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What is MEMS?
Abbreviation of MicroElectro Mechanical System.
Contain components of sizes in 1 micrometer (m) to 1 millimeter (mm).
Use the lithographic and other microfabrication technologies to create
miniaturized sensors, actuators, and structures.
In fabrication processes, the addition, subtraction, modification, and
patterning of materials are typically done using techniques originally
developed for the integrated circuit (IC, ) industry.
Output signal:
pressure
a silicon diaphragm
piezoresistors (for resistance change), plus a
Wheatstone bridge circuit
voltage change
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2000)
MEMS as a microactuator:
* Example: a microgripper
Microsystems:
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An intelligent microsystem:
Incorporate signal processing and closed-loop feedback control systems into
a microsystem.
p.s. LIGA: come from the German terms Lithography (Lithographie), electroforming
(Galvanoformung), and molding (Abformung).
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A thermal-bubble-actuated
An
Comparison
of printing results:
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HP 51626A Printhead
2.4 Micro-lens
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(a)
(b)
Fig. Electrostatic Combdrive-Actuated Micromirrors () for Laser-Beam
Scanning and Positioning (Kiang et al., 1998)
3. Microfabrication
3.1 Definition
The technologies used to produce minute components is called microfabrication
technologies, or micromachining.
3.2 Material removal & deposition
Removal:
The 3-dimensional microstructures can be produced by removing part of
the base material by a physical or chemical etching process.
Deposition:
Thin-film deposition techniques are used to build layers of materials on
the base material.
3.3 Evolution
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5 engineering areas:
I.
Mechanical engineering
II.
Electrical engineering
III.
Chemical engineering
IV.
Material engineering
V.
Industrial engineering
Benefits of miniaturization:
I.
Tend to move faster.
II.
Encounter few problems in thermal distortion and vibration.
III.
Make them more suitable for applications in medicine and
surgery and in microelectronic assemblies.
IV.
Desirable in satellites and spacecraft engineering.
V.
Suitable for telecommunication systems.
Examples:
Computers: advanced in 50 years from the vacuum-tube technology to
the IC technology. smaller size, but better performance.
Bio-chips: shorter time for disease or virus detection (plus much less
samples required).
Reference:
1. Halliday, D., Resnick, R., and Walker. J., Fundamentals of Physics: Extended
Version 6th ed, Wiley, John & Sons Incorporated, 2000.
2. Hsu, Tai-Ran, MEMS & Microsystems Design and Manufacturing, McGraw-Hill,
2002.
3. Kiang, M.-H., Solgaard, O., Lau, K.Y., and Muller, R.S., 1998, Electrostatic
combdrive-actuated micromirrors for laser-beam scanning and positioning,
Journal of Microelectromechanical Systems, Vol. 7, Issue 1, pp. 27 37.
4. Kovacs, George T. A., Micromachined Transducers Sourcebook, MaGraw-Hill
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