CHAPTER 34

Fabrication of Microelectronic Devices*

*By Kent M. Kalpakjian

Kalpakjian Schmid Manufacturing Engineering and Technology

2001 Prentice-Hall

Page 34-1

Printed Circuit Boards

Figure 34.1 A collection of printed circuit boards. Source: Phoenix Technologies, Inc.

Kalpakjian Schmid Manufacturing Engineering and Technology

2001 Prentice-Hall

Page 34-2

Fabrication Sequence of and Integrated Circuit

Figure 34.2 General fabrication sequence for integrated circuits.

Kalpakjian Schmid Manufacturing Engineering and Technology 2001 Prentice-Hall Page 34-3

MOS Transistor Cross-Sections

Figure 34.3 Crosssectional views of the fabrication of a MOS transistor. Source: R. C. Jaeger.

Kalpakjian Schmid Manufacturing Engineering and Technology

2001 Prentice-Hall

Page 34-4

Chemical Vapor Deposition

Figure 34.4 Schematic diagrams of (a) continuous, atmospheric-pressure CVD reactor and (b) low-pressure CVD. Source: S. M. Sze.

Kalpakjian Schmid Manufacturing Engineering and Technology

2001 Prentice-Hall

Page 34-5

Silicon Dioxide Growth

Figure 34.5 Growth of silicon dioxide, showing consumption of silicon. Source: S. M. Sze.

Kalpakjian Schmid Manufacturing Engineering and Technology

2001 Prentice-Hall

Page 34-6

Pattern Transfer by Lithography

Figure 34.6 Pattern transfer by lithography. Note that the mask in step three can be a positive or negative image of the pattern. Source: After W. C. Till and J. T. Luxon.

Kalpakjian Schmid Manufacturing Engineering and Technology

2001 Prentice-Hall

Page 34-7

Etching and Ion Implantation

Figure 34.7 Etching profiles resulting from (a) isotropic wet etching and (b) anisotropic dry etching. Source: R. C. Jaeger.

Figure 34.8 Apparatus for ion implantation

Kalpakjian Schmid Manufacturing Engineering and Technology

2001 Prentice-Hall

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pn Junction Diode

Figure 34.9 (continued)

Kalpakjian Schmid Manufacturing Engineering and Technology 2001 Prentice-Hall Page 34-9

pn Junction Diode (cont.)

Figure 34.9
Kalpakjian Schmid Manufacturing Engineering and Technology

2001 Prentice-Hall

Page 34-10

Two-Level Metal Interconnect

(a) (b)

Figure 34.10 (a) Scanning electron microscope photograph of a two-level metal interconnect. Note the varying surface topography. Source: National Semiconductor Corporation. (b) Schematic drawing of a two-level metal interconnect structure. Source: R. C. Jaeger.

Kalpakjian Schmid Manufacturing Engineering and Technology

2001 Prentice-Hall

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Bonding and Packaging

(a) (b) (c)

Figure 34.11 (a) SEM photograph of wire bonds connecting package leads (left-hand side) to die bonding pads. (b) and (c) Detailed views of (a). Source: Courtesy of Micron Technology, Inc.

Kalpakjian Schmid Manufacturing Engineering and Technology

2001 Prentice-Hall

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Integrated Circuit Packages

Figure 34.12 Schematic illustrations of different IC packages: (a) dual-in-line (DIP), and (b) ceramic flat pack, and (c) common surface mount configuration. Sources: R. C. Jaeger and A. B. Glaser; G. E. Subak-Sharpe.

Kalpakjian Schmid Manufacturing Engineering and Technology

2001 Prentice-Hall

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