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29 MAY 2000
Replacing silicon dioxide in the interlayer with low dielectric constant low- materials to reduce the RC time
delay is a method of boosting the speed of the semiconductor
device.1 It is crucial to know the dielectric constant or refractive index and its dispersion information of such film materials in the gigahertz GHz to terahertz THz range. Conventional metrology methods have frequency limits, e.g., the
low-frequency limit of a standard ellipsometry is about 20
THz and the mercury contact CV method cannot be operated
with a frequency over a few megahertz.2 Time-domain spectroscopy TDS, employing the phase-change measurement
of the electromagnetic wave traveling through the tested
sample, provides a promising tool for material characterization in this frequency range.35 However, due to the relatively long wavelength, the conventional TDS does not provide the sensitivity for the measurement of m-thick films.
Phase measurement near the Brewster angle shows
improvement,6 but it is very time consuming to complete
multiscans in the experiment. In this letter, we demonstrate a
differential time-domain spectroscopy DTDS to determine
the refractive index using the ratio of the differential amplitude to the field amplitude. The capability of measuring dielectric films with m thickness is experimentally demonstrated.
Figure 1 shows the notations used in this letter. We discuss the problem in the frequency domain. E 0 ( ) is the incident field, and E ref( ) and E diff( ) are the reference without the film and signal with the film field, respectively. d is
the thickness of the film. n 1 , n 2 , and n 3 are the refractive
indices. For a film covering on a substrate, n 1 1 air, and
n 3 is the refractive index of the substrate, while n 1 n 3 1
for the case of a free-standing film. The refractive index of
the film n 2 ( ) is the quantity under measurement and usually it is frequency dependent. Its relationship with the dielectric constant 2 ( ) is 2 ( )n 22 ( ), where is the
angular frequency. During the experiment, the beam is fixed
while the sample is moved in and out the THz beam. r i j and
t i j represent the reflection and transmission coefficients of
the i j interface i, j1, 2, and 3, and i j, respectively.
For example, t 23 is the transmission coefficient from the film
to the substrate.
a
t 12t 23 exp i d
E ,
1r 21r 23 exp 2i 2 d 0
n 2 d/c.
For a thin film, dc/ , hence ( )1. Under this approximation, we have
E diff
n 2 n 1 n 2 n 3
i d n 2 1
E ref
c
n 1 n 3
d 1
n 2 n 1 n 2 n 3
.
n 1 n 3
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0003-6951/2000/76(22)/3221/3/$17.00
3221
2000 American Institute of Physics
129.11.76.232 On: Mon, 27 Oct 2014 17:52:42
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c E diff
,
d E ref
E diff
E ref
diff ref .
E diff
E ref
10
diff( ) and ref( ) are the noise percentage for the measurement of E diff( ) and E ref( ), respectively.
In the conventional time-domain spectroscopy measurement, E diff( ) is obtained by subtracting E film( ) from
E ref( ). If the film is very thin, E diff( ) E ref( ) and
E diff( ) & E ref( ) , therefore, the relative noise
diff( ) ref( ). It is seen that
E diff E ref ,
11
ref b &/ 1 c .
12
When the phase change decreases due to the film thickness decrease, the measurement error increases, inversely
proportional to the phase change.
Because the measurement noise mainly comes from the
differential signal E diff( ), the remedy is to increase the
signal-to-noise ratio SNR of E diff( ). The differential measurement technique is ideal for this purpose.
Figure 2 shows the setup for the DTDS. This setup is
similar to the conventional THz system. The laser is a regenerative amplified Ti:sapphire laser Coherent Rega 9000
which provides laser pulses with an 800 nm central wave-
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FIG. 2. Experimental setup.
FIG. 3. Measured THz wave forms of the differential and reference signals.
129.11.76.232 On: Mon, 27 Oct 2014 17:52:42
3223
spectroscopy. We present the theoretical model and preliminary experimental result. This technique greatly reduces the
minimum measurable thickness, and promises dielectric constant measurement of submicron film at a frequency below
10 GHz.
The work is supported in part by the Army Research
Office, the National Science Foundation, and the Semiconductor Research Corporation Grant 448.045. The authors
are grateful for helpful discussions with F. G. Sun and the
sample preparation by Jeff Fortin.
W. W. Lee and P. S. Ho, MRS Bull. 19 1997.
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M. C. Nuss and J. Orenstein, in Millimeter and Submillimeter Wave Spectroscopy of Solids, edited by G. Gruner Springer, Berlin, 1998, Chap. 2,
pp. 743, and references cited therein.
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M. Li, G. C. Cho, T.-M. Lu, X.-C. Zhang, S.-Q. Wang, and J. T. Kennedy,
Appl. Phys. Lett. 74, 2113 1999.
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M. Born and E. Wolf, Principles of Optics, 6th ed. Cambridge University, Cambridge, U.K., 1980, Chap. 7.6.
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Z. G. Lu, P. Campbell, and X.-C. Zhang, Appl. Phys. Lett. 71, 593 1997.
1
2
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