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PVD Coating
Magnetron sputtering - The sputtering process itself New PM SOP; More
When power is supplied to a magnetron a negative voltage of typically -300V or more is applied to the target. This PVD Coating Uptime
negative voltage attracts positive ions to the target surface at speed. Generally when a positive ion collides with atoms at Order Free PM Kit and
the surface of a solid an energy transfer occurs. If the energy transferred to a lattice site is greater than the binding App Notes.
energy, primary recoil atoms can be created which can collide with other atoms and distribute their energy via collision www.foamtecintlwcc.com
cascades. A surface atom becomes sputtered if the energy transferred to it normal to the surface is larger than about 3
times the surface binding energy (approximately equal to the heat of sublimation).
http://www.pvd-coatings.co.uk/theory-of-pvd-coatings-magnetron-sputtering.htm 2010-09-09
The theory of PVD coatings - What is magnetron sputtering? Page 2 of 3
Plasma Etcher
Cleaning Coating
Activation Etching
Modify every surface
with plasma
www.plasmaetcher.com
Sustaining
Engineering
SES - Sales, Service, &
Parts For MRC 600/900
Sputtering Systems
www.sustainingengineering.com
vacuum coating
machine
Specialize in vacuum
coating system
Interactions due to ion bombardment Experienced Chinese
manufacturer
Magnetron sputtering - Almost no restriction on target material www.hcvacuum.com
The sputter process has almost no restrictions in the target materials, ranging from pure metals where a d.c.-power supply
can be used to semiconductors and isolators which require a r.f.-power supply or pulsed dc. Deposition can be carried out
in either non reactive (inert gas only) or reactive (inert & reactive gas) discharges with single or multi-elemental targets. Carbide Coatings
Wear Resistant
Magnetron sputtering - Magnets enable lower pressures to be used
Carbides, Ceramics,
During the sputter process a magnetic field can be used to trap secondary electrons close to the target. The electrons Pure Metal and Metal
follow helical paths around the magnetic field lines undergoing more ionizing collisions with neutral gaseous near the Alloy Coatings
target than would otherwise occur. This enhances the ionisation of the plasma near the target leading to a higher sputter www.flamesprayusa.com
rate. It also means that the plasma can be sustained at a lower pressure. The sputtered atoms are neutrally charged and
so are unaffected by the magnetic trap.
The technical name for this vital invention is the magnetron. Click magnetron to learn more.
To find out how coatings grow on a surface click nucleation and coating growth.
© 2005 www.pvd-coatings.co.uk
http://www.pvd-coatings.co.uk/theory-of-pvd-coatings-magnetron-sputtering.htm 2010-09-09
The theory of PVD coatings - What is magnetron sputtering? Page 3 of 3
http://www.pvd-coatings.co.uk/theory-of-pvd-coatings-magnetron-sputtering.htm 2010-09-09