ShekharBhansalibhansali@eng.usf.

edu

First things first, what is a Sensor ?

A device used to measure a physical quantity such
as temperature and convert it into an electronic
signal of some kind (e.g a voltage), without
modifying the environment.

ShekharBhansalibhansali@eng.usf.edu

Sensors in our body

Mechanoreceptors (feel)
Auditory system
Visual System
Olfactory System (Nose)

ShekharBhansalibhansali@eng.usf.edu

What can be sensed?

Almost Everything!!!
Commonly sensed parameters are :
Pressure
Temperature
Flow rate
Radiation
Chemicals
Pathogens
ShekharBhansalibhansali@eng.usf.edu

What is MEMS ?

MEMS or Micro Electro Mechanical Systems is a

technique of combining Electrical and Mechanical
components together on a chip, to produce a system
of miniature dimensions ..
By miniature, we mean dimensions less than the
thickness of human hair !!!!
ShekharBhansalibhansali@eng.usf.edu

The wonder called

nanotechnology
Nanotechnology is the technology of arranging
atoms and molecules in a material.
This allows to alter the properties of a material
and build structures of desired features.
A nanometer is one-billionth of a meter.
Nanotechnology makes it possible to
manufacture devices 80,000 times smaller
than the thickness of human hair !!

ShekharBhansalibhansali@eng.usf.edu

A simple analogy..
The atoms in an object
can be compared to the
blocks in a building game.
In a building game, the
blocks can be arranged to
create different looking
structures.
Similarly, atoms can be
arranged differently to
produce a multitude of
devices. This forms the
basis of
nanotechnology.
ShekharBhansalibhansali@eng.usf.edu

Same game, different names

USA MEMS
Europe Microsystem technology
Japan - Micromachines

ShekharBhansalibhansali@eng.usf.edu

But why mems for sensors?

Sensors made using MEMS are better than
their conventional counterparts because they are :

Smaller in size
Have lower power consumption
More sensitive to input variations
Cheaper due to mass production
Less invasive than larger devices

So good things do come in small

packages !!!!
ShekharBhansalibhansali@eng.usf.edu

Projected MEMS Market Share 2006

http://www.memsindustrygroup.org/industy_statistics.asp

ShekharBhansalibhansali@eng.usf.edu

MEMS Revenue

http://www.memsindustrygroup.org/industy_statistics.asp

ShekharBhansalibhansali@eng.usf.edu

Market for Sensors

Auto Industry
Medical industry
Department of Defense

ShekharBhansalibhansali@eng.usf.edu

Types of Sensors

Mechanical Sensors
Optical Sensors
Thermal Sensors
Chemical and Biological Sensors

ShekharBhansalibhansali@eng.usf.edu

Mechanical Micro sensors

Strain Gauges
Accelerometers
Gyroscopes (Rotation rate)
Pressure Sensors
Microphones
Tactile Sensors (sensory feedback)
Biological Sensors (cochlear implants)
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ACCELEROMETERS
Used in deploying airbags, navigation,
activity detection for pacemakers

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Sensors in automobiles

http://mems.colorado.edu/c1.res.ppt/ppt/g.tutorial/ppt.htm

ShekharBhansalibhansali@eng.usf.edu

Size is important in
automotive industry
Accelerometer

www.kineticceramics.com/products/ new_products.htm

ShekharBhansalibhansali@eng.usf.edu

Comparison between conventional

and MEMS based inertial sensor
Mass
Size
Power
Cost

Conventional
1587.5 gm
15x8x5 cm
35 W
$20,000

MEMS based
10 gm
2x2x0.5 cm
~1mW
$500

Adapted from : http://mems.colorado.edu/c1.res.ppt/ppt/g.tutorial/ppt.htm

ShekharBhansalibhansali@eng.usf.edu

MEMS based cochlear implant

http://www.accessexcellence.org/AB/BA/biochip3.html

ShekharBhansalibhansali@eng.usf.edu

Optical Sensors
Direct Sensors
(Light Electronic Signal)
Photoemissive
Photoconductive

Indirect Sensors
(Light Intermediate energy Electronic signal)
Pyroelectric detectors
Bolometers

Biological Light Sensors

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Sight for the blind

MEMS based array that may be inserted in
the retina of a blind person to provide partial
sight

http://www.sandia.gov/news-center/news-releases/2002/mat-hem/blindsee.html

ShekharBhansalibhansali@eng.usf.edu

Thermal Sensors

Thermo mechanical (dimension)

Thermo resistive (resistance)
Acoustic (sound)
Biological

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Features of MEMS thermal

sensors

Waterproof
Contact free (wireless)
Find use in household appliances (iron)
Can be used in tight ends

ShekharBhansalibhansali@eng.usf.edu

Chem Bio Sensors

Electronic nose can
sense a large
number of gases
http://www.estcal.com/Products.html

Electronic tongue
can sense a variety
of liquids
http://www.alpha-mos.com/proframe.htm

ShekharBhansalibhansali@eng.usf.edu

Chemical lab on a chip

Used to detect chemicals in gas, liquids and
DNA

http://www.sandia.gov/media/NewsRel/NR2000/labchip.htm

ShekharBhansalibhansali@eng.usf.edu

Medical and homeland

security applications

Biocavity laser
Decontamination foam
Smart pill
Sensors for missile systems

ShekharBhansalibhansali@eng.usf.edu

Biocavity laser
This device distinguishes cancerous from non
cancerous cells thus aiding the surgeons in
operations

http://www.sandia.gov/media/NewsRel/NR2000/candetec.htm

ShekharBhansalibhansali@eng.usf.edu

Decontamination foam
It can neutralize both chemical and
biological agents (anthrax) and help in
homeland security
Not harmful to people, hence can be
dispensed freely
Source : Sandia Labs

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Smart PILL
Implanted in the body
Automatic drug delivery (on demand)

http://mmadou.eng.uci.edu/

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MEMS and Marine

Science

ShekharBhansalibhansali@eng.usf.edu

Need for sensors in marine

science
Sensing in marine environment maybe done for various
reasons :
Oil exploration and related applications
Global weather predictions
Monitor water quality for any contamination
Measure parameters detrimental to the health of
structures in the sea ( like oil rigs and ships )
Study of aquatic plants and animals
In military operations
ShekharBhansalibhansali@eng.usf.edu

Parameters monitored in marine

science
Temperature,
pressure, light
transmission,
tidal and current
velocity

Plant pigments
(chlorophyll),
plankton cells

Dissolved gases
(like oxygen),
pH, metals,
pesticides

Seabed
characteristics,
Seismic signal

ShekharBhansalibhansali@eng.usf.edu

Why measure these quantities after all ?

Water temperature effects a lot of processes
directly viz.
Solubility of substances in water
Feeding and reproduction of aquatic organisms
Also, waters ability to hold dissolved oxygen
decreases as water temperature increases.
Now, this is really crucial for aquatic life !!
ShekharBhansalibhansali@eng.usf.edu

Importance of measuring light

penetration
Indicates algal growth
Indicates presence of silt in estuaries
(confluence of river and the sea).
Sediments if present in water in large
amounts
May block sunlight to submerged plants
Can carry pesticides and other pollutants
through the water
ShekharBhansalibhansali@eng.usf.edu

Where are these mems devices

attached ?
The MEMS devices, in marine
sensing maybe attached to:
Ships
Floating devices (buoys) in
the sea
Fixed sea structures (like
oil rigs)
Sea bed using links
AUVs
http://www.oceanor.no/images/oc-buoys.gif

ShekharBhansalibhansali@eng.usf.edu

AUV ( Autonomous underwater vehicle )

AUVs are unmanned
underwater vehicles for
real time monitoring in the
oceans.
AUVs can be equipped with
Lab on a Chip, a set of
sensors developed on a
single chip, using MEMS.

AUV

http://isis2.admin.usf.edu/ur/usfmagazine/spring02/rip1.html

Lab on a Chip

These Lab on a Chip

devices can sense a large
number of chemical
pollutants simultaneously.
www.sandia.gov/media/ chemclue.htm

ShekharBhansalibhansali@eng.usf.edu

Mems in oil exploration and related applications

http://www.spiderstaging.com/rigging/images/offshore_oil.jpg

To find potential oil reserves

To detect oil leakage from
pipelines
In cases of unfortunate oil
spills
MEMS sensors can help to
sense information about the
ocean currents.
Using this it is possible to
predict how far the oil slick will
be transported.
This information can aid in
clean up.

ShekharBhansalibhansali@eng.usf.edu

Finding potential oil and gas reserves

MEMS geophones and accelerometers can

sense the vibrations sent up from the earths
belly.

An array of MEMS geophones are planted over a

wide area on the seabed.

Vibrations are intentionally produced on the

ground surface using some techniques.

The MEMS devices measure the reflection of

these waves from different layers in the earths
belly.

MEMS Accelerometer

http://micron.me.dal.ca/CHIPS/penny_chip.jpg

These readings are then used to create a

geological map, which indicates the size and
location of the oil/gas reservoir.

ShekharBhansalibhansali@eng.usf.edu

Role of mems in coastal weather monitoring

MEMS sensors can provide vital information about
wave pressure, temperature, tidal and current
velocity (using devices like the MEMS Doppler
current profiler).
The information obtained can be used to develop
maps indicating the distribution of these
parameters throughout the ocean.
These maps can provide accurate data, regarding
any imminent sea storms, tsunamis (large sea
waves caused due to large scale movements inside
the earths surface).
ShekharBhansalibhansali@eng.usf.edu

Hydrophones

))))

Just as microphones collect sounds in air, hydrophones

are small devices that detect sounds in water.
The sources of sounds in water maybe ships,
earthquakes, waves or marine animals.
ShekharBhansalibhansali@eng.usf.edu

Digital mammal tags

These are tiny devices
attached to animals like
whales, sharks, dolphins
etc..
Provides vital data about the
animal and its surroundings
A tag houses
Pressure sensor(s)
Temperature sensor(s)
Hydrophone (sound
sensor)
Radio transmitter for data
collection at remote
locations.

ShekharBhansalibhansali@eng.usf.edu

MEMS in marine military operations

An array of MEMS sensors spread on the ocean floor could

detect the presence of enemy submarines.
MEMS sensors (pressure sensors, accelerometers etc.) are
being used in anti-torpedo weapons on submarines and ships.
MEMS sensors in torpedoes are responsible for
Detonating the torpedo at the right time
Hitting the target in a crowded environment
Prevent any premature explosion

ShekharBhansalibhansali@eng.usf.edu

Challenges for MEMS sensors in

marine environment
Complex nature of marine environment
Fouling of sensor surfaces
Selecting one out of several species
Should be able to detect extremely low levels of
chemical concentrations
Resist drifting along with the currents
ShekharBhansalibhansali@eng.usf.edu

Future of mems in marine

science
MEMS promises to be an effective technique of
producing marine sensors of high quality, at lower
costs.
The use of fiber optics in marine science offers
several avenues in fabrication and packaging of
sensors.
The use of sensor dust in the oceans in the
coming years, would be the best that this
technology could offer.
ShekharBhansalibhansali@eng.usf.edu

The BIG question

Is MEMS really necessary?
Still in nascent stage to be applied
commercially
Research in this area is important, as it
probably is the future

ShekharBhansalibhansali@eng.usf.edu

Acknowledgements
This effort is based upon work partially supported by
the National Science Foundation under Grant No.
0239262 and The Florida Hi-Tech Corridor Workforce
Training grant
Any opinions, findings, and conclusions or
recommendations expressed in this material are
those of the author(s) and do not necessarily reflect
the views of the National Science Foundation or the
Florida HiTech Corridor Workforce Training Grant.

ShekharBhansalibhansali@eng.usf.edu

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