I HC QUC GIA THNH PH H CH MINH TRNG I HC KHOA HC T NHIN KHOA VT L VT L K THUT B MN VT L NG DNG SEMINAR:

KNH HIN VI LC NGUYN T AFM (ATOMIC FORCE MICROSCOPE)

GVHD: TS. L V Tun Hng HVTH : Nguyn Quang Khi Phan Th Kiu Loan Lp Quang Hc K21

NI DUNG
I. Gii thiu AFM v lch s pht trin

II. Cu to ca AFM
III.Nguyn l ca AFM

IV.u v nhc im
V.So snh vi cc phng php khc

VI.. ng dng

I.GII THIU AFM V LCH S PHT TRIN

* Gii

thiu AFM

-L mt loi knh hin vi qut c phn gii rt cao c khong nan mt. -L thit b quan st cu trc vi m b mt ca vt rn da trn nguyn tc xc nh lc tng tc nguyn t gia mt u mi d nhn vi b mt ca mu.

Lch s pht trin

- Scanning Tunneling Microscopy Rohrer and Binnig 1982 - Atomic Force Microscopy (AFM/SFM) Binnig et al 1986

nh chp chic AFM u tin lu gi ti bo tng khoa hc Lun n

II. Cu to ca AFM
Gm c 6 b phn chnh

Mt mi nhn. Cn qut ( cantilever).

Ngun Laser. Phn x gng (mirror ). Hai na tm pin quang in (photodiod) B qut p in

S KHI CA MY AFM

II.1 MI D

- c lm bng silic nitrit(Si3N4), kch thc khong mt nguyn t, c chiu cao khong 2.8m. - Bn knh mi d nh nht c th t c l 400 A0 to nn nh qut c phn gii cao.

II.1 MI D

sc nhn ca tip ng vai tr chnh yu trong phn gii hnh nh ca AFM

Trng hp su ca hnh hc b mt ln hn chiu di ca mi d cng lm gim phn gii hnh nh

II.2.CN RUNG (Cantilever):

N cng c cu to t Si3N4

II.3.Ngun laser

II.4.Mirror ( phn x gng)

II. 5.Hai na tm pin quang in (photodiode)

S phn x chm tia laser ti u cn rung

II. 6.B qut p in:

III. NGUYN L CA AFM

Da trn lc tng tc nguyn t Van Der Waals gia mi d vi b mt mu. Khi mi nhn qut gn b mt mu s xut hin lc Van der Waals gia cc nguyn t lm rung thanh rung. Dao ng ca thanh rung do lc tng tc c ghi li nh mt tia laser chiu qua b mt ca thanh rung. Dao ng ca thanh rung lm thay i gc lch ca tia laser ,tia laser b phn x vo nhng v tr khc nhau ca b phn cm bin quang photo diode v c detector ghi li. => t b phn cm bin ghi nhn c mc cong khc nhau ca cn rung v m ha li mp m ca b mt mu . Do vy ta thu c hnh nh cu trc b mt ca mu vt

S gii thch c ch lm vic caknh hin vi lc nguyn t

Khi u d qut ln b mt mu,do s mp m ca b mt mu u d s rung ln theo phng thng ng, chm tia laze phn x trn cn qut s b x dch.

Chiu chm tia laze vo mt phn x ca cn qut

Khi u d a li gn b mt mu th xut hin nhng lc gia u d v b mt mu.

My AFM c th thao tc trong nhiu ch khc nhau

Ch tip xc ( Contact Mode) Ch khng tip xc ( Non- Contact Mode)
Ch tapping.

CHE O TIEP XUC CONTACT MODE

Tip c tiep xuc va keo le tren be mat mau va cho anh a hnh Lc tac dung la lc ay khoang 10-9N Nhc iem cua phng phap: de pha huy be mat mau va tip, hnh anh de b meo (nhieu) do lp vat chat hap phu tren be mat mau lam nhieu lc ay. Ch co the khac phuc neu AFM hoat ong trong moi trng chan khong cao

CHE O KHONG TIEP XUC NON-CONTACT MODE

Trong che o nay au do luon c gi mot khoang cach rat nho ngay sat be mat mau (10-15 nm), s thay oi o lech cua lo xo la do thay oi lc hut se c ghi nhan va tao anh 3 chieu tren be mat mau. Khuyet iem: lc hut qua yeu va au do phai at sat be mat mau de b keo xuong be mat mau do lc cang be mat cua nhng lp kh hap phu tren mat mau. Hnh anh co o phan giai kem va de b sai lech

CHE O TAPPING TAPPING MODE

Che o nay tranh c keo le au do tren be mat mau lam hong mau cung nh tranh c lc bam dnh gia mau va au do, tranh c nhieu hnh anh do nhng lp chat long bam tren be mat mau Trong che o nay au do go len be mat mau vi nang lng u ln c tien hanh bang cach cho tip tiep xuc be mat mau sau o tiep c nang len e tranh cao xc be mat mau

Phn tch ph ca AFM

V AFM hot ng da trn vic o lc tc dng nn n c mt ch phn tch ph, gi l ph lc AFM (force spectrocopy), l ph phn b lc theo khong cch. Cc ph ny c th cung cp nhiu thng tin v cu trc nguyn t ca b mt cng nh cc lin kt ha hc.

IV.1 u im ca AFM
1/ o c c vt dn in v vt khng dn in. 2./ AFM khng i hi mi trng chn khng cao, c th hot ng ngay trong mi trng bnh thng. 3./ AFM cng c th tin hnh cc thao tc di chuyn v xy dng cp tng nguyn t, mt tnh nng mnh cho cng ngh nano. 4./ Mu chun b n gin, cho thng tin y hn so vi hnh nh ca hin vi in t truyn qua. 5/AFM cung cp nhng php o cao trc tip v a hnh ca mu v nhng hnh nh kh r rng v nhng c trng b mt mu (khng cn lp bao ph mu)

 6/ AFM cung cp thng tin ba chiu ca b mt mu.

IV.2 Nhc im ca AFM

AFM qut nh trn mt din tch hp (ti a n 150 micromet). Tc ghi nh chm do hot ng ch qut. Cht lng nh b nh hng bi qu trnh tr ca b qut p in.

u d rung trn b mt nn km an ton, ng thi i hi mu c b mt sch v s chng rung.

V. SO SNH AFM VI CC PHNG PHP KHC

So vi SEM : AFM cho hnh nh v a hnh b mt ,xc nh c cao thp ( mp m b mt) vi tng phn rt cao. B mt mu khng cn phi ph lp dn in So vi TEM : cng c th thu c hnh nh ba chiu t AFM nhng khng cn phi chun b mu cng phu v t tin nh TEM ( trng hp TEM o mt ct ca mu )

 So vi knh hin vi quang hc: phn gii ca AFM cao hn gp nhiu ln So vi STM : khc vi STM ch xc nh c hnh nh b mt ca vt liu dn , AFM c th xc nh c hnh nh ca nhiu loi b mt vt liu khc nhau, c vt liu dn in ln khng dn in nh: kim loi, bn dn ,gm , sinh hc c bit AFM c th hot ng ngoi khng kh .

VI. ng dng ca AFM

Hin nay AFM rt thng dng trn ton th gii , trong nhiu lnh vc nghin cu c bit l nghin cu mng mng v vt liu nano. AFM l phng php h tr b sung cho cc phng php STM, TEM, SEM, cc phng php quang v STYLUS

ng dng ca AFM
AFM c cc ng dng nh:
Chp nh ct lp nhanh. M t, phn tch, xc nh c im b mt. Kim sot cht lng, kim tra khuyt tt vt liu,. o c hc n phn t. AFM c ng dng trong nhiu lnh vc nh: cng ngh nano(nanotechnology), cng ngh bn dn, dc phm, sinh hc,cng ngh vt liu.v.v.

Mt s hnh nh v ng dng ca AFM

y l hnh nh ca hnh cu GaAs ng knh trong o c l 30 nm. Hnh nh ny c o trongch Close-Contact.

Lp vng dy 400 nanometer bc hi trn mt lp b mt silicon. Sau khi ngm trong dung dch axit KI va I2, hnh nh ny c chp bi my AFM ch tapping mode vi phng i 20000

 Hnh nh 2-D ca a ghi DVD hin th cc lin kt ca bit. Bt k khuyt tt trn b mt c d dng xc nh trong hnh nh 2D.

Hnh nh ca mt khi vt cht b khim khuyt chp bng my AFM

Hnh nh chp bng AFM ca lp ph polymer mm trn cnh ca mt li dao gip lm sng t c ch ca s tch t polymer trn b mt thp

Hnh chp bng AFM ca mt chui DNA c hnh dung nh mt phc hp mng RecA protein. C 2 hnh l ca cng mt phn t, ngoi tr mu sc khc nhau Scan courtesy J. Brockman, F. Harmon and S. Kowalczykowski, University of California, USA

CHN THNH CM N THY V CC BN QUAN TM THEO DI !