L T P/ SW/F TOTAL

Course Title: IC Technology S W CREDIT

Course Code: ECE431 UNITS
Credit Units: 3
Level: UG 3 0 0 0 3

Course Objectives: This course builds for knowledge of about the fabrication of BJT and MOSFET transistors. Fabrication steps to understand VLSI design
Process & Technology. This course builds a foundation for courses on VLSI design and analog CMOS IC Design to expose students to the complexities and
design methodologies of current and advanced IC design technologies for Post-graduation courses.
Prerequisites: NIL
Course Contents / Syllabus:
Module I 30% Weightage
 Introduction to Monolithic Integrated circuit technology
 Bipolar & MOS IC
 CMOS fabrication, the p-well process, n-well process.
 Silicon wafer preparation & characteristics
 Thermal oxidation, Oxidation system
 Photolithography
Module II 40% Weightage
 Diffusion of dopants, Dopant profiles
 Ion implantation
 Epitaxy, Epitaxial growth of Si
 Etching, Properties of etch processing.
 Dielectric and Polysilicon Film Deposition, Deposition process
 Future Trends
Module III 30% Weightage
 MOS Structure, MOS system under external bias
 Structure & operation of MOSFET, Enhancement mode & Depletion mode devices
 I-V characteristics
 MOSFET scaling
 CMOS technology, BICMOS technology.
Pedagogy for Course Delivery:
The class will be taught using theory only. There is no lab related to this course as it is a open elective course. The instructor will cover all the steps of how an
IC is fabricated.
Student Learning Outcomes:
 Describe the importance of integrated circuits and apply their applications in modern society
 Describe the wafer fabrication process
 Describe the structure and operation of MOSFETs

Assessment/ Examination Scheme:

Theory L/T (%) Lab/Practical/Studio (%) End Term Examination

100% NA 100%

Theory Assessment (L&T):

Continuous Assessment/Internal Assessment End Term
Examination
Components
(Drop down)
Mid-Term Seminar/Viva/Quiz Home Attendance
Exam Assignment

Weightage (%) 10% 8% 7% 5% 70%

Text:
 Basic VLSI Design ,D.A Pucknell & Eshraghain , PHI, ISBN: 9780130909961
 Introduction to VLSI Design and technology by J. N. Roy & D. N. Bose ( New Age International ( P) Limited, ISBN: 9788122430646
 VLSI technology, S. M. Sze ( E d.) ,M. Hill.1988, ISBN: 0070582912
 VLSI Design techniques for Analog and Digital Circuits, Randall L. Geiger, Phillip E. Allen, Noel R Strader, McGraw-Hill Publishing
company, ISBN 0-07-023253-1