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Chapter 4 PN and Metal-Semiconductor Junctions

4.1 Building Blocks of the PN Junction Theory


V +
I

Donor ions
N

N-type
I

P-type

diode
symbol
V

Reverse bias

Forward bias

PN junction is present in perhaps every semiconductor device.


Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-1

4.1.1EnergyBandDiagramofaPNJunction
N-region

P-region
Ef

(a)

Ef is constant at
equilibrium

Ec
(b)

Ec

Ef
Ev

Ec and Ev are known


relative to Ef

Ev
Ec
Ef
Ev

(c)

Neutral
N-region

(d)

Depletion
layer

Neutral
P-region

Ec
Ef
Ev

Ec and Ev are smooth,


the exact shape to be
determined.
A depletion layer
exists at the PN
junction where n 0
and p 0.

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-2

4.1.2Built-inPotential
(a)

(b)

N-type

P-type

NNd d

NNa a
Ec

bi
Ef

Ev

bi
(c)

xN

xP

Can the built-in potential be measured with a voltmeter?


Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-3

4.1.2Built-inPotential
N-region

n N d Nce

q A kT

kT N c
A
ln
q
Nd

ni
kT N c N a
q B kT
Nce
B
ln
P-region n
2
Na
q
ni

kT
bi B A
q

bi

N N
N
ln c 2 a ln c

Nd
ni

kT N d N a
ln
2
q
ni
Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-4

4.1.3PoissonsEquation
Gausss Law:
a
ar e

s: permittivity (~12o for Si)


: charge density (C/cm3)

E(x)

E(x + x)

x
x

Poissons equation
Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-5

4.2 Depletion-Layer Model


(a)

(b)

4.2.1FieldandPotentialintheDepletionLayer
P
N
N
d

N eut ra l Re gion

D eple tion La yer

xnN

N e utral R egi on

xpP

On the P-side of the


depletion layer, = qNa
d E qN a
s
dx

qNd
xpP

(c)

xnN

qN a

On the N-side, = qNd

(d)

E( x)
xnN

bi
(e)

qN a
qN a

(
x
)
x
C
( x P x)
E
1
s
s

x pP

qN d
( x - xN )
s

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-6

(a)

(b)

P
N
Nd
Na
4.2.1FieldandPotentialintheDepletionLayer
N eut ra l Re gion

D eple tion La yer

xnN

N e utral R egi on

xpP

The electric field is continuous at x = 0.


qN
Nda |xP| = Nd|xP|
(c)

xp
Which side x
of the junction is depleted more? x
n
qN a

A one-sided junction is called a N+P junction or P+N junction


E
Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-7

qNd
xp

(c)

x
x
4.2.1FieldandPotentialintheDepletionLayer
qN
n

On the P-side,

(d)

xn

xp

Arbitrarily choose the


voltage at x = xP as V = 0.

bi
(e)

xnN

xpP

x
Ec

(f)

bi ,

qN a
V ( x)
( xP x ) 2
2 s

built-in potential
Ef
Ev

On the N-side,
qN d
V ( x) D
( x xN )2
2 s
qN d
bi
( x xN )2
2 s

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-8

(a)

Nd

Na

4.2.2Depletion-LayerWidth

(b)

N eut ra l Re gion

D eple tion La yer

xnN

N e utral R egi on

xpP

V is continuous at x = 0

xP x N Wdep

qN

d
If Na >> Nd , as in a P+N junction,

(c)

Wdep

2 sbi
xxn N
qN d

xp

qN a

What about a N+P junction? E

Wdep 2 s bi qN where

2 sbi
q

|x P||xN|N d

1
1

Na Nd

x
Na 0

1
1
1
1

N N d N a lighter dopant density

(d)
Modern Semiconductor Devices for Integrated Circuits (C. Hu)

xn

xp

Slide 4-9

EXAMPLE: A P+N junction has Na=1020 cm-3 and Nd


=1017cm-3. What is a) its built in potential, b)Wdep , c)xN ,
and d) xP ?
Solution:
kT N d N a
10 20 1017 cm 6
a) bi
ln
0.026V ln
1V
2
20
6
q

ni

10 cm

2 sbi 2 12 8.85 10 1


19
17
qN d
1.6 10 10

14

b) Wdep

1/ 2

c)

x N Wdep 0.12 m

d)

xP x N N d N a 1.2 104 m 1.2 0


Modern Semiconductor Devices for Integrated Circuits (C. Hu)

0.12 m

Slide 4-10

4.3 Reverse-Biased PN Junction


+

Ec
Ef
Ev

P
Ec

qbi

Ef
Ev
(a) V = 0

Ec
qbi + qV
Ec
Efn

qV

Ev

Efp
Ev

Wdep

2 s (bi | Vr |)
2 s potential barrier

qN
qN

1
1
1
1

N N d N a lighter dopant density

Does the depletion layer


widen or shrink with
increasing reverse bias?

(b) reverse-biased
Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-11

4.4 Capacitance-Voltage Characteristics


N

Nd

Conductor

Na

Insulator

Conductor

Wde p

Reverse biased PN junction is


a capacitor.

Cdep

s
A
Wdep

Is Cdep a good thing?


How to minimize junction capacitance?

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-12

4.4 Capacitance-Voltage Characteristics


1/C dep 2

1
Cdep

Wdep

A 2 s

Capacitance data

2(bi V )

qN S A2

Slope = 2/qN sA2

bi

Increasing reverse bias

Vr

From this C-V data can Na and Nd be determined?


Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-13

EXAMPLE: If the slope of the line in the previous slide is


2x1023 F-2 V-1, the intercept is 0.84V, and A is 1 m2, find the
lighter and heavier doping concentrations Nl and Nh .
Solution:
N l 2 /( slope q s A2 )
2 /(2 10 23 1.6 10 19 12 8.85 10 14 10 8 cm 2 )
6 1015 cm 3
q
0.84
kT N h N l
ni kTbi
10 20 0.026
18
3
bi
ln

1
.
8

10
cm
h
2
q
ni
Nl
6 1015
2

Is this an accurate way to determine Nl ? Nh ?


Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-14

4.5 Junction Breakdown


I
Forward Current
V B, breakdown
voltage

Small leakage
Current

R
A

R
A

P N

C
3.7 V

Zener diode
B

IC

A Zener diode is designed to operate in the breakdown mode.


Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-15

4.5.1PeakElectricField

N+

Na
0

Neutral Region
increasing
reverse bias

xp

(a)
E

Ep

increasing reverse bias

xp

2qN

Ep E(0) (bi | Vr |)
s

1/ 2

s Ecrit 2
bi
VB
2qN

(b)

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-16

4.5.2TunnelingBreakdown
Dominant if both sides of
a junction are very heavily
doped.
Filled States -

Empty States
Ec

Ev

JGe

H /

I
V

Ep Ecrit 10 V/cm

Breakdown

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-17

4.5.3AvalancheBreakdown
Ec

original
electron

Efp
Ev

impact ionization: an energetic


electron generating electron and
hole, which can also cause
impact ionization.
Impact ionization + positive
feedbackavalanche breakdown

s Ecrit 2
VB
2qN

electron-hole
pair generation
Ec
Efn

1
1
1
VB

N Na Nd

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-18

4.6 Forward Bias Carrier Injection


Forward biased
biased
Forward

VV=0
=0

I=0

Ec

qbi

Ef
Ev

P
-

Ec

qbi qV
Ef n

qV

Efp
Ev

Drift and diffusion cancel out

Minority carrier injection


Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-19

4.6 Forward Bias


Quasi-equilibrium Boundary Condition

n ( xP ) N c e

( Ec E fn ) / kT

EEc c

Nce

( Ec E fp ) / kT ( E fn E fp ) / kT

nP 0 e

( E fn E fp ) / kT

nP 0 e

qV / kT

The minority carrier

Efnfnfn
EEfpfp
EEv v

xx

densities are raised


by eqV/kT
Which side gets more
carrier injection?

xN0 x0 P
N

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-20

4.6 Carrier Injection Under Forward Bias


Quasi-equilibrium Boundary Condition

qV
n(xP ) nP 0 e

p (xP) p N 0 e

kT

qV kT

ni qV
e
Na

kT

ni qV
e
Nd

n( xP ) n( xP ) nP 0 nP 0 (e qV

kT

kT

p( x N ) p ( x N ) p N 0 p N 0 (e qV

1)
kT

1)

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-21

EXAMPLE: Carrier Injection


A PN junction has Na=1019cm-3 and Nd=1016cm-3. The applied
voltage is 0.6 V.
Question: What are the minority carrier concentrations at the
depletion-region edges?
qV kT
10 e0.6 0.026 1011 cm -3
Solution: n( xP ) nP 0e
p( x N ) p N 0 e qV kT 10 4 e 0.6 0.026 1014 cm -3

Question: What are the excess minority carrier concentrations?


n( xP ) n( xP ) nP 0 1011 10 1011 cm -3
Solution:
p( x N ) p( x N ) p N 0 1014 10 4 1014 cm -3
Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-22

4.7 Current Continuity Equation

Jp (x)

Jp ( x + x )

p
Volume = A x

J p ( x)
q

J p ( x x)
q

J p ( x x) J p ( x)
x

A x

p
q

q
dx

dJ p

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-23

4.7 Current Continuity Equation


p

q
dx

dJ p

d2p
p
qD p 2 q
dx
p

d p
p
p

2
2
dx
D p p L p
2

Minority drift current is

negligible;
Jp= qDpdp/dx

d 2 n n
2
2
dx
Ln

Lp and Ln are the diffusion lengths


L p D p p

Ln Dn n

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-24

4.8 Forward Biased Junction-- Excess Carriers

d 2 p
p
2
2
dx
Lp

xP
-x N
0

p() 0
p( x N ) p N 0 (e qV / kT 1)
x / Lp
x / Lp

p ( x) Ae
Be

p( x) p N 0 (e qV / kT 1)e

x xN / L p

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

, x xN
Slide 4-25

4.8 Excess Carrier Distributions


1.0
P-side

N-side

N a = 1017 cm -3

Nd = 2 1017 cm-3

0.5

nP ' ex /L n

3L n

2L n

Ln

pN ' ex /L p

0 L p 2L p 3L p 4Lp

x xN / L p
qV / kT

p ( x ) p N 0 (e
1)e
, x xN

n( x ) nP 0 (e qV / kT 1)e x xP / Ln , x xP
Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-26

EXAMPLE: Carrier Distribution in Forward-biased PN Diode


N-type
Nd = 5 cm-3
Dp =12 cm 2/s
p = 1 s

P-type
Na = 101 7 cm -3
Dn=36.4 cm2 /s
n = 2 s

Sketch n'(x) on the P-side.


n( xP ) nP 0 (e qV

kT

ni
10 20 0.6 0.026
qV / kT
1)
(e
1) 17 e
1013 cm 3
Na
10

N-side

1013cm-3

P-side

n ( = p )

p ( = n ) 2

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

x
Slide 4-27

EXAMPLE: Carrier Distribution in Forward-biased PN Diode

How does Ln compare with a typical device size?


Ln Dn n 36 2 10 6 85 m

What is p'(x) on the P- side?

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-28

4.9 PN Diode I-V Characteristics


Jtotal

Jtotal
JnP
P-side

Jn = Jtotal Jp

Jp = Jtotal Jn
JnP

JpN
0

J pN

N-side

P-side

Dp
dp( x)
qD p
q
p N 0 (e qV
dx
Lp

J nP qDn

dn( x)
D
q n nP 0 (e qV
dx
Ln

kT

kT

JpN

x
N-side

1)e

x x N

1)e x xP

Lp

Ln

qV
Dp
Dn

Total current J pN ( xN ) J nP ( xP ) q
p q
nP 0 ( e
L N0

Ln
p

J at all x
Modern Semiconductor Devices for Integrated Circuits (C. Hu)

kT

1)

Slide 4-29

The PN Junction as a Temperature Sensor

I I 0 (e qV

1)

D
n

I 0 Aqni

L N

p d Ln N a
2

kT

Dp

What causes the IV curves to shift to lower V at higher T ?


Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-30

4.9.1ContributionsfromtheDepletionRegion
n p ni e qV / 2 kT
Net recombination (generation) rate :

ni qV / 2 kT
(e
1)
dep
I I 0 (e

I leakage I 0 A

qniWdep
dep

qV / kT

1) A

qniWdep
dep

(e qV / 2 kT 1)

Space-ChargeRegion(SCR)current

Underforwardbias,SCRcurrentisanextra
currentwithaslope120mV/decade

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-31

4.10 Charge Storage

1013 cm -3

N-side

QI

P-side

I Q s

n'

Q I s
x

What is the relationship between s (charge-storage time)


and (carrier lifetime)?
Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-32

4.11 Small-signal Model of the Diode


I

1 dI
d
d
qV / kT
G

I 0 (e
1)
I 0 e qV / kT
R dV dV
dV
R

q
kT
I 0 (e qV / kT ) I DC /
kT
q

What is G at 300K and IDC = 1 mA?


Diffusion Capacitance:
dQ
dI
kT
C
s
sG s I DC /
dV
dV
q
Which is larger, diffusion or depletion capacitance?
Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-33

Part II: Application to Optoelectronic Devices


4.12 Solar Cells

Solar Cells is also known


as photovoltaic cells.
Converts sunlight to
electricity with 10-30%
conversion efficiency.
1 m2 solar cell generate
about 150 W peak or 25 W
continuous power.
Low cost and high
efficiency are needed for
wide deployment.

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-34

4.12.1SolarCellBasics
I

ShortCircuit
light

Dark IV
Eq.(4.9.4)

sc
0

Ec
Ev

I
+

0.7V
Solar Cell
IV
Eq.(4.12.1)

sc

(a)

I I 0 (e qV

kT

Maximum
power-output

1) I sc

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-35

Direct-GapandIndirect-GapSemiconductors
Electrons have both particle and wave properties.
An electron has energy E and wave vector k.

direct-gapsemiconductor

indirect-gapsemiconductor

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-36

4.12.2LightAbsorption

Light intensity (x) e -x


(1/cm):absorption
coefficient
1/ :lightpenetration
depth
hc
Photon Energy (eV)

1.24

( m)

A thinner layer of direct-gap semiconductor can absorb most


of solar radiation than indirect-gap semiconductor. But Si
Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-37

4.12.3 Short-Circuit Current and Open-Circuit Voltage

Jp (x)

Jp ( x + x )

p
Volume = A x

If light shines on the N-type


semiconductor and generates
holes (and electrons) at the
rate of G s-1cm-3 ,

d 2 p p G
2
2
dx
Lp Dp

If the sample is uniform (no PN junction),


d2p/dx2 = 0 p = GLp2/Dp= Gp
Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-38

Solar Cell Short-Circuit Current, Isc


Assume very thin P+ layer and carrier generation in N region only.
Isc
P+

G
p() L
pG
Dp
2
p

p(0) 0

p( x) p G (1 e

P'

Lp

Dp
dp( x)
x / Lp
J p qD p
q
p Ge
dx
Lp

pG
0

x / Lp

I sc AJ p (0) AqL p G

G is really not uniform. Lp needs be larger than the light


penetration depth to collect most of the generated carriers.
Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-39

Open-Circuit Voltage

Total current is ISC plus the PV diode (dark) current:


ni2 D p qV / kT
I Aq
(e
1) AqL p G
N d Lp

Solve for the open-circuit voltage (Voc) by setting I=0


(assuming e qVoc / kT 1)

2
ni D p qVoc / kT
0
e
LpG
N d Lp

kT
2
Voc
ln( p GN d / ni )
q
How to raise Voc ?
Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-40

4.12.4OutputPower
A particular operating point on the
solar cell I-V curve maximizes the
output power (I V).

Output Power I sc Voc FF


Si solar cell with 15-20% efficiency
dominates the market now
Theoretically, the highest efficiency (~24%) can be obtained with
1.9eV >Eg>1.2eV. Larger Eg lead to too low Isc (low light
absorption); smaller Eg leads to too low Voc.
Tandem solar cells gets 35% efficiency using large and small Eg
materials tailored to the short and long wavelength solar light.
Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-41

4.13LightEmittingDiodesandSolid-StateLighting
Lightemittingdiodes(LEDs)
LEDs are made of compound semiconductors such as InP
and GaN.
Light is emitted when electron and hole undergo radiative
recombination.
Ec

Radiative
recombination

Non-radiative
recombination
throughtraps

Ev

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-42

Direct and Indirect Band Gap

Trap

Direct band gap


Example: GaAs

Indirect band gap


Example: Si

Direct recombination is efficient


as k conservation is satisfied.

Direct recombination is rare as k


conservation is not satisfied

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

4.13.1LEDMaterialsandStructure

1.24
1.24
LED wavelength ( m)

photon energy E g (eV )

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-44

4.13.1LEDMaterialsandStructure
compoundsemiconductors

Egg(eV)
(eV )
E

Wavelength
(m)

Color

Lattice
constant
()

InAs

0.36

3.44

6.05

InN

0.65

1.91

infrared

3.45

InP

1.36

0.92

GaAs

1.42

0.87

GaP

2.26

0.55

AlP

3.39

0.51

5.45

GaN

2.45

0.37

3.19

AlN

6.20

0.20

5.87
red
Red
yellow
Yellow
blue
Green
violet
Blue

binary semiconductors:
-Ex:GaAs,efficientemitter

ternary semiconductor :
-Ex:GaAs1-xPx , tunable Eg (to
varythecolor)

5.66

5.46

UV

3.11

quaternary semiconductors:
-Ex:AlInGaP,tunableEgand
latticeconstant(forgrowinghigh
qualityepitaxialfilmson
inexpensivesubstrates)

Light-emittingdiodematerials
Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-45

CommonLEDs
Spectral
range

Material
System

Substrate

Infrared

InGaAsP

InP

Infrared
-Red

GaAsP

GaAs

Indicatorlamps.Remote
control

AlInGaP

GaAor
GaP

Opticalcommunication.
High-brightnesstraffic
signallights

GreenBlue

InGaN

GaNor
sapphire

Highbrightnesssignal
lights.
Videobillboards

Blue-UV

AlInGaN

GaNor
sapphire

Solid-statelighting

RedBlue

Organic
semiconductors

glass

RedYellow

ExampleApplications

Opticalcommunication

AlInGaP
QuantunWell

Displays

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-46

4.13.2Solid-StateLighting
luminosity (lumen,lm): a measure of visible light energy
normalized to the sensitivity of the human eye at
different wavelengths
Incandescent
lamp

Compact
fluorescent
lamp

Tube
fluorescent
lamp

17

60

50-100

White
LED

Theoretical limit at
peak of eye sensitivity
( =555nm)

Theoretical limit
(white light)

683

~340

90-?

Luminousefficacyoflampsinlumen/watt
OrganicLightEmittingDiodes(OLED) :
has lower efficacy than nitride or aluminide based compound semiconductor LEDs.

Terms: luminosity measured in lumens. luminousefficacy,


Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-47

4.14DiodeLasers
4.14.1LightAmplification
(a) Absorption

(d) Net Light


Absorption

(b) Spontaneous
Emission

(e) Net Light


Amplification

(c) Stimulated
Emission

Lightamplificationrequires
population inversion:electron
occupationprobabilityis
largerforhigherEstatesthan
lowerEstates.

Stimulatedemission:emittedphotonhasidenticalfrequencyand
directionalityasthestimulatingphoton;lightwaveisamplified.
Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-48

4.14.1LightAmplificationinPNDiode
Population inversion
is achieved when
qV E fn E fp E g

Equilibrium,V=0

Populationinversion,qV>Eg

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-49

4.14.2OpticalFeedbackandLaser
P+
light
out
Cleaved
crystal
plane

N+

Laser threshold is reached (light


intensity grows by feedback)
when

R1 R2 G 1
R1,R2: reflectivities of the two
ends
G: light amplification factor (gain)
for a round-trip travel of the light
through the diode

Light intensity grows until R1 R2 G 1 , when the light intensity


is just large enough to stimulate carrier recombinations at the same
rate the carriers are injected by the diode current.
Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-50

4.14.2OpticalFeedbackandLaserDiode
Distributed Bragg
reflector (DBR) reflects
lightwithmulti-layersof
semiconductors.
Vertical-cavity surfaceemitting laser (VCSEL) is
shownontheleft.
Quantum-welllaserhas
smallerthresholdcurrent
becausefewercarriers
areneededtoachieve
populationinversionin
thesmallvolumeofthe
thinsmall-Egwell.
Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-51

4.14.3 Laser Applications


Red diode lasers: CD, DVD reader/writer
Blue diode lasers: Blu-ray DVD (higher storage density)
1.55 m infrared diode lasers: Fiber-optic communication

4.15 Photodiodes
Photodiodes: Reverse biased PN diode. Detects photogenerated current (similar to Isc of solar cell) for optical
communication, DVD reader, etc.
Avalanche photodiodes: Photodiodes operating near
avalanche breakdown amplifies photocurrent by impact
ionization.
Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-52

Part III: Metal-Semiconductor Junction


Two kinds of metal-semiconductor contacts:
Rectifying Schottky diodes: metal on lightly
doped silicon
Low-resistance ohmic contacts: metal on

heavily doped silicon

Modern Semiconductor Devices for Integrated Circuits (C.


Hu)

Slide 4-53

Bn Increases with Increasing Metal Work Function

Vacuum level, E0

M : Work Function
of metal

Si = 4.05 eV

qM
qBn

Ec

Si : Electron Affinity of Si

Ef

Ev

Theoretically,
Bn=M Si

Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-54

4.16 Schottky Barriers


Energy Band Diagram of Schottky Contact
Metal

Depletion
layer

Neutral region

q Bn
N-Si

Ec
Ef

Schottky barrier height, B ,


Ev
Ec

P-Si
q Bp

Ef
Ev

is a function of the metal


material.
B is the most important
parameter. The sum of qBn
and qBp is equal to Eg .

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-55

Schottky barrier heights for electrons and holes

Bn + Bp Eg
Bn increases with increasing metal work function

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-56

Fermi Level Pinning

Vacuum level, E0

Si = 4.05 eV

q
M
qBn

Ec

A high density of
energy states in the
bandgap at the metalsemiconductor interface
pins Ef to a narrow
range and Bn is

Ef

typically 0.4 to 0.9 V

Ev

Question: What is the


typical range of Bp?

Modern Semiconductor Devices for Integrated Circuits (C.


Hu)

Slide 4-57

Schottky Contacts of Metal Silicide on Si


Silicide: Asiliconandmetalcompound.Itisconductive
similartoametal.
Silicide-Si interfaces are more stable than metal-silicon
interfaces. After metal is deposited on Si, an annealing step is
applied to form a silicide-Si contact. The term metal-silicon
contact includes and almost always means silicide-Si contacts.

Silicide ErSi1.7 HfSi MoSi2 ZrSi2 TiSi2 CoSi2 WSi2 NiSi2 Pd2Si PtSi
BnBn (V) 0.28 0.45 0.55 0.55 0.61 0.65 0.67 0.67 0.75 0.87
0.55 0.49 0.45 0.45 0.43 0.43 0.35 0.23
BpBp (V)

Modern Semiconductor Devices for Integrated Circuits (C.


Hu)

Slide 4-58

Using C-V Data to Determine B


qbi

qBn

Ec
Ef

Ev
qBn

q(bi + V)
qV

Ec
Ef
Ev

qbi q Bn ( Ec E f )
Nc
q Bn kT ln
Nd
Wdep

2 s (bi V )
qN d

s
C
A
Wdep
Question:
How should we plot the CV
data to extract bi?

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-59

Using CV Data to Determine B


1/C2

1
2(bi V )

2
C
qN d s A2
V

bi

qBn

qbi

Ec
Ef

Once bi is known, can


be determined using

E
v

Nc
qbi qBn ( Ec E f ) qBn kT ln
Nd
Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-60

4.17 Thermionic Emission Theory


vthx

Metal

N-type
Silicon

Efm

q( B V)

qB

qV

Ec
Efn

Ev

2mn kT
h 2

n N c e q ( B V ) / kT 2
vth 3kT / mn
J S M

3/ 2

e q ( B V ) / kT

vthx 2kT / mn

1
4qmn k 2 2 q B / kT qV / kT
qnvthx
T e
e
3
2
h
J 0 e qV / kT , where J o 100e q B / kT A/cm 2

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-61

4.18 Schottky Diodes

Forward
biased

V=0

Reverse
biased

Reverse bias

Modern Semiconductor Devices for Integrated Circuits (C.


Hu)

V
Forward bias

Slide 4-62

4.18 Schottky Diodes

I 0 AKT 2 e q B / kT
4qmn k 2
2
2
K

100
A/(cm

K
)
3
h
I I S M I M S I 0 e qV / kT I 0 I 0 (e qV / kT 1)
Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-63

4.19 Applications of Schottly Diodes


I I

Schottky
Schottkydiode

I I 0 (e qV / kT 1)
I 0 AKT 2 e q B / kT

BB

PNjunction
PN
junction
diode

V
V

I0 of a Schottky diode is 103 to 108 times larger than a PN

junction diode, depending on B . A larger I0 means a smaller


forward drop V.
A Schottky diode is the preferred rectifier in low voltage,
high current applications.
Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-64

Switching Power Supply

PN Junction
rectifier
110V/220V

AC

utility
power

Schottky
rectifier

Transformer
100kHz
Hi-voltage

Hi-voltage

DC

MOSFET

AC

Lo-voltage

AC

50A
1V

DC

inverter

feedback to modulate the pulse width to keep Vout = 1V

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-65

4.19 Applications of Schottky diodes


Question: What sets the lower limit in a Schottky diodes
forward drop?
Synchronous Rectifier: For an even lower forward drop,
replace the diode with a wide-W MOSFET which is not
bound by the tradeoff between diode V and leakage current.
There is no minority carrier injection at the Schottky
junction. Therefore, Schottky diodes can operate at higher
frequencies than PN junction diodes.

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-66

4.20 Quantum Mechanical Tunneling

Tunneling probability:

P exp( 2T

8 2 m
(VH E ) )
2
h

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-67

4.21 Ohmic Contacts

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-68

4.21 Ohmic Contacts


Wdep

2 s Bn
qN d

Silicide

N+ Si

Bn

Ec , Ef

Bn V

Efm

Ec , Ef

Tunneling
probability:

Pe

H Bn

Nd

T Wdep / 2
4
H
h
J S M

Ev

Ev
x

sBn / 2 qN d

s mn / q
1
qN d vthx P qN d
2

kT / 2mn e

Modern Semiconductor Devices for Integrated Circuits (C.


Hu)

H ( Bn V ) /

Nd

Slide 4-69

4.21 Ohmic Contacts

dJ S M
Rc

dV

H Bn / N d

2e
H Bn /

e
qvthx H N d

Modern Semiconductor Devices for Integrated Circuits (C.


Hu)

Nd

cm 2

Slide 4-70

4.22 Chapter Summary


Part I: PN Junction
The potential barrier
increases by 1 V if a 1 V
reverse bias is applied

kT N d N a
bi
ln
2
q
ni
depletion width

junction capacitance

Wdep

2 s potential barrier
qN

Cdep

s
A
Wdep

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-71

4.22 Chapter Summary


Under forward bias, minority carriers are injected
across the jucntion.
The quasi-equilibrium boundary condition of
minority carrier densities is:

n( x p ) nP 0 e qV
p ( x N ) p N 0 e qV

kT
kT

Most of the minority carriers are injected into the


more lightly doped side.

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-72

4.22 Chapter Summary


Steady-state
continuity equation:
d 2 p
p
p

2
2
dx
D p p L p

L p D p p

Minority carriers
diffuse outward e|x|/Lp
and e|x|/Ln
Lp and Ln are the
diffusion lengths
I I 0 (e qV

1)

Dn

L N

p d Ln N a

I 0 Aqni
2

kT

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Dp

Slide 4-73

4.22 Chapter Summary

Charge storage:

Q I s

Diffusion capacitance:

C sG

Diode conductance:

G I DC

kT
/
q

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-74

4.22 Chapter Summary


Part II: Optoelectronic Applications
Solar cell power I sc Voc FF
~100um Si or <1um directgap semiconductor can absorb most of solar
photons with energy larger than Eg.
Carriers generated within diffusion length from the junction can be
collected and contribute to the Short Circuit Current I sc.
Theoretically, the highest efficiency (~24%) can be obtained with 1.9eV
>Eg>1.2eV. Larger Eg lead to too low Isc (low light absorption); smaller Eg
leads to too low Open Circuit VoltageVoc.
Si cells with ~15% efficiency dominate the market. >2x cost reduction
(including package and installation) is required to achieve cost parity with
base-load non-renewable electricity.
Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-75

4.22 Chapter Summary


LED and Solid-State Lighting
Electron-hole recombination in direct-gap semiconductors such as GaAs
produce light.
Tenary semiconductors such as GaAsP provide tunable E g and LED color.
Quatenary semiconductors such as AlInGaP provide tunable E g and lattice
constants for high quality epitaxial growth on inexpensive substrates.
Beyond displays, communication, and traffic lights, a new application is
space lighting with luminous efficacy >5x higher than incandescent lamps.
White light can be obtained with UV LED and phosphors. Cost still an issue.
Organic semiconductor is an important low-cost LED material class.

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-76

4.22 Chapter Summary


Laser Diodes
Light is amplified under the condition of population inversion states at
higher E have higher probability of occupation than states at lower E.
Population inversion occurs when diode forward bias qV > E g.
Optical feedback is provided with cleaved surfaces or distributed Bragg
reflectors.
When the round-trip gain (including loss at reflector) exceeds unity, laser
threshold is reached.
Quantum-well structures significantly reduce the threshold currents.
Purity of laser light frequency enables long-distance fiber-optic
communication. Purity of light direction allows focusing to tiny spots and
enables DVD writer/reader and other application.
Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-77

4.22 Chapter Summary


Part III: Metal-Semiconductor Junction
I 0 AKT 2 e qB / kT
Schottky diodes have large reverse saturation current, determined by the
Schottky barrier height B, and therefore lower forward voltage at a given
current density.
Ohmic contacts relies on tunneling. Low resistance contact requires
low B and higher doping concentration.

Rc e

4
B s mn / qN d )
h

cm 2

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-78

Bn Increases with Increasing Metal Work Function

Vacuum level, E0

Si = 4.05 eV

qM
q Bn

Ideally,
Bn=M Si
Ec
Ef

Ev

Modern Semiconductor Devices for Integrated Circuits (C. Hu)

Slide 4-79

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