MICRO

ELECTROMECHANICAL
SYSTEMS (MEMS)
WEEK 1

FALL 2018 NED 1

The Tutor…

Engr. Raza Jafri

Associate Professor
Usman Institute of Technology Karachi.
BE (Elect.) NED University, 1991
MSEE (Elect. & Communications) University of
Engg. & Technology Lahore 1998 (with thesis)
Field Experience: 9 Years (including both
electrical power with NESPAK, and Electronic
Communication Engg. with M/s SEW Lahore
Teaching Experience: 17 Years with UIT
Total Experience 9+17= 26 Years
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The Course…

 An introduction to the enchanting

world of micro (extremely small in
size) electromechanical systems.
 Devices we cannot even see with our
eyes….but they do exist and work upon
the electromechanical theory.
 Imagine it to be a complete processing
factory shrunk to the size of a chip!
 We would explore how such systems
work and how they are fabricated.
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Suggested References….

1) MEMS & Microsystems: Design, Manufacture

and Nanoscale Engineering
by Tai Ran Hsu 3rd Edition, 2012 (2ND edition also
valid)
2) Nano and Micro Electromechanical Systems:
Fundamentals of Nano and Microengineering
by Sergey Edward Lyshevski 4th Edition , 2015
3) Micromanufacturing & Nanotechnology
by N. P. Mahalik 3rd Edition , 2016

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MEMS & MICROSYSTEMS

 Components of sizes…1 micrometer

to 1 millimeter
 A MEMS performs some engineering
function by electromechanical or
electrochemical means
 A typical MEMS would contain two
principal components:
a) A sensing or actuating element
b) A signal Transmission Unit
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MEMS & MICROSYSTEMS

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 Micro Sensors
 Built to sense the existence & intensity of certain
physical, chemical or biological quantities such as:
a) Temperature
b) Pressure
c) Force
d) Sound
e) Light
f) Nuclear Radiation
g) Magnetic Flux
h) Chemical Compositions

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Micro Sensors: Advantages
 Sensitive & Accurate
 Require minimum amount of sample
 Can be mass produced in large volumes

Common Micro Sensors:

 Bio sensors
 Chemical Sensors
 Optical sensors
 Thermal Sensors
 Pressure Sensor
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Microsensors: An example
 THE PRESSURE MICROSENSOR
 Silicon diaphragm of a few micrometers
 Change in pressure sensed by the diaphragm
thru its deflection
 Micropiezoresistors implanted in the diaphragm
convert this deflection into change of electrical
resistance which can be transformed into a
corresponding voltage change!
 Thus Micropiezoresistors are actually part of
the Transconduction unit

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Micro Pressure Sensor
Packages

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 Chemical Microsensors
 Developed for sensing toxic chemicals or
gasses emission such as:
a) CO (Carbon Monoxide)
b) CO2 (Carbon Dioxide)
c) NO (Nitric Oxide)
d) O3 (Ozone)
e) NH3 (Ammonia)

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Biomedical Sensors or Bio
Sensors
 Primarily used for diagnostic analysis
 Miniature size means minimum sample
requirement
 Produce faster results
 Since mass production in batches is possible
hence comparatively lower cost
 Most of these sensors are disposable, hence
no maintenance cost involved

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Biomedical Sensors or
Bio Sensors
Used in:
 Analytical Chemistry

 Biomedicine

 Genetic Engineering

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MEMS as a Microactuator

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Electrostatic Actuation

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Definition of a Microsystem
 The micro, Macro and Mesoscale

 No clear definition of the Mesoscale, one

definition suggests that Mesoscale means
sizes in the range of mm to cm

 Another definition suggests that a

microsystem must contain:

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Definition of a Microsystem

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Microsystems: Microaccelerometer

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Intelligent Microsystems

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Microsystems: Intelligent Inertia Sensor

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Microsystems: Packaged sensor on chip

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Microsystems: Microgears

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Microsystems: A 100µm Pitch Microgear Set

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Micromotors: Nickel based, Rotor dia=700µm, 250µm
dia gear wheel, Rotor/Stator Clearance =4µm, Unit
Height=120µm

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Microturbines: Nickel based, rotor dia = 130µm, Axle, rotor
gap=5µm, Max rot. Speed=150,000 rpm with average life
time =100 million rotations

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Micro-Optical Components

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150µm Microlenses

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