GII THIU CHUNG

K THUT CH TO

NI DUNG CHNH
KT LUN

Mng mng l g?

thin = less than about one micro ( 10,000 Angstrons, 1000 nm) film = layer of material on a substrate (if no substrate, it is a "foil")

 K thut nano l ngnh k thut p dng cc vt liu v tnh cht kch c nano vo vic gii quyt mt vn hay phc v mt mc ch. Mi khi cc tnh cht ph thuc kch thc ca mt vt liu c trng c pht hin th li c nhng ng dng mi s dng vt liu y. S dng cc tnh cht c bit xy ra kch c nano pht trin cc k thut mi c gi l k thut nano

II. CC K THUT CH TO NANO

PP VT L PP HA HC

PHNG PHP VT L:
1.Bc bay nhit 2.Bc bay chm in t 3.n mn laser 4.Phn x magnetron 5.Lithography 6.Quang khc chm in t

PHNG PHP HA HC:

1.Phng php in ho 2.Vi nh tng 3.Lng ng hi ho hc 4.Phng php sol-gel

Phng php vt l
1. PHNG PHP BC BAY NHIT
2. PHNG PHP BC BAY CHM IN T
3. PHNG PHP N MN LASER 4. PHNG PHP PHN X MAGNETRON

5. PHNG PHP LITHOGRAPHY

6. PHNG PHP QUANG KHC CHM IN T

BC BAY NHIT

Bay bc nhit hoc bay bc nhit trong chn khng l k thut to mng mng bng cch bay hi cc vt liu cn to trong mi trng chn khng cao v ngng t trn .

BC BAY NHIT
u im
Mng lng ng tc cao

Nhc im
Khng th to cc mng qu mng. Kh khng ch dy ca mng. Kh ch to mng a lp.

Nguyn t bay hi nng lng thp

t nhim tp Khng gy nhit cho R, d thc hin p dng c cho nhiu loi vt liu.

Phng php vt l
1. PHNG PHP BC BAY NHIT

2. PHNG PHP BC BAY CHM IN T

3. PHNG PHP N MN LASER 4. PHNG PHP PHN X MAGNETRON

5. PHNG PHP LITHOGRAPHY

6. PHNG PHP QUANG KHC CHM IN T

BC BAY CHM IN T

Nng lng ca chm tia in t c hi t trc tip ln vt liu. Khi chm tia in t nng lng cao bn ln vt liu ngun, ton b ng nng ca chm tia in t chuyn thnh nhit nng lm ho hi vt liu v sau lng ng trn .

BC BAY CHM IN T
Chm tia in t c gia tc trong in trng c nng lng cao v c hi t vo vt liu ngun nh tc dng ca t trng iu khin, khi vt liu c ho hi ri lng ng ln . Do chm tia in t c nng lng rt ln v din tch hi t nh v vy vt liu gn nh c ho hi tc th. Chnh c im ny cho php n c th to c mng mng ca hu ht cc vt liu, c bit l i vi cc vt liu nhiu thnh phn.

BC BAY CHM IN T
u im
tinh khit cao. Bc bay c vt liu kh nng chy. D iu chnh p sut, thnh phn kh v nhit v d theo di qu trnh lng ng. C th s dng rt t vt liu gc tit kim ng k ngun vt liu

Nhc im
Kh ch to vt liu l hp kim.

CMOS d b ph hng bi cc bc
x tia X pht ra do in t b hm t ngt.

Mng ph kh ng u.

Phng php vt l
1. PHNG PHP BC BAY NHIT 2. PHNG PHP BC BAY CHM IN T

3. PHNG PHP N MN LASER

4. PHNG PHP PHN X MAGNETRON

5. PHNG PHP LITHOGRAPHY

6. PHNG PHP QUANG KHC CHM IN T

BC BAY BNG XUNG LASER

nh sng laser c th tp trung nng lng vi cng rt cao trn mt vng gii hn ca vt liu. Khi nh sng laser chiu ti vt liu, cng laser ln s gy bng n v dn n s pht tn hn hp ca nguyn t, cc phn t v ion (plasma) hoc cc m hi vt cht t b mt ca vt liu.

BC BAY BNG XUNG LASER

Electron Nguyn t trung ha + Ion + + Laser + + +

Chm laser xung cng sut ln c chiu vo bia. Bia hp thu nng lng laser, nng ln v bay hi Pha trn bia hnh thnh mt vng khng gian cha plasma pht sng Cc ht vt liu bia ngng t mng trn

+
+

BC BAY BNG XUNG LASER

u im
Khng s dng dung mi An ton v thn thin vi mi trng. D t ng ho (s dng robot). Chi ph hot ng thp

Nhc im
Rt kh kim sot qu trnh kt t ca phn t nn cc ht ch to c c xu hng phn b kch thc trong khong rng.

Nhit tng i thp.

Phng php vt l
1. PHNG PHP BC BAY NHIT 2. PHNG PHP BC BAY CHM IN T 3. PHNG PHP N MN LASER

4. PHNG PHP PHN X MAGNETRON

5. PHNG PHP LITHOGRAPHY
6. PHNG PHP QUANG KHC CHM IN T

PHNG PHP PHN X MAGNETRON

L k thut phn x (DC v RF) ci tin t cc h phn x thng dng bng cch t bn di bia cc nam chm

C TRNG CA QU TRNH

Vng st th Cathode:
Trong vng ny in t th cp sinh ra t Catod s c in trng gia tc i vo vng ion ho theo hng trc giao vi n.

C TRNG CA QU TRNH
Vng ion ha: C in
trng rt b hn so vi Ek, in t c nng lng ion ho cht kh, khi va chm vi cc phn t kh cc in t s mt nng lng v qu o cycloid s nh dn, cn cc ion sinh ra do qu trnh ion ho s c gia tc trong vng st th Catod v thc hin chc nng phn x.

C TRNG CA QU TRNH

Vng plasma :Cc ion ny

di tc dng ca in trng gia tc bay n p vo catod

u im
1. Dng c cho tt c cc loi vt liu (nguyn t, hp kim,hp cht). 2. Bia phn x thng dng c lu. 3. C th t bia theo nhiu hng, bia l ngun bc bay rt ln. 4. Ch to mng mng c cu hnh a dng. 5. Quy trnh phn x n nh, d t ng ha. 6. bm dnh ca mng tt 7. D ch to mng a lp 8. R tin v d thc hin 9. Mng to ra c mp m b mt thp, dy chnh xc.

Nhc im
1. Nng lng phn x tp trung ln bia, lm nng bia, nn phi lm lnh bia. 2. Tc phn x << tc bc bay chn khng. 3. Tn nhiu nng lng. 4. Bia thng rt kh ch to v t tin. Nhng hiu sut s dng thp.

5. C th nhim nhiu tp cht

6. Kh nng to ra cc mng rt mng vi chnh xc cao l khng cao.

7. Khng th to ra mng n tinh th.

8. p sut thp => i hi phi ht chn khng cao

Phng php vt l
1. PHNG PHP BC BAY NHIT 2. PHNG PHP BC BAY CHM IN T 3. PHNG PHP N MN LASER 4. PHNG PHP PHN X MAGNETRON

5. PHNG PHP LITHOGRAPHY

6. PHNG PHP QUANG KHC CHM IN T

PHNG PHP LITHOGRAPHY

Quang khc (photolithography) l k thut to ra cc chi tit ca vt liu v linh kin vi hnh dng v kch thc xc nh bng cch s dng bc x nh sng lm bin i cc cht cm quang ph trn b mt to ra hnh nh cn to.

Phng php ny c s dng ph bin trong cng nghip bn dn v vi in t, nhng khng cho php to cc chi tit nh hn do hn ch ca nhiu x nh sng, nn c gi l quang khc micro (micro lithography).

PHNG PHP LITHOGRAPHY

Quang khc l phng php s dng cc phn ng quang ha nhm thu c cc phn t trn b mt ca c hnh dng v kch thc xc nh.

Mt h quang khc bao gm:

Ngun pht tia t ngoi: chm tia t ngoi ny c khuch i ri sau chiu qua mt n (photomask).

PHNG PHP LITHOGRAPHY

Quang khc l phng php s dng cc phn ng quang ha nhm thu c cc phn t trn b mt ca c hnh dng v kch thc xc nh.

Mt h quang khc bao gm:

-Mt n: mt tm chn sng c in trn cc chi tit cn to che khng cho nh sng chiu vo vng cm quang, to ra hnh nh ca chi tit cn to trn cm quang bin i.

PHNG PHP LITHOGRAPHY

Quang khc l phng php s dng cc phn ng quang ha nhm thu c cc phn t trn b mt ca c hnh dng v kch thc xc nh.

Mt h quang khc bao gm:

-Sau khi chiu qua mt n, bng ca chm sng s c hnh dng ca chi tit cn to, sau n c hi t trn b mt phin ph cm quang nh mt h thu knh hi t

PHNG PHP LITHOGRAPHY

u im
To c vi mch in t kch c micromet.

Nhc im
nh sng b nhiu x nn khng ch to c vt liu kch thc nh hn 50nm. phn gii thp, khng to c cc chi tit phc tp.

NG DNG
c s dng rng ri nht trong cng nghip bn dn ch to cc vi mch in t trn cc phin Si. S dng trong ngnh khoa hc v cng ngh vt liu ch to cc chi tit vt liu nh, ch to cc linh kin vi c in t (MEMS).
Hnh nh minh ha

Phng php vt l
1. PHNG PHP BC BAY NHIT 2. PHNG PHP BC BAY CHM IN T 3. PHNG PHP N MN LASER 4. PHNG PHP PHN X MAGNETRON 5. PHNG PHP LITHOGRAPHY

6. PHNG PHP QUANG KHC CHM IN T

PHNG PHP QUANG KHC CHM IN T

Quang khc chm in t (Electron beam lithography EBL) L cng ngh to cc chi tit trn b mt (cc phin Si...) c kch thc v hnh dng ging nhau. Thit k bng cch s dng chm in t c nng lng cao lm bin i cc cht khng quang ph trn b mt phin. EBL l mt cng c ph bin trong cng ngh nano to ra cc chi tit, cc linh kin c kch thc nh vi chnh xc cc cao.

Lift-off

n mn

U IM V NHC IM CA EBL SO VI PHOTOLITHOGRAPHY

Phng php EBL
C th to cc chi tit c phn gii cao v kch thc nh

Phng php photolithography

Cn mt n mi c th v trn chi tit
Nhanh hn nhiu so vi EBL

D dng to cc chi tit phc tp.

Chm in t c th iu khin qut trn b mt mu bng cch cun dy nn c th v trc tip chi tit. Phng php EBL kh chm.

Phng php HA HC
1. PHNG PHP IN HA
2. PHNG PHP VI NH TNG 3. PHNG PHP LNG NG HI HA HC. 4. PHNG PHP SOL - GEL

PHNG PHP IN HO
in ho da vo qu trnh bin i ho hc din ra trong dung dch mui cha ion kim loi di tc dng ca dng in, dn n phn ng kh v phn ng oxi ho din ra trn cc in cc, ri hnh thnh lp kim loi trn in cc cathode.

Thnh phn chnh:

Dung dch in phn gm mui dn in, ion kim loi kt ta thnh lp, cht m, ph gia. in cc catod dn in, chnh l vt liu cn to mng hoc to nanorod. in cc anod c th tan hoc khng tan

(thng khng tan), dng cp dng in cho

cho qu trnh in ho. B cha bng thp hay thu tinh, vt liu

chu c dung dch in ho v chu nhit tt.

H n nhit trong qu trnh in ho, nht trong bnh s c quan st qua u d nhit.

Ngun mt chiu, thng dng chnh lu.

Nguyn l hot ng
Qu trnh in phn xy ra theo hai qu trnh:
- Qu trnh oxy ho xy ra anod.

- Qu trnh kh xy ra catod. Trong qu trnh in phn, vt cn m (catod) gn vi cc m, kim loi cn m lm cc dng (anod) ca ngun in hoc dng ion trong mui (cht in li).

PHNG PHP IN HA
u im
To lp ph bn ngoi vt liu vi dy khong 1 m. C th ph ln nhng v tr bn trong

Nhc im
Kh thu c sn phm tch ri vi vt liu ph, hao ph ho cht. Dung dch in phn d lm n mn

kh thao tc i cc phng php khc.

Thch hp vi nhng vt liu yu cu sai s thp, trng lng nh, v hnh dng phc tp.

cc thit b khc.
Cht thi gy nhim mi trng. Gy c cho ngi thc hin. B mt d nt, gy.

Phng php HA HC
1. PHNG PHP IN HA

2. PHNG PHP VI NH TNG

3. PHNG PHP LNG NG HI HA HC. 4. PHNG PHP SOL - GEL

PHNG PHP VI NH TNG

Vi nh tng l phng php kh ph bin to ht nan. Vi nh tng nc-trong-du, cc git dung dch nc b by bi cc phn t CHHBM trong du (cc micell).

y l mt dung dch trng thi cn bng nhit ng trong sut, ng hng. Do s gii hn v khng gian ca cc phn t CHHBM, s hnh thnh, pht trin cc ht nano b hn ch v to nn cc ht nano rt ng nht. Kch thc ht c th t 4-12 nm vi sai khc khong 0.2-0.3 nm.

C ch hot ng ca phng php vi nh tng.

C ch c th ca phn ng xy ra trong h vi nh tng: Phn ng ha hc to cc cht mong mun s xy ra khi ta ha trn cc h vi nh tng ny li vi nhau.

PHNG PHP VI NH TNG

u im
- Kch thc v hnh dng ca sn phm cui cng c th khng ch c vi vic thay i t l cht phn ng, iu chnh kch thc ht micell. - D lm. - Kch thc ht nh ng u. - Khng cn cung cp thm cht n nh sau khi to xong sn phm.

Nhc im
- D b nh hng bi cc thng s mi trng nh nhit , pH. - Ha cht t tin, c hi.

Phng php HA HC
1. PHNG PHP IN HA 2. PHNG PHP VI NH TNG

3. PHNG PHP LNG NG HI HA HC.

4. PHNG PHP SOL - GEL

PHNG PHP LNG NG HI HA HC

Kh precursor c dng i lu vn chuyn, gp mi trng nhit cao hay plasma s xy ra hin tng va chm gia cc electron vi ion, electron vi notron hay electron va chm vi electron to ra gc t do.

PHNG PHP LNG NG HI HA HC

Sau , cc phn t gc t do khuych tn xung gp mi trng nhit cao ti s xy ra cc phn ng to mng ti b mt .

PHNG PHP LNG NG HI HA HC

Sn phm ph sinh ra sau khi phn ng sau s khuch tn ngc vo dng cht lu, dng cht lu a kh precursor d, sn phm ph, kh c ra khi bung

5 C CH CA QU TRNH
1. Khuch tn ca cht phn ng ti b mt 2. S hp ph ca cht phn ng vo b mt

3. Xy ra cc phn ng ha hc
4. Gii hp ca cc sn phm kh sau khi phn ng 5. Khuch tn cc sn phm ph ra ngoi

PHNG PHP LNG NG HI HA HC

u im
H thit b n gin. Tc lng ng cao. C kh nng lng ng hp kim nhiu thnh phn.

Nhc im
C ch phn ng phc tp.

i hi nhit cao hn trong cc phng php khc.

v cc dng c thit b c th b n mn bi cc dng hi. Kh to hnh linh kin mng mng thng qua k thut mt n.

C th to mng cu trc hon thin, sch cao.

C th lng ng ln c cu hnh a dng, phc tp.

NG DNG
Phng php CVD c dng ch to mng mng, cc cht bn dn nh: Si,cc mng mng xt dn in trong sut nh SnO2,In2O3:Sn(ITO),cc mng mng in mi nh SiO2, Si3N4, BN, Al2O3, cc mng mng kim loi

Phng php HA HC
1. PHNG PHP IN HA

2. PHNG PHP VI NH TNG

3. PHNG PHP LNG NG HI HA HC.

4. PHNG PHP SOL - GEL

NH NGHA QU TRNH SOL-GEL:

Qu trnh sol-gel l mt qu trnh lin quan n ha l s chuyn i ca mt h thng t precursor thnh pha lng dng sol sau to thnh pha rn dng gel theo m hnh precursorsolgel nh trn hnh

DIN BIN QU TRNH SOL-GEL

Gm 4 bc:
Bc 1: Cc ht keo mong mun t cc phn t huyn ph precursor phn tn vo mt cht lng to nn mt h sol.

DIN BIN QU TRNH SOL-GEL

Gm 4 bc:
Bc 2: S lng ng dung dch sol to ra cc lp ph trn bng cch phun, nhng, quay.

DIN BIN QU TRNH SOL-GEL

Gm 4 bc:
Bc 3: Cc ht trong h sol c polymer ha thng qua s loi b cc thnh phn n nh h v tao ra h gel trng thi l mt mng li lin tc.

DIN BIN QU TRNH SOL-GEL

Gm 4 bc:
Bc 4: X l nhit, nhit phn cc thnh phn hu c, v c cn li v to nn mt mng tinh th hay v nh hnh.

C CH HA HC: 2 PHN NG CHNH

Phn ng thy phn
Phn ng thy phn thay th nhm alkoxide (-OR) trong lin kt kim loi -alkoxide bng nhm hydroxyl (-OH) to lin kt kim loi-hydroxyl.

Phn ng ngng t:
Phn ng ngng t to nn lin kt kim loi-oxide-kim loi, l c s cu trc cho cc mng oxide kim loi

PHNG PHP SOL - GEL

u im
D dng kim sot dy ca mng. C th ph ln cc hnh dng phc tp. C th sn xut c nhng sn phm c tinh khit cao. L phng php hiu qu, kinh t, n gin sn xut mng c cht lng cao. C th to mng nhit bnh thng

Nhc im
S lin kt trong mng yu
chng mi mn yu Rt kh iu khin xp D b rn nt khi x l nhit cao Chi ph cao i vi nhng vt liu th Hao ht nhiu trong qu trnh to mng

NG DNG PHNG PHP SOL-GEL

To mng bo v v mng c tnh cht quang hc. B nh quang. To knh giao thoa. Mng a lp to vi in t.

 K thut nano m cho chng ta mt hng hon ton mi ch to v nghin cu cc vt liu v thit b trong khoa hc v cng ngh. K thut nano ang c khai thc trn ton cu v thu ht cc nh nghin cu thuc mi chuyn ngnh nh ho hc, vt l, khoa hc vt liu, cng ngh, sinh hoc, y hc. Nhiu ng dng ca k thut nano c a vo th trng, mt s ng dng khc y ha hn ang c nghin cu.