DEEP SUBMICRON CMOS DESIGN – PART I - BASIC CELL DESIGN 1.

The technology scale down

1. General Trends

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#$# % &

1-1 E. Sicard, S. Delmas-Bendhia 14/06/05

DEEP SUBMICRON CMOS DESIGN – PART I - BASIC CELL DESIGN 1. The technology scale down

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1

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# # #
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1-2 E. Sicard, S. Delmas-Bendhia 14/06/05

DEEP SUBMICRON CMOS DESIGN – PART I - BASIC CELL DESIGN 1. The technology scale down

# #
# / #/

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#
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5&5

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! +
# , @3 !
!
# , @3 &('
= +=B
# , @3 = =B
= 5=B
# ?
'
= =B &'
# ?
=5 =. => >5 >. >= # +
A

() * +

1-3 E. Sicard, S. Delmas-Bendhia 14/06/05

DEEP SUBMICRON CMOS DESIGN – PART I - BASIC CELL DESIGN 1. The technology scale down

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5.B , $ , D*-, 5
#3 $ 3 5 +) #$.
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+,
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#,
# , @3 5.B?

)
# ?
= =B => >5 >. >= # + C
A

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1-4 E. Sicard, S. Delmas-Bendhia 14/06/05

DEEP SUBMICRON CMOS DESIGN – PART I - BASIC CELL DESIGN 1. The technology scale down

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2. The Device Scale Down

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#$C $ #>>
=/ #>>.
/ E #/ #$C
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#>>B 5 C &
C/ & /

1 /
5 = 5=B
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= =B
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8967
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967
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= =B => >5 >. >= # + C

A
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1-5 E. Sicard, S. Delmas-Bendhia 14/06/05

DEEP SUBMICRON CMOS DESIGN – PART I - BASIC CELL DESIGN 1. The technology scale down

3. Frequency Improvements

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# 3G%

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!
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+=B
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= =B B=G #B
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B=G =
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= =B => >5 >. >= # + C
A

/ :

4. Layers

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<DD
& 0 %
7

! " # $
%

# 5/ #>=B 5 . 5. .&. 5. #5

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DEEP SUBMICRON CMOS DESIGN – PART I - BASIC CELL DESIGN 1. The technology scale down

C/ #>== 5 . 5 C&C . =
./ #>>5 #5 # &# B B
./ #>>+ . C #.&#. = .
5./ #>>B B 5. . #C&#C # 5.
#=/ #>>= B #= 5 &5 #. #=
#5/ 5 # B$= #5 5 55&5 #= #5
> 5 B$# # #= 5.&5 5 >
B. 5 . B$#5 = #B 5.&5 C

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# 5/ , 8' $ $ , 8'
=/ , , 8'# 5/ →
, 5/ , 8'
#/ #$>

#
5
D

0, 8'

1 !$ !, 8' #/
. / (

< 0= ">5 ">50

"5?%

./ , 8' $ , 8' ./
, 8' & ,
, 8' ./ →
I . I , #/ , 8' ./
#$#

1-7 E. Sicard, S. Delmas-Bendhia 14/06/05

DEEP SUBMICRON CMOS DESIGN – PART I - BASIC CELL DESIGN 1. The technology scale down

0, 8'
!,8'
#/

01= ">5 @A 0
"5?%

, D , 8' #5/ &$

, 8' #5/ 5/
5/ ) #$## , 8' (
&

#/

!, 8' 0, 8'

2A - 0 =

5. Density

1-8 E. Sicard, S. Delmas-Bendhia 14/06/05

DEEP SUBMICRON CMOS DESIGN – PART I - BASIC CELL DESIGN 1. The technology scale down

,
-
, 8' ) #$#5
F
J
'
(

# 5/ ./

5
5 /

5
B /
#5/ >

5
+ /
5
# /

@4@2 #- B

, %
- $
$
#$# #5/ = 5 8
5 .+ >
( B /

1-9 E. Sicard, S. Delmas-Bendhia 14/06/05

DEEP SUBMICRON CMOS DESIGN – PART I - BASIC CELL DESIGN 1. The technology scale down

#5 .
> B.
= 5
. #5 C B #. 5 #=/ #5/
B/ ./ ./ 5./

B /
(

6. Design Trends

8
& # , (
D' G

&
,
'
# '

#
G
# <GD1 <

#
1
D
#
' ;
1
# ,

#>== #>># #>>+ #>>C 5 5 5 B A

( : #

<GD1 < :< ;

' & # #
) #$#+ * ' :' ;
& # # 0

1-10 E. Sicard, S. Delmas-Bendhia 14/06/05

DEEP SUBMICRON CMOS DESIGN – PART I - BASIC CELL DESIGN 1. The technology scale down

7. Market

' ( & #
K 5# & #.L *
F #>>C$#>>> 5 5
#>> $#>>.

, ( L
<<1

+L

5 L
4 -

$5 L A
= =B => >5 >. >= # + C

1 ; - - - 1B

Conclusion

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& , 8' (
, D

References

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:' -;2 4
:< ;2 4
:<GD1;2 4
:' ;2 4

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DEEP SUBMICRON CMOS DESIGN – PART I - BASIC CELL DESIGN 1. The technology scale down

: ;2 (4
:, ;2 ( $ 4
: *';2 (4
: ;? I<1' , D I' $< 5 #

EXERCISES

# ! , 8'&& $
. N

5 D $ NE
#$

) 5D =/ 5./ ) B
% N

+ H #=
% ## & N

1-12 E. Sicard, S. Delmas-Bendhia 14/06/05