KNH HIN VI IN T TRUYN QUA QUT STEM CU TO V NGUYN L HOT NG

L s kt hp thng minh gia 2 thit b truyn thng TEM v SEM, va to nh phn gii cao kt hp vi cc phng php phn tch thnh phn ha nh ph k tia X EDS

 Nh vic iu khin khu v thu knh hi t, chm

in t c th hi t thnh mt chm tia c kch thc rt hp (cc STEM mnh hin nay c th cho kch thc ti di 1 nm) do cho php ghi nh vi phn gii rt cao c th t c cp nguyn t Chm in t ny c iu khin qut trn mu, nh vy chm truyn qua cng c qut v tn rng to nn s tn x gc ln ca chm in t

STEM DETECTORS

BF detector: ghi nhn chm xuyn thng v tn x khng n hi to nh trng sng ADF detector: annular dark field detector la mt a vnh khuyn c l gia t BF detector dung to nh t nhng tia in t tn x n hi to nh trng ti HAADF detector: high angle ADF detector cng la mt a vnh khuyn c gia nhng ng knh ln hn nhiu ADF detector ghi nhn tia in t tn x vi gc ln

HNH NH STEM V C IM

NH TRNG SNG
nh do tia in t truyn thng v nhng tia tn x khng n hi to nn, cc tia ny c STEM detector bright-field thu nhn

NH TRNG TI
nh do nhng tia tn x n hi to nn v c thu nhn bi detector vnh khn STEM detector dark-field

NH TEM
C phn gii rt cao c th t nb 2-4 angstrom, c bit i vi nh trng ti

NH STEM

HRTEM

STEM

BF, ADF, and HAADF STEM images of Pt-filled SiO2 nanotubes u im ca STEM: C th quan st c mu dy so vi TEM: trong STEM khng c h thu knh to nh sau mu do trnh c hin tng sc sai do mu dy gy ra tuy nhin phn gii gim khi mu dy do e bi hp th v khuch tn mnh

 Gim h hng mu do bn ph bi tia in t: c th gim

liu lng chiu do khng b nh hng bi quang sai, c th qut nhanh mu hoc dng dng chm tia cc b do thm ch c th ng dng cho nghin cu polyme, vt liu sinh hc PHN TCH THNH PHN HA HC BNG STEM Nh ph k EDS tch hp trong STEM c th ghi nhn cc tia X pht x t mu. Nh c th ghi nhn c thnh phn ha hc ti nhng im STEM qut qua, cho mt bn phn b thnh phn ha hc kt hp vi hnh nh STEM Ph tn hao nng lng EELS cng c tch hp trong STEM phn tch thnh phn ha hc: khi chm in t c E cao truyn qua mu do tng tc vi cc nguyn t ca mu c th b tn x khng n hi v b tn hao nng lng. S tn hao ny ph thuc vo bn cht cc nguyn t c mt trong mu. Vic xc nh s mt mt nng lng cho ta thng tin v thnh phn ha hc ca mu v cc thng tin khc.