Ingenieurbro Dr. Stbener Ebereschenring 45 34346 Hann.

Mnden Germany Phone +49 5541 799919 Fax +49 5541 799918 info@w-ave.de www.w-ave.de

Site Survey Report (Short report)

Measurement of Building Vibration

Customer: Sample Inc. Dr. Smart

Location: Sample Laboratory Building

Date/Time: 1st of July 2008, 02:00 p.m. 04:45 p.m.

Measurements and report created by

Dr.-Ing. Uwe Stbener, Ingenieurbro Dr. Stbener, Hann.Mnden

Table of Contents

Measuring Instrument and Software 1.1 Acceleration Sensor System 1.2 PC Card 1.3 Signal Analysis Application Software 1.4 Execution of the Measurement 2. Introduction 3. Basic Site Description 4. Measurement Results 4.1 3rd Floor 4.2 Basement 5. Analysis and Evaluation 6. Final Conclusion 7. Disclaimer

1.

3 3 5

7 8 8

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1. Measuring Instrument and Software 1.1. Acceleration Sensor System These measurements have been carried out by using an Explorer vibration measurement system. The system consists of two triax accelerometers and a signal conditionier unit. The operating frequency range of the systems covers 1 to 500 Hz with an accuracy of +/- 5%. The measurement range is specified to 10-7 5x10-2 m/sec. 1.2. PC Card The PC-CARD-DAS16/16 is a data acquisition and control board for IBM PC compatible computers with PCMCIA type-2 slots. The heart of the board is an analog to digital converter. Analog signals are routed to the A/D from either an 8:1 differential multiplexer or a 16:1 single-ended multiplexer. W.A.V.E. uses six bipolar channels to acquire the voltage signal provided through the vibration measurement system. The A/D conversion has a resolution of 16 Bit related to an input voltage of +/- 1,25 V. 1.3. Signal Analysis Application Software The signal conditioning and FFT have been carried out with the LabView based software package Spectrum S1. This software displays time charts and spectrums of the measured vibration signal. Hanning window has been applied with respect to the Fast Fourier Transformation. The measurement data have been averaged by using arithmetic averaging of 20 measurement loops. Each loop takes 10 seconds of record time. All data are given in terms of peak vibration velocity [ m/s]. The evaluation and generation of graphs has been done by using Matlab. 1.4. Execution of the Measurement The measurement points (MP) have been selected at the 3rd floor and at the basement with respect to the desired location for the microscope. The two triax measurement heads have been positioned in parallel to the main building axis (x direction = center line, y direction = cross axis). To compensate the roughness of the concrete surface both measurement heads have been supported by tripods.

2. Introduction This measuremt has been ordered by the Sample Inc. in order to check the vibration condition in two rooms for the installation of a Scanning Electron Microscope (SEM) type Zeiss EVO 60.

3. Basic Site Description The building to be checked is still under construction. It is part of the Sample Inc. factory and shall be used as an office and laboratory building. It is not planed to install heavy machinery inside the building but there is a big HVAC (Heating, Ventilation, Air-conditioning) system in the basement. The HVAC was not in operation during the vibration measurement. Close to the building there is a production plant which is 24 hours in operation. The production plant is equipped with heavy machinery, e.g. presses and CNC machining centers. A driveway separates the building and the production plant. The driveway is used for all types of traffic, even heavy traffic. During the measurement procedure no significant traffic take place.

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Rough estimated position of measurement points (MP):

stairs

MP2

basement

MP1

3rd floor

Y equal to the cross axis of the building (east-west)

y x
X equal to the center line of the building (north-south)

Fig. 1: Positions of the measurement points

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4. Measurement Results 4.1. 3rd floor

Fig. 2: Vibration velocity at MP1

In Fig. 2 the spectrum of the peak vibration velocity is depicted in all three Cartesian coordinates. Double logarithmic scaling has been choosen for the graph within the freqeuncy range from 1 to 500Hz. The vibration limit specified for the SEM type Zeiss EVO (8,4 m/s = 6 m/s RMS for frequency < 30Hz, 16,8 m/s = 12 m/s RMS for frequency > 30Hz) has been plotted by a cyan colored line. The vibration limit has been exceeded at 2.6Hz and 15Hz in all the directions by the measured vibration data! The highest peak of 35 m/s has been recorded in vertical direction (z-direction) at a frequency of 7.9Hz. Therefore the limit has been exceeded by a factor of approximately four. Other peaks of 25 to 30 m/s have been detected in the same direction at frequencies of 4.9Hz, 6.0Hz, 6.3Hz, 8.4Hz and 9.1Hz. Exceedings can be identified at 3.5Hz, 4.3Hz, 5.0Hz and 6.1Hz in the center line of the building (xdirection). Especially the peak of 15 m/s at 3.5Hz is significant. This peak is related to the structural dynamics of the building due to a tilt movement. The tilt movement typically leads to a horizontal vibration in the upper floors. In the cross axis of the building (y-direction) this phenomenon can be observed even stronger. The corresponding peak is 24 m/s at a frequency of 2.9Hz.

Ing.Bro Dr. Stbener . Ebereschenring 45 . D-34346 Hann.Mnden . Phone +49 5541 799919 . Fax +49 5541 799918 Seite 5/8

4.2. Basement

Fig. 3: Vibration velocity at MP2

In Fig. 3 the spectrum of the peak vibration velocity is depicted in all three Cartesian coordinates. Double logarithmic scaling has been choosen for the graph within the freqeuncy range from 1 to 500Hz. The vibration limit specified for the SEM type Zeiss EVO (8,4 m/s = 6 m/s RMS for frequency < 30Hz, 16,8 m/s = 12 m/s RMS for frequency > 30Hz) has been plotted by a cyan colored line.In Fig. 3 The vibration limit has been exceeded in z- and x-direction only! The highest peak of 20 m/s occurred in the vertical direction (z-direction) at a frequency of 6.1 Hz. Therefore the limit has been exceeded approximately by a factor of 2.5. Another peak of 18 m/s can be observed at a frequency of 4.9Hz. In the center line of the building (x-direction) the exceeding takes place at 4.9Hz and the related peak is 9.5 m/s. In the cross axis of the building (y-direction) a peak of 5.1 m/s has been detected at 2.9Hz. This peak does not exceed the vibration limit of the SEM.

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5.

Analysis and Evaluation

The discussed measurement results clearly indicate that the vibration limit of the SEM has been exceeded at both locations. The most critical vibration peak of 24 m/s in the 3rdfloor occurs at a low frequency of 2.9Hz. This peak causes a problem since the vibration isolation at low frequencies is difficult to achieve. A passive vibration isolation solution can not be used because of its resonance behavior. Most passive vibration isolation systems exhibit an eigenfrequency of 2 to 5Hz. By using a passive isolator the resulting vibration level on top of the system would be even higher than on the floor directly! As an alternative an active vibration isolation platform could be used. The remaining vibration amplitude on top of the platform would be approximately 8 m/s. This value is close to the vibration limit. Taking into account that the vibration level in the future might be increased due to more activities in the building and the production plant near by there is no guarantee to maintain the vibration limit even by using an active platform. The situation in the basement is less critical. The vibration peaks are smaller and the related frequencies are higher. The main issue is the isolation of a 18 m/s peak value at 4.9Hz. For the same reason as mentioned above a passive isolation system can not be used to solve this issue. By using an active platform the remaining vibration peak would be approximately 3 m/s which is clear below the specified limit. Since the laboratory building shall be used for light microscopes as well the vibration criterion (VC) introduced by Colin Gordon will be discussed below. The VC is based on empirical data and classifies the measured vibration level with respect to typical laboratory instrumentation into 9 different classes. The most vibration intensive class is specified by the workshop with a vibration level of 800 m/s. In Fig. 4 all classes are described. The vibration limit of each class is given in terms of the Root Mean Square (RMS) vibration velocity because it has been turned out that the vibration sensitivity of most laboratory instruments equal a line of constant vibration velocity. For frequencies below 8Hz these lines have a slope since the eigenfrequencies of the instruments are commonly well above 8Hz. Gordon specifies the class VC-A (50 m/s RMS) for light microscopes with an amplification factor of 400 and class VC-B (25 m/s RMS) for an amplification factor of 1000. Therefore the 3rd floor should be suitable at least for the use of light microscopes operating with factor 400.

Fig. 4: Vibration Criterion (VC) according to Colin Gordon

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6.

Final Conclusion

Based on the discussed measurement results and considering the technical option for the vibration isolation it is strongly recommended to install the SEM in the basement! By using an active isolation platform the remaining vibration level will be far below the specified vibration limit. Therefore the SEM will be prepared even for higher vibration disturbances in the future!

7. Disclaimer W.A.V.E. undertakes all measurements with reasonable care. All measurement results are specified according to the technical accurancy of the used measurement equipment. W.A.V.E. does not overtake any further liability for the correctness of the measurements. If you have any questions, please contact:

W.A.V.E. World of Anti Vibration Engineering Ingenieurbro Dr. Stbener Ebereschenring 45 34346 Hann.Mnden Telefon +49 5541 799919 Fax +49 5541 799918 info@w-ave.de www.w-ave.de

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