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Abstract—In this paper, using computationally intensive 3-D of statistical variability, when gate lengths are scaled to 20 nm
simulations in a grid computing environment, we perform a de- and below [7]. While new device architectures such as silicon-
tailed study of line-edge-roughness (LER)-induced threshold volt- on-insulator (SOI) and FinFETs tolerate low-channel doping
age variability in contemporary MOSFET S. Statistical ensembles
of tens of thousands transistors have been simulated. Our analysis which reduces RDD-induced variability, they remain suscep-
has been predominantly performed on a 35-nm channel-length tible to LER-induced variability [8]–[10].
bulk MOSFET test bed, widely used in previous studies to investi- LER-induced variability has been the subject of numer-
gate the impact of different statistical variability sources. Compre- ous modeling and simulation studies of different degrees of
hensive data mining and statistical analysis provide information complexity and sophistication. The use of 2-D simulations of
about the shape of the distribution of the device threshold voltage,
which is significantly non-Gaussian. Strong nonlinear correlation devices with different channel lengths in combination with
has been observed between the threshold voltage and the average the statistics of different channel length occurrences in the
channel length of the simulated devices. The width dependence of presence of LER has been popular due to the low computational
LER-induced threshold voltage variability has also been simulated burden [11]–[14]. Comprehensive 3-D simulations vary in the
and analyzed. Additional confirmation of the basic conclusions complexity of the LER description from square wave approx-
from the simulation and statistical analysis of the 35-nm test
bed transistor is provided by the simulation of a 42-nm physical imations [15], [16] to realistic statistical descriptions of the
channel-length bulk LP MOSFET, a 32-nm channel-length thin- gate edge based on different autocorrelation functions fitted to
body silicon-on-insulator (SOI) MOSFET, and a 22-nm channel- experimental LER data [17]. More sophisticated 3-D simulation
length double-gate (DG) MOSFET. studies include the confluence of LER and atomic-scale process
Index Terms—line edge roughness, MOSFET, numerical simu- simulation [18] and the impact of LER-induced strain variations
lations, statistical analysis, variability. [19]. However, a common denominator in all of the published
3-D simulations studies is the relatively small statistical sample,
I. I NTRODUCTION which rarely exceeds 200 microscopically different devices.
Recent detailed simulation study of RDD-induced variability
S TATISTICAL variability, introduced by the discreteness of
charge and the granularity of matter, is one of the major
challenges facing the scaling of contemporary MOSFET S in
have shown that simulations of much larger statistical samples
are needed in order to reveal the actual shape of the resulting
statistical distribution and to understand the physical reasons
future technology generations [1]. Random discrete dopants
behind it [20].
(RDD) dominate statistical variability in conventional (bulk)
In this paper, we present a comprehensive 3-D simulation
MOSFET S [2], [3], which remain the workhorse of the semi-
study of LER-induced MOSFET threshold voltage variability
conductor industry [4]. However, the contribution of line-edge
using statistical samples of more than 104 transistors. Contem-
roughness (LER) to statistical variability is becoming increas-
porary bulk, ultrathin-body (UTB) SOI, and double-gate (DG)
ingly important, due to the fact that LER scaling currently lags
MOSFET S have been simulated and analyzed. The large size
the requirements of the International Technology Roadmap for
of the simulated statistical samples allows accurate estimation of
Semiconductors [5], [6]. Recent comprehensive simulation of
the higher order moments and the shape of the distributions of
statistical threshold voltage (VT ) variability in bulk MOSFET S
VT . Intensive statistical data mining is also used in order to
indicates that failure to reduce LER below its current level
explain the specific shape of the simulated distributions.
(approximately 5 nm) could promote it to the dominant source
The simulation methodology and grid technology used to
facilitate simulation of these very large statistical samples is
Manuscript received January 20, 2010; revised July 15, 2010; accepted described in Section II. Section III is dedicated to the com-
July 16, 2010. Date of publication September 9, 2010; date of current ver- prehensive simulation and analysis of LER-induced variability
sion November 5, 2010. The review of this paper was arranged by Editor in a 35-nm gate-length template bulk MOSFET, widely used
H. S. Momose.
The authors are with the Device Modelling Group, Department of before by the authors of this paper to study and compare the
Electronics and Electrical Engineering, University Of Glasgow, G12 8LT impact of different statistical variability sources [7]. Simula-
Glasgow, U.K. tion results for a set of alternative bulk, UTB SOI, and DG
Color versions of one or more of the figures in this paper are available online
at http://ieeexplore.ieee.org. MOSFET S are presented in Section IV and conclusions are
Digital Object Identifier 10.1109/TED.2010.2067731 drawn in Section V.
TABLE I
SUMMARY OF THE STATISTICAL MOMENTS OF THE DATA FOR LER
SIMULATIONS AT VD = 100 mV AND VD = 800 mV. DATA FOR
100 000 RDD SIMULATIONS AT VD = 100 mV IS ALSO
SHOWN FOR COMPARISON
Fig. 3. Relative change in the first four statistical moments of the distribution
of VT as a function of sample size at VD = 100 mV.
TABLE II
SUMMARY OF THE DESCRIPTIVE STATISTICS OF THE DISTRIBUTION OF
VT FOR 35-nm DEVICES WITH WIDTHS 1–4. ALL RESULTS
ARE FOR VD = 100 mV
Fig. 5. Scatterplot of VT against average LC for low and high drain voltages.
The results of simulations with constant channel lengths are also plotted along
with a curve fit of the form α − β exp(−γx).
Fig. 8. Comparison of the distribution of VT due to LER in the four simulated Fig. 9. Comparison of the relationship between LC and VT in the four
devices at VD = 100 mV. simulated devices at VD = 100 mV.
TABLE III
SUMMARY OF THE STATISTICAL MOMENTS OF THE DISTRIBUTION OF VT
IV. I MPACT ON A LTERNATIVE D EVICE A RCHITECTURES AT L OW D RAIN IN A LL F OUR T RANSISTORS
Asen Asenov (M’96–SM’05) received the M.Sc. their application in the design of advanced and novel CMOS devices. He has pi-
degree in solid-state physics from Sofia University, oneered the simulations and the study of various sources of intrinsic parameter
Sofia, Bulgaria, in 1979, and the Ph.D. degree in fluctuations in decanano- and nano-CMOS devices, including random dopants,
physics from the Bulgarian Academy of Sciences, interface roughness, and LER. He is the Author of over 330 publications in
Sofia, in 1989. process and device modeling and simulation, semiconductor device physics,
He had a ten-year industrial experience as the “atomistic” effects in ultrasmall devices, and impact of variations on circuits
Head of the Process and Device Modelling Group, and systems, including, in the last five years, more than 15 papers in the IEEE
Institute of Microelectronics, Sofia, where he de- TRANSACTIONS ON ELECTRON DEVICES.
veloped one of the first integrated process and Dr. Asenov is a Fellow of the Royal Academy of Scotland and a member
device CMOS simulators, IMPEDANCE. During of the IEEE Electron Devices Society Technology Computer-Aided Design
1989–1991, he was a Visiting Professor with the Committee. He is currently a member of the program committees for the Inter-
Physics Department, Technical University of Munich, Munich, Germany. Since national Electron Devices Meeting, the European Solid-State Device Research
1991, he has been with the Department of Electronics and Electrical Engi- Conference, the International Workshop on Computational Electronics, the
neering, University of Glasgow, Glasgow, U.K., where he was the Head in Silicon Nanoelectronics Workshop, the Hot Carriers in Semiconductors, and the
1999–2003. As a Professor of device modeling, the Leader of the Glasgow IEEE Nanotech Conference, and is the forthcoming Program Committee Chair
Device Modeling Group, and the Academic Director of the Glasgow Process for the 2006 Silicon Nanoelectronics Workshop. In the last five years, he was
and Device Simulation Centre, he coordinates the development of 2-D and also given more than 65 invited talks at prestigious international conferences
3-D quantum-mechanical, Monte Carlo, and classical device simulators and and meetings in Europe, the U.S., and Japan.