United States Patent US00950429082 2) (a0) Patent No. US 9,564,290 B2 Burchfield (45) Date of Patent: Feb. 7, 2017 (SH) MICRO MACHINED TWO DIMENSIONAL 65) References Cited FARADAY COLLECTOR GRID US. PATENT DOCUMENTS (71) Applicants HamitonSundsrand Corporati soe A 11978 om ea Grote, NCS) SESE A libre Saks TS A "G18 end ata (72) Inventor: Seis. A Some Bemenise (03). Asinse: Hatton Sundsrand Corporati Ss BL, p00 Scie sans Charote, NCS) bce pate i edad or agus undo 35 a US.C. 154(b) by 115 days, FOREIGN PATENT DOCUMENTS ate eae) Wo hacetes AL 82003 (22) led: Now 18,2014 orice PUBLICATIONS «) Prive Publication Data bug Sa ae Apatin o s08 US 201610141145 Al May 19, 2016 eae yma, Primary Examiner —Pilip A Johnston Itoi 3700 (200601) (13) aon gen, o7 Ptn Carson, Caskey & Os, Moise —— (cot) fe fons 02 {anoeot) = ansTRact GIN 27/62 2006.01) ea = cine Goeah Asem i ding pis ino scm ey tnd negtve ame to bedteted Te Fray soector dno1d 37244 201301) GOIN 27422 lode 'n pluaty of inept wie Wh Tt 01) tnt 497098 01301) 01d pay ot es cane wt psn pt an N01) Hols 229724405 Q0i801) vend pli of was cong wih neat pot (cs) Held ot Clnineaton Seac {spate partie in hep st ino the postive and usp Se 2501285, plication fie for complete Seach history negative steams. 20 Claims, Drawing Sheet al w S ELECTRIC FIELDU.S. Patent Feb. 7, 2017 US 9,564,290 B2 le 22 24 26 32 : £ i (ee 2 | Sa <= 30 ELECTRIC FIELD FIG.1 52 aa f ae 48: 4 ot , | = [52 L< 35 42, a] a N U S| 51 407 [44 ete Hl = + 3h FIG.2 FIG.3US 9,564,290 B2 1 MICRO MACHINED TWO DIMENSIONAL FARADAY COLLECTOR GRID BACKGROUND OF THE INVENTION “This application estes 1 grid lized ina detector for insruments sich oon mobility and lferetial mobility spectrometers Toa mobility spectrometers (IMS) are utilized wo ideatly trace materi in gas siream. As an example, IMS inst ‘ents areknown which detect the presence trace amounts Of chemical warfare agents, toxic industrial chemicals, oF improvised explosive devecs. ‘One type of IMS is known a time of ight spectrometer, In time of Tight, se fist ionized and then a gating device allows a sll faction of the ions to be analyzed to move ‘nto deilt tube. An clei eld is applied long te dit tube and chemical species are sopanied besed on ther relative mobili, which in tur is function ofthe ioa's molecular weight and size ‘Downstream ofthe drift tube, here is typically a colleetor to communicate the collected ionized particles toa detector Tn some instances, the ionized pareles can have both postive and negative fons, K would be elcent fo detect oth species simultaneously. However, proposals to date 2 hve required larg electric fields and, thus, have compli cated other locations along the detector system, Tehas been known to make miero machined ine electrode ids. However this type grid has been utilized for gating devices in such sensing systems and not atthe collector Jocaton SUMMARY OF THE INVENTION Asyste for dtstig pats in eas sucam comprises a Fara elector sopra chars parle i pontive tnd neptve sen tobe detested. The Pray collector itches a pluraly of ivougsted ites wah a fst Phmlity of wires charg with « positive potent ad a Second plry of wires charged wit a nepatve peal {6 sept porcini he gat sam ita te postive ad “Sess and oter tues may behest understood fom the following deawings and speciation BRIEF DESCRIPTION OF THE DRAWINGS. FIG. 1 shows a diferent FIG. 2 shows a collector FIG. 3 isa cross-section slong fine 3-3 of FIG, 2. DETAILED DESCRIPTION mobility sensing system, _Asshowin ia FIG, 1, jon mobility system 20 isa device for detecting molecules and particulates in sr, These 93= tems have a mechanism 22 for imparting charge on the a constituents, usually a corona discharge source oe raio= sctive ionization source: a mechanism 24 Tor separating the fons by size, sch a a dit tobe oriffrential mobility cell sin! « mechanism 26 for detecting the fons, such as one of more Faraday collectors. Where the ions are separated by size wsing time of Right spectrometry, the analyzer hiss 9 Bating device for gating a portion ofa gas stream into the Ahi tube 24 The deft tube 24 applies an electric el othe Sonized partes, deasng the ions down the tube at veloc ties dependent onthe fil strength and the fon dieters. At the end ofthe dit tube the ions are delivered w Faraday 2 collector 26. In time of fight ion mobility only ions of Positive or negative charge are delivered tothe calector st any one time, based on the polarity eleetrie fick! drawing fons through the dit region "In dllereatiat mobility spoctrometers, however, ions of both polarities are riven trough the analyzer under a ow ‘of ait and separtion i effect by high eguency asa metric radionfequency fil. Where positive and newtive fons co-exist, the Faraday collector fist separate the pet icles int a positive and negative steams. The disclosed Paraday colletor 26 is fr this aplication, apd ineludes plurality of inerdigtted wires. fist plrsiy ofthe wires fre charged with a positive potential and socond plurality “ofthe wires are erg wth negative potential o separate Particles inthe gas steam info the postive and negative Streams, The separated fon stews are clleted othe ltemating positively and negatively charged wies for ‘atetion, The seusing system 20 may be a diferential mobility senso, ako known asa field asymmetric fon anoblty spectrometry system, Allematvely, other types of sensing Systems which ulize a Faraday collector may benefit fom this disclose, ‘As shown in FIG, 1, diffrent particles may receive both positive and negative fons. The ionized particles pass 1 Faraday collector 26 and the disclosed Faraday clletor separates the particles ito «positive fon steam 28 and @ negative fon strc 30, The ion sams 28 and 30 poss 19 ‘detector 32, The system, as disclosed this point, hee than the collector 26, may fusetion as known FIG. 2 shows an enbodiment of Faraday collector 26 Agaid is provided bya plurality of wires 38 asociated with 4 fist bus 34 and carrying 2 positive charge and a second plurality of fine wines 88 extending from second bus 36 and carrying a negative charge plurality of channels 38 fa AD toon the wires 33 and 38 ill ecive the charged parler downstream of the daft tbe 24 of FIG. 1. The ‘Wies will atwact or ep! the ons based upon the fon charze and thus faite te separation int the streams 28 and 30, fs shown in FIG. 1 The numeral SY schematically sows there may be many more channels The collector 26 generally coukl be described ss «grid of fine wires placed clese together and biased altematvely wilt relatively small poteatials In one example, a grid of $0 Imievon thick wires may be spaced 200 microns to defiae the channels 38 and 40. Wires could spon one contimcter hewn ends 48 and $0. In embodiment, th wires may be Jess than 100 miewons tice and spaced by less than 400 Potentials of plus or minus 20 vols of less may be uilized. In other embodiments, poteatials of 10 oF less vols may be uilize. In one specific embodiment, pls oF minus five vols were appli to the buses 36 and 38 Tn an example, where poteatials of pls and minis 10 volts ate uiilzed, a Tek! of 1,000 volioentimeter is provided between the wires, ceiving ions of bo types the Appropriate wires. However, the field will cancel oUt approximately one grid spacing in font of and behind the collector 26. This, operation of aller 26 doesnot pact ‘pon upstream or downstream components of the overall system. The collector 26 may be micro machined from a silicon material. Silicon based materials will provide a relatively ST set of wires and limit the sensi ofthe detector to Imicrophonis. It also simplifies manufacture. Tnone embodiment the aperture 42 was 0-S centimeter “The wires were 10 miron hick snd 80 microns wide, TheUS 9,564,290 B2 3 wires hid 10 chmslem? silicon contacting along st entire Tengih with one micron of plationm. A substate 82 si rounding the electric components may be 10 ohms/em* ‘icon and be SOD microns thick The substrate is main tained ot local ground, The substrate 82 may havea shape as shown in FIG. 3, with an entrane aperture 42 An ext 44 can be gen as bring Inger. Siewalls 46 may be ramped twa ‘On the other hand, ether approaches to providing ave- digitata elctodes at moderate to high pitch could ince chemical etching or photolithography. ‘though an embodiment of this invention has been disclosed, a wosker of onlinary skill in this ant would recognize that cerin medications would come within the cope ofthis vention. For that eason, te following esis shouldbe studied To determin te re seope and content of this invention, The vention claimed is 1.4 system for detecting particles in gs steam com prising «4 Paraay collector separating charged particles into posi- tive and negative streams to be doc, ‘sid Faraday collector inching a plurality of imtentigi- tated wires, wih fist ploality Of said wires charged with positive potential and a second pray of said wires charged with © negative potential to separate paticles inthe gas steam into the positive snd pepative ‘the potenti on si fine wires being less than 20 vols; ‘nd altemating ones of said wires being changed with the Positive and negative potentials 2. Thesystem asst forth in chim I, wherein the potential is less than 10 volt 3. The system as st forth in claim 1, wherein a thickness ot said wires sles than 100 micron, ad a spacing between fdjacent ones of sid Wires i less than 400 micron. 44 The aystm os set fort in lain 1, wiercin positive busis formed at one side of sid collector anda negative bus fs formed ta socond side of sad collector and ane of said buses communicate with cach of sid first and second phiraliy of wires, '5Thesystem a set forth in claim 4, wherein channels are formed between adjacent ones of said wires to recive the ss flow. ‘6, The system as ot forth in claim 8, whercin sid Paraday collector is for ofa silicon materia 7. Tho system a et forth in claim 4 wherein sui bus and ssid wires are received ina sbstrate aad si substrate is rounded, '8. The system a st forth in claim 1, wherein an electric ‘eld from said Faraday collet seancoled out t fess than twice a spacing between ajacont ones of sad play of ‘wires both upsieam and dosistream of sid Faraday’ cle ctor. 4 9. The system asset forth in claim 8, wherein thickness ‘of sid wires lee than 100 micron, ands spacing between adjacent ones of said wires is less than 400 micron. 0. The system as et fot in claim, wherein a positive 5 bus is formed atone side of sud collector anda negative bus is formed at second sie of sid collector and one of tid hres communicate with each of sid firs and second Pluraiy of wie. 1HThe system as st forth in elim 1, wherein channls ‘are formed between adjacent anos of said wires 1 recive the gas flow 12. The system asset forth in clin 1, wherein sud bus and suid wires are received ina substrate and said substrate i ground. 13. An fon mobility system comprising ‘fist mechanism fo imparting charg on ar consituens, ‘second mechanisin for separating ions by sire, and a Faraday collector for separating charged particles iato positive sid negative streams to be detected: std ssid Faraday colletor including a plurality of invendigitatad wires, with fit phiity of said wires hanged ith a Positive potential anda second plurality of sid. wires ‘Charged with negative potenti to separate pariles a the ‘es rem ito the positive and negative streams ‘he potential on sid ine wies sing less than 20 vols: ‘and sltenating ones of sid wires being changed ith the Positive and negative potential 14° The stem as et Fort in claim 1, wherein sid fist ‘mechanism i oe ofa vofona discharge source anda rod 15. The system ay st forth in chim 13, wherin said second mechanism is one of def tube of 2 diflretial mobility eel 16. Thc system a set forth in claim 13, whercin a thickness of sa wires les than 100 micron, ad a spacing betwen adjacent ones of sai wits i fxs than 400 aiton. 17 The system as se orth in lai 13, wherein a positive bss formed at one side sid elector and negative bus i formed ta second side of sd collector and nea std ses communicate with each of sid first and second plraig of wits. 18, The system asset for in elaim 13, wherein channels are formed between adjacent ones of said wires 1 receive the gas ow. 19 Tse system as ot forth in claim 13, wherein said bos and said wires are received ina substrate and said substrate is grounded. 20. The system as so forth in claim 13, wherein an electric eld fom seid Faraday collector is canceled ou tess than twice a spacing between adjacent ones of said plurality of ‘wires both upstream and downstream of said Faradiy eo) lector