ENERGY-BASED MACRO

MODELS

ENERGY-BASED MACRO MODELS

Overview
Generalized variables
Models of transducers

ENERGY-BASED MACRO MODELS

Capacitive accelerometer

ENERGY-BASED MACRO
MODELS

Source
Senturia:
Microsystem
Design

Source
Senturia:
Microsystem
Design

Microsystems
Microsystems are low-power devices in greatly
confined spaces
RESULT: Strong coupling of physical quantities
between the components of a microsystem
In addition to component modelling and
simulation also system level simulation using
macromodels is needed

Macromodel
Also called lumped parameter model
Analytical, not numerical (FEM)
Exhbits correct dependencies on device geometry
and constitutive properties
Covers dynamic and quasi-static behavior
Simple to use, e.g. network analogy
Easy to connect to system level simulators
Agrees with 3D multiphysics simulation

Generalized variables

Generalized variables - duality

Generalized variables through

and across

Models of transducers
Plate capacitance
C =

A
d

L=

A
d

Inductance

Model of angular capacitor

Model of angular capacitor

Models of transducers physical diagrams

Model of a capacitor

Models of transducers

Models of transducers

Magnetic levitation

Magnetic levitation

MAGNETIC LEVITATION

Magnetic levitation

Magnetic levitation

Mechanical model
Mz = Fm Mg
Virtual work principle
W = Fm z
Fm =

W
W dW
or Fm = lim
=
z 0 z
z
dz

Force

L( z )i 2
W=
2
dW dL( z ) i 2
Fm =
=
dz
dz 2

Electrical model
d
( L( z (t ))i )
dt
di
dL( z (t ))
= Ri + L( z (t )) + i
dt
dt
di
dL dz
=i + L( z (t )) + i
dt
dz dt

E = Ri +

Theoretically

AN 2
L = 0
2z
A = Cross-sectional area
N = Number of turns

From measurements

2.1 104
L = 0.1
(H)
z

Magnetic levitation

Force-gap characteristic

Operating point is always unstable. Feedback control is needed.

State-space model
Fm
g
M
di E R
i dL dz
= i
dt L L
L dz dt


z=

Define the states

x1 = z vertical position

x2 = z vertical velocity
x3 = i current in the field coil

1 dL
Fm = i 2
2 dz
k
L = k1 2 (H); k1 = 0.1; k2 = 2.1 10 4
z
dL k2
= 2
dz z

State-space model

x1 = x2
Fm
k2 x32
x2 =
g =
g
2
M
2M x1
x3 =

1 dL
E R
E R
k2 x2 x3
x3
x2 x3 = x3
L L
L dz
L L
L x12

k2 = 2.1104

Magnetic levitation

Model of a capacitor

V
(1 + g ( x ))
R0

Model of dependent resistor

Polynomial form

P(x) = P0(1+f(x))
1
1
= (1 + g ( x ))
P( x ) P0

V=iR(x)=iR0(1+f(x)) = V0 + V0 f(x)

Model of dependent resistor

Alternate form

V
i = (1 + g ( x ))
R0

Model of dependent resistor

i = i0 + i0 g(x) = i0 + (V/R0) g(x)

Model of temperature dependent resistor

R(T) = R0 (1 + )

which can be written as

V12=i R0

Model of temperature dependent resistor

Model of dependent capacitor

q = CV = C0 (1 + f(x))V = C0 V + C0 Vf(x)
= q0 +q0 f(x)

Model of dependent capacitor

Example capacitive system

x(t )) 0
=

C ( x(t ))

Example capacitive system

Electrical
t
t
d 1 t

d 1
d
1

=
=
+
i
d
i
d
i
d
(
)
(
)
(
)

dt
dt C ( x(t )) 0
C ( x(t )) dt 0
dt C ( x(t )) 0

A A d
d
=
= C0
C ( x) =
dx d dx
dx

dV p

Example capacitive system

Example capacitive system

Domains of simulation

Gyroscope mechanical model

Gyroscope mechanical model

SOLENOID

LAGRANGES EQUATION

MICROPHONE

MICROMACHINED MICROPHONE

MICROPHONE - EQUIVALENT CIRCUIT

MICROPHONE ELECTRICAL SYSTEM

MICROPHONE MECHANICAL SYSTEM

ELECTROMECHANICAL SYSTEM
WITH CAPACITIVE COUPLING

ENERGY EXPRESSIONS

RESULTING MODEL

VHF free-free beam high-Q

micromechanical resonator

Miniaturized communication devices

Resonator beam structure