^k <l

cos

but there

(9 - 64)

no other degree of freedom to keep the functions equal at least


about <p e
Given n and cp e for which the analogy is desired, one computes by
(9-64) the compatible ratio CjL and then by (9-61) and (9-62) the requisite
is

in a small region

frequency
co

Obviously,

co is

-L
yjLC V

(9-65)

inversely proportional to the

Changing the optical variable

and

- %2
2n L

/l

C in order to satisfy (9-64).

It is

cp

impedance
one has to first

level chosen.

reset the values

only then that the corresponding

new

co

can be determined.

An

analog device where both the input variable and the design parais, of course, very unsatisfactory. We

meters must be kept under control

avoid at least one of these disadvantages,


are changed with

way

if co is

kept constant and

according to the formulae (9-61), (9-62).


that the analog cascade is contemplated in [21].

9.7.3

cp

L and C

It is in this

The "vanishing film" analogy

An

interesting modification of the Z,C-network analogy arises if

of the preceding section

is set

a layer of zero optical thickness, but the adantage drawn from this
the two functions (9-63a, b) have a

<p[

-j

for, say,

<

cp

<

cp e

equal to zero. This amounts to simulating

common

nf 10.

We

approximation

co(cp)

is

that

co(0)

can therefore expect a frequency-

true analogy for very thin ("vanishing") films.

Having

<p e

0, (9-64)

implies

Zo^

which makes the two derivatives of (9-63a, b)


co

^cp=-^
r
Z C
2nL

<p

(9-66)

at

cp

= L=cp
J2LC

equal and

we have
(9-67)

EXACT SYNTHESIS OF TUNED MULTILAYERS


or writing

=2nf,

a>

<p

2rcA<7

= -4^=
V2LC

The working range of


condition 2itAmax

<r

max

417

(9-68)

network

this frequency-true

is

given by the

O.lrc, i.e.

"min

(9-69)

20

which reads as follows:


then (9-69)
is

valid for all X

A min

if

maximum

the

is

>

the lowest wavelength to be simulated,

is

optical thickness to be accepted

A < Amax

A min and

and

(9-68)

We shall now slightly reshuffle some of the formulas stated above so


we may conveniently fix the network parameters in view of a desired analog
operation.

Expressing

L in millihenrys and C in
C =
*-

4000
376.5

microfarads,

0.0299n

we replace

[ohm

(9-66)

by

-2
(9-70)

We now use this formula to eliminate C in the expression


JlLC =
10

4.473 x 10" 5

Vl<mH)

C(/xF)

7.72 x 10" 6

nL

[sec]

(9-71)

Suppose we want to analyse an optical filter in the region between


-1
4
10 cm
and 3300 A = 3.03 x 10 4 cm -1 Then Amax = 3300:20 =
-8
165.10
cm and the product Amax a lies between Ama][ <rmin = 165.10 -4

and

A=

A,,,,

499.10- 4

The minimum electrical working frequency, corresponding to 10 4 cm" l


optical, follows from (9-70) and (9-71) as
min

165
7.7

10

"4

x 10 -*nL~

2133

nL

This formula serves to set the proper level of


venient fmin

with respect to a con-

With fm i in the order of 50 Hz and 1 < n < 3, L lies between 13


and 40 milihenrys. C by (9-71) is of the order of microfarads.
The other end of the optical spectrum will be obtained as the response
at

about 150 Hz.


All these are realistic values.

Now, as an isolated fact,


because there

is little

all this

would hardly be of practical importance


However, taking m

interference in very thin films.

OPTICS OF THIN FILMS

418

identical networks, each simulating a layer of optical thickness

same

A/w of

the

one can have an equally good approximation for a

refractive index n,

relatively thick layer (Fig. 9-26).

In fact, carrying out this idea in the limit for m -> oo one is led to the
lumped-parameter model of a transmission line, where the L stand for the
distributed series impedances and C for the shunt capacitances.
Since the simulated optical index n
progressively be scaled

down

as

is

given by the ratio C\L, these

Lm = L\m, Cm = C\m

condition of constant immitance d istrib ution per unit length.


In this refinement process y/2LC decreases as \\m, but so does

which

to be used for

is

in the formula (9-68).

The

may

so as to satisfy the

A/m

relation between the

two analog frequencies remains unchanged.


The real point, of course, is not to fall back on the transmission line,
but to stop the limiting process at a reasonably low finite number of elementary Z,C-quadripoles designed to obey the

first

approximations

(9-67).

Fig. 9-26

9.7.4

improvement in the lumped-parameter analogy

further

obtained

if

of "vanishing film" networks.

rationalized-thin-film analogy

The

A cascade

the optical interference matrix

is

considered in

its

will

be

rationalized

form and if we adopt cotan <p as the optical variable.


Taking one film, it must be remembered that its interference matrix
- s 2 )~'A factored out in
is not strictly rational, owing to the term j (1
(9-2). This deficiency may easily be disposed of by taking two layers n jri
obtained
by
effectively
- n'jn as the formal minimum, one layer being
setting n"

n g The corresponding interference matrix


.

/AB\

'

\n'

is

n"J

then

EXACT SYNTHESIS OF TUNED MULTILAYERS

its

419

A network with this chain matrix may be realized by


impedance matrix as
A

z 12

>

z 21

and then -following a procedure due

z 22

-q>

first

computing

D
-jp~

to Cauer, [22], -expanding these

rational functions in partial fractions.

In our two-layer case

t
z ij( s )

= 7~r
(n' +

we have

very simply

~>

"
n")s
\

a
2

-l,

2
s

-i\

n
+-

>
I

COT s + [kin I

(9-72)

r>

where

^^ ~ VT^l^n^

[k{j >>]

n'+n"\l,l)'

are the matrices of the corresponding residua, the notation bringing forth
the fact that one pole is at the origin, the other at infinity.

Without going into the

details

that the general condition imposed

of

realizability conditions

we only note

n k 22 -

2
k 2 ^
with equality: both types of poles are of the so called compact
type. This brings about a certain simplification in the further
process of
is

here

on the

residua, viz. k

fulfilled

realization.

can be shown that the partial matrices on the right-hand side


of
be realized by networks of the type shown in Fig. 9-27, where
f(s) = s or lis and the corresponding elements are
accordingly interpreted
as pure inductances or capacitances, ([22], Fig. 10-25.)
It

(9-72)

may

1:0

o-C
ra

Fig. 9-27

A loss-less quadripole for the

realization of a

f(*)

:f5 ff)
f(s)

component matrix

in Cauer's expansion for

[z].

tronsformtr

OPTICS OF THIN FILMS

420

Generally, there

a freedom of choice for the real factors

is

r, r b , r c ,

depending on the transformer ratio a and the values of the residua.


is a compact one, then there is only one choice possible:

If the

pole

b (v)

ra

= rb =
The

rc

0,

kft,

fl

ifM
j=J^_ = i%L

horizontal branches then vanish

and we have

the

its

an L-

transformer.

remains to connect these two partial quadripoles so as to realize

sum of

series

or oo

essentially

or a C-element connected in-parallel with the primary of


It

their

and the

The connection must be in


scheme together with the element values is shown

impedance matrices

resulting

(9-72).

in Fig. 9-28.

The response of this loss-less network to electrical frequency co is


same function as that of the simulated two-layer in terms of the transformed variable cotan q>. The particulars of a suitable connection for
the

measuring

this response, as well as that

of the formerly presented analogies,

will be discussed in the following section.

Obviously, the last of the analogies


the variable

cotan

is

frequency-true in the sense of

with no limitation on the optical thickness. The

<p,

layer system must, of course, be tuned.

There

is

one minor problem to be solved. Going strictly by

- cotan q>

interpreting co directly as the electrical circular frequency, one

and
work with extremely low frequencies to cover the
<p x 50 or so, which can reliably be studied
mation used.
|

To

obviate this, a rescaling

may

optical interval

would
90

in the optical transfor-

be undertaken, keeping the products

coL and coC constant. Taking, for example, n'

2.35

and n"

1.38

one

can compute

C=

16.87 x 10

nF,

L =

100.9 x 10

mH

(9-73)

Fig. 9-28

A lumped-parameter network

equivalent to the rationalized two-laye r


interference matrix.

EXACT SYNTHESIS OF TUNED MULTILAYERS

421

enough scope to scale up co by a factor 10 3 and to reduce


the parameters (9-73) by the same factor to convenient values. The electrical
There

variable

is

is

just

10 3

then

More

cotan

q>.

may be visualized as a cascade of two-layers for which


networks may be designed step by step. This has the advan-

layers

the equivalent

tage that the separate pairs are individually accessible in the analog

system.

one may

Alternatively,

of a system.

Its

start

from the complete interference matrix

expansion in partial fractions with complex-conjugate roots

leads to a longer connection in-series of networks like Fig. 9-27, where

again ra

rb

0,

but the vertical terms

may

be in-parallel connections

of L- and C-elements.

the analogy to optical transmission

9.7.5 Insertion loss

Up

to

now we have

dielectric interference films

indication of

how

established several possible analogies between

and C-networks as such, but there was no

to measure the physical behaviour of the latter in accor-

dance with the phenomena simulated.

We

shall take

a hint from optics, modifying

first

the usual definition

The input value may be regarded as a


when the layer system is removed
and n g is replaced by n
We then insert the system and let the output
medium assume its correct refractive index n g The transfer coefficient is
the ratio of these two output values.
of

and

t as output/input values.

special case of the output value, obtained


.

An

analogous situation in network theory

A voltage generator V
port

1
'

with internal resistance

Fig. 9-29

is

depicted by Fig. 9-29.

connected to the input


of a quadripole whose output terminals 2 2' are connected

over a load resistance R,

loss of

Scheme

for measuring insertion

a lossless quadripole terminated

in a resistance at both ends.

t is

OPTICS OF THIN FILMS

422

One of

the transfer functions studied

V 2 /V

the ratio

is

It

may be

expressed by means of the chain matrix elements in the following way:


writing by definition

= AV 2 +

V!

BI2
(9-74)

= CV 2 + DI 2

Ii

the input impedance Z, of the one-port system 1 1 inside the


dashed rectangle, simultaneously making use of the fact that at the quadripole output 2 - 2' it holds V 2 /I 2 = R 2

we form

'

We then have
Z.

Yl.

'

Knowing

Zj

we may
Ji

Solving

now

(9-74) for

V2
V
T(.s),
is

by Kirchhoff 's laws

write

V
=
Rt +

reciprocity relation (9-60),

which

Ij

= AR 2 + B
CR 2 + D

Z
V = Vo
R +
'

Zj

V2

we

and making use of

finally

it is

"

75a > b>

Zj

(9-75a, b)

and of the

have

R2
RiR 2 C + R

(9-76)

D + R2 A + B

a function of s trough the A, B, C, D.

is

when

(9

usually denoted

It is

referred to as the transfer function. Evaluated for s

by

= jtu it

the transfer characteristic.

Now,
where

V 20

the insertion voltage loss of network theory


is

the voltage measured at the load

R2

is

defined as

V 2 /V20

with the quadripole

removed.
Writing

this ratio as H(s),

H(s)

To

it

obviously holds that

= ^/X<L = R + R 2
V 2 o/V
R2
i

T( S ),

simulate the optical input situation,

2T(s). Inserting (9-76) for T(.s)

we

set

= ja>

R2 = R

and interpreting the

and H(y)

resistances as the

inverse refraction indices (omitting the proportionality factor

),

we

find

that

V2

A + -^-D +

nB

(9-77)

EXACT SYNTHESIS OF TUNED MULTILAYERS


This

is

essentially the formula for

423

the complex transmission coefficient

t,

of thin film theory: Thus, by measuring the insertion voltage loss of a network

whose chain matrix

is

one way or other equivalent to the interference

matrix of a layer system, we measure the f-factor of that system at some


equivalent variable.
Since

R 2 is a pure resistance, the insertion power loss is given by the ratio


?2

P 2 o maJ
where

= V

2
|

|V2|2/Rz

|V

/4R t

R2

/4Ri

= P 20max

+ R 2 )~ 2

= *** TG)
the

is

H(jo)

(9-78)

value of the power

maximum

R 2 (Ri
connected to the voltage generator. This

R2 = R

directly

^
R

generally taken

by the load

resistance

maximum

P 20 =
when

R2

assumed for

is

optical relation t

The formula (9-78) is the analogy of the

now

It is

= njn

\i\

2
.

expedient to introduce a formal reflection factor

= z j(j ) ~ R = i ~ Y i(*>
Z,(j) + Ri
Gi + Y,(*)
reflectance on a junction 1-1'
i

as if computing

Gl

= R -i

(9-79)

between two transmission

lines.

Let

Zi(j<o)

Then

the total

+ jXi(co)

Ri(co)

power dissipated by the one-port network

Pt =

R,(a))| I t

Vo

R,(c)

Rj

Since the quadripole itself

is

is loss-less,

Zi(jo))

must be

this

identical with the

computed Joule heat on R 2 i.e. with P 2


Computing P 2 /P 2 oma% is therefore the same as

directly

IRl

PlOmax
This

may

4R 1 R

Pi

be found to equal

+Z
|

(to)
i

(jC0)|

TQco)

2
|

so that

we

arrive at the

relationship
|r(jco)|

which

is

+^-|H(jco)| 2 =

K2

the analogy of the energy balance g

(9-80)

for dielectric layers.

OPTICS OF THIN FILMS

424

9.7.6 Darlington's insertion-loss synthesis. Notes on the

conditions of readability

The

reflection coefficient T(s) just introduced

cannot be measured
hand we can measure the
optical q and t independently.) Its introduction to network theory by Darlington [23] was a formal step playing an important role in synthetizing an
2
Z-C-network with prescribed insertion-loss characteristic
H(jco)
on
a load resistance R 2 (We proceeded analogously by starting optical
directly as

an

(On

electrical quantity.

the other

synthesis with a given t(co) or T(a> 2 ).)

The first

step

is

to determine

r(jco

2
)

(or R(co

for that matter)

from

the corresponding energy balance (9-80) or (9-14), and to find from these

modulus functions the rational functions T(s) or

r(s).

were adequately described in the preceding sections

These procedures

9.1.2, 9.1.3.

However, we owe the reader an explanation of why the denominator


strictly Hurwitz. The reasons are essentially those of a meaningful energy balance and of damped oscillations in transients, if any. In
network theory these general requirements are expressed as the so called

of f (s) had to be

conditions of realizability.

They have a very concise form


as

if

one speaks of input immitances, such

Z (s) or Y (s) in our case, or, in other words, of the driving-point functions
{

of one-port networks.

The necessary and

sufficient condition for

physically realizable by a

network

is

that

it

be

such a function to be

positive-real.

This concept, introduced by Brune (1931), covers a class of functions


F(s) (not necessarily rational) such that
(i)
(ii)

by

We

F(.s) is real

Re{F(s)}

for s real

for Re(s)

Although seemingly very simple conditions, they are often replaced


sets of equivalent criteria apt for practical tests of positive-realness.
shall use

such criteria subsequently, when F(y)

is

a rational function

representing the immitance function of a pure LC-network.

For the moment we may use the general


on the poles of r(s).

definition in accounting for the

constraints

Let us suppose
(9-79)

it

to be a pole of r{s) such that Re(/)

should hold, for example, that


Yi (p)

+ G, =

Re{Y,(p)}

+ Gt +

ImlYiOO}

0.

Then by

EXACT SYNTHESIS OF TUNED MULTILAYERS


This is in contradiction with

G >

and

Thus p must lie in the (open)


From (9-79) one can compute

real Y;(j).

Z (s) = Yr

(S

left

)=R

Re{Yj(/>)}

>

for the positive-

half of the j-plane.

|i^
-

(9-81)

r(s)

Having a

425

immitance function Zfa) or Y^s), the next


is to find the immitance matrix [z ik ]

realizable input

step in Darlington's synthesis generally

or [y lk ] of an LC-quadripole operating with a load 2 This was a procedure


we could skip in our search for the equivalent network in Sect. 9.7.4, because

we knew beforehand

that the chain matrix of our network

We

rationalized interference matrix.

must be the

could immediately proceed to the

expansions of the resulting immitance matrix and to extracting the configurations of the elements.

In the optical synthesis

from

r(s),

We

we

extracted the refractive indices directly

using a special algorithm.

could alternatively determine the input immitance by (9-81) and,

supposing the responsible network to be a cascade of rationalized transmission-line sections allowing the use of the

Smith Chart, we could extract the


An example for this in the optical

refractive indices using Riblet's procedure.


literature is to

Here we

be found in

[24].

shall study the input

immitance obtained by (9-81) from the

viewpoint of realizability conditions.

and

Interpreting in (9-81) F(s) as r(s)

V M_
=

-1
o 'Y.to

"g P 22(s)

*\i(s)

we have by

n g P 12 (s)

+ - y.Nff
+ Ngs*- + ... y b N$
2

is

(9-82)

n% yb = 1, for k odd ya = 1, y b = g
the input admitance function of a .ftLC-network, where the

only ohmic resistance


(9-82) will

njtftfs*-

where for k even ya


(9-82)

(9-5)

+ P 2 l(s) _

n/ + AfcV - + n N$s k 1

as n "'

become the

is

the load

R2 =

n' 1

If this

is

somehow removed,

driving-point function of a pure

LC

network with

interesting implications in the conditions fo realizability.

We

have two

or shorted (R 2
formal, but

making the output open (R 2 = oo),


The corresponding optical values are of course

possibilities: either
0).

we may

write

OPTICS OF THIN FILMS

426

Y (s)
'

Yi(s)=
Energetically this

of energy. The point

"'-
(9-83)

forn

fei

a trivial situation: 100

is

is

for

-ri

=0

% reflection, no transmission

to apply the realizability conditions for (9-82).

By a theorem due to Foster, [25] the input immitance of an LC-network


is an odd rational function (with the numerator and denominator not
differing in degree by more than +1), whose poles and zeros lie on the jco
axis

and

alternate. This

purely imaginary roots

means for the /^(.^-polynomials that they have


an interesting algebraic possibility of generating

such polynomials by using the sequences

N$, N^.

/
'-*

na~

r^r

o-

K
\

ontpokinoa

r
s-ju

'0

^
k \

i-M

!
4

oneterv in->

-k

i-

Fig. 9-30 The pole-and-zero plot for the input immitances of a pure
LC-network formally corresponding to the functions (9-83) for a system

of 10 alternating layers.

An

example for an arbitrary sequence of ten indices

is

shown

in

Fig. 9-30.

The

origin

and

infinity are

always occupied by a pair zero-pole, or vice

versa.

The alternation rule remains valid even between the pairs {Pu,P 12}
and {P2 i, P22}' because these appear in the input immitances when the
system is seen from the other side.
For alternating systems nH /L /n H .. there is the additional property that
P12 P21 (when k even) or P tl = P22 (when k odd). These are consequences
of the rules
i\r(a)
J

'odd/even

ivr(b)

iv odd/even>

valid for the alternating systems.

r(a)
J, even/odd

r(b)

''H"L J> even/odd

EXACT SYNTHESIS OF TUNED MULTILAYERS

427

References -9

[1]

E. Delano
in: E.

and R.

Pegis,

J.

Wolf, Ed., Progress

Methods of Synthesis for Dielectric Multilayer


Vol. VII, p. 69, North Holland, 1969.

Darlington, /. Math. Phys., 18, 257 (1949).

[2]

S.

[3]

W. Chen, Design of Linear

[4]

Z. Knittl, Appl. Opt., 6, 331 (1967).

[5] J.
[6]
[7]

Networks, MacGraw-Hill, 1964, p. 491.

A. Dobrowolski, Appl. Opt., 4, 937 (1965).

IRE, 36, 817 (1948).


H. Pohlack, Jenaer Jahrbuch 1952, 181.
P. J. Richards, Proc.

[8]

A. KuCirkova, Opt. Acta, 18, 577 (1971).

[9]

K. Kuznikova,

[10]

Filters,

in Optics,

Thesis, University of

N. Balabanian and

Olomouc, Czechoslovakia (1969).


Network Theory, John Wiley,

T. A. Bickart, Electrical

1969.

Network Synthesis, John Wiley, 1958.


G. A. Korn and T. M. Korn, Mathematical Handbook, MacGraw-Hill, 1968,

[11] S. Tuttle,
[12]

21.7.
[13] Z. Knittl

and M. Krai, Opt. Acta,

[14]

R. B. Muchmore, see

[15]

A. KuCirkova, Folia Fac.


t.

W. Hubner,

[20]

9,

295 (1962).

3.

of Brno, Czechoslovakia, Phys. 12,

Sci. Nat., University

de Phys., 25, 245 (1964).

Optik, 5, 128 (1950).

or

[18] see ref. 1.,


[19] L.

Ch.

XII, op. 7 (1971).

[16] Z. Knittl, Journ.

[17]

ref. 21. in

ref. 20.

Weinberg, Network Analysis and Synthesis, MacGraw-Hill, 1962.

H. Pohlack, Feingeratetechnik, 2, 499 (1953).


by H. A. Macleod, book, see

[21] J. S. Seeley, as presented

ref. 29.

in Ch. 3, p. 140.

[22] see ref. 19., p. 445.


[23] see ref. 19., p. 443.
[24] L.

Young,

J.

Opt. Soc. Am., 51, 967 (1961).

[25] see ref. 19., p. 209.

Problems

9-1 Repeatedly using the

column scheme of

9.1.4 prove that

(a)

^k/v-j

v
=1^-1+1

(and analogously for

0>

tf-^j-l,

and develop

V "~

- /"'

\ ljn

_j

^
eyen

N^-j)

9-2 Consider the index pattern {} for the


light

and L

directions of incident

successively the proof of the following relationships:

OPTICS OF THIN FILMS

428

a)

Nk/even

for

7V R

forNk/odd

b>

<"">

b ">

JV{.

= Nt b)

b)

"g

c)

>lC0

where the poles of rR

(*)

are identical with those of r R

zeros are taken negatively.


fellow solutions of r R (s)
istic

q r (co).

= -^(j)

Hence

when

(s),

rR (5) is identical with

but the

one of the

realizing a given frequency character-

Note the implications


6r

0l>

<5r

<5l

t,

dR

dL

9-3 a) If a given pole-and-zero plot for r (s)

is enriched by an arbitrary pair


zk+i=Pk+i then nothing changes for r(s) but i'(s), as defined by
(9-7), obtains a controversial zero unless the pair was (1, - 1). The

only permissible extension of r(s)

Show

is

by the root factor (s

that the corresponding realization

is

extension by a tuned layer with a refractive index n


k+1

energy coefficients

q, t

an additional phase

remain unchanged, but the true

shift equalling re/2 for s

b) Using the result c) of problem 9-2

l)/(j

1).

the trivial case of rear

g The

i(s)

obtains

0.

show that the analogous extension

by a front layer with index n results in a factor (s + l)/(j - 1).


q and t are again unchanged, but 8 and d obtain increments re
and rc/2 respectively.
These are the optical analogies of phase-delay elements of network
The process may be generalised for more added layers.

theory.

10
Inhomogeneous

layers

Let us restate the results obtained in 1.5 for the solutions of the wave

equation in a

medium with an inhomogeneity of the normal

The phasor functions have

+
+ g(z)f^
dz

dz

type: n

n(z).

to obey the differential equation

f(z).w

(10-1)

and the wave equation then has the solution


aa?w(z) exp
It

f(z)

[}(cot

Gx)]

(10-2)

always holds that


2
- G 2 = 4"
= ^i(z)
(z) 2 C"
2

o sin &o]

~
c

h (z)cos 0(z)
(10-3)

whereas g(z) depends on the type of polarization.

For s-polarization
nent of the

For

field,

g(z)

and

(10-2) represens the electrical

w(z) being identified with V(z) of

/>-polarization

g(z)

dz

magnetic component, w(z) replacing v(z) of

and

compo-

1.5.

(10-2)

represents

the

1.5.

The remaining field component, if desired, is determined by using the


Maxwell equations (l-2a, b).
The second-order ordinary differential equation of the type (10-1)
is the central problem of the theory of inhomogeneous layers. The
approach to solving it is quite varied, depending on the type of the
functions g(z), f(z). The papers concerned with the propagation of electro-

OPTICS OF THIN FILMS

430

magnetic waves in inhomogeneous media form quite a list. Many have


been motivated by high atmosphere problems; another important group is
written from the standpoint of electric transmission lines with continuously
It must be admitted that only a minority of the published
had purely optical motivation.
Closed form solutions of (10-1) are possible only for certain special

variable parameters.
literature

types of the function

(z). Recourse was therefore often had to approximComputer-aided solutions are also possible now.

ations.

We

a selection of methods which

shall present

may

be of importance

for the optical applications. Non-absorbing layers will be considered only.

10.1

The

WKBJ (geometrical optics) approximation

changes only slightly and smoothly across a path


comparable with the wavelength of light, then (10-1) may be solved by an
approximation method originally due to Liouville (1837), but later redisIf the refractive index

covered for physics by several authors. In modern science

under the acronym

it is

best

known

WKBJ (Wentzel Kramers Brillouin Jeffries method).

Consider (10-1) for the />-polarization and put


z

w(z)

where

(z).vKz),

F(z)

= expfi j-^dcl = /-^

(10-4)

This substitution helps to dispose of the

first

derivative in (10-1)

and one

obtains

V "(Z)
The bracketed

(t(z)

4 ^ 4i) v(z)

(i - 5a)

coefficient is equal to
2
i

2
e'

e"\

c
If

then

we now

Ae'

and

As"

introduce the assumption of slow change of s(z) and

may

s'(z),

be neglected and we obtain


V"(z)

f(z) \|/(z)

(10-5c)

INHOMOGENEOUS LAYERS

431

Referring to the notations of

1.5, it

holds that

(10-5c) yields the approximate solution of the

\|/(z)

v(z)

wave function

V( o/ z)

an(l

v(z) for ^-pola-

rization.

The same equation

\y(z)

(10- 5c) holds for ^-polarization exactly, putting

V(z), because there

For the solution of

is

no

(10-5c)

first

we

derivative in (10-1) in this case.

further substitute

(z)

f VfCCTdC,

v(z)

-J= X(Z)

(10-6a, b)

V f( z )

which leads to the form

[5^V~T7rJ ^
1

f"

"I

(10 - 7)

Within the framework of our approximation the brackets equal unity and
there

is

the solution

exp (j)

the full solution according to (10-6b) being

V(z)

This

is

*_ exp (

J VfTOdC))

Even the

the sought approximation.

s-case

is

(10-8)

now

covered only

approximately, because the simplification of (10-7) implicitly concerned


(10-5) whatever the

Writing

this

v(z)

meaning bf
full by

out in

f(z).

we have

(10-3)

"(0cos[6>(0]df)
TTT^rTi ^f^T
c Jf
\
J

(io-9)

Vn(z) cos [(z)]

Considering that the integral

or plus sign

We

shall

The

will

is

denote these solutions as


full

an increasing function of z, the minus

obviously correspond to right-going or left-going waves.

solution

may

\|/

R,

L.

\)/

therefore be written:

s-polarization

E y = (^rVr + ^lVl)

exp

wt

n sin

<9

(10-10a)

432

OPTICS OF THIN FILMS

/-polarization

Hy

J 8(0)" ^rVr + ^lVl^

where j/ RjL

The

ex P

wf

- ^- "o sin 6>

(10-lOb)

J> RiL are integration constants.

solutions (10-10a, b)

may

be interpreted as indicating that there

can exist independent right- and left-going waves in a weakly inhomogeneous


medium just as we are used to obtaining them in homogeneous media. We
shall see later in this chapter that

such a separability need not always be

possible.

Taking the part of the argument contained in \)/ we see that the concept
of covered optical path is maintained by taking an integral over the variable
product n(z) cos 0(z). In this respect the wave behaves very much as in
.

a homogeneous medium. However,

medium

amplitude changes even

its

if

the

non-absorbing.

is

There is a good physical reason for this in connection with the transport
of energy. Consider the wave in normal incidence. In a loss-less medium the
Poynting vector must be independent of z. There is a well-known balance
between

this vector

and the

transport, at the velocity v, of electromagnetic

energy stored in unit volume. In an inhomogeneous

medium

the velocity

is

variable, hence the amplitude of the

wave must also vary in order to keep the


flow of energy constant. This is described by the equation (written with
(10-9, 10a) for the R-wave in normal incidence and for time averages)

fe

v^'^

ar^

"

rI

const

The same

is the result with (10-10b), only z'\z) would be reduced with


3 (z) in the denominator.

In oblique incidence the balance


variable cross-section Sf lac

is

maintained for a continuously

cos <9(z)/cos

O of the light-beam. Although


changing direction and diameter, the beam retains its individuality and is
always at right angles with its portion of the equiphase surface.
.

In fact, taking the phase term for a right-going

wave

F=

xn

sin 6>

n() cos [0(C)] d

INHOMOGENEOUS LAYERS

433

F =

the direction cosines of the normal to the

^,
Carrying

this

const surfaces are

D = (F'* + F'y2 f

-^-,

out and using the invariant n sin

n(z)

sin &(z)

we

obtain {sin 0(z), cos &(z)}, as expected.

WKBJ

for these intuition-appealing reasons that the

It is

sometimes referred to as the approximation of geometrical

solution

is

For a given
For a given A,

optics.

degree of inhomogeneity its accuracy increases inversely with X.

the applicability of the approximation covers a broader range of rates at

which the

refractivity

Consider

now

changing,

is

the

R-wave

which the approximation

is

if

the function e(z)

alone. If

it

valid, there is

is

monotonic.

propagates in a space troughout

no reason

for

an L-wave to form.

In other words, no internal reflection takes place in a weakly inhomogeneous

medium.
Note:

If the

path

is

long enough, then even with weakly variable (z) the product

may work down to zero values. This indicates total reflection. In atmospheric
some degree of reflection may occur even at normal incidence into a medium

n(z) cos @(z)

physics

satisfying the criterion of weak inhomogeneity.


is

The dielectric constant due to free electrons

here given by the formula

47r 2

nw 2

which expression may reach small positive or even negative values if the concentration JT
of electrons (of mass m and charge e) is sufficiently large or the frequency v sufficiently
low. Now, for positive and small, the approximation of geometrical optics is no more
valid, because a small e prevents us

in (10-5b).

from

inferring that Xs'

We cannot count with the absence

negative values, the refractive index

is

and Ae" small simplify things

of partial internal reflections. If e assumes

pure imaginary which

is

necessarily associated

with total reflection.

Some

10.2

exact solutions

10.2.1 Exponential layer

When deciding on the type of inhomogeneity, one can make assumptions


either
is

on

e(z)

or on n(z).

contained in (10-3)

The

first

case

linearly.

is

formally more convenient, because e

Besides,

the

dielectric

constant

is

in

OPTICS OF THIN FILMS

434

a more direct relationship to the atomic structure.

We

shall therefore

understand the exponential layer to be defined by*)


e

exp

(oz)

may

In this case the equation (10-1)

be identified with the differential

equation
y"

(b

2cx

v ) c

The wave function

generating the Bessel functions.

for the s-case

may

therefore be expressed as

v(z)

^j (0 + v2 UQ;

where Jv and
tively, the

an
The

sarily

yv are

Bessel's functions of the first

on

order v depending
integer.

-y-

v-^ e*

and second kind, respec-

the refraction invariant G. It

is

not neces-

For normal incidence the functions are of zero

situation

is

little

(10-1 1)

order.

more

involved for the p-polarization, (10-1)

assuming the form


v"

The

first

derivative

is

ov'

f(z)

again disposed of by the substitution (10-4)

where T(z) now equals exp (\az). (10-1)

^( Z) +

[f(z)

is

now

converted to

+ l(i 2 ]*(z) =

(without any approximation being involved). The function v(z)

is

now

expressed by a combination of Bessel functions as in (10-11), only the


invariant

G2

is

G2 -

replaced by

w(z)

2
\ a

Kz)

Eventually the wave function

exp lJaz
j

This describes the magnetic component. The electric component

through partial derivatives of

is

this solution in

is

obtained

accordance with Maxwell's

equation (l-2a). Differentiating Bessel's functions leads to the same kinds of


functions with modified orders.

*)

happens to be unessential in the case


adopt it also in the case of the linear profile. In
sections, on the other hand, treating any inhomogeneity by approximation, we shall

The

difference between the

of the exponential profile, but


later

we

return to the definition via n(z).

two

definitions

shall

INHOMOGENEOUS LAYERS
It is

now

435

important to note the following. Since the functions

/,

Y are

two components in (10-11) cannot be interpreted as belonging to


the right- and left-going waves, which is readily possible with phasor functions

real, the

of the exp (+jz.

.)

type. In fact, taking the real part of the full solution for

the s-case, one has the waves

^iJv

cos

(cot

Gx)

<g 2

Y, cos

Gx)

(cot

which are symmetrical about the z-axis, but there


what is travelling to the right and left.

no information as to

is

Let us recall that in the case of a homogeneous


(10-1) constant (equal to

\jf

=V

exp

medium with

f(z)

in

we have

f),

(j

Vfz)

<#

exp (-j

y/fz)

and
V(z)

<g

exp (jGjc)

ij,

+ ^ 2 ipexp(

jGx)

so one can see the four possible waves

expj(cf

where the condition of being

No

such criterion

is

yjiz

Gx)

right- or left-going is decided

by the sign of VfV

extant in (10-11).

Rather, we have the solution corresponding to the general real solution


of the homogeneous case

s/ cos

V fz +

J? sin

Vfz

which describes the resulting standing wave, but may be


decomposed into
the two travelling waves. This is a matter of the
relationship between
goniometric functions and the complex exponential exp (jz).
An analogous relationship exists between the Bessel and Hankel
functions. The latter are defined by

m
where

(1)

It is

\z)

and

= / (z) + j Fv (z)

//<%) = yv(z) - j Fv (z)

(2)

denote Hankel's functions of the first and second kind.


then possible to replace the solution (10-11) by the equivalent

solution

V(z)

where "^ and

<,H\ l \Q

< are some other


2
The conditions under which

of opposite direction

is

<#

Hl \0

(10-12>

integration constants.

the decomposition into travelling waves

possible will

become evident

if

we

use asymptotic

OPTICS OF THIN FILMS

436

expansions for Hankel functions. These are valid,

if

the argument

sufficiently large (the order of the function being sufficiently low).

It

is

then

holds that

1,

(0(|-)Pj(c-TV-l)

2
nl \Q *

The

first

(^Jexpj(-C +

y vn + 1*)

part of (10-12) then corresponds to an L-going wave, the

second part to the R-going wave. Both waves have essentially the same
form as that obtained in the WXBJ approximation. Even the conditions of
validity are identical: there will be a large in (10-12) if the

proportional to

or

if,

and

e'

for a given

a,

e", will

is

be

product Aa,

small (weakly variable refractive index)

small (geometrical optics).

In the contrary cases the asymptotic expansions are no more valid and
the concept of decomposition breaks down. This may be physically interpreted as due to the fact that with strongly variable refractive index the

elementary Fresnel reflections on the gradient of s are both ways too


numerous and too intense to allow of a simple expression for the contributions of

some R- and L-waves

In view of this

<|

refraction

and phase

it

in a given plane.

not be possible to work with the matrices of

will

in the theory of

inhomogeneous

films.

hand, the matrices of interference, transforming the total

importance in

On the

other

field, retain their

full extent.

10.2.2 Linear layer


In this case

a z
f(z)

we

shall

presume normal incidence only. Setting

we have

CO

where

az,

2
= b.-G,
b G
2
,

Introducing a

new


-^
*

variable
C

we

e(z)

shall seek, instead

az,

dC

a dz

(10-13)

of V(z), a solution ri(Q of the differential equation

1NHOMOGENEOUS LAYERS

437

Bessel functions of the order 1/3 are at

hand

to obtain

which by (10-13) determines V(z).


Again, the solution

is

obtained as a standing wave.

10.2.3 Notes on other solutions. Computer-aided solutions


Studying the literature concerning other profiles leads to an impressive
display of mathematical elegance achieved

when

by many authors over the decades


various inhomogeneous layers were being encountered in problems

of atmospheric physics, transmission line theory and theoretical physics


in general.

The inhomogeneities to be encountered in thin film optics depend en the


The linear or exponential profile may be a convenient

origin of the effect.

rough assumption for a natural transition layer or a model for studying the
nonhomogeneous films ever the spectrum. Sometimes
the need is felt of supplementing the linear profile by rounded ends so as
to make the first derivative smooth, the slope possibly remaining steep. The
basic behaviour of

classical

Drude

transition layer

also been solved in

[2]

and

on

glass is of this type

[1].

The case has

[3].

The technology of producing artificial inhomogeneous

layers

by simul-

taneous controlled evaporation of two materials leads to hyperbolic profile


or nearly so. These are discussed in [4] together with a broad survey of the
different theories of inhomogeneous layers. The hyperbolic profile is treated
here under the heading 10.6.

method now always at hand is the numerical solution by means of


It would of course be possible to solve (10-1) in this

a digital computer.

way

for any type of the functions

f(z), g(z),

further handled to obtain the reflectivities.

but the result would have to be

more convenient to approximate the inhomogeneous profile by a pile of homogeneous layers in the
same way as the area under a general curve is subdivided into rectangular
strips in the

theory of

Riemann

transfer coefficients thus

geneous layer
normally do.

if their

It is

integration. For reasons of continuity the


computed must converge to those of the inhomo-

number

is

sufficiently large.

Some

tens of layers

438

OPTICS OF THIN FILMS

In this approach there are no difficulties in connecting the computation


of the inhomogeneous layer with that of further homogeneous layers. In the
general approach

some

extra considerations

ference matrices before such a connection

is

must be made on the

possible.

inter-

We shall elaborate on

this subsequently.

The idea of approximation by inserted homogeneous profiles may also


be considered in general terms. This will be dealt with in a later section.

10.3 The inhomogeneous layer as part of a layer system

In this section

we

are going to deal with the

boundary conditions

across a layer system including the case

homogeneous.

We have already

total field. This

some

in

geneous

when some of the layers are


noted that we must in general deal with

in-

the

means that the concept of reflection and transmission may


down, starting with a boundary between two inhomoHowever, the orthodox concepts can be generalized at least

cases break
layers.

for the case of the

WKBJ

approximation.

10.3.1 Generalizing the Fresnel coefficients for inhomogeneous

media

in the

approximation of geometrical optics

Let the boundary between two inhomogeneous media be placed at

The quantities relating to the front and


and 1. The law of refraction requires n sin
functions are by (10- 10a, b):
z

Zi

by

rear

media

will be indexed
n 1 sin l The wave
.

s-polarization

g = tfh = [^rVr(z) +

^L VL (z)] exp

*--&st>

( mt

^n

sin

xj

(10-14a)

(1(M4b)

^---js-ar

/>-polarization

H = pfy = D#RvR (z) + ^ Lv L (z)] exp (cot-^-n sin


j

c
-ijcoe

d3Vy
t-^,
oz

S z% =

c
-.

jcoe

dJ?v
^-2dx

x J(10-15a)
(10-15b)'
v

INHOMOGENEOUS LAYERS
where (10-14b),
solutions given

To
for z

439

(10-1 5b) follow

by

from the application of

(l-2a, b) to the

(10-10a, b).

formulate the boundary conditions, these expressions are written

and

Zi in the

$(z) for V(z)

and

now be unified by writing


and replacing the constants si and ^

media. Both cases will

v(z), respectively,

by a common symbol
We then have

6.

#0R#R + ^OL^OL = ^1R#!R + ^II^IL

(10-16a)

(10-16b)

8o(*or*'or

*ol*'ol)

Bi(i**'ir

#ii#'il)

where for s-polarization

^=
and

Jco

for /-polarization

80

The set (10-16a,


of incident

light,

= -

'
;

joEo(zi)

b)

is

9i

=
j<ei(zi)

now solved in the usual way e.g.

eliminating < 1K and <& ^.

We

for the R-direction

obtain

(In# 0R )'--^(In<P 1R)'


f

^OL^OL
d>
0R *
0R

_
~

00

y-^

(10-1 7a)

(ln$ 0L

n$1Ry

9o
(In

*J- -^-(lnaW

1R*1R
<g

00

^*o*
<b

n
m<*W + iL (ln<i 1R y

(10-17b)

>

9o

Both

coefficients are

determined by the logarithmic derivatives of the wave

functions.

There

is

a note to be added to (10-17a)

if it is

zation. Since the primary vector in this case

of (10-16a) must be reversed,


vector.

if it is

is

written for the ^-polari-

the magnetic one, the sign

to describe the reflection of the electric

OPTICS OF THIN FILMS

440

It is

interesting to analyse the conditions for zero reflection. Confining

normal incidence we have

ourselves to

ln#RjL = lnV RtL = +j

= J _N/f-

(ln*R>L)

hidz -

-J-ln/(z)

TT

hence after using (10-3) and reducing

M_ /A_J!l\

v{j_

all

functions being taken at z

zx

This coefficient will vanish


the refractivity functions

i.e.

including the

first

if s

and the wave propagates

inhomogeneous medium within the

The

and simultaneously

ex

must be continous across

WKBJ

for the total field inside

L and replace them by I and II,

boundary
weakly

freely in a

an inhomogeneous medium

first

if

we

is

abolish the subscripts

simply distinguishing between two inde-

pendent solutions not implying separability of


the surfaces z

e'j

interference matrix of an inhomogeneous film

The pattern

Let us

approximation.

given by the equations (10-14a, b), (10-1 5a, b)

R,

ej>

the boundary,

derivatives. In actual fact this implies that the

vanishes as a physical obstacle

10.3.2

fields.

The layer being confined between


z 2 we have the following boundary conditions

consider the s-polarization.

and z

Ey = j/^zO + j/nV^zO.
i

H xl = - Wfa) +

j/nV.Kz,)]

Ey2 =

^,V,(z2 )

^ nV(z

H x2 = - [j/,Vi(z 2 +
)

2)

j/Vi(z 2 )]
(10-18)

Eliminating from the right-hand pair of equations the constants A,

and

A and

inserting into the left-hand pair,

we obtain

feHfe)

the transformation

INHOMOGENEOUS LAYERS

441

where the interference matrix

V^Vu - v ul v^

is

-^-(v v n - V In V I2 )
I12

(10-19)

(VrnVix

v,^

v;n v12 ),

- v II2 v;

The quantity

a (z2 ) = v

I2

essentially the determinant

is

factor

reduced

v;I2

v;2 vII2

of the right-hand pair in (10-18)/ with the

\
1

In the theory of linear differential equations the expression

is

known

Wronski determinant. In the case of s-polarization when (10-1) has


practically no first derivative, this determinant has a constant value and
may as well be computed as A s (z x ).

as the

If

we

are only interested in the reflection coefficients,

the final computation

and need not be determined

note on the secondary diagonal

at

is

reduced in

all.

Having computed the


H-components by the lower pair of equations in (10-18), we implicitly use
the adopted conventions on the vector trihedrals in the electromagnetic
wave, which necessitates the characteristic admittance for the s-polarization
is

necessary.

to be taken with the

minus sign. The form of the matrix (10-19) therefore


requires this convention to be respected even in the neighbouring matrices
of homogeneous

films. If

we wish

to reduce this sign as usual, the secondary

diagonal of (10-19) must be taken with opposite signs.

Let us

now

take /-polarization. Comparing (10-15a, b) and (10-18)

reveals that a formally similar result will be obtained in the

("::)
i.e.

<>>

<:)

with the one-column matrices of the total

field

upside down. Further,

the -jc/co quantity will be replaced by jc/we where v


v
v

form

1,

2 for

E,

1,2.

Since the differential equation (10-1)


derivative, the

wronskian

is

computed by

now

effectively contains the first

Liouville's theorem, e.g.

[5],

Ap (z) =

vI2Vl

',

2 v II2

v,'

=Ap (zi)exp

^J^ Az

= AP( z i)

e(*i)

as

OPTICS OF THIN FILMS

442

The

&^

interference matrix has a factor

Ap

expressed as

e(z iJ)

(z 1 )

A p(z

using the

e(z 2 )

(z 2 ),

which may therefore be

value uniformly with the

x)

.s-case.

and mutually exchanging the elements of the

Inserting into (10-20)

main and secondary diagonals so as


ation of the total field with

v,2V,'u

'-f-|j
P
\

to adapt the matrix for the transform-

in the upper row,

-rr-faiVna
C

obtain

J_(V] lV i2 - v,'^)
'

vIl2 v'n

we

s
Vi 2 v nl ),

-^(vnvia

(1 - 21)

v nl v,'2 )

|62

This completes the setting up of the interference matrices for an in-

homogeneous

layer of any profile provided the wave functions have been


found as exact or approximate (though not merely numerical) solutions
of (10-1).

Note: The interference matrix of an inhomogeneous layer


malism has necently been described in [32].

The exponential

As an

in Kard's for-

layer in normal incidence

illustration

of the above we shall

set

up the

interference matrix

of the exponential layer in normal incidence, using the notations for the
s-polarization.

In addition to the Bessel functions


for which

it

Jo =
The

Y we need their first derivatives,

holds that

insertion into (10-19)

>

is

= *i

*o

straightforward.

The determinant

is

evaluated on the basis of a theorem valid for any pair of Bessel functions

jy

(OYxo-m)Y (o =
v

Recalling the argument of the Bessel functions in (10-1 1) to be an

exponential function of

z,

we have

~&*-UC).

$=J

or

INHOMOGENEOUS LAYERS
where for

Ci z is

443

0.

Hence

_rc_

taken as
1

at t

Denoting

we

obtain after some arrangements (including the inversion of sign in the

secondary diagonal)

M =yCi

io

io

'

(10-22)

-<5

\jn 12 Q,

where

2 = Jitfi) r (Ci) - / (Ci) Y&J;


y = / (fi) ^o(C 2 - / (Ci) ^(W;
)

a=

/.(d)

J&J Y&J

^'(d)

J(Ci) ^o(C 2 )

(C 2 )

t (C 2 )

(10-23)

This

is

the interference matrix used in

homogeneous -inhomogeneous
The

[6]

for the analysis of

some

thin film combinations.

WKBJ layer in normal incidence


In this case

we

insert the

R- and L-expressions

(10-8)

and

their

derivatives
z

into (10-19).

The

first

term in the brackets

is

negligible

and

T j^J(0dc]
^L-H/-^.p[
C
(10-19) then assumes the

form
"12
cos<p,

M =

"io

ljV M 1012

J
-

sm<p

n ioii2

^-COS<p

sin<i9,

"V

W 12

(the secondary diagonal adapted for positive s-admittances)

(10-24)

OPTICS OF THIN FILMS

444

The phase

thickness of the layer

is

zi

where nh

is

the integrated optical thickness

The matrix

(10-24)

may be

and the mean

/\-jy/n 12

iV"io,

layer

that a weakly

inhomogeneous

layer

is

25 )

equivalent to three

layers with the following parameters:

optical thickness

nh

~7^T

1_

L V^Tll
which means
homogeneous

refractive index.

regarded as the product

ictive

n d

index

phase angle

7-nh

10

zi

A/4

3A/4

The fictitious

V10

for all A

Tt/2

3w/2

layers 2

and

3 are insensible to A, hence the

scheme cannot

be run with a standard programme.

10.4 Transfer coefficients of single inhomogeneous layers

We

shall

now

apply some of the preceding results to the computation

of reflection and transmission

on

single

inhomogeneous

films, confining

ourselves to normal incidence.

The exponential
monotonic

layer

may

profiles allowing

be considered as a basic representative of


of a simple exact solution. With the relatively

small total thicknesses of optical inhomogeneous layers, the exponential


sections differ only slightly

from

linear profiles.

As a second item

the

WKBJ

solution will be discussed. Finally the formulae for the practically important
transition layer will

be presented without detailed proof.


will be deferred to a later section.

Numerical examples

INHOMOGENEOUS LAYERS

445

10.4.1 Exponential layer


Inserting the elements of (11-22) into (2-27a)

we

obtain

V io

"o

V "o

"10

\ "lO

"o

"10

has the same denominator, the numerator being Xan~

With a geometrical thickness 'h the integrated


exponential layer

n'[

1
.

optical thickness of the

is
h

nft

ndz =

n 10 exp(

= i!^[p(i-

fl

The boundary

(10-26)

ft)

Values n l0 ,n l2 given, a

oz jdz =

= 1( 12 -

ij

10 )

determined as 2h~

is

m(n 12 /n 10),

thus

Hh

where n

10.4.2

is

mean index of

the

" 12

lnn ]2

10
I*

In w 10

fcS

refraction.

WKBJ layer

The matrix
-

(10-24) leads to the formula

("oi2

(o"i2

~
+

" g "io)cos(?

" g io)cos<j!)

+ j(n
+ j(n

ng

- w 10 n 12 )sin(p
+ n 10 n 12 ) sin q>

ao-27)

For i the numerator is 2n \fn 10 n i2


These results may be considered as a direct extension of the formulae
(3-2a, b) for the homogeneous film. The formula for q resulting from (10-27)
.

is

attributed to

Formula

Meysing

(10-27)

(1941).

may be

interpreted in terms of the cardinal points.

OPTICS OF THIN FILMS

446

The

Qn/z values are

equ al to

y/n~10 n l2

alent indices n F

reflectivities
.

Qn

f-

of homogeneous layers with equiv-

Further

where

ri

n,

"12

Q n are therefore different from bare substrate reflections and


holds that

(if

< n)

it

Qk

fact

for 10

Qo

(10-28a, b)

i2

The inequality (10-28a) is sometimes encountered as an experimental


when measuring supposedly homogeneous layers. Admitting a weak

inhomogeneous slope according to (10-28b) accounts for this.


In particular, if njn = 12 / 10 Q n = 0, which is a new possibility of
antireflecting a substrate with one layer. The point is to apply an ascending
profile with conveniently high boundary values n 1Q < n
12 > g and choosing
the optical thickness mX\2. An example for such a layer is computed in
Fig. 10-8b, although the method by which it is deduced there does not fall
under the heading WKBJ.
,

Note: The formula (10-27) is related with some older approximations for weak
inhomogeneities obtained, for example, by Bauer, [7]. The formal difference lies in the
value chosen for the mean refractive index, which may as well be taken as the arithmetic
or harmonic mean. Notes on this

may be found

in [8].

10.4.3 Transition layer

A model

of an ideally smooth transition between two media

called Epstein layers, [19]. It is defined (Fig. 10-1) in terms of e


infinite interval

(2

e'

s(

"
(

oo), e"

over a distance
difference e(0)
s"

e'

the so

( oo, +oo) by

')

( "

')

tanh
\

where

is

= n 2 over the

\d
e'

(10 " 29)

(oo) and d is a characteristic length such that


from the central point e($d) = i(e" + e'), the

or e"

e(d) falls to

(the actual fraction being (e 2

about 10
-1
l)

)-

of the

smaller

full difference

d then means a

sharper transition in the centre, the asymptotic sections always reaching the
boundary values e', e".

INHOMOGENEOUS LAYERS

447

n-fr4^(nl4)M^

Fig. 10-1 Definition of the Epstein profile.

11

P\

(0

40

8.

30

\'/2.0

6-

20

5-

<t

2-

VA
\*^
w*

10

IS
Fig. 10-2 Reflectance curves
a)

n2

1.5,

^hjX) for the Epstein profile: n^


b) n 2 = 2.0, c) n 2 = 4.0.

Wl

and

OPTICS OF THIN FILMS

448

The function
with

(10-29) has the property of being continuous together

all its derivatives.

predicted by the

The

Thus,

WKBJ

if the central

slope

is flat

exact solution for the embedding n

sinh

enough, the

sinh

TT
-

TT

("

ri,

n"

(10-30)

(n+n')

may be

regarded as nearly zero

region with the steepest slope

d>

10-2.

convenient to use djX as the independent variable. For case a) the

reflectance

for q

is

examples of the corresponding curves being shown in Fig.


It is

reflectivity

approximation should be zero.

0.

For cases

b, c)

if

djX

at least X/2 thick;

is

where the

total

jump

> 0.4, i.e. if the critical


d > X is still a safer limit

is

greater, the safe limit

is

1.51

The

can never start with ri

and

it is

1,

sections. It does, however, yield

(10-30)

may

transition layer of this type

physics, but in technical optics

be a reality in atmospheric

only of academic interest, because

we

nor can we provide for very long asymptotic

important insight trough the simple formula

indirectly gives us

an idea on the

validity

of the

WKBJ

ap-

proximation.

The

derivation of the result (10-30)

the hypergeometric differential equation.


generalizations for oblique incidence

10.5

A general method
It

is

is

associated with the solution of

detailed analysis together with

to be found in [10].

of integration

has been mentioned in 10.2.3 that an elementary method of

hand is the^ replacement of the inhomogeneous original


by a homogeneous multilayer of sufficiently high order whose refractive
index pattern contours the function n(z). Using a high-speed computer
integration always at

spares the experimentar

much thought

as to the type of solution to be ex-

pected in the general theory.

Simultaneously

it

may be

of interest to see whether the multilayer

approximation could not be expressed in some general terms leading to


formulae of a more or

less

closed form.

INHOMOGENEOUS LAYERS
For

this

purpose we shall have recourse to the rational function method

developed in Ch.

The
k

-* oo

449

9,

and applied to the present problem

in [11].

approximation of the inhomogeneous layer consists in making

and simultaneously reducing the optical thickness A e of the element-

ary layers in such a way that


n

(z)

fcA,

dz

const

n*/

'nfS)
S-'

^
n,

"i

Ai.

Fig. 10-3 Inserting

*,.

&'*''
%
At

homogeneous multilayers under inhomogeneous

profiles so as to observe the condition of

equal optical thicknesses of the


elementary layers, a) subdivision with unequal segments of z under n(z),
b) subdivision with equal segments of S under n(d).

was obtained by plotting the

in a) at distances

In various cross-sections of the layer


thickness dz of the elementary layer

However,

in order to

rate with constant

be

(z)

Ae

The function

n(d)

characteristic values n(r ) of the segments


v

vA s

A =

is

(z)

dz so that the physical

variable (see Fig.

10-3a

b)*).

adhere to the model of k tuned layers we must integ


so that the element of space for the integration will

dz and the elementary phase angle

dq>

= r n(z) dz

*)
The difference between the n(z) and
be given more attention in 10.6.1.

n(*5)-functions introduced in this figure will

OPTICS OF THIN FILMS

450

It is

obvious that the formula (9-5) will become operative in the

region s ->

oo,

re-

which may be remedied by the transformation

=
1

..
j tan q

2tc

j r- n(z) dz

A.

Thus
^

To

00-31)

f*4

develop the corresponding definition of the a y , b v ,

recourse to the formulae (9-4) defining the

N$, N$

we

shall

have

as multiple finite sums.

Replacing these sums by integrals and arranging for oblique incidence

Ysv =

YDV =

n v cos ,

"--,

cos

da>

-r- n cos

dz

A.

we may compute*)
h
-2

Ng?

- JV =
a)

Yn cos

dz

cos

dz

=/

/>

[dz

dz

cos

where of course n and

Leaving aside for the

are taken as functions of

moment

the factor Ink

introduced with the correct powers in (10-34).

z.

of the element

dtp. It will

be re-

INHOMOGENEOUS LAYERS

451

Further
h z

JVm

-*

-SO- n(0 cos 0(0 dCn(z) cos 0(z) dz =

a)
^2 =
I

u o
h

fdz

n cos

0d

'

o
b

cos

dz

dC

O
h z

JVg>- #a = f

f2W

M(C)cos6)(0dC ( z)cos0(z)dz

U
h
2

n cos

dz

dC

/o

o
h

\
2

n dz |cos

0dC

The

computation of the

rules for the

h)

( *'

may be summarized

as

follows:

^-polarization
h

# =
(a)
v

. . .

dC

dC| dC

[ n cos

dC

dummy variables taken in the appropriate

integrations is v

and

h
I

(10-32a)

stands for the

number of

n cos

. . .

where

odd the

for v even or

order.

The

last integration is

or

n cos

d,

respectively.

Further

#< b)

i.e.

the integrands in

ooo

f...d...

(a)

and #'

2
fdC |n cos

b)

0dC |dC

are interchanged.

(10-32b)

OPTICS OF THIN FILMS

452

/>-polarization

(a)
JV"v

n dC |cos

...dC...
J

0dC

f n d

(10-33a)

for v even or o<&/ the last integration being


h

cos

or

n d,

respectively,

Further

#< b) =

...

(cos

...

0dC

n d

cos

0d

(10-33b)

the integrands again being interchanged.


Recalling the definitions of the av ,b v (9-6), the reflection coefficient of
,

may

the inhomogeneous layer

power

series in

(l

--)

=
+

27tA

_1
j,

be expressed as the ratio of two

infinite

namely

(W> - ^A? ) a +

(iV<

b
>

2
JVT a +...

(10-34)

For the transmission


_

coefficient the

formula analogous to (10-31)

is

k
2 k/2
= (-l) 2(l-s' )

La v s' v
The numerator, being

written as

2(-l)k/2
yields the

two

<-l)" 2 (l T

limits for

S ')*

(l

k/2
s')

(-l) k/2 (l

k/2
s')

-> oo:

- (-if'fl + ( k
[

Wdz) +

V.dz) ! *

...1

INHOMOGENEOUS LAYERS

453

natural to write the numerator as the ratio

It is

A
k/2
f-n
e ^
l)
^
J

lim2

A
(_l)W2 e ix

associating the oscillatory term

( l) k/2 with

the exponentials in such a

way

as to evade the physically implausible ambiguity of the final result.


i is

then given by 2/denominator of (10-34).

The infinite series obtained are convergent, since each term is upperbounded by a corresponding term in the expansion for the exponential.
Being thus closely related to the exponential function, the expansions cannot
be expected to converge rapidly in the general case, not even for a weak
(b)

(a)

inhomogeneity. They are essentially expansions in hjk, since the JVv


are proportional to hjk.

Afv

Thus convergence will improve only with very thin


Drude transition layer (see below). The expansions

films (h < k), such as the

can hardly be expected to be of use for routine numerical work, but they
represent the transfer coefficients in a form of high intuitive content. It is
left

for a

problem to specify for homogeneity and compare the relationship

of the formulae with (3-2a,


Let

it

b).

also be recalled that the pattern of repeated integrals (10-31, 32)

appears in another general solution of the inhomogeneous layer given by


Abeles in

[12],

where

it

comes

as the result of solving the differential equation

by power series
Another affiliated method based on the formalism of ref.
expansion (Picard's method).

(10-1)

is

described in

1 1

Chap. 2

in

[33].

10.5.1 Drude's formulae

first

approximation

We may now show that the classical Drude formulae for the transition
layer

may be obtained as a first approximation in the present theory.


Taking the linear terms in (10-34) we have
h

(n cos
rs

n g cos

g)

+ j

hn n e cos

cos

n cos

dz
J

o-

=
(n cos

+ n g cos 6> g) + -j- j

hn n g cos

cos

n cos

dz

(1045a)

OPTICS OF THH* FILMS

454

(n cos

j=

- n g cos

O)

h
j

(n n g

cos

6> dz

- cos

O cos

*
2

cos@ g + n g cos6> )+-^-j(n n g

(n

n dz

cos 6>dz

+ cos@

cos6> g

n dz)

(10-35b)

These

may be

recognized as the Drude relations

if

one introduces the

conventional symbols*)
h

O)

dz

sdz
h

h
2

v cos

& dz =

(n

no sin

qn sin

hnl sin

o
h

cos

dz

(1

sin

0) dz

2
,

6>

o
h

f dz

f dz

One may conclude

that, although it is not evident from the original


Drude does contour the index profile, ignoring
powers of A/A. In fact, the parameters p and q depend on the

method of
negligible

shape of

integration,

(z).

(10-35a, b) represent Drude's modification of the Fresnel coefficients of


reflection derived

on the assumption of a very

accounted for the weak

a supposedly

*)

See

ellipticity

clear glass surface.

e.g. VaSUSek, [13].

thin transition layer, which

of linearly polarized

light reflected

from

INHOMOGENEOUS LAYERS

455

10.6 Approximation by simple reflections.

The hyperbolic

profile

method of vector summation (2.6.3) for the


such a way as to sum up an infinite number of

possible to adapt the

It is

inhomogeneous

layer in

elementary simple reflections:


local amplitude reflectance obtained as a limit of the Fresnel

The

reflection coefficient is

dr=hm

n,

ni

^ 2 !

The phase

shift

n2
d
=
- = -^
In
+ n2

In

is

dz

dz

incurred in one zig-zag "up to z"

Thus (suppressing the

This procedure

= z- dlnn

n'dz

is

sign of dr)

particularly suitable for application to the hyperbolic

profile

n(z)

(n 10

= ^
5Li^4
pz + y
-n 12 )z + n 12 hr ir

spanning the boundary values n

The

optical thickness

is

n(0)

n 10 and n(h)

(10-37)

n 12

n2

integrated to the value

The

total thickness in particular is

A=
where n

is

the

5(h)
K

'

= 4- In ^JL =

mean

y
refractive index.

" loWl2

n t0

-n t2

In

^= hn
n
l2

(10-39)

45 6

OPTICS OF THIN FILMS

Thus
eX

p[_.J^Z)]=(.

/fe

?Vjf

Further
n'

fiz

+-y

so
h
.

4n

'-TT

The

integral

is

evaluated as jXPJBnpx times

(fih

where the

y)

total optical thickness

~TJ _

A may

rr

7=

be recognized in the argument of

the sine.
Finally, developing

ln 10 / 12

as

2( 10

the energy reflection coefficient

is

n 12 )

9-

This

is

12 )

obtained in the form

/sin8A 2

where q is the Fresnel


two boundary indices.

/( 10

2jt

-^-

reflection for a discontinuous

(10-40)

jump between

the

the analytic derivation of an approximate formula obtained

graphically by Kossel, [14], on the basis of a continuous Argand diagram (see


also Vasicek, [15]). The formula replaces with good accuracy the much

more involved exact


ations when n 12 /n 10

solution

<

by

Schlick, [16], at least in the optical applic-

2.

Q as a function of hjX oscillates in the same

minima

in

Fraunhofer diffraction on a narrow

way

slit.

as the

maxima and

INHOMOGENEOUS LAYERS

10.6.1

457

relationship between the hyperbolic

profiles.

The method of simple

and exponential

reflections as

a Fourier

transform
Let us invert the formula (10-38) to obtain z as a function of 8 and
insert this z{8) function into (10-37).

B 0)

We

=
expl 5
-exp(---5J
*

n(z) a fictitious plot

responding n(S)
It is

now

is

n(<5),

if

(10-41)

we

<5:

which means the following:

then have n as a function of

associate with the physically real function

then a hyperbolic profile n(z) implies that the cor-

We

exponential.

shall call these functions associated.

conceivable to change the variable and carry out the integ-

ration of (10-36) in terms of the exponential n(8)-plot. This will enable us to

make some important

conclusions.

Since

dn
dz

we may

dn dS
d(5 dz

write

|dr|=--dz =
2n

-*-<tf

In

as before, but the exponential function (10-41)


result ris jn

now

yields the simple

= jS/a.

Further, the phase shift

is

expl

j r-<5

where S

is

the integration

J,

variable.

Thus
A

M>"

2a

4tij

'

This expression leads to the same result for q as (10-40) as was to be expected
because only a change of variables is involved.

Although the computation in terms of (<5) was here simpler, this is not
(z), n(5). However, an important
general advantage may be drawn from the (5)-approach:
a rule for other types of profile pairs

OPTICS OF THIN FILMS

458

Extend the definition of


for 8
for 5

outside of the interval

w(<5)

<
>

n(d)
n(3)

(The constant sections do not add to the


ions.
is

The

=
=

(0,

A)

(0)

(A)

reflectivity

by

their internal reflect-

possible contribution due to the discontinuity of the tangent n'a

neglected in this approximation.)

We

can then write

' -Jt-^-k-'*')"

m2

>

oo

which

the Fourier transform of half the logarithmic derivative, the

is

frequency variable being 2/A.

By applying

suitable step-

and rectangular functions one may manipul-

ate (10-42) to represent the reflectance of profiles n{8) of various lengths

embedding media with discontinuous jumps at the boundaries.


(See problem 10-6).
The application of the Fourier transform method to inhomogeneous
transmission lines was discussed, for example, by Bolinder, [17]. The accuracy
of the method as compared with other approximations is also studied.
in various

10.6.2

A reciprocity theorem on associated functions

In the preceding paragraph

hyperbolic n(z)

Using the

we have

-=

established the relationship

=> exponential

latter function to

form a

l/(z),

we

n(<5)

arrive

f
*

by straightforward

integration at the pair

exponential

y-^ =
n(z)

The

latter function

with z replaced by
This

is

may

=> linear n(d)

a.

be recognized as the inverse of the starting n(z)

5.

a kind of reciprocity valid quite generally, as stated by the

following theorem,

[18].

Let
n

=f(z)=>n =g(d)

INHOMOGENEOUS LAYERS
form a

459

pair of associated functions.

Then

1
,

&)

=> n

f(&)

are also a pair of associated functions.

One may encounter

physical profile n

be of interest

the need of

if an opticist finds

ing to a profile

F(Q

knowing

for

which optical film of

G(z) the n(5) function has a given form F(8). This

may

a solution in electronic literature correspond-

. The transmission lines are


and the same solution will therefore
which has n(S) = F(8). The point is to find the

in terms of the line length

treated in terms of their "air" lengths

correspond to an optical film

geometrical definition G(z) of the layer inhomogeneity.

The problem is obviously solved by first forming an n(z) = 1/F(z),


integrating and inverting so as to find the corresponding function n(5).
This is now regarded as 1/G(<5) and the reciprocity theorem yields the
answer as G{z). It is important to realize the difference between the (z) and
n(8) definitions also in the case that we compute the properties of an inhomogeneous layer by using sets of inserted homogeneous layers. Unless
a special program is written for this, a straightforward approach is to use
the available program for dielectrics and insert sets of homogeneous layers
of equal optical thickness. Thus the exponential and- linear profiles n{)
must be handled in order to obtain results concerning the hyperbolic
and exponential (z)-profiles, respectively. We shall elaborate on this in
the next section.

10.7 Numerical examples

we

compute the spectral characteristics of several


method of inserted homogeneous multilayers. First of all we must agree on the formal framework of the computations. For didactic reasons we shall follow three equivalent lines and
elaborate on the existing possibilities,
(i) Using a program for dielectric multilayers with the phase angle <p as
the independent variable we may reason in the folloving way:
In this section

inhomogeneous

shall

layers using the

Let {, n 2 n 3 ...} be the sequence characterizing the inserted stepped


This index pattern will be processed as if belonging to a tuned
,

profile.

multilayer with relative thicknesses

1:1:... The complete information

OPTICS OF THIN FILMS

460

on such a system
In the interval

means
is

at

q>

is

re/2

obtained by computing

q>

ji

the curve

is

it

over the interval

mirrored about

that any of the approximations has the

same peak

at

0^9^ n/2.
<p

<p

= n/2. This
= n as there

0.

Examples of such curves for stepped linear profiles inserted between


outer values n = I and n = 4 are shown in Fig. 10-4. 5, 10, 20 and 40
g
layers were inserted, the figure simultaneously fulfilling the role of a study
of the convergence rate with k towards the exact solution.

The scheme of insertion ^nay be equidistant or not. The point is that


the subdivision must be fine enough. Equidistant insertion is of course
simpler to handle as input data.
Since

we have interpolated the sequence {} on a scale linear in optical


we are using the H(<5)-approach. Thus the subsequent analysis

thicknesses,

of the linear profile actually concerns a layer which

We must now learn how to

is

exponential in (z).

read the graphs of Fig. 10-4 so as to obtain

information concerning an inhomogeneous layer of given total optical


thickness A.

Fig. 10-4

Approximation of a linear n(S) profile between n = 1 and n = 4 by


g
and 40 layers of equal optical thickness. Shown are q((p) curves.

5, 10,

20

INHOMOGENEOUS LAYERS

461

If the layer is simulated

meaning of the phase angle

6000 A and

A =

2it A
=- -

q>

Let us take

by k homogeneous

limits of a spectral interval

then the physical

layers,

is

we

let

1-

or

At

kq>

(10-43a,b)

4000 A and A 2

are interested

in.

,.

-^-

For each

fc

8000

there

is

A be

the

a corres-

ponding pair of phase angles <> t q> 2 > defining the working sections of the
plots in Fig. 10-4. These are drawn in heavy lines. (Since the progression
of k has a factor 2 and X l :X z also form an octave, the working sections
,

happen to be contiguous.)
Making allowance for the
ing the extrema only,

different expansions

of the plots and follow-

evident that the approximation by 5 layers will

it is

markedly off the exact solution, the case k = 10 being settled


approximately right and k = 20 and 40 differing only little from each
yield results

other.

For a plot of given k the

<p-scale

may

be recalibrated in terms of A/A

by(ll-43b).

For a

different

with A t

to be compared, the problem

than the wavelength.

We

A 2 fixed, other working sections would have

becoming

critical

with

substantially smaller

are then forced into using rather condensed working

sections of the plots.

This inconvenience

may be remedied by expanding

horizontal direction in proportion to their

We

initial

the plots in the

degrees of condensation.

recompute the sequences {n v } each time using relative


-1
{fc
}, k = 5, 10, 20, 40. The physical meaning

shall therefore

optical thickness patterns

of the phase angle

is

then
cp

independently of

fc.

The

2k

(A)

plots have a uniform condensation

conveniently compared, as

We may now

is

and may be

evident from Fig. 10-5 and 10-6.

appreciate

exactly the various approximations

more

in terms of the A/A ratio.

The conclusion drawn

<

A/A

<

1.5

for the

above chosen working range 0.75 <


it is becoming evident that with A/A

remains unchanged, but

decreasing greater strain

The same

is

is

placed on the approximation.

true for A/A increasing: the

of the cases represented in Fig. 10-4 are

now

common

peaks at

<p

displaced to the values

fcrc

462

OPTICS OF THIN FILMS

T3

c
as

a
3

ta

O
s

INHOMOGENEOUS LAYERS

463

and the new curves are symmetrical about knl2. It is evident that with
increasing k the battle for good convergence of the inserted multilayers
is never definitely won.
Taking half of the extended period to be a safe
repetition of the zero peak,

we

A
which determines the k

limit in

q>

against the

arrive at the condition

requisite for very large A/ A values: the

components

most be A/4 thick.


small
A/A
a convenient k is determined by
hand,
for
On the other
inspection of several curves of the type shown in Fig. 10-5, 6.
(ii) Alternatively we may operate a program with A as the independent
variable, the dielectric multilayer being specified by {n v } and by a

of the inserted multilayer should at the

sequence of optical thicknesses {A,}.

Otis of symmetry for

k-S

20

a/a.

an exponential n(5)-profile between n =


4 displayed with uniform condensation of the g(A/A) diagrams.

Fig. 10-6 Various approximations of

ng

15

and

OPTICS OF THIN FILMS

464

Taking again the


central wavelength,

interval

4000

we may compute the

8000 A with A

6000 A as the

gfl) curves of a simulating multi-

layer having various total optical thicknesses A.

C;05

Fig. 10-7 g(A) curves for the exponential n(d)-layer of various optical

thicknesses A.

INHOMOGENEOUS LAYERS

465

As an example we take an exponential (c5>profile between n = 1


and n = 2 (corresponding to a hyperbolic n(z)), insert 20 layers equidistantly
and choose in turn A = A /4, A/2, 3A /4, A 2A The optical thicknesses
are then 75, 150, 225, 300 and 600 A (generally A/fc). The corresponding
curves are shown in Fig. 10-7.
The A /4 case is the vertically inverted part of the zero peak in Fig. 10-6.
.

Some further segments of g(<p) gradually come on the scene with A increasing.
Let us tentatively delete the
start

with 1.339. This

is

the

first

first

eight layers so as to have

approximated by the 12 remaining

layers.

The

tail

an exponential n(d) layer of total


X = 6000 with a discontinuous jump 1/1.339 at
b) example of the antireflecting effect of an inhomogeneous

layer with a profile according to next figure

thickness

realistic

x and 2x

A/2,

now

of the profile and the

Fig. 10-8 a) reflectance curve g(A) of


optical thickness 2X,

the front,

value of an exponential n(<5)-profile

and with
6000 A.

total optical

OPTICS OF THIN FILMS

466

value n

12 layers

2 remain unchanged. The total optical thickness of the remaining

is

again supposed to equal 2X

shows that

Fig. 10-8a
is

q(X) oscillates

about approximately 2 %, which

the value of the Fresnel reflection coefficient rl x

This

may be

interpreted as the result of taking the

rn

fe

1.3,

approximately. Since

in Fig. 10-7),

we have

fe

(10-44a)

An

medium of refractive

be very small (compare curve 2X

will

to a first approximation
r

Fig. 10-9

1/1.339 step.

?e

concerns the inhomogeneous layer seen from a

where
index

on the

sum

oi

(10-44b)

r.

exponential w(<5)-profile with discontinuous jumps at the

boundaries such that r 01

This addition of extra amplitudes

is

= r12

typically applied as

an extension

of the method based on the summing of simple reflections, Eq. 10-40.


In the present interpretation we combine the exact approximation of fe

by inserted
in 10-8a

is

profiles

of course entirely

As a next
12-layer profile

jump

sum by (10-44a, b). The curve shown


computed by the inserted profile method.

with one simple

step let us replace the supporting

by a glass of usual refractivity

(Fig. 10-9).

medium of

1.52, thus

the present

forming a downward

INHOMOGENEOUS LAYERS
Since

1.339

is

467

very nearly as 1.52

2,

we have an

additional Fresnel

amplitude at the output, of equal magnitude but opposite sign with r 01 .


Thinking in terms of simple reflections we may say that on the condition
that the exponential profile will be A /2 thick, there will result zero reflection
at A

This situation has already been predicted within the

mation, 10.4.2. The design will

now be checked by

the

WKBJ

approxi-

method of inserted

shows the resulting antireflection curves for A = A j2


of about the same order as that of the simulated
antireflection bi-layer ( 3.4.1) so that the method must be regarded only
as another means of obtaining a truly zero minimum.
profiles: Fig. 10-8b

and X

The

selectivity is

has heen shown in Ch. 9 that the inhomogeneous layer is the

optimum
means of obtaining broad-band antireflection. The practical
limitation is the initial jump from the air to the realizable starting value.
There is more scope for applying inhomogeneous antireflection layers in
the sphere of high-index ir substrates where the initial jump from the air
plays a minor part in the overall improvement. Also, wherever two materials
of different refractive index are to be matched, the inhomogeneous layer
should be the best solution. However, the practical production of inhomogeIt

theoretical

neous layers
(iii)

still

seems to be in the

initial

phase,

Despite the existence of a conversion theorem for the n(d) and n(z)
solutions,

it is

useful to have a direct formal

n(z) profile. This

the ^-functions if

The

may be accomplished

we proceed

means of integrating the

with a program for computing

in the following way:

interval of integration <0,

h}

is

divided into k segments of equal

length hjk, the corresponding optical thicknesses being given by

Ad v

n(z v

)^ =

nv

(10-45)

z v are the abscissae

e.g. in the centres of the segments, k should be reasonably high so as to truly contour n(z) in its substantial features.

The

total optical thickness is

hence (10-45)

may be

approximately

= Zd v =

^Zn

(10-46)

cv6

(10-47)

written as

Ad,

= -p-d =
2

OPTICS OF THIN FILMS

468

If the case

is

treated as a multilayer with relative optical thicknesses c v

then the results are computed in dependence on


the scale

may be

recalibrated in terms of

8jL

q>

2nk~ 1 8 whereupon

If desired, the ratio 5/X

may

replaced by hjX by means of (10-46).

An

important practical improvement can

now be made by

replacing

the relative thicknesses {c v } by the proportional sequence {n v } already read


off the interpolating

graph and tabulated in the data sheet as the refractive

INHOMOGENEOUS LAYERS

469

indices of the inserted profile. This simplification

the <p-scale in that the independent variable


the computation, but the results are plotted

is

is

made good by expanding

taken

2 v -times

on a normal

smaller in

p-scale.

As an example we take a linear profile n(z) modelling the inhomogeneity


of a high-index layer ( = 2.2), possibly due to some irregularities in the
evaporation process. (Some kind of inhomogeneity is occasionally assumed
as a perturbation

on the homogeneous model of thin

films, [4], [19].)

We shall suppose the refractive index to vary in a weaker and a stronger


way, the number of inserted layers always being

10.

n changes between 2.15 and 2.25:


wv

2.155

+ (v- 1)0.01,

Fig. 10-10a, b, c Effect of inhomogeneity

on

2.2 range) in three typical parameters.

sidered as indicated in text

curves

l,2...9

(10-48a)

optical performance of a single layer (in the

A weaker and stronger inhomogeneity is con-

(b), (c).

Curves

(a) represent the

homogeneous case.

OPTICS OF THIN FILMS

470

n changes between 2.05 and 2.35:

nv

Owing

2.065

(v

1) 0.03,

1, 2, ...

(10-48b)

to linearity, in both cases

Z
Taking a 10 step in

(p,

nv

10 x 2.2

22

we have a dummy

step 10/22

0.454 682 in

the computations taking the sequences (10-48a, b) both as refractive indices

and as relative thicknesses.


The results of the computations are
typical effects of inhomogeneity
(i)
(ii)

visualized in Fig.

10-10.

Three

were considered:

change of reflectance curve

(Fig. 10- 10a)

method when measuring

misinterpration of the Abeles

the refractive

index (Fig. 10-10b)


(iii)

the impact

In the

on

first

ellipsometric data (Fig. 10-10c).

respect there

substantial difference between the layer

is

working in the A/4 or 1/2 conditions. In the former case the effect is negligible,
whereas in the latter it is quite pronounced. There is a substantial reduction
of energy
well.

This

level at the turning point, this

may have

consequences in optical monitoring techniques and

The

in systems using A/2 layers.

mentioned by Clapham in

As another example
type

G3LG 5-9-5,

being slightly shifted in phase as

case of the

Fig. 10-11

trough as indicated by curve

producing nonhomogeneous

antireflection layer

shows the study of a

With the

see 3.5.3.

1:2:1

one such instance.

[19] is

indices 2.2/1.47

it

DHW

filter

of the

has a very shallow

If the evaporation process is susceptible to

layers, then their effect will manifest itself

mainly in the A/2 components. Hence the inhomogeneities by (10-48a, b)


were placed in the two spacer

layers, the results being curves

The maximum of

and

x is shifted

Inhomogeneity (apart from sheer production errors in

may

therefore be responsible for

some of the

theory and experiment with these


Since the Abeles

method

is

<2>

and

<3>.

distorted into a conspicuous trough.


relative thicknesses)

typical discrepancies

between

filters.

in principle

most

sensitive in the A/4 condi-

which is at least roughly respected in experiments, the analysis for (ii)


was carried out for <5/A = const = 0.25, the variable being the angle of
incidence (Fig. 10-10b). Graphical interpolation of the results shows that
tion,

the error in n incurred by ignoring a possible non-homogeneity of the given


material

is less

than 0.003. This

is

the

same order of magnitude

accuracy obtainable with the method and

may

be regarded as

as the best
negligible.

INHOMOGENEOUS LAYERS

it is

471

Unless a net of curves for various adjacent refractive indices is available,


impossible in the case (Hi) to extract from Fig. 10-10c the erroneous

parameters

n,

h of a layer considered homogeneous.

the A/2 condition

is

at least clear that

It is

again more dangerous and, further, the parameters

measured with an inhomogeneous film differ by more than is the


accuracy of the method from the values to be expected with a normal film.
actually

This

is

particularly true of the angular difference 8 P

8S

90

6000

5000

5300

6200

6100

eooo

maximum of a G3LG 5-9-5


due to inhomogeneities of the spacer layers.

Fig. 10-11 Distortion of transmittance


filter

DHW

10.8 Notes on the preparation of inhomogeneous layers

The problem of producting an inhomogeneous

layer

is

closely linked

with that of mixing an intermediate index n from two materials such that

n\

<

<

This

may be accomplished

either

by evaporating a defined

mixture of two technologically suitable materials from one boat, or by


simultaneously evaporating the two components from separate boats keeping the deposition rates constant.

An

example for the

CeF 3 and CeO z

[20],

first

method

is

or of cryolite and ZnS

the evaporation of a mixture of


[21],

The second method has been

472

OPTICS OF THIN FILMS

particularly studied

being

Ge and ZnS

mentation, but

it is

may by

deposited

by Jacobsson and coworkers, the materials

[22]. It

in question

more complicated experimental imple-

requires a

more general in that the instantaneous refractive index


by the relationship between the two rates ot

controlled

evaporation (the accomodation coefficients being regarded as constant.)


In any case, the refractive index formed is the result of combining the
molecular refractions of the two materials proportionally to their weights
per unit volume.

Supposing that the materials obey the Lorentz-Lorenz theory of


dispersion, the governing formula

tf

where
p

is

w lf w2

-l

is

nl-l -^

Hr
v=i,2
+2

(10-49)

pv

ft,

w t + w2 =

are relative concentrations by weight, with

1.

density of the materials.

The concentration wv by weight


the formula (denoting by

wv =

M,

M M
t

is

related to that

M
M
v Kp
w 2 = -^- =
w +M
-rr=
M M
Vp
v

p
~-^-

t>

was supposed that the volume

it

sum of the component volumes

V12

This

Vp

of the mixture
is

(10-50)

where

by volume vv by

the respective masses)

is

equal to the

not necessarily the case when

evaporating the mixture to a thin film and slight discrepancies

caused by
pancies in

intrinsic reasons the refractive

computed. This
It is

index of the mixture

it is

is

greater than that

is

possible to deduce basic relationships that

development of the process to reproducible

Inserting (10-50) into (10-49)

we

to be taken.

may

is

simpler than (10-49), but

it

guide the

results.

eventually have

fer-i
n + 2
v=i,i 4^S
n + 2
which

be

effect is called optical exaltation.

with these provisions that the subsequent theory

Nevertheless,
practical

may

Even with massive materials there may be discrethe use of the mixing rule and it sometimes happens that for

this effect [21].

must be admitted that

do-so
it is

in practice

work by weight concentrations than by volumes, particularly when


handling the materials in powder form. It is therefore expedient to summarize
easier to

the relationships between the corresponding quantities.

INHOMOGENEOUS LAYERS

Given the weights

473

and

combined into an evaporant mixture,

then the concentrations by volume are

Vi

and

similarly for v 2

It

may

pl

may be

p2

p2

(10-52)
2 pi

computed that

+ V2 p 2

Af t/p!

hence the formula (10-50)

+ vz

further be

\__ V
P

Vi

v,

iPi

(10-53a)

v 2 p2

w.

2 /p 2

(10-53b)

P2

Pi

rewritten as

W1P2

w.

(10-54a)

W t p 2 + W 2 p!

Pi

or as
w,

fiPi

iPi
(v 2

(10-54b)

t>,

v2 p2

and w2 again being obtained by an exchange of the

subscripts

and 2

in the right-hand sides).

Let us

we

now return to (10-51) and solve for .

After some manipulations

arrive at the formulae

+ 2(n\v + n\v 2) _ n\ - at^ _


1 + bv
2 + n\v 2 + n\v
_ nfPi + [!(P 2 ~ Pi) ~ ap 2 ] w
Pi + [(P2 ~ Pi) + b P 2 ] Wl
n\n\

(10-55a)

(10-55b)

where

a=2

n?

b=a
2

(10-55c)

Whether mixing by volume or by weight, these are hyperbolic


shown in Fig. 10-12 as cases 1 and 2.

curves,

graphical examples being

2
modification of this procedure consists in taking n

additive part of molecular refraction. This

adopted by Jacobsson in paper


[23].

[22],

as the

Drude theory of dispersion was

but later both alternatives were followed,

474

OPTICS OF THIN FILMS

The denominators of the type n 2

2 are

now

omitted in (10-51)

and one obtains


n

which

is

vtn

contained in (10-55a)

instead of v x

(10-55b)

v 2 n\
if a

n2

n\

again obtained

is

{n\

and

n\

if these

2
)

vt

new

(10-56)
0.

Introducing

values of a

wt

and b

are adopted.

may be

(10-56)

dielectric constant

is

interpreted as a linear mixing rule for n 2 ,

i.e.

for the

Finally let us mention a simplification of the dispersion formula which


normally allowed with gases, where n x 1 and to a good approximation
2
it

where p

p(

1)

Lorentz-Lorenz theory and p

2/3 for the

=2 "for

Drude's

theory.

The

refractive index

is

= v^i +

then computed by the mixing rule

v2 n 2

+(w 2 p

(wip 2 )ni

)n 2
(10-57)

wp 2 + w 2 pi

sometimes named after Biot-Arago.

Applying

we

this simplified

obtain the curves 3 and

A
below

approach to the case computed in

Fig. 10-12

4.

computation following Drude's theory would give


but above 1, 2. The difference relative to 1, 2

3, 4,

negligible considering the factors that are not

results lying
is

practically

under control.

Fig. 10-12 Refractive index of a mixture

of

ZnS

(2

(!

4.08, q 2

2.28, @i
4.1) and Ge
5.4) computed by the

Lorenz theory, using volume

Lorentz

and weight concen3 and 4 represent


analogous functions based on the Biot
Arago mixing rule with /? = 2/3.
concentrations,
trations, 2.

1.0

0.75

0JS

025
V, Ot

Wi

1,

Curves

475

INHOMOGENEOUS LAYERS
Having now a complete

set of

formulae for the mixing of an

inter-

mediate refractive index we may proceed to the production of an inhomogeneous film. We shall assume with Jacobsson that the deposition rate by

mass per unit

area, interpreted as a time derivative m',

is

a linear function

of time

m'v (t)

m'v0

m';.t,

1,

(10-58)

where the second derivative

m =

m'vT

is

m'v0

a constant determined by the rates m'v0 and m'vT at the start and end of the

T of its duration.
Operating two boats with the aim of producing a monotonic

process and by the time

<

function n(z) one has for t

n2

>m

m'10

2 o,

m'1T

the relationship between the thickness h


is

<m'2J

establishing

must starry
deposit^ during a time
system.
measured from the input boundary of the/>mpleted

The process of computing the function


where z

n(z)

z(t)

Obviously

= (<2. + 2k

V + -(
+
V s At + t Cf2
2 VPi
P2/

p2 /

V Pi

Introducing the quantity

Pi

P2

and noting that


h

(10-60)

increasj;

may be

z(T)

= AT + -i-CT 2 = \{A +

solved for

-a +
t

Uh^-b^J^
B-A

(discarding the minus sign with the square root).

B)

/,

476

OPTICS OF THIN FILMS

Given the rate functions (10-58) we may compute the


instantaneous
concentrations by weight using (10-50) with the differentials
AMv = m'v At

Then

^ =

w,
m't

+ m5o

mio

m'z

-m; )t/r
+ KT-ml + mS T -ffi;

'<o

)f/T

'

Replacing t/T by (10-61) and introducing (10-62) into


(10-55b) one obtains
n 2 as a function of z/h, i.e. the inhomogeneous profile n(z) is now
determined.

For practical purposes it is more convenient to replace the weight rates


m'v by the rates of growth c v of the geometric thickness, which are
directly
It holds that m'v (t) = pc(/).
Let us apply this computation to the case where the material
1 is
Nporated with a rate increasing from to c 1T , while that of material 2
decNses from c

controllable during the evaporation.

20 to 0,
c i(0

i.e.

c iT

C2(0

y,

(i-y)

c 2o

Then

B =

c20 ,

Denoting c 20 /c 1T =K ik,d using


one eventually obtains
n

c 1T ,

c 1T

(io. 55b ) for the

)='^-^L +

(2

CT =

a(n 2

'

c 20

Drude dispersion

theory,

-nf)

(i^op"+ (.--i)J

(10- 63)

This function represents a set of curves


resembling hyperbolic transitions
tween t and n 2 , the curves being concave
for small ( < 1, say) and
convex for large a.

When

1,

one obtains
n

i.e.

the dielectric constant e

{z)

n2

n\

+ {nl-n\)^

is a linear function of z\d. This


is a type
of inhomogeneity for which an explicit
solution exists in terms of Bessel's
functions of order 1/3 (see 10.2.2).

Another explicit solution discussed in [23] is


obtainable for a = (n. In,) 2
Bessel's functions of the order
2/3 appear.
It is doubtful whether any
further cases of inhomogeneity of the

when

(10-63) could be solved in closed form.


Numerical integration by the

type

method

INHOMOGENEOUS LAYERS
of inserted multilayers

a far more convenient means of inspecting the

of profiles.
for the function (10-63) with n t =
computation
a
The results of such
in [24], a feature of particular
=
displayed
2.35 are graphically
1 .35 and n

potentialities

is

477

of a given

set

a considerable scope for

interest being that there is

fitting the rate factor

n t so as to make the integral reflectance of the


coating less than 0.5%. This seems to indicate that even a moderately
precise control of the evaporation rates may lead to an effective reduction
of reflectance. In terms of our former experience we may say than any
c 20 /c 1T to the substrate index

is a good antireflection coating.


layers including the effect of
inhomogeneous
Numerical studies of
metallic absorption are performed in paper [25].
In conclusion let us mention that as an alternative to the physical
mixing of molecular refractions so far considered there exist methods of

reasonably monotonic profile

optical mixing based


Fig. 6-2a,

b we may

on the concept of equivalent

infer that for very small

index. If

phase angles

we look

<p, i.e.

at

for very

small thicknesses of the constituent layers in the basic period, the equivalent
index is almost non-dispersive and the equivalent optical thickness is a linear

function of the actual phase thickness of the partial layers.

By stacking many periods of type (cB)


the choice of

c,

A(cB), one

may control, through

the effective refractive index thus produced,

it

mostly

holding that n A ^ e ^ n B Details of this are summarized in [26].


The elements of optical mixing (independent of the concept of equivalent index but implicitly using it) are contained in Geffckens' patent [27].
.

The production of an inhomogeneous layer is also outlined there.


The mixing of dielectric and metals is the subject of papers [28, 29].
A nomogram for computing the refractive index of such mixtures is described
in [30].

References

[11

[2]
[3]

[4]

[5]

P.

10

Drude, Wied. Ann., 43, 136 (1891).

W.
M.

Geffcken, Ann. Phys.

(5),

XL, 385

(1941).

XLLX, No 7 (1948).
R. Jacobsson, Light Reflection from Films of Continuously Varying Refractive Index,
in: Progress in Optics, Vol. V., North Holland, 1966.

E.

[6] S.

BrdiCka, Bull. Ac. Teh. Sci., Prague,

Kamke, Differentialgleichungen reeller Funktionen, Berlin


Monaco, /. Opt. Soc. Am., 51, 280 and 855 (1961).

F.

[7]

G. Bauer, Ann. Phys.,

[8]

H. Schroder, Ann.

(5), 19,

434 (1934).

Phys., (5), 39, 55 (1941).

1930, 25.

478

[9]

OPTICS OF THIN FILMS


P. Epstein, Proc. Nat. Acad. Sci.

M.

[10] L.

Brechovskich,

Waves

in

USA,

Layered Media, Academic

[11] Z. Knittl,

Czech.

J.

16,

627 (1930).

Volny v sloistych sredach,

Moscow,

1957; English transl.:

Press, 1960.

Phys. B. 18, 763 (1968).

[12] F. Abeles, see ref. 8. in

Ch.

1.

[13]

A. Vasrcek, book, see

ref.

[14]

D. Kossel, Optik,

266 (1948).

[15]

A. Vasi&k, Journ. de Phys.

[16]

M.

3,

13c) in Ch.

1.

et Had., 25, 188 (1964).


Schlick, Thesis, University of Berlin (1904).

[17] F. Bolinder, Fourier

[18]

Transforms in the Theory of Inhomogeneous Transmission Lines,


Kungl. Tech. Hogsk. Handlingar, No 48, Stockholm (1951).
B. G. Kazansky, Trans. 1st Symp. INTERKAMERA, Prague,
329.
1963, p.

Clapham, Trans. Electro-Optics International, Brighton 1972,


Fujiwara, /. Opt. Soc. Am., 53, 880 (1963).

[19] P. B.
[20] S.
[21]

[22]

[23]
[24]
[25]

p. 277.

Y. Basset, Journ. de Phys. et Rod., 12, 65 (1951).


R. Jacobsson, Arkiv f. Fys., 24, No 2, 17 (1963).
R. Jacobsson, Opt. Acta. 10, 309 (1963).
S. Heavens, Thin Film Physics, Methuen, London, 1970.
H. Anders and R. Eichinger, Appl. Opt. 4, 899 (1965).
O.

[26] J. T.

Cox and G. Hass, see ref. 16. in Ch. 3.


German Patent 742463 (1942).

[27]

W.

[28]

R. Jacobsson and

Geffcken,

J. Martensson, Jap. J. Appl. Phys., 4, (suppl.), 333 (1965).


Stensland and L. E. Flordal, Institute of Optical Research, KTH, Stockholm,
TR 1973-07-30.

[29] L.

[30] P.

W.

Baumeister, Opt. Comm.,

1,

Nol, 17 (1969).

A. Schelkunoff, Comm. Pure and Appl. Math., 4, 117 (1951).


P. G. Kard, Izv. Ak. N. Est. SSR., t. XXIII, No 2, 113 (1974).

[31] S.
[32]

[33] S.

Kolnik and K. Macak, Czech.

Problems
10-1

J. Phys.,

18,

749 (1968).

10

Prove that when expanding a certain inhomogeneous profile w(z),


I z I * to /Mimes the length h, the total optical thickness 5 is
/i-times^ the value integrated with n(z) over <0, /j>. Hence 8 hn,
where n is the mean index of refraction computed over any reference
thickness.

10-2 Taking a phasor function of the

cos Pz

form

e exp (jpz)

discuss the travelling

and standing aspects of the corresponding


harmonic wave for various e. (After Schelkunoff, [31]).
10-3 Try to present a general proof of the reciprocity theorem of 10.6.2.

0-4

What

is

the n(z) profile if

(<5) is

hyperbolic ?

INHOMOGENEOUS LAYERS

479

10-5 Carry out the detailed specification of (10-34) for a homogeneous layer.
10-6 Generalizing the discussion around Eq. (10-44) for two jumps at the

boundaries
<5

of an inhomogeneous

and 8

A,

show

that the

(<5)-profile

sum of complex

extending

between

amplitudes

may be

written as
+00

dd

+
where

Tl(x)

is

ri g

exp

the rectangular function.

If n(S) is exponential as

by (10-41), the central term amounts to the


Fourier transform of the IT function. Rededuce (10-40).

11
Thick layers
Interference films are inevitably produced

material

and mostly

on some kind of

interact with the receiver devices

substrate

through a number

of zig-zag reflections inside the supporting element. The path differences


being extremely large with respect to Jhe wavelength of

light,

we

are led

to the concept of the thick layer with appropriate changes in the computing
techniques. This chapter

is

devoted to the analysis ot some basic elements

of this kind.

11.1 Planeparallel glass blank with coatings

The element most often encountered in practice is the simple thick


The parallel-sided optical medium may be completely lossless (plates

layer.

of light

glass),

absorbing

very slightly absorbing (plates of heavy glass) or markedly

(plates

of semiconducting materials in the

ir).

It is

therefore

Fig. 11-1 Notation used in the simple

thick layer.

* is attenuation of energy

across one traversal.

THICK LAYERS

481

expedient to include substrate absorption in the formulae.

shown

the thick layer are

The notations

for

in Fig. 1L-1.*)

Experience shows that no interference effects take place on thick


films.

The

criterion of being thick does of course

maticity of the illuminating light.

What

depend on the monochro-

thick for white light

is

is

not thick

sodium or cadmium lamps and, in the recent development, almost


nothing in the laboratory is thick enough for laser light. The theory of

for

interference states a condition for the fringes to be visible: the path difference

incurred between interfering rays must be substantially less than the coher2
ence length A /AA, where

AA

the width of the spectral line. This applies

is

to spatial as well as to spectral fringes, the latter intepretation covering


interference films.

We

shall

have in mind plates some millimetres or centimetres thick,

illuminated by white light or by the quasimonochromatic light emerging

from the

of variable monochromators such as are used in spectral

exit slits

photometers.

of

The generally accepted method of computing the resultant intensity


add the partial reflections of energy. Setting up the infinite

light is to

geometric series in accordance with Fig.


instead of complex amplitudes, one

is

11-1,

led to the

_A + (*L-8lQ!)(&*

gt

The coefficients

q', %'; q", t"

at the two boundaries, but they

but adding up energies

formulae

^,

4A*

may result from simple Fresnel reflections


may as well be due to some interference

systems formed on either of the boundaries. Most often


latter type, q", t*

(1Mab)

q', t'

are of the

of the former.

The sums (1 1-1 a, b) have been obtained on a rather intuitive basis, but
a deeper substantiation may be given in referring to the Fourier expansions
introduced in Sect. 7.1.2.*)

Consider

Then (11-la. b)
two expansions (7-9, 14). This

the thick layer to be non-absorbing.

first

are identical with the absolute terms of the


is quite natural if we describe the

observation of the thick layer by integrating

*)
The
upon one

corresponding to

*)

reader's attention
traversal of

is

layer,

Another mathematical treatment of this problem with respect to the concept of


been given in [1]. Tandem arrays of incoherently coupled

partial coherence has recently


filters

* for the attenuation of energy


* 2 in the notation of Ch. 4.

drawn to the new notation

a (thick)

are treated in

[2].

OPTICS OF THIN FILMS

482

the functions (7-9, 14) over the spectrum involved, possibly respecting the

Be

receiver.

the cos

( )

it

white light or even monochromatic

type changes sign

contribution to the integral

terms (11-la,

where the

b),

many

is

q, x

each integrand of

light,

times on a thick layer and

its

physical

zero.

There thus only remain the absolute

may

be functions of X due to some interfer-

ence layers present on the boundaries.

The averaging process may

also be applied to the absorbing thick

layer if the Fourier expansions are properly generalized,

The

[3].

the formulae (11-la, b) including the stipulation that (4-42')

result are

is

appropriate

is

being cons-

fort^:
It

may

be surprising that the interference flux of energy

idered in the theory of the thick layer. This

explained by the fact that there

is

a constant phase relationship between incident and reflected waves at the


second boundary whatever the thickness of the layer and wavelength of
light. The interference term P 2R of Ch. 4. has a fixed direction on the second
is

boundary and does not vanish during the averaging process.

A
is

practical situation involving the use of the formulae (11-la, b)

to find the experimental

the

commputed

results)

lossless substrate are given.

(11-la, b)
It is

(i)

Let

now

where

<W

expedient to
q', x'

first

(which are possibly to be compared with


^, 3~ measured on a complete

q', t'

when

the quantities

This requires an inverion of the formulae

1.

formulate the following problem:

concern a non-absorbing system,

ek

Qi

Q'

tr

<=

and we obtain as a reduction for rear

a-A
1

It is interesting

&=
is

Q' 2

")

2q'

r(x"

- a" - tf(2 -

(ll-2a, b)
i

that a similar manipulation eliminating the front reflection

leads to formally the

where (ll-3b)

arbitrary sytem

reflection

- <(2 -)

t'

t';

an
Then

q", x"

(although mostly a simple Fresnel boundary).

same

result

^Ll

T"

simpler than (ll-2b)

if

there

-^

is

(1 l-3a,

absorption in the rear.

b)

THICK LAYERS

483

Let us recall that in both cases the one-prime boundary must be nonabsorbing.

and

Fig. 11-2.
tions:

Then

The

substrate, too,

is

non-absorbing. The relationship between 8&

for various values of non-absorbing

g'

The values were chosen so

g'

as to cover a

shown graphically in
number of typical situa-

is

blank or antireflected boundaries, possibly also at 45 incidence.


the formulae are valid for the p-

and

s-polarizations and, for example,

for uncoated heavy glass gl assumes the value 16 %.


It is seen that with large values of g' or 3%, the g" of the chosen range

are negligible; for small values of g'

we simply add

g" to obtain

intermediate values the result must be computed by the

full

For

ffl.

formula

(1 l-2a).

Fig. 11-2 Graphical relationship between

& and q' for several values of rear


non-absorptive reflection
scale

& q',

q". Vertical

horizontal

parameter

g'; fixed

g".

Expressing from (ll-2a)

we may
one

state that % is

>

Q"

'

e Q "(2

- M)

always smaller than the simple

sum

g'

which

g",

intuitively regards as a first approximation.

The graphs
if

we read

q'

for the transmittances are contained in the

x',3t

same

figure,

&~.

An intuitive approximation for transmittance is 9~ = t't" which isonly valid for small g'g". Actually, 9~ is always greater than the simple
product, hence t' is smaller than the ratio 9~\x". By (ll-2b) it is simultaneously greater than 9~i*.
(ii)

As a second problem
the

let

us have an absorbing interference system

boundary, the second boundary bearing a lossless


g' hence Sl
$~ = #~
L
R =
L , but still t'r = t'l
R
L

first

Now ek

&

layer.

on

OPTICS OF THIN FILMS

484

In this case the specimen must be measured for reflection on both sides
and the reduction should start with the q'l case. Then the non-absorbing
rear boundary is seen first and we may use (1 l-3a, b) to reduce for q",
thus
,

^l ~

Q"

we

Finally, to determine g'R

tL

l- e "(2-^ L )
first

use (11- la) to express for case

and

illustrated
is

L the

e "(2

(ll-4a) has the

by the graph

it

reduced values (ll-4a, b) we eventually have

g'

The formula

(ii)

- qLq"

x'

(ll-4a, b)

l-e"(2-<L)

t2

Inserting for

ti

- ^l)

possible with (ll-4b, c) because

structure as (ll-2a)

same

in Fig. 11-2.

No

it is

t"

and

is

again

reasonable in-advance calibration

not

known which

values

F,

0t^, 0t^

are compatible by the energy balance for various metals. The formulae must
be used with the particular values measured.

11.1.1

A pile of plates

Having more

parallel plates in

films. Again, a recursion process

tandem

analogous to a stack of

is

may be used summing up

the repeated use of the formulae (11-la, b). It

is

intensities

irrelevant whether

we

by

start

recursion from the front or rear. *)

on a remarkably simple form


are non-absorbing. Writing for one pair of boundaries

The computation

jr

takes

III*

1-(1-T )(1-T 2 )
1

if all

III?
T!

T2

the

media

(11-5)

T,T 2

This recursion process does not consider the possible formation of Brewster superposition fringes, which are low-order extrema of interference due to zig-zag reflections
along considerable paths in small rational relationships. The risk of running into

*)

such

situations in

normal thin film practice

is

very small.

THICK LAYERS
we may

485

express the result as

-UJ--

Repeating the computation by


the pattern (11-5)

we

(1 1-lb) for

more boundaries and using

arrive at the formula

(fc

Y,

1).

number

of boundaries (11-6)

11.2 Cemented plate

A thin film system on a glass substrate is sometimes used in the cemented


condition (Fig. 11-3). Considering the symmetrical condition
glasses are identical

when

the

and the outer surfaces have the same treatment, we

obtain by one recursion step according to (11-la, b)

g"(l

~ ?'') + fr" ~ Q")ie + (t 2 - gV 2 ] V 1

9
<y

(n _ 7a)

TT

(ll-7b)

where
g>

;r'

ot.R-p

an interference

system in the cemented condition.


Fig. 11-4 Graphical relationship between
St

and q

in the

cemented case for several

values of the outer non-absorptive


reflections g".

2 2/o/ 4
-Q 2\
)Q

(r

Fig. 11-3 Notation for

2qq"

(ll-7c)

OPTICS OF THIN FILMS

486

q l and -ate $tK 0i L ,


even if the cemented system in absorbing. The plots of the formulae for the

Owing to symmetric embeding of the

lossless case are


It is

shown

layer q k

in Fig. 11-4.

only for the lossless case that a relatively simple formula obtains

for reducing for the outer reflections:

m"~

0-S

- 4q" +

(t being then equal to

much

3q"

/+
2

(11-8)

2q"t"M

q).

when

perspicuous situation arises

less

the cemented layer

is

absorbing, q and t cannot be separated from (11 -7a, b) and reduced, unless

we know

the corresponding absorption a.

If the substrate is non-absorbing there

from

the*

measured si

is

a way of computing a

0t

$~.

They are

related

=
by

the equation

\\-0tQ"
where

&

and 3~

The equation

\-Q"J

contribute to the absorption of energy in


to 100

The

denoted in Fig. 11-4.

refer to the auxiliary subsystems

two internal encountering waves


the cemented systems, si is referred

(11-9) expresses the fact that

of incident energy from the


quantities 3&,

air, (see 2.6.6).

F are obtainable from

01,

F by applying the reduc-

tion for the front non-absorbing reflection q", Eq. (11 -3a, b), with -properly

adapted notations.

Hence

"
1

q"{2

&-

-m)

q"(2

(11-10)
0t)

Inserting into (11-9) leads to the result

i.e.

the actual a

Now we
t

n"

may very nearly be taken equal to the

are able to

\~

n"

(t

q) (t

global si.

compute

g)

=
1

(e

2q) e
a = 1 -sf

where

THICK LAYERS
and the reduction

487

is

+{\-2q")z 2q"-^-x"z
^r

q"

q" 2

(1

11.3

2q")(2eq"

1)

9~

(11-1 la)
t"

(11-1 lb)

The cube

new problem

inside a

arises

when

taking into account multiple reflections

cemented cube.

From

the incident bundle /(Fig. 11-5) there

now form

four bundles

of rays:

P
L

going right

going upwards

going

left

R reflected downwards
It

proves

difficult to

sum up the multiple reflections by simply

the sides of the cube in the hypotenuse

new scheme must be

and proceeding

used, dissecting the cube into fictitious elementary

configurations like Z, N, where the multiple reflections

Fig. 11-5 Notation used in the general

theory of the cube.

mirroring

as with a thick layer.

* is the attenuation

of energy in glass across the path equal


to the cube thickness.

may be

easily

OPTICS OF THIN FILMS

488

counted and computed. Further bars are then added to these patterns,
forming

Z
Eventually the

cube

full

obtained, there always being a simple pattern

is

for counting the reflections.

A standard approach would be to consider the outer walls of the cube


as essentially non-selectively reflecting with coefficients q", t"

q"

The hypotenuse being provided with some reflecting


systems of parameters q, t, a, our objective would be to compute the relative
on each of the

walls.

intensities in the P, T, L,

channels.

more general formulation of

as having

own

the problem

is

to consider each wall

and
some regions of the spectrum substantially reflecting. This may
bring about some interesting interaction between the five reflecting surfaces,
resulting in the mixing of differently filtered fluxes. The scheme will therefore
be carried through without any intermediate simplifications possibly due
its

transfer coefficients, possibly wavelength-dependent

at least in

to q" being small.

We

shall use the following

The

basic orientation of the cube will be as in Fig. 11-5, with the walls

denoted by A,

B,

C, D.

system of notations:

The sought

transfer coefficients will be denoted

T ba

Pba>

L123

a R ba

where the subscript consists of a symbol for the

Our method

ing the input wall.

will

(H-12)

full

cube and

letter indicat-

be to reduce the computation to ever

simpler elements.

As a

first

step

we explode

the cube in the following way:

A
giving rise to one bar

and one

torso,

IZ

DA

which in the following step

looked at in two orientations with respect to oncoming

will

be

light:

lA

Id

The letter subscripts indicate the input wall if the symbol is regarded as one
and the same torso of the above indicated exploding process. A certain

THICK LAYERS

489

subscript letter then implies certain other subscript letters in the coefficients

of the cube walls operating in the particular summations for the

q, x
L,

how

Supposing we know

ND

RZ)A

(ll-13a)

ND L ND ^ND

(ll-13b)

'

Fig. 11-6 Interaction between the

first

subtracted bar (shown dashed) and

the remaining Zl torso. Bar and torso considered contiguous, hence


glass absorption

we can

set

up

explicitly present in the

is

no

sums.

the series for multiple reflections between the element

the recently subtracted bar as follows by Fig. 11-6


1

T,

compute

to

zia TziA LZA

P,

fluxes.

and

write, with

and

QD =

dHnd>
Piza

Pa a

I-zaSdTrdO

Pza

-ziaTpjd6d

+ Sd^nd + 6d^nd

+) =

Qd
iZA

'zA

'-za'-nd^d
r

-1ZA

(11-H)

-ZA^D

Qd
R|ZA

I^ZA

1-z

a nuSd

The computation of (11-12) is thus reduced to (11-14) and to a further


computation of (11 -13a, b). Decomposing

Zl-Z-I
A

N-N*~
D

OPTICS OF THIN FILMS

490

7!

zfl
B

B_ 111

--,

PI

P
11

Fig. 11-7 Multiple reflections

when

the Zl -coefficients

and using
if

QB =

D
r
ZA

isolating the second bar, building

(a),

and

the reflection schemes according to Fig. 11-7

e BR NB

up

N-coefficients (b).

we

further write,

2A
~ TB

L ZA
I

>

L ZA

*ZA'nbb

"I

Qb

T'ZIA _
T'ZA

ZANB
~ gB

_i_

=
*ZA
ZA =

(11-15)

pX

*ZA H
"^ZA

^B
p_
r
ND

T_

p
r
ND

Qb

'ndLnb^b

~Z

"I

PzaI-nbGb

L ND
i

>

U ND
i

"+"

T ND P NBeB
Qb

NDT B

The computation of

D_

ND

__ D

"ND

'

(11-1 3b) is thus reduced

(11-16) to the computation of

za>

T ZA

NB'

T NB

ndj

T ND) L nd

L ZA ,

R ZA

L NB ,

R NB

(11-16)

ND^NB^B

R.

nd

by formulae

(11-15),

THICK LAYERS

491

K
N

\l

Fig. 11-8 Direct counting of the zig-zag reflections in the

"N

Z and

elements.

This

may be

carried out

PZA

by the schemes of Fig. 11-8 and we have

Lza

= *

*/JQcQ

'

(11-17)

TZA =

NB

^TATTC

RZA

JV QTQtfc
1-NB

TNB = ^T +
where

Q=

ND

The
subscripts

<% 2 x 2

QT A
(11-18)

Q TQ X QC

RNB

= ^V^a

q k q c .*)

coefficients are obtained

A and

6A

from

(11-18)

by interchanging the

C.

This makes the set of formulae complete. Fig. 11-9 contains a flow
chart of the interdependencies between the partial coefficients leading to a

2 A coefficient. The general process is too involved to be


an other way than by recursion. It is of course anemable
to numerical soundings by a computer.
particular final

written out in

*)
is

It is

only in these two sets of coefficients for the cube that the damping factor <&

contained.

OPTICS OF THIN FILMS

492

There are very many ways how, and degrees to which, the separate
on the walls and hypotenuse may be combined into any of

five functions

us suppose qb =
Then the L-channel obtains the product qx, which

the four output functions.

=
is

As a

very simple example

t d = 1.
1; t a
qc
a kind of mixing of the hypotenuse system with

PZA

let

itself.

Pe,A

Lba
-rBA

&BA

RZA

P*0

%o-l

*-ND

&H0

t
'HO

Fig. 11-9 Flow-chart for the combinations of the directly countable Z-

N-coefficients into higher-order torsos

It is easily

in t

is

seen that an

and the

and

final results.

upward or downward edge between

transformed in L into a

maximum

and

of parabolic shape with the top

reaching t =0.5, the width being equal to the space occupied by the edge.

maximum

two almost continuous edges of


two maxima of half the original height,
occupying the spaces of the original component edges.
Further, a

opposite slope will be

in i visualized as
split into

Further transforming capacities could be revealed in other channels


with other combinations of the wall functions. In this respect the cube with
general coatings may be regarded as a potential means of incoherent
coupling of the

five interference systems.

Such a coupling

effected with

an

THICK LAYERS

493

array of glass plates

wolski

is

already established as an extension of synthetic

for interference systems, as witnessed

methods

by the papers of Dobro-

([4], [5]).

Cementing more cubes together would increase the number of systems


coupled in

this alternate

the reflections

still

way, the method of decomposition in counting

being applicable.

The simple beam-splitting cube

11.3.1

We

now withdraw

shall

have the same

coefficients g", t* corresponding to

glass surfaces in

There

the general assumptions

on

the properties

specialize for the usual case that the four outer walls

of the cube walls and

bare or antireflected

normal incidence.

a substantial simplification of structure in the exact treatment

is

Q B = Q c = Qd ~ Q"> enabling the formulae to be written down


explicitly with only a small number of composite notations. We refrain

when Q\

from stating this result, because the case is simultaneously accompanied


by g" being practically very small (equal at the most to 0.08 the Fresnel
coefficient for heavy glass in normal incidence).
The simplified exact solution may then further be replaced by formulae
respecting only one*) traversal across the cube in each of the basic directions.

We

have
P
L

T =

<%%" 2 g

= 2^ 2 g"z" 2 gx

R = g\\

<^t" t
<% 2 t" 2

- 2<*VV)

(11-19)

These functions are displayed graphically in Fig. 11-10 for a non-absorbing


beamsplitter (g + x = 1) and g" = 0.05 or 0.01. Several damping factors
in glass are considered.
It

can be

verified

from the graphs and from (11-19) that


p

+ T = %x" 2 =

R + L
and

*)

e"(l

further, neglecting g" in t"

it

One

+T +

is

(1

R+L=^ +

zig-zag in a glass plate

2
entails a factor q" . It

is

^V
-

const
2

g"[l

g")

const

2
,

(2

<%)

<>U\

xW

energetically proportional to q", whereas in the

cube

therefore reasonable to regard (1 1-19) as a useful approximation.

OPTICS OF THIN FILMS

494

1-Ut'

>

pVO
,?,>\

&

-OK

005

The four channels of the simple cube when

Fig. 11-10

<2>. <>

which

is

q"

is

small.

= 0.01. In all cases * = 0.98.

Q"

@ q"

the energy balance for the cube as a whole, considering

three outputs. Total absorption

due to

si

0.05;

all

the

glass is then

- %

as if only one straight traversal of the cube were taking place.

Since only the outputs P and


light

when

R+L
Even

if

= 1-(P +

the glass

is

are as a rule functional, the loss of

must be borne

in

T)

= 1-

non-absorbing,

non-treated glass and about 2


effect

using the cube as a beamsplitter

mind when

loss

is

>

Gabriel and A. Nedoluha, Opt. Acta, 18, 41 5 (1971).


Baumeister et al., Opt. Acta, 19, 853 (1972).

[1]

C.

J.

P.

W.

[3]

Z. Knittl, Czech. J. Phys.,

[4] J.

[5] J.

B 13,

A. Dobrowolski, Appl. Opt.,


A. Dobrowolski, Appl. Opt.,

189 (1963).

9,

assessing the quality of the beamsplitting

11

[2]

,2

this means a 10
virtual loss with
with antireflected walls. This side-

system alone.

References

1396 (1970).

12, 1885 (1973).

THICK LAYERS

Problems

495

11

11-1 Prove that the equivalent of formula (11-6)

Compare

this expression

is

with the absolute terms in Kard's expansions

for qjx in 8.2.

11-2 Considering the thick layer as a reflection-reducing element prove that


its efficiency

in white light will be

maximum

if

11-3 Derive the formula for measuring the transmittance of a coated

specimen with respect to an identical uncoated glass in the reference


channel.
11-4

Note that

for

no absorption

in the hypotenuse of the simple cube

we

have
P(e)

T(i

e ); R(e )

R(i

where P(g) means P as a function of q,


11-5

Show

e );

!-(<?)

L(i

e)

etc.

that the transmittance of a glass slab in air (including multiple

reflections) is

2 "*

\+n\

12
Perturbations
We
thin films

have completed the presentation 01 the basic theory of optical


and of some design procedures now in use. The working hypoth-

eses, greater or lesser simplifications

We now

of the actual conditions, were sum-

to the point when it is possible


abandon some of the restrictions and accept the resulting influence as a
kind 01 perturbation on the standard phenomenological model of stratified
media. We thus come to considering the dispersion of dielectrics, their
spurious absorption due to scattering in the mass ot the film, and their
surtace roughness, giving rise to a turther scattering and modification of

marized in the introduction.

come

to

the reflectivities. These effects are of a physical nature. *)

When applying thin film theory in technical practice, one often encounters such

odd

in lenses etc.

effects as

cumulative

tint in

These technical factors

bloomed systems, obliquity

will also

heading of perturbations. The inevitable

may no doubt

be

classified as

effects

be discussed under the overall

toll

paid in production errors

a technical perturbation, too.

12.1 Dispersion of dielectrics


In the introductory chapter

we have

presented as one of the working

hypotheses of thin film theory the assumption of constant refractive indices

of dielectric media. The computed spectral parameters of thin film systems


are far less sensitive to changes in refraction than lens systems are in their
*)

Unwanted inhomogeneity should be added

in 10.7 as

item

(iii).

to this

list.

It

was already discussed

PERTURBATIONS

497

imaging properties.

Two

decimal places are generally sufficient in the know-

ledge of n to calculate the basic properties of most dielectric systems.

Weak

dispersions thus automatically cannot apply.

To

practical inference

as

one must consider the


and the actual spectral interval. The

assess a dangerous degree of dispersion

dispersion curve of a given material


is

MgF 2 Na 3 AlF 6
,

that the refractive indices of low-index materials such

Si0 2

SrF 3

TbF4 may

be considered constant, for

example, in the whole visible spectrum, slightly different constant values


being adopted in the near or far infra-red regions. Dispersion tables for

some of

these materials are presented in the

Parallel tables for

some high-index

play a significant role even

if

one

is

first

materials

columns of Table

show

12-1.

that dispersion

may

confined to the visible spectrum. Never-

most of the reasoning on classical systems was carried out on the


assumption of a constant n H This is because the salient features usually
analysed were distributed over a narrow region of the spectrum. Thus to
theless,

understand, for example, the operation of the stop-band of a tuned stack,

and steepness of its edges, the principal response of pass-band


monochromatic filters or the
design of simple antireflection layers, one did not have to consider the
dispersion of either n L or n H or any other index possibly involved.
Once the basic design has been achieved and it comes to realization, the
the location

ripple to outer extensions, the principles of

laboratory

is

induced to contemplate the perturbations that

may

cause

and measured performance. In the opening


stages, most of these may be blamed on the tuning, but when this is felt to
have settled down, it may come to other factors, at least in those cases where
the persisting deviations do some harm to the envisaged function of the
discrepancies between predicted

layer system. Thus, dispersion of dielectrics

account for a problem or to solve


Let us

first

of

all treat

may sometimes be invoked

to

it.

the problem in general. Speaking of dispersion,

one cannot, of course, compute the phase diagrams g((p), S(q>) of the dibut the ^-diagrams must be used instead, the required

electric stacks,

positioning of the prototype <p-curves in the spectrum having been specified.

Thus a dielectric (not necessarily alternating) system is fully defined


by the usual sequences {} of refractive indices and {cv } of relative thicknesses, with the additional stipulation that the latter set

optical thickness

values

value q

=
so

may be derived,

Q((p )
<p

A measured

for example,

referred to a unit

from the condition

of the dispersion-less phase diagram


27tA

is

at a reference wavelength A

q(<p)

These two

that a typical

be placed in

OPTICS OF THIN FILMS

498

Owing

to dispersion, the set of relative thicknesses {c v } defined for A

changes across the spectrum according to

C;

c,

"

"vA

(12-1)

vO
'vO

while the reference thickness

The

remains unchanged.

actual set of optical thicknesses seen in the stack at various

wavelengths

is

{A

The

c v; }:

dispersive change of the c v

by

(12-1) causes the

stack to assume different relative thicknesses at different wavelengths.

Table 12-1

The extreme
some numerical studies.

Dispersion tables of four typical thin film materials*).


blue region

is

formally extrapolated to enable

A(A)

MgF2

Si0 2

3000

1.384

1.515

2.558

250

1.512

2.500

500

1.509

2.450

2.745

1.507

2.410

2.657

1.504

2.372

2.564

4 250

1.503

2.340

2.512

4 500

1.500

2.313

2.471

4 750

1.498

2.290

2.443

5 000

1.496

2.269

2.4195

1.494

2.250

2.402

1.492

2.234

2.387

5 750

1.491

2.220

2.375

6000

1.489

2.210

2.363

6 500

1.487

2.195

2.346

1.483

2.184

2.334

1.478

2.167

2.324

1.474

2.160

2.322

1.471

2.155

2.320

3 750

4000

1.375

5 250
5 500

*)

The

ZnS

Ti0 2

1.368

7000
8000
9000

1.366

10 000

1.363

values for

MgF2

and ZnS were taken from

[37]

and

[38], respectively.

The

remaning two tables are modifications of dispersion curves given in [39], supported by
Brewster angle measurements. However, these choices should not be regarded as experimentally authoritative.

The aim of the

present section

is

to discuss the structure of the

means of visualizing the results. Anyone


possession of other data may then repeat the same scheme of analysts.
dispersion problem

and

find convenient

in

499

PERTURBATIONS

composed of two materials only and has


most of the cv0 are unity or rational numbers),

In the case that the stack

high internal tuning at A

(i.e.

is

one can interpret the situation in the following way:


Choose, for example, the high-index layers with c v0

as reference

and

define a variable unit optical thickness as

-^
"ho

A 3A = A

For a general wavelength A define a new

(12-2)

set

of relative thicknesses with

respect to (12-2), thus

Cva

For the H-layers

this

= Cvon

amounts to

c vX

nesses of the other layers changing as (12-3)

thickness being given


(12-2)

expresses

may

an

c v0

c H0 , the relative thick-

and the relevant unit

optical

(12-2).

be interpreted as an overall

shift

of the system, (12-3)

internal detuning of the L-layers with respect to the H-layers as

compared with the

by

(12-3)

"HA

v0

starting situation at

change of refractive indices finds

its

expression also in the Fresnel

reflection coefficients taking part in the interferences.


It is

these three changes that

may

cause some distortion of the theoret-

ical non-dispersive prototype-functions q(X)

when

inspected over a broader

spectral interval.

There was some arbitrariness in choosing the H-layersJbr reference.


In the practically important case that n L is almost without dispersion, we
could replace n H by L = L0 when computing A 0A by (12-2). The overall
shift is then zero and all the changes of A may be interpreted as detuning

of the H-layers by a formula of the type (12-3) where the subscripts

are

replaced by L.
-

Hewever, even now it

is

wise to be prepared to speak of shifts as well as

of distortions. Take, for example, the system


less

G in the dispersion-

assume values different from unity.


continuously changing, for example between 1 and

condition and
If c is

H H) L]

1 [(c

phase diagrams

let c H

is

obtained, continuously

filling

curve shown in Fig. 3-7 and that shown in Fig. 3-11 as case
said that the

jc/2

and

3ji/2 central

maxima of

the

2,

a series of

the space between the

first

2: it

may be

case were shifted

500

OPTICS OF THIN FILMS

to the

jt/3

and

2ji/3 positions,

being accompanied by simultaneous

this

distortions of the pass-band ripple.

Before analysing certain complex systems numerically,


in

some

let

us investigate

of dispersion in one layer.

detail the influence

A dielectric layer with dispersion


We shall make use of the formula for % resulting from (3-2b) because it
explicitly contains all the refractive indices.

will

That of the

be considered as A-dependent. Eliminating cos 2

q>

film,

denoted as n F

in the

denominator

we have
x

4w g [(

g)

(n F

n\n\n F

n%

2
)

sin

<p]~

Obviously, the extremes oft will be identical with those of the denominator. Differentiating the latter

2{n F

nln\n F

) n'F

sin

we have

2
q>

(n

2
-

(i)

two

Wo n g n F

x t- n F h F

Setting this equal to zero yields

no

n l)

s ^ n 2<j

1\

nF

situations:

sin <p = 0, i.e. the cardinal points 0, 2k, ... are unaffected by dispersion.
An extreme of this type localized at a wavelength X allows the inference

= m ,m
X

integer

/2n

\L

r> r,

\l\\L%

==

rip

In the dispersion-less case

"f

np

Q =

(12-4)

"ffA
,.

n FX

odd is

2nnX hp *Q

cotan -r- F n F I
\ X
J

(ii)

(n

"0g

\2

n g) n F

and the usual

(12-5)

n ng nF

result

A =

2/4, /

obtained.

In the general case one must compute


localized extreme

and then solve

(12-4).

for the wavelength of the

Assuming the

effect to

be small,

we can replace the cotan function by (7t/2-argument): (12-4) then


a quadratic equation for the optical thickness with the solution
n F hF

= 4[y( 1 +VC 1 +

16*" 2 G])1

leads to

(12-6)

PERTURBATIONS

501

where only the plus sign had to be taken for the square root. Half of its
difference from unity indicates the relative error incrurred when taking no
heed of dispersion.
In the practically important case n

the

Q2

factor

is

positive for

n n g and the negative slope of the dispersion curves then makes Q


always positive. The true optical thickness at A e = Amax or Xmia is therefore
all

>

greater than the quarterwave value.


If the film is exactly antireflecting,

Q2 = Q =

and there

is

no

displac-

ement of X e Various degrees of dispersion around the antireflection condition


would manifest themselves through increased selectivity of the fixed zero
.

minimum.
the

For all other extremal values there is a greater or lesser shift such that
extremum wavelength A e is in no simple relationship to four times the

optical thickness taken at X e .


It is

convenient to choose as the indepedent parameter the geometrical

thickness h.

Running on the computer a

set

of q(X) curves for various h and

reading off the positions of the extrema X e one


curve h
for

A(A e ) for a material of given dispersion. Such curves are

ZnS and Ti0 2

in Fig. 12-1, using the dispersions

extrema in question are


It is

may interpolate a continuous

first

by Table

shown
The

12-1.

order maxima.

interesting to note that for these curves to be smooth, the actual

had to be smooth to three decimal places.


shown in the Tables 12-1,
correspond
to what can be extracted
although three decimal places may not
from experimental results and reproduced technologically.
dispersions fed into the computer

these graphically refined values that are

It is

particular

ft

gives rise to various optical thicknesses A(/l)

across the spectrum. It


the 1

is

reasonable to ask what

is

An F (A)

the optical thickness at

Amax wavelength. These optical thicknesses are shown as the A(A max)

curves in Fig. 12-2.

In the dispersion-less case the


Amax /4.

The

Fig. 12-2.

ratio

4A(Amax)/Amax

Their deviations from

is

so defined would of course equal

shown

as

the decreasing curves in

unity characterize the effect of dispersion

maxima from the 4A values.


The curves answer the same quesfion as formula (12-6) because they
indicate the correcting factors for 1/4 values. The only difference is that
(12-6) was obtained by an approximation of the cotan value while the curves
of Fig. 12-2 have been extracted from direct computations of the reflectance
on

the displacement of the true

curves.

A numerical check for ZnS in the most critical range 4 000 to

000 A

OPTICS OF THIN FILMS

502

reveals that (12-6) yields the true n F h r values with

an accuracy to several

Angstroms.

A further question of practical interest is to

find

for

a given A max in

which monochromatic light Amon to monitor the evaporation of the dispersive

W-Tt
1000

5000

6000

7000

503

SOW

1000

Fig. 12-la,

b Solid

600C

calibration curves for the geometrical thickness h

lines

with dependence on the position A max of the ensuing first order


reflectance maximum of the e(A) functions. Dashed lines calibration

curves for the geometrical thickness h corresponding to evaporation by


the

first

turning point of the function g(h) in the monitoring wavelength

^mon (a )

ZnS

ft>)

Ti0

Dispersions according to table

2-1

OPTICS OF THIN FILMS

504

layer if
point.

it is

We

required that the monitoring should go by the

first

are obviously solving the equation

"F^mon)

K^max)

=
4

/L a fixed
'

2000

1500

100B

JOO

5000

calibration curves for the optica thicknesses A


order reflectance
Dashed
A expressed as a multiple of ^max

Fig. 12-2 Solid lines

with dependence on the position Amax of the

maximum

of

g(A).

lines

first

/4.

turning

PERTURBATIONS
because this time

505

we

maximum

are looking for a

of the dispersion-less

dashed h-versus-Xmon
from the calibration curves h-versus-lm!ix
A particular case is drawn in the ZnS curve as a key to how to proceed from
a Amax via h toward Amon Reading the same key in the opposite direction

The

function q(K) for A fixed.

result is presented as the

curves in Fig. 12-1, being different

indicates

wave

The

how

maximum

the actual

is

shifted relative to a chosen quarter-

value.

effect of dispersion in

some multilayers

Let us study a low-pass

3
of the type 1(0.5L) (HL)

filter

HG, which

is

normally used for heat protection or colour conversion, depending on the


positioning of the cut-off edge. Its phase diagram has a well flattened out
pass-band between
If this design
significant

jc/2
is

a slightly
table

test in the

ZnS

film.

for L, neglecting

However,

some

presence of dispersion,

its

weak

dispersion, whereas

Hall and Fergusson given in

to three decimal places

3000 4000 A, although absorption may change


ZnS here more appreciably. The purpose was

trends due to dispersion, for which a broader range


Several spectral positions of the

filter

9000, 8000, 7000

[39]..

and extrapolated

viour of

tuned as A/4 for A

H is

this time the study was undertaken with

less dispersive table after

was again smoothed

region

37t/2.

put to

changes appear in the transmission zone.

We choose MgF 2
taken as a

and

now

is

The

to the

the optical behato emphasize the

of advantage.

were considered, the design being

and 6500 A. The corresponding

transmittance curves are shown in solid lines in Fig. 12-3.


In accordance with the introductory discussion of dispersion
internal detuning builds

smooth curve

is afflicted

effects,

low wavelength range and the originally


with more or less ripple. As the filter edge is

up

in the

shifted leftwards, the ripple falls in different parts of the phase diagram, the

wavelength range 3000 4000

A remaining

most critical.
where
a transmission dip occurs at
It is to be noted that there are cases
wavelengths for which the designs, tuned as A/4 for 7000 and 8000 A,
respectively, are A/2 thick. This may partly be responsible for the half-wavelength dips in these

filters

as mentioned in

[1].

were run for the case that the tuning was


exact at the lower wavelengths, i.e. it was stipulated for the computer that
AH in the unit H-layers be equal to A L at, for example, 4000 A instead of at
8000 A, as taken originally. This resulted in a series of dashed curves
parallel series of curves

OPTICS OF THIN FILMS

506

labelled with the corresponding wavelengths of the exact tuning. It is


evident that the ripple vanished, or was substantially reduced, while the

cut-off edge obtained

some

shift

due to detuning now present

wavelengths. Also, the subsidiary

maxima

at the

upper

next to the edge are slightly

modified.

The
central

shifting effect

maxima of tuned

could also be observed between neighbouring


m
stacks. Taking, for example, a l(HL)
system

3000

Fig. 12-3

nL

The

MgF

effect

of dispersion in H in a low-pass

3rc/2

Solid linesbasic design tuned as A/4 at the indicated higher wavelengths.

Dashed

and

filter

T~WA
(0.5L) (HL) H G H ZnS,

positioning

design tuned at the indicated lower wavelengths.

lines

its 5it/2

maximum

being positioned at 7220


Dispersion

is

at

4500 A would

instead of the value ^-

also responsible for

of wide-band antireflection
needed to cope with this.

result in the

some reduction

4500

maximum

7500 A.

in the band-width

layers. Sophisticated correcting

programs are

PERTURBATIONS

507

Apart from these distortion effects, dispersion can manifest itself by


changes of performance in selective elements when separately produced
in various parts of the spectrum.

of given complexity

filter

may

Thus an

ADI

interference

yield

monochromatic

different half- widths

markedly

if

produced in the blue or in other parts of the spectrum, the shape of the

maxima remaining normal.

12.2 Spurious absorption

We

have already discussed in 5.3 the

dielectric systems,

effect

of weak absorption in

mostly due to scattering on the granular structure of the

film materials. Since scattered light

is

lost to collimated interference

it is

interpreted as absorption, although the material has a real refractive index.

The

loss is characterized

by an empirical amplitude attenuation factor

resulting in a certain loss of energy such that


this

absorption spurious because

it

a.

We

<W

shall call

cannot be normally interpreted within

the framework of the phenomenological theory treating the media as

continuous.
It is

quite possible to adapt the Airy

summation formulae for dielectrics

so as to involve an explicit attenuation factor, without affecting the realness

of the Fresnel coefficients. In

fact,

for thin films as early as 1947,

such intuitive formulae were presented

[2].

This adaptation cannot formally be

Maxwell boundary conditions, but one may also visualize


the process as adopting a complex refractive index for the spuriously
absorbing medium such that x < r\.
Taking a = 1 % as a typical limit for absorption in a single A/4-film
related to the

we may

write

exp(-a)

= p[_*i,,*(2L)] =
X

For a

0.01

the order 5
cients

may

and
10" 3

1.5
.

<

It is

practically

r\

<

p(-)

=
K

2.5 the absorption index will therefore be of

then clear that the corresponding Fresnel coeffi-

be regarded as

real.

was found in 5.3 that the effect of a certain attenuation factor ^


substantially depended on the layer design in accordance with the concept
It

OPTICS OF THIN FILMS

308-

of absorption as an interference quantity. In


a few more examples to this

this section

we

shall present

effect.

There is the basic question of how much absorption is built up within


a single layer in an air-glass embedding for the case that the refractive index
of the layer

is

varying. This implies various degrees of significance for the

zig-zag reflections

and various absorptance.

Three typical working conditions


A/4, 3A/8

and 1/2

thick.

be considered, the layer being

will

standard attenuation factor

used throughout, meaning that

- ^2 =

is lost

%=

0.995 will be

to interference

upon

one traversal of a layer of given geometrical thickness.


For principal reasons the index range for the layer was taken from 1.0.
The a( F) functions for the typical phase angles are shown in Fig. 12-4.

The
that g

limiting value of a for w F

- <% Ag",

<% 2 x"

may be found directly by considering

where g"

x"

on the second boundary.

Hence

a
i.e.

with q"

For F
X

= <#V

0.0425, a

(1

is slightly

1.52 the second

2
<2r

)(l

more than the

% loss upon one traversal.

boundary vanishes

optically

and g

g',

so

a=(l-
The corresponding absorption 0.947
alternatively, very nearly

from

+ % 2 g")

g',

)(l-

is

e ')

slightly less

than

because either of the factors

Ql

or,

differs little

unity.

For

large F , a tends to zero monotonically if

over a certain

maximum if <p =

it.

In the

q>

%\2, or reaches zero

latter case the layer is in

resonance,

the intensity of which increases with n (thus inducing more absorption),


F
but simultaneously less and less energy is transmitted through the first

boundary. The two controversial tendencies result in a maximum, but this is


not seen in the range of realistic indices of refraction if the attenuation

Fig. 12-4 Absorption in single layers of


different refractive index

F working in

four typical conditions of the phase

angle

q>.

PERTURBATIONS
factor

is

509

very nearly unity. For practical purposes

assumed to increase with F

ol

may

Within the sphere of very

slight attenuation factors

(which

for spuriously absorbing dielectrics) the curves of Fig. 12-4


scaled

up by a
fiOM,

factor

< n <

If for a given

a/a(n F)

and

/i

the case

is

may be

vertically

to represent absorption for the case that

%2 =

10 or so.

n F a A/4 layer

%=
1

therefore be

/i0.005.

is found to have absorption a, then n =


Thus an estimate can be made of % cor-

responding to the actual index of refraction of the layer examined.


In Ch.

5,

SHW filter with the attenuation

Table 5-1 was a study of the

factor placed in various layers. Let us

now make an

interference reflector with basically the

same number of layers and compare

some

analogous study of an

typical features, Table 12-2.

Table 12-2
2
Effect of attenuation factor * =
= 0.995 in individual H-layers of the system
8
1 (HL)
G, H = 2.35, n h = 1.38. Layers

numbered from bottom to

top.

%*v
\

less

0.001

0.002

0.006

10

0.017

12

0.051

14

0.147

16

sum

Contrary to the

than 10" 3

0.426

of

all

0.650

* in all H

0.624

^inallHL

1.028

SHW

system, the individual absorptions in the

one emerges from the rear into the top layers.


This is quite comprehensible from the point of view of the inner fields
building up across the system.
reflecting system increase as

OPTICS OF THIN FILMS

510

Further, taking the


yields the

same

result as

sum of all the paitial H-absorptions in Table 12-2


when computing total absorption with U present

in all the H-layers simultaneously. This cannot be proved generally, but in

when

the present case,

the actual absorptions are small,

regarded as a superposition of partial

No

such rule can be observed with the

would

partial absorptions

SHW

sensitivity

losses incurred

may

simply be

filter:

the

sum of

of absorption to embedding

by monochromatic

filters

large.
is

manifested by the various

of different types.

DHW

the

substantially exceed total absorption. This is

accounted for by the partial absorptions being

The

it

differentials.

2
filter G(LH) LL
Taking a SHW filter G(HL)4 (LH) 4 G and a
3
2
(HL) HLL(HL) G, each having 8 H-layers, and assigning the same
.

SHW filter has twice as great a loss


The THW 3-6-6-3 filter G LHL HH

attenuation factor "U to these layers, the


in the

maximum oft as the DHW filter.


3

(LH) LL(HL)
good as the

HH LHL G

DHW

filter.

has two 2 layers odd and


(For <% 2 = 0.997 the losses are

respectively.) Lesser sensitivity to spurious losses

multiple-half-wave

filters

over the

SHW

is

still is

14,

almost as

6 and 6.5

%,

a typical advantage of

filter.

Finally let us mention the effect spurious absorption has

on very

low-or very high-reflecting systems, as represented by reflection-reducing

There is the malicious rule that absorption


works against the quantity that is important for the user, i.e. t in the former
multilayers

and

laser mirrors.

case, q in the latter.

Absorption in

of the evaporation method


rate

and by the

dielectric films is controlled to


(e.g.

some degree by the choice

e-gun vs Joule heat), by the evaporation

overall conditions in the recipient

and the laboratory,

built-in

dust being partly responsible for the scattering in the mass.

12.3 Surface roughness

One of the working hypotheses occasionally abandoned in reflection


phenomena is that of a smooth mathematical dividing plane between two
media. Practically, the boundaries have some structure which plays a more
or

less

important

role.

macroscopic structure of the substrates. The height


and slope of the polished surface are slowly varying functions of position,
which may influence the geometric abberrations of the system, but the
First, there is the

PERTURBATIONS

511

performance of interference systems evaporated onto them remains unaffected: the condensed films simply follow the contour and we obtain
bent but parallel-sided stacks, the angles of incidence negligibly

slightly

differing

from the

The

ideal ones.

effect is

curvature rather than surface

roughness.

The

latter

comes

by

into play

with the worked material.

Some

direct interaction of the polishing agents

film

forming processes such as anodization

or thermal oxidation also lead to microscopically irregular surfaces.

rough surface refbcts

ideal surface.

The specular

of diffusely reflected

light.

light in

reflection

a more complicated

way than

the

normally expected decreases in favour

The phenomenon

is

essentially diffraction

and

hence displays angular dependence on structure and wavelength. Thus part

of the scattered

acceptance angle of the instrument set for

light enters the

purely specular reflection and partially makes

through scattering. Owing to

its

good the

loss incurred

origin, this retrieved portion

of

light is

spatially incoherent with the specularly reflected light proper.

Reflection by rough surfaces has been treated in

a number of years, but

it

was only

many

papers over

in the last decade that a high degree of

rigour has been reached as regards the application of the diffraction theories.

Much

of the work on surface roughness was done in connection with

mechanism of glass polishing. Optical methods were an


means of assessing the roughness.
The results of these theories were also applicable to performance

the study of the


indirect

evaluation of front-surface mirrors. Until recently, however,

no

effort

was

directed towards considering the possible roughness of boundaries between

adjacent layers in a film stack.

of the substrate
impairing

One

its

may be

It

was only recognized that the roughness

copied onto the boundaries of the stack, thus

performance by diffusion.

dividing line

profile adopted.

among

the various theories

simple modei of a rough surface

or with randomly varying period. Bousquet,


in this

way and obtained

[3],

is

is

the type of surface

a grating, sinusoidal

treated the Fresnel

boundary

the energy formulae

where z

is the amplitude of a regular grating or twice the r-m-s amplitude


of a random grating and q , t are the orthodox Fresnel coefficients of
energy reflection, n being the relative index of the rough medium.

The

result is that less

energy

is

reflected in favour of more transmission,

512

OPTICS OF THIN FILMS

the

sum of the coefficients being 1 Thus a certain degree of surface roughmay equally well be responsible for the reduced reflection of would-be
.

ness

smooth glass surfaces as was once attributed to the Drude transition layer.
The approach has been generalized to stratified media by Verhaege, [4].
The Rayleigh theory of gratings treating the electromagnetic field in terms of
the spatial spectrum of plane waves
ations:

(i)

roughness,

is

subjected to three kinds of perturb-

when the wavelength is much greater than the amplitude of the


(ii) when the amplitude of the slopes is much smaller than one,

when the period of the grating is much greater than the wavelength.
The theory has been practically verified with X-ray reflection. The mathemat-

(iii)

ical

apparatus

simplified.

more

is

rather involved although the

One may

general models with

proportionally

random

and a

between them.
the scattered

is

distribution of irregularities

is

not

more complex.

A randomly irregular surface is


defects

model of the roughness

in fact say that the mathematical treatment of the far

defined by a statistical distribution of

correlation function determining a characteristic distance

then possible to calculate the

It is

statistical distribution

of

field.

One of the basic papers applying diffraction theory to a rough reflecting


mean surface is due

surface with Gaussian distribution of deviations from a

Although originally developed for the reflection of radar


ruffled sea level, it was also adopted for optical phenomena.
Assuming that the r-m-s of the surface roughness a is substantially less
than X, specular reflection in normal incidence is
to Davies,

[5].

waves from the

^ = ^ exp|-(^j
s

1,

$o

large

(12-8)

and vice versa. A surface that


rough for one wavelength region may appear practically smooth for
a longer wavelength region. This was actually known since Rayleigh's time,
but the derivations of the formulae may not have been as general as those
appearing in the 1950's. For example, Lavin, [6], cites a formula due to Chinmayanandam (1919) which has the form (12-8) but the argument is Sn 2
It

therefore decreases for smaller wavelengths

is

cos \ak, where is the angle of incidence and a is


With increasing angle of incidence a given degree of roughness

an empirical constant.

is

less

important. If the incidence angle exceeds 50 or so, the formula breaks

down. This
regularities,

this kind.

accounted for by the mutual shadowing of the adjacent irwhich is never taken into consideration in deriving formulae of
is

PERTURBATIONS

513

Provided that the surface

is

almost perfectly

made for some

constitutes scattered light (allowance being

opaque

0i s

absorption in the

reflecting layer).

Porteus,

>

reflecting,

if

has shown that the formula (12-8) remains valid even for
as
is replaced by coherent reflection
e,

[7],

&

specular reflection 0t s

distinguished from the incoherent part mentioned above.

These

results

be perfectly

may be

generalized in the sense that the surface need not

may be the Fresnel


[8]. Thus &
smooth air/glass boundary.
error in the measured specular reflectance caused by

reflecting for (12-8) to hold,

reflection coefficient of a

The

relative

surface roughness

is

\ A J

nomogram

connecting various roughnesses and wavelengths for given

relative errors is

shown

in Fig. 12-5.

Some

typical materials are inserted at

the proper roughness values.


It

can be shown,

that (12-8) holds even for a

[10],

dielectric film if the structure

The authors

call this

of the lower

is

an identical-boundary

homogeneous thin

copied onto the front surface.


film.

Fifstd quoriz

(bowl ftd)

.25,000

2.7A

OK 000
5.

5000

2500

iooo

10

rms
Fig. 12-5

Surfaac

Nomogram connecting
errors

&

'

rooj/incssf

surface roughness

when measuring

30
ff

100

(A)

and wavelength for various

reflectance. (After [9].)

relative

OPTICS OF THIN FILMS

514

Using some special (Gaussian), but qualitatively well descriptive


forms for the distribution function and the autocorrelation coefficient, they
derive a formula of the type (12-8) where 0t is replaced by the energy
o
coefficient of reflection qf for the film in the ideally

smooth condition

(3-la), thus
2
c

eF

exp[-(i^-)
J

Further, the incoherent reflectance

where a

is

half the acceptance angle of the detector in radians

is

correlation distance of the microstructure.*)

The

and Z is the
measured

total reflectance

is

For a

film of given a,

#, increases with the acceptance angle and with


We then find higher 0t t which could at first

the correlation distance %.


sight

The

be interpreted as
fact

is,

less scattered light,

however, that

it is

because 81 1 then converges to q f

the scattered light that builds

up

the 0t t

component.

On the other hand, for a high ct/A ratio 0tc may be neglected and 0t t =
&i. The detector only receives scattered light.
At the wavelengths where the film is X\2 thick, 0te is identical with the
reflectance of the bare supporting rough surface. This is a criterion for the

film to be of the identical

boundary

type.

The general film is characterized by two independent random height


distributions. The results are much more involved, but the formulae allow
of an arrangement in iterative form programmable for a computer.
The authors have numerically studied the combination Si0 2 -massive
Si in the 0.42 1 .2 um range. Only 3t was computed, because the correspondc
ing experiment was devised so as to receive practically no scattered light.
Alternatively, the results obtained with wide acceptance angles

extrapolated to zero aperture.

The

may be

basic tendencies are the following: if the

upper boundary has a constant moderate roughness, e.g. a l 100 A, and


of the lower boundary (<r 2 ) is increasing (up to 500 A or more) then

if that
*)

It is

contained in the autocorrelation coefficient of the form


c(t)

= exp (-

r 2 l% 2 )

PERTURBATIONS

515

both the interference maxima and minima of ^? C (X) decrease. After the
reach zero value, they start to
result

is

rise,

maxima continuing

the

complete disappearance of interference from a certain

upwards. The total


reflectance of the

is

latter

to decrease.

The

ff 2 -value

determined by the coherent component of the

upper boundary alone.

Too much roughness on


ference in the film, which

is

the lower boundary thus destroys the inter-

a natural

result.

Taking the converse experiment that a2

constant and a t

is

increasing,

then the coherently reflected amplitude of the upper boundary

is

decreasing

on both

its sides.

Neither the boundary

lower one via the multiple reflections

even

if

itself

nor

cooperation with the

its

capable of contributing significantly

is

to coherent specular reflection. Its limit

is

is

practically zero for

the lower boundary were perfectly smooth.

The

some <T t

critical

value

a lk
<r

lk

depends of course on the optical constants of all the materials.


Many intermediate degrees of roughness may be combined, the
numerical results being rather varied, particularly in the vicinity of the
minima of the 3t(X) functions. Fairly good agreement between theory and
experiment is reported.
Surface roughness also plays an important role in ellipsometry. In
addition to the r-m-s value of the height irregularities, the r-m-s value tan

of the irregularly distributed slopes must be considered. If


than

0.1, the

approximate formula holds,


tan

, e* =

W.C* +

/?

this is smaller

[11]:
0.

+O.5tan

/,

8l

o .3f 2

where gr^p), S^fe) are certain functions of the Fresnel coefficients.


While a may be deduced from measurements of coherent reflectance
alone, the information on the slopes may be extracted only from ellipsometric measurements. Simultaneously, (12-10) serves as a basis for computing
the errors in n and h incurred when interpreting ellipsometric measurements
on a rough surface as if belonging to the ideal case.
In fact, a deviation from the ideal value tan

<^

jAo

may be

attributed

either to surface roughness or to a transition interference layer, possibly

inhomogeneous. However, a

series

of experiments conducted at various

angles of incidence and over a broader spectral region provide enough

information for the correct verdict to be made.

These results were generalized to the ellipsometry of a rough film


in [12].
*

OPTICS OF THIN FILMS

516

A special effect associated with the roughness of metallic surfaces is the


plasma waves. To understand this we must recall a fact
book so far, because it was not needed. It is the
existence of a surface charge as a consequence of the boundary conditions

excitation of surface

not mentioned in

this

wave passing a dielectric/metal surface. *)


For our computations we have only exploited the pair of conditions
stating the continuity of the tangential components of and H. Expressing
also the continuity of the normal components of D in the formalism of
harmonic waves for metallic films, i.e. taking by (1-3) e as complex, we have

for a

after arranging

v+l^vz

47E

= J (Cv+l^vz -

y^vz

The bracketed expression on the right-hand


boundary,

infinitesimally thin slab of a

may be

time-derivative of a surface charge a. If this


ally

along with the

field,

we may
9>'

which

is

a special form of the

side,

is

(12-1 1)

<V?vzj

taken in the limit on the

interpreted as the negative

assumed to change harmonic-

eventually write (12-11) as

Q) %

= 4na

Maxwell equation defining a surface

first

charge on the metal/dielectric boundary through the discontinuity of the

normal component

of D.

Fitting the free electron theory to aluminium, Stem, [13], has

shown

mode whose

eigen-

that this surface charge

frequency

capable of an oscillation

is

COs

where

is

e is the dielectric

electron charge,

0> (l
p

8)"%

CD,

= i^-m

constant of the adjacent

mass and

medium and

(12-12)

e,

m, Jf are

density.

Normally, the velocity of

fields associated

with incident waves on one

on the other, are


and coupling of fields cannot occur. However, it is possible,
as first pointed out by Otto, [14], and further developed by Salwen and
Stensland [15, 16], to excite certain plasma modes in a metal film by the
evanescent light waves propagating along their surface in FTR configurations,
where the metallic film assumes the place of the high-index dielectric on the
emergent side. From the phenomenological point of view this is accompanied

hand and

the oscillation of electron plasma by (12-12)

quite different

*)

This surface charge

is

better

known

in the theory of the static field.

PERTURBATIONS

517

by a sharp transmittance peak. This effect is being studied as a possible


basis for monochromatic filters, applicable in the ultraviolet if aluminimum
contemplated as the metallic

film. Aluminium approximates well to the


model in the visible and ultraviolet with hco = 15.8 eV (see
reviews in [17] and [18] and a very recent development in [19].
To excite a plasma wave, the electromagnetic wave need not be evanescent as in the above case. A highly inhomogeneous wave such as is formed upon oblique penetration of a wave into a metal with r\ <? x may do
as well. Then the phase velocities of the plasma and refracted waves may be
matched nearly enough to produce resonant coupling. Since plasma waves
is

free electron

are essentially longitudinal electromagnetic waves (the quanta of which are

plasmons)

it is

sufficient to

produce a longitudinal wave by oblique incidence

into a metal, provided that the material constants

and angles of incidence


way plasmons

are chosen so as to secure matching of phase velocities. In this


are excited even in normal incidence onto the metal

if its

surface

is

rough,

the effective oblique incidence taking place at the slopes of the irregular
structure.

The induced absorption due

to plasma excitation leads to an

intensity decrease of light in the direction of specular reflection,

which adds-

to the orthodox light-scattering loss.

12.4 Cumulative tint in lenses

We have seen in the sections concerning antirefiection that the solutions


more or less wavelength-dependent. There results a reflected colour which
is only indirectly functional in serving to check (to some extent at least) the
correct manufacture of the layer. The colour of the transmitted light should
display a complementary hue but, since it is carried by white light of high
energy level, this is hardly perceptible owing to poor saturation. This
are

neutral character of transmitted light

is

directly functional in antirefiection

techniques.

However,
in tandem.
reflections

and

it is

it is

the rule with reflection-reducing layers to apply

many

Since the treated surfaces are mostly curved, the zig-zag

do not take part

in the legitimate transmitted light (see Ch. 11)

the simple product

ST(X)

t 1 (A)t 2 (1)...t: Il (X)

OPTICS OF THIN FILMS

518

which represents the spectral transmittance of a stack of k antireflected


surfaces.
It is

clear that the selectivity of the

that of the single t v (2) curves.

^(X) curve may be much greater

rough estimate can be made taking the

exponential
t

as a simple model. There

is

exp[-A(A - 1

maximum t

at 1

2
)

the second derivative being

2h.

The A>th power of the same curve has a maximum Tq with the second
derivative 2hk. There results a higher concavity on a lower maximum,
hence the relative variation of
greater

than that

of

antireflected surfaces in
until, for large k,

it

x{l).

3?~(X) in

the neighbourhood of A

tandem, one enhances the

may

is

much

terms of colour values, by cumulating

In

tint

of transmitted light

reach intolerable values.

10

tlglj

on 152

HgFi on
o
*

3AR
tAR

17

(all

on

1.32)

Fig.

Chromaticity diagram for

the cumulative-tktt-eLsSme

aw
0.30

1&6

0.31

0.32

0.33

0.34

035

antireflection layers.

PERTURBATIONS
Fig. 12-6

with a single

519

shows the chromaticity diagram for the cumulative effects


film, the simulated bi-layer and the 4- and-6-layer

MgF 2

antireflection films defined in 3.4.3.

The great ellipse is the ten times enlarged MacAdam


threshold for the area around point "C".

ticity

It

difference

chroma-

represents white light if we

adopt a broadened definition for white as something which is not saturated


enough to deserve the name of colour. In fact, this region extends even beyond
the ellipse as may be verified by inspection of the well known sectorized
chromaticity diagrams defining the names of colours.
There is a much narrower limit for white if neutrality is the main
objective and tints become a nuisance. According to Kubota, [21], practical

may be

white

hold (smaller

taken to

lie

inside the three-times enlarged

MacAdam

The conclusion

drawn

to be

is

that,

with the number of treated surfaces

increasing, the bi-layer very quickly runs into

pronounced

mission. Its use in current visual instruments

therefore limited.

The divergence of MgF 2 and of the two

much

thres-

ellipse in Fig. 12-6).

is

tints in trans-

multilayers from the centre

slower, the layers having a chance of remaining free

from

is

tint in

cumulation.

MgF 2
glass,

compares favourably with the multilayers

but then obviously

transmit only 87.5


the 94

its

energy efficiency

%, whereas

is

if

poorer:

deposited on light

e.g.

10 single layers

the performance of the multilayers

level (evaluated for the eye).

For

MgF 2

on heavy

glass,

is

on

10 layers

would also transmit about 94 %, but neutrality deteriorates rapidly.


The shift vector of 4 AR is oriented towards the purple because of the
small peak 0.7 % in the central part of the basic reflection curve (Fig. 3-33a).
The cumulation effect is some loss in the green part of the spectrum. This
is

a disadvantage of

With the more

many broad-band

antireflection systems.

sophisticated 6-layer system the case of 20 surfaces

remains safely within the smaller

ellipse.

Production errors

may of course

reduce the colour stability of these systems.

We shall now pay more attention to the single MgF 2


widely used antireflection element.

were studied, for example, in


Fig. 12-7 reproduces a

Its

layer as the

most

colorimetric and energy properties

[22].*)

diagram of interference colours of

this layer

deposited with various optical thicknesses on various substrate glasses.

*)

and

The

This study was further extended in [29] for a wider variety of radiation sources
for the 2

AR layer.

OPTICS OF THIN FILMS

520

y = 0.Jffl

WW X
1/

//!"
/ 7SH^H-C

\y=0.31?

Iy=0.316

>

Fig. 12-7 Chromaticity

chromaticity scale ,

?j

of a

diagram in uniform

MgF2

layer (n F

1.38)

deposited with various optical thicknesses A /4 on

various glasses.

is plotted in a skew coordinate system yielding an approximately


uniform chromaticity scale where the MacAdam ellipses become circles.
It is evident that most of the single-MgF 2 cases lie within this absolute differ-

diagram

ence

limit.

Considering that the practical limit

is

three-times as large as the

drawn in Fig. 12-7, there is a margin of safety for the MgF 2 layer to be
cumulated up to a certain number of surfaces without any harm being done
to the neutrality of transmitted light. The limit will of course depend on the
substrate index and on the spectral positioning of the layer. In this respect
the following study is more detailed than the information on MgF 2 so far

circle

contained in Fig. 12-6.

maximum permissible number of identically


tandem for the chromaticity to remain practically
Obviously, the increased selectivity on heavy glasses sets this limit

Table 12-3 indicates the


treated surfaces in
neutral.

considerably lower than with light glasses.

In particular optical systems these tendencies are combined in accord-

ance with, and proportionally

to,

the sequence of glass

refractivities.

Inevitably, there sometimes arises the risk of transgressing the neutrality


limit.
is

Much

depends on the purpose of the system. The resulting slight tint


is the tint of some heavy glasses, or the two tints

either tolerated just as

PERTURBATIONS

521

combine to give something which

upon

intolerable.

is

by

to counteract the tint of the glass

their

Thin films are then called

own, properly designed, lack

of neutrality. The coating laboratory then has to disperse the Amin values
across the spectrum in such a way as to enhance the energetically poorer

Analogous manipulations with the Amin values are also undertaken


when the glass is clear but the uniform coating of too many
surfaces brings about some tint beyond the limits set by Table 12-3.
These manipulations are always effected at the cost of transmitted
energy because, with the light source e(A) and the detector s(A) given, there
regions.

in the case

is

a unique value of A which makes the integral


Pint

s
J *xQi x

dA

e A s A dA

a minimum.

The graph of Fig.

12-8, again

taken from

various A and g in the case that e(A)


sensitivity curve
It is

MgF

[22],

given by the

shows the g lm values for


source and s(A) is the

"C"

of the eye.

evident that a heavier

2 layers

is

on heavy

glass.

toll is

paid when shifting the more effective

Simultaneously, these displacements cause

greater changes in chromaticity, as

evident from Fig. 12-6. Both tendencies

is

are in accordance with the greater selectivity of

MgF 2

on heavy

Table 12-3

Maximum number of identical MgF 2


tandem not incurring marked cumulative tint

films in
in trans-

mission.

refractive index

MgF 2

of glass

layer

positioned at

15
1.6

1.7

1.8

4400A

4600

4800
5000

11

14

5200

16

5400

13

5500

11

5600

10

5800

6000

glasses.

OPTICS OF THIN FILMS

522

A fnmJ
Fig. 12-8 Integral reflectance e
for a
int

MgF2

layer

deposited with various optical thicknesses ^ /4 on


various glasses. Evaluated for source "C" and the

eye as detector.

Table 12-4
Additional loss in white light
the energetically

optimum

MgF2

is

for

some reasons positioned with A below

value 5300 A.

1.5

"g

if

1.6

1.7

10

10

1.8

10

10

5200

0.019

0.18

0.036

0.315

0.051

0.05

0.066

0.655

5100

0.033

0.30

0.062

0.56

0.089

0.85

0.115

0.98

5000
4900
4800

0.050

0.43

0.095

0.85

0.137

1.30

0.177

1.71

0.072

0.62

0.135

1.27

0.195

1.84

0.253

2.44

0.097

0.84

0.183

1.66

0.263

2.48

0.341

3.29

4700

0.126

1.09

0.236

2.13

0.341

3.20

0.442

4.23

4600
4500
4400
4300

0.158

1.36

0.297

2.66

0.428

4.00

0.554

5.37

0.194

1.67

0.363

3.27

0.525

4.90

0.679

6.44

0.233

1.99

0.436

3.91

0.630

5.85

0.814

7.67

0.275

2.36

0.515

4.61

0.743

6.85

0.960

8.99

4200

0.320

2.73

0.599

5.32

0.864

7.94

1.117

10.38

4100

0.368

3.13

0.688

6.11

0.993

9.06

1.283

11.84

4000

0.418

3.56

0.783

6.92

1.129

10.26

1.458

13.34

Table 12-4 summarizes the losses to be expected when choosing various

^ 5500 A. These displacements are typical when enhancing the blue


region. The corresponding reference colours in reflection are purple and
X

yellow.

PERTURBATIONS

523

12.5 Obliquity effects in lenses

The performance of antireflection

film systems

is

normally assessed by

These are given either by measurements


or by computations for normal incidence on flat substrates. A low broadtheir spectral reflection curves.

band minimum

is

the desired characteristic.

1/

fl'l

15

13
13
saoo stoo

tot/ 1st

<t5

SO

13

19

tJ

snojfMOHOB

%7W

OPTICS OF THIN FILMS

524

Actually, blooming systems are used


effective angles
this

may be

tilt.

Figs. 12-9

systems.

It

of incidence are more or

on curved

less oblique.

analysed by separate computations on

surfaces where the

The

optical effect of

flat

substrates of various

and 12-10 represent such a study of three

typical antireflection

can be seen

that, considering unpolarized light, the reflection-

Fig. 12-9 Reflectance e*(A) for antireflection layers at various angles of

incidence in the matched condition, (a)

show

MgF2

(b)

AR,

(c)

and characteristic values q+


displaced extrema when the matching is for = 0.

Inserted tables

the positions A

4 AR.
of the

PERTURBATIONS
reducing effect

525

deteriorates

owing to a

relatively

sharp

rise

in

the

s-component.
It is

obviously impossible to design a single layer so as to meet the


Many more layers with a free choice of

requirements for low g p and g s


refractive indices

would be needed to secure g p

4
Fig. 12-1 Oa, b, c

The

gs

at

one wavelength,

7 xfflX

and q s components of the 45 cases of the preceding


figure.

OPTICS OF THIN FILMS

526

the approach essentially being that of Baumeister described for semireflectors


in [23]. (See Sect. 8.5.) Fortunately, the obliquity effects in lenses are not as
severe as those indicated

mentioned

by the

oblique cases in the above

virtually

figures.

Let us at least mention one instance where a relatively simple matching


can be done to bring es to zero at 45 incidence. This is of practical importance for the non-functional surfaces of plane laboratory elements mounted
at 45 incidence on an optical table, if the experiment is using laser light
with a vertically oscillating vector.

The process

is

straightforward for the simulated bi-layer, because

optical thicknesses can always

be computed

explicitly

its

once the effective

admittances are given. The fact that complete antireflection occurs for one
wavelength is in accordance with the experimental conditions.

Taking again the index combination 1/1.49-2.22/1.52, the s-admittances for


O = 45 are 0.70711/1.313-2.103/1.346. Applying the formulae
(3-65a, b) one obtains the values

(Pi

The

113.3

optical thicknesses are then

Aj

Comparing with

q> 2

Av =

q> v

=41.5
sec <9 V

A2 =

0.352A

X 360" \ so

0.122A

the multiples of k for normal incidence (0.372

respectively) the thicknesses of the individual layers are

and 30

and 0.088,
found to differ by

% due to matching. These differences should be observable by a good

monitoring technique.
Fig. 12-11 shows the results of the matching as compared with the
half-matched case where only the position of the minimum was taken care
of, but the relative tuning was not adapted to the effective admittances for

the 5-component. Altogether a half percent gain is to be expected, which

is

not

negligible considering the purpose of the matching.

When
the 4

the design

is

not obtainable in explicit form, as for example, in

AR detuned system,

then the whole process by which it was obtained


must be repeated for either of the polarizations with the corresponding
admittances. Thus an Argand diagram with different Fresnel amplitudes
may be the subject of a new correcting procedure.
If unpolarized reflectance q*

is

the parameter in question,

it is

difficult

and q s simultaneously, but some improvement may be expected


if the g + -curve as obtained by simple thickness matching is subjected to
small variations in the thicknesses. The 4AR system with the basic tuning
to optimize q
p

PERTURBATIONS
1

0.476

tuning

527

0.4

0.3

1.136

0.576

is

normally matched for 45 incidence when taking the


:

0.454

(although remaining on the

An

The curve q*

0.315.

flattens

out a

little

% level) if the second factor is taken as 0.502.

analytical attempt at mitigating obliquity effects in antireflection tech-

niques by proper tuning

is

to be found in [36].

Despite the unquestionable value of the oblique computations, the

information they yield

what

not synthetic enough to

is

tell us,

for example, with

relative weight the obliquity effects enter into the final result

of total

transmission of a lens system.

Fig. 12-11 g(q>) diagrams for the 2 AR layer designed for g =


at one
s
wavelength in 45 incidence. [e s] 45
result of the design; [e ] 45
the
p
accompanying g reflection; q
normal incidence design computed at
p
normal incidence; Q
the two components at 45 when the normal
qs

design

is

only matched for 45 by the sec

Moreover, there are obliquity

effects

law
One cannot
when the work-

in manufacture.

obtain perfectly uniform coatings on curved surfaces even

holder in the recipient

is rotating. Only one zone of the optical diopter is


have the nominal thickness; other zones are necessarily mismatched.
Let us suppose that the match is performed for the central zone, the

likely to

characteristic

optical thickness

impinging on the surface to be


thicknesses

A =A

stationary lens.

cos

tj/,

being

Taking the molecular beam

parallel, the outer

where

\j/

is

zones obtain smaller

the geographic latitude

on the

OPTICS OF THIN FILMS

528

This rule

may

be more severe than

rotating workholders.

We

is the actual case in plants using


thus obtain the lower limit of performance.

Suppressing this rule in the computations to follow,

i.e.

uniform

be expected.

layers, the

With the

upper limit of performance

may

assuming perfectly

optical thicknesses distributed according to the cosine law,

the diopter generally finds itself in a nonparallel

physical thickness becomes

an

beam of light where each

effective oblique optical thickness

according

to

Av = A
where

cos

\//

cos

@v

is the angle of refraction into the particular thin film element.


a curved surface the film thus suffers a twofold detuning towards
smaller wavelengths. In addition, oblique incidence leads to splitting into

On

the p-

and s-components.

We

shall only

be concerned with the average

values characteristic for non-polarized light.

The above mentioned obliquity effects lead to the formulation of the


following computational problem: given an optical system of spherical and
planar surfaces, each surface coated by a specific antireflection system
tuned at the central zone to a

specific wavelength, this optical

illuminated from axial points by

homogeneous conical

light

system

bundles,

compute
(i)
(ii)

the spatially integrated spectral transmittance function

&

white light transmission &~ v


well known, the application of antireflection techniques actually

this spectrally integrated to

As

is

from enhancing transmission they reduce


by multiple reflections inside
the optical system. Since any loss of transmission due to obliquity effects is
accompanied by increased reflection, these effects will cause parasitic light
to increase. The above stated computational task may therefore be extended
by the following items:
Compute in any image plane
serves a double purpose: apart

parasitic light (so called veiling glare) caused

(iii)

the monochromatic meridian light distributions due to zig-zag reflect-

(iv)

ions in the system, 2(X; y)


these spectrally integrated

(v)

(vi)

(iii)

spatially integrated to

(iv) spatially

to

white

meridian

monochromatic global

light

distributions

diffusion coefficients

integrated to white light global diffusion coefficients

9-

PERTURBATIONS

529

on a convex and concave

radii of 30

mm,

MgF

AR

AR

.Tw for
and 4
1
2, 2
illuminated from various on-axis points. Two

Fig. 12-12 Spatially integrated white light loss iw

different apertures are considered.

A program for computing these parameters was described with some results
discussed in

[24].

Let us start to illustrate such studies on one refracting surface supposed


to posses a positive or a negative curvature of radius 30

The

including the collimated case from infinity.


considered:

The
when the
ng

mm,

Fig. 12- 12a, b.

illuminating points will be placed at various distances before the apex,

Two

effective apertures will

be

M = 24 and 48 mm.
MgF 2

surface will be antireflected in three different ways: (a)


glass is taken as

ng

1.65; (b)

AR

on g

1.62, (c)

AR

on

1.52.

The

figure

shows the global white

light

reflections

^w =
1

3~

attached to the marginal rays of the respective illuminations (in the adopted

order of antireflection layers). The interval of integration was 0.430.7

and

isoenergetic emission

and detection

characteristics

um

were assumed.

In some cases another three figures are indicated below in square

computed with the cos i/Maw suppressed, and represent the upper limit of performance. For parallel illumination of the smaller
aperture they approximately indicate the nominal performance of the layers
brackets. These were

on

flat substrates

compare with the

in normal incidence. It

is

these values that

losses in the virtually oblique situations.

we should

OPTICS OF THIN FILMS

530

is more critical for illumination from


Some drastic cases may even be observed,

Obviously the convex surface


near points in the real object space.

but the exceedingly high incidence angles relegate these cases outside of the
sphere of real technical dangers.

The concave diopter


figurations. It

is

offers a wider variety of nearly harmless con-

obvious that these

will also

be realized with the convex

case if the points of illumination are virtual and, conversely, the cases

shown

in part (a) of the figure pertain to the virtual illumination of the concave
case.

In order to preserve physical identity of the situations, however, an


and air must be made, because in the reverted

additional exchange of glass

case the identical angle of incidence into the layer must again be from the
air.

Thus the case

(a)

of Fig. 12-12

is

equivalent to the virtual illumination

of a concave diopter with the glass coming

first etc. It is

therefore sufficient

to examine only convex diopters in the four basic configurations: air/glass,

each of these combined with real or virtual illuminating points.

glass/air,

Even with

this simplification the practical conditions

of illumination

can be greatly varied owing to the various image distances, curvatures and
aperture angles that can be combined. Using the principle of geometric
however, the number of variable parameters can be reduced to
two angles measured within one reference diopter.
Let us take two diopters of different radii (Fig. 12-13) whose centres
of curvature C have distances X + R from the illuminating point P such
similarity,

that the marginal incidence angles e corresponding to a given aperture angle


o-

are constant.
It is clear that, intergrating

over the aperture in order to obtain some

PA; - -x-

12-13 Geometric similarity in a given conical illumination of different


radii

from

different distances.

PERTURBATIONS
531

Fig. 12-14a, b Polar diagrams of the integral


losses by reflection on a normalized
diopter conically illuminated with various aperture
angles a and marginal incidence
angles e. Plotted are the functions &~ (e

of the global coefficients

a).

or
w , the same relative distribution of oblique
processed by the computer in both cases. It is
therefore possible
to condense the information on the obliquity effects
with a certain type of
layer on any curved surface with any on-axis
illumination into one normalized diagram having, for example, 100
radius of curvature.
situations

is

mm

Taking advantage of the circular cross section examined,


one may
conveniently plot the results in polar diagrams
of the type
= $-(p; co),
<r a parameter, co = e - a continuously
variable,

indicating

energy

how much

transmitted in a conical illuminating bundle having


an apex
angle la and striking a particular diopter at a height
angle co. (Instead of the
latter the diagram may be entered with
a rescaled marginal height h
m!kx
to find the correct radius on which the resulting
is found.)
is

Fig. 12-14a,

The

real

and

b presents such diagrams for

virtual illuminations -parts (a)

MgF2
and

on

glass (n t

(b), respectively,

1.65).

-are

OPTICS OF THIN FILMS


the total number of
each treated in the air/glass and glass/air combination,
account.
cases thus being four. The cos ^-law is taken into
the drastic
the glass/air cases deserve special comment on
reflection
drop of performance even for small co. These are due to total
in
bundle
conical
the
occupied
by
aperture
occurring in at least part of the

Some of

question.

Coming now to

larger absolute values of co, each of the curves

incidence angle on the

^(a;

air side

co)

has

stopped by a dot indicating that the


from the
reached the value 45. This is to separate the technical situations
conditions. Taking
drastic drops in transmission occurring in the extreme
45 - a
frontier dots are placed at the angles co =

is

for

X^

0, the

a for the glass/air cases.


effects
With this limitation, the loss of performance due to obliquity
co,
small
for
whereas
negligible:
may be declared as moderate, though not
slightly
is
it
apertures
larger
gt w = l _ sr w is slightly less than 1 %, in the
from
more than this value. The difference is equivalent to a change of glass

for the air/glass cases

and

at 27

notoriously
category (1.65) to light glass (1.52), where MgF 2 is
perceptible.
as
regarded
be
must
performance
of
change
less effective. Such a
The variations of integral loss W as computed here are somewhat

the

medium

considered in full.
exaggerated by the fact the mechanical obliquity effect is
to the isoenergetic
due
trends
On the other hand there is some easing of the
emission-detection characteristics used in the computation.

One may

there-

It was our aim


ways of visualizing the
convenient
some
and
problem
the
of
the structure

to outline

fore consider the results as roughly representative.

results.

parameters
Let us continue for a while to follow some other optical
apart from

^w

The essence of obliquity effects

is

shift to the blue.

Computing

there-

3~ functions, one obtains spectral transmission


fore the spatially integrated
x
the maximum of
characteristics with maxima more or less displaced from
the plane-parallel model.

The ^"w curves of

labelled
Fig. 12-14 are provided with short dashes

&

\ curves corresponding to a given


Angstroms of the
not shown and the shift is meant
are
conical illumination. The
k curves
positioned.
nominally
is
relative to 5500 A where the MgF 2

with the

shift in

&

It is

now clear that with a

impair the energy efficiency

selective detector the shifts

of the blooming. The

may

significantly

actual performance

included

measured and computed for an optical system with obliquity effects


transmission estimated from a
is often found to be 5 to 10 % less than the

PERTURBATIONS
533

plane-parallel model of the lens. On


the other hand, there may be
cases
where no appreciable difference is
found. This can happen when
most
of the refracting surfaces are non-critically

illuminated,

image points, even if blurred by aberrations,


It is

lie

i.e. the intermediate


near the centres of curvature

the mechanical obliquity effect that


then prevails.

600

nm

Fig. 12-15 (a) five-element


projecting lens to be
optimized in blooming with respect to a
prescribed
spectral position of the maximum of
x , (b) spatially
integrated transmission curves 3~ when

layers are biassed

by

individual
k
table in text.

One such example

may be demonstrated on a five-element projecting


lens according to Fig. 12-1 5a. Evidently,
the rays strike the refracting surfaces
at very small angles, but the surfaces
are rather curved

ed to be coated uniformly.
With obliquity-sensible
or mechanical effects) one

by

lens systems (be

it

and cannot be expect-

due to angles of incidence

may

try optimization of the individual coatings


presetting the optical thicknesses in the
upward sense so as to

obtain

OPTICS OF THIN FILMS


534

the correct setting


significance

To

on some outer central zone which has a higher geometrical

owing to the excess of area over the apex zone.

the lens was required


correct a yellow absorptive tint of the glass,
matching of the
Individual
4800
A.
at
maximum transmission

to have a

for the
surfaces led to the following table of A -values

5400

5600

4800

5200

5100

MgF 2

5100

5500

layer:

4800 A

bias, which
obvious that the plane surfaces could do without any
mechanical
the
is
factor
determining
the
convincing evidence of the fact that
are small
incidence
of
angles
the
Fig. 12-15a indeed shows that
It is

is

obliquity.

by as much as 800
even on the curved surfaces. These require presetting
Although the rotating workholder
in A to counteract the uneven coating.
may somewhat reduce this effect, it will not suppress it entirely.
from infinity,
integrated over the full aperture with light coming
line just
dashed
The
12-15b.
in
Fig.
line
solid
the
curve is given by

If t

the 2T X

is

thickness A = A /4
below corresponds to the case that a unified optical
so as to yield
matched
been
having
A
is evaporated onto all the surfaces,
The simplicase.
given
the
at 4800 A. A was 5200 A in
the maximum of
9~
v
result, representing 1 % loss in
fied optimization yields a slighty worse

with the eye as the receptor.


far the
depends on the particular monitoring techniques as to how
the analysis shows the
individual matching can be respected. Anyway,
It

trends inherent in the problem

and

gives clues for the experimental develop-

ment of optimum performance where


be respected.
In concluding

glare,

may

an example for the


which forms one of the options of the program

this discussion

computation of veiling

the actual mechanical effects

we

shall present

mentioned above.
lens system is formidSince the scheme of all the zig-zag reflections in a
insignificant
energetically
the
neglecting
able, the problem was simplified by
higher-order reflections and

the simple zig-zag traversals that are


so, a number of situations that had to be

it is

considered in the program. Even

an arbitrary plane
solved in computing the distribution of veiling glare in
refer the reader to [24] for full details of
required delicate treatment.

We

the philosophy of the approach.


Fig. 12-16

shows the distribution of white

the focal plane of a triplet lens (schematically


with A
it is bloomed by A /4 layers of MgF 2

light intensities

shown

Jy)

in the insertion)

4400 and 5000 A.

in

when

PERTURBATIONS
'535

The overall shape of tfe curves is


similar to a Gaussian distribution
which ,3 natural considering that extremely
acute intersections of the control
plane are due to bizarre catadioptric
traversal which are rarer. The sharp
bends correspond to situations
where some

zig-zagVays are stranded in the

lens tube (the

program having this under control). The


maximum of the
curves lies on the optical axis and
reaches the 0.05 % level. For various
types
n 8Jven
tWs 1CVel Varies the bends r^ning
"
inTr
n place^ Without any antireflection
the lens would have

ZT

^7 1 ^T*:-

Wkh

'

svftem the level could sink to 0.002


system
%.

6.9

of white

effWtiVe broad -"and antireflection

54-0 run

YOnm]
Kg. 12-16

Distribution of white veiling glare in


the focal plane of a triplet taking
lens.

?L
djS

CUfVeS C uld
C

ffident

^
being reached for X

?\
the

TT,

now be

^nimum

th
>
also approximately at this value
that
maximum of <Tk is more pronounced thaa

5100 A.

It is

reaches its maximum. The


minimum of &w
These trends may be further

ot the source

inteSrated to yield the white light

K iS iD the 5 - 10 % ran*e

and detector

modified by introducing the

into a particular problem.

selectivities

OPTICS OF THIN FILMS


536

12.6 Production errors


evaporation

factors during the


There are a host of potential disturbing
of phenomena is of a physicalof thin films in a vacuum plant. One category

evaporant, boat, residual

among the
chemical nature, involving interactions
and substrate surface, as well
walls
atmosphere, desorbed gasses from the
With advances in the design
as the influence of thermal dissociation, [25].
of the Know-how for thin film
of vacuum coating plants and broadening

practically insignificant, at
evaporation these phenomena have become
a
dielectric materials evaporated in
least for a selection of well-behaved
by
heated
boats
or
clean plant from suitable crucibles

highly efficient and


bombardment. Provided that
ohmic resistance or with the help of electron
are also mastered, one is in a posithe techniques of cleaning the substrate
defined films as regards their optical
tion to evaporate physically well
Considering the problem of uniformity
properties, structure and adhesion.
plant geometry (possibly requiacross the substrate diameter as one of
of reproducibility lies in the conring special gear) the essential problem
the layer.
trol of the normal dimension of
available for monitoring layer thicknesses
now
are
number of methods
these as well as of the methods
during deposition. Exhaustive treatment of
layers is given in [26]. Let us mention
for measuring the thickness of finished

at least the

most important methods used

in optical practice.

the thickness of individual


In the early stages of thin film deposition
or by the weight of the evaporatlayers was controlled by the reflected colour
as outdated
the former method must now be regarded

ed

material.

the latter

and

Whereas

may keep

its

where linearity
limited importance in circumstances

experiment.
simplicity are the sought features of the

applicable only with certain materials

and the number of

as
by the number of boats, but an accuarcy as high

with some

The method

is

layers is limited

may be

achieved

skill.

was tne
some quasicontinuous measurement
a Fabry-Perot
monochromatic light filtered out from a tungsten bulb by
order to separate the heating
interference filter. The light beam is chopped in
^
amplification. The turning
glow from the optical signal in the subsequent ac
integral multiples of A/4
points of the ammeter indicate the deposition of
monitoring filters with different
in optical thickness. Having an accesory of
turning points, a number of
of
X one may evaporate, by the method

The

first

truly optical

method introduced

for monitoring

of reflectance or transmittance in

reliable to interpolate this process


discrete thicknesses. It is regarded as less

PERTURBATIONS

537

between the turning points.

Many

commercial versions of

this device are

available.

A typical disadvantage of this system is that the process is being stopped


an error as great as 10 %

in a stationary condition of the indicator so that

could be incurred unless the operator introduces proper bias. The error is
then about 4 %. Fresh test glases may be introduced for each layer, or a
sequence of layers is controlled by one test glass where the layers cumulate.
This increases the contrast of the method to a certain degree and also
introduces a kind of compensation where the succesive errors cancel,
provided that each step is conscientiously accomplished by a turning point.

definite disadvantage is that the test glass is differently placed from


the charge proper so that there arises a problem of calibration and its

constancy.

The same

is

also true of the next objective

method using the

crystal oscillator.

If a quartz crystal is excited to thickness-shear oscillations then, with


the geometry of the crystal given, the fundamental frequency is inversely
proportional to the mass of the plate. If this is augmented by a thin film

evaporated onto the crystal the frequency


tionally to the

shifts to

smaller values propor-

mass increment and, with the geometry again

physical thickness of the layer. Several tens of layers

one

may

given, to the

be cumulated on

crystal without mechanical interference.

The fundamental frequency is of the order of MHz and the frequency


evaluated by a differential method using an identical crystal not
exposed to coating. Each material may be calibrated in terms of the number
shift is

of Hertz units necessary for producing a given thickness h and hence also
A = nh.
typical value is 1000 Hz for A/4 of MgF 2 There are some
problems of thermal stability, but the system may be developed into a highly

reliable

monitoring device, provided

its

use

is

accompanied by

special

precautions as to maintaining an exactly defined residual atmosphere


[27, 28]. One of the great advantages is that this method has a linear

response and allows monitoring of highly detuned systems containing both

and metallic layers. Several commercial versions are now available.


by analog meters, the accuracy is
about 2 %, but if a digital counter is operated, as low a value as 0.5
%
dielectric

If the frequency shifts are evaluated

may be

attained. This accuracy of

measuring frequency shifts is projected


by which the conditions of evaporation

into the technology only to the degree

are kept constant.

In addition to thickness, the growth-rate is sometimes monitored as an


important physical parameter of the deposition process. This may be obtain-

'

OPTICS OF THIN FILMS

538

ed either by electronic time derivation of a

digitally controlled crystal

may be directly measured


which is proportional to the rate of flow of the evaporated particles. Modified
monitor, or, conversely, another physical quantity

ionization gauges

momentum

may

be used for

this,

other devices use the transfer of

of the arriving atoms. The total physical thickness

obtained as a time integral of the continuously measured

is

then

rate.

100

F* """"^^l^
so

^X\^

60

>

70

60

l\ 2
so

Fig. 12-17 Individual


shifts

of central

20% variations in the components

maximum

layers 5, 6, 7 are not

affect

shift

120

(HL) 3

j>(tc/2).

<p

and

H G stack:

Variations in the

investigating the influence of thickness deviations

a time which usually discloses various

sensitivities

The other approach consists in varying all


taneously. The only realistic way of doing this is
layers.

4.

vice versa.

approaches are possible. In one a specific relative variation


layer at

being roughly symmetric about the case

A positive variation entails a shift towards smaller

When

of a

edges rather than the value

shown, the

>

ns

90

75

is

two

different

applied to one

of the individual

the thicknesses simul-

to suppose a random
scheme of layer thicknesses. Various
standards of technology may be characterized by proper r-m-s deviations
for the random sets from the nominal mean values: up to 2 % representing
a very high standard, 2 to 5 % being achieved in some routine work ,and
more than 5 % being due to ill-defined conditions of evaporation (including
a fickle evaporant) and possibly also to lack of skill in using a monitoring

distribution of errors across the

device.

The pioneers of
and

Seeley, [31].

approaches.

We

the

random

error

shall present a

method seem

few

illustrative

to be Ritchie, [30],

examples for both

PERTURBATIONS

539

Taking a tuned stack one finds that the central value is quite insensitive
to variations in the individual thicknesses. Fig. 12-17 shows
the stop-band
of a seven-layer

(HL) 3

HG with the refractive index pair 2.35/1.38 subjected

to individual variations by
thickness. This
(i) e(rc/2) is

20

in optical,

i.e.

also in geometrical,

an exaggerated value which serves a double purpose:


seen to be still practically unaffected (ii) the produced displacis

ements of the band edges are more

easily readable.

Table 12-5

Edge displacement AAe as a fraction of edge position A in the seven-layer


analysed
e
Fig. 1217, as a function of position of the
mismatched layer.
|

in

|AA |/A e .100%


order

number
1

of layer

-10%
+10%
-10%
+ 10%

0.85

1.42

1.79

1.83

1.52

1.07

0.44

0.68

1.02

1.20

1.23

1.10

0.81

0.39

0.68

0.99

1.15

1.18

1.06

0.81

0.41

0.96

1.67

2.12

2.15

1.75

1.11

0.44

left

slope

right slope

The edge shifts interpolated from computer records are summarized


The relative difference with respect to the exact position of the
edge defined by e (A e ) = 0.45 is shown. The error underlying
this table is
10 % so an easy interpolation may be possible. A positive or negative error
in table 12-5.

corresponds of course to AA ^
e
Obviously, the central layer

0.

become twice
7

>t/2

7 S

as thick.

HW

filter

most

is

clearly comprehensible considering

how

sensitive to

a mismatch, which

the trends develop

when

is

the layers

The central layer then becomes the spacer of a


and the value Q(it/2) has to cover all the way down

% which is the reflectance of the 1/G effective interface of this


The same procedure in the other layers leads to more or less unbalanced

to about 4
case.

SHW

Shallower dips develop at q> = jt/2 which -is associated with


even for small deviations from the A/4 condition.
The relative errors incurred in the individual layers need not all be
equal. Taking, for example, the 4
antireflection layer of
3.4.3 we
filters.

a lower

sensitivity

AR

have the optical thicknesses 1000

476

400

300

1000
roughly taken for the reference thickness instead of the true value
1050
required for proper positioning in the visible spectrum).
(if

is


OPTICS OF THIN FILMS

540

a linear monitoring method at hand securing a relative


accuracy of 1 %. This may be the case with a crystal oscillator whose
analog frequency meter has a scale with the least subdivision of 1/100 and
when the A/4 layer for green light requires approximately this full scale

Supose there

This

shift.

is

in fact true for

The top
green

is

light, its

if the

range

is

set at

500 Hz.

being roughly 1.4 times thinner than A/4 for

Si0 2
must be presumed

layer of

error

Ti0 2 and Si0 2

to be of the order 1.5

%. The follow-

ing two layers being slightly less than half the optical thickness of the

Fig. 12*18 Tolerance channels for the

are

2%

3%

in the top layer,

AR

first

antireflection coating if the relative errors

in the central layers

and

5% in

the bottom layer.

of the error signs in the two lower layers


sign pairs in the top layers: a) (++),
following
the
are combined in this order with

The

pairs

(++),

(+

),

b)

h), (

(+,-),

c)

(-+),

d)

).

PERTURBATIONS
Fig. 12-19 Effect of

of errors with

541

a random distribution

rmsdeviation

of

89

10

2%

90

92

91

'

100

a THW 3883 HL filter. The


dashed line represents the non-cemented
in

s^7\
^*

|*r
9fr

case.

y.

pv/"
BO

if
I
I

70

one, their errors must

being very thin,

is

lie

in the

3-4

% interval. Finally the bottom layer,


5-6 % range. A- numerical study

liable to errors in the

of these individual errors would disclose that the deviated

results are

about the same magnitude, hence the unevenly distributed errors are
by the decreasing sensitivities of the thinner layers.
Fig.

1 2- 1

is

of

offset

a study of the effect of these errors if they are simultaneously

combined according to the attached schemes. Each of the four batches of


curves fills a tolerance channel shown in the figure. The channels are narrow
enough for the system to remain effective as a reflection-reducing element.

We have already followed in Fig.

3-53 and 3-62 the effect of production


on the maxima of a DHW and THW filter. If we
subject the latter to a random distribution of errors with 2
% r-m-s deviation,
we obtain the shapes in Fig. 12-19. The distortion may be regarded as being
on the verge of plausibility and the inference follows that the standard
errors in the spacer layers

deviation for the production of these

On

the other hand, the latter value

filters

is

shoufd be

% rather than 2

%.

quite satisfactory for the production

of edge

filters with a tolerance channel of 150 A.


Errors in optical monitoring are thoroughly discussed for various
purposes in [32-35], and also in ref. 3, Ch. 5.

Finally we remark that the error scale may shrink to remarkably


small
values in repeated production of one item (i.e. one system on a given substrate

and workholder), whereas even an experienced laboratory may have a rough


lends an ear to the diversified wishes of individual customers. The
problem then is one of plant calibration rather than of monitoring techniques
and allowance must be made for each settling of the process.
life if it

OPTICS OF THIN FILMS

542

References 12

[1]
[2]

H. A. Macleod, book, see ref. 29. in Ch. 3. p. 123.


D. L. Caballero, /. Opt. Soc. Am., 37, 177 (1947).
Bousquet, Journ. de Phys. et Rad., 25, 50 (1964).

[3] P.
[4]

M.

[5]

H. Davies, Proc. IEE, 101, 209

[6]

E. P. Lavin, Specular Reflection,

F. Verhaege, Opt. Acta, 17, 843 (1970).


(1954).

Adam Hilger, London,

1971

[10]

O. Porteus, /. Opt. Soc. Am., 51, 123 (1961).


J. O. Porteus, J. Opt. Soc. Am., 53, 1394 (1963).
H. E. Bennet and J. M. Bennett, Precision Measurements in Thin Film Optics,
in: Physics of Thin Films, Ed. G. Hass and R. E. Thun, Vol. 4, Academic Press, 1967.
I. Ohlidal, K. Navratil and F. LukeS, /. Opt. Soc. Am., 41, 1630 (1971).

[11]

I.

Ohlidal and F. LukeS, Opt. Comm., 5, 323 (1972).

[12]-

Ohlidal and F.LukeS, Opt. Acta, 19, 817 (1972).

[7]

[8]
[9]

H. Bennett and

J.

A. Stern, Phys. Rev. Let., 19, 1321 (1967).


A. Otto, Z. Phys. (216), 398 (1768) and (219), 227 (1969).
A. Salwen and L. Stensland, Opt. Comm., 2, 9 (1969).
L. Stensland, Proc. Electro-Optics International, Brighton 1972, p. 307.
B. Fitton and E. A. Trendelenburg, Surface problems in Space Research,

[13] E.
[14]
[15]

[16]
[17]

warter, Ed., Ergebnisse der Hochvakuumphysik

Bd.

II,

in: M. Auund der Physik dinner Schichten.

Stuttgart, 1971.

N. Hodgson, Optical Absorption and Dispersion


London, 1970.

[18] J.

[19] E. Spiller, Appl. Opt., 13,

in Solids,

Chapman and

Hall.

1209 (1974).

[24]

/. Opt. Soc. Am., 60, 794 (1970).


H. Kubota, in: Progress in Optics, Ed. E. Wolf, Vol. 1, 213, North Holland 1961.
J. Nuc, Jemnd mechanika a optika, 16, 182 (1971).
P. W. Baumeiste'r, see ref. 6. in Ch. 8.
K. Kuznikova, Trans. 3rd Symp. INTERKAMERA, Prague, 1969, p. 161.

[25]

M. Auwarter,

[20] J.

[21]
[22]
[23]

[26]
[27]

[28]
[29]

[30]

Crowell and R. H. Ritchie,

in: ref. 11. in Ch. 7, p. 14.


K. H. Behrndt, see ref. 14. in Ch. 3.
H. K. Pulker and E. Girardet, AVIRES, Vol. d. Compt. Rend., Dijon, 1968,
H. K. Pulker and H. Hilbrand, Z. f. angew. Phys.. 23, H. 1, 15 (1967).
Z. Holubova, Jemnd mechanika, 18, 173 (1973).
as reported by H. A. Macleod, book, see ref. 29. in Ch. 3., p. 23!

[31] J. S. Seeley, Final Scientific

[32]
[33]

Report,

USAF

Contract

AF

61 (0521

H. A. Macleod, Opt. Acta, 19, 1 (1972), and also ref. 8. in Ch.


H. A. Macleod and D. Richmond, Opt. Acta, 21, 422 (1974).

[34] E. Pelletier et al.,

p. 105.

833.

5.

Opt. Acta, 20, 509 (1973).

[38]

H. Lissberger, see ref. 2. in Ch. 2.


see ref. 60. in Ch. 3.
D. H. Rank and H. E. Bennett, /. Opt. Soc. Am., 45, 69 (1955),
D. E. Gray, Ed., American Institute ofPhysics Handbook, 3rd edition, MacGraw-Hill,

[39]

1972. (n in table 66-55).


L. E. Holland, Vacuum Deposition of Thin Films,

[35] P.

[36]
[37]

Chapman and

Hall, 1956.

Subject index
absentee layer {see latent layer)

absorption

approximation of geometrical optics (see


WKBJ approximation)

of metallic core 216


of metallic film 198

associated functions 457, 458

spurious 224, 507

asymmetric

Argand diagram

achromatic

52, 58

reflector

308

attenuation factor 194

antireflection coatings 96, 110

by detuned multilayers 139


by discrete points 111
by exacts synthesis 374

by A k2 =
401
by detuning 141
by exact synthesis 384
filters

Bessel functions in theory of inhomoge-

neous layers 434

beam-splitters

additive

Banning's polarizing prism 180, 359


Berning's circle 271

bilateral invariant

279

bi-layer (see simulated)

Biot-Arago mixing rule 474


blocking filter 161

156

admission zone 152 (see also pass-band)

boundary conditions

admittance

Brewster angle 72, 82

characteristic optical
effective

broad-band

37

38, 41

reflectors 151 (see also achro-

matic)

89

Butterworth polynomials 375

input 40

monotonous and symmetric combinacalibration condition 402

tions of 71

Airy summation 47
complete algorithm for 51
in metals 195

cardinal points 70
cascaded network 370
Cauer's expansion in

partial

fractions

419
alternating structures 84

cavity

amplitude condition 74, 10?


analogies between thin films and networks

412

filters

Chebyshev polynomials
diagrams 349

98, 376, 386

coefficient

approximation by simple reflections

52

as a Fourier transform 458


in

monochromatic

circle

approximate synthesis 365


in a dielectric multilayer

(see

laser cavity)

an inhomogeneous film 455

cumulative reflection 40
internal transfer 61

normal

coefficient of transmission

of finesse 80, 296

44

and

OPTICS OF THIN FILMS

544

of reflection (also transfer coefficient) 43


energy 44
of transmission (also transfer coefficient)

43

in

FTRrfilm 237

in metals 196, 203

enhanced

reflection

323

envelopes of reflectivity 253, 258

energy 44

Epstein layer (see transition layer)

cold mirror 158, 325

equiripple 375

compact poles 419


complex

equivalent
layer, index, thickness

angle of refraction 183

etalon (see Fabry-Perot)

dielectric constant 21

evanescent wave 230

247

refractive index (see index of refraction)

even-alternating (see alternating structures)

transfer coefficients (see coefficient)

exact synthesis 364

vector amplitude 25

exponential layer 433, 442, 445

vector of refraction 185

extension

wave normal (see wave normal)


concentration by weights and volumes 472

bilateral 259,

contiguous stacks 85, 150, 228, 268


contrast of

filter

296

266

front-extension theorem (also input-side

extension theorem) 270


layers 85

core of general layer system 214

extinction coefficient 187

counterabsorption 217

extremum-phase

critical

crystal oscillator 537

cube

409

Fabry-Perot

reflector (see thick layers)

cut-off, cut-on

edge (see edge

laser cavity (see laser cavity)

filters)

reflection 6talon

transmission
Darlington's synthesis 364, 424 (see also

300

Argand diagram 121

monochromatic

filter)

Fizeau fringes of equal thickness 284, 314

design wavelength 87

Foster's theorem

detuned multilayer 85

Fourier

on LC-networks 426

expansions for 3t and S" 286

dichroic mirrors 154

transform in the theory on inhomoge-

dispersion
distorsion of spectral curves

due to 499,

505

neous film 458


frequency

of dielectrics 496

characteristic 368

of metals 26, 197

complex

of phase (see phase)

real (o

double-half-wave

chromatic

(see

filter

type sandwich 284

insertion loss)

deltoid

reflectors

angle 230

filter

93 (see also mono-

filter)

Drude's formulae 453

s 365

365

transformations 377
-true analogy 414,

416

Fresnel's formulae 39
in metals 190

edge

filters 88,

151, 257

ellipsometry

of dielectric films 80
of metallic surfaces 191
energy balance
generally 44, 68

in

WKBJ

approximation 438

front-extension theorem (see extension)


front-surface

mirrors (see enhanced

re-

flection)

frustrated total

reflection

monochromatic

filters)

233

(see also

SUBJECT INDEX

FTR (see frustrated

545

total reflection)

iso-

and

-phase
/

gain function 321

circle

generalized Snell law 183

Goos-Hanchen

shift

-reflectance

-transmittance contours 278

Kard's
expansions of the

Haidinger fringes of equal inclination 284


half-width 161, 297

first

kind 339

of the second kind 342


theory of translumination 346

Hankel's functions in the theory of inho-

Ketteler's relations 187

film 435

heat-reflecting filter 153

laser cavity

Hurwitz condition 368, 371

latent layers

hyperbolic profile 437, 455.

left-and-right incidence

linear layer

boundary film 513

identical

(see

232

gross power-flow ratio (see ratio)

mogeneous

circles

diagrams)

320

92
theorem 240

436

"

load resistance 421

incoherent coupling 149, 156, 492

Lorentz-Lorentz formula 472

index of refraction

low-pass

complex index of refraction 26, 182


effective index of refraction 89
induced transmission 182, 206, 220, 270,

lumped-parameter networks (see network

328
inevitable absorptance 217,

347

skew version of 520

inhomogeneous
film 383, 429

matching
for induced transmission:

admittance 277

28, 186

reflectance 275

input-side extension theorem (see extension)


insertion loss 423

for oblique incidence 105, 398

of curves in exact synthesis:

synthesis 424

integration

difference chromaticity thresh-

old 519

inhomogeneity as production errors 470

wave

(see edge filters)

theory)

MacAdam

Kard's theory of 346

Butterworth 374, 380

method for inhomogeneous

layer 448
interference

and destructive 203


of energy 201, 204, 206, 237

constructive
flux

filter

mirrors 148

Chebyshev 374, 380, 385


Lagrange 397, 405
of dielectric overcoating 412
of refractive index 257
material constants 21

internal field 182, 195, 200, 223

admittance 41

internal transfer coefficients (see coefficient)

chain 414

interpolating reflection levels 143

interference 45

invariant of stratified

media 247

(see also

bilateral invariant)

C of the optics of metals


187 (see also Ketteler's relations)

invariants A, B,

inversion
<>

N,

of the inhomogeneous layer 441


transformed to the ^-variable 365
open-circuit impedance

phase 42
refraction 41

E,-*-at, b, 370

n, 371

'

matrix

system transfer 42
maximally flat 375

m. 414

546

OPTICS OF THIN FILMS

mixing of refractive indices 471


modulus function 368
monitoring methods 536

monochromatic
all

-change upon reflection, transmission 43


conditions 74

diagram 67

niters

dielectric

dispersion 107

single-half-wave

93,

159

double-half-wave 162

Fabry-Perot type 293


FTR 235

phasor functions 20
photometric methods 81
Pohlack's

achromatization by

induced transmission 332


multiple-cavity 173

beam-splitter 328

principle of 79

expansion 385

multiple reflections

(see achro-

polar admittance chart 66

in thick layers 481


in thin films

Ak2 =

matic)

polarimetric methods (see ellipsometry)

48

polarization
basic

components of 23

degree of 92

negative path 242


net power-flow ratio (see ratio)

pole-and-zero plot (see j-plane)

network theory 364

poles of rational function (see Hurwitz

condition)

non-polarizing reflectors 359

position of extrema in Fabry-Perot type

normal

sadwich 290, 303

inhomogeneity 18
transmission coefficient {see coefficient)

positive-real functions

424

potential

absorptance 222

oblique incidence
effective optical thickness in (see optical

transmittance 217, 219, 270

Poynting vector

thickness)

average value of 30

523

effects in lenses

in metals 192,

matching for (see matching)


odd-alternating (see alternating structures)
open-circuit impedance matrix

(see

ma-

200

production errors 536

propagation constant 25

trix)

optical exaltation

472

optical thickness
effective 74, 79,

104

relative 83, 87

quadrant symmetry (see j-plane)


quadratic parameters 347 (see also Kard's

theory of transamination)

random

distribution (of production errors)

538

pass-band 251, 255 (see also admission


zone)
Pauli matrices 247

period of phase diagrams 104


periodic structures 83

perturbations 496

phase
angle

gross power-flow 227


net power-flow 218

standing-wave 227
rational functions

for amplitude coefficients 367


for energy coefficients 368

42
complex

angle

ratio

for tan

<p

x 52

<p

182

<S

410

realizability conditions 368,

Hurwitz condition)

424

(see also

SUBJECT INDEX

547

370
theorem
of network theory 414
on associated functions 458

realization

in metals

reciprocity

ratio (see ratio)

Stokes' principle (see reversibility)

stop-band

recursion formulae

for Airy

86,

summation 49

subsidiary

267

(see

also

maxima (also secondary maxima

86, 255

reduced transmission factors 338

subtractive

reflection

surface

peaks of Fabry-Perot etalon 300


reducing and increasing layers 89

and

251,

99,

rejection zone)

for input admittance 62

specular

206

diffuse 511

filters

156

charge 516

plasma 516
roughness 510

zone 152 (see also stop-band)


renormalization (see Smith Chart)
rejection

symmetrical period 249


synthesis 364

resonance
in

a film 224

tangential

in

thick layers

laser cavity 321

restored field 242

components 36

summing up

multiple reflections

reversibility 241

in a cemented plate 485

reversion (see reversibility)

in a cube 487

Richards' transformation 365

in a pile of plates 484

ripple

inside a plate 481

manipulation of 257

tint in

root factors 368

coated lenses 517

tolerance channel 541


total field 31,

200

sandwich (see Fabry-Perot)

total reflection 213,

separation of variables 28

transfer

shape of extrema
sandwich) 292

(in

Fabry-Perot type

coefficients (see coefficient)

functions

sharp coefficients 244 (see also revesribility)

229

and

transition layer

characteristics

422

446

translumination 217

simulated bi-layer 131

external 221

single-pass gain 320

internal

skeleton (of general layer system) 214


sloping edge 144, 405

Smith Chart 62

220

tuned multilayer 85
ultraviolet filters 153

spacer layer 225, 284


spacerless design 313

vector approximation

j-plane

of j- 52

transformation into 365


distribution of poles

and zeros

of r/t 53
in (also

pole-and-zero plot) 368, 371, 406,408,

412
split-filter

quality of 53

534
Vlasov-Kard formulae 337
veiling glare

technique 163, 172

spoiling 143

square-topped
standing wave

filter

163

wave normal 25
complex 184
wide-band (see broad-band and achromatic)

548

OPTICS OF THIN FILMS

WKBJ

x,

as phase angle for one zig-zag (see phase)

approximation 430
layer 443, 445

wronskian
441

of an

zeros of rational function 368 (see also

inhomogeneous layer

s-plane) at infinity 378

zig-zag reflections 48

AJso from John Wiley

POLARIZATION INTERFEROMETERS
M. Francon and
This

Mai lick, Faculte des Sciences,. Pin's

S.

monograph aims

to

present in simple language the fundamentals of

tiielr Important applications and the latest


As many norv physicists, use these instruments
a minimum of mathematics is used, and the emphasis is en the physical
|ir;n::i;ilHH iiwoivBil. Sane technical details and numerical values are given ta
facilitate the setting up of the instrument ir> the laboratory.

polarization

developments

interferometers,
in

the

field.

59 pages

1971

QUANTUM STATISTICAL PROPERTIES OF RADIATION


Mil lam H, LouiseM, University of Southern California
This book presents

some

of the developments in the theory of the

statistical properties of radiation that

Stresses principles

can be useful

in

quantum

other areas of physics.

and techniques.

544 pages

1973

INTEGRATED OPTICS
Edited by Dietrich

Ma reuse.

University of t/tah

book provides workers in this field with easy access to important papers
and stimulates students to join in the exploration and development of a new,
This

exciting area of optics.

304 pages

JOHN WILEY S SONS


London- New York' SydneyA

Wiley

1973

Toronto

Intersoience Publication

ISBN

471 49531 X

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