SOLID STATE

BACKSCATTERED
ELECTRON DETECTOR

• EXCELLENT ATOMIC NUMBER

RESOLUTION 0.1Z at Z = 30

• HIGH BANDWIDTH-TV RATE

OPERATION

• LOW NOISE IN SLOW SCAN

MODE
24mm Silicon Detector
• 4 QUADRANT DETECTOR FOR
COMPOSITION OR TOPOGRAHIC
STUDIES.

• RANGE OF DETECTORS FOR,

0.4KeV, 1keV, 4keV, UHV, & STEM
APPLICATIONS.

BACKSCATTERED ELECTRON DETECTOR

The Backscattered Electron Detector
uses a large area silicon diode specially
fabricated for electron detection. Its
development over the years has led to a
compact highly sensitive device. The
four quadrant annular construction Corrosion of Steel.
achieves almost perfect symmetry Composition Image 15kv, x60
virtually eliminating topographic
information and producing a pure
compositional signal.

The ability to select quadrants allows it

to be used for topographical studies with
the compositional information
suppressed.

State of the art electronic amplifiers and

processing use surface mount
technology in critical areas permitting
the highest possible gain and lowest Corrosion of Steel.
possible noise level. Topographic Image 15kv, x60

BSD Issue 4 dated 05/07/04

The 4 Quadrant system offers the
greatest flexibility in imaging with
backscattered electrons, and is often
specified as standard by SEM
manufacturers.
THE SOLID STATE DETECTOR
Above 10keV Standard, Low Voltage
and Ultra Low Voltage devices exhibit
similar characteristics but the Low and
Ultra Low Voltage detectors are ideal
for the more sensitive biological and
semiconductor specimens that could be
damaged by high acceleration voltages.

The K.E.Developments Backscattered The Low and Ultra Low Voltage

Detector may be used routinely with
most types of SEM specimen. It gives
excellent atomic number contrast and is
seldom affected by specimen charging
and edge effects normally associated
with secondary electron images.
detectors may however be affected by
Cathodoluminescence signals or other
stray light, particularly infra red which is
sometimes used for the stage position
sensors.

Due to its symmetrical design

topographic information is virtually
eliminated but by quadrant selection the
topographic information may be
enhanced and the atomic number
contrast completely suppressed.

DETECTOR TYPES

Detector elements are available in a

selection of segmentations, sizes and
sensitivities suitable for most
applications. Polishing Block. Grit Embedded
Rubber. Composition Image.
The Standard detector is used for all Uncoated Specimen
general applications. It has a threshold
sensitivity of around 4KeV. This is the
ideal detector for most systems and is
especially recommended for SEMs with
WDX and EDX capabilities where
general applications require high keV’s
and large probe currents.

The Low Voltage detector was

developed for operation over a wide
range of kV’s and is sensitive to signals
as low as 1keV.

The Ultra Low Voltage detector was

developed with low vacuum operation in
mind, and operates over a wide range of Topographic Image of Above
keVs from as low as 0.4keV.

BSD Issue 4 dated 05/07/04

DETECTOR SIZES
The detector elements are available in a
variety of internal diameters, external
diameters and segmentations to suit the
application. Standard sizes are 18mm
and 24mm.
The 18mm element is ideal for general
applications and is most sensitive at
working distances around 8mm. It is
slightly less sensitive than the 24mm
device due to its smaller area.
The 24mm are best for longer working
distances and gives peak output at a
working distance of about 12mm.
Other sizes of detectors in the range
6mm-35mm are available for specific
applications. In particular a 10mm
element can be used for very short
working distances or for applications
where space is restricted due to the size
of the stage.
18mm Detector
in a typical holder
BSD Issue 4 dated 05/07/04
SPECIAL DETECTORS
Whilst it is feasible to undertake
CATHODOLUMINESCENCE detection
utilizing a light sensitive silicon detector,
a semiconductor CL detector will never
be as sensitive as a dedicated
photomultiplier based system. For
regular CL applications at lower beam
currents the K.E.Developments
CENTAURUS detector offers far greater
performance and flexibility.
A UHV version of the standard detector
is fully UHV compatible and allows the
detector to be baked at up to 200°C
without sustaining permanent damage.
The STEM detector uses a small
rectangular silicon device, which is built
into a standard 12.7mm specimen stub.
The 3.05mm grid is fitted above the
detector and held securely in position
during analysis. It may be used for both
bright field and dark field studies. When
the STEM detector is used a system
with a retractable arm an adaptor
assembly be required.
STEM Detector
 seal it can be prone to slight vacuum
leakage so is less suitable for high
vacuum and cold field emission SEM’s.

The Swing Arm is suitable for most

large SEM chambers and can be swung
out of the way by means of an external
control knob.

A Screw Retractable system can also

STEM Image of Microfossil 25kV,X4000
RETRACTION SYSTEMS
be supplied for virtually any chamber
and offers most of the advantages of the
Push Pull system and can be fitted to
high vacuum and field emission SEMs.
With the recommended addition of
bellows sealing

Retraction systems are provided to hold

the detector element and to accurately
position it just underneath the final lens.

Retraction enables the element to be

moved away from the final lens when
not in use and helps minimize the risk of
accidental damage.

The system also allows the microscope

to be used at very short working
distances and with fine mechanical
adjustment for high resolution
applications.
Swing Arm
As a low cost solution the detector
element may be permanently attached
to the final lens cap. This type of Fixed
system whilst allowing a very short
working distance leaves the element
permanently exposed to damage and
may restrict access for other detection
systems unless a less than optimal
small element detector is used.

The Push Pull Arm is the most versatile

retraction system and can be supplied
for virtually any chamber. Because it
takes up less space internally it is
particularly suitable for the smaller
chambers. As it uses a sliding vacuum Push-Pull Arm

BSD Issue 4 dated 05/07/04

The chance of accidental damage to the SPECIFICATIONS
detector element can be minimized by
the use of a K.E.Developments Infrared DETECTOR ASSEMBLY
Chamberscope, which gives a
continuous overall view of the inside of Annular 4 quadrant N-type diffused
the specimen chamber. junction. Atomic Number resolution
better than 0.1Z when Z = 30.

DETECTOR TYPES

Standard. General purpose applications

Threshold sensitivity approx. 4keV.
Good immunity to stray light.

Low Voltage. Similar to Standard

detector but with increased sensitivity
below 10keV. Threshold sensitivity
1keV. Poor immunity to straylight.

Ultra Low Voltage. Similar to Low

Voltage detector but with Threshold
sensitivity below 400eV. Poor immunity
Brass showing ά and β Phases. Mean to stray light.
Atomic Differences 0.1Z.

STEM. Small single element device

accepts standard 3.05mm TEM grids.

UHV. High temperature version of the

standard detector made with UHV
compatible materials. Can be baked up
to 200°c.

Various other detectors in the

mechanical range 6mm to 35mm and
with a variety of segmentations can be
supplied to special order.

Multiphase Metal Alloy

BSD Issue 4 dated 05/07/04


STEM Thin section of kidney
Sandstone Cathodoluminescence taken
with Centaurus CL detector
ORDERING DETAILS
When ordering please state make and
model of SEM and preferred port.
The Backscattered Detector normally
fits into a specific port. Where this is
already in use it may be possible to offer
an alternative position. Please inquire
for details.
Please also state detector type and size
i.e.”Low Voltage 18mm”.
Where a retractable arm is
required we will normally supply the
K.E.DEVELOPMENTS LIMITED
The Mount, Toft, Cambridge, CB3 7RL, England
Telephone +44 1223 263532 Fax +44 1223 263948
Web Site. WWW.KEDEV.CO.UK Email. sem@kedev.com
BSD Issue 4 dated 05/07/04
SPECIFICATIONS
PREAMPLIFIER
High sensitivity, low noise design using
surface mount components. Size;
144mm(L) x 92mm(H) x 25mm(W).
CONTROL UNIT
Video output level configured for SEM
Quadrant and gain switching using push
button controls with Led indication.
Four gain ranges with noise filtering.
Bandwidth Gain 1 & 2, 4MHz
Gain 3, 200kHz
Gain 4, 50kHz
Free standing case or compatible
modules for some SEMs.
Field Emission correction for some cold
FE SEMs
Auto Bandwidth control for some digital
SEMs
Power Supply 100, 120, 220 & 230V
ac., 50/60Hz.
WARRANTY. Two years from date of
purchase.
most cost effective solution for the
application. If a particular type is preferred
please specify.
Where a retractable arm is not requested
a fixed lens mounting system and a
separate vacuum feedthrough will be
necessary.
K.E.Developments are continuously
improving its products. The product
supplied may therefore differ in detail to
that described in this brochure.