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MEASUREMENT

APPLICATION
GUIDE
For VIBRATION/
ECCENTRICITY
Measurement

INDEX
y Selection Guide·· ················································ P.2
y Measurement Principle········································ P.3
y Vibration and Eccentricit y Measurement
Using a Reflective Sensor·· ··································· P.4 to 5
y Vibration and Eccentricit y Measurement
Using a Thrubeam Sensor·· ··································· P.6
y Successful Applications·· ······································ P.7
VIBRATION/ECCENTRICITY MEASUREMENT

VIBRATION/ECCENTRICITY
MEASUREMENT METHOD Selection Guide

Ref l e c tive S e ns o r  P.4

VIBRATION

ROTATION

Detecting the vibration of an Measuring the runout of an HDD


ultrasonic welder

Measuring the vibration of an Measuring the runout of a susceptor


architectural model

Thr u b e a m S e ns o r  P.6

VIBRATION

ROTATION

Measuring the outer diameter and Measuring the runout of a motor shaft
runout of a copy machine roller

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VIBRATION/ECCENTRICITY MEASUREMENT

MEASUREMENT PRINCIPLE

LK-G5000 Series Measurement Principle (Triangulation type) HIGH-SPEED WIDE RANGE

At the reference distance At a short distance At a long distance

Semiconductor Light-receiving Semiconductor Light-receiving Semiconductor Light-receiving


laser element laser element laser element

Transmitter Transmitter Transmitter


lens lens lens

Ernostar Ernostar Ernostar


lens lens lens

Light-receiving Light-receiving Light-receiving


element element element

The semiconductor laser emits the laser beam to the target as shown above. The light reflected off the target is focused by the
ernostar lens and forms an image on the light-receiving element. The position of the beam spot on the receiving element varies
with the distance to the target. This variation is evaluated and converted into a measurement of target position.

SI Series Measurement Principle (Spectral-interference method) COMPACT ULTRA HIGH-ACCURACY

Spectroscopic unit
SLD Interference light Spectroscopic analysis
SI-F01U Sensor head Part of the broad wavelength The two reflected light beams interfere Splitting the interference light into
Polarisation maintaining SI-F01
Light source (SLD)
optical fibre light emitted from the SLD with each other. The intensity of different wavelengths with the
is reflected by the head’s the interference light with a specific spectroscope produces an optical
Spectro-
scope Interference light Emitted light reference surface, while the wavelength is determined according intensity distribution for a specific
Waveform Reference reflection surface Target part that passes the reference to the distance between the reference wavelength. The distance to the
analysis
Diffraction
grating
surface is mirror-reflected on surface and the target. The relative target is obtained by carrying out
CCD
the target and returns into the maximum interference is reached when waveform analysis on the
head. the determined distance is an integral distribution.
Displacement data SLD: Super Luminescent Diode
multiple of the wavelength.

1D Thru-beam Measurement Principle (LS-9000 Series) NEW METHOD LONG LIFE HIGH-ACCURACY HIGH-SPEED

[Principle] Green-LED light is emitted as a uniform collimated beam. The


CMOS detects the position of the edge between light and dark edges of the
received light and calculates measured values.

13.3 times
than convenfaster
Fastest in its class tion
systems al

16000 Hz
sampling rate

Fitted with a high-speed exposure CMOS and


High performance High-intensity
condenser Green-LED high-intensity Green-LED to produce a 16000 Hz
Monitor CMOS Target Position CMOS High-speed exposure CMOS Lens unit efficiently High-intensity Green LED lasts sampling rate, surpassing previous systems.
The Monitor CMOS tracks The CMOS measures Proprietary designed measurement focuses LED light longer than traditional LED Improves production line cycle times and ensures
workpiece inclination to the position between the CMOS features an integrated light sources while providing
automatically correct for transmitter and receiver amplifier to maximise performance high intensity and evenly- more stable measurement.
tilt errors. and speed. distributed lighting.

POINT L S-90 0 0 Series ensures long life due t o its solid st at e design.
The LS-9000 Series has solved
the problem of motor durability
that has been a disadvantage of
the laser scanning method.

Semiconductor laser High-intensity GaN Green LED

No moving parts used!


A moving part (motor) is used!

3
VIBRATION/ECCENTRICITY MEASUREMENT

VIBRATION AND
ECCENTRICITY Vibration and Eccentricity Measurement Using a Reflective Sensor

The displacement of a vibrating target is measured.


Measurement method The amplitude range is obtained by subtracting the minimum
value from the maximum value.

Outputting the
(V) judgment

Peak-to-peak hold mode


Starting Ending
The vibrational amplitude during a specified period is automatically measurement measurement
Maximum value
measured by inputting the timing signal as shown in the figure on the
right. Amount of
vibration

Minimum value
When the measurement result is higher (or lower) than the Timing signal Sampling time
predetermined value, the result is output to an external device.
ON
OFF
(t)

POINT Accurate vibration measurement via high-speed sampling


An important key point to obtain accurate vibration measurement is the sampling rate of laser
displacement sensor.
5 μs sampling

[Example] When measuring vibration with a frequency of 2 kHz using a laser


displacement sensor with a sampling rate of 5 μs, 100 data points per
period are obtained.

50 μs sampling

If the sampling rate is 50 μs, 10 data points per period are obtained.

* Vibration around the peak is not accurately


measured.

200 μs sampling

If the sampling rate is 200 μs, 2.5 data points per period are obtained.

* Vibration cannot be measured.

If the sampling rate is low, the vibration cannot be accurately measured.

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VIBRATION/ECCENTRICITY MEASUREMENT

VIBRATION AND
ECCENTRICITY Vibration and Eccentricity Measurement Using a Reflective Sensor

POINT Stable measurement by various kinds of filter processing

Moving average Sampling period

Measurement
average time The mean value of data to is output as the data A.

Internal data
Measurement
average time The mean value of data to is output as the data B.

Measurement
average time

The mean value of data to is output as the data C.

Output data

Renewal period

Median filter
[Example] 7-sample median filter processing
The measurement values of seven samples are sorted in ascending order and the median is Spike Measurement result
set as the measurement value. Moving average
4 times
Measurement times Median filter

Measurement value 1.1 1.0 1.0 1.5 0.9 1.0 1.0 1.0 1.1
1st Median 1.0
2nd Median 1.0
3rd Median 1.0 A jump of value affects
the measurement in the
For the 1st median, for example, the values ➀ to ➁ are sorted as below and the median 1.0 is moving average method.
set as the measurement value.
A sudden spike is likely to affect the
1.5 1.1 1.0 1.0 1.0 1.0 0.9
measurement using the moving average
method, but the median filter method retains
Low pass filter
stable measurement without a jump of value.
Measurement waveform After processing

One rotation Low pass


Projection Scratch filter
An accurate vibration amount cannot High-frequency component noise
be obtained due to a scratch or is eliminated and only the vibration
protrusion. waveform is output.

SELECTION Sampling rate Accuracy Feature


POINT
LK-G Series Excellent: 2.55 μs Good: Linearity ± 0.5 μm Measurement range: 1 mm to 750 mm

SI Series Good: 200 μs Excellent: Linearity ± 0.1 μm 2 mm ultra-compact sensor head

Applications

Measuring the runout of a disc Measuring the amplitude of a Measuring the vibration of a Evaluating the vibration of a
rotor speaker cone building structure mobile phone

5
VIBRATION/ECCENTRICITY MEASUREMENT

VIBRATION AND
ECCENTRICITY Vibration and Eccentricity Measurement Using a Thrubeam Sensor

Measurement method
Receiver Target Transmitter
A shadow created by the target is identified as the target’s outer
diameter and displacement.

The amplitude range is obtained by subtracting the minimum value


from the maximum value as the target rotates.
Focal distance

Outputting the
Peak-to-peak hold mode (V) judgment
The amount of eccentricity during a specified period is
Starting Ending
automatically measured by inputting the timing signal as measurement measurement
shown in the figure on the right. Maximum value

Amount of
eccentricity
When the measurement result is higher (or lower) than the
predetermined value, the result is output to an external Minimum value
Timing signal Sampling time
device.
ON
OFF
(t)

[Example] runout measurement of an edge of tooth blade


The runout of the edge of tooth blade can be measured by using two indicators with calculation function as shown below.

Analogue output from the indicator 1


Runout of the edge
of tooth blade Edge of the Edge of the Edge of the
Runout amount
tooth blade tooth blade tooth blade
indication of the
indicator 2

Maximum value

Rotation Minimum value

Indicator 1 Indicator 2*
Sampling Sampling Sampling
Analogue Outputting time time time
output the judgment
Runout
Peak value Timing ON
amount
indication signal 1
indication
OFF
Sampling time
Timing ON
signal 2
Timing signal 1 Timing signal 2 OFF

*External device
Indicator 1: Measures the peak values of each edge of blade (the peak values during each
sampling time).
Indicator 2: Indicates the result of the maximum peak value - the minimum peak value as the
runout amount of the edge of tooth blade.

Applications

Measuring the outer diameter Measuring the runout of a motor Measuring the runout of a fibre
and runout of a roller for copy shaft
machines

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VIBRATION/ECCENTRICITY MEASUREMENT

SUCCESSFUL APPLICATIONS

STEEL/BEARING

Vibration measurement for a Steel sheet cantenoid Bearing runout measurement Steel sheet vibration
continuous caster measurement measurement

AUTOMOTIVE/AIRCRAFT

EV motor runout measurement Engine vibration measurement Fan belt vibration measurement Ride height measurement

SEMI/HDD/Li-ION/SOLAR/GLASS

HDD platter runout Susceptor vibration Spinless coater gap Robotic transfer system
measurement measurement measurement vibration measurement

WEB/TYRE

Ultrasonic welder vibration Oscillation measurement of a Rubber sheet thickness, Tyre runout measurement
measurement and positioning coating roll vibration and tension control

ELECTRONIC PARTS/CONNECTOR

Piezoelectric element vibration Motor shaft vibration Air conditioner casing vibration Zoom lens position tracking
measurement measurement measurement

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DISPLACEMENT METER/DIMENSION MEASUREMENT SYSTEM LINEUP
Reflective-Type Measurement Instrument
High-Speed, High-Accuracy High-speed 2D/3D Laser Scanner
CMOS Laser Displacement Sensor LJ-V7000 Series
LK-G5000 Series

HIGH-SPEED 2D/3D

WIDE RANGE MULTI POINT

12 SENSOR HEADS CONNECTION HIGH-SPEED

PROFILES

Surface Scanning Laser Confocal


Displacement Meter
LT-9000 Series

HIGH-ACCURACY

DOUBLE-SCANNING

CLEAR TARGET THICKNESS

Thrubeam-Type Measurement Instrument


High-speed Optical Micrometer High-speed 2D Measurement Sensor
LS-9000 Series TM Series

2D
GREEN LED
MULTI POINT
LONG LIFE

HIGH-ACCURACY

HIGH-SPEED

www.keyence.com

Copyright (c) 2010 KEYENCE CORPORATION. All rights reserved. MeasureVibration-WW-EN1005-E 1084-2 E 600847

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