Professional Documents
Culture Documents
11 (2012)
Research India Publications; http://www.ripublication.com/ijaer.htm
Keywords MEMS, FEM, stress, C-V, Eigen frequency. Where, F is force and w is the cantilever width [8].
The movement of the cantilever is effected by its length,
width, thickness and various properties of the material used to
Introduction make the structure. The geometric shape, as well as the
Now days, MEMS based MICROCANTILEVER has been material used to build the cantilever determines the
proven as an outstanding platform for extremely sensitive cantilever's stiffness. The analysis is done on the structure
chemical and biological sensors [1]. In the past decade micro having following dimensions which is shown in table 1.
cantilevers has become so popular due to its high sensitivity
selectivity, ease of fabrication and flexibility of on chip Table 1: Dimensions
circuits. Also it has become interesting due to convenience to
calibrate, readily deployable into integrated electromechanical Dimension Values
system and does not require external detection devices [2-5]. Length 60E-6
Many previous researches reported attempts made to improve Breadth 10E-6
the cantilever sensitivity using piezoresistive microcantilevers Thickness 1.5E-6
comprise of a polysilicon piezoresistor integrated with silicon
/ silicon-nitride cantilever [6-7]. These researches provided
thorough understanding and strong foundation on silicon- Fig. 1 shows the view of the microcantilever using
based microcantilevers. structural mechanics application mode of MEMS module of
This paper demonstrates the finite element method to COMSOL MULTIPHYSICS.
obtain the optimal performance of SiO2 based
microcantilevers sensor by optimizing the geometrical
dimension of cantilever. A thin layer of Si [100] was
integrated on rectangular SiO2 proof mask cantilever as
piezoresistive material. COMSOL Multiphysics, a
commercial finite element analysis tool for MEMS was used
to develop a finite element model of the SiO2 cantilever.
Where, x is the displacement, F is the restoring force, k is Fig. 5: Frequency response curve
the spring constant.
The simulation results for capacitance versus voltage
graph are given in Fig. 6.
The voltage increases as the capacitance increases due to
applied voltage resulting in deflection of the beam in
downward direction.
CONCLUSION
MEMS based micro cantilever has been designed for a
resonance frequency of 0.63 MHz for an optimized cantilever
thickness of 1.5 m. The stress for this optimized beam is
found to be 4.47e6 pascals. The Capacitance-Voltage
characteristics are found to be linear.
REFERENCES